A two-dimensional precision micro-motion workbench with double displacement and its usage method

Abstract

The present invention provides a two-dimensional precision micro-motion workbench with double displacement and a method for using the same. The two-dimensional precision micro-motion workbench comprises a base, a middle-layer workbench is installed on the top of the base through a bottom-layer leaf spring group, an upper-layer workbench is installed on the top of the middle-layer workbench through a top-layer leaf spring group, a first wedge block is fixed on the side wall of the middle-layer workbench, and the first wedge block cooperates with a Y-direction wedge mechanism for driving the middle-layer workbench to micro-move along the Y direction; a second wedge block is fixed on the side wall of the upper-layer workbench, and the second wedge block cooperates with an X-direction wedge mechanism for driving the middle-layer workbench to micro-move along the X direction.

Description

Technical Field

[0001] The invention relates to a precision device, in particular to a two-dimensional precision micro-motion workbench with double displacement and a use method thereof. Background Art

[0002] Micro-nano positioning technology is a key technology in modern high-tech and modern industry, and is widely used in many fields such as precision manufacturing, ultra-precision measurement and micro-manipulation. In recent years, higher requirements have been put forward for micro-nano positioning technology, such as long travel, high precision, small size and fast response, among which the requirements for positioning accuracy and resolution have reached the nanometer level. Summary of the invention

[0003] Considering the shortcomings of the micro-motion workbench currently on the market, such as high manufacturing cost and cumbersome use, the present invention designs a two-dimensional precision micro-motion workbench with double displacement. The device not only meets the requirements of high precision and small size of the workbench, but is also simple and practical, saving manufacturing costs and improving the work efficiency of the manufacturer.

[0004] In order to realize the above-mentioned technical features, the object of the present invention is realized as follows: a two-dimensional precision micro-motion workbench with double displacement, which comprises a base, a middle-level workbench is installed on the top of the base through a bottom-level leaf spring group, an upper-level workbench is installed on the top of the middle-level workbench through a top-level leaf spring group, a first wedge block is fixed on the side wall of the middle-level workbench, and the first wedge block cooperates with a Y-direction wedge mechanism for driving it to micro-move along the Y direction; a second wedge block is fixed on the side wall of the upper-level workbench, and the second wedge block cooperates with an X-direction wedge mechanism for driving it to micro-move along the X direction.

[0005] The bottom leaf spring group includes a first leaf spring, a second leaf spring, a third leaf spring and a fourth leaf spring; the first leaf spring and the second leaf spring are arranged on the same side of the base and the middle workbench, and the third leaf spring and the fourth leaf spring are arranged on the side opposite to the first leaf spring and the second leaf spring.

[0006] The top leaf spring group includes a fifth leaf spring, a sixth leaf spring, a seventh leaf spring and an eighth leaf spring; the fifth leaf spring and the sixth leaf spring are fixed on the same side of the middle workbench and the upper workbench, and the seventh leaf spring and the eighth leaf spring are arranged on the side opposite to the fifth leaf spring and the sixth leaf spring.

[0007] The leaf springs of the bottom leaf spring group and the top leaf spring group are arranged adjacent to each other along the four sides of the base.

[0008] The Y-axis wedge mechanism comprises a first micrometer screw, and the end of the measuring rod of the first micrometer screw is connected to an X-axis movable wedge block for cooperating with the first wedge block to form a wedge surface cooperation.

[0009] The X-direction wedge mechanism includes a second micrometer. The end of the measuring rod of the second micrometer is connected with a Y-direction moving wedge block for cooperating with the second wedge block to form a wedge surface fit.

[0010] The Y-direction wedge mechanism and the X-direction wedge mechanism are arranged adjacent to each other.

[0011] The leaf springs of the bottom leaf spring group and the top leaf spring group are all made of thin spring sheets, and a reinforcing plate is arranged in the middle part thereof.

[0012] The usage method of the two-dimensional precision micro-motion worktable with double displacements includes the following steps:

[0013] Step1: First, rotate the first micrometer. Drive the X-direction moving wedge block at the end thereof through the first micrometer. Cooperate the X-direction moving wedge block with the first wedge block fixed on the middle worktable, and then drive the first wedge block to move in the Y direction through the wedge surface transmission mode to achieve the first displacement;

[0014] Step2: The first wedge block is fixedly connected to the middle worktable. The movement of the first wedge block in the Y direction will drive the middle worktable to move in the Y direction to achieve the second displacement;

[0015] Step3: Rotate the second micrometer. Drive the Y-direction moving wedge block at the end thereof through the second micrometer. Cooperate the Y-direction moving wedge block with the second wedge block fixed on the upper worktable, and then drive the second wedge block to move in the X direction through the wedge surface transmission mode to achieve the third displacement;

[0016] Step4: The second wedge block is fixedly connected to the upper worktable. The movement of the second wedge block in the X direction will drive the upper worktable to move in the X direction to achieve the fourth displacement.

[0017] In Step1, if the displacement of the X-direction moving wedge block in the X direction is △x, then the distance that the first wedge block moves in the Y direction is △y = ∆x tanα, that is, the distance that the middle worktable moves in the Y direction at this time is △y;

[0018] In Step3, if the displacement of the Y-direction moving wedge block in the Y direction is △y1, then the distance that the second wedge block moves in the X direction is △x1 = △y1 tanα, that is, the distance that the upper worktable moves in the X direction at this time is △x1;

[0019] The α is the angle value of the acute angle formed by the wedge fit on the first wedge block and the second wedge block.

[0020] The present invention has the following beneficial effects:

[0021] 1. By adopting the two-dimensional precision micro-motion workbench with the above structure, two-dimensional movement of double displacements can be achieved, which not only meets the requirements of high precision and small volume of the workbench, but also is simple and practical, saving manufacturing costs and improving the work efficiency of manufacturers.

[0022] 2. By adopting the way of combining a high-precision micrometer with wedge drive, the transmission precision is greatly improved, making the adjustment precision of the workbench reach 10 -7 μm.

[0023] 3. Through the combination of transverse and longitudinal micrometers and wedge drives in two directions, precise position adjustment within the two-dimensional plane is finally achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The present invention will be further described below in conjunction with the drawings and embodiments.

[0025] Figure 1 is the schematic diagram of the principle of the present invention for a patent.

[0026] Figure 2 is the top view of the present invention.

[0027] Figure 3 is the front view of the present invention.

[0028] Figure 4 is the left view of the present invention.

[0029] Figure 5 is the schematic diagram of the displacement principle of the wedge mechanism of the present invention in the Y direction.

[0030] Figure 6 is the three-dimensional overall structure diagram of the present invention.

[0031] In the figure: the fifth leaf spring 1, the X-direction moving wedge block 2, the first micrometer 3, the first wedge block 4, the sixth leaf spring 5, the first leaf spring 6, the Y-direction moving wedge block 7, the second micrometer 8, the second wedge block 9, the second leaf spring 10, the base 11, the middle-layer workbench 12, the seventh leaf spring 13, the upper-layer workbench 14, the eighth leaf spring 15, the third leaf spring 16 and the fourth leaf spring 17. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0032] The embodiments of the present invention will be further described below in conjunction with the drawings.

[0033] Embodiment 1:

[0034] See Figure 1-6, a two-dimensional precision micro-motion workbench with double displacement, which includes a base 11. The top of the base 11 is supported and installed with a middle workbench 12 through a bottom leaf spring group. The top of the middle workbench 12 is supported and installed with an upper workbench 14 through a top leaf spring group. A first wedge block 4 is fixed on the side wall of the middle workbench 12, and the first wedge block 4 is matched with a Y-direction wedge mechanism for driving its micro-motion in the Y direction; a second wedge block 9 is fixed on the side wall of the upper workbench 14, and the second wedge block 9 is matched with an X-direction wedge mechanism for driving its micro-motion in the X direction. By adopting the two-dimensional precision micro-motion workbench with the above structure, two-dimensional movement with double displacement can be realized, which not only meets the requirements of high precision and small volume of the workbench, but also is simple and practical, saves manufacturing costs, and improves the work efficiency of the manufacturer.

[0035] Further, the bottom leaf spring group includes a first leaf spring 6, a second leaf spring 10, a third leaf spring 16 and a fourth leaf spring 17; the first leaf spring 6 and the second leaf spring 10 are arranged on the same side of the base 11 and the middle workbench 12, and the third leaf spring 16 and the fourth leaf spring 17 are arranged on the side opposite to the first leaf spring 6 and the second leaf spring 10. Through the above bottom leaf spring group, it is ensured that the middle workbench 12 connected to the base 11 can move along the Y direction. Furthermore, the displacement adjustment in the Y direction is realized.

[0036] Further, the top leaf spring group includes a fifth leaf spring 1, a sixth leaf spring 5, a seventh leaf spring 13 and an eighth leaf spring 15; the fifth leaf spring 1 and the sixth leaf spring 5 are fixed on the same side of the middle workbench 12 and the upper workbench 14, and the seventh leaf spring 13 and the eighth leaf spring 15 are arranged on the side opposite to the fifth leaf spring 1 and the sixth leaf spring 5. Through the above top leaf spring group, it is ensured that the upper workbench 14 connected to the middle workbench 12 can move along the X direction. Furthermore, the displacement adjustment in the X direction is realized.

[0037] Further, the leaf springs of the bottom leaf spring group and the top leaf spring group are arranged adjacent to each other along the four sides of the base 11. By adopting the adjacent arrangement method, it is ensured that the workbenches of different layers can respectively realize the corresponding planar movement.

[0038] Further, the Y-direction wedge mechanism includes a first micrometer 3. The end of the measuring rod of the first micrometer 3 is connected with an X-direction moving wedge block 2 for cooperating with the first wedge block 4 to form a wedge surface fit. Through the above structure, the adjustment of the middle workbench in the Y direction can be realized. During the working process, the X-direction moving wedge block 2 is driven by the first micrometer 3, and then the X-direction moving wedge block 2 cooperates with the first wedge block 4 to drive the middle workbench 12 to realize the Y-direction movement.

[0039] Further, the X-direction wedge mechanism includes a second micrometer 8. The end of the measuring rod of the second micrometer 8 is connected with a Y-direction moving wedge block 7 for cooperating with a second wedge block 9 to form a wedge surface fit. Through the above structure, the adjustment in the X direction of the upper workbench can be realized. During the working process, the second micrometer 8 drives the Y-direction moving wedge block 7, and then the Y-direction moving wedge block 7 cooperates with the second wedge block 9 to drive the upper workbench 14 to move in the X direction.

[0040] Further, the Y-direction wedge mechanism and the X-direction wedge mechanism are arranged adjacent to each other. Thus, the adjustment in different directions can be realized.

[0041] Further, the leaf springs of the bottom leaf spring group and the top leaf spring group are all made of thin spring sheets, and a reinforcing plate is arranged at the middle part thereof. Through the above thin spring sheets, it can be ensured that during the adjustment process, small deformations are realized, and thus the adjustment of the displacement is realized.

[0042] Embodiment 2:

[0043] The usage method of the two-dimensional precision micro-motion workbench with double displacements includes the following steps:

[0044] Step1: First, rotate the first micrometer 3. The first micrometer 3 drives the X-direction moving wedge block 2 at its end. The X-direction moving wedge block 2 cooperates with the first wedge block 4 fixed on the middle workbench 12, and then drives the first wedge block 4 to move in the Y direction through the wedge surface transmission method to realize the first displacement.

[0045] Step2: The first wedge block 4 is fixedly connected to the middle workbench 12. The movement of the first wedge block 4 in the Y direction will drive the middle workbench 12 to move in the Y direction to realize the second displacement.

[0046] Step3: Rotate the second micrometer 8. The second micrometer 8 drives the Y-direction moving wedge block 7 at its end. The Y-direction moving wedge block 7 cooperates with the second wedge block 9 fixed on the upper workbench 14, and then drives the second wedge block 9 to move in the X direction through the wedge surface transmission method to realize the third displacement.

[0047] Step4: The second wedge block 9 is fixedly connected to the upper workbench 14. The movement of the second wedge block 9 in the X direction will drive the upper workbench 14 to move in the X direction to realize the fourth displacement.

[0048] Further, in Step1, if the displacement of the X-direction moving wedge block 2 in the X direction is Δx, then the distance that the first wedge block 4 moves in the Y direction is Δy = Δx tanα, that is, the distance that the middle workbench 12 moves in the Y direction at this time is Δy.

[0049] Further, in the Step 3, if the displacement of the Y-direction moving wedge block 7 in the Y direction is △y1, then the distance that the second wedge block 9 moves in the X direction is △x1 = △y1 tanα, that is, the distance that the upper workbench 14 moves in the X direction at this time is △x1;

[0050] Further, α is the angle value of the acute angle formed by the first wedge block 4 and the second wedge block 9 in the wedge fit.

[0051] Principle of wedge block movement: as follows Figure 5 As shown in the figure, when the Y-direction moving wedge block 7 moves △y in the Y direction, the second wedge block 9 moves △x in the X direction. The acute angle of the second wedge block 9 is α, △x / △y = tanα, then △x = △y tanα, and △x is the displacement distance of the upper workbench 14 in the X direction.

[0052] The pitch of the precision thread of the micrometer is 0.5mm. The movable scale has 50 equal division scales, accurate to 0.01mm. It can be estimated one more digit and can be read to the thousandth place of millimeters. When the wedge block α = 45°, △x / △y = 1, and the adjustment precision of the workbench is: 10 -6 m. When α ≈ 5°, △x / △y = 0.087489, and the adjustment precision of the workbench reaches 10 -7 m, and the displacement adjustment can be accurate to about 100nm.

Claims

1. A two-dimensional precision micro-motion workbench with double displacements, characterized in that: it includes a base (11), the top of the base (11) is supported and installed with a middle workbench (12) through a bottom leaf spring group, the top of the middle workbench (12) is supported and installed with an upper workbench (14) through a top leaf spring group, a first wedge block (4) is fixed on the side wall of the middle workbench (12), and the first wedge block (4) is matched with a Y-direction wedge mechanism for driving its micro-motion in the Y direction; a second wedge block (9) is fixed on the side wall of the upper workbench (14), and the second wedge block (9) is matched with an X-direction wedge mechanism for driving its micro-motion in the X direction; The bottom leaf spring group includes a first leaf spring (6), a second leaf spring (10), a third leaf spring (16) and a fourth leaf spring (17); the first leaf spring (6) and the second leaf spring (10) are arranged on the same side of the base (11) and the middle workbench (12), and the third leaf spring (16) and the fourth leaf spring (17) are arranged on the side opposite to the first leaf spring (6) and the second leaf spring (10); Through the above bottom leaf spring group, it is ensured that the middle workbench (12) connected to the base (11) can move along the Y direction; The top leaf spring group includes a fifth leaf spring (1), a sixth leaf spring (5), a seventh leaf spring (13) and an eighth leaf spring (15); the fifth leaf spring (1) and the sixth leaf spring (5) are fixed on the same side of the middle workbench (12) and the upper workbench (14), and the seventh leaf spring (13) and the eighth leaf spring (15) are arranged on the side opposite to the fifth leaf spring (1) and the sixth leaf spring (5); Through the above top leaf spring group, it is ensured that the upper workbench (14) connected to the middle workbench (12) can move along the X direction; The Y-direction wedge mechanism includes a first micrometer (3), and the end of the measuring rod of the first micrometer (3) is connected with an X-direction moving wedge block (2) for matching with the first wedge block (4) to form a wedge surface fit; The X-direction wedge mechanism includes a second micrometer (8), and the end of the measuring rod of the second micrometer (8) is connected with a Y-direction moving wedge block (7) for matching with the second wedge block (9) to form a wedge surface fit; The leaf springs of the bottom leaf spring group and the top leaf spring group are all made of thin spring sheets, and a reinforcing plate is arranged in the middle part thereof.

2. The two-dimensional precision micro-motion workbench with double displacements according to claim 1, characterized in that: The leaf springs of the bottom leaf spring group and the top leaf spring group are arranged adjacent to each other along the four sides of the base (11).

3. The two-dimensional precision micro-motion workbench with double displacements according to claim 1, characterized in that: The Y-direction wedge mechanism and the X-direction wedge mechanism are arranged adjacent to each other.

4. The usage method of the two-dimensional precision micro-motion workbench with double displacements according to any one of claims 1-3, characterized in that it includes the following steps: Step 1: First, rotate the first micrometer (3). Drive the X-direction moving wedge block (2) at its end through the first micrometer (3). The X-direction moving wedge block (2) cooperates with the first wedge block (4) fixed on the middle-layer workbench (12). Then, drive the first wedge block (4) to move in the Y direction through the wedge surface transmission method to achieve the first displacement. Step 2: The first wedge block (4) is fixedly connected to the middle-layer workbench (12). The movement of the first wedge block (4) in the Y direction will drive the middle-layer workbench (12) to move in the Y direction to achieve the second displacement. Step 3: Rotate the second micrometer (8). Drive the Y-direction moving wedge block (7) at its end through the second micrometer (8). The Y-direction moving wedge block (7) cooperates with the second wedge block (9) fixed on the upper-layer workbench (14). Then, drive the second wedge block (9) to move in the X direction through the wedge surface transmission method to achieve the third displacement. Step 4: The second wedge block (9) is fixedly connected to the upper-layer workbench (14). The movement of the second wedge block (9) in the X direction will drive the upper-layer workbench (14) to move in the X direction to achieve the fourth displacement.

5. The usage method of the two-dimensional precision micro-motion workbench according to claim 4, characterized in that: In Step 1, if the displacement of the X-direction moving wedge block (2) in the X direction is Δx, then the distance that the first wedge block (4) moves in the Y direction is Δy = Δx tanα, that is, the distance that the middle-layer workbench (12) moves in the Y direction at this time is Δy; In Step 3, if the displacement of the Y-direction moving wedge block (7) in the Y direction is Δy1, then the distance that the second wedge block (9) moves in the X direction is Δx1 = Δy1 tanα, that is, the distance that the upper-layer workbench (14) moves in the X direction at this time is Δx1; The α is the angle value of the acute angle forming the wedge fit on the first wedge block (4) and the second wedge block (9).

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