Double loop two dimension shearing interference detector

An interference detection, double-loop technology, applied in measurement devices, optical devices, measurement optics, etc., can solve the problems of not clear fringes, complicated operations, errors, etc., and achieve the effect of saving resources and mesa

CN100373141CInactive Publication Date: 2008-03-05SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2008-03-05
Estimated Expiration
Not applicable · inactive patent

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Abstract

A dual-loop two-dimensional shear interference detection device is consisted of the following components along the traveling direction of laser beam to be tested; extending lens, first spectroscope placed with 45deg.c, second spectroscope placed with 135deg.c, second completely reflecting mirror placed with 90deg.c, first completely reflecting mirror whose reflected light just incidents second spectroscope with 45deg.c placed in reflected light circuit of the second completely reflecting mirror and a CCD in its direction of transmitted light, third spectroscope in reflected light circuit of the first spectroscope placed with 45deg.c and third completely reflecting mirror placed with 135deg.c, fourth completely reflecting mirror whose reflected light incidents the third spectroscope with 45deg.c placed in reflected light circuit of the third completely reflecting mirror and second CCD placed in its direction of transmitted light, through a image collection card the output of first CCD and second CCD is linked to the same computer and has synchronism by a outer trigger signal.
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Description

technical field

[0001] The invention is a double-loop two-dimensional shearing interference detection device, which can realize the simultaneous detection, collection and computer automatic data processing of the broadband strong laser beam wavefront in the orthogonal direction (two-dimensional). The device can effectively realize the dynamic detection of the wavefront distortion of the broadband laser beam and the deformation process of the cavity mirror of the strong laser system. Background technique

[0002] In the prior art, Fu Lei et al. (see: Fu Lei, Xin Jianguo et al., Acta Optics Sinica, Vol. 20, No. 12, pp. 1667-1674, 2000) proposed a two-dimensional shear interference detection system with split optical paths. However, this system has several obvious disadvantages:

[0003] 1. Since the front and rear planes of the shearing mirror are uncoated, the energy of the beam is not fully utilized.

[0004] 2. The optical paths of the light reflected by the two planes of...

Examples

Embodiment Construction

[0020] Please refer to FIG. 1 first. FIG. 1 is a structural diagram of the optical path of the double-loop two-dimensional wavefront interferometer of the present invention, which is also the best embodiment of the present invention. As can be seen from the figure, the double-loop two-dimensional shearing interference detection device of the present invention is characterized in that it is composed of the beam expander 1 and the first beam splitter 2, 135 placed at 45° in the advancing direction of the laser beam to be measured. The second spectroscopic mirror 3 of ° placement and the second total reflection mirror 5 of 90 ° placement, the first reflection mirror 4 is set on the reflection optical path of the second reflection mirror 5, and the reflected light of this first reflection mirror 4 just Incident the second beam splitter 3 at 45°, the first CCD6 is arranged in the light transmission direction, and the third beam splitter 11 is placed at 45° in the reflected light dir...