Wafer clamping device

Abstract

The present invention discloses a wafer clamping device, comprising a clamping arm, a connecting assembly, and at least three wafer clamping hooks. The clamping arm is provided with an air inlet on its side, and an exhaust mechanism connected to the air inlet is installed inside the clamping arm. The connecting assembly includes a vertical axis fixed to the bottom of the clamping arm, a horizontal axis fixed perpendicular to the vertical axis, and a circular ring arranged around the horizontal axis, the circular ring being rotatable about the horizontal axis. The wafer clamping hooks are mounted on the circular ring and are movable relative to the circular ring. The present invention can efficiently clamp wafers placed vertically or horizontally.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor manufacturing, and in particular relates to a wafer clamping device. Background Art

[0002] In the semiconductor manufacturing process, wafers need to be coated and photolithography. Before and after the above processes, wafers stored vertically in wafer storage boxes or horizontally in glass containers need to be taken out. During the large-scale production of wafers, each operation needs to be fast and time-saving. Due to the thin thickness and fragility of wafers, ordinary tweezers often need to be used to pick up wafers slowly and carefully, which takes a lot of time and is prone to problems such as crushing or falling off. Summary of the Invention

[0003] The purpose of the present invention is to overcome the deficiencies in the prior art and to provide a wafer clamping device that can efficiently clamp wafers placed vertically or horizontally.

[0004] The present invention provides the following technical solutions:

[0005] A wafer clamping device comprises a clamping arm, a connecting assembly and at least three wafer clamping hooks;

[0006] An air suction port is provided on the side of the clamping arm, and an air extraction mechanism connected to the air suction port is installed inside the clamping arm;

[0007] The connecting assembly includes a vertical shaft fixed to the bottom of the clamping arm, a horizontal shaft fixed perpendicular to the vertical shaft, and a circular ring arranged on the periphery of the horizontal shaft, and the circular ring can rotate around the horizontal shaft;

[0008] The wafer clamping hook is installed on the circular ring and can move relative to the circular ring.

[0009] Preferably, the air extraction mechanism includes an air cylinder, an air duct connected to the air cylinder, a piston disposed in the air cylinder, and a piston handle connected to the piston, the piston handle is located outside the clamping arm, and the air duct is connected to the air inlet.

[0010] Preferably, the wafer clamping hook includes a fixedly connected collar, a connecting rod, a rotating shaft, and a hook body rotatably connected to the rotating shaft.

[0011] Preferably, the wafer clamp hook also includes a fixing lock for fixing the rotating shaft and the hook body, and the fixing lock includes a rotating rod and a fixing block and a clamping block that are rotatably connected by the rotating rod, and the end of the clamping block is provided with a clamping groove that can engage with the rotating shaft.

[0012] Preferably, the end of the hook body of the wafer clamp hook is wedge-shaped.

[0013] Preferably, the length of the wafer clamp hook is 8-12 cm.

[0014] Preferably, the transverse axis is located at the center of the circular ring and divides the circular ring into two semicircular rings, and each of the semicircular rings is provided with at least one wafer clamping hook.

[0015] Preferably, there are three wafer clamping hooks, which are installed on two semicircular rings in a ratio of 2:1.

[0016] Preferably, a groove capable of engaging with a wafer clamping hook is provided on a side of the clamping arm opposite to the air inlet.

[0017] Compared with the prior art, the beneficial effects of the present invention are: the circular ring in the present invention can rotate around the horizontal axis, and the wafer clamping hook can move relative to the circular ring, thereby realizing the position adjustment of the wafer clamping hook; when it is necessary to clamp the wafer stored vertically in the storage box, the wafer clamping hook is adjusted to be in the same vertical plane as the air suction port, the exhaust mechanism draws air so that the air suction port is adsorbed on the surface of the wafer, and at the same time the wafer clamping hook is used to fix the edge of the wafer to stably clamp the wafer; when it is necessary to clamp the wafer stored horizontally in the glass container, each wafer clamping hook is adjusted to be in the same horizontal plane, the wafer is clamped stably, and the operation is convenient and efficient. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the structure of the present invention when clamping a horizontally placed wafer;

[0019] Figure 2 It is a structural diagram of the air extraction mechanism;

[0020] Figure 3 It is a schematic diagram of the structure of the wafer clamp;

[0021] Figure 4 yes Figure 3 Schematic diagram of the middle part structure;

[0022] Figure 5 yes Figure 4 An enlarged structural diagram of the fixed lock;

[0023] Figure 6 This is a schematic diagram of the structure of the present invention when clamping a vertically placed wafer;

[0024] Figure 7 yes Figure 6 The main structural diagram of the present invention;

[0025] The markings in the figure are: 1. Wafer clamp hook; 2. Vertical axis; 3. Clamping arm; 4. Inlet; 5. Piston handle; 6. Piston; 7. Air cylinder; 8. Air guide tube; 9. Clamping block; 10. Turning rod; 11. Fixed lock; 12. Rotating axis; 13. Ring; 14. Connecting rod; 15. Hook body; 16. Ring; 17. Horizontal axis; 18. Fixed block; 19. Slot. DETAILED DESCRIPTION

[0026] The present invention will be further described below in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solutions of the present invention and are not intended to limit the scope of protection of the present invention.

[0027] It should be noted that, in the description of the present invention, the terms "front", "back", "left", "right", "up", "down", "inside", "outside", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and do not require that the present invention must be constructed and operated in a specific direction. Therefore, they should not be understood as limitations on the present invention.

[0028] like Figure 1 As shown, a wafer clamping device includes a clamping arm 3, a connecting assembly and at least three wafer clamping hooks 1; an air suction port 4 is provided on the side of the clamping arm 3, and an exhaust mechanism connected to the air suction port 4 is installed inside the clamping arm 3; the connecting assembly includes a vertical axis 2 fixed to the bottom of the clamping arm 3, a horizontal axis 17 fixed perpendicularly to the vertical axis 2, and a circular ring 16 provided on the periphery of the horizontal axis 17, and the circular ring 16 can rotate around the horizontal axis 17; the wafer clamping hook 1 is installed on the circular ring 16 and can move relative to the circular ring 16.

[0029] like Figure 2 As shown, the air extraction mechanism includes an air cylinder 7, an air duct 8 connected to the air cylinder 7, a piston 6 disposed within the air cylinder 7, and a piston handle 5 connected to the piston 6. The piston handle 5 is located outside the clamping arm 3, and the air duct 8 is connected to the air inlet 4. Pulling out the piston 6 via the piston handle 5 creates negative pressure within the air cylinder 7, which in turn creates negative pressure at the air inlet 4, causing the air inlet 4 to adhere to the wafer surface. Furthermore, when the air inlet 4 is made of elastic plastic or rubber, it also provides a cushioning effect on the wafer.

[0030] like Figure 3-5As shown, the wafer hook 1 comprises a fixedly connected collar 13, a connecting rod 14, a rotating shaft 12, and a hook body 15 rotatably connected to the rotating shaft 12. The inner diameter of the collar 13 is slightly larger than the outer diameter of a circular ring 16. When an external force acts on the wafer hook 1, the collar 13 can move relative to the circular ring 16. When no external force is applied, the collar 13 and the circular ring 16 remain fixed relative to each other. The wafer hook 1 also comprises a fixing lock 11 for fixing the rotating shaft 12 and the hook body 15. The fixing lock 11 comprises a rotating rod 10, a fixing block 18 rotatably connected to the rotating rod 10, and a clamping block 9. The clamping block 9 has a slot 19 at its end that can engage with the rotating shaft 12. When the clamping block 9 is rotated to separate the slot 19 from the rotating shaft 12, the hook body 15 can rotate relative to the rotating shaft 12, thereby adjusting the direction of the hook body 15. Conversely, when the clamping block 9 is rotated to engage the slot 19 with the rotating shaft 12, the hook body 15 is fixed relative to the rotating shaft 12.

[0031] like Figure 3 As shown, the end of the hook body 15 of the wafer clamping hook 1 is wedge-shaped, which is convenient for tilting the wafer. The length of the wafer clamping hook 1 is 8-12 cm, which is suitable for the size of the wafer.

[0032] like Figure 6 As shown, the horizontal axis 17 is located at the center of the circular ring 16 and divides the circular ring 16 into two semicircular rings, each of which is equipped with at least one wafer clamping hook 1. In this embodiment, there are three wafer clamping hooks 1, which are installed on the two semicircular rings in a 2:1 ratio, two of which are located on the side close to the air intake 4 and one on the side away from the air intake 4. The side of the clamping arm 3 facing the air intake 4 is provided with a groove that can engage the wafer clamping hook 1. When the wafer clamping hook on the side away from the air intake is not needed, the wafer clamping hook can be stored in the groove without hindering the clamping work.

[0033] like Figure 1 As shown, when clamping a wafer in a flat state, the ring 16 is rotated to a horizontal plane with the horizontal axis 17 as the center, the wafer clamp 1 is adjusted to a suitable position, the hook body 15 is rotated to adjust the direction of the hook body 15, and the hook body 15 is fixed to the rotating shaft 12 with the fixing lock 11, and then the wedge-shaped structure of the hook body 15 of the wafer clamp 1 is used to lift the wafer, and after the clamping is stable, it is gently lifted.

[0034] like Figure 6 and 7As shown, when clamping the wafer stored vertically in the wafer storage box, the ring 16 is rotated to the vertical plane with the horizontal axis 17 as the center, and the two wafer clamping hooks 1 close to the air intake port 4 are adjusted to be in the same vertical plane as the air intake port 4, and a wafer clamping hook away from the air intake port 4 is clamped in the groove of the clamping arm 3 for storage, and the fixing lock 11 is opened, and the direction of the hook body 15 is adjusted, and then the hook body 15 is fixed to the rotating shaft 12 with the fixing lock 11; the wafer clamping device is extended into the wafer storage box, and when the wafer clamping hook 1 hooks the bottom of the wafer, the piston handle 5 is pulled outward to generate negative pressure at the air intake port 4 and adsorb the wafer, and the wafer is gently extracted. After the wafer is placed stably, the piston handle 5 is pushed to the initial position.

[0035] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A wafer clamping device, characterized in that: It includes a clamping arm, a connecting assembly and at least three wafer clamping hooks; An air suction port is provided on the side of the clamping arm, and an air extraction mechanism connected to the air suction port is installed inside the clamping arm; The connecting assembly includes a vertical shaft fixed to the bottom of the clamping arm, a horizontal shaft fixed perpendicular to the vertical shaft, and a circular ring arranged on the periphery of the horizontal shaft, and the circular ring can rotate around the horizontal shaft; The wafer clamping hook is mounted on the ring and can move relative to the ring; The wafer clamping hook comprises a fixedly connected collar, a connecting rod, a rotating shaft, and a hook body rotatably connected to the rotating shaft; The wafer clamp hook further includes a fixing lock for fixing the rotating shaft and the hook body, the fixing lock including a rotating rod and a fixing block and a clamping block rotatably connected by the rotating rod, and the end of the clamping block is provided with a clamping groove capable of engaging with the rotating shaft; A groove capable of engaging with a wafer clamping hook is provided on a side surface of the clamping arm opposite to the air inlet.

2. The wafer clamping device according to claim 1, wherein: The air extraction mechanism includes an air cylinder, an air duct connected to the air cylinder, a piston arranged in the air cylinder and a piston handle connected to the piston, the piston handle is located outside the clamping arm, and the air duct is connected to the air inlet.

3. The wafer clamping device according to claim 1, wherein: The end of the hook body of the wafer clamping hook is wedge-shaped.

4. The wafer clamping device according to claim 1, wherein: The length of the wafer clamping hook is 8-12 cm.

5. The wafer holding device according to claim 1, wherein: The horizontal axis is located at the center of the circular ring and divides the circular ring into two semicircular rings, and each of the semicircular rings is sleeved with at least one wafer clamping hook.

6. The wafer holding device according to claim 5, wherein: The number of the wafer clamping hooks is three, and they are installed on two semicircular rings at a ratio of 2:1.

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