Auxiliary device for forming positioning marks on planar samples and method of using the same

Abstract

The present invention relates to an auxiliary device for forming positioning marks on a plane sample and a method for using the device, comprising: a first fixing plate and a second fixing plate which are arranged opposite to each other and are used to clamp the plane sample, and the first fixing plate and the second fixing plate are detachably connected, and a plurality of strip holes are spaced apart on one side of the first fixing plate; the first fixing plate is sprayed with gold to form positioning mark lines on the surface of the plane sample through the strip holes. The present invention effectively solves the problem of defect positioning difficulties, can improve the positioning accuracy of defects, greatly reduce the occurrence of misidentification or blind cutting, and ensure the subsequent detection accuracy, and the device has a simple structure and is easy to implement.

Description

Technical Field

[0001] The invention relates to the field of chip detection, and in particular to an auxiliary device for forming a positioning mark on a plane sample and a use method thereof. Background Art

[0002] As integrated circuit chips continue to develop towards being lighter, thinner, smaller, and of extremely high density, the tolerance for chip defects is relatively reduced. As the density of integrated circuit devices increases, the area of ​​the chip is correspondingly reduced, and defects may occur during manufacturing. Defects are often the main cause of chip failure.

[0003] Due to the low resolution of scanning electron microscopes (SEM), projection electron microscopes (TEM) are currently used more often to observe defect structures in chips, and TEM samples need to be prepared by dual-beam ion beam (DB-FIB) before they can be analyzed.

[0004] In the actual TEM sample production process, the chip needs to first locate the position of the defect under a scanning electron microscope. However, since the nanoscale defects on the chip cannot be identified at all under a scanning electron microscope, it is difficult to accurately find the location of the defect. In addition, the chip has multiple repeated unit structures. Even finding the corresponding position of the defect through the relative unit structure of the chip is very difficult, which can easily cause misidentification or blind cutting and affect subsequent detection. Summary of the invention

[0005] The purpose of the present invention is to overcome the defects of the prior art and provide an auxiliary device for forming positioning marks on a plane sample and a method of using the same, which solves the problem of difficulty in defect positioning, can improve the positioning accuracy of defects, greatly reduce the occurrence of misidentification or blind cutting, and ensure subsequent detection accuracy. The device has a simple structure and is easy to implement.

[0006] The technical solution to achieve the above purpose is:

[0007] The present invention provides an auxiliary device for forming a positioning mark on a plane sample, which is used to form a positioning mark line on the surface of the plane sample, and determine the location of the defect according to the positioning mark line to facilitate accurate positioning under a scanning lens. The auxiliary device includes:

[0008] A first fixing plate and a second fixing plate are arranged opposite to each other and used to clamp the plane sample, and the first fixing plate and the second fixing plate are detachably connected, and a plurality of strip holes are spaced apart on one side of the first fixing plate;

[0009] Six strip holes are arranged at intervals, and the lengths of two adjacent strip holes are different;

[0010] The first fixing plate is sprayed with gold to form positioning mark lines on the surface of the planar sample through the strip holes.

[0011] The present invention adopts an auxiliary device for forming positioning marks on a plane sample. The plane sample is clamped between a first fixed plate and a second fixed plate, and then a gold spraying machine is used to spray gold on the surface of the first fixed plate. Gold powder is deposited on the surface of the plane sample through the strip holes, thereby forming positioning mark lines corresponding to the strip holes on the surface of the plane sample. The position of the defect can be accurately found according to the positioning mark lines, which greatly improves the positioning accuracy and solves the problem of difficulty in defect positioning. The positioning accuracy of the defect can be improved, and the occurrence of misidentification or blind cutting is greatly reduced, thereby ensuring the subsequent detection accuracy. The device has a simple structure and is easy to implement.

[0012] A further improvement of the auxiliary device for forming positioning marks on a plane sample of the present invention is that a first through hole is formed on a side of the first fixing plate away from the strip-shaped hole;

[0013] The second fixing plate is provided with a second through hole corresponding to the first through hole, and positioning bolts are passed through the first through hole and the second through hole correspondingly to fix the first fixing plate and the second fixing plate.

[0014] A further improvement of the auxiliary device for forming positioning marks on a plane sample of the present invention is that the lengths of the six strip-shaped holes are 10 mm, 15 mm, 20 mm, 10 mm, 15 mm, and 20 mm, respectively.

[0015] A further improvement of the auxiliary device for forming positioning marks on a plane sample of the present invention is that the width of the plurality of strip-shaped holes is 3 mm.

[0016] A further improvement of the auxiliary device for forming positioning marks on a plane sample of the present invention is that the plurality of strip-shaped holes are parallel to each other.

[0017] The present invention provides a method for using an auxiliary device for forming a positioning mark on a planar sample, comprising the following steps:

[0018] The auxiliary device is provided to place the planar sample between the first fixing plate and the second fixing plate, thereby fixing the first fixing plate and the second fixing plate so that the planar sample is clamped between the first fixing plate and the second fixing plate;

[0019] The surface of the first fixing plate is sprayed with gold using a gold spraying machine, so that gold powder is deposited on the surface of the planar sample through the strip holes, thereby forming positioning mark lines corresponding to the strip holes on the surface of the planar sample.

[0020] A further improvement of the method for using the auxiliary device for forming positioning marks on a planar sample of the present invention is that a first through hole is formed on a side of the first fixing plate away from the strip hole, and a second through hole is formed on the second fixing plate corresponding to the first through hole;

[0021] The positioning bolts are passed through the first through hole and the second through hole respectively to fix the first fixing plate and the second fixing plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic structural diagram of the first fixing plate in the auxiliary device for forming a positioning mark on a plane sample of the present invention.

[0023] Figure 2 It is a schematic structural diagram of the second fixing plate in the auxiliary device for forming a positioning mark on a planar sample of the present invention.

[0024] Figure 3 This is a diagram of the auxiliary device for forming positioning marks on a flat sample according to the present invention in use, wherein the first fixing plate is omitted. DETAILED DESCRIPTION

[0025] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0026] See also Figure 1 The present invention provides an auxiliary device for forming positioning marks on a plane sample and a method for using the same. The plane sample is clamped between a first fixing plate and a second fixing plate, and then the surface of the first fixing plate is sprayed with gold using a gold spraying machine. The gold powder is deposited on the surface of the plane sample through the strip holes, thereby forming positioning mark lines corresponding to the strip holes on the surface of the plane sample. The position of the defect can be accurately found according to the positioning mark lines, which greatly improves the positioning accuracy and solves the problem of difficulty in defect positioning. The positioning accuracy of the defect can be improved, and the occurrence of misidentification or blind cutting is greatly reduced, ensuring the subsequent detection accuracy. The device has a simple structure and is easy to implement. The auxiliary device for forming positioning marks on a plane sample of the present invention is described below in conjunction with the accompanying drawings.

[0027] See also Figure 1 , Figure 1 This is a schematic diagram of the structure of the first fixing plate in the auxiliary device for forming a positioning mark on a flat sample of the present invention. Figure 1 , the auxiliary device of the present invention for forming positioning marks on a planar sample is described.

[0028] Combination Figure 1 , Figure 2 and Figure 3 As shown, the auxiliary device for forming a positioning mark on a plane sample of the present invention is used to form a positioning mark line 211 on the surface of the plane sample 21, and determine the location of the defect according to the positioning mark line 211 to facilitate accurate positioning under the scanning lens. The auxiliary device includes:

[0029] A first fixing plate 11 and a second fixing plate 12 are arranged opposite to each other and are used to clamp the plane sample 21. The first fixing plate 11 and the second fixing plate 12 are detachably connected. A plurality of strip holes 111 are spaced apart on one side of the first fixing plate 11.

[0030] The first fixing plate 11 is sprayed with gold to form positioning mark lines 211 on the surface of the planar sample 21 through the strip holes 111 .

[0031] Preferably, six strip-shaped holes 111 are arranged at intervals.

[0032] Preferably, the plurality of strip-shaped holes 111 are parallel to each other, and the intervals between adjacent strip-shaped holes 111 are equal.

[0033] As a preferred embodiment of the present invention, a first through hole 112 is formed on a side of the first fixing plate 11 away from the strip hole 111;

[0034] The second fixing plate 12 is provided with a second through hole 121 corresponding to the first through hole 112 , and positioning bolts are passed through the first through hole 112 and the second through hole 121 to fix the first fixing plate 11 and the second fixing plate 12 together.

[0035] Furthermore, the lengths of two adjacent strip-shaped holes are different.

[0036] Preferably, the lengths of the six strip holes 111 are 10 mm, 15 mm, 20 mm, 10 mm, 15 mm, and 20 mm, respectively, that is, the six strip holes 111 are divided into two groups, and the lengths of the two groups of strip holes 111 increase successively.

[0037] Preferably, the width of the plurality of strip-shaped holes 111 is 3 mm.

[0038] The specific implementation methods of the present invention are as follows:

[0039] Place the plane sample 21 between the first fixing plate 11 and the second fixing plate 12, and pass the positioning bolts through the first through hole 112 and the second through hole 121 respectively, so that the plane sample 21 is clamped between the first fixing plate 11 and the second fixing plate 12;

[0040] The surface of the first fixed plate 11 is sprayed with gold using a gold spraying machine, and the gold powder is deposited on the surface of the plane sample 21 through the strip holes 111, thereby forming a positioning mark line 211 corresponding to the strip holes 111 on the surface of the plane sample 21. The location of the defect is determined according to the positioning mark line 211 to facilitate precise positioning under the scanning lens and reduce misidentification and blind cutting.

[0041] The present invention also provides a method for using an auxiliary device for forming a positioning mark on a planar sample, the method comprising the following steps:

[0042] The auxiliary device is provided to place the plane sample 21 between the first fixing plate 11 and the second fixing plate 12, thereby fixing the first fixing plate 11 and the second fixing plate 12 so that the plane sample 21 is clamped between the first fixing plate 11 and the second fixing plate 12;

[0043] The surface of the first fixing plate 11 is sprayed with gold by a gold spraying machine, so that gold powder is deposited on the surface of the planar sample 21 through the strip holes 111 , thereby forming positioning mark lines 211 corresponding to the strip holes 111 on the surface of the planar sample 21 .

[0044] Furthermore, a first through hole 112 is formed on a side of the first fixing plate 11 away from the strip-shaped hole 111 , and a second through hole 121 is formed on the second fixing plate 12 corresponding to the first through hole 112 ;

[0045] The positioning bolts are passed through the first through hole 112 and the second through hole 121 respectively to fix the first fixing plate 11 and the second fixing plate 12 together.

[0046] The specific operation mode of the actual implementation of the method provided by the present invention is as follows:

[0047] Place the plane sample 21 between the first fixing plate 11 and the second fixing plate 12, and pass the positioning bolts through the first through hole 112 and the second through hole 121 respectively, so that the plane sample 21 is clamped between the first fixing plate 11 and the second fixing plate 12;

[0048] The surface of the first fixed plate 11 is sprayed with gold using a gold spraying machine, and the gold powder is deposited on the surface of the plane sample 21 through the strip holes 111, thereby forming a positioning mark line 211 corresponding to the strip holes 111 on the surface of the plane sample 21. The position of the defect is determined according to the positioning mark line 211 to facilitate precise positioning under the scanning lens.

[0049] The present invention is described in detail above in conjunction with the embodiments of the accompanying drawings. A person skilled in the art can make various variations of the present invention according to the above description. Therefore, certain details in the embodiments should not constitute a limitation of the present invention, and the scope of protection of the present invention shall be defined by the scope of the attached claims.

Claims

1. An auxiliary device for forming a positioning mark on a plane sample, used to form a positioning mark line on the surface of the plane sample, and determine the location of the defect according to the positioning mark line to facilitate accurate positioning under the scanning lens, It is characterized in that The auxiliary device comprises: A first fixing plate and a second fixing plate are arranged opposite to each other and used to clamp the planar sample, and the first fixing plate and the second fixing plate are detachably connected, and a plurality of strip holes are spaced apart on one side of the first fixing plate; The strip-shaped holes are arranged in six strips at intervals, and the lengths of two adjacent strip-shaped holes are different; The first fixing plate is sprayed with gold to form a positioning mark line on the surface of the planar sample through the strip-shaped hole.

2. The auxiliary device for forming a positioning mark on a planar sample according to claim 1, It is characterized in that A first through hole is formed on a side of the first fixing plate away from the strip-shaped hole; The second fixing plate is provided with a second through hole corresponding to the first through hole, and positioning bolts are passed through the first through hole and the second through hole correspondingly to fix the first fixing plate and the second fixing plate.

3. The auxiliary device for forming a positioning mark on a planar sample according to claim 1, It is characterized in that The lengths of the six strip holes are 10mm, 15mm, 20mm, 10mm, 15mm, and 20mm respectively.

4. The auxiliary device for forming a positioning mark on a planar sample according to claim 1, It is characterized in that The widths of the plurality of strip-shaped holes are all 3 mm.

5. The auxiliary device for forming a positioning mark on a planar sample according to claim 1, It is characterized in that The plurality of strip-shaped holes are parallel to each other.

6. A method for using the auxiliary device for forming a positioning mark on a planar sample as claimed in claim 1, It is characterized in that The steps include: Providing the auxiliary device, placing the planar sample between the first fixing plate and the second fixing plate, and then fixing the first fixing plate and the second fixing plate so that the planar sample is clamped between the first fixing plate and the second fixing plate; The surface of the first fixing plate is sprayed with gold using a gold spraying machine, so that gold powder is deposited on the surface of the planar sample through the strip holes, thereby forming positioning mark lines corresponding to the strip holes on the surface of the planar sample.

7. A method for using the auxiliary device for forming a positioning mark on a planar sample as claimed in claim 6, It is characterized in that A first through hole is formed on a side of the first fixing plate away from the strip-shaped hole, and a second through hole is formed on the second fixing plate corresponding to the first through hole; Positioning bolts are passed through the first through hole and the second through hole respectively to fix the first fixing plate and the second fixing plate.

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