Micro-operation device and method based on capillary force

Abstract

The present invention discloses a micro-operation device and method based on capillary force, which belongs to the field of micro-operation technology. A droplet generation mechanism, a mobile operation mechanism and a top view mechanism are all arranged on a vibration reduction table. Operations on the vibration reduction table can reduce the influence of external vibration on the operation of micro-devices, thereby completing efficient and high-precision picking, transfer and release of micro-devices under the action of capillary force. A micro-propulsion pump, an industrial camera and a three-dimensional electric displacement platform can be integrated and controlled by a computer, so that the automatic control of the micro-device operation process can be realized. The micro-operation device based on capillary force of the present invention has a simple structure, can realize automatic control, is easy to operate, and is easy to realize industrial production.

Description

Technical Field

[0001] The present invention belongs to the technical field of micro-operation equipment, and in particular relates to a micro-operation device and method based on capillary force. Background Art

[0002] With the emergence of smart devices and wearable devices, electronic products have been further developed towards miniaturization, multifunctionality and flexibility, and people have put forward higher and higher requirements on the quality of electronic products. However, due to the existence of scale effect, the operation of micro devices has become very challenging. Currently, common micro-manipulation technologies are mainly divided into contact and non-contact: contact micro-manipulation methods are based on piezoelectricity, vacuum, etc. Non-contact micro-manipulation methods are based on field forces, such as electric fields, magnetic fields, light, and sound waves.

[0003] However, in the prior art, contact micromanipulation methods are prone to damage to micro devices, while non-contact micromanipulation devices based on field forces are easily interfered by external factors and usually have special requirements for device materials. For example, based on magnetic field forces, the micro devices themselves are usually required to have magnetism or be magnetized; based on electrostatic forces, electrostatic damage will occur; based on optical tweezers, optical damage will occur. Summary of the invention

[0004] In order to overcome the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a micro-manipulation device and method based on capillary force, which adopts conventional materials and components and utilizes a non-contact method to achieve efficient and high-precision picking, transfer and release of micro devices.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] The capillary force-based micro-operation device disclosed in the present invention comprises a vibration reduction platform, a droplet generation mechanism, a mobile operation mechanism, an oblique view mechanism, a controller and a computer;

[0007] The droplet generation mechanism includes a micro-propelling pump and an injection needle. The micro-propelling pump is provided with a first syringe and a second syringe. When in use, the first syringe and the second syringe can be connected to the injection needle.

[0008] The mobile operating mechanism includes an electric mobile platform and a manual mobile platform. The electric mobile platform is an XYZ three-dimensional electric displacement platform. The manual mobile platform includes an XY two-dimensional manual mobile platform and an XYZ three-dimensional manual mobile platform. The above three mobile platforms are all fixed on the vibration reduction platform through their respective Y-axis mobile platforms.

[0009] The injection needle can be detachably fixed on the XYZ three-dimensional electric displacement platform, and the stage can be detachably fixed on the XY two-dimensional manual moving platform;

[0010] A first microscope lens is provided on the XYZ three-dimensional manual moving platform, and a first industrial camera is detachably connected to the first microscope lens;

[0011] The oblique view mechanism comprises a second microscopic lens and a second industrial camera detachably connected thereto, and an adjustment mechanism for adjusting the position and angle of the second microscopic lens and the second industrial camera;

[0012] The controller is electrically connected to a computer, and the computer can integrate and control the operation of the XYZ three-dimensional electric displacement platform, the micro-propulsion pump, the first industrial camera and the second industrial camera.

[0013] Preferably, the first microscope lens is detachably fixed on the XYZ three-dimensional manual moving platform via a first lens holder.

[0014] Preferably, the adjustment mechanism comprises a connecting block mounted on the vibration reduction table, the connecting block is provided with a supporting rod, and the second microscope lens is connected to the supporting rod via a second lens holder.

[0015] Preferably, there are a plurality of injection needles, and the first syringe and the second syringe can be sealed and connected to the plurality of injection needles via plastic hoses of different diameters.

[0016] Preferably, the injection needle is fixed on the XYZ electric displacement platform through a needle holder.

[0017] Preferably, the micro-propellant pump is also provided with a manual operation panel, which can control the delivery volume and speed of the liquid by manual input.

[0018] Preferably, the controller is a four-channel servo controller, and the three motors of the XYZ three-dimensional electric displacement platform are respectively connected to three channels of the four-channel servo controller; the micro-propulsion pump, the first industrial camera and the second industrial camera are all connected to the computer with their own cables.

[0019] The present invention also discloses a micro-device operation method using the above-mentioned micro-device operation device based on capillary force, comprising the following steps:

[0020] S1: Place the prepared sample on the stage, control the three-dimensional electric displacement platform through the controller, so that the injection needle is directly above the position of the micro-device to be released, use a micro-propulsion pump to transport liquid to the injection needle through the first syringe, and inject a droplet at the position of the micro-device to be released, control the movement of the injection needle to make it directly above the micro-device to be picked up, use a micro-propulsion pump to transport liquid to the injection needle through the first syringe to form a droplet;

[0021] S2: Control the injection needle to move downward so that the droplet contacts the micro-device and forms a liquid bridge, and control the injection needle to lift upward to complete the picking of the micro-device;

[0022] S3: Control the movement of the injection needle to drive the micro-device to the position directly above the micro-device to be released, thereby completing the transfer of the micro-device;

[0023] S4: Control the injection needle to move downward so that the micro-device contacts the liquid droplet on the release substrate and forms a liquid bridge, and control the injection needle to move upward. Since the capillary force between the micro-device and the substrate is greater than the capillary force between the micro-device and the injection needle, when the injection needle rises to a certain position, the upper liquid bridge breaks, completing the release of the micro-device;

[0024] S5: Repeat the above steps as required to complete the picking up, transfer and release of multiple micro devices.

[0025] Preferably, the droplet morphology can be self-adjusted according to the change of the shape of the micro-device, thereby realizing the operation of micro-devices of various shapes (flat, spherical and irregular micro-devices).

[0026] Preferably, according to actual needs, the picking, transferring and releasing operations of the micro-devices can be performed within one stage, or can be performed on a large scale between multiple stages.

[0027] Compared with the prior art, the present invention has the following beneficial effects:

[0028] The micro-device operation device based on capillary force disclosed in the present invention sets the droplet generation mechanism, the mobile operation mechanism and the top view mechanism on the vibration reduction platform. The operation on the vibration reduction platform can reduce the influence of external vibration on the operation of the micro-device, so as to complete the efficient and high-precision picking, transfer and release of the micro-device under the action of capillary force. The operation device can realize the operation of the micro-device in a large range by setting multiple stages, wherein the three-dimensional electric displacement platform is used to control the rapid and high-precision three-dimensional movement of the injection needle, so as to realize the rapid and high-precision transfer of the micro-device, and the three-dimensional manual displacement stage and the oblique view mechanism are mainly used to adjust the camera position or angle so that the workbench is within the focal length range of the industrial camera; the device can monitor the entire operation process of the micro-device in real time and record the operation results by installing an industrial camera and a microscope lens. In addition, the industrial camera, the micro-propelling pump and the three-dimensional electric displacement platform can be integrated and controlled by a computer, so as to realize the automatic control of the operation process of the micro-device. The device has a simple structure, is easy to operate, and can be automatically controlled, and is easy to realize industrial production.

[0029] Furthermore, the simultaneous operation of multiple micro-devices can be achieved by increasing the number of injection needles, thereby significantly improving the operating efficiency of the micro-devices.

[0030] The method for operating micro devices using the above-mentioned device disclosed in the present invention uses pure water as the operating medium, fully utilizes the dominant advantage of capillary force at the microscopic scale, and realizes the smooth picking / releasing, large-scale, efficient and high-precision transfer of micro devices in a non-contact micro-operation manner.

[0031] Furthermore, during the micro-operation process, the droplet morphology can be adjusted according to the change of the shape of the micro-device, and micro-devices of various shapes can be operated; at the same time, the volume of the droplet can be adjusted according to the size of the micro-device using a micro-propulsion pump. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a schematic structural diagram of a micro-device operating device based on capillary force of the present invention;

[0033] Figure 2 A schematic diagram of the operation process of a micro-device in an embodiment of the present invention;

[0034] Figure 3 A schematic diagram of the operation process of a micro-device in an embodiment of the present invention;

[0035] Figure 4 A schematic diagram of the operation process of a micro-device in an embodiment of the present invention;

[0036] Among them: 1-third Y-axis manual translation stage, 2-second X-axis manual translation stage, 3-second L-shaped connecting plate, 4-first industrial camera, 5-first lens holder, 6-first microscope lens, 7-Z-axis manual translation stage, 8-second industrial camera, 9-support rod, 10-second lens holder, 11-slider, 12-second microscope lens, 13-injection needle, 14-stage, 15-injection needle holder, 16-second connecting plate, 17-Z-axis electric translation stage, 18-first L type connecting plate, 19-X-axis electric translation stage, 20-second syringe, 21-first syringe, 22-micro-propulsion pump, 23-vibration damping table, 24-plastic hose, 25-first connecting plate, 26-Y-axis electric translation stage, 27-first X-axis manual translation stage, 28-first Y-axis manual translation stage, 29-connecting block, 30-release substrate, 31-first droplet, 32-second droplet, 33-microdevice, 34-first liquid bridge, 35-microdevice supporting substrate, 36-second liquid bridge. DETAILED DESCRIPTION

[0037] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0038] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0039] The present invention is further described in detail below in conjunction with the accompanying drawings:

[0040] like Figure 1 As shown, a micro-device operating device based on capillary force of the present invention includes a vibration reduction platform 23, a droplet generating mechanism, a moving operating mechanism, an oblique view mechanism, a controller and a computer;

[0041] The droplet generation mechanism includes a micro-propulsion pump 22 and an injection needle 13. The micro-propulsion pump 22 is provided with a first syringe 21 and a second syringe 20. When in use, the first syringe 21 and the second syringe 20 can be connected to the injection needle 13; the mobile operation mechanism includes an electric mobile platform and a manual mobile platform. The electric mobile platform is an XYZ three-dimensional electric displacement platform. The manual mobile platform includes an XY two-dimensional manual mobile platform and an XYZ three-dimensional manual mobile platform. The above three mobile platforms are all fixed on the vibration reduction platform 23 through their respective Y-axis mobile platforms; the injection needle 13 is detachably fixed on the XYZ three-dimensional electric position On the moving platform, a stage 14 is detachably fixed on the XY two-dimensional manual moving platform; a first microscope lens 6 is provided on the XYZ three-dimensional manual moving platform, and a first industrial camera 4 is detachably connected to the first microscope lens 6; the oblique view mechanism includes a second microscope lens 12 and a second industrial camera 8 detachably connected thereto, and an adjustment mechanism for adjusting the position and angle of the second microscope lens 12 and the second industrial camera 8; the controller is electrically connected to a computer, and the computer can integrate and control the operation of the micro-propulsion pump 22, the XYZ three-dimensional electric displacement platform, the first industrial camera 4 and the second industrial camera 8.

[0042] The first microscope lens 6 is detachably fixed on the XYZ three-dimensional manual moving platform through the first lens holder 5; the adjustment mechanism includes a connecting block 29 mounted on the vibration reduction table 23, a support rod 9 is provided on the connecting block 29, and the second microscope lens 12 is connected to the support rod 9 through the second lens holder 10;

[0043] The injection needle 13 can be provided in plurality, and the second syringe 20 and the first syringe 21 can be sealedly connected to the injection needle 13 through plastic hoses 24 of different diameters; the computer integrates and controls the operation of the first industrial camera 4, the second industrial camera 8 and the XYZ electric displacement platform; the injection needle 13 is fixed on the XYZ electric displacement platform through the thread on the needle holder 15;

[0044] The micro-propelling pump 22 is also provided with a manual operation panel, and the amount and speed of liquid delivery in the pump can also be controlled by manual input.

[0045] Example

[0046] See also Figure 1A Y-axis electric translation stage 26 is fixed on the vibration reduction table 23, a first connecting plate 25 is fixed on the object block of the Y-axis electric translation stage 26, an X-axis electric translation stage 19 is fixed to the first connecting plate 25 through hexagon socket bolts, a first L-shaped connecting plate 18 is fixed to the object block of the X-axis electric translation stage 19 through hexagon socket bolts, a Z-axis electric translation stage 17 is fixed to the first L-shaped connecting plate 18 through hexagon socket bolts, a second connecting plate 16 is fixed to the object block of the Z-axis electric translation stage 17 through bolts, an injection needle holder 15 is fixed to the second connecting plate 16 through hexagon socket bolts, an injection needle 13 is arranged on the needle holder 15, and a plurality of injection needles may be arranged;

[0047] The object block of the X-axis electric translation stage 19 can move along the X-axis direction, the object block of the Y-axis electric translation stage 26 can move along the Y-axis direction, and the object block of the Z-axis electric translation stage 17 can move along the Z-axis direction; the X-axis electric translation stage 19, the Y-axis electric translation stage 26 and the Z-axis electric translation stage 17 are combined into an XYZ three-dimensional electric translation platform;

[0048] The vibration reduction table 23 is fixed with a first Y-axis manual translation table 28 and a second Y-axis manual translation table 31 by means of hexagon socket bolts. The first X-axis manual translation table 27 and the second X-axis manual translation table 2 are respectively fixed to the object blocks of the two Y-axis manual translation tables by means of hexagon socket bolts. The first X-axis manual translation table 27 is respectively fixed with the object blocks 14 by means of hexagon socket bolts. The second X-axis manual translation table 2 is respectively fixed with a second L-shaped connecting plate 3 by means of hexagon socket bolts. The second L-shaped connecting plate 3 is respectively fixed with a Z-axis manual translation table 7 by means of hexagon socket bolts. A first lens holder 5 is fixed to the object block of the platform 7 by means of hexagon socket bolts, and the first lens holder 5 supports a first microscopic lens 6. A connecting block 29 is fixed to the vibration reduction platform 23 by means of hexagon socket bolts, and a supporting rod 9 is fixed to the connecting block 29 by means of self-threaded threads. A slider 11 is provided on the supporting rod 9, and a second lens holder 10 is provided on the slider 11. A second microscopic lens 12 is supported on the second lens holder 10, and the first microscopic lens 6 and the second microscopic lens 12 are respectively connected to the first industrial camera 4 and the second industrial camera 8 by means of self-threaded threads.

[0049] The first Y-axis manual translation stage 28 and the third Y-axis manual translation stage 1 can both be moved along the Y-axis by manual control, the first X-axis manual translation stage 27 and the second X-axis manual translation stage 2 can both be moved along the X-axis by manual control, and the Z-axis manual translation stage 7 can both be moved along the Z-axis by manual control. The first Y-axis manual translation stage 28 and the first X-axis manual translation stage 27 form an XY two-dimensional manual translation platform, and the second Y-axis manual translation stage 1, the second X-axis manual translation stage 2 and the Z-axis manual translation stage 7 form an XYZ three-dimensional manual translation platform;

[0050] A micro-propelling pump 22 is arranged on the vibration reduction platform 23, and a first syringe 21 and a second syringe 20 are arranged on the micro-propelling pump 22. The first syringe 21 and the second syringe 20 can be sealedly connected to the injection needle 13 through plastic hoses 24 of different diameters.

[0051] The X-axis electric translation stage 19, the Y-axis electric translation stage 26 and the Z-axis electric translation stage 17 are all connected to the controller via cables;

[0052] The controller used is a four-channel servo controller, which is connected to the computer COM port via an RS232 direct serial line. The micro-propulsion pump 22, the first industrial camera 4, and the second industrial camera 8 are all connected to the computer using their own cables.

[0053] The X-axis electric translation stage 19, the Y-axis electric translation stage 26 and the Z-axis electric translation stage 17 all use DC motors to drive ball screws to drive the load block to achieve reciprocating linear motion. The main parameters are: stroke 25mm, maximum speed 20mm / s, minimum displacement 0.2μm.

[0054] The operating method of the micro-device operating device based on capillary force of the present invention is specifically implemented according to the following steps:

[0055] Step 1, manufacturing micro-devices and releasing substrate samples according to the preparation process;

[0056] Step 2, mounting the prepared sample on the stage 14, the picking up, transfer and release of the micro device can be performed on one stage or between multiple stages, which can be determined according to actual needs;

[0057] Step 3, controlling the X-axis electric translation stage 19, the Y-axis electric translation stage 26 and the Z-axis electric translation stage 17 through the controller, so that the injection needle 13 is located directly above the target position on the release substrate;

[0058] Step 4, using the micro-pump 22 to deliver the liquid to the injection needle 13 through the first syringe 21, and injecting a droplet at the target position on the release substrate;

[0059] Step 5, controlling the movement of the injection needle 13 so that the injection needle 13 is directly above the micro-device to be picked up, using the micro-propulsion pump 22 to deliver the liquid to the injection needle 13 through the first syringe 21, and forming a droplet;

[0060] Step 6, controlling the injection needle 13 to move downward so that the liquid droplet contacts the micro-device and forms a liquid bridge, and controlling the injection needle 13 to lift upward to complete the picking up of the micro-device;

[0061] Step 7, controlling the injection needle 13 to move, driving the micro-device to just above the target position on the release substrate, and completing the transfer of the micro-device;

[0062] Step 8, controlling the injection needle 13 to move downward so that the micro-device contacts the liquid droplet on the release substrate and forms a liquid bridge;

[0063] Step 9, controlling the injection needle 13 to move upward. Since the capillary force between the micro-device and the substrate is greater than the capillary force between the micro-device and the injection needle, when the injection needle rises to a certain position, the upper liquid bridge breaks, thus completing the release of the micro-device.

[0064] Step 10, repeating the above steps can complete the picking up, transfer and release of multiple micro devices.

[0065] The working principle of the above-mentioned micro-device operating device based on capillary force is:

[0066] After the drivers of the micro-propelling pump 22, the X-axis electric displacement stage 17, the Y-axis electric displacement stage 26 and the Z-axis electric displacement stage 17 are installed on the computer, they can be operated under their respective control software panels for independent control. Through secondary development, the above programs are integrated into one to achieve unified control of the hardware. The controller controls the movement of the XYZ three-dimensional electric displacement platform, thereby driving the injection needle 13 to move in the three dimensions of X, Y and Z. The micro-propelling pump 22 transports the liquid in the first syringe 21 or the second syringe 20 to the injection needle 13 and forms droplets. The five manual displacement platforms are all manually controlled. The overall position of the XY two-dimensional manual displacement platform and the XYZ three-dimensional manual displacement platform can be adjusted by changing the placement of the first Y-axis manual displacement platform 28 and the third Y-axis manual displacement platform 1 on the vibration reduction platform 23, and then the positions of the stage 14 and the first industrial camera 4 are determined by manually adjusting the positions of the X / Y / Z axes, and the stage 14 and the first industrial camera 4 are ensured to remain stationary during the operation so that the XYZ three-dimensional electric displacement platform can make corresponding movements to complete the operation of the micro device. The adjustment mechanism composed of the connecting block 29, the support rod 9, the slider 11, and the second lens holder 10 in the top view mechanism can be used to adjust the position and angle of the second industrial camera 8 and the second microscope lens 12. The first industrial camera 4 and the second industrial camera 8 and the first microscope lens 6 and the second microscope lens 12 are mainly responsible for real-time monitoring of the operation process, and observing and recording the operation results.

[0067] Specifically, see Figure 2 to Figure 4 , an operating method of a micro-device operating apparatus based on capillary force, comprising the following steps:

[0068] Step 1, manufacture the micro device 33 and the release substrate 30 according to the preparation process, place the prepared micro device 33 on the micro device carrier substrate 35, and then install the release substrate 30 and the micro device carrier substrate 35 on the stage 14. The picking, transfer and release of the micro device can be carried out in one stage or between multiple stages, which can be determined according to actual needs. The controller controls the X-axis electric translation stage 19, the Y-axis electric translation stage 26 and the Z-axis electric translation stage 17 so that the injection needle 13 is directly above the target position on the release substrate 30, and uses the micro-propelling pump 22 to transport the liquid to the injection needle 13 through the first syringe 21, as shown in FIG. Figure 2 As shown, a first droplet 31 is injected at a target position on a release substrate 30, and the injection needle 13 is controlled to move so that it is directly above a micro-device 33 to be picked up. A micro-advancing pump 22 is used to deliver liquid to the injection needle 13 through the first syringe 21, and a second droplet 32 ​​is formed;

[0069] Step 2: If Figure 3 As shown, the injection needle 13 is controlled to move downward, so that the second liquid droplet 32 ​​contacts the micro-device 33 and forms a first liquid bridge 34, and the injection needle 13 is controlled to lift upward to complete the picking up of the micro-device 33;

[0070] Step 3: Control the movement of the injection needle 13 to drive the micro-device 33 to the position just above the target position on the release substrate 30, thereby completing the transfer of the micro-device 33;

[0071] Step 4: Figure 4 As shown, the injection needle 13 is controlled to move downward, so that the micro-device 33 contacts the first liquid droplet 31 at the target position and forms a second liquid bridge 36, and the injection needle 13 is controlled to move upward. Since the capillary force generated by the second liquid bridge 36 is greater than the capillary force generated by the first liquid bridge 34, when the injection needle 13 rises to a certain position, the first liquid bridge 34 breaks, and the micro-device 33 is released;

[0072] The above steps can be repeated as needed to complete the picking, transfer and release of multiple micro devices.

[0073] The above contents are only for explaining the technical idea of ​​the present invention, and cannot be used to limit the protection scope of the present invention. Any changes made on the basis of the technical solution in accordance with the technical idea proposed by the present invention shall fall within the protection scope of the claims of the present invention.

Claims

1. A micro-device operation method using a micro-operation device based on capillary force, characterized in that: The following steps are involved: S1: placing the prepared sample on the stage (14), controlling the three-dimensional electric displacement platform through a controller so that the injection needle (13) is located directly above the position of the micro-device to be released, using a micro-propelling pump (22) to deliver liquid to the injection needle (13) through a first syringe (21), and injecting a droplet at the position of the micro-device to be released, controlling the movement of the injection needle (13) so that it is located directly above the micro-device to be picked up, and using a micro-propelling pump (22) to deliver liquid to the injection needle (13) through the first syringe (21) to form a droplet; S2: controlling the injection needle (13) to move downward so that the liquid droplet contacts the micro-device and forms a liquid bridge, and controlling the injection needle (13) to lift upward to complete the picking up of the micro-device; S3: Controlling the movement of the injection needle (13) to move the micro-device to the position directly above the location where the micro-device is to be released, thereby completing the transfer of the micro-device; S4: Controlling the injection needle (13) to move downward, so that the micro-device contacts the liquid droplet on the release substrate and forms a liquid bridge, and controlling the injection needle (13) to move upward. Since the capillary force between the micro-device and the release substrate is greater than the capillary force between the micro-device and the injection needle, when the injection needle rises to a certain position, the upper liquid bridge breaks, and the release of the micro-device is completed; S5: Repeat the above steps as required to complete the picking up, transfer and release of multiple micro devices.

2. The micro-device operation method performed by the micro-operation device based on capillary force according to claim 1, characterized in that: The droplet morphology is self-adjusted according to the change of the shape of the micro-device to realize the operation of micro-devices of various shapes.

3. The micro-device operation method performed by the micro-operation device based on capillary force according to claim 1, characterized in that: Depending on actual needs, the picking, transfer, and release operations of micro devices can be performed within one stage, or on a large scale between multiple stages.

4. A micro-manipulation device based on capillary force for implementing the micro-device operation method according to any one of claims 1 to 3, characterized in that: It includes a vibration reduction table (23), a droplet generation mechanism, a moving operation mechanism, an oblique view mechanism, a controller and a computer; The droplet generation mechanism comprises a micro-propelling pump (22) and an injection needle (13); a first syringe (21) and a second syringe (20) are arranged on the micro-propelling pump (22); when in use, the first syringe (21) and the second syringe (20) can be connected to the injection needle (13); The mobile operating mechanism comprises an electric mobile platform and a manual mobile platform, the electric mobile platform is an XYZ three-dimensional electric displacement platform, and the manual mobile platform comprises an XY two-dimensional manual mobile platform and an XYZ three-dimensional manual mobile platform, and the above three mobile platforms are all fixed on the vibration reduction platform (23) through their respective Y-axis mobile platforms; The injection needle (13) is detachably fixed on the XYZ three-dimensional electric displacement platform, and the loading platform (14) is detachably fixed on the XY two-dimensional manual moving platform; A first microscope lens (6) is provided on the XYZ three-dimensional manual movable platform, and a first industrial camera (4) is detachably connected to the first microscope lens (6); The oblique view mechanism comprises a second microscopic lens (12) and a second industrial camera (8) detachably connected thereto, and an adjustment mechanism for adjusting the position and angle of the second microscopic lens (12) and the second industrial camera (8); The controller is electrically connected to a computer, and the computer is capable of integratedly controlling the operation of the XYZ three-dimensional electric displacement platform, the micro-propulsion pump (22), the first industrial camera (4), and the second industrial camera (8); The first microscopic lens (6) is detachably fixed to the XYZ three-dimensional manual moving platform via a first lens holder (5); the adjustment mechanism comprises a connecting block (29) mounted on a vibration reduction platform (23); a support rod (9) is provided on the connecting block (29); and the second microscopic lens (12) is connected to the support rod (9) via a second lens holder (10).

5. The micro-manipulation device based on capillary force according to claim 4, characterized in that: A plurality of injection needles (13) are provided, and the first syringe (21) and the second syringe (20) can be sealedly connected to the plurality of injection needles (13) via plastic hoses (24) of different diameters.

6. The micro-manipulation device based on capillary force according to claim 4, characterized in that: The injection needle (13) is fixed on the XYZ electric displacement platform via a needle holder (15).

7. The micro-manipulation device based on capillary force according to claim 4, characterized in that: The micro-propelling pump (22) is also provided with a manual operation panel, which can control the delivery volume and speed of the liquid by manual input.

8. The capillary force-based micro-manipulation device according to claim 4, characterized in that: The controller is a four-channel servo controller, and the three motors of the XYZ three-dimensional electric displacement platform are respectively connected to three channels of the four-channel servo controller; the micro-propulsion pump (22), the first industrial camera (4) and the second industrial camera (8) are all connected to the computer using their own cables.

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