Automatic ejector adjustment device and automatic ejector adjustment method

Abstract

The present invention relates to the technical field of semiconductor production equipment and provides an automatic ejector adjustment device and method. The device comprises a displacement mechanism, a drive mechanism, and an ejector mechanism. The drive mechanism and the ejector mechanism are both connected to the displacement mechanism. The drive mechanism drives the displacement mechanism to generate displacement, and the ejector mechanism moves along with the displacement mechanism. A motor is connected to the displacement mechanism to achieve adjustment and movement in the X, Y, and Z directions. Through the linkage of the motors, movement along the three axes of X, Y, and Z is achieved to achieve automated production, improve the degree of automation, enhance production efficiency, and address the issues of low precision and the resulting poor quality.

Description

Technical Field

[0001] The present invention belongs to the technical field of semiconductor production equipment and provides an automatic ejector adjustment device and an automatic ejector adjustment method. Background Art

[0002] Existing ejector mechanisms, whether driven by a stepper motor or other power source, suffer from the following common drawbacks: 1. Low automation, requiring manual adjustment. 2. Low production efficiency, resulting in significant wasted debugging time. 3. Low precision, which can easily lead to quality issues. Therefore, a new ejector mechanism is urgently needed to improve production efficiency, precision, and automation, thereby enhancing the quality of semiconductor production. Summary of the Invention

[0003] The technical problem to be solved by the embodiments of the present invention is that the existing technology has a low degree of automation and requires manual adjustment; the production efficiency is low, a lot of debugging time is wasted; the precision is low, and it is easy to cause quality problems. In order to solve the above technical problems, the technical solution of the present invention is:

[0004] The present invention provides an automatic ejector adjustment device and an automatic ejector adjustment method, comprising a displacement mechanism, a driving mechanism, and an ejector mechanism. The driving mechanism and the ejector mechanism are both connected to the displacement mechanism. The driving mechanism drives the displacement mechanism to generate displacement, and the ejector mechanism moves along with the displacement mechanism.

[0005] Furthermore, the displacement mechanism includes a first tension spring, a first clamping strip, and a first base block, and one end of the first clamping strip is connected to the first base block through the first tension spring.

[0006] Furthermore, the displacement mechanism further includes a second tension spring, a second clamping strip, and a second base block, and one end of the second clamping strip is connected to the second base block via the second tension spring.

[0007] Furthermore, the displacement mechanism also includes a first base block connecting seat, the first base block is connected to the first base block connecting seat, the second base block is connected to the ejector mechanism, the first base block connecting seat is provided with a connecting seat guide rail and a connecting seat through groove, the ejector mechanism has a base, the bottom of the base is provided with a support foot, the support foot and guide rail are placed in the connecting seat through groove.

[0008] Furthermore, the displacement mechanism also includes a base, a first base block connecting seat support leg is provided at the bottom of the first base block connecting seat, the base is provided with a base guide rail and a base through groove, the first base block connecting seat support leg and the base guide rail are placed in the base through groove, and the base through groove and the through groove opening direction are perpendicular to each other.

[0009] Furthermore, the driving mechanism includes a first motor seat, a first bearing, a first eccentric displacement mechanism, and a first motor, wherein the first motor is mounted on the first motor seat, the first bearing is connected to the first motor via the first eccentric displacement mechanism, and the first bearing is clamped in a first clamping bar;

[0010] The driving mechanism further includes a second motor seat, a second bearing, a second eccentric displacement mechanism, and a second motor. The second motor is mounted on the second motor seat. The second bearing is connected to the second motor via the second eccentric displacement mechanism. The second bearing is clamped in a second clamping strip.

[0011] Furthermore, the ejector mechanism includes a third motor, an eccentric mechanism, an ejector base, and an ejector. The third motor, the eccentric mechanism, and the ejector are all installed on the ejector base. The third motor drives the eccentric mechanism, and the ejector is connected to the eccentric mechanism to drive it to rise and fall.

[0012] Furthermore, it also includes a light shield and a light shield sensor. The light shield is respectively arranged on the first eccentric displacement mechanism, the second eccentric displacement mechanism, and the eccentric mechanism. The light shield sensor is adapted to be installed at a corresponding position of the light shield.

[0013] Furthermore, the ejector includes an ejector cap, an ejector member, and an ejector member connector. The ejector cap is provided with an ejector member ejection hole. The ejector member is placed in the ejector cap. The ejector member is connected to the eccentric mechanism via the ejector member connector.

[0014] Furthermore, it also includes a control mechanism, which is used to control the automatic adjustment drive of the ejector automatic adjustment device.

[0015] Furthermore, a method for automatically adjusting the ejector pin using the ejector pin automatic adjustment device is characterized by comprising the following steps:

[0016] S11, the control mechanism controls the driving mechanism to start working;

[0017] S12, the driving mechanism drives the displacement mechanism to generate displacement;

[0018] S13, the displacement mechanism drives the ejector mechanism to achieve displacement;

[0019] S14. Repeating the above steps S11 to S13 continuously can realize the continuous displacement of the ejector mechanism from one position to the next position.

[0020] The present invention provides an automatic ejector adjustment device and method, comprising a displacement mechanism, a drive mechanism, and an ejector mechanism. The drive mechanism and the ejector mechanism are both connected to the displacement mechanism. The drive mechanism drives the displacement mechanism to generate displacement, and the ejector mechanism moves along with the displacement mechanism. Through the fully automated drive displacement mechanism and the ejector mechanism, high-precision operation of semiconductors on the ejector pins is achieved. The fully automated ejector displacement achieves high-precision operation, improving production efficiency, accuracy, and automation, thereby promoting improved semiconductor production quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the automatic adjustment device for ejector pins provided by an embodiment of the present invention. Figure 1 ;

[0022] Figure 2 This is a schematic diagram of the automatic adjustment device for ejector pins provided by an embodiment of the present invention. Figure 2 ;

[0023] Figure 3 This is a schematic diagram of the automatic adjustment device for ejector pins provided by an embodiment of the present invention. Figure 3 ;

[0024] Figure 4 This is a schematic diagram of the automatic adjustment device for ejector pins provided by an embodiment of the present invention. Figure 4 .

[0025] Figure 5 This is a step diagram of the automatic adjustment method for the ejector provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0027] Example

[0028] like Figure 1 、 3 As shown, the present invention provides an automatic ejector adjustment device and an automatic ejector adjustment method, which include a displacement mechanism, a driving mechanism, and an ejector mechanism 30. The driving mechanism and the ejector mechanism 30 are both connected to the displacement mechanism. The driving mechanism drives the displacement mechanism to generate displacement, and the ejector mechanism is displaced along with the displacement mechanism.

[0029] The driving mechanism drives the ejector mechanism 30 to achieve displacement in the X direction and the Y direction within the plane or at a certain angle to the plane.

[0030] Further, if Figure 1 、 3As shown, the displacement mechanism includes a first tension spring 8 , a first clamping strip 9 , and a first base block 11 . One end of the first clamping strip 9 is connected to the first base block 11 through the first tension spring 8 .

[0031] The first tension spring 8 and the first clamping strip 9 can adjustably clamp the first eccentric displacement mechanism 40 , and the first base block 11 is driven to make a corresponding displacement under the action of the first eccentric displacement mechanism 40 .

[0032] Further, if Figure 2 、 3 As shown, the displacement mechanism further includes a second tension spring 8 , a second clamping strip 9 , and a second base block 12 . One end of the second clamping strip 9 is connected to the second base block 12 via the second tension spring 8 .

[0033] As above, the second tension spring 8 and the second clamping strip 9 can adjustably clamp the second eccentric displacement mechanism 41 , and the second eccentric displacement mechanism 41 drives the second base block 12 to make a corresponding displacement.

[0034] Further, if Figure 3 、 4 As shown, the displacement mechanism also includes a first base block connecting seat 15, the first base block 11 is connected to the first base block connecting seat 15, the second base block 12 is connected to the ejector mechanism 30, and the first base block connecting seat 15 is provided with a connecting seat guide rail 18 and a connecting seat through groove 19. The ejector mechanism has a base 17, and the bottom of the base is provided with a support leg 20, and the support leg 20 and the connecting seat guide rail 18 are placed in the connecting seat through groove 19.

[0035] The first base block 11 is connected to the first base block connecting seat 15. The first base block 11 will drive the first base block connecting seat 15 to make corresponding displacement, and the second base block 12 will drive the ejector mechanism 30 to make corresponding displacement. The connecting seat guide rail 18 is arranged between the connecting seat through groove 19 and the support leg 20. The support leg 20 limits a certain displacement gap space, so that the ejector mechanism 30 can be moderate when the connecting seat guide rail 18 makes corresponding sliding displacement, thereby improving displacement accuracy.

[0036] The ejector mechanism 30 is a device that allows objects stuck on a film to fall off the film. The films include but are not limited to blue films, white films, UV films, plastic films, etc. The objects include but are not limited to various chips used in semiconductors, various electronic components such as resistors, capacitors, ICs, etc., as well as glass sheets, ceramic sheets, plastic sheets, metal sheets, etc.

[0037] Further, if Figure 3 、 4As shown, it also includes a base 1, a first base block connecting seat leg 14 is provided at the bottom of the first base block connecting seat 15, the base 1 is provided with a base guide rail 13 and a base through groove 16, the first base block connecting seat leg 14 and the base guide rail 13 are placed in the base through groove 16, and the opening directions of the base through groove 16 and the connecting seat through groove 19 are perpendicular to each other.

[0038] The base is provided with a base guide rail 13 and a base through groove 16, and the first base block connecting seat support leg 14. The function of the base guide rail 13 is the same as above, except that here it drives the first base block connecting seat 15 to make corresponding displacement. Since the opening directions of the base through groove 16 and the through groove 19 are perpendicular to each other, the displacement directions are perpendicular to each other, and the displacement can be adjusted in all directions to adjust the ejector pin.

[0039] Further, if Figure 1 As shown, the driving mechanism includes a first motor base 2, a first bearing 3, a first eccentric displacement mechanism 4, and a first motor 7. The first motor 7 is mounted on the first motor base 2. The first bearing 3 is connected to the first motor 7 through the first eccentric displacement mechanism 4. The first bearing 3 is clamped in a first clamping bar 9.

[0040] Driven by the first motor 7 , the first eccentric displacement mechanism 4 drives the first bearing 3 to perform an eccentric displacement stroke, and accordingly pushes the first clamping bar 9 to cause it to be slightly displaced.

[0041] like Figure 2 As shown, the driving mechanism also includes a second motor base 2, a second bearing 3, a second eccentric displacement mechanism 41, and a second motor 7. The second motor 7 is installed on the second motor base 2, the second bearing 3 is connected to the second motor 7 through the second eccentric displacement mechanism 4, and the second bearing 3 is clamped in the second clamping strip 9.

[0042] The driving mechanism includes but is not limited to various motors such as stepper motors, servo motors, voice coil motors, linear motors, etc., as well as various other power sources such as cylinders, electric cylinders, electromagnets, piezoelectric brake products, and power devices driven by various power sources.

[0043] The principle is the same as above, and here the second clamping strip 9 is pushed in other directions to cause a small displacement.

[0044] Further, if Figure 4 As shown, the ejector mechanism includes a third motor 21, an eccentric mechanism 22, an ejector base 23, and an ejector 24. The third motor 21, the eccentric mechanism 22, and the ejector 24 are all installed on the ejector base 23. The third motor 21 drives the eccentric mechanism 22, and the ejector 24 is connected to the eccentric mechanism 22 to drive the ejector 24 to rise and fall.

[0045] The third motor 21 drives the eccentric mechanism 22 to drive the ejector 24 to move up and down. The third motor 21 , the eccentric mechanism 22 , and the ejector 24 are all installed on the ejector base 23 .

[0046] Furthermore, it also includes a light blocking plate 5 and a light blocking plate sensor 6. There are multiple light blocking plates 5, and the multiple light blocking plates 5 are respectively arranged on the first eccentric displacement mechanism 4, the second eccentric displacement mechanism 41, and the eccentric mechanism. The light blocking plate sensor is adapted to the light blocking plate 5 and installed in the corresponding position.

[0047] like Figure 1 As shown, the light shield 5 and the light shield sensor 6 are adapted to sense the movement amplitude parameters of the first eccentric displacement mechanism 4 and perform motion analysis.

[0048] like Figure 2 As shown, the light shield 5 and the light shield sensor 6 are adapted to sense the movement amplitude parameters of the second eccentric displacement mechanism 41 and perform motion analysis.

[0049] like Figure 4 As shown, the light shield and the light shield sensor 25 are adapted to sense the movement amplitude parameters of the eccentric displacement mechanism 22 and perform motion analysis.

[0050] The first eccentric displacement mechanism 4, the second eccentric displacement mechanism 41, and the eccentric mechanism 22 can be a cam or an eccentric wheel.

[0051] Furthermore, if Figure 4 As shown, the ejector 24 includes an ejector cap 26, an ejector connector 27, and an ejector member 28. The ejector cap 26 is provided with an ejection hole for the ejector member 28. The ejector member 28 is placed in the ejector cap 26. The ejector member 28 is connected to the eccentric mechanism 22 via the ejector connector 27.

[0052] The ejector cap 26 protects the ejector member 28 . The ejector member 28 is driven by the ejector member connector 27 to eject the ejector member out of the hole. The ejector member connector 27 is driven and connected to the eccentric mechanism 22 .

[0053] Furthermore, if Figure 4 As shown, the apparatus further includes a control mechanism 29, which is used to control the automatic adjustment drive of the ejector automatic adjustment device. The control mechanism 29 performs motion analysis and adjusts the displacement or pauses in a timely manner.

[0054] Furthermore, if Figure 5 As shown, a method for automatically adjusting the ejector pin using the ejector pin automatic adjustment device is characterized by comprising the following steps:

[0055] S11, the control mechanism controls the driving mechanism to start working;

[0056] S12, the driving mechanism drives the displacement mechanism to generate displacement;

[0057] S13, the displacement mechanism drives the ejector mechanism to achieve displacement;

[0058] S14. Repeating the above steps S11 to S13 continuously can realize the continuous displacement of the ejector mechanism from one position to the next position.

[0059] The present invention provides an automatic ejector adjustment device and method, comprising a displacement mechanism, a drive mechanism, and an ejector mechanism. The drive mechanism and the ejector mechanism are both connected to the displacement mechanism. The drive mechanism drives the displacement mechanism to generate displacement, and the ejector mechanism moves along with the displacement mechanism. Through the fully automated drive displacement mechanism and the ejector mechanism, high-precision operation of semiconductors on the ejector pins is achieved. The fully automated ejector displacement achieves high-precision operation, improving production efficiency, accuracy, and automation, thereby promoting improved semiconductor production quality.

[0060] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. An automatic adjustment device for an ejector pin, characterized in that: It includes a displacement mechanism, a driving mechanism, and an ejector mechanism, wherein the driving mechanism and the ejector mechanism are both connected to the displacement mechanism, the driving mechanism drives the displacement mechanism to generate displacement, and the ejector mechanism moves along with the displacement mechanism; The displacement mechanism includes a first tension spring, a first clamping strip, a first base block, a second tension spring, a second clamping strip, and a second base block, one end of the first clamping strip being connected to the first base block via the first tension spring, and one end of the second clamping strip being connected to the second base block via the second tension spring; The drive mechanism includes a first motor seat, a first bearing, a first eccentric displacement mechanism, and a first motor, wherein the first motor is mounted on the first motor seat, the first bearing is connected to the first motor via the first eccentric displacement mechanism, and the first bearing is clamped in the first clamping strip; the drive mechanism also includes a second motor seat, a second bearing, a second eccentric displacement mechanism, and a second motor, wherein the second motor is mounted on the second motor seat, the second bearing is connected to the second motor via the second eccentric displacement mechanism, and the second bearing is clamped in the second clamping strip; Among them, the first tension spring and the first clamping strip can adjustably clamp the first eccentric displacement mechanism, and under the action of the first eccentric displacement mechanism, the first base block is driven to make a corresponding displacement; the second tension spring and the second clamping strip can adjustably clamp the second eccentric displacement mechanism, and under the action of the second eccentric displacement mechanism, the second base block is driven to make a corresponding displacement.

2. The automatic adjustment device for ejector pin according to claim 1, characterized in that: The displacement mechanism also includes a first base block connecting seat, the first base block is connected to the first base block connecting seat, and the second base block is connected to the ejector mechanism; a connecting seat guide rail and a connecting seat through groove are provided in the first base block connecting seat, and the ejector mechanism has a base, and a support leg is provided at the bottom of the base, and the support leg and the connecting seat guide rail are placed in the connecting seat through groove.

3. The automatic adjustment device for ejector pins according to claim 2, characterized in that: The displacement mechanism also includes a base, a first base block connecting seat support leg is provided at the bottom of the first base block connecting seat, the base is provided with a base guide rail and a base through groove, the first base block connecting seat support leg and the base guide rail are placed in the base through groove, and the base through groove and the opening direction of the connecting seat through groove are perpendicular to each other.

4. The automatic adjustment device for ejector pin according to claim 1, characterized in that: The ejector mechanism includes a third motor, an eccentric mechanism, an ejector base, and an ejector. The third motor, the eccentric mechanism, and the ejector are all installed on the ejector base. The third motor drives the eccentric mechanism, and the ejector is connected to the eccentric mechanism to drive it to rise and fall.

5. The automatic adjustment device for ejector pins according to claim 1, characterized in that: It also includes a light shielding plate and a light shielding plate sensor. The light shielding plates are respectively arranged on the first eccentric displacement mechanism, the second eccentric displacement mechanism, and the eccentric mechanism. The light shielding plate sensor is adapted to be installed at a corresponding position of the light shielding plate.

6. The automatic adjustment device for ejector pins according to claim 4, characterized in that: The ejector includes an ejector cap, an ejector member, and an ejector member connector. The ejector cap is provided with an ejector member ejection hole. The ejector member is placed in the ejector cap. The ejector member is connected to the eccentric mechanism via the ejector member connector.

7. The automatic adjustment device for ejector pins according to claim 1, wherein: It also includes a control mechanism, which is used to control the automatic adjustment drive of the ejector automatic adjustment device.

8. A method for automatically adjusting an ejector pin using the ejector pin automatic adjustment device according to any one of claims 1 to 7, characterized in that: The following steps are involved: S11, the control mechanism controls the driving mechanism to start working; S12, the driving mechanism drives the displacement mechanism to generate displacement; S13, the displacement mechanism drives the ejector mechanism to achieve displacement; S14. Repeat steps S11 to S13 to achieve continuous displacement of the ejector mechanism.

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