Ozone Calibrator Based on Gas Phase Titration

Abstract

The present application relates to an ozone calibrator based on gas phase titration. The ozone calibrator comprises a first reaction chamber, comprising a first nitric oxide inlet, a first ozone inlet, a first gas outlet and a light hole; a fluorescence detector, whose detection part is connected to the light hole; a first air pump, connected to the first gas outlet; a second reaction chamber, comprising a second nitric oxide inlet, a second ozone inlet and a second gas outlet, the second gas outlet being connected to the first nitric oxide inlet; a standard nitric oxide gas circuit, for providing nitric oxide to the first reaction chamber and the second reaction chamber; a first ozone generating gas circuit, connected to the first ozone inlet; a second ozone generating gas circuit, connected to the second ozone inlet; the excess ozone concentration provided by the first ozone generating gas circuit is greater than the ozone standard gas concentration provided by the second ozone generating gas circuit. The ozone calibrator greatly reduces the difficulty and cost of calibrating the ozone analyzer, and also ensures the accuracy of the ozone analyzer data.

Description

Technical Field

[0001] The present application generally relates to the field of environmental monitoring, and in particular to an ozone calibrator based on gas phase titration. Background Art

[0002] Ozone is an important pollutant in ambient air. In recent years, the degree of ozone pollution in many places has become increasingly serious. The situation of ozone pollution prevention and control is very severe. Therefore, accurate measurement of ozone concentration in the air is very critical. Because ozone has active chemical properties and cannot be made into a cylinder standard gas like SO2 and other gases, the calibration of the ozone analyzer is mainly carried out by comparison with the calibration photometer. "Ultraviolet Photometry for Determination of Ozone in Ambient Air" (HJ590-2010) stipulates that the ozone analyzer for ultraviolet photometry determination of ozone must be calibrated by an ultraviolet calibration photometer, and the ultraviolet calibration photometer must be regularly calibrated with an ozone standard reference photometer (SRP). However, the ozone standard reference photometer (SRP) is expensive. At present, there are less than 10 in China, and the preliminary estimate of the number of ozone monitoring points across the country is more than 6,000. The ozone monitoring equipment at these points needs to be calibrated regularly with an ultraviolet calibration photometer. Therefore, the current traceability of the value of the ozone analyzer is costly, time-consuming, labor-intensive, and difficult. Summary of the invention

[0003] The purpose of this application is to provide an ozone calibrator based on gas phase titration.

[0004] The present application provides an ozone calibrator based on gas phase titration, comprising: a first reaction chamber, comprising a first nitric oxide inlet, a first ozone inlet, a first gas outlet and a light hole; a fluorescence detector, wherein the detection part of the fluorescence detector is connected to the light hole; a first air pump, connected to the first gas outlet; a second reaction chamber, comprising a second nitric oxide inlet, a second ozone inlet and a second gas outlet, wherein the second gas outlet is connected to the first nitric oxide inlet; a standard nitric oxide gas circuit, for providing nitric oxide to the first reaction chamber and the second reaction chamber; a first ozone generating gas circuit, connected to the first ozone inlet, for providing excess ozone to the first reaction chamber; a second ozone generating gas circuit, connected to the second ozone inlet, for providing ozone standard gas to the second reaction chamber; the excess ozone concentration provided by the first ozone generating gas circuit is greater than the ozone standard gas concentration provided by the second ozone generating gas circuit.

[0005] Optionally, according to the above-mentioned ozone calibrator, the standard nitric oxide gas path is connected to the first nitric oxide inlet of the first reaction chamber through the second reaction chamber.

[0006] Optionally, according to the above-mentioned ozone calibrator, it also includes a processing gas circuit, which is arranged between the first gas outlet of the first reaction chamber and the first gas pump.

[0007] Optionally, according to the above-mentioned ozone calibrator, the processing gas circuit includes an ozone removal device.

[0008] Optionally, according to the above-mentioned ozone calibrator, the first ozone generating gas circuit includes a first ozone generating device and a first current limiting device connected thereto.

[0009] Optionally, according to the above-mentioned ozone calibrator, the first ozone generating device is a high-voltage discharge device.

[0010] Optionally, according to the above-mentioned ozone calibrator, the second ozone generating gas circuit includes a second air pump, a second ozone generating device, a two-way valve and a second current limiting device which are connected in sequence.

[0011] Optionally, according to the above-mentioned ozone calibrator, the second ozone generating device is a low-pressure mercury lamp device.

[0012] Optionally, according to the above-mentioned ozone calibrator, the standard nitric oxide gas circuit includes a connected nitric oxide standard gas generating device and a third current limiting device.

[0013] Optionally, according to the above-mentioned ozone calibrator, it also includes a standard ozone gas circuit, the standard ozone gas circuit includes a fourth current limiting device and an ozone standard gas outlet connected, and the fourth current limiting device is connected to the second ozone generating device.

[0014] The ozone calibrator of the present application can be used as an ozone analyzer calibration instrument to replace the ozone standard reference photometer (SRP), and can be installed and used on a large scale. It only needs to be equipped with traceable NO cylinder standard gas to calibrate the ozone analyzer anytime and anywhere, which greatly reduces the difficulty and cost of ozone analyzer calibration and ensures the accuracy of ozone analyzer data. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 A schematic diagram of the structure of an ozone calibrator according to an embodiment of the present application; and

[0016] Figure 2 This is a schematic diagram of the structure of an ozone calibrator according to an embodiment of the present application. DETAILED DESCRIPTION

[0017] The following is a more detailed description of the specific implementation of the present application in conjunction with the accompanying drawings and examples, so that the scheme of the present application and its advantages in various aspects can be better understood. However, the specific implementation and examples described below are only for the purpose of illustration, and are not intended to limit the present application.

[0018] If no specific techniques or conditions are specified in the examples, the techniques or conditions described in the literature in the field or the product instructions are used. If no manufacturer is specified for the reagents or instruments used, they are all conventional products that can be purchased commercially.

[0019] Unless otherwise specified, the execution order of each step in the method mentioned in this application is not limited to the order reflected in the text of this article. That is to say, the execution order of each step can be changed, and other steps can be inserted between two steps as needed.

[0020] The "connection" described in this application, unless otherwise clearly specified or limited, should be understood in a broad sense, and can be directly connected or connected through an intermediate medium. In the description of this application, it should be understood that the directions or positional relationships indicated by "upper", "lower", "front", "back", "left", "right", "top", "bottom", etc. are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on this application.

[0021] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0022] The disclosure below provides many different embodiments or examples to realize the different structures of the present application. In order to simplify the disclosure of the present application, the parts and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present application. In addition, the present application can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed. In addition, the various specific processes and material examples provided by the present application, but those of ordinary skill in the art can appreciate the application of other processes and / or the use of other materials.

[0023] Considering that the number of ozone standard reference photometers (SRP) is small, it is difficult to cover the regular calibration of ozone analyzers nationwide. Therefore, this application designs an ozone calibrator based on the principle of gas phase titration, which mainly includes two ozone generators, two gas mixing reaction devices, photomultiplier tubes and other modules. A gas mixing reaction device is used as a gas phase titration reaction, which uses an ozone generator to generate ozone gas and pass it into the mixed reaction device, and at the same time, a nitric oxide standard gas is passed, and a gas phase titration reaction occurs between the nitric oxide standard gas and ozone. After the reaction, the gas immediately enters another gas mixing reaction device, and at the same time, the ozone produced by another ozone generator is passed, and nitric oxide and ozone are subjected to chemiluminescent reaction here, and a photomultiplier tube is used to detect the luminous intensity, and the concentration of nitric oxide is monitored accordingly. By detecting the difference in the concentration of nitric oxide before and after the titration reaction, the concentration of nitric oxide participating in the reaction in the titration reaction can be calculated. Because the titration reaction of nitric oxide and ozone is an equimolar reaction, the ozone concentration produced by the first ozone generator can be determined based on the concentration of nitric oxide participating in the reaction (the two are equal). Since the accurate concentration of ozone gas can be obtained, the ozone gas produced by the ozone generator can be used to calibrate the ozone monitor.

[0024] Since the nitric oxide cylinder standard gas is a standard substance and its value can be traced back to the international benchmark, the concentration of the ozone standard gas produced by the first ozone generator in the device can be traced back to the international measurement benchmark through nitric oxide. There is no need to use an ultraviolet photometer for measurement and regularly use an ozone standard reference photometer (SRP) for value transfer, thereby ensuring the accuracy of the generated ozone standard gas.

[0025] This device can be used as an ozone analyzer calibration instrument to replace the ozone standard reference photometer (SRP), and can be installed and used on a large scale. It only needs to be equipped with traceable NO cylinder standard gas to calibrate the ozone analyzer anytime and anywhere, which greatly reduces the difficulty and cost of ozone analyzer calibration and ensures the accuracy of ozone analyzer data.

[0026] The ozone calibrator of the present application is designed based on the principle of gas phase titration and chemiluminescence. Gas phase titration (Gas Phase Titration, GPT) refers to any titration performed in the gas phase. In the present application, an excess of NO is used to titrate ozone to achieve a method for measuring ozone concentration. Chemiluminescence is a type of molecular luminescence spectrometry. It is mainly based on the principle that the concentration of the analyte in the chemical detection system and the chemiluminescence intensity of the system are linearly quantitatively related under certain conditions. It uses an instrument to detect the chemiluminescence intensity of the system to determine the content of the analyte. A trace analysis method. The essential difference between chemiluminescence and other luminescence analyses is that the energy source absorbed by the system to produce luminescence (light radiation) is different. For the system to produce chemiluminescence, it must have a light radiation reaction that produces a detectable signal and a chemical reaction that can provide a separate reaction step that is sufficient energy to cause the luminescence phenomenon at one time.

[0027] The reaction equation in the ozone calibrator of the present application is: O3+NO→O2+NO2. Ozone and nitric oxide gas undergo chemical reaction to emit light. Since the chemical reaction itself and the characteristic wavelength of the emission have high selectivity, the problem of interference from coexisting substances can be solved, making the measurement results more accurate and reliable. In addition, the emission wavelength of NO and ozone reaction is 600-3000nm, generally 1200nm, which is not in the visible light band and is not easily affected by light leakage. There is no situation where the emission wavelength is not within the detection range of the photomultiplier tube and causes the measurement to be low.

[0028] Figure 1 A schematic structural diagram of an ozone calibrator according to an embodiment of the present application is shown.

[0029] See also Figure 1 The present application discloses an ozone calibrator, which exemplarily includes a first reaction chamber 10, a second reaction chamber 20, a fluorescence detector 30, a standard nitric oxide gas circuit 40, a first ozone generating gas circuit 50, a second ozone generating gas circuit 60 and a first air pump 90.

[0030] The first reaction chamber 10 includes a first nitric oxide inlet 101, a first ozone inlet 102, a first gas outlet 103 and a light hole (not shown in the figure). The first reaction chamber 10 is used to provide a reaction site for nitric oxide and excess ozone. Ozone and nitric oxide can react chemically to generate excited nitrogen dioxide, which can release photons in the process of returning to the ground state. The wavelength is 600-3000nm, and its light intensity is proportional to the concentration of ozone and nitric oxide involved in the reaction. Therefore, by measuring the chemiluminescence intensity, the concentration of nitric oxide can be calculated.

[0031] According to some embodiments, the first reaction chamber is made of aluminum, has a relatively large cavity inside, and has an inner surface that is oxidized and blackened. The light hole is made of quartz glass, and the sealing of the first reaction chamber is ensured.

[0032] The detection part of the fluorescence detector 30 is connected with the light-through hole, and is used to detect the 600-3000nm fluorescence signal released by the reaction of NO and O3. For example, the fluorescence detector can be a photomultiplier tube. The second reaction chamber 20 comprises a second nitric oxide inlet 201, a second ozone inlet 202 and a second gas outlet 203, and the second gas outlet 203 is connected with the first nitric oxide inlet 101. The second reaction chamber 20 is used to provide a reaction place for nitric oxide and ozone standard gas. Nitric oxide and ozone standard gas undergo gas phase titration reaction here, and the gas mixed with unreacted nitric oxide after the reaction enters the first reaction chamber through the second gas outlet and the first nitric oxide inlet.

[0033] The standard nitric oxide gas circuit 40 is used to provide nitric oxide to the first reaction chamber 10 and the second reaction chamber 20. The concentration and flow rate of nitric oxide provided by the standard nitric oxide gas circuit are constant in one working cycle. Figure 1 The standard nitric oxide gas path 40 is connected to the first nitric oxide inlet 101 of the first reaction chamber 10 through the second reaction chamber 20 .

[0034] According to an exemplary embodiment, the standard nitric oxide gas circuit 40 includes a connected nitric oxide standard gas generator and a third current limiting device. The nitric oxide standard gas generator can be, for example, a NO standard gas cylinder, which includes a pressure reducing valve to achieve the step-down output of NO gas. Since the standard gas of the NO standard gas cylinder is a standard substance whose value can be traced back to an international benchmark, the concentration of the ozone standard gas produced by the present application can be traced back to an international measurement benchmark through nitric oxide. The third current limiting device is connected to the second nitric oxide inlet of the second reaction chamber for achieving constant flow delivery of nitric oxide.

[0035] The first ozone generating gas circuit 50 is connected to the first ozone inlet 102 of the first reaction chamber 10, and is used to provide excess ozone to the first reaction chamber 10. The flow rate of excess ozone provided by the first ozone generating gas circuit 50 is constant in one working cycle. For example, the first ozone generating gas circuit 50 includes a first ozone generating device and a first current limiting device connected. The first ozone generating device can be a high-voltage discharge device, which can convert O2 in the air into O3. The first current limiting device is connected to the first ozone inlet of the first reaction chamber, and can be a current limiting hole, which is used to achieve constant flow delivery of excess ozone.

[0036] The second ozone generating gas circuit 60 is connected to the second ozone inlet 202 of the second reaction chamber 20, and is used to provide ozone standard gas to the second reaction chamber 20. The ozone standard gas provided by the second ozone generating gas circuit 60 is a constant flow rate in one working cycle. For example, the second ozone generating gas circuit 60 includes a second air pump, a second ozone generating device, a two-way valve and a second current limiting device connected in sequence. The second air pump can be a vacuum pump, which provides power for the ozone standard gas to enter the second reaction chamber 20, and also avoids the output of nitric oxide from the second ozone inlet 202 of the second reaction chamber 20. The second ozone generating device can be a low-pressure mercury lamp device, which can convert O2 in the air into O3, and can produce ozone standard gas with different concentration gradients by adjusting the voltage of the device. The second current limiting device is connected to the second ozone inlet of the second reaction chamber, and can be a current limiting hole to achieve constant flow delivery of ozone standard gas.

[0037] The first air pump 90 is connected to the first gas outlet 103 of the first reaction chamber. The first air pump 90 puts the first reaction chamber 10 in a negative pressure state, so that the ozone provided by the first ozone generating gas circuit 50 and the gas of the second reaction chamber 20 can enter the first reaction chamber 10.

[0038] The excess ozone concentration provided by the first ozone generating gas circuit is greater than the standard ozone gas concentration provided by the second ozone generating gas circuit.

[0039] The workflow of the above ozone calibrator includes:

[0040] 1. Excess ozone provided by the first ozone generating gas circuit 50 enters the first reaction chamber 10. At this time, the fluorescence signal U0 detected by the fluorescence detector 30 is a background signal;

[0041] 2. The nitric oxide provided by the standard nitric oxide gas circuit 40 enters the first reaction chamber 10 through the second reaction chamber 20. At this time, the nitric oxide reacts with the excess ozone to produce a chemiluminescent reaction. The fluorescence detector 30 detects a fluorescent signal U1 of the chemiluminescent reaction, which corresponds to the nitric oxide concentration c1 entering the first reaction chamber 10.

[0042] 3. The ozone standard gas provided by the second ozone generating gas circuit 60 enters the second reaction chamber 20, and the nitric oxide provided by the standard nitric oxide gas circuit 40 enters the second reaction chamber 20. At this time, the ozone standard gas and the nitric oxide react in the second reaction chamber 20, resulting in partial consumption of the nitric oxide.

[0043] 4. The gas that has completed the reaction in step 3 enters the first reaction chamber 10 and reacts with the excess ozone provided by the first ozone generating gas circuit 50. The fluorescence detector 30 detects the fluorescence signal U2 of the chemiluminescent reaction, which corresponds to the concentration c2 of nitric oxide entering the first reaction chamber 10.

[0044] 5. Calculate c2 based on U0, U1, U2 and c1;

[0045] 6. The standard ozone gas concentration provided by the second ozone generating gas circuit 60 is calculated by the following formula:

[0046] c(O3)=c1-c2.

[0047] Since the nitric oxide concentration provided by the standard nitric oxide gas circuit is known and traceable, the concentration of the ozone standard gas generated by the ozone calibrator of the present application can also be traced back to the international measurement standard through nitric oxide. There is no need to use an ultraviolet photometer for measurement and regularly use an ozone standard reference photometer (SRP) for value transfer, thereby ensuring the accuracy of the ozone standard gas.

[0048] Optionally, the above workflow also includes: adjusting the second ozone generating gas circuit to generate ozone standard gas with different concentration gradients; and then repeating the above steps 3-6 to detect the concentration of the ozone standard gas with different concentration gradients.

[0049] According to an exemplary embodiment, the ozone calibrator of the present application further includes a processing gas circuit connected to the gas outlet of the first reaction chamber. The processing gas circuit is used to process the unreacted ozone in the first reaction chamber to prevent it from polluting the air. For example, the processing gas circuit includes an ozone removal device. For example, the ozone removal device is filled with an ozone catalyst, which can degrade O3 into O2 to prevent the excessive O3 generated by the ozone generator from polluting the air.

[0050] According to an exemplary embodiment, the ozone calibrator of the present application also includes a standard ozone gas circuit, which is connected to the second ozone generator and is used to deliver ozone standard gas to the outside of the device. For example, the standard ozone gas circuit includes a fourth current limiting device and an ozone standard gas outlet connected, and the fourth current limiting device is connected to the second ozone generator. Then, the second air pump of the second ozone generating gas circuit 60 is also used as a power source for delivering ozone standard gas to the outside of the device.

[0051] Figure 2 A schematic structural diagram of an ozone calibrator according to an embodiment of the present application is shown.

[0052] See also Figure 2 The ozone calibrator of this embodiment includes a first reaction chamber 10, a second reaction chamber 20, a fluorescence detector 30, a standard nitric oxide gas circuit 40, a first ozone generating gas circuit 50, a second ozone generating gas circuit 60, a standard ozone gas circuit 70, a processing gas circuit 80 and a first air pump 90.

[0053] The first reaction chamber 10 comprises a first nitric oxide inlet 101, a first ozone inlet 102, a first gas outlet 103 and a light through hole (not shown in the figure). The detection part of the fluorescence detector 30 is connected to the light through hole.

[0054] The second reaction chamber 20 includes a second nitric oxide inlet 201 , a second ozone inlet 202 and a second gas outlet 203 . The second gas outlet 203 is connected to the first nitric oxide inlet 101 of the first reaction chamber 10 .

[0055] The standard nitric oxide gas circuit 40 includes a connected nitric oxide generating device 41 , such as a NO standard gas cylinder, and a third flow limiting device 42 , and the third flow limiting device 42 is connected to the second nitric oxide inlet 201 of the second reaction chamber 20 .

[0056] The first ozone generating gas circuit 50 includes a first gas inlet 53, a first ozone generating device 51 and a first current limiting device 52 connected to the first ozone inlet 102 of the first reaction chamber 10. The first ozone generating device 51 is, for example, a high voltage discharge device.

[0057] The second ozone generating gas circuit 60 includes a second sample gas inlet 63, a second air pump 64, a second ozone generating device 61, a two-way valve 65 and a second current limiting device 62 which are connected in sequence. The second ozone generating device 61 is, for example, a low-pressure mercury lamp device. The second current limiting device 62 is connected to the second ozone inlet 202 of the second reaction chamber 20.

[0058] The standard ozone gas circuit 70 includes a fourth flow limiting device 72 and an ozone standard gas outlet 71, and the fourth flow limiting device 72 is connected to the second ozone generator 61. For example, the second ozone generator 61, the fourth flow limiting device 72 and the two-way valve 65 can be connected by a three-way connection.

[0059] The processing gas circuit 80 includes a deozonating device 81 . The deozonating device 81 is connected to the first gas outlet 103 of the first reaction chamber 10 .

[0060] The first air pump 90 is connected to the deozonation device 81 .

[0061] The above components can be connected by pipelines, for example, using PTFE or PFA tubes.

[0062] The workflow of the above-mentioned ozone calibrator exemplarily includes:

[0063] Step 1: The two-way valve 65 is in the power-off state, and air enters the first gas inlet 53. Under the action of the first ozone generator 51, excessive O3 is generated, and under the action of the first current limiting device 52, it enters the first reaction chamber 10. At this time, the fluorescence signal U0 detected by the fluorescence detector 30 is the background signal.

[0064] Step 2: Under the action of the third current limiting device 42, the NO standard gas provided by the nitric oxide generating device 41 first enters the second reaction chamber 20 and then enters the first reaction chamber 10. At this time, the NO standard gas and excess O3 undergo chemiluminescence reaction in the second reaction chamber 20. At this time, the signal of the fluorescence detector 30 is U1, corresponding to the NO standard gas concentration c1 entering the first reaction chamber 10 at this time.

[0065] Step three: The two-way valve 65 is in the energized state, air enters the second sample gas inlet 63, and under the action of the second ozone generator 61, ozone standard gas is generated. The ozone standard gas enters the second reaction chamber 20 under the action of the second air pump 64. At this time, the NO standard gas reacts with the ozone standard gas in the second reaction chamber 20, resulting in partial consumption of the NO standard gas.

[0066] Step 4: The two-way valve 65 is in the power-on state, and the gas after the reaction in step 2 enters the first reaction chamber 10 to react with the excess O3. At this time, the signal of the fluorescence detector 30 is U2, corresponding to the NO concentration c2 entering the first reaction chamber 10 at this time. Since a part of NO has been consumed in the second reaction chamber 20 before the gas after the reaction in step 2 enters the first reaction chamber 10, c2<c1. Step 5: The gas after the reaction in step 4 enters the processing gas circuit 80 under the action of the first air pump 90 and then is discharged from the device. Since O3 is excessive in the reaction in step 3, the deozonation device 81 is used to remove the unreacted O3 in the reaction in step 4.

[0067] Step 6: Calculate c2 based on U0, U1, U2 and c1.

[0068] Step 7: Calculate the concentration of the ozone standard gas generated by the second ozone generating device 61. The concentration calculation formula of the ozone standard gas is: c(O3)=c1-c2.

[0069] Step 8: The two-way valve 65 is in the energized state. Under the action of the second air pump 64, the ozone standard gas with a concentration of c(O3) is continuously discharged from the ozone standard gas outlet 71 through the fourth current limiting device 72. The ozone standard gas can be used to calibrate the ozone analyzer.

[0070] Step nine: By changing the voltage of the second ozone generating device 61, ozone standard gas with different concentration gradients can be generated.

[0071] The order of the steps in the above-mentioned workflow is not limited to the order reflected in the text unless otherwise specified. For example, steps three to seven and eight can be performed simultaneously. The ozone calibrator detects the concentration of the ozone standard gas in real time while providing the ozone standard gas.

[0072] Finally, it should be noted that: Obviously, the above embodiments are only examples for clearly explaining the present application, and are not intended to limit the implementation methods. For ordinary technicians in the relevant field, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from this are still within the scope of protection of the present application.

Claims

1. An ozone calibrator based on gas phase titration, characterized in that: include: The first reaction chamber comprises a first nitric oxide inlet, a first ozone inlet, a first gas outlet and a light-through hole; A fluorescence detector, wherein a detection part of the fluorescence detector is connected to the light-through hole; a first gas pump connected to the first gas outlet; A second reaction chamber comprises a second nitric oxide inlet, a second ozone inlet and a second gas outlet, wherein the second gas outlet is connected to the first nitric oxide inlet; A standard nitric oxide gas circuit, used for providing nitric oxide to the first reaction chamber and the second reaction chamber; the standard nitric oxide gas circuit is connected to a first nitric oxide inlet of the first reaction chamber through the second reaction chamber; a first ozone generating gas circuit, connected to the first ozone inlet, for providing excess ozone to the first reaction chamber; a second ozone generating gas circuit, connected to the second ozone inlet, for providing ozone standard gas to the second reaction chamber; a processing gas circuit, disposed between the first gas outlet of the first reaction chamber and the first gas pump; The excess ozone concentration provided by the first ozone generating gas circuit is greater than the standard ozone gas concentration provided by the second ozone generating gas circuit.

2. The ozone calibrator according to claim 1, characterized in that: The process gas circuit includes a deozonation device.

3. The ozone calibrator according to claim 1, characterized in that: The first ozone generating gas circuit includes a first ozone generating device and a first flow limiting device which are connected.

4. The ozone calibrator according to claim 3, characterized in that: The first ozone generating device is a high voltage discharge device.

5. The ozone calibrator according to claim 1, characterized in that: The second ozone generating gas circuit includes a second air pump, a second ozone generating device, a two-way valve and a second flow limiting device which are connected in sequence.

6. The ozone calibrator according to claim 5, characterized in that: The second ozone generating device is a low-pressure mercury lamp device.

7. The ozone calibrator according to claim 1, characterized in that: The standard nitric oxide gas circuit includes a connected nitric oxide standard gas generating device and a third flow limiting device.

8. The ozone calibrator according to claim 5, characterized in that: It also includes a standard ozone gas circuit, which includes a fourth flow limiting device and an ozone standard gas outlet that are connected, and the fourth flow limiting device is connected to the second ozone generating device.

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