Device and method for measuring micro-nano particles

Abstract

The embodiments of the present application disclose a device and method for measuring micro-nano particles. The device includes: a cavity and at least two microporous membranes, wherein the microporous membranes are arranged in series in the cavity to divide the cavity into a plurality of chambers, and the microporous membranes have micropores, two adjacent chambers are connected through the micropores, and each chamber has electrodes. The method includes: allowing the micro-nano particles to be measured to continuously pass through the micropores of the device along with the electrolyte; obtaining the electrical signal data between the two electrodes adjacent to each micropore during the process of the micro-nano particles passing through each micropore; and determining the attribute data of the micro-nano particles according to the electrical signal data. The technical solution of the embodiments of the present application can realize the measurement of the three-dimensional morphological properties of micro-nano particles in a solution state.

Description

Technical Field

[0001] The present application relates to the technical field of micro-nano particle measurement, and in particular, to a device and method for measuring micro-nano particles. Background Art

[0002] Based on the special properties of particulate matter, it is widely used in the fields of medicine, chemical industry, materials, etc. In the application of particulate matter, it is very important to measure the three-dimensional morphology and other properties of particulate matter (hereinafter referred to as particles).

[0003] At present, commonly used particle measurement equipment includes optical microscopes, scanning electron microscopes and transmission electron microscopes. However, due to the low resolution of optical microscopes, it is difficult to observe particles smaller than 300 nanometers using optical microscopes, which is not suitable for the measurement of micro-nano particles. Scanning electron microscopes and transmission electron microscopes can obtain the three-dimensional morphology of particles by tilting particle samples at different angles under vacuum conditions, but they cannot obtain true morphological information for biological particle samples or particle samples that need to be measured in solution.

[0004] Therefore, the prior art still has the problem of being unable to measure the three-dimensional morphology of micro-nanoparticles in solution. Summary of the invention

[0005] To solve the above technical problems, an embodiment of the present application provides a device for measuring micro-nano particles, and also provides a method for measuring micro-nano particles, so as to detect the three-dimensional morphological properties of micro-nano particles in a liquid state.

[0006] Among them, the technical solution adopted in this application is:

[0007] A device for measuring micro-nano particles comprises a cavity and at least two microporous membranes, wherein the microporous membranes are arranged in series in the cavity to divide the cavity into a plurality of chambers, and the microporous membranes are provided with micropores, two adjacent chambers are connected through the micropores, and each chamber has an electrode.

[0008] In another exemplary embodiment, in a measuring state, an electrode at one end of the cavity is grounded, and voltages of different magnitudes are loaded on the remaining electrodes, and the magnitude of the voltages is arranged corresponding to the distance between the electrode and the grounded electrode.

[0009] In another exemplary embodiment, in a measuring state, each of the chambers is filled with an electrolyte, and the micro-nanoparticles to be measured continuously pass through the micropores along with the electrolyte.

[0010] In another exemplary embodiment, the micropores on each of the microporous membranes have the same shape, and the centers of the micropores are located on the same straight line.

[0011] In another exemplary embodiment, the inner diameter of the micropore is 1 nanometer to 10 micrometers.

[0012] In another exemplary embodiment, the microporous membrane has a thickness of 1 nanometer to 10 micrometers.

[0013] In another exemplary embodiment, the microporous membrane is integrally formed with the cavity, or the microporous membrane is disposed in the cavity in the form of a membrane stack, and a spacing distance is provided between each of the microporous membranes.

[0014] In another exemplary embodiment, the microporous membrane is an inorganic membrane, and the material of the inorganic membrane includes any one of low-stress silicon nitride, silicon oxide, and silicon wafer.

[0015] In another exemplary embodiment, the device further comprises a liquid driver, which is adjacent to the chamber located at one end of the cavity and is used to drive the flow of liquid in the device.

[0016] In another exemplary embodiment, the driving mode of the liquid driver includes any one of electric field force driving, hydraulic force driving, and magnetic field force driving.

[0017] A method for measuring micro-nano particles, comprising: allowing the micro-nano particles to be measured to continuously pass through the micropores of the device as described above along with the electrolyte; obtaining electrical signal data between two electrodes adjacent to each micropore during the process of the micro-nano particles passing through each micropore; and determining the attribute data of the micro-nano particles based on the electrical signal data.

[0018] In another exemplary embodiment, determining the property data of the micro-nano particles according to the electrical signal data includes: determining the speed at which the micro-nano particles continuously pass through the two adjacent micropores and the potential difference between the two adjacent micropores according to the electrical signal data; and determining the electrical mobility of the micro-nano particles when they continuously pass through the two adjacent micropores according to the speed at which the micro-nano particles continuously pass through the two adjacent micropores and the potential difference.

[0019] In another exemplary embodiment, determining the property data of the micro-nano particles based on the electrical signal data includes: dividing the electrical signal data into a plurality of signal units; comparing the signal units with signal units corresponding to standard signals, respectively, to obtain a contrast coefficient between the electrical signal data and the standard signal; and obtaining the sphericity value corresponding to the standard signal with the highest contrast coefficient as the sphericity value of the micro-nano particles.

[0020] In another exemplary embodiment, determining the property data of the micro-nano particles based on the electrical signal data includes: inputting the electrical signal data into a machine learning model, wherein the machine learning model is trained based on the electrical signal data between two adjacent electrodes when a micro-nano object with an asymmetric morphology passes through the micropore; and obtaining the three-dimensional morphology of the micro-nano particles predicted by the machine learning model based on the electrical signal data.

[0021] In another exemplary embodiment, the method further includes: calculating the initial particle size of the micro-nano particles based on the conductivity of the electrolyte, the approximate spherical radius of the micro-nano particles and the radius of the micropores; if the ratio of the approximate spherical radius of the micro-nano particles to the radius of the micropores is greater than a preset threshold, determining a correction coefficient based on the ratio, and correcting the initial particle size by the correction coefficient to obtain the particle size of the micro-nano particles.

[0022] In the above technical solution, the cavity of the device for measuring micro-nano particles is divided into multiple chambers by a series of microporous membranes, two adjacent chambers are connected through micropores on the microporous membranes, and each chamber has an electrode. In the measurement state, each chamber is filled with an electrolyte, and the electrolyte contains the micro-nano particles to be measured. The micro-nano particles pass through each micropore in turn with the flow of the electrolyte. By analyzing the electrical signal data between the two electrodes adjacent to the micropores in this process, the three-dimensional morphological properties of the micro-nano particles to be measured in the electrolyte can be obtained, thereby realizing the measurement of the three-dimensional morphological properties of the micro-nano particles in the solution state.

[0023] It should be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the present application.

[0025] Figure 1 is a cross-sectional view of a device for measuring micro-nano particles according to an exemplary embodiment;

[0026] Figure 2 It is achieved by collecting a standard spherical particle continuously passing through Figure 1 A schematic diagram of a set of continuous electrical signal data obtained from electrical signal data between two electrodes adjacent to each micropore during the process of each micropore of the device shown;

[0027] Figure 3 It is achieved by collecting a standard cubic particle passing through Figure 1A schematic diagram of a set of continuous electrical signal data obtained from electrical signal data between two electrodes adjacent to each micropore during the process of each micropore of the device shown;

[0028] Figure 4 is a schematic diagram showing signal unit division for electrical signal data according to an exemplary embodiment;

[0029] Figure 5 This is a schematic diagram of the electrical signal data collected when a styrene microsphere with a diameter of 200 nanometers passes through multiple micropores continuously.

[0030] Explanation of reference numerals: 100, device for measuring micro-nanoparticles; 101, cavity; 102, microporous membrane; 103, micropore; 104, liquid driving device.

[0031] The above-mentioned drawings have shown clear embodiments of the present application, which will be described in more detail hereinafter. These drawings and textual descriptions are not intended to limit the scope of the concept of the present application in any way, but to illustrate the concept of the present application to those skilled in the art by referring to specific embodiments. DETAILED DESCRIPTION

[0032] Here, exemplary embodiments will be described in detail, examples of which are shown in the accompanying drawings. When the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The implementations described in the following exemplary embodiments do not represent all implementations consistent with the present application. Instead, they are only examples of devices and methods consistent with some aspects of the present application as detailed in the attached claims.

[0033] First of all, it should be noted that the micro-nano particles described in this embodiment refer to particles with sizes in the micrometer and nanometer levels, generally including organic particles, inorganic particles, magnetic particles, silica particles, agarose gel particles, styrene particles, metal particles, colloidal particles, particles conjugated with molecules, particles conjugated with biomolecules, particles conjugated with immunoglobulins, particles conjugated with nucleic acids, biological particles, biological cells, blood cells, sperm, egg cells, microbial cells, bacterial cells, fungal cells, viruses, subcellular organelles, mitochondria, cell nuclei, chloroplasts, lysosomes, ribosomes, atomic particles, ionic particles, molecular particles, polymer particles, nucleic acids and their chemical variants, deoxyribonucleic acids and their chemical variants, nucleic acids and their chemical variants, proteins and their chemical variants. Among them, inorganic particles generally include granular materials such as silicon dioxide, titanium dioxide, aluminum oxide, calcium carbonate, and aluminum nitride.

[0034] Micro-nano particles have unique electrical, optical and magnetic properties. The particle size, potential and other physical properties of micro-nano particles have a great influence on their performance. Therefore, it is very necessary to measure the physical properties of micro-nano particles. For example, biological macromolecules include four types of substances: nucleic acids, proteins, sugars and lipids. These biological macromolecules exist in the form of micro-nano particles in living organisms. Measuring the physical properties of these biological macromolecules will be of great significance for the study of life behavior.

[0035] See also Figure 1 , Figure 1 It is a cross-sectional view of a device for measuring micro-nano particles according to an exemplary embodiment. The device can be used to measure three-dimensional morphological properties of micro-nano particles, such as electrical mobility, sphericity value, and particle size.

[0036] like Figure 1 As shown, in an exemplary embodiment, the device 100 for measuring micro-nano particles includes a cavity 101 and at least two microporous membranes 102 ( Figure 1 3 are shown in the figure), wherein each microporous membrane 102 is arranged in series in the cavity 101 to divide the cavity 101 into multiple chambers, and microporous membranes 102 are provided with micropores 103, so that two adjacent chambers are connected through the micropores 103, and each chamber has an electrode.

[0037] In the measurement state, each chamber is filled with an electrolyte containing the micro-nanoparticles to be measured, so as to provide a solution environment for the measurement of the micro-nanoparticles. The micro-nanoparticles pass through each micropore 103 in sequence with the flow of the electrolyte, and the electrode at one end of the cavity 101 is grounded, and the other electrodes are respectively loaded with voltages of different magnitudes. For example, the conductivity of the electrolyte in the electrolyte can be 10 -6 ~10 -3 S / cm (Siemens per meter) range.

[0038] The electrolyte flows from the chamber at one end of the cavity 101 to the chamber at the other end of the cavity 101, and its flow direction is determined by the driving direction of the liquid driver 104 at one end of the cavity 101. Figure 1 As shown, in one embodiment, the liquid driver 104 is located at the bottom of the chamber 101 and is adjacent to the bottom chamber. The driving direction of the liquid driver 104 for the electrolyte can be from the top chamber to the bottom chamber, or from the bottom chamber to the top chamber, which is not limited here. The liquid driver 104 can also be located at the top of the chamber 101 and is adjacent to the top chamber.

[0039] The driving mode of the liquid driver 104 can be electric field force driving, hydraulic driving, magnetic field force driving, fluid driving, air pressure driving, osmotic pressure driving, Brownian motion driving, capillary force driving, temperature difference diffusion driving, etc. Correspondingly, the liquid driver 104 can be a device such as a liquid pump, an air pressure device, a syringe, etc. that can provide a driving force for the flow of the electrolyte. Exemplarily, the driving mode of the liquid driver 104 is any one of electric field force driving, hydraulic driving, and magnetic field force driving to provide a fixed driving force for the flow of the electrolyte, thereby driving the electrolyte to flow stably.

[0040] In addition, the electrode at one end of the cavity 101 is grounded, and voltages of different magnitudes are applied to the remaining electrodes, and the magnitude of the applied voltages is arranged in a sequence corresponding to the distance between the electrode and the grounded electrode. Figure 1 As shown, if the electrode in the top chamber is grounded, that is, V0=0V, the voltages applied to the other three electrodes are V3≥V2≥V1, so that the intensity of the electric field formed between two adjacent electrodes increases successively, ensuring that the micro-nano particles continuously pass through each micropore 103 with the flow of the electrolyte. The electrodes can be made of materials such as platinum or silver chloride.

[0041] As the micro-nano particles pass through each micropore 103 in sequence with the flow of electrolyte, the electrical signal data between the two electrodes adjacent to the micropore 103 when the micro-nano particles pass through the micropore 103 is measured respectively. By analyzing the obtained electrical signal data, the three-dimensional morphological properties of the micro-nano particles, such as electrical mobility, sphericity value, and particle size, can be obtained, thereby solving the problem in the prior art that the properties of micro-nano particles in the solution state cannot be measured.

[0042] The microporous membrane 102 may be an organic membrane or an inorganic membrane.

[0043] In one embodiment, the microporous membrane 102 is an inorganic membrane, that is, the microporous membrane 102 is made of inorganic materials. Compared with organic membranes, inorganic membranes have better stretchability, which is conducive to the movement of micro-nano particles through the micropores 103 along with the flow of electrolyte. Exemplarily, the microporous membrane 102 can be made of inorganic materials such as low-stress silicon nitride, silicon nitride or silicon wafers. The microporous membrane 102 made of these inorganic materials has a better film-forming effect and the manufacturing technology is more mature.

[0044] The thickness of the microporous membrane 102 can be 1 nanometer to 10 micrometers, and the inner diameter of the micropore 103 can be 1 nanometer to 10 micrometers, wherein the inner diameter of the micropore 103 is the aperture of the micropore 103, which refers to the distance in the direction perpendicular to the direction in which the micro-nano particles move through the device 100 during the measurement process. The micropore 103 can be a cylindrical, rectangular, conical, trapezoidal, or other geometric shapes. For example, when the micropore 103 is cylindrical, the inner diameter of the micropore 103 is the diameter of the bottom circle of the cylinder.

[0045] The microporous membrane 102 and the cavity 101 can be integrally formed, so that the device 100 has a high stability. The microporous membrane 102 can also be arranged in the cavity 101 in a membrane stacking manner, and each microporous membrane 102 has a certain spacing distance. For example, a plurality of fluid grooves can be arranged on the inner surface of the cavity 101, and adjacent fluid grooves are spaced a certain distance apart. The microporous membrane 102 is fixed in the fluid groove, thereby realizing the membrane stacking arrangement of the microporous membrane 102.

[0046] The position, inner diameter and thickness of the micropores 103 on each microporous membrane 102 can be completely consistent, so that the centers of the micropores 103 are located on the same straight line and the movement path of the micro-nano particles in the device 100 remains straight. The spacing between each microporous membrane 102 can be the same or different.

[0047] Another exemplary embodiment of the present invention further provides a method for measuring micro-nano particles, which is implemented based on the device for measuring micro-nano particles described in the above embodiments to determine the property data of the micro-nano particles to be measured.

[0048] In this method, the micro-nano particles to be measured are first allowed to continuously pass through multiple micropores in the device described in the above embodiment along with the electrolyte, and then the electrical signal data between two electrodes adjacent to each micropore is obtained during the process of the micro-nano particles passing through each micropore, so as to determine the property data of the micro-nano particles based on the acquired electrical signal data.

[0049] It should be noted that by collecting the corresponding electrical signal data during the process of micro-nano particles continuously passing through multiple micropores, a set of continuous electrical signal data can be obtained. Based on the analysis of the continuous electrical signal data, the property information related to the three-dimensional morphology of the micro-nano particles can be determined.

[0050] Below Figure 1 The device 100 for measuring micro-nano particles is used as an example to describe the method provided in this embodiment in detail.

[0051] exist Figure 1 In the device 100 shown, three microporous membranes 102 are provided in the cavity 101, and the microporous membranes 102 divide the cavity 101 into four chambers, and the micro-nano particles to be measured continuously pass through the three micropores 103 with the flow of the electrolyte. In the process of the micro-nano particles flowing with the electrolyte, they are prone to flipping, tilting, etc., so that the micro-nano particles pass through each micropore 103 in different postures. In the process of the micro-nano particles passing through each micropore 103 in different postures, the electrical signal data between the two electrodes adjacent to the micropore 103 may be different.

[0052] See also Figure 2 and Figure 3 ,in Figure 2 is a schematic diagram of a set of continuous electrical signal data obtained by collecting electrical signal data between two electrodes adjacent to each micropore 103 during a process in which a standard spherical particle continuously passes through each micropore 103. Figure 3 It is a schematic diagram of a set of continuous electrical signal data obtained by collecting electrical signal data between two electrodes adjacent to each micropore 103 in the process of a standard cubic particle continuously passing through each micropore 103 .

[0053] It can be seen that for micro-nanoparticles with uniform three-dimensional morphology, e.g. Figure 2 For the spherical particles shown in the figure, the changes in the electrical signals on the two electrodes adjacent to each micropore 103 are not much different when the particles pass through each micropore 103. However, for micro-nanoparticles with non-uniform three-dimensional morphology, for example Figure 3 As shown in the figure, when the rectangular particle passes through each microhole 103 , the electrical signal changes on the two electrodes adjacent to each microhole 103 are quite different.

[0054] In an exemplary embodiment, the property data of the micro-nano particles include the electrical mobility of the micro-nano particles. The speed at which the micro-nano particles continuously pass through two adjacent micropores 103 and the potential difference between the two adjacent micropores 103 can be determined based on the electrical signal data, so as to determine the electrical mobility of the micro-nano particles when they continuously pass through two adjacent micropores 103 based on the obtained speed and potential difference.

[0055] The time for the micro-nano particles to continuously pass through two adjacent micropores 103 can be obtained based on the electrical signal data, and then the speed at which the micro-nano particles continuously pass through the two adjacent micropores 103 can be determined by calculating the ratio of the distance between the two adjacent micropores 103 and the time. The potential difference between the two adjacent micropores 103 can be determined based on the electric field strength and the distance between the two adjacent micropores 103.

[0056] For example, if the distance between two adjacent micropores 103 is 1000 nanometers, the time interval for the micro-nano particles to pass through the two micropores 103 is 1 millisecond, and the potential difference caused is 100 millivolts, then the calculated electrical mobility of the micro-nano particles when they pass through the two adjacent micropores 103 continuously is 10 -8 m 2 V -1 s -1 .

[0057] The surface potential of the micro-nano particle can be further determined based on the determined electrical mobility of the micro-nano particle when it passes through two adjacent micropores 103 continuously. The surface potential of the micro-nano particle corresponds to the posture of the micro-nano particle when it passes through the micropore 103 .

[0058] Therefore, according to the change of the surface potential of the micro-nano particle in the process of continuously passing through two adjacent micropores 103, the posture change of the micro-nano particle in the process of continuously passing through the micropores 103 can be determined, so as to analyze and obtain the three-dimensional morphology of the micro-nano particle.

[0059] In another exemplary embodiment, the attribute data of the micro-nano particles include the sphericity value of the micro-nano particles. The electrical signal data is divided into a plurality of signal units, and then the signal units are respectively compared with the signal units corresponding to the standard signal to obtain a contrast coefficient between the electrical signal data and the standard signal, so that the sphericity value corresponding to the standard signal with the highest contrast coefficient is obtained as the sphericity value of the micro-nano particles.

[0060] First of all, it should be noted that Figure 4 It is a schematic diagram of a set of electrical signal data collected during a process in which a micro-nano particle passes through three micropores 103 continuously, which contains three independent electrical signal data, each independent electrical signal data corresponds to the process of the micro-nano particle passing through different micropores 103, and these three independent electrical signal data are continuous in time.

[0061] like Figure 4 As shown, for the electric signal data with sinusoidal distribution, the electric signal data can be divided with the electric signal peak as the dividing point, thereby obtaining two signal units. For the electric signal data with other distribution forms, the electric signal data can be divided according to the set time interval, or according to the slope change trend of the electric signal, which is not limited here.

[0062] The electrical signal data is divided into several signal units, and the slope function f(θ, r) of each signal unit needs to be calculated. The calculation formula of the slope function f(θ, r) is as follows:

[0063] f(θ,r)=arctan(θ)

[0064] Where r represents the slope length of a single signal unit, and θ represents the slope angle of a single signal unit.

[0065] The standard signal is known information obtained in advance, and is the electrical signal data collected during the movement of the micro-nano particles with a determined sphericity value through the micro-pore 103. Therefore, the standard signal reflects the sphericity value of the micro-nano particles. The standard signal needs to be pre-divided into several signal units according to the above method.

[0066] By comparing the slope function of each signal unit with the slope function of the signal unit corresponding to the standard signal, the contrast coefficient between each signal unit of the electrical signal data and each signal unit of the standard signal can be obtained. The contrast coefficient reflects the similarity between each signal unit. Therefore, the higher the contrast coefficient between signal units, the closer the sphericity values ​​between micro-nanoparticles are.

[0067] For each piece of electrical signal data, the contrast coefficient between the electrical signal data and the standard signal is obtained by calculating the average value of the contrast coefficients of all signal units divided by the electrical signal data.

[0068] To ensure the feasibility of this embodiment, it is necessary to provide in advance standard signals of micro-nanoparticles with determined sphericity values ​​of multiple types, and calculate the contrast coefficients between the electrical signal data obtained during the measurement process and the different standard signals, so as to determine that the sphericity value corresponding to the standard signal with the highest contrast coefficient is the sphericity value of the measured micro-nanoparticles.

[0069] Figure 5 1 is a schematic diagram of a set of electrical signal data collected from a styrene microsphere with a diameter of 200 nanometers passing through three micropores 103 in an actual measurement environment. Figure 5 By analyzing the electrical signal data shown, it can be obtained that the sphericity value of the styrene microspheres is 0.95.

[0070] It should be noted that, generally speaking, for nearly spherical micro-nano particles, the sphericity value obtained by the method provided in this embodiment is above 0.8, while for rod-shaped micro-nano particles, the sphericity value obtained is below 0.2.

[0071] It should also be noted that there is a certain corresponding relationship between the aspect ratio of micro-nano particles and the sphericity value of the micro-nano particles. Therefore, the aspect ratio of micro-nano particles also has a certain influence on the measurement of the sphericity value of micro-nano particles.

[0072] In another exemplary embodiment, the electrical signal data obtained during the measurement process can also be input into a machine learning model, so that the machine learning model predicts the three-dimensional morphology of the micro-nano particles based on the input electrical signal data, thereby directly obtaining the three-dimensional morphology of the micro-nano particles.

[0073] It should be noted that the machine learning model used in this embodiment is trained in advance based on the electrical signal data between two electrodes adjacent to the micropore 103 when the micro-nanoparticles with asymmetric morphology pass through the micropore 103.

[0074] In another exemplary embodiment, the attribute data of the micro-nano particles also include the particle size of the micro-nano particles. The initial particle size of the micro-nano particles is calculated according to the conductivity of the electrolyte, the approximate spherical radius of the micro-nano particles, and the radius of the micropore 103. If the ratio of the approximate spherical radius of the micro-nano particles to the radius of the micropore 103 is greater than a preset threshold, a correction coefficient is determined according to the ratio, and the initial particle size is corrected by the correction coefficient to obtain the particle size of the micro-nano particles.

[0075] Initial particle size of micro-nanoparticles The calculation formula is as follows:

[0076]

[0077] Where d represents the approximate spherical radius of the micro-nano particle, D represents the radius of the micropore 103, and ρ represents the conductivity of the electrolyte. If the particle size of the micro-nano particle is much smaller than the radius of the micropore 103, for example, the ratio d / D of the approximate spherical radius of the micro-nano particle to the radius of the micropore 103 is less than a set threshold, the initial particle size is the particle size of the micro-nano particle.

[0078] If the ratio of the approximate spherical radius of the micro-nano particle to the radius of the micropore 103 is greater than a preset threshold, a correction coefficient is used to correct the initial particle size to obtain the particle size of the micro-nano particle. The calculation formula is as follows:

[0079]

[0080] The correction coefficient S is determined according to the ratio of the approximate spherical radius of the micro-nano particle to the radius of the micropore 103 . For example, the correction coefficient S can be determined according to Table 1.

[0081] d / D S d / D S 0.1 1.00 0.6 1.21 0.2 1.00 0.7 1.38 0.3 1.02 0.8 1.71 0.4 1.05 0.9 2.56 0.5 1.11 0.95 3.86

[0082] Table 1

[0083] In summary, the device and method provided in the present application can measure the three-dimensional morphological properties of micro-nano particles, such as electrical mobility, sphericity value, and particle size, thereby solving the problem in the prior art that the properties of micro-nano particles in solution cannot be measured.

[0084] The above content is only a preferred exemplary embodiment of the present application and is not intended to limit the implementation scheme of the present application. A person skilled in the art can easily make corresponding changes or modifications based on the main concept and spirit of the present application. Therefore, the scope of protection of the present application shall be based on the scope of protection required by the claims.

Claims

1. A device for measuring micro-nano particles, characterized in that: It comprises a cavity and at least two microporous membranes, wherein: The microporous membrane is arranged in series in the cavity to divide the cavity into a plurality of chambers, and the microporous membrane has micropores, two adjacent chambers are connected through the micropores, and each chamber has an electrode; In the measuring state, the electrode located at one end of the cavity is grounded, and voltages of different magnitudes are loaded on the other electrodes. The magnitude of the voltages corresponds to the distance between the electrodes and the grounded electrode, and each of the chambers is filled with an electrolyte. The micro-nanoparticles to be measured pass through the micropores continuously along with the electrolyte.

2. The device according to claim 1, characterized in that The device further comprises a liquid driver, which is located adjacent to the chamber at one end of the cavity and is used for driving the liquid in the device to flow.

3. The device according to claim 2, characterized in that: The driving mode of the liquid driver includes any one of electric field force driving, hydraulic force driving, and magnetic field force driving.

4. The device according to claim 1, characterized in that The micropores on each microporous membrane have the same shape, and the centers of the micropores are located on the same straight line.

5. The device according to claim 1, characterized in that The inner diameter of the micropore is 1 nanometer to 10 micrometers.

6. The device according to claim 1, characterized in that The thickness of the microporous membrane is 1 nanometer to 10 micrometers.

7. The device according to claim 1, characterized in that: The microporous membrane is integrally formed with the cavity; or the microporous membrane is disposed in the cavity in the form of a membrane stack, and there is a spacing distance between each of the microporous membranes.

8. The device according to claim 1, characterized in that The microporous membrane is an inorganic membrane, and the material of the inorganic membrane includes any one of low-stress silicon nitride, silicon oxide, and silicon wafer.

9. A method for measuring micro-nano particles, characterized in that: include: Allowing the micro-nanoparticles to be measured to continuously pass through the micropores of the device according to any one of claims 1 to 8 along with the electrolyte; Acquiring electrical signal data between two electrodes adjacent to each of the micropores during the process of the micro-nano particles passing through each of the micropores; The property data of the micro-nano particles are determined according to the electrical signal data.

10. The method according to claim 9, characterized in that Determining the property data of the micro-nano particles according to the electrical signal data includes: Determine the speed at which the micro / nano particles continuously pass through the two adjacent micropores and the potential difference between the two adjacent micropores according to the electrical signal data; The electrical mobility of the micro-nano particles when they continuously pass through the two adjacent micropores is determined according to the speed at which the micro-nano particles continuously pass through the two adjacent micropores and the potential difference.

11. The method according to claim 9, characterized in that Determining the property data of the micro-nano particles according to the electrical signal data includes: Dividing the electrical signal data into a plurality of signal units; Comparing the signal units with signal units corresponding to the standard signal respectively, to obtain a comparison coefficient between the electrical signal data and the standard signal; The sphericity value corresponding to the standard signal with the highest contrast coefficient is obtained as the sphericity value of the micro-nano particles.

12. The method according to claim 9, characterized in that Determining the property data of the micro-nano particles according to the electrical signal data includes: Inputting the electrical signal data into a machine learning model, wherein the machine learning model is trained based on electrical signal data between two adjacent electrodes when a micro-nano object with an asymmetric morphology passes through the micropore; The three-dimensional morphology of the micro-nano particles predicted by the machine learning model based on the electrical signal data is obtained.

13. The method according to claim 9, characterized in that The method further comprises: Calculating the initial particle size of the micro-nano particles according to the conductivity of the electrolyte, the approximate spherical radius of the micro-nano particles and the radius of the micropores; If the ratio of the approximate spherical radius of the micro-nano particle to the radius of the micropore is greater than a preset threshold, a correction coefficient is determined according to the ratio, and the initial particle size is corrected by the correction coefficient to obtain the particle size of the micro-nano particle.

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