An axial-flow micro piezoelectric gas compressor

Abstract

The present invention belongs to the technical field of micro gas compressors, and particularly relates to an axial flow micro piezoelectric gas compressor, which is integrally composed of a sleeve, an upper cover, an upper plate, an intermediate layer, a lower plate, a lower cover, a piezoelectric vibrator, a check valve, a cooling sleeve, and a sealing ring; a first piezoelectric vibrator is arranged between the upper cover and the upper plate, a second piezoelectric vibrator is arranged between the upper plate and the intermediate layer, a third piezoelectric vibrator is arranged between the intermediate layer and the lower plate, and a fourth piezoelectric vibrator is arranged between the lower plate and the lower cover. The diameters of the four piezoelectric vibrators decrease in sequence and all have a central hole at the center, and the check valve is installed at the central hole of the piezoelectric vibrator. The check valve is composed of an annular support, a valve plate, and a cantilever. A heat-conducting adhesive is applied between the cooling sleeve and the cover plate, a cooling channel is arranged on the outer surface of the cooling sleeve, and a sleeve is arranged outside the cooling sleeve. Features and advantages: It can simultaneously achieve large flow rate and high pressure output, and has a large energy density.

Description

Technical Field

[0001] The present invention belongs to the technical field of micro gas compressors, and particularly relates to an axial-flow micro piezoelectric gas compressor. Background Art

[0002] Due to the advantages of small volume, compact structure and high control precision of micro compressors, they have been widely used in fields such as electronic cooling, chemical synthesis, gas transportation and aerospace. Chinese Patent CN105321404A proposes an electromagnetic compressor, which mainly includes a fixed housing, an intake pipe, an outlet pipe, a cylinder, a piston, a transmission frame, an armature core and an electromagnetic coil. This electromagnetic compressor is easy to control and has a large electromagnetic force. Chinese Patent CN207048923U proposes a single-drive micro circular compressor for natural gas, which uses a vertical structure for the compressor structure design and is driven by a motor. It has a small floor area and is convenient for maintenance and handling. However, the micro gas compressor driven by a motor has a complex structure, a large volume, high power consumption and electromagnetic interference, and is not suitable for system integration and miniaturization. People have successively proposed pneumatic and electrostatic-driven gas compressors. Among them, the pneumatic type requires a separate gas source for driving and cannot be used for portable or independent instrument equipment. The electrostatic-driven type is difficult to output high-pressure gas because the diaphragm driving force is small and high voltage is required for driving.

[0003] The micro piezoelectric gas compressor has a simple structure, low power consumption, high energy density, no electromagnetic interference and is easy to control, which is an effective method for constructing a micro gas compressor. However, most of the existing micro piezoelectric gas compressors are of single-chamber structure, resulting in insufficient pressure-lifting capacity of the compressor, and can only reach the pressure level for pumping fluids. Moreover, due to the compressibility of gases and the limitation of the driving ability of a single piezoelectric vibrator itself, its energy density is not high, thus limiting the practical application of the micro piezoelectric gas compressor. Summary of the Invention

[0004] In view of the deficiencies of existing micro piezoelectric gas compressors, the present invention proposes an axial flow micro piezoelectric gas compressor (hereinafter simply referred to as axial flow micro compressor) that can simultaneously output high pressure / large flow rate, has no electromagnetic interference, high energy density, simple structure, and low cost, and adopts the following technical solutions: The axial flow micro piezoelectric gas compressor as a whole is composed of a sleeve, an upper cover, an upper plate, an intermediate layer, a lower plate, a lower cover, a first piezoelectric vibrator, a second piezoelectric vibrator, a third piezoelectric vibrator, a fourth piezoelectric vibrator, a first one-way valve, a second one-way valve, a third one-way valve, a fourth one-way valve, a cooling sleeve, and a sealing ring; The upper cover, the upper plate, the intermediate layer, the lower plate, and the lower cover are connected in sequence from top to bottom; The upper cover is provided with a gas inlet; A first piezoelectric vibrator is arranged between the upper cover and the upper plate, and a first pump chamber is arranged on the upper cover in the direction towards the first piezoelectric vibrator; The first pump chamber is communicated with the gas inlet; A second piezoelectric vibrator is arranged between the upper plate and the intermediate layer, and a second pump chamber is arranged on the upper plate between the first piezoelectric vibrator and the second piezoelectric vibrator. The second pump chamber communicates the first piezoelectric vibrator and the second piezoelectric vibrator, and the deformation of the first piezoelectric vibrator and the second piezoelectric vibrator can drive the second pump chamber; A third piezoelectric vibrator is arranged between the intermediate layer and the lower plate, and a third pump chamber is arranged on the intermediate layer between the second piezoelectric vibrator and the third piezoelectric vibrator. The third pump chamber communicates the second piezoelectric vibrator and the third piezoelectric vibrator, and the deformation of the second piezoelectric vibrator and the third piezoelectric vibrator can drive the third pump chamber; A fourth piezoelectric vibrator is arranged between the lower plate and the lower cover, and a fourth pump chamber is arranged on the lower plate between the third piezoelectric vibrator and the fourth piezoelectric vibrator. The fourth pump chamber communicates the third piezoelectric vibrator and the fourth piezoelectric vibrator, and the deformation of the third piezoelectric vibrator and the fourth piezoelectric vibrator can drive the fourth pump chamber; A fifth pump chamber is arranged on the lower cover in the direction towards the fourth piezoelectric vibrator; A gas outlet is arranged at the lower end of the lower cover; The gas outlet is communicated with the fifth pump chamber; The first piezoelectric vibrator, the second piezoelectric vibrator, the third piezoelectric vibrator, and the fourth piezoelectric vibrator are all concentrically bonded by a metal substrate and a piezoelectric ceramic sheet; Sealing rings are arranged on both the upper and lower sides of the outer peripheral edge of the metal substrate of the first piezoelectric vibrator, the second piezoelectric vibrator, the third piezoelectric vibrator, and the fourth piezoelectric vibrator to achieve cavity sealing; Central holes are opened in the centers of the first piezoelectric vibrator, the second piezoelectric vibrator, the third piezoelectric vibrator, and the fourth piezoelectric vibrator; The first one-way valve, the second one-way valve, the third one-way valve, and the fourth one-way valve are respectively installed at the central holes of the first piezoelectric vibrator, the second piezoelectric vibrator, the third piezoelectric vibrator, and the fourth piezoelectric vibrator; A preferred choice for the first one-way valve, the second one-way valve, the third one-way valve, and the fourth one-way valve is a wheel valve, which is composed of an annular support, a valve plate, and a cantilever. When the first one-way valve, the second one-way valve, the third one-way valve, and the fourth one-way valve work, the valve plate can be translated and opened under the action of pressure difference and the vibration kinetic energy of the piezoelectric vibrator; The diameters of the first piezoelectric vibrator, the second piezoelectric vibrator, the third piezoelectric vibrator, and the fourth piezoelectric vibrator decrease in sequence from top to bottom, and the volumes of the second pump chamber, the third pump chamber, and the fourth pump chamber also decrease in sequence, which can achieve step-by-step compression of the axial flow micro compressor;It should be noted here that the axial flow type means that the first piezoelectric vibrator, the second piezoelectric vibrator, the third piezoelectric vibrator, and the fourth piezoelectric vibrator are axially distributed from top to bottom according to the diameter size. The first one-way valve, the second one-way valve, the third one-way valve, and the fourth one-way valve are arranged at the center of the piezoelectric vibrator, and the gas flows axially.

[0005] To enable the axial flow type micro-compressor to dissipate heat effectively during operation, a cooling jacket is provided on the outside of the axial flow type micro-compressor. The cooling jacket is arranged on the periphery of the connection body of the upper cover, the upper plate, the middle layer, the lower plate, and the lower cover, and is in full contact with the surface of the periphery of the connection body of the upper cover, the upper plate, the middle layer, the lower plate, and the lower cover. A heat-conducting adhesive is applied to the contact surface. It should be noted that the connection body of the upper cover, the upper plate, the middle layer, the lower plate, and the lower cover is the whole formed after the four are connected. A cooling pipe is provided on the outer surface of the cooling jacket. The cooling pipe is a spiral cooling pipe. It should be noted that the spiral cooling pipe is provided to enable the coolant to stay in the cooling jacket for a longer time and enhance the heat dissipation effect. A sleeve is connected to the periphery of the cooling jacket, and a coolant inlet and a coolant outlet are provided on the sleeve. When the axial flow type micro-compressor is operating, the coolant flows in from the coolant inlet, passes through the cooling pipe, and flows out from the coolant outlet to take away heat, achieving the heat dissipation effect.

[0006] The flow rate of the axial flow type micro-compressor is determined by the first piezoelectric vibrator and the second piezoelectric vibrator. The first piezoelectric vibrator and the second piezoelectric vibrator have a large diameter, and the volume change of the cavity is large, so a large flow rate can be obtained. The previous stage cavity inhales a large volume of gas to fully supply the compression of the next stage cavity, making up for the gas reverse leakage of the one-way valve, effectively accumulating the gas compression amount of each stage cavity, enabling the axial flow type micro-compressor to have a large energy density and obtaining a high pressure.

[0007] The ideal working process of this embodiment can be divided into a first working state and a second working state.

[0008] First working state: Apply voltages with the same polarization direction to the first piezoelectric vibrator, apply voltages with the opposite polarization direction to the second piezoelectric vibrator, apply voltages with the same polarization direction to the third piezoelectric vibrator, and apply voltages with the opposite polarization direction to the fourth piezoelectric vibrator. The first piezoelectric vibrator vibrates upward, the second piezoelectric vibrator vibrates downward, the third piezoelectric vibrator vibrates upward, and the fourth piezoelectric vibrator vibrates downward. The volume of the second pump cavity increases and the pressure decreases, the first one-way valve opens, and the gas at the gas inlet is inhaled into the second pump cavity. The volume of the third pump cavity decreases and the pressure increases, the volume of the fourth pump cavity increases and the pressure decreases, the third one-way valve opens, and the gas in the third pump cavity is pressed into the fourth pump cavity.

[0009] Second working state: Apply voltages with opposite polarization directions to the first piezoelectric vibrator, voltages with the same polarization direction to the second piezoelectric vibrator, voltages with opposite polarization directions to the third piezoelectric vibrator, and voltages with the same polarization direction to the fourth piezoelectric vibrator. The first piezoelectric vibrator vibrates downward, the second piezoelectric vibrator vibrates upward, the third piezoelectric vibrator vibrates downward, and the fourth piezoelectric vibrator vibrates upward; the volume of the second pump chamber decreases and the pressure increases, the volume of the third pump chamber increases and the pressure decreases, the second check valve opens, and the gas in the second pump chamber is pressed into the third pump chamber; the volume of the fourth pump chamber decreases and the pressure increases, the volume of the fifth pump chamber increases and the pressure decreases, the fourth check valve opens, and the gas in the fourth pump chamber is pressed into the fifth pump chamber, and the gas is discharged.

[0010] Driven by an alternating voltage signal, the first and second working states alternate, and gas can be continuously output. The axial-flow micro-compressor compresses the gas in the second pump chamber, the third pump chamber, and the fourth pump chamber respectively at the first stage, the second stage, and the third stage. The previous-stage chamber inhales a large volume of gas to sufficiently supply the next-stage chamber for gas compression (the large volume of gas can make up for the reverse leakage of the check valve). Through multi-stage cumulative compression, a high-efficiency gas boosting effect can be obtained; at the same time, since the check valve is integrally installed with the piezoelectric vibrator (the check valve is installed at the center of the piezoelectric vibrator), the check valve can make full use of the kinetic energy of the piezoelectric vibrator to open and close, effectively improving the dynamic performance of the check valve, reducing the reverse leakage of gas and increasing the working frequency.

[0011] The features and advantages of the present invention are as follows: 1. The gas is cumulatively pressurized by gradually decreasing the volume of each chamber. Its flow rate is determined by the first piezoelectric vibrator and the second piezoelectric vibrator. The first piezoelectric vibrator and the second piezoelectric vibrator have large diameters and large changes in chamber volume, and a large flow rate can be obtained; 2. The previous-stage chamber inhales a large volume of gas to sufficiently supply the next-stage chamber for compression, effectively accumulating the gas compression amounts of each stage chamber, having a large energy density and a high energy conversion efficiency, and being able to output a high pressure; 3. When the axial-flow micro-compressor works, the check valve can make full use of the kinetic energy of the piezoelectric vibrator to open and close, effectively improving the dynamic performance of the check valve, having less reverse leakage of gas and a high working frequency. Description of the Drawings

[0012] Figure 1 is a structural sectional view of the initial state in a preferred embodiment of the present invention;

[0013] Figure 2 is a structural sectional view of the first working state in a preferred embodiment of the present invention;

[0014] Figure 3 is a structural sectional view of the second working state in a preferred embodiment of the present invention;

[0015] Figure 4It is the layout diagram of the spiral cooling channel in a preferred embodiment of the present invention;

[0016] Figure 5 It is the top view after the piezoelectric vibrator and the one-way valve are assembled in a preferred embodiment of the present invention.

[0017] Wherein: 1 - sleeve; 11 - coolant inlet; 12 - coolant outlet; 2 - upper cover; 21 - first pump chamber; 22 - gas inlet; 3 - upper plate; 31 - second pump chamber; 4 - intermediate layer; 41 - third pump chamber; 5 - lower plate; 51 - fourth pump chamber; 6 - lower cover; 61 - fifth pump chamber; 62 - gas outlet; 71 - first one-way valve; 72 - second one-way valve; 73 - third one-way valve; 74 - fourth one-way valve; 7a - annular support; 7b - valve disc; 7c - cantilever; 81 - first piezoelectric vibrator; 82 - second piezoelectric vibrator; 83 - third piezoelectric vibrator; 84 - fourth piezoelectric vibrator; 8a - metal substrate; 8b - piezoelectric ceramic sheet; 9 - cooling sleeve; 91 - thermal conductive adhesive; 92 - cooling pipe; 10 - sealing ring. Detailed implementation manners

[0018] The technical solutions of the present invention will be clearly and completely described below with reference to the drawings. It should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present invention. In addition, the terms "first", "second", "third", "fourth" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0019] In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, the terms "installation", "connection", "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0020] The following will detail the specific implementation manners of the present invention with reference to the drawings. It should be understood that the specific implementation manners described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0021] Please refer to Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、Figure 5, the present invention provides an axial-flow micro piezoelectric gas compressor, which is composed of a sleeve 1, an upper cover 2, an upper plate 3, an intermediate layer 4, a lower plate 5, a lower cover 6, a first piezoelectric vibrator 81, a second piezoelectric vibrator 82, a third piezoelectric vibrator 83, a fourth piezoelectric vibrator 84, a first check valve 71, a second check valve 72, a third check valve 73, a fourth check valve 74, a cooling sleeve 9 and a sealing ring 10; the upper cover 2, the upper plate 3, the intermediate layer 4, the lower plate 5 and the lower cover 6 are connected in sequence from top to bottom; the upper cover 2 is provided with a gas inlet 22; a first piezoelectric vibrator 81 is arranged between the upper cover 2 and the upper plate 3, and the upper cover 2 is provided with a first pump chamber 21 in the direction towards the first piezoelectric vibrator 81; the first pump chamber 21 is communicated with the gas inlet 22; a second piezoelectric vibrator 82 is arranged between the upper plate 3 and the intermediate layer 4, and the upper plate 3 is provided with a second pump chamber 31 between the first piezoelectric vibrator 81 and the second piezoelectric vibrator 82. The second pump chamber 31 communicates the first piezoelectric vibrator 81 and the second piezoelectric vibrator 82, and the deformation of the first piezoelectric vibrator 81 and the second piezoelectric vibrator 82 can drive the second pump chamber 31; a third piezoelectric vibrator 83 is arranged between the intermediate layer 4 and the lower plate 5, and the intermediate layer 4 is provided with a third pump chamber 41 between the second piezoelectric vibrator 82 and the third piezoelectric vibrator 83. The third pump chamber 41 communicates the second piezoelectric vibrator 82 and the third piezoelectric vibrator 83, and the deformation of the second piezoelectric vibrator 82 and the third piezoelectric vibrator 83 can drive the third pump chamber 41; a fourth piezoelectric vibrator 84 is arranged between the lower plate 5 and the lower cover 6, and the lower plate 5 is provided with a fourth pump chamber 51 between the third piezoelectric vibrator 83 and the fourth piezoelectric vibrator 84. The fourth pump chamber 51 communicates the third piezoelectric vibrator 83 and the fourth piezoelectric vibrator 84, and the deformation of the third piezoelectric vibrator 83 and the fourth piezoelectric vibrator 84 can drive the fourth pump chamber 51; the lower cover 6 is provided with a fifth pump chamber 61 on the side towards the fourth piezoelectric vibrator 84; the lower end of the lower cover 6 is provided with a gas outlet 62; the gas outlet 62 is communicated with the fifth pump chamber 61; the first piezoelectric vibrator 81, the second piezoelectric vibrator 82, the third piezoelectric vibrator 83 and the fourth piezoelectric vibrator 84 are all concentrically bonded by a metal substrate 8a and a piezoelectric ceramic sheet 8b; sealing rings 10 are arranged on both the upper and lower sides of the outer peripheral edge of the metal substrate 8a of the first piezoelectric vibrator 81, the second piezoelectric vibrator 82, the third piezoelectric vibrator 83 and the fourth piezoelectric vibrator 84 to achieve cavity sealing; central holes are opened in the centers of the first piezoelectric vibrator 81, the second piezoelectric vibrator 82, the third piezoelectric vibrator 83 and the fourth piezoelectric vibrator 84; the first check valve 71, the second check valve 72, the third check valve 73 and the fourth check valve 74 are respectively installed at the central holes of the first piezoelectric vibrator 81, the second piezoelectric vibrator 82, the third piezoelectric vibrator 83 and the fourth piezoelectric vibrator 84;A preferred option for the first check valve 71, second check valve 72, third check valve 73, and fourth check valve 74 is a wheel-type valve, which consists of an annular support 7a, a valve plate 7b, and a cantilever 7c. When the first check valve 71, second check valve 72, third check valve 73, and fourth check valve 74 are working, the valve plate 7b can achieve translational opening under the action of pressure difference and the vibration kinetic energy of the piezoelectric vibrator. The diameters of the first piezoelectric vibrator 81, second piezoelectric vibrator 82, third piezoelectric vibrator 83, and fourth piezoelectric vibrator 84 decrease sequentially from top to bottom, and the volumes of the second pump chamber 31, third pump chamber 41, and fourth pump chamber 51 also decrease sequentially, which can achieve step-by-step compression of the axial flow micro-compressor. It should be noted here that the axial flow means that the first piezoelectric vibrator 81, second piezoelectric vibrator 82, third piezoelectric vibrator 83, and fourth piezoelectric vibrator 84 are axially distributed from top to bottom according to the diameter size, and the first check valve 71, second check valve 72, third check valve 73, and fourth check valve 74 are arranged at the center of the piezoelectric vibrator, and the gas flows axially.

[0022] To enable the axial flow micro-compressor to dissipate heat effectively during operation, a cooling jacket 8 is provided on the outside of the axial flow micro-compressor. The cooling jacket 9 is arranged on the periphery of the connection bodies of the upper cover 2, upper plate 3, intermediate layer 4, lower plate 5, and lower cover 6, and is in full contact with the surface of the periphery of the connection bodies of the upper cover 2, upper plate 3, intermediate layer 4, lower plate 5, and lower cover 6, and a heat-conducting adhesive 91 is applied to the contact surface. It should be noted that the connection body of the upper cover 2, upper plate 3, intermediate layer 4, lower plate 5, and lower cover 6 is the whole formed after the four are connected. The outer surface of the cooling jacket 9 is provided with a cooling pipe 92. The cooling pipe 92 is a spiral cooling pipe. It should be noted that the spiral cooling pipe 92 is provided to enable the coolant to stay in the cooling jacket for a longer time and strengthen the heat dissipation effect. The periphery of the cooling jacket 9 is connected with a sleeve 1, and a coolant inlet 11 and a coolant outlet 12 are provided on the sleeve 1. When the axial flow micro-compressor is working, the coolant flows in from the coolant inlet 11, passes through the cooling pipe 21 and flows out from the coolant outlet 12 to take away heat, achieving the heat dissipation effect.

[0023] The flow rate of the axial flow micro-compressor is determined by the first piezoelectric vibrator 81 and the second piezoelectric vibrator 82. The first piezoelectric vibrator 81 and the second piezoelectric vibrator 82 have large diameters and large changes in cavity volume, so a large flow rate can be obtained. The previous-stage cavity inhales a large volume of gas to sufficiently supply the compression of the next-stage cavity, which can effectively accumulate the gas compression amounts of each stage of the cavity, making the axial flow micro-compressor have a large energy density and enabling it to obtain a high pressure.

[0024] The ideal working process of this embodiment can be divided into a first working state and a second working state.

[0025] The first working state: Apply voltages with the same polarization direction to the first piezoelectric vibrator 81, voltages with opposite polarization directions to the second piezoelectric vibrator 82, voltages with the same polarization direction to the third piezoelectric vibrator 83, and voltages with opposite polarization directions to the fourth piezoelectric vibrator 84. The first piezoelectric vibrator 81 vibrates upward, the second piezoelectric vibrator 82 vibrates downward, the third piezoelectric vibrator 83 vibrates upward, and the fourth piezoelectric vibrator 84 vibrates downward. The volume of the second pump chamber 31 increases and the pressure decreases, the first check valve 71 opens, and the gas at the gas inlet 22 is inhaled into the second pump chamber 31. The volume of the third pump chamber 41 decreases and the pressure increases, the volume of the fourth pump chamber 51 increases and the pressure decreases, the third check valve 73 opens, and the gas in the third pump chamber 41 is pressed into the fourth pump chamber 51.

[0026] The second working state: Apply voltages with opposite polarization directions to the first piezoelectric vibrator 81, voltages with the same polarization direction to the second piezoelectric vibrator 82, voltages with opposite polarization directions to the third piezoelectric vibrator 83, and voltages with the same polarization direction to the fourth piezoelectric vibrator 84. The first piezoelectric vibrator 81 vibrates downward, the second piezoelectric vibrator 82 vibrates upward, the third piezoelectric vibrator 83 vibrates downward, and the fourth piezoelectric vibrator 84 vibrates upward. The volume of the second pump chamber 31 decreases and the pressure increases, the volume of the third pump chamber 41 increases and the pressure decreases, the second check valve 72 opens, and the gas in the second pump chamber 31 is pressed into the third pump chamber 41. The volume of the fourth pump chamber 51 decreases and the pressure increases, the volume of the fifth pump chamber 61 increases and the pressure decreases, the fourth check valve 74 opens, and the gas in the fourth pump chamber 51 is pressed into the fifth pump chamber 61, and the gas is discharged.

[0027] Driven by the alternating voltage signal, the first and second working states alternate, and gas can be continuously output. The axial flow type micro compressor compresses the gas in the second pump chamber 31, the third pump chamber 41, and the fourth pump chamber 51 at the first stage, the second stage, and the third stage respectively. The previous stage cavity inhales a large volume of gas to sufficiently supply the next stage cavity for gas compression (the large volume of gas can make up for the reverse leakage of the check valve). Through multi-stage cumulative compression, a high-efficiency gas boosting effect can be obtained. At the same time, since the check valve is integrally installed with the piezoelectric vibrator (the check valve is installed at the center of the piezoelectric vibrator), the check valve can make full use of the kinetic energy of the piezoelectric vibrator to open and close, effectively improving the dynamic performance of the check valve, reducing the reverse leakage of the gas and increasing the working frequency.

[0028] The above embodiments are for understanding the present invention and are not used for limitation. Without departing from the principle of the present invention, those skilled in the art can make various changes and deformations according to the present invention, but these corresponding changes and deformations should all fall within the scope of the claims of the present invention.

Claims

1. An axial-flow micro piezoelectric gas compressor, characterized in that: It is composed of a sleeve, an upper cover, an upper plate, an intermediate layer, a lower plate, a lower cover, a first piezoelectric vibrator, a second piezoelectric vibrator, a third piezoelectric vibrator, a fourth piezoelectric vibrator, a first one-way valve, a second one-way valve, a third one-way valve, a fourth one-way valve, a cooling jacket and a sealing ring; the upper cover, the upper plate, the intermediate layer, the lower plate and the lower cover are connected in sequence from top to bottom; the upper cover is provided with a gas inlet; a first piezoelectric vibrator is arranged between the upper cover and the upper plate, and a first pump chamber is arranged on the upper cover in the direction towards the first piezoelectric vibrator; the first pump chamber is communicated with the gas inlet; a second piezoelectric vibrator is arranged between the upper plate and the intermediate layer, and a second pump chamber is arranged on the upper plate between the first piezoelectric vibrator and the second piezoelectric vibrator, and the second pump chamber communicates the first piezoelectric vibrator with the second piezoelectric vibrator; a third piezoelectric vibrator is arranged between the intermediate layer and the lower plate, and a third pump chamber is arranged on the intermediate layer between the second piezoelectric vibrator and the third piezoelectric vibrator, and the third pump chamber communicates the second piezoelectric vibrator with the third piezoelectric vibrator; a fourth piezoelectric vibrator is arranged between the lower plate and the lower cover, and a fourth pump chamber is arranged on the lower plate between the third piezoelectric vibrator and the fourth piezoelectric vibrator, and the fourth pump chamber communicates the third piezoelectric vibrator with the fourth piezoelectric vibrator; a fifth pump chamber is arranged on the lower cover on the side towards the fourth piezoelectric vibrator; a gas outlet is arranged at the lower end of the lower cover; the gas outlet is communicated with the fifth pump chamber; the first piezoelectric vibrator, the second piezoelectric vibrator, the third piezoelectric vibrator and the fourth piezoelectric vibrator are all concentrically bonded by a metal substrate and a piezoelectric ceramic sheet; sealing rings are arranged on the upper and lower sides of the outer peripheral edge of the metal substrate of the first piezoelectric vibrator, the second piezoelectric vibrator, the third piezoelectric vibrator and the fourth piezoelectric vibrator; central holes are opened at the centers of the first piezoelectric vibrator, the second piezoelectric vibrator, the third piezoelectric vibrator and the fourth piezoelectric vibrator; the first one-way valve, the second one-way valve, the third one-way valve and the fourth one-way valve are respectively installed at the central holes of the first piezoelectric vibrator, the second piezoelectric vibrator, the third piezoelectric vibrator and the fourth piezoelectric vibrator; the diameters of the first piezoelectric vibrator, the second piezoelectric vibrator, the third piezoelectric vibrator and the fourth piezoelectric vibrator decrease in sequence from top to bottom, and the volumes of the second pump chamber, the third pump chamber and the fourth pump chamber also decrease in sequence; the cooling jacket is sleeved on the periphery of the connection body of the upper cover, the upper plate, the intermediate layer, the lower plate and the lower cover; the cooling jacket is provided with a cooling pipeline.

2. The axial-flow micro piezoelectric gas compressor according to claim 1, wherein: The cooling jacket is in full contact with the peripheral surface of the connection body of the upper cover, the upper plate, the intermediate layer, the lower plate and the lower cover, and a heat-conducting glue is applied to the contact surface.

3. The axial-flow micro piezoelectric gas compressor according to claim 1, wherein: A sleeve is connected to the periphery of the cooling jacket, and a coolant inlet and a coolant outlet are arranged on the sleeve.

4. The axial-flow micro piezoelectric gas compressor according to claim 1, wherein: The cooling pipeline is a spiral cooling pipeline.

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