Sheet pasting device and sheet pasting method

Abstract

To provide a sheet pasting device and a sheet pasting method that prevent the tip end of an adhesive sheet in the supply direction from coming off an adherend before the tip end is pasted to the adherend by protruding area pasting means.SOLUTION: A sheet pasting device EA includes supply means 10 for supplying an adhesive sheet AS along a predetermined supply direction SD, pressing means 20 for pressing the adhesive sheet AS against an outer edge end surface WKE such that at least one of the one end AS1 side and the other end AS2 side along the supply direction SD of the adhesive sheet AS supplied by the supply means 10 forms a protruding area ASH protruding from the outer edge end surface WKE of an adherend WK, moving means 30, protruding area pasting means 40, and tip end pasting means 50 for bending and pasting only the protruding area ASH at the tip end ASF of the adhesive sheet AS in the supply direction to other surfaces WK1 and WK2.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a sheet sticking device and a sheet sticking method. [Background technology]

[0002] BACKGROUND ART Sheet application devices for applying adhesive sheets to adherends are known (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2022-30877 Summary of the Invention [Problem to be solved by the invention]

[0004] In the tape application system (sheet application device) described in Patent Document 1, the protective tape 27 (adhesive sheet) applied to the outer peripheral side surface (outer edge surface) of the wafer W (adherend) by the side roller 43 (pressing means) has a small adhesive area at the leading end in the supply direction, which causes the disadvantage that the leading end of the adhesive sheet in the supply direction comes off the adherend before reaching the first roller 46 (excess area application means).

[0005] An object of the present invention is to provide a sheet application device and a sheet application method that can minimize the possibility that the leading end of the adhesive sheet in the supply direction will come off the adherend before being applied to the adherend by the protruding area application means. [Means for solving the problem]

[0006] The present invention employs the configurations described in the claims. [Effects of the Invention]

[0007] According to the present invention, prior to application by the protrusion area application means, only the protrusion area at the leading end of the adhesive sheet in the supply direction is folded in a different plane direction and applied, thereby increasing the adhesive area of ​​the leading end in the supply direction to the adherend, thereby minimizing the possibility of the leading end of the adhesive sheet becoming detached from the adherend before being applied to the adherend by the protrusion area application means. [Brief explanation of the drawings]

[0008] [Figure 1] 1A and 1B are explanatory diagrams of a sheet sticking device according to an embodiment of the present invention and an operation explanatory diagram of the device. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this embodiment, the X-axis, Y-axis, and Z-axis are orthogonal to each other. The X-axis and Y-axis are axes within a predetermined plane, and the Z-axis is an axis perpendicular to the predetermined plane. Furthermore, in this embodiment, the view from below in FIG. 1 parallel to the Y-axis is used as the reference. When directions are indicated without specifying the view, "up" refers to the direction of the Z-axis arrow, "down" refers to the opposite direction, "left" refers to the direction of the X-axis arrow, "right" refers to the opposite direction, "front" refers to the direction toward the viewer in FIG. 1 parallel to the Y-axis, and "rear" refers to the opposite direction. Note that FIG. 1(D) is a view taken along arrow AA in FIG. 1(E), FIG. 1(F) is a view taken along arrow BB in FIG. 1(E), and FIG. 1(G) is a view taken along arrow CC in FIG. 1(E).

[0010] The sheet attachment apparatus EA of the present invention includes: a supplying means 10 which performs a supplying step of supplying an adhesive sheet AS along a predetermined supplying direction SD; a pressing means 20 which performs a pressing step of pressing the adhesive sheet AS against the outer peripheral end face WKE of the adherend WK so that both one end AS1 side and the other end AS2 side along the supplying direction SD of the adhesive sheet AS supplied by the supplying means 10 form an overhanging region ASH that overhangs the outer peripheral end face WKE of the adherend WK; a moving means 30 which performs a moving step of moving the pressing means 20 and the adherend WK relatively to attach the adhesive sheet AS to the outer peripheral end face WKE; an overhanging region attaching means 40 which performs an overhanging region attaching step of folding and attaching the overhanging region ASH in the direction of one surface WK1 and the other surface WK2 which are other surfaces adjacent to the outer peripheral end face WKE; and a moving means 30 which is located between the pressing means 20 and the overhanging region attaching means 40 and which moves the overhanging region ASH. The apparatus is provided with a leading end pasting means 50 that performs a leading end pasting step in which only the protruding area ASH at the leading end ASF in the supply direction of the adhesive sheet AS is folded and pasted in the direction of one side WK1 and the other side WK2 prior to pasting by the area pasting means 40; a folding notch forming means 60 that performs a folding notch forming step in which a folding notch ASC (see Figure 1 (C)) that serves as a starting point for folding the adhesive sheet AS is formed in the adhesive sheet AS; a tensioning means 70 that performs a tensioning step in which tension is applied in the direction along the supply direction SD to the adhesive sheet AS located between the supplying means 10 and the pressing means 20, thereby folding the protruding area ASH in the direction of one side WK1 and the other side WK2; and an energy applying means 80 that performs an energy applying step in which heat is applied to the adhesive sheet AS as a predetermined energy. The adhesive sheet of this embodiment is provided to be elastically deformable and is deformed by heat as a predetermined energy. In addition, the adherend WK in this embodiment has a circular shape centered on the adherend center WKR.

[0011] The supply means 10 includes a support member 11 that directly or indirectly supports each component of the supply means 10, a support roller 12 that supports the raw roll RS on which the adhesive sheet AS is temporarily attached to the strip-shaped release sheet RL, a guide roller 13 that guides the raw roll RS, a peeling plate 14 as a peeling means that folds the release sheet RL at the peeling edge 14A and peels the adhesive sheet AS from the release sheet RL, a drive roller 15 that is supported by an output shaft (not shown) of a rotary motor 15A as a drive device and pinches the release sheet RL between itself and a pinch roller 15B, and a recovery roller 16 that is supported by an output shaft (not shown) of the drive device and constantly applies a predetermined tension to the release sheet RL that is between itself and the pinch roller 15B while the sheet application device EA is operating automatically, and recovers the release sheet RL.

[0012] The pressing means 20 includes a pressing roller 21 rotatably supported by a bracket (not shown).

[0013] The moving means 30 includes a linear motor 31 as a driving device, a rotary motor 32 as a driving device supported by a slider 31A of the linear motor 31, and a support table 33 supported by an output shaft 32A of the linear motor 31 and having a support surface 33A that can be sucked and held by a pressure reducing means (holding means) (not shown) such as a pressure reducing pump or a vacuum ejector. The support table 33 is configured to rotate around a table center 33R by the rotary motor 32.

[0014] The protruding area attachment means 40 includes first, second, and third pressure rollers 41, 42, and 43 rotatably supported by a bracket (not shown). In this embodiment, the first, second, and third pressure rollers 41, 42, and 43 are arranged in pairs, one above the other, as shown in Figures 1(F) to 1(H). When the adherend center WKR of the adherend WK is positioned at the roller placement center 40R, the protruding area ASH of the adhesive sheet AS attached to the outer edge surface WKE of the adherend WK can be bent toward one surface WK1 and the other surface WK2. The first, second, and third pressure rollers 41, 42, and 43 rotate about rotation axes (not shown) inclined toward the roller placement center 40R by, for example, 30 degrees, 60 degrees, and 90 degrees, respectively, relative to the Z axis.

[0015] The tip attachment means 50 comprises a linear motor 51 as a driving device, a first bracket 52 supported on its output shaft 51A, two second brackets 53 supported so as to be swingable by the first bracket 52 and each supporting one clamping roller 54 rotatably, and a coil spring 55 as a biasing means for biasing the clamping rollers 54 in a direction to bring them closer to each other.

[0016] The folding notch forming means 60 includes a folding notch forming roller 61 rotatably supported on the peeling plate 14, a linear motor 62 as a torque-controllable driving device, and a pressing roller 63 rotatably supported on its output shaft 62A and pressing the raw web RS against the folding notch forming roller 61. The folding cutout forming roller 61 is disk-shaped with a tapered outer edge, and when the raw sheet RS is pressed by the pressing roller 63, a groove-shaped impression is formed on the adhesive surface of the adhesive sheet AS, and this impression becomes the folding cutout ASC.

[0017] The tension applying means 70 includes a rotary motor 71 as a torque-controllable driving device, and a driving roller 72 supported by an output shaft (not shown) of the rotary motor 71 and pinching the raw web RS between itself and a pinch roller 73 .

[0018] The energy applying means 80 includes a hot air blower 81 that blows hot air heated by a heating device (not shown) such as a coil heater or the heating side of a heat pipe.

[0019] The operation of the sheet sticking apparatus EA will now be described. First, a user of the sheet applicator EA (hereinafter simply referred to as "user") sets the raw web RS in the sheet applicator EA, with each component positioned in the initial position shown by the solid lines in Fig. 1(A), and then inputs a signal to start automatic operation via an operation means (not shown), such as an operation panel or a personal computer. Then, the folding notch forming means 60 drives the linear motor 62, and as shown by the two-dot chain line in Fig. 1(A), the folding notch forming roller 61 and the pressing roller 63 sandwich the raw web RS with a predetermined pressing force. At this time, the leading adhesive sheet AS of the raw web RS is not sandwiched between the folding notch forming roller 61 and the pressing roller 63. Next, the supply means 10 and tension applying means 70 drive the rotary motors 15A and 71 to pay out the raw web RS, and as shown by the two-dot chain line in Figure 1(A), when the leading edge ASF in the supply direction of the leading adhesive sheet AS is peeled off by a predetermined length at the peeling edge 14A of the peeling plate 14, the driving of the rotary motors 15A and 71 is stopped. When the adhesive sheet AS passes between the folding notch forming roller 61 and the pressing roller 63, the folding notch forming roller 61 forms a groove-shaped folding notch ASC on the adhesive surface side along the supply direction SD.

[0020] Thereafter, a user or a conveying means (not shown), such as an articulated robot or a belt conveyor, places the adherend WK on the support surface 33A so that the adherend center WKR coincides with the table center 33R, as shown in Fig. 1(A). The moving means 30 then drives the pressure reducing means (not shown), which begins suction and holding the adherend WK on the support surface 33A. The supplying means 10 and the tensioning means 70 then drive the rotary motors 15A and 71 to pay out the raw web RS, and position the leading edge ASF of the adhesive sheet AS in the supply direction at a predetermined position in front of the pressure roller 21, as shown in Fig. 1(B). At this time, the leading edge ASF of the adhesive sheet AS in the supply direction is brought into contact with the front of the pressure roller 21 by the force of a force applying means (not shown), such as an air nozzle or ionizer.

[0021] Next, the moving means 30 drives the linear motor 31 to move the adherend WK to the left, and as shown in Figures 1(B) and 1(C), when the table center 33R (adherend center WKR) coincides with the roller arrangement center 40R, the driving of the linear motor 31 is stopped. At this time, the adhesive sheet AS is in a state where the folding notch ASC faces the outer edge face WKE, and the feed direction leading edge portion ASF is sandwiched between the pressure roller 21 and the outer edge face WKE, as shown in Figures 1(B) and 1(C). Note that, by having the folding notch ASC facing the outer edge face WKE, the protruding region ASH is easily bent in the directions of one face WK1 and the other face WK2, and the adhesive sheet AS can be folded more smoothly.

[0022] The supplying means 10, moving means 30, and tensioning means 70 then drive the rotary motors 15A, 32, and 71 to rotate the adherend WK in the counterclockwise direction RD as viewed from above, while supplying the adhesive sheet AS. As a result, the adhesive sheet AS is pressed by the pressure roller 21 and adhered to the outer edge surface WKE, and when the leading edge ASF of the adhesive sheet AS in the feed direction reaches a predetermined position in front of the clamping roller 54, the supplying means 10, moving means 30, and tensioning means 70 stop driving the rotary motors 15A, 32, and 71. When adhering the adhesive sheet AS to the outer edge surface WKE, the tensioning means 70 drives the rotary motor 71, detects the torque applied from the adhesive sheet AS via the drive roller 72, and supplies the adhesive sheet AS while maintaining the torque at a predetermined value, thereby applying tension to the adhesive sheet AS in the feed direction SD. As a result, the elastically deformable adhesive sheet AS has an inherent elastic restoring force such that the protruding regions ASH on one end AS1 side and the other end AS2 side are bent toward one surface WK1 side and the other surface WK2 side, as shown in Fig. 1(C). At this time, the formation of the folding notches ASC in the adhesive sheet AS makes it easier for the protruding regions ASH to bend toward one surface WK1 and the other surface WK2 side, allowing the adhesive sheet AS to be folded smoothly.

[0023] Next, the leading edge attaching means 50 drives the linear motor 51, and as shown in the two-dot chain line in Fig. 1(D) and Fig. 1(E), the pinch roller 54 advances, and the supply direction leading edge ASF of the adhesive sheet AS is attached to the adherend WK by the pinch roller 54, and then the pinch roller 54 returns to its initial position. Thereafter, the supplying means 10, moving means 30, tensioning means 70, and energy applying means 80 drive the rotary motors 15A, 32, 71 and hot air blower 81, and the adhesive sheet AS is fed while rotating the adherend WK in the counterclockwise direction RD when viewed from above. As a result, the adhesive sheet AS has the protruding region ASH folded in stages by the first, second, and third pressure rollers 41, 42, and 43, as shown by the two-dot chain line in FIG. 1(E) and in FIGS. 1(F), 1(G), and 1(H). Finally, the protruding region ASH on one end AS1 side is affixed to one side WK1, and the protruding region ASH on the other end AS2 side is affixed to the other side WK2. Even in this case, the formation of the folding notches ASC in the adhesive sheet AS makes it easier for the protruding region ASH to bend toward the one side WK1 and the other side WK2, allowing the adhesive sheet AS to be folded smoothly. The hot air blown by the hot air blower 81 deforms the adhesive sheet AS, bending both protruding regions ASH toward the adherend WK, making it easier for the protruding regions ASH to be affixed to the adherend WK.

[0024] Next, when the leading end ASF in the supply direction of the next adhesive sheet AS following the leading adhesive sheet AS has been peeled off by a predetermined length at the peeling edge 14A of the peeling plate 14, the supplying means 10 and tensioning means 70 stop driving the rotary motors 15A and 71, thereby stopping the feeding of the raw sheet RS. Then, when both protruding regions ASH at the trailing end ASR in the supply direction of the leading adhesive sheet AS are attached to one surface WK1 and the other surface WK2 by the third pressure roller 43 to form an integrated object UP, the moving means 30 and energy applying means 80 stop driving the rotary motor 32 and hot air blower 81. The leading end ASF and trailing end ASR of the adhesive sheet AS attached to the adherend WK may overlap, be spaced apart, or be in contact so as to be butted against each other.

[0025] Next, the moving means 30 drives the linear motor 31 to return the support table 33 to its initial position, and then stops driving the pressure reducing means (not shown), releasing the suction and holding on the support surface 33A. Thereafter, the user or the transport means (not shown) transports the integrated object UP to the next process, and the same operations as above are repeated thereafter.

[0026] According to the embodiment described above, only the protruding region ASH at the leading edge ASF of the adhesive sheet AS in the feed direction is folded toward one surface WK1 and the other surface WK2 and attached prior to attachment by the protruding region attachment means 40, thereby increasing the adhesive area of ​​the leading edge ASF to the adherend WK. This makes it possible to minimize the likelihood that the leading edge ASF of the adhesive sheet AS will come off the adherend WK before being attached to the adherend WK by the protruding region attachment means 40.

[0027] The means and steps of the present invention are not limited in any way as long as they can perform the operations, functions, or steps described for those means and steps, and are in no way limited to the components and steps of a single embodiment shown in the above embodiment. For example, the supplying means may be any means capable of supplying an adhesive sheet in a predetermined supply direction, and is not limited in any way as long as it is within the scope of the common general technical knowledge at the time of filing (the same applies to other means and steps).

[0028] The supply means 10 may form a closed-loop slit or a slit extending over the entire short width direction in a strip-shaped adhesive sheet base material temporarily attached to a strip-shaped release sheet RL, and peel the adhesive sheet AS from the raw roll RS, in which the predetermined area partitioned by the slit is made into the adhesive sheet AS, and supply the adhesive sheet AS; alternatively, a strip-shaped adhesive sheet base material having a strip-shaped adhesive sheet base material temporarily attached to a strip-shaped release sheet RL is used, and while the strip-shaped adhesive sheet base material is being paid out, a cutting blade is used as cutting means to form a closed-loop slit or a slit extending over the entire short width direction in the adhesive sheet base material, and while the strip-shaped adhesive sheet base material is being paid out, the adhesive sheet AS is peeled from the raw roll RS, in which the predetermined area partitioned by the slit is made into the adhesive sheet AS, and supply the adhesive sheet AS; alternatively, The strip-shaped adhesive sheet AS may be peeled off from an original roll RS to which a release sheet RL has been temporarily attached and supplied, or the adhesive sheet AS may be peeled off from an original roll RS that has been folded, for example, fanfolded, and supplied without being rolled up, or a recovery means may be employed to recover the release sheet RL by, for example, fanfolding it without being rolled up, or by shredding it with a shredder or the like, or by piling it up randomly, or no recovery means may be employed, or the adhesive sheet AS that is not temporarily attached to the release sheet RL may be unwound and supplied, or a cutting means may be provided to cut the adhesive sheet AS attached to the adherend WK to a predetermined length.

[0029] The pressing means 20 may press the adhesive sheet AS supplied by the supply means 10 against the outer edge face WKE so that only one end AS1 of the adhesive sheet AS supplied by the supply means 10 along the supply direction SD forms an overhang area ASH that extends beyond the outer edge face WKE of the adherend WK, or may press the adhesive sheet AS against the outer edge face WKE so that only the other end AS2 of the adhesive sheet AS supplied by the supply means 10 along the supply direction SD forms an overhang area ASH that extends beyond the outer edge face WKE of the adherend WK.

[0030] The moving means 30 may move the pressing means 20 without or while moving the adherend WK, and may attach the adhesive sheet AS to the outer edge end surface WKE, or the linear motor 31 may be omitted, or a support table 33 that cannot be adsorbed and held on the holding surface 33A may be used, or an upper pressing means may be provided that clamps the adherend WK between the support table 33.

[0031] The protruding area attaching means 40 may move the first, second, and third pressure rollers 41, 42, and 43 without moving the adherend WK or while moving the adherend WK, and may fold and attach the protruding area ASH in the direction of another surface, or may fold and attach only the protruding area ASH on one end AS1 side in the direction of one surface WK1, or may fold and attach only the protruding area ASH on the other end AS2 side in the direction of the other surface WK2, the first, second, and third pressure rollers 41, 42, and 43 may not be a pair of upper and lower rollers, but may be provided only on one surface WK1 side or only on the other surface WK2 side, and the inclination angles of the first, second, and third pressure rollers 41, 42, and 43 with respect to the Z axis may be, for example, 15 degrees, 45 degrees, 91 degrees, etc. Any inclination angle is acceptable, and in the above embodiment, the protruding area ASH is bent in a different surface direction in three steps using the first, second, and third pressure rollers 41, 42, and 43, and then attached. However, the protruding area ASH may be bent in a different surface direction in four or more steps, two steps, or one step, and then attached. Alternatively, the protruding area ASH may be bent in a different surface direction and attached by using a guide plate, a rotating belt, air blowing, etc., instead of or in combination with rollers. Alternatively, the protruding area ASH may be moved relative to the adherend WK by the moving means 30, but may be moved relative to the adherend WK by, for example, another device or a driving device not shown, and then the protruding area ASH may be bent in a different surface direction and attached.

[0032] The leading end sticking means 50 may fold and stick only the protruding area ASH on one end AS1 side of the leading end ASF in the supply direction of the adhesive sheet AS in the direction of one surface WK1, or may fold and stick only the protruding area ASH on the other end AS2 side of the leading end ASF in the supply direction of the adhesive sheet AS in the direction of the other surface WK2, and the sandwiching rollers 54 may not be a pair of upper and lower rollers, but may be provided only on one surface WK1 side or only on the other surface WK2 side, and a guide plate, a running belt, or the like may be used instead of or in combination with the rollers. The protruding area ASH at the leading end ASF of the adhesive sheet AS in the supply direction may be bent in another surface direction by using a roller, air blowing, or the like, or the material of the clamping roller 54, etc. may be made of a material that can be elastically deformed such as rubber or resin, or a material that cannot be elastically deformed such as metal or glass, or only the protruding area ASH at the leading end ASF of the adhesive sheet SS in the supply direction may be bent in another surface direction by using an output shaft of a chuck cylinder, chuck motor, or the like, and the like.

[0033] The folding notch forming means 60 may be provided with a plurality of folding notch forming rollers 61 along a direction intersecting with the supply direction SD, and may form a plurality (two or more) of folding notches ASC as shown by the two-dot chain lines in Figs. 1(F) to 1(H), or the folding notch forming rollers 61 provided may be configured to move closer to and away from each other, and the interval between the folding notches ASC may be widened or narrowed, or the folding notch forming rollers 61 may be configured to move closer to and away from the adhesive sheet AS, or the pressing roller 63 may not be configured to move closer to and away from the adhesive sheet AS, or the adhesive sheet The user can arbitrarily determine the predetermined tension for nipping the raw sheet RS between the folding cut-out forming roller 61 and the pressing roller 63, taking into consideration the characteristics, properties, properties, material, composition, configuration, shape, dimensions, and weight of the adhesive sheet AS, atmospheric conditions, and other factors. Alternatively, a linear motor 62 that cannot be torque controlled may be employed, or a convex protrusion formed on the peeling plate 14 may be employed in place of or in combination with the folding cut-out forming roller 61, or a device that uses air or gas to blow air or gas may be employed to form an impression on the adhesive sheet AS, and the impression may be folded. Alternatively, the adhesive sheet AS may be pressed against the folding cut-out forming roller 61 to form the folding cut-out ASC by using a plate-like member instead of or in combination with the pressing roller 63, or by using a device that blows air or gas or the like, or the folding cut-out ASC may be formed in the adhesive sheet AS without the release sheet RL, or the folding cut-out ASC may be formed on the adhesive surface side of the adhesive sheet AS (the surface side to which the release sheet RL was attached), or on the non-adhesive surface side of the adhesive sheet AS (the surface side to which the release sheet RL was attached). The folding cut-out ASC may be formed on the adhesive surface side (the opposite side of the adhesive surface) of the adhesive sheet AS, or on both the adhesive surface side and the non-adhesive surface side of the adhesive sheet AS, or the folding cut-out ASC may be formed in a groove shape by grinding the adhesive sheet AS or by forming cuts in the adhesive sheet AS.In addition to the folding cut-out in a groove shape, for example, energy such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays or gamma rays, or heat such as hot water or hot air may be applied to the adhesive sheet AS, and the rigidity of the part irradiated with the energy may be made lower than the rigidity of other parts.This low rigidity portion may be used as a folding notch, and may or may not be provided in the sheet sticking apparatus EA of the present invention.

[0034] The tension applying means 70 can be determined by the user at will by taking into consideration various conditions such as the characteristics, properties, properties, material, composition, configuration, shape, dimensions and weight of the adhesive sheet AS, atmospheric conditions and other factors, or a rotary motor 71 that cannot be torque controlled may be used, or the tension applying means 70 may be configured to slidably grip the raw sheet RS or adhesive sheet AS and adjust the gripping force to apply tension in the direction along the feed direction SD to the adhesive sheet AS located between the supply means 10 and the pressing means 20, or may be configured to be located outside the supply means 10 and apply tension in the direction along the feed direction SD to the adhesive sheet AS, and may or may not be provided in the sheet application device EA of the present invention.

[0035] The energy applying means 80 may apply the specified energy in the form of electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays or gamma rays, or heat such as hot water or hot air, and may be determined arbitrarily taking into consideration the characteristics, properties, properties, material, composition and configuration of the adhesive sheet AS, and may or may not be provided in the sheet application device EA of the present invention.

[0036] The sheet application device EA may apply one adhesive sheet AS to one adherend WK, or may apply multiple adhesive sheets AS to one adherend WK, or may place a support member such as metal, glass, resin, or another adhesive sheet on at least one of the one surface WK1 side and the other surface WK2 side, and integrate the adherend WK and the support member with the adhesive sheet AS.

[0037] The adhesive sheet may be one that deforms when exposed to electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays or gamma rays, or heat such as hot water or hot air, or one that does not elastically deform or does not deform when exposed to a specified amount of energy may be used. The adhesive sheet AS that deforms when subjected to a predetermined energy may be one that deforms with contraction, with expansion, or without contraction or expansion. The adherend WK may have a circular or non-circular convex portion formed on at least one of the one surface WK1 side and the other surface WK2 side, or may have a support member such as metal, glass, resin, or other adhesive sheet attached to at least one of the one surface WK1 side and the other surface WK2 side.

[0038] The materials, types, and shapes of the adhesive sheet AS, support member, and adherend WK in the present invention are not particularly limited. For example, the adhesive sheet AS, support member, and adherend WK may be circular, oval, polygonal (e.g., triangular, rectangular), or other shapes. The adhesive sheet AS may be pressure-sensitive, heat-sensitive, or other adhesive. If a heat-sensitive adhesive sheet AS is used, it can be adhered by an appropriate method, such as providing a heating means such as a coil heater or the heated side of a heat pipe. Furthermore, such adhesive sheets AS may be of any type, such as a single-layer adhesive sheet; a two-layer sheet consisting of a substrate and an adhesive layer; a three-layer or more layer sheet consisting of a substrate and an adhesive layer with one or more intermediate layers between them; a three-layer or more layer sheet consisting of a substrate with one or more cover layers laminated on top; a sheet with a peelable substrate, intermediate layer, or cover layer; a single-layer double-sided adhesive sheet consisting of only an adhesive layer; or a double-sided adhesive sheet with adhesive layers laminated on both outermost surfaces of one or more intermediate layers. Furthermore, the adherend WK may be, for example, a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, ceramics, a wooden board, or a resin, or may be a composite formed from two or more of these, and may also be any type of member or article. Note that the adhesive sheet AS and other adhesive sheets may be interpreted in terms of their function or use, and may also be any sheet, film, tape, etc., such as an information label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, or a recording layer-forming resin sheet.

[0039] The driving equipment in the above embodiments may be electric equipment such as rotary motors, linear motors, single-axis robots, so-called articulated robots with joints on two or three or more axes, actuators such as air cylinders, hydraulic cylinders, rodless cylinders and rotary cylinders, which may be used alone, or may be a direct or indirect combination of such electric equipment and actuators, or may be electric equipment, actuators, etc. that are capable of torque control, speed control, etc. for the output parts of such electric equipment, actuators, etc., or may not be capable of torque control, speed control, etc.

[0040] In the above-described embodiments, when a rotating member such as a roller is used, a driving device for rotating the rotating member may be provided, the surface of the rotating member or the rotating member itself may be made of a deformable member such as rubber or resin, or the surface of the rotating member or the rotating member itself may be made of a non-deformable member, or other members such as a rotating or non-rotating shaft or blade may be used instead of the roller, and when a pressing means or pressing member such as a pressure roller or a pressure head that presses the object to be pressed is used, a roller, a round bar, a blade material, a brush-like member, or a member that sprays air or gas may be used instead of or in combination with the above-described examples, and the pressing means may be made of a deformable member such as rubber, resin, or sponge, or may be made of a non-deformable member such as metal or glass, and when a peeling means or peeling member such as a peeling plate or peeling roller that peels the object to be peeled is used, a plate-like member, a round bar, a roller, or other member may be used instead of or in combination with the above-described examples. The peeling element may be made of a deformable material such as rubber or resin, or may be made of a non-deformable material. When a supporting (holding) means or a supporting (holding) member that supports (holds) the supported member (held member) is used, a configuration in which the supported member is supported (held) may be adopted using a gripping means such as a mechanical chuck or chuck cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), a pressure-sensitive adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, driving equipment, etc. When a cutting means or a cutting member that cuts the member to be cut or forms an incision or cutting line in the member to be cut is used, cutting elements such as a cutter blade, laser cutter, ion beam, fire, heat, water pressure, an electric heating wire, or spraying of gas or liquid may be used instead of or in combination with the above examples, or a combination of appropriate driving equipment may be used to move the cutting element to perform the cutting. When a biasing means is used, it may be made of a spring, rubber, resin, driving equipment, etc. [Explanation of symbols]

[0041] EA...Sheet attachment device 10…Supply means 20...Pressing means 30...Transportation 40...Excess area pasting means 50...Tip attachment means 60...Folding notch forming means 70...Tensioning means 80...Energy imparting means AS...Adhesive sheet ASC...Bending cut ASF...Tip in feeding direction ASH...protruding area AS1…one end AS2...other end SD…Supply direction WK...Adherend WK1...One side (another side) WK2...The other side (another side) WKE: Outer edge face

Claims

1. a supply means for supplying the adhesive sheet along a predetermined supply direction; a pressing means for pressing the adhesive sheet supplied by the supply means against the outer peripheral edge surface so that at least one of one end side and the other end side along the supply direction of the adhesive sheet protrudes from the outer peripheral edge surface of the adherend, forming a protruding region; a moving means for moving the pressing means and the adherend relative to each other to attach the adhesive sheet to the outer edge surface; a protruding area attaching means for folding and attaching the protruding area in a direction of another surface adjacent to the outer edge surface, A sheet pasting device characterized by further comprising a leading end pasting means positioned between the pressing means and the protruding area pasting means, which folds and pastes only the protruding area at the leading end of the adhesive sheet in the supply direction toward the other surface prior to pasting by the protruding area pasting means.

2. 2. The sheet sticking device according to claim 1, further comprising a folding notch forming means for forming a folding notch on the adhesive sheet to be used as a folding notch for folding the adhesive sheet.

3. the adhesive sheet is provided to be elastically deformable, 3. The sheet application device according to claim 1, further comprising a tension applying means for applying tension in a direction along the supply direction to the adhesive sheet located between the supply means and the pressing means, thereby bending the protruding area in the direction of the other surface.

4. the adhesive sheet is deformed by a predetermined energy; 4. The sheet sticking device according to claim 1, further comprising an energy applying means for applying the predetermined energy to the adhesive sheet.

5. a supplying step of supplying the adhesive sheet along a predetermined supply direction; a pressing step of pressing the adhesive sheet supplied in the supplying step against the outer edge surface of the adherend with a pressing means so that at least one of one end side and the other end side along the supplying direction of the adhesive sheet protrudes from the outer edge surface of the adherend; a moving step of moving the pressing means and the adherend relative to each other to attach the adhesive sheet to the outer edge surface; a protruding region attaching step of folding the protruding region in a direction of another surface adjacent to the outer edge surface and attaching the protruding region; A sheet pasting method characterized in that, between the pressing step and the protruding area pasting step, a tip pasting step is further carried out in which only the protruding area at the tip end of the adhesive sheet in the supply direction is folded in the direction of the other surface and pasted prior to pasting in the protruding area pasting step.

Images