Positioning device with pressure nozzles and method for aligning a substrate

Abstract

The invention relates to a positioning device for aligning a substrate (12) relative to a substantially flat surface (14), comprising a substrate receiving device (18) for receiving the substrate (12); at least three pressure jet nozzles (22) arranged on or around the substrate receiving device (18), each of the pressure jet nozzles (22) being oriented towards the substantially flat surface (14) and connected to a pressure measuring device (24) for detecting its respective pressure; at least two linear actuators (28) connected to the substrate receiving device (18) and each configured to move the substrate receiving device (18) relative to the substantially flat surface (14); and a control unit (34) configured and set up to specify travel distances of the linear actuators (28) depending on the measured pressures.Furthermore, the invention relates to a method for aligning a substrate (12).