Adhesion defect detection device and adhesion defect detection method using the same

Abstract

Provided is an adhesion defect detection device and an adhesion defect detection method using the same. The adhesion defect detection device includes: an inspection window having a first dummy area, a second dummy area, and an inspection area arranged between the first dummy area and the second dummy area. A first shape changer is arranged on the inspection window. The first shape changer is configured to change the shape of the inspection window in a first direction. The second shape changer is arranged outside both the first dummy area and the second dummy area. The second shape changer is configured to change the shape of the inspection window in a second direction perpendicular to the first direction.

Description

[0001] This application claims priority to and the benefit of Korean Patent Application No. 10-2019-0011877 filed on January 30, 2019, in the Korean Intellectual Property Office, the disclosure of which is incorporated herein in its entirety by reference. Technical Field

[0002] The present disclosure relates to adhesion defect detection, and more particularly, to an adhesion defect detection apparatus and an adhesion defect detection method using the adhesion defect detection apparatus. Background Art

[0003] Flat panel display devices, such as those utilizing liquid crystal display (LCD) technology or organic light emitting diode (OLED) display technology, are designed to be flexible. While most flexible display devices are configured to be bent once and then permanently set to a desired curved configuration, some emerging flexible display devices are configured to be repeatedly bent and unbent. Flexible display devices such as these have been incorporated into foldable or rollable devices, which can provide a large display area when fully opened, as well as a smaller and more portable form factor when folded or rolled.

[0004] A flexible display device such as that described above may include a display element formed on a flexible substrate. The flexible substrate may be made of plastic, and the display element may be an organic light emitting element and / or a liquid crystal element.

[0005] Since display elements (such as those listed above) may tend to include thin film transistors, the manufacture of a flexible display device may include multiple thin film processes. After undergoing these thin film processes, the flexible substrate is sealed by an encapsulation layer. The flexible substrate, the thin film transistors formed on the flexible substrate, and the encapsulation layer may together constitute a display panel of the flexible display device.

[0006] Generally, when incorporated into an electronic device, a cover window is attached to the front surface of a display panel to protect the display panel when the electronic device is used. Here, an adhesive is interposed between the display panel and the cover window to bond the cover window to the display panel.

[0007] In the case where the flexible display device has been constructed to be foldable or bendable, defects often occur when the display panel and the cover window are combined together. Since it may be difficult to repair such defects, both the display panel and the cover window are discarded. Summary of the invention

[0008] An aspect of the present disclosure provides an adhesion defect detection apparatus capable of detecting defects occurring when a cover window and a panel are bonded together. According to this embodiment, bonding defects may be detected before bonding.

[0009] Aspects of the present disclosure also provide an adhesion defect detection method, which is used to detect defects that occur when a cover window and a panel are bonded together. According to this embodiment, bonding defects can be detected before bonding.

[0010] However, aspects of the present disclosure are not limited to the one described herein. The above and other aspects of the present disclosure will become more apparent to those skilled in the art to which the present disclosure belongs by referring to the detailed description of the present disclosure given below.

[0011] According to aspects of the present disclosure, adhesion of a cover window to a panel and a device for detecting defects that may be formed in connection with the adhesion are provided. The adhesion defect detection device includes: an inspection window having a first dummy area, a second dummy area, and an inspection area disposed between the first dummy area and the second dummy area. A first shape changer is disposed on the inspection window and changes the shape of the inspection window in a first direction. A second shape changer is disposed outside the first dummy area and the second dummy area and changes the shape of the inspection window in a second direction perpendicular to the first direction.

[0012] According to another aspect of the present disclosure, a method for adhesion defect detection is provided. The adhesion defect detection method includes: stretching an inspection window and an inspection target panel. Placing a first shape changer on the inspection window, and using the first shape changer to change the shape of the inspection window in a first direction. Bringing the inspection window close to the inspection target panel to detect adhesion defects. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] A more complete understanding of the present disclosure and many of its attendant aspects will become clear and more readily appreciated through the following description taken in conjunction with the accompanying drawings, in which:

[0014] Figure 1 is a schematic perspective view showing an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0015] Figure 2 is a schematic cross-sectional view showing an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0016] Figure 3 is a schematic perspective view showing a first shape changer of an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0017] Figure 4 It is shown Figure 3 An enlarged view of region A;

[0018] Figure 5is a schematic perspective view showing a first shape changer of an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0019] Figure 6 is a schematic perspective view showing a first shape changer of an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0020] Figure 7 is a schematic perspective view showing a first shape changer of an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0021] Figure 8 is a schematic plan view showing a second shape changer of an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0022] Fig. 9 is a schematic plan view showing a third shape changer of the adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0023] Fig.10 is a schematic plan view showing a second shape changer of an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0024] Fig.11 is a schematic plan view showing a third shape changer of the adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0025] Fig.12 is a schematic perspective view illustrating an operation of placing an inspection adhesive on an inspection window in an adhesion defect inspection method using an adhesion defect inspection apparatus according to an exemplary embodiment of the present disclosure;

[0026] Fig.13 is a schematic cross-sectional view illustrating an operation of placing an inspection window on a second shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0027] Fig.14 is a schematic cross-sectional view illustrating an operation of fixing an inspection window using a second shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0028] Fig.15 is a schematic cross-sectional view illustrating an operation of placing an inspection target panel on a third shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0029] Fig.16is a schematic cross-sectional view illustrating an operation of fixing an inspection target panel using a third shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0030] Fig.17 is a schematic cross-sectional view illustrating an operation of aligning an inspection window and an inspection target panel in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0031] Fig.18 is a schematic cross-sectional view illustrating an operation of stretching an inspection window and an inspection target panel in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0032] Fig.19 is a schematic cross-sectional view illustrating an operation of placing a first shape changer on an inspection window in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0033] Fig. 20 is a schematic cross-sectional view illustrating an operation of driving a first shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0034] Fig.21 is a schematic cross-sectional view illustrating an operation of changing the shape of an inspection window using a first shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0035] Fig. 22 is a schematic cross-sectional view illustrating an operation of placing a first shape changer on an inspection window in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0036] Fig.23 is a schematic cross-sectional view illustrating an operation of changing the shape of an inspection window using a first shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0037] Fig.24 is a schematic cross-sectional view illustrating an operation of bringing an inspection area of ​​an inspection window close to a folding area of ​​an inspection target panel in an adhesion defect inspection method using an adhesion defect inspection apparatus according to an exemplary embodiment of the present disclosure;

[0038] Fig.25 is a schematic plan view illustrating an operation of inspecting whether an inspection target panel has an adhesion defect by using an inspection window in an adhesion defect inspection method using an adhesion defect inspection apparatus according to an exemplary embodiment of the present disclosure;

[0039] Fig.26 and Fig. 27 is a schematic cross-sectional view illustrating an operation of inspecting whether an inspection target panel has an adhesion defect by bending the inspection target panel and the inspection window in an adhesion defect inspection method using an adhesion defect inspection apparatus according to an exemplary embodiment of the present disclosure;

[0040] Fig.28 is a schematic perspective view showing an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0041] Fig.29 It shows that according to Fig.28 A schematic cross-sectional view of an adhesion defect detection device according to an exemplary embodiment of the present disclosure;

[0042] Fig.30 is a schematic cross-sectional view showing an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0043] Fig.31 is a schematic perspective view illustrating an operation of placing an inspection adhesive on an inspection window in an adhesion defect inspection method using an adhesion defect inspection apparatus according to an exemplary embodiment of the present disclosure;

[0044] Fig.32 is a schematic cross-sectional view illustrating an operation of placing an inspection window on a second shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0045] Fig.33 is a schematic cross-sectional view illustrating an operation of fixing an inspection window using a second shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0046] Fig.34 is a schematic cross-sectional view illustrating an operation of placing and fixing an inspection target panel on a third shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0047] Fig.35 is a schematic cross-sectional view illustrating an operation of aligning an inspection window and an inspection target panel in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0048] Fig.36 is a schematic cross-sectional view illustrating an operation of stretching an inspection window and an inspection target panel in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0049] Fig.37 is a schematic cross-sectional view illustrating an operation of placing a first shape changer on an inspection window in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0050] Fig.38 is a schematic cross-sectional view illustrating an operation of placing a first shape changer on an inspection window in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0051] Fig.39 is a schematic cross-sectional view illustrating an operation of bringing an inspection area of ​​an inspection window close to a bent portion of an inspection target panel in an adhesion defect inspection method using an adhesion defect inspection apparatus according to an exemplary embodiment of the present disclosure;

[0052] Fig.40 is a schematic cross-sectional view illustrating an operation of changing the shape of an inspection window using a first shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure;

[0053] Fig.41 is a schematic plan view illustrating an operation of inspecting whether an inspection target panel has an adhesion defect by using an inspection window in an adhesion defect inspection method using an adhesion defect inspection apparatus according to an exemplary embodiment of the present disclosure;

[0054] Fig.42 is a schematic perspective view showing an inspection target panel according to an exemplary embodiment of the present disclosure;

[0055] Fig.43 FIG. 1 is a diagram showing an example of inspecting a defect by using an inspection window in an adhesion defect inspection method using an adhesion defect inspection apparatus according to an exemplary embodiment of the present disclosure. Fig.42 A schematic plan view of an operation of inspecting a target panel for adhesion defects;

[0056] Fig.44 is a schematic perspective view showing an inspection target panel according to an exemplary embodiment of the present disclosure;

[0057] Fig.45 FIG. 1 is a diagram showing an example of inspecting a defect by using an inspection window in an adhesion defect inspection method using an adhesion defect inspection apparatus according to an exemplary embodiment of the present disclosure. Fig.44 A schematic plan view of an operation of inspecting a target panel for adhesion defects; and

[0058] Fig.46 is a flowchart illustrating an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure. DETAILED DESCRIPTION

[0059] In describing the exemplary embodiments of the present disclosure shown in the accompanying drawings, specific terms are used for clarity. However, the present disclosure is not intended to be limited to the specific terms so selected, and it should be understood that each specific element includes all technical equivalents that operate in a similar manner.

[0060] Unless otherwise specified, the exemplary embodiments of the present disclosure shown will be understood as providing exemplary features of details that can be varied in some ways in which the inventive concept can be implemented in practice. Therefore, unless otherwise specified, the features, components, modules, layers, films, panels, regions and / or aspects, etc. (hereinafter, individually or collectively referred to as "elements") of the various embodiments can be combined, separated, interchanged and / or rearranged without departing from the inventive concept.

[0061] In the accompanying drawings, the size and relative size of the elements may be exaggerated for clarity and / or descriptive purposes. When the exemplary embodiments may be implemented differently, a specific process sequence may be performed in a different order than described. For example, two processes described in succession may be performed substantially simultaneously or in an order opposite to the order described. In addition, the same reference numerals may represent the same elements throughout the specification and the accompanying drawings.

[0062] When an element or layer is referred to as an element of a layer. When an element or layer is referred to as "joined to" another element or layer in the figure in the opposite order to that described, the element or layer may be directly on, directly connected to, or directly joined to the other element or layer, or there may be intermediate elements or intermediate layers. For this purpose, the term "another" may refer to a physical connection, an electrical connection, and / or a fluid connection with or without intermediate elements. In addition, the D1 axis, the D2 axis, and the D3 axis are not limited to three-dimensional Cartesian coordinates such as the x-axis, the y-axis, and the z-axis, and may be interpreted in a broad sense. For example, the D1 axis, the D2 axis, and the D3 axis may be perpendicular to each other, or may represent different directions that are not perpendicular to each other.

[0063] The terminology can be used herein to indicate that different types of elements are used to distinguish one element from another element. Thus, without departing from the teachings of the disclosure, the first element discussed below can be referred to as the second element.

[0064] For descriptive purposes, terms such as "below", "below", "below", "above", "above", "below" may be used herein to distinguish one element from another. Thus, the relationship of one element to another (other) element shown in the drawings does not depart from the disclosed teachings. Spatially relative terms are intended to encompass different orientations of the device in use, operation, and / or manufacture in addition to the orientation depicted in the drawings. For example, if the device in the drawings is turned over, it is described as a different orientation in. For example, if the device in the drawings is turned over, it is shown in the drawings in use, operation, and the disclosed teachings. Therefore, the exemplary term "below" can include both above and below orientations. Furthermore, the device may be otherwise oriented (e.g., rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein interpreted accordingly.

[0065] Various exemplary embodiments are described herein with reference to cross-sectional views and / or exploded views as schematic diagrams of idealized exemplary embodiments and / or intermediate structures. In this way, variations in the shapes of the diagrams caused by, for example, manufacturing techniques and / or tolerances will be expected. Therefore, the exemplary embodiments disclosed herein should not necessarily be interpreted as being limited to the specific illustrated shapes of the regions, but will include deviations in shapes caused by, for example, manufacturing. In this way, the regions shown in the accompanying drawings may be schematic in nature, and the shapes of these regions may not reflect the actual shapes of the regions of the device, and so are not necessarily intended to be limiting. However, it should be understood that relative shapes, patterns, and angles are truly intended to represent at least one exemplary embodiment, and therefore these relative shapes, patterns, and angles shown may be considered as limitations to at least one specific exemplary embodiment of the present disclosure.

[0066] As is customary in the art, some exemplary embodiments are described and shown in the accompanying drawings with respect to functional blocks, units and / or modules. It will be appreciated by those skilled in the art that these blocks, units and / or modules are physically implemented by electronic (or optical) circuits (such as logic circuits), discrete components, microprocessors, hard-wired circuits, memory elements, wiring connections, etc. that can be formed using semiconductor-based manufacturing techniques or other manufacturing techniques. In the case where blocks, units and / or modules are implemented by microprocessors or other similar hardware, they can be programmed and controlled using software (e.g., microcode) to perform the various functions discussed herein, and they can be selectively driven by firmware and / or software. It is also contemplated that each block, unit and / or module can be implemented by dedicated hardware, or as a combination of dedicated hardware that performs some functions and processors that perform other functions (e.g., one or more programmed microprocessors and related circuits). In addition, without departing from the scope of the inventive concept, each block, unit and / or module of some exemplary embodiments can be physically divided into two or more interacting and discrete blocks, units and / or modules. Furthermore, the blocks, units and / or modules of some exemplary embodiments may be physically combined into more complex blocks, units and / or modules without departing from the scope of the inventive concept.

[0067] It will be apparent to those skilled in the art that various modifications and variations can be made to the disclosed embodiments without departing from the spirit and scope of the inventive concepts.

[0068] Throughout the specification and drawings, the same reference numerals may be used to refer to the same or like elements.

[0069] Hereinafter, exemplary embodiments of the present disclosure will be described with reference to the accompanying drawings.

[0070] Figure 1 is a schematic perspective view illustrating an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure. Figure 2 is a schematic cross-sectional view illustrating an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure.

[0071] Reference Figure 1 and Figure 2 In some embodiments, the adhesion defect detection device 10 may include an inspection window EW, a first shape changer CP1, a second shape changer CP2, and a third shape changer CP3. The shape changers CP1 to CP3 may be implemented as pushing elements configured to push the flexible substrate so as to change the shape of the flexible substrate, such as bending the flexible substrate.

[0072] In some embodiments, the inspection window EW may be rectangular in a plan view. The inspection window EW may include a pair of short sides extending in a first direction D1 and a pair of long sides extending in a second direction D2 intersecting the first direction D1. Each corner where the long side and the short side of the inspection window EW meet may be a right angle, but may also be curved (e.g., to form a rounded corner).

[0073] Unless otherwise defined, the terms “on,” “above,” “up,” “top,” and “upper surface” used herein mean the direction indicated by an arrow indicating a third direction D3 intersecting the first direction D1 and the second direction D2 in the drawing, and the terms “under,” “beneath,” “lower,” “bottom,” and “lower surface” used herein mean the direction opposite to the direction indicated by the arrow indicating the third direction D3 in the drawing.

[0074] In some embodiments, the inspection window EW may include an inspection area IA, one or more non-inspection areas NIA, and one or more dummy areas DMA. The inspection area IA is an area for detecting defects that may occur in the inspection target panel IOP during bonding, the non-inspection area NIA is an area that is together with the inspection area IA and at least partially overlaps with the inspection target panel IOP in the third direction D3, and the dummy area DMA is an area of ​​the inspection window EW that does not overlap with the inspection target panel IOP in the third direction D3 and is engaged with the second shape changer CP2. Depending on the shape of the inspection target panel IOP and the area to be inspected, the inspection area IA, the non-inspection area NIA, and the dummy area DMA of the inspection window EW may be changed differently.

[0075] The inspection window EW can be made of transparent glass or plastic. For example, the inspection window EW can be made of a light-transmitting material. In some embodiments, the inspection window EW can have a flexible property. For example, the inspection window EW can be made of a bendable, foldable or rollable material or structure, and can therefore be bendable, foldable or rollable without cracks or breaks. In addition, the inspection window EW and the cover window joined to the inspection target panel IOP can be made of the same material.

[0076] The inspection target panel IOP to be inspected for the presence or absence of an adhesion defect may be located under the inspection window EW of the adhesion defect detection apparatus 10 .

[0077] The inspection target panel IOP may be a display panel or a touch screen panel (TSP) used in a display device. In some embodiments, the inspection target panel IOP may be a touch sensing unit.

[0078] In some embodiments, the inspection target panel IOP may be a foldable display panel. For example, the inspection target panel IOP may include a first non-folding area NFA, a folding area FA, and a second non-folding area NFA sequentially arranged in the second direction D2, and the inspection target panel IOP may be folded upward or downward relative to the non-folding area NFA in the folding area FA.

[0079] The inspection window EW may have a larger area than the inspection target panel IOP. However, the present invention is not limited to this case. In some embodiments, the inspection window EW and the inspection target panel IOP may have the same area, or the inspection target panel IOP may have a larger area than the inspection window EW.

[0080] The inspection area IA of the inspection window EW may overlap at least partially with the folding area FA of the inspection target panel IOP in the third direction D3. In some embodiments, the width of the inspection area IA of the inspection window EW in the second direction D2 may be greater than the width of the folding area FA of the inspection target panel IOP in the second direction D2. In this case, the inspection area IA of the inspection window EW may overlap at least partially with a part of the non-folding area NFA of the inspection target panel IOP in the third direction D3. In some embodiments, the width of the inspection area IA of the inspection window EW in the second direction D2 may be equal to the width of the folding area FA of the inspection target panel IOP in the second direction D2.

[0081] In some embodiments, the length of the inspection area IA of the inspection window EW in the first direction D1 may be longer than the length of the folding area FA of the inspection target panel IOP in the first direction D1. In some embodiments, the length of the inspection area IA of the inspection window EW in the first direction D1 may be equal to the length of the folding area FA of the inspection target panel IOP in the first direction D1. For example, the inspection area IA of the inspection window EW may substantially correspond to and be aligned with the folding area FA of the inspection target panel IOP in the first direction D1 and the second direction D2.

[0082] The non-inspection area NIA of the inspection window EW may at least partially overlap with the non-folding area NFA of the inspection target panel IOP in the third direction D3. In some embodiments, the width of the non-inspection area NIA of the inspection window EW in the second direction D2 may be greater than the width of the non-folding area NFA of the inspection target panel IOP in the second direction D2. In some embodiments, the width of the non-inspection area NIA of the inspection window EW in the second direction D2 may be equal to the width of the non-folding area NFA of the inspection target panel IOP in the second direction D2.

[0083] The dummy area DMA of the inspection window EW may not overlap with the inspection target panel IOP in the third direction D3. However, the present invention is not limited to this case. In some embodiments, the dummy area DMA of the inspection window EW may partially overlap with the inspection target panel IOP in the third direction D3.

[0084] The inspection adhesive IP may be disposed on the lower surface of the inspection window EW. In some embodiments, the inspection adhesive IP may at least partially overlap with the inspection area IA of the inspection window EW in the third direction D3. In addition, the inspection adhesive IP may have the same area as the inspection area IA of the inspection window EW. However, the present invention is not limited to this case. In some embodiments, the inspection adhesive IP may have an area smaller than the inspection area IA of the inspection window EW. In some embodiments, the inspection adhesive IP may at least partially overlap with the inspection area IA of the inspection window EW and the non-inspection area NIA of the inspection window EW. In addition, in some embodiments, the inspection adhesive IP may at least partially overlap with the inspection area IA of the inspection window EW, the non-inspection area NIA of the inspection window EW, and a portion of the dummy area DMA in the third direction D3.

[0085] In some embodiments, the inspection adhesive IP may be formed of an optically clear adhesive (OCA). Alternatively, various adhesives for bonding a display panel to a cover window may be used. However, the inspection adhesive IP may be made of an adhesive that is actually used to bond the inspection target panel IOP to the cover window to improve the accuracy of adhesion defect detection.

[0086] The inspection adhesive IP may be provided between the inspection window EW and the inspection target panel IOP and may be located in the folding area FA and the non-folding area NFA of the inspection target panel IOP. However, the present invention is not limited to this case, and the inspection adhesive IP may also be located only in the folding area FA of the inspection target panel IOP.

[0087] The first shape changer CP1 may be disposed on the inspection window EW. The first shape changer CP1 may include a base BAP and a pattern PP between the base BAP and the inspection window EW. The first shape changer CP1 may change the shape of the inspection window EW in a third direction D3 or a direction opposite to the third direction D3.

[0088] In some embodiments, in the second direction D2, the first shape changer CP1 may have a smaller width than the inspection window EW. In addition, in the second direction D2, the first shape changer CP1 may have a larger width than the inspection area IA of the inspection window EW. In some embodiments, in the second direction D2, the first shape changer CP1 may have the same width as the inspection window EW.

[0089] The second shape changer CP2 may be disposed in parallel with the inspection window EW in the second direction D2. The second shape changer CP2 may change the shape of the inspection window EW in the second direction D2 and in a direction opposite to the second direction D2.

[0090] The second shape changer CP2 may include a first fixed group CP2A and a second fixed group CP2B. The first fixed group CP2A and the second fixed group CP2B may face each other in the second direction D2 across the inspection window EW inserted between them. However, the present invention is not limited to this case. In some embodiments, the first fixed group CP2A and the second fixed group CP2B may face each other in the first direction D1 across the inspection window EW inserted between them. In this case, the second shape changer CP2 may change the shape of the inspection window EW in the first direction D1 and in a direction opposite to the first direction D1. In addition, in some embodiments, the second shape changer CP2 may include a plurality of fixed groups that face each other in the first direction D1 and the second direction D2 across the inspection window EW inserted between them. In this case, the second shape changer CP2 may change the shape of the inspection window EW in the first direction D1, the second direction D2, the direction opposite to the first direction D1, and the direction opposite to the second direction D2.

[0091] Each of the first fixing group CP2A and the second fixing group CP2B may include a fixer FXP fixing the dummy area DMA of the inspection window EW, and an actuator MP moving the fixer FXP in the second direction D2 and a direction opposite to the second direction D2.

[0092] The fixture FXP may include an upper portion TP, a lower portion BP facing the upper portion TP, and a connector CNP connecting the upper portion TP and the lower portion BP. The upper portion TP and the lower portion BP may be connected by the connector CNP, and may be moved in a second direction D2 and in a direction opposite to the second direction D2, respectively, by the connector CNP. In addition, the upper portion TP and the lower portion BP may contact the dummy area DMA of the inspection window EW to fix the inspection window EW in place. However, the present invention is not limited to this case. In some embodiments, the fixture FXP may consist only of the lower portion BP, and the upper portion TP may be omitted.

[0093] The upper portion TP may include an upper base TB and an upper pad PT disposed on a lower surface of the upper base TB. The upper pad PT may be made of a porous vacuum pad and may suck or release the upper surface of the inspection window EW according to the flow of air sucked into or exhausted from the upper base TB.

[0094] The lower part BP may include a lower base body BB and a lower pad PB disposed on the upper surface of the lower base body BB. The lower pad PB may be made of a porous vacuum pad and may suck or release the lower surface of the inspection window EW according to the flow of air sucked into the lower base body BB or the flow of air exhausted from the lower base body BB.

[0095] In some embodiments, the upper pad PT and the lower pad PB may be made of an adhesive material. In this case, the holder FXP may use the adhesive properties of the upper pad PT and the lower pad PB to fix the inspection window EW. In addition, in some embodiments, one of the upper pad PT and the lower pad PB may be made of a porous vacuum pad, and the other may be made of an adhesive material.

[0096] The actuator MP may include a moving guide RP and a motor MT.

[0097] The moving guide RP may be fixed to the lower surface of the holder FXP and may be moved in the second direction D2 and in the direction opposite to the second direction D2 by the motor MT. The motor MT is fixed to the side surface of the moving guide RP and moves the moving guide RP in the second direction D2 and in the direction opposite to the second direction D2. However, the present invention is not limited to this case. The motor MT may include, but is not limited to, a hydraulic cylinder, a pneumatic cylinder, a gas cylinder, etc.

[0098] In a state where both ends of the inspection window EW are fixed by the fixers FXP, the actuator MP moves the fixers FXP in a direction outward from the inspection window EW. For example, the first fixing group CP2A of the second shape changer CP2 moves in a direction opposite to the second direction D2, and the second fixing group CP2B of the second shape changer CP2 moves in the second direction D2. Therefore, the inspection window EW is stretched in the second direction D2 and in a direction opposite to the second direction D2. As a result, the overall uniformity of the inspection window EW is improved.

[0099] The third shape changer CP3 may be disposed in parallel with the inspection target panel IOP in the second direction D2. The third shape changer CP3 may change the shape of the inspection target panel IOP in the second direction D2 and a direction opposite to the second direction D2.

[0100] The third shape changer CP3 may include a first fixed group CP3A and a second fixed group CP3B. The first fixed group CP3A and the second fixed group CP3B of the third shape changer CP3 may face each other across the inspection target panel IOP inserted between them in the second direction D2. However, the present invention is not limited to this case. In some embodiments, the first fixed group CP3A and the second fixed group CP3B of the third shape changer CP3 may face each other across the inspection target panel IOP inserted between them in the first direction D1. In this case, the third shape changer CP3 may change the shape of the inspection target panel IOP in the first direction D1 and in the direction opposite to the first direction D1. In addition, in some embodiments, the third shape changer CP3 may include a plurality of fixed groups, which face each other across the inspection target panel IOP inserted between them in the first direction D1 and the second direction D2. In this case, the third shape changer CP3 may change the shape of the inspection target panel IOP in the first direction D1, the second direction D2, the direction opposite to the first direction D1, and the direction opposite to the second direction D2.

[0101] The construction of the first fixed group CP3A and the second fixed group CP3B of the third shape changer CP3 is the same as the construction of the first fixed group CP2A and the second fixed group CP2B of the second shape changer CP2, so a detailed description thereof will be omitted. To the extent that details have been omitted, it is understood that the elements whose details have been omitted are at least similar to the corresponding elements described in detail herein.

[0102] The first fixing group CP3A of the third shape changer CP3 moves in the direction opposite to the second direction D2, and the second fixing group CP3B of the third shape changer CP3 moves in the second direction D2. Therefore, the inspection target panel IOP is stretched in the second direction D2 and in the direction opposite to the second direction D2. As a result, the overall uniformity of the inspection target panel IOP is improved.

[0103] The length of the inspection window EW stretched by the second shape changer CP2 may be different from the length of the inspection target panel IOP stretched by the third shape changer CP3. For example, the length of the inspection window EW stretched by the second shape changer CP2 may be longer than the length of the inspection target panel IOP stretched by the third shape changer CP3. In some embodiments, the length of the inspection window EW stretched by the second shape changer CP2 may be equal to the length of the inspection target panel IOP stretched by the third shape changer CP3. In addition, in some embodiments, the length of the inspection target panel IOP stretched by the third shape changer CP3 may be longer than the length of the inspection window EW stretched by the second shape changer CP2.

[0104] Figure 3 is a schematic perspective view illustrating a first shape changer of an adhesion defect detecting apparatus according to an exemplary embodiment of the present disclosure. Figure 4 It is shown Figure 3 Magnified view of area A. Figure 5 is a schematic perspective view illustrating a first shape changer of an adhesion defect detecting apparatus according to an exemplary embodiment of the present disclosure. Figure 6 is a schematic perspective view illustrating a first shape changer of an adhesion defect detecting apparatus according to an exemplary embodiment of the present disclosure. Figure 7 is a schematic perspective view illustrating a first shape changer of an adhesion defect detecting apparatus according to an exemplary embodiment of the present disclosure.

[0105] Reference Figure 3 and Figure 4 , the first shape changer CP1 may include a base BAP and a pattern PP, and the pattern PP may include a plurality of holes H.

[0106] The holes H of the pattern PP can change the shape of the inspection window EW in the third direction D3 or in the direction opposite to the third direction D3 according to the air IN sucked into the base BAP or the air EX exhausted from the base BAP. For example, the holes H of the pattern PP can change the shape of the inspection window EW in the third direction D3 according to the air IN sucked into the base BAP, and can change the shape of the inspection window EW in the direction opposite to the third direction D3 according to the air EX exhausted from the base BAP.

[0107] In some embodiments, the first shape changer CP1 may change the shape of the inspection window EW differently in each area according to the flow of the inhaled air IN or the exhausted air EX. For example, the first area A1 may exhaust the air EX, while the second area A2 may inhale the air IN. Therefore, the shape of the inspection window EW corresponding to the first area A1 may be changed in a direction opposite to the third direction D3, and the shape of the inspection window EW corresponding to the second area A2 may be changed in the third direction D3. In addition, in some embodiments, the first shape changer CP1 may also include a non-driving area that does not inhale the air IN nor exhaust the air EX.

[0108] The holes H of the pattern PP may be provided in the entire surface of the first shape changer CP1, and the number of the holes H may be 129. However, the present invention is not limited to this case. Figure 5 The first shape changer CP1_1 may include a pattern area PA and a non-pattern area NPA disposed on both sides of the pattern area PA. The pattern area PA may correspond to the inspection area IA of the inspection window EW, and the non-pattern area NPA may correspond to the non-inspection area NIA of the inspection window EW.

[0109] A plurality of holes H may be provided in the pattern PP_1 of the first shape changer CP1_1 corresponding to the pattern area PA. In addition, in some embodiments, the width of the pattern area PA in the second direction D2 may be greater than the width of the inspection area IA in the second direction D2. In some embodiments, the width of the pattern area PA in the second direction D2 may be equal to the width of the inspection area IA in the second direction D2, or the width of the pattern area PA in the second direction D2 may be smaller than the width of the inspection area IA in the second direction D2.

[0110] The holes H of the pattern PP_1 may be circular in a plan view and may be spaced apart from each other. However, the present invention is not limited to this case. Figure 6 , in some embodiments, the plurality of holes H of the pattern PP_2 may be strip-shaped. For example, the pattern PP_2 of the first shape changer CP1_2 may include a plurality of strip-shaped holes H extending in the first direction D1 and spaced apart from each other in the second direction D2. In addition, in some embodiments, the strip-shaped holes H may be disposed only in the pattern area PA of the first shape changer CP1_2. In some embodiments, the strip-shaped holes H may be formed in the pattern area PA and the non-pattern area NPA of the first shape changer CP1_2.

[0111] Reference Figure 7 In some embodiments, the pattern PP_3 of the first shape changer CP1_3 may be made of an adhesive material and may be disposed in the pattern area PA. In some embodiments, the pattern PP_3 may be disposed in the pattern area PA and the non-pattern area NPA, and the adhesive material may be disposed in the pattern area PA. When the first shape changer CP1-3 is made of an adhesive material as described above, an element for sucking and exhausting air may be omitted from the base BAP.

[0112] Figure 8 is a schematic plan view illustrating a second shape changer of the adhesion defect detecting apparatus according to an exemplary embodiment of the present disclosure. Fig. 9 is a schematic plan view illustrating a third shape changer of the adhesion defect detecting apparatus according to an exemplary embodiment of the present disclosure. Fig.10 is a schematic plan view illustrating a second shape changer of the adhesion defect detecting apparatus according to an exemplary embodiment of the present disclosure. Fig.11 is a schematic plan view illustrating a third shape changer of the adhesion defect detecting apparatus according to an exemplary embodiment of the present disclosure.

[0113] Reference Figure 8, the lower part BP of each of the first fixed group CP2A and the second fixed group CP2B of the second shape changer CP2 may be placed on the moving guide RP. The moving guide RP may include a track, a guide rail or some other structure configured to move along a predetermined path. The moving guide RP may include a first moving guide RP1 connected to the motor MT and a second moving guide RP2 disposed to be separated from the first moving guide RP1 in each of the first direction D1 and the direction opposite to the first direction D1. The lower part BP of each of the first fixed group CP2A and the second fixed group CP2B of the second shape changer CP2 may be placed on the first moving guide RP1 and the second moving guide RP2. A guide groove RH may be formed in each of the first moving guide RP1 and the second moving guide RP2, and each of the first fixed group CP2A and the second fixed group CP2B may reciprocate along the guide groove RH in the second direction D2 and the direction opposite to the second direction D2.

[0114] As described above, the upper pad PT and the lower pad PB for fixing the inspection window EW are provided in each of the first fixing group CP2A and the second fixing group CP2B of the second shape changer CP2. In a state where the inspection window EW is fixed by the upper pad PT and the lower pad PB, the first fixing group CP2A moves in the direction opposite to the second direction D2, and the second fixing group CP2B moves in the second direction D2, thereby stretching the inspection window EW.

[0115] The length of the upper pad PT of the second shape changer CP2 in the first direction D1 may be smaller than the length of the upper base TB in the first direction D1, and the length of the lower pad PB of the second shape changer CP2 in the first direction D1 may be smaller than the length of the lower base BB in the first direction D1. However, the present invention is not limited to this case. In some embodiments, the length of the upper pad PT of the second shape changer CP2 in the first direction D1 may be equal to the length of the upper base TB in the first direction D1, and the length of the lower pad PB of the second shape changer CP2 in the first direction D1 may be equal to the length of the lower base BB in the first direction D1.

[0116] The length of the upper base TB of the second shape changer CP2 in the first direction D1 may be equal to the length of the inspection window EW in the first direction D1, and the length of the lower base BB of the second shape changer CP2 in the first direction D1 may be equal to the length of the inspection window EW in the first direction D1. However, the present invention is not limited to this case. In some embodiments, the lengths of the upper base TB and the lower base BB of the second shape changer CP2 in the first direction D1 may be different from the length of the inspection window EW in the first direction D1.

[0117] Reference Fig. 9The construction of the third shape changer CP3 is substantially the same as that of the second shape changer CP2, and thus a detailed description of the construction of the third shape changer CP3 is omitted. To the extent that details have been omitted, it is understood that the elements for which details have been omitted are at least similar to corresponding elements described in detail herein.

[0118] In some embodiments, the length of the third shape changer CP3 in the first direction D1 may be different from the length of the second shape changer CP2 in the first direction D1. For example, since the area of ​​the inspection window EW is larger than the area of ​​the inspection target panel IOP, the length of the second shape changer CP2 (in the first direction D1) for fixing and stretching the inspection window EW may be longer than the length of the third shape changer CP3 (in the first direction D1) for fixing and stretching the inspection target panel IOP. In some embodiments, the length of the second shape changer CP2 in the first direction D1 may be equal to the length of the third shape changer CP3 in the first direction D1. In this case, the second shape changer CP2 and the third shape changer CP3 may be formed using the same process.

[0119] The upper pad PT and the lower pad PB included in each of the second shape changer CP2 and the third shape changer CP3 may be made of a porous vacuum pad having a plurality of air holes AH. However, the present invention is not limited to this case. Fig.10 and Fig.11 , the upper pad PT_1 and the lower pad PB_1 included in each of the second shape changer CP2_1 and the third shape changer CP3_1 may be made of an adhesive material CM. In this case, the construction of each of the second shape changer CP2_1 and the third shape changer CP3_1 may be simplified. In addition, in some embodiments, the upper pad PT_1 and the lower pad PB_1 included in the second shape changer CP2_1 may be made of an adhesive material CM, and the upper pad PT and the lower pad PB included in the third shape changer CP3 may be made of a porous vacuum pad. In this case, the construction of the second shape changer CP2_1 may be simplified, and the inspection target panel IOP fixed by the third shape changer CP3 may be prevented from being damaged by the adhesive material CM.

[0120] Now refer to Figures 12 to 27 An adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure is described. Fig.46 is a flowchart illustrating an adhesion defect detection method using an adhesion defect detection device according to an exemplary embodiment of the present disclosure. Fig.46 The following description is given.

[0121] Fig.12is a schematic perspective view illustrating an operation of placing an inspection adhesive on an inspection window in an adhesion defect inspection method using an adhesion defect inspection apparatus according to an exemplary embodiment of the present disclosure.

[0122] Reference Fig.12 , the inspection adhesive IP is placed on the surface of the inspection window EW. As described above, the inspection window EW includes the inspection area IA, the non-inspection area NIA and the dummy area DMA, and the inspection adhesive IP is placed in the inspection area IA of the inspection window EW. In some embodiments, the inspection adhesive IP may have the same area as the inspection area IA of the inspection window EW. In some embodiments, the inspection adhesive IP may have a smaller area than the inspection area IA of the inspection window EW or have a larger area than the inspection area IA of the inspection window EW.

[0123] The inspection adhesive IP may include OCA. However, in order to increase the accuracy of adhesion defect detection, the inspection adhesive IP may be made of an adhesive actually used to bond the inspection target panel IOP to the cover window as described above.

[0124] Fig.13 is a schematic cross-sectional view illustrating an operation of placing an inspection window on a second shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure.

[0125] Reference Fig.13 , the inspection window EW to which the inspection adhesive IP is attached is placed on the second shape changer CP2. For example, the upper portion TP of the first fixing group CP2A included in the second shape changer CP2 may be moved in a direction opposite to the second direction D2, and the upper portion TP of the second fixing group CP2B may be moved in the second direction D2. Therefore, the upper surface of the lower portion BP of each of the first fixing group CP2A and the second fixing group CP2B is exposed.

[0126] Next, the inspection window EW is placed on the lower portion BP of each of the first fixing group CP2A and the second fixing group CP2B so that the inspection adhesive IP faces downward.

[0127] The area of ​​the inspection window EW placed on the lower part BP of each of the first fixed group CP2A and the second fixed group CP2B may be a dummy area DMA of the inspection window EW. However, the present invention is not limited to this case. In some embodiments, the dummy area DMA and the non-inspection area NIA may be placed on the lower part BP of each of the first fixed group CP2A and the second fixed group CP2B.

[0128] A portion of the dummy area DMA of the lower surface of the inspection window EW (the surface on which the inspection adhesive IP is provided) placed on the lower portion BP of each of the first and second fixing groups CP2A and CP2B is fixed by the lower pad PB of the lower portion BP.

[0129] Fig.14 is a schematic cross-sectional view illustrating an operation of fixing an inspection window using a second shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure.

[0130] Reference Fig.14 , the upper portion TP of the first fixed group CP2A included in the second shape changer CP2 moves in the second direction D2, and the upper portion TP of the second fixed group CP2B moves in the direction opposite to the second direction D2 to cover the end of the dummy area DMA of the inspection window EW. In some embodiments, the upper portion TP of each of the first fixed group CP2A and the second fixed group CP2B may be aligned with the lower portion BP of each of the first fixed group CP2A and the second fixed group CP2B in the third direction D3. In some embodiments, any one of the upper portion TP and the lower portion BP may protrude in the second direction D2 or in the direction opposite to the second direction D2.

[0131] The upper portion TP of each of the first fixing group CP2A and the second fixing group CP2B fixes a portion of the dummy area DMA of the upper surface (the surface opposite to the surface on which the inspection adhesive IP is provided) of the inspection window EW using the upper pad PT. Therefore, the inspection window EW is fixed by the first fixing group CP2A and the second fixing group CP2B.

[0132] Fig.15 is a schematic cross-sectional view illustrating an operation of placing an inspection target panel on a third shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure.

[0133] Reference Fig.15 , the inspection target panel IOP is placed on the third shape changer CP3. For example, the upper portion TP of the first fixing group CP3A included in the third shape changer CP3 moves in the direction opposite to the second direction D2, and the upper portion TP of the second fixing group CP3B moves in the second direction D2. Therefore, the upper surface of the lower portion BP of each of the first fixing group CP3A and the second fixing group CP3B is exposed.

[0134] Next, the inspection target panel IOP is placed on the lower portion BP of each of the first and second fixing groups CP3A and CP3B so that the surface to which the cover window is attached faces upward.

[0135] The area of ​​the inspection target panel IOP placed on the lower portion BP of each of the first and second fixing groups CP3A and CP3B may be an end portion of the non-folding area NFA of the inspection target panel IOP.

[0136] An end portion of the lower surface of the inspection target panel IOP placed on the lower portion BP of each of the first and second fixing groups CP3A and CP3B is fixed by the lower pad PB of the lower portion BP.

[0137] Fig.16 is a schematic cross-sectional view illustrating an operation of fixing an inspection target panel using a third shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure.

[0138] Reference Fig.16 , the upper portion TP of the first fixing group CP3A included in the third shape changer CP3 moves in the second direction D2, and the upper portion TP of the second fixing group CP3B moves in a direction opposite to the second direction D2 to cover both ends of the upper surface of the inspection target panel IOP.

[0139] The upper portion TP of each of the first fixing group CP3A and the second fixing group CP3B fixes both ends of the upper surface of the inspection target panel IOP using the upper pad PT. Therefore, the inspection target panel IOP is fixed by the first fixing group CP3A and the second fixing group CP3B.

[0140] Fig.17 is a schematic cross-sectional view illustrating an operation of aligning an inspection window and an inspection target panel in an adhesion defect inspection method using an adhesion defect inspection apparatus according to an exemplary embodiment of the present disclosure.

[0141] Reference Fig.17 , the inspection window EW and the inspection target panel IOP are aligned to at least partially overlap each other in the third direction D3. For example, the inspection target panel IOP is fixed by the third shape changer CP3, and the inspection window EW fixed by the second shape changer CP2 is placed on the fixed inspection target panel IOP. Here, the inspection adhesive IP of the inspection window EW and the upper surface of the inspection target panel IOP are placed to face each other, and the inspection area IA of the inspection window EW, the inspection adhesive IP, and the folding area FA of the inspection target panel IOP at least partially overlap each other in the third direction D3.

[0142] Considering the fact that the shapes of the inspection area IA and the inspection adhesive IP of the inspection window EW are changed in the third direction D3 by the first shape changer CP1, the widths of the inspection area IA and the inspection adhesive IP of the inspection window EW in the second direction D2 are larger than the widths of the folding area FA of the inspection target panel IOP in the second direction D2. However, the present invention is not limited to this case. In some embodiments, the widths of the inspection area IA and the inspection adhesive IP of the inspection window EW in the second direction D2 may be equal to the widths of the folding area FA of the inspection target panel IOP in the second direction D2.

[0143] Fig.18 is a schematic cross-sectional view illustrating an operation of stretching an inspection window and an inspection target panel in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure.

[0144] In a state where the inspection window EW and the inspection target panel IOP are aligned with each other, in order to improve the overall uniformity of the inspection window EW, the first fixing group CP2A of the second shape changer CP2 moves in a direction opposite to the second direction D2, and the second fixing group CP2B of the second shape changer CP2 moves in the second direction D2 to stretch the inspection window EW in the second direction D2 and in a direction opposite to the second direction D2. However, the present invention is not limited to this case, and one of the first fixing group CP2A and the second fixing group CP2B may be fixed, and the other may be moved to stretch the inspection window EW.

[0145] Furthermore, in order to improve the overall uniformity of the inspection target panel IOP, the first fixing group CP3A of the third shape changer CP3 moves in the direction opposite to the second direction D2, and the second fixing group CP3B of the third shape changer CP3 moves in the second direction D2 to stretch the inspection target panel IOP in the second direction D2 and in the direction opposite to the second direction D2. However, the present invention is not limited to this case, and one of the first fixing group CP3A and the second fixing group CP3B may be fixed, and the other may be moved to stretch the inspection target panel IOP.

[0146] The stretching of the inspection window EW and the stretching of the inspection target panel IOP may be performed simultaneously or non-simultaneously.

[0147] As described above, the length by which the inspection window EW is stretched by the second shape changer CP2 and the inspection target panel IOP is stretched by the third shape changer CP3 may be the same or different according to the size and material of each of the inspection window EW and the inspection target panel IOP.

[0148] Fig.19is a schematic cross-sectional view illustrating an operation of placing a first shape changer on an inspection window in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure.

[0149] In a state where the inspection window EW is stretched, the first shape changer CP1 is placed on the inspection window EW. The first shape changer CP1 has a smaller width than the inspection window EW in the second direction D2, but has a larger width than the inspection area IA of the inspection window EW, and at least partially overlaps with the inspection area IA of the inspection window EW. Therefore, the folding area FA of the inspection target panel IOP, the inspection adhesive IP, the inspection area IA of the inspection window EW, and the first shape changer CP1 at least partially overlap each other in the third direction D3.

[0150] As described above, a portion of the non-folding area NFA of the inspection target panel IOP may also at least partially overlap the inspection adhesive IP, the inspection area IA of the inspection window EW, and the first shape changer CP1.

[0151] Fig. 20 is a schematic cross-sectional view illustrating an operation of driving a first shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure.

[0152] Reference Fig. 20 In some embodiments, the first shape changer CP1 includes a base BAP and a pattern PP including a plurality of holes H. The first shape changer CP1 may be driven region by region, and the holes H of the pattern PP may inhale air IN or exhaust air EX according to the driving of the first shape changer CP1.

[0153] In a state where the first shape changer CP1 is placed on the inspection window EW, the first shape changer CP1 sets the area corresponding to the inspection area IA of the inspection window EW as the driving area DA, and sets the area other than the driving area DA as the non-driving area NDA. The width of the driving area DA in the second direction D2 may be greater than the width of the inspection area IA of the inspection window EW in the second direction D2. However, the present invention is not limited to this case. In some embodiments, the width of the driving area DA in the second direction D2 may be equal to the width of the inspection area IA of the inspection window EW in the second direction D2.

[0154] The holes H of the pattern PP provided in the driving area DA take in the air IN according to the driving of the first shape changer CP1.

[0155] Fig.21is a schematic cross-sectional view illustrating an operation of changing a shape of an inspection window using a first shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure.

[0156] Reference Fig.21 , the holes H of the pattern PP provided in the driving area DA inhale the air IN according to the driving of the first shape changer CP1, and thus the shape of the inspection window EW corresponding to the driving area DA changes in the third direction D3. Here, the inspection adhesive IP provided on the lower surface of the inspection window EW also moves in the third direction D3. In the inspection window EW, the area whose shape is changed by the first shape changer CP1 is defined as the shape change area CPA. The height of the shape change area CPA of the inspection window EW and the inspection adhesive IP in the third direction D3 may be higher than the height of the area of ​​the inspection window EW other than the shape change area CPA.

[0157] The shape change area CPA at least partially overlaps the folding area FA of the inspection target panel IOP in the third direction D3, and the width of the shape change area CPA in the second direction D2 is greater than the width of the folding area FA of the inspection target panel IOP in the second direction D2. However, the present invention is not limited to this case. In some embodiments, the width of the shape change area CPA in the second direction D2 may be equal to the width of the folding area FA of the inspection target panel IOP in the second direction D2.

[0158] Fig. 22 is a schematic cross-sectional view illustrating an operation of placing a first shape changer on an inspection window in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure. Fig.23 is a schematic cross-sectional view illustrating an operation of changing a shape of an inspection window using a first shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure.

[0159] Fig. 22 and Fig.23 The implementation method and Figures 19 to 21 The embodiment of the present invention differs in that the first shape changer comprises an adhesive material. Figures 19 to 21 The description of the elements and features of the embodiments of the present invention is the same as that of the elements and features of the embodiments of the present invention, and the differences will be mainly described. To the extent that details have been omitted, it is understood that the elements whose details have been omitted are at least similar to the corresponding elements described in detail herein.

[0160] Reference Fig. 22, when the inspection window EW is stretched, the first shape changer CP1_3 is placed on the inspection window EW. In some embodiments, the first shape changer CP1_3 sets the area corresponding to the inspection area IA of the inspection window EW as the pattern area PPA, and sets the area other than the pattern area PPA as the non-pattern area NPPA, and the pattern PP_3 is placed in the pattern area PPA. The width of the pattern area PPA in the second direction D2 may be greater than the width of the inspection area IA of the inspection window EW in the second direction D2. However, the present invention is not limited to this case. In some embodiments, the width of the pattern area PPA in the second direction D2 may be equal to the width of the inspection area IA of the inspection window EW in the second direction D2.

[0161] The folding area FA of the inspection target panel IOP, the inspection adhesive IP, the inspection area IA of the inspection window EW, and the pattern PP_3 of the first shape changer CP1_3 at least partially overlap each other in the third direction D3. The pattern PP_3 includes an adhesive material, and the first shape changer CP1_3 is attached and fixed to the inspection window EW through the pattern PP_3.

[0162] Reference Fig.23 , in a state where the first shape changer CP1_3 is fixed to the inspection window EW through the pattern PP_3, the first shape changer CP1_3 moves in the third direction D3. By the movement of the first shape changer CP1_3, the shape of the inspection window EW fixed to the second shape changer CP2 changes in the third direction D3. Here, the inspection adhesive IP provided on the lower surface of the inspection window EW is also moved in the third direction D3.

[0163] Fig.24 is a schematic cross-sectional view illustrating an operation of bringing an inspection area of ​​an inspection window close to a folding area of ​​an inspection target panel in an adhesion defect inspection method using an adhesion defect inspection apparatus according to an exemplary embodiment of the present disclosure. Fig.25 is a schematic plan view illustrating an operation of inspecting whether an inspection target panel has an adhesion defect by using an inspection window in an adhesion defect inspection method using an adhesion defect inspection apparatus according to an exemplary embodiment of the present disclosure.

[0164] Reference Fig.24, the second shape changer CP2 descends in a direction opposite to the third direction D3 to bring the inspection area IA of the inspection window EW close to the folding area FA of the inspection target panel IOP. Here, in order to prevent foreign matter from adhering to the inspection target panel IOP, the inspection adhesive IP provided on the lower surface of the inspection area IA of the inspection window EW does not contact the inspection target panel IOP. The distance D between the inspection adhesive IP and the inspection target panel IOP in the third direction D3 may be 100 μm or more, preferably 100 μm to 300 μm. This is because when the distance D is less than 100 μm, foreign matter may adhere to the inspection target panel IOP, and when the distance D is greater than 300 μm, the visibility of the contact defect may be reduced. However, the present invention is not limited to this case, and when a device capable of accurately detecting contact defects is installed, the distance D may also be greater than 300 μm.

[0165] A portion of the inspection window EW may contact the inspection target panel IOP. However, since the inspection adhesive IP is not provided on the portion of the inspection window EW that contacts the inspection target panel IOP, foreign matter does not adhere to the inspection target panel IOP. However, the present invention is not limited to this case. In some embodiments, the entire inspection window EW may not contact the inspection target panel IOP.

[0166] Reference Fig.25 , when the folding area FA of the inspection target panel IOP, the inspection adhesive IP, and the inspection window EW are close to each other but not combined, adhesion defects such as bubbles DF1, afterimages DF2, and edge blur DF3 are observed in a manner similar to when the inspection target panel IOP and the inspection window EW are actually combined together through the inspection adhesive IP. Therefore, without directly combining the cover window to the inspection target panel IOP, it is possible to determine in advance whether the inspection target panel IOP has a defect by detecting the adhesion defect. Therefore, it is possible to prevent the situation where both the inspection target panel IOP and the cover window are discarded due to defects detected after combining the inspection target panel IOP and the cover window together.

[0167] Fig.26 and Fig. 27 is a schematic cross-sectional view illustrating an operation of inspecting whether an inspection target panel has an adhesion defect by bending the inspection target panel and the inspection window in an adhesion defect inspection method using an adhesion defect inspection apparatus according to an exemplary embodiment of the present disclosure.

[0168] Reference Fig.26 and Fig. 27 , in order to detect an adhesion defect when folded, the inspection target panel IOP and the inspection window EW are bent using the second shape changer CP2 and the third shape changer CP3.

[0169] The non-folding area NFA of the inspection target panel IOP may be folded upward and downward from the folding area FA. Since an adhesion defect may occur during a folding process or a bending process after the inspection target panel IOP is coupled to the cover window, the inspection target panel IOP and the inspection window EW are bent upward and downward from the folding area FA of the inspection target panel IOP by using the second shape changer CP2 and the third shape changer CP3. In addition, even during the bending process, a predetermined distance D is maintained between the inspection adhesive IP provided on the lower surface of the inspection area IA of the inspection window EW and the inspection target panel IOP.

[0170] When the inspection target panel IOP and the inspection window EW are bent upward and downward, adhesion defects are observed, just as when the inspection target panel IOP and the inspection window EW are combined together by the inspection adhesive IP. Through this bending process, adhesion defects occurring due to the nature of the foldable display device can be additionally detected. However, the present invention is not limited to this case. In some embodiments, adhesion defects can be detected by changing the inspection target panel IOP and the inspection window EW to other shapes.

[0171] Fig.28 is a schematic perspective view illustrating an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure. Fig.29 is a schematic cross-sectional view illustrating an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure. Fig.28 and Fig.29 The implementation method and Figure 1 and Figure 2 The difference of the embodiment is that the inspection target panel has a curved portion, and the inspection area of ​​the inspection window is set to correspond to the curved portion. Figure 1 and Figure 2 The description of the elements and features of the embodiments of the present invention is the same as that of the elements and features of the embodiments of the present invention, and the differences will be mainly described. To the extent that details have been omitted, it is understood that the elements whose details have been omitted are at least similar to the corresponding elements described in detail herein.

[0172] Reference Fig.28 and Fig.29 In some embodiments, the adhesion defect detection device 10_1 may include an inspection window EW_1, a first shape changer CP1, a second shape changer CP2, and a third shape changer CP3_2.

[0173] The inspection target panel IOP_1 may include a flat portion FLA and curved portions BDA1 and BDA2 located in different planes. The curved portions BDA1 and BDA2 may be connected to the flat portion FLA and may be bent or folded from the flat portion FLA. Each of the curved portions BDA1 and BDA2 may have a curved surface having a predetermined intersection angle with the flat portion FLA. The curved portions BDA1 and BDA2 of the inspection target panel IOP_1 may include a first curved portion BDA1 and a second curved portion BDA2 respectively disposed on two long sides of the flat portion FLA. However, the present invention is not limited to this case, and flat surfaces having a predetermined intersection angle with the flat portion FLA may also be respectively formed on the two long sides of the flat portion FLA.

[0174] The inspection window EW_1 may include a first inspection area IA1, a second inspection area IA2, a non-inspection area NIA, and a dummy area DMA. The first inspection area IA1 may at least partially overlap the first curved portion BDA1 of the inspection target panel IOP_1 in the third direction D3, the second inspection area IA2 may at least partially overlap the second curved portion BDA2 of the inspection target panel IOP_1 in the third direction D3, and the non-inspection area NIA may at least partially overlap the flat portion FLA of the inspection target panel IOP_1 in the third direction D3.

[0175] In some embodiments, the width of the first inspection area IA1 of the inspection window EW_1 in the second direction D2 may be greater than the width of the first curved portion BDA1 of the inspection target panel IOP_1 in the second direction D2, the width of the second inspection area IA2 of the inspection window EW_1 in the second direction D2 may be greater than the width of the second curved portion BDA2 of the inspection target panel IOP_1 in the second direction D2, and the width of the non-inspection area NIA of the inspection window EW_1 in the second direction D2 may be smaller than the width of the flat portion FLA of the inspection target panel IOP_1 in the second direction D2. In some embodiments, the width of the first inspection area IA1 of the inspection window EW_1 in the second direction D2 may be equal to the width of the first curved portion BDA1 of the inspection target panel IOP_1 in the second direction D2, the width of the second inspection area IA2 of the inspection window EW_1 in the second direction D2 may be equal to the width of the second curved portion BDA2 of the inspection window EW_1 in the second direction D2, and the width of the non-inspection area NIA of the inspection window EW_1 in the second direction D2 may be equal to the width of the flat portion FLA of the inspection target panel IOP_1 in the second direction D2.

[0176] The dummy area DMA of the inspection window EW_1 may not overlap with the inspection target panel IOP_1 in the third direction D3. However, the present invention is not limited to this case. In some embodiments, the dummy area DMA of the inspection window EW_1 may partially overlap with the inspection target panel IOP_1 in the third direction D3.

[0177] The first inspection adhesive IP1 and the second inspection adhesive IP2 may be disposed on the lower surface of the inspection window EW_1. In some embodiments, the first inspection adhesive IP1 may at least partially overlap the first inspection area IA1 of the inspection window EW_1 in the third direction D3, and the second inspection adhesive IP2 may at least partially overlap the second inspection area IA2 of the inspection window EW_1 in the third direction D3.

[0178] In some embodiments, the first inspection adhesive IP1 and the second inspection adhesive IP2 may at least partially overlap with the first inspection area IA1, the second inspection area IA2, and a portion of the non-inspection area NIA of the inspection window EW_1. In addition, in some embodiments, the first inspection adhesive IP1 and the second inspection adhesive IP2 may at least partially overlap with the first inspection area IA1, the second inspection area IA2, a portion of the non-inspection area NIA, and a portion of the dummy area DMA of the inspection window EW_1 in the third direction D3.

[0179] The first shape changer CP1 may be disposed on the inspection window EW_1. The second shape changer CP2 may be disposed in parallel with the inspection window EW_1 in the second direction D2. The configurations of the first shape changer CP1 and the second shape changer CP2 are similar to Figure 1 and Figure 2 The structure of the embodiment of the present invention is the same, so its detailed description is omitted. To the extent that details have been omitted, it is understood that the elements whose details have been omitted are at least similar to the corresponding elements described in detail here.

[0180] The third shape changer CP3_2 may include a first fixing group CP3A_2 and a second fixing group CP3B_2. The first fixing group CP3A_2 and the second fixing group CP3B_2 of the third shape changer CP3_2 may face each other with the inspection target panel IOP_1 interposed therebetween in the second direction D2.

[0181] Each of the first and second fixing groups CP3A_2 and CP3B_2 may include a fixer FXP fixing the first and second bending portions BDA1 and BDA2 of the inspection target panel IOP_1 and an actuator MP moving the fixer FXP in the second direction D2 and a direction opposite to the second direction D2.

[0182] The holder FXP may include a base B and a pad P disposed on an upper surface of the base B. The pad P may be made of a porous vacuum pad. The pad P may suck or release the lower surface of the inspection target panel IOP_1 according to the air sucked into the base B or the air exhausted from the base B. In some embodiments, the pad P may be made of an adhesive material. In this case, the holder FXP may use the adhesive properties of the pad P to fix the inspection target panel IOP_1.

[0183] Fig.30 is a schematic cross-sectional view illustrating an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure.

[0184] Reference Fig.30 In some embodiments, a plurality of first shape changers CP1A and CP1B may be provided to correspond to the plurality of inspection areas IA1 and IA2. For example, the first shape changer CP1_4 may include a 1_1th shape changer CP1A and a 1_2th shape changer CP1B that are separated from each other.

[0185] The 1_1th shape changer CP1A may include a first base BAP1 and a first pattern PP1, and the first pattern PP1 may include a plurality of holes H. The 1_2nd shape changer CP1B may include a second base BAP2 and a second pattern PP2, and the second pattern PP2 may include a plurality of holes H.

[0186] The 1_1st shape changer CP1A may be disposed on the first inspection area IA1 of the inspection window EW_1 to at least partially overlap the first inspection adhesive IP1 and the first bent portion BDA1 in the third direction D3. The 1_2nd shape changer CP1B may be disposed on the second inspection area IA2 of the inspection window EW_1 to at least partially overlap the second inspection adhesive IP2 and the second bent portion BDA2 in the third direction D3. As described above, when a plurality of first shape changers CP1A and CP1B are disposed to correspond to the plurality of inspection areas IA1 and IA2, they may be placed according to various shapes of the inspection target panel IOP_1.

[0187] Now refer to Figures 31 to 41 An adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure is described. Figures 31 to 41 The implementation method and Figures 12 to 27 The difference of the embodiment of the inspection method is that the inspection target panel has a curved portion, and the inspection area of ​​the inspection window is placed to correspond to the curved portion. Figures 12 to 27The description of the elements and features of the embodiments of the present invention is the same as that of the elements and features of the embodiments of the present invention, and the differences will be mainly described. To the extent that details have been omitted, it is understood that the elements whose details have been omitted are at least similar to the corresponding elements described in detail herein.

[0188] Fig.31 is a schematic perspective view illustrating an operation of placing an inspection adhesive on an inspection window in an adhesion defect inspection method using an adhesion defect inspection apparatus according to an exemplary embodiment of the present disclosure.

[0189] Reference Fig.31 , the first inspection adhesive IP1 and the second inspection adhesive IP2 are placed on the surface of the inspection window EW_1. As described above, the first inspection adhesive IP1 is placed to at least partially overlap the first inspection area IA1 of the inspection window EW_1 in the third direction D3, and the second inspection adhesive IP2 is placed to at least partially overlap the second inspection area IA2 of the inspection window EW_1 in the third direction D3.

[0190] Fig.32 is a schematic cross-sectional view illustrating an operation of placing an inspection window on a second shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure. Fig.33 is a schematic cross-sectional view illustrating an operation of fixing an inspection window using a second shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure. Fig.32 and Fig.33 The implementation method and Fig.13 and Fig.14 The embodiments of the present invention are basically the same, so a detailed description thereof is omitted. To the extent that details have been omitted, it is understood that the elements whose details have been omitted are at least similar to the corresponding elements described in detail herein.

[0191] Fig.34 is a schematic cross-sectional view illustrating an operation of placing and fixing an inspection target panel on a third shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure.

[0192] Reference Fig.34 , the inspection target panel IOP_1 is placed on the third shape changer CP3_2. For example, the inspection target panel IOP_1 is placed on the holder FXP of each of the first and second holder groups CP3A_2 and CP3B_2 so that the surface to which the cover window is attached faces upward.

[0193] The area of ​​the inspection target panel IOP_1 placed on the fixture FXP of each of the first fixing group CP3A_2 and the second fixing group CP3B_2 may be the lower surface of each of the first curved portion BDA1 and the second curved portion BDA2 of the inspection target panel IOP_1. However, the present invention is not limited to this case. In some embodiments, the area of ​​the inspection target panel IOP_1 placed on the fixture FXP of each of the first fixing group CP3A_2 and the second fixing group CP3B_2 may extend to the flat portion FLA of the inspection target panel IOP_1, or may be limited to a portion of the lower surface of each of the first curved portion BDA1 and the second curved portion BDA2 of the inspection target panel IOP_1.

[0194] The inspection target panel IOP_1 placed on the holder FXP of each of the first and second holder groups CP3A_2 and CP3B_2 is fixed by the pads P of the holder FXP.

[0195] Fig.35 is a schematic cross-sectional view illustrating an operation of aligning an inspection window and an inspection target panel in an adhesion defect inspection method using an adhesion defect inspection apparatus according to an exemplary embodiment of the present disclosure.

[0196] Reference Fig.35 , the inspection window EW_1 and the inspection target panel IOP_1 are aligned to at least partially overlap each other in the third direction D3. For example, the inspection target panel IOP_1 is fixed by the third shape changer CP3_2, and the inspection window EW_1 fixed by the second shape changer CP2 is placed on the fixed inspection target panel IOP_1. Here, the first inspection adhesive IP1 and the second inspection adhesive IP2 of the inspection window EW_1 are placed to face the upper surface of the inspection target panel IOP_1.

[0197] The first inspection area IA1 of the inspection window EW_1, the first inspection adhesive IP1 and the first bent portion BDA1 of the inspection target panel IOP_1 at least partially overlap each other in the third direction D3, and the second inspection area IA2 of the inspection window EW_1, the second inspection adhesive IP2 and the second bent portion BDA2 of the inspection target panel IOP_1 at least partially overlap each other in the third direction D3.

[0198] Fig.36 is a schematic cross-sectional view illustrating an operation of stretching an inspection window and an inspection target panel in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure.

[0199] In a state where the inspection window EW_1 and the inspection target panel IOP_1 are aligned with each other, in order to improve the overall uniformity of the inspection window EW_1, the first fixing group CP2A of the second shape changer CP2 moves in a direction opposite to the second direction D2, and the second fixing group CP2B of the second shape changer CP2 moves in the second direction D2 to stretch the inspection window EW_1 in the second direction D2 and in a direction opposite to the second direction D2.

[0200] In addition, in order to improve the overall uniformity of the inspection target panel IOP_1, the first fixing group CP3A_2 of the third shape changer CP3_2 moves in the direction opposite to the second direction D2, and the second fixing group CP3B_2 of the third shape changer CP3_2 moves in the second direction D2 to stretch the inspection target panel IOP_1 in the second direction D2 and the direction opposite to the second direction D2.

[0201] Fig.37 is a schematic cross-sectional view illustrating an operation of placing a first shape changer on an inspection window in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure.

[0202] In a state where the inspection window EW_1 is stretched, the first shape changer CP1 is placed on the inspection window EW_1. The first shape changer CP1 has a smaller width than the inspection window EW_1 in the second direction D2, but at least partially overlaps with the first inspection area IA1 and the second inspection area IA2 of the inspection window EW_1. Therefore, the first bent portion BDA1 of the inspection target panel IOP_1, the first inspection adhesive IP1, the first inspection area IA1 of the inspection window EW_1, and the first shape changer CP1 at least partially overlap each other in the third direction D3, and the second bent portion BDA2 of the inspection target panel IOP_1, the second inspection adhesive IP2, the second inspection area IA2 of the inspection window EW_1, and the first shape changer CP1 at least partially overlap each other in the third direction D3.

[0203] Fig.38 is a schematic cross-sectional view illustrating an operation of placing a first shape changer on an inspection window in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure.

[0204] Reference Fig.38In some embodiments, the first shape changer CP1_4 includes a 1_1st shape changer CP1A and a 1_2nd shape changer CP1B separated from each other. The 1_1st shape changer CP1A is placed on the first inspection area IA1 of the inspection window EW_1 to at least partially overlap with the first inspection adhesive IP1 and the first bending portion BDA1 in the third direction D3. In addition, the 1_2nd shape changer CP1B is placed on the second inspection area IA2 of the inspection window EW_1 to at least partially overlap with the second inspection adhesive IP2 and the second bending portion BDA2 in the third direction D3.

[0205] Fig.39 is a schematic cross-sectional view illustrating an operation of bringing an inspection area of ​​an inspection window close to a bent portion of an inspection target panel in an adhesion defect inspection method using an adhesion defect inspection apparatus according to an exemplary embodiment of the present disclosure.

[0206] Reference Fig.39 , the second shape changer CP2 is lowered in the direction opposite to the third direction D3 to bring the first inspection area IA1 and the second inspection area IA2 of the inspection window EW_1 close to the first curved portion BDA1 and the second curved portion BDA2 of the inspection target panel IOP_1. Here, in order to prevent foreign matter from adhering to the inspection target panel IOP_1, the first inspection adhesive IP1 and the second inspection adhesive IP2 respectively provided on the lower surfaces of the first inspection area IA1 and the second inspection area IA2 of the inspection window EW_1 do not contact the inspection target panel IOP_1. The distance D between each of the first inspection adhesive IP1 and the second inspection adhesive IP2 and the flat portion FLA of the inspection target panel IOP_1 in the third direction D3 may be 100 μm or more, preferably 100 μm to 300 μm. This is because when the distance D is less than 100 μm, foreign matter may adhere to the inspection target panel IOP_1, and when the distance D is greater than 300 μm, the visibility of the contact defect may be reduced. However, the present invention is not limited to this case, and when a device capable of accurately detecting a contact defect is installed, the distance D may also be greater than 300 μm.

[0207] Fig.40 is a schematic cross-sectional view illustrating an operation of changing a shape of an inspection window using a first shape changer in an adhesion defect detection method using an adhesion defect detection apparatus according to an exemplary embodiment of the present disclosure. Fig.41 is a schematic plan view illustrating an operation of inspecting an adhesion defect of an inspection target panel by using an inspection window in an adhesion defect inspection method using an adhesion defect inspection apparatus according to an exemplary embodiment of the present disclosure.

[0208] Reference Fig.40The first shape changer CP1 includes a driving area DA and a non-driving area NDA and the driving area DA includes a first driving area DA1 and a second driving area DA2. The first driving area DA1 corresponds to the first inspection area IA1 and the second driving area DA2 corresponds to the second inspection area IA2.

[0209] The plurality of holes H of the pattern PP provided in the driving area DA exhaust the air EX according to the driving of the first shape changer CP1, and the shape of the inspection window EW_1 corresponding to the driving area DA changes in the direction opposite to the third direction D3. Here, the first inspection adhesive IP1 and the second inspection adhesive IP2 provided on the lower surface of the inspection window EW_1 also move in the direction opposite to the third direction D3.

[0210] In the inspection window EW_1, the area whose shape is changed by the first shape changer CP1 is defined as the first shape change area CPA1 and the second shape change area CPA2. The shapes of the first shape change area CPA1 and the first inspection adhesive IP1 of the inspection window EW_1 are changed according to the shape of the first bent portion BDA1, and the shapes of the second shape change area CPA2 and the second inspection adhesive IP2 of the inspection window EW_1 are changed according to the shape of the second bent portion BDA2. In addition, the first inspection adhesive IP1 and the second inspection adhesive IP2 do not contact the inspection target panel IOP_1. For example, the distance D between each of the first inspection adhesive IP1 and the second inspection adhesive IP2 and the inspection target panel IOP_1 may be 100 μm or more, preferably 100 μm to 300 μm. This is because when the distance D is less than 100 μm, foreign matter may adhere to the inspection target panel IOP_1, and when the distance D is greater than 300 μm, the visibility of the contact defect may be reduced. However, the present invention is not limited to this case, and when a device capable of accurately detecting contact defects is installed, the distance D may also be greater than 300 μm.

[0211] Reference Fig.41 , when the inspection window EW_1 having the first inspection adhesive IP1 and the second inspection adhesive IP2 is brought close to the first curved portion BDA1 and the second curved portion BDA2 of the inspection target panel IOP_1, adhesion defects such as bubbles DF1, afterimages DF2, and edge blur DF3 are observed, just as when the inspection target panel IOP_1 and the inspection window EW_1 are bonded together by the first inspection adhesive IP1 and the second inspection adhesive IP2. Therefore, without bonding the cover window directly to the inspection target panel IOP_1, it is possible to determine in advance whether the inspection target panel IOP_1 has a defect by detecting the adhesion defect. Therefore, it is possible to prevent the situation where both the inspection target panel IOP_1 and the cover window are discarded due to defects detected after bonding the inspection target panel IOP_1 and the cover window together.

[0212] Fig.42 is a schematic perspective view illustrating an inspection target panel according to an exemplary embodiment of the present disclosure. Fig.43 FIG. 1 is a diagram showing an example of inspecting a defect by using an inspection window in an adhesion defect inspection method using an adhesion defect inspection apparatus according to an exemplary embodiment of the present disclosure. Fig.42 A schematic plan view of an operation of inspecting a target panel for adhesion defects.

[0213] Reference Fig.42 and Fig.43 , the inspection target panel IOP_2 may include a folding area FA and a non-folding area NFA, and the non-folding area NFA may include a flat portion FLA and first and second bent portions BDA1 and BDA2 disposed on both sides of the flat portion FLA.

[0214] On the lower surface of the inspection window EW_2, the first inspection adhesive IP1 is provided to correspond to the folding area FA of the inspection target panel IOP_2, the second inspection adhesive IP2 is provided to correspond to the first bent portion BDA1 of the inspection target panel IOP_2, and the third inspection adhesive IP3 is provided to correspond to the second bent portion BDA2 of the inspection target panel IOP_2. According to the above-mentioned detection method, the shape of the area of ​​the inspection window EW_2 on which the first inspection adhesive IP1 is provided changes in the third direction D3, the shape of the area of ​​the inspection window EW_2 on which the second inspection adhesive IP2 and the third inspection adhesive IP3 are provided changes in the direction opposite to the third direction D3, and these areas are brought close to the inspection target panel IOP_2 to detect the adhesion defect of the weakly adhered portion before bonding.

[0215] Fig.44 is a schematic perspective view illustrating an inspection target panel according to an exemplary embodiment of the present disclosure. Fig.45 FIG. 1 is a diagram showing an example of inspecting a defect by using an inspection window in an adhesion defect inspection method using an adhesion defect inspection apparatus according to an exemplary embodiment of the present disclosure. Fig.44 A schematic plan view of an operation of inspecting a target panel for adhesion defects.

[0216] Reference Fig.44 and Fig.45 The inspection target panel IOP_3 may include a folding area FA, a non-folding area NFA, and a cutting area CTP, and the non-folding area NFA may include a flat portion FLA and first and second bent portions BDA1 and BDA2 disposed on both sides of the flat portion FLA.

[0217] On the lower surface of the inspection window EW_3, the first inspection adhesive IP1 is provided to correspond to the folding area FA of the inspection target panel IOP_3, the second inspection adhesive IP2 is provided to correspond to the first bending portion BDA1 of the inspection target panel IOP_3, the third inspection adhesive IP3 is provided to correspond to the second bending portion BDA2 of the inspection target panel IOP_3, and the fourth inspection adhesive IP4 is provided to correspond to the cutting area CTP of the inspection target panel IOP_3. The shape of the area of ​​the inspection window EW_3 on which the first inspection adhesive IP1 is provided changes in the third direction D3, the shape of the area of ​​the inspection window EW_3 on which the second inspection adhesive IP2, the third inspection adhesive IP3, and the fourth inspection adhesive IP4 are provided changes in the direction opposite to the third direction D3, and these areas are close to the inspection target panel IOP_3 to detect adhesion defects such as weak adhesion parts before bonding.

[0218] As described above, when the inspection target panel IOP_3 has a folding property and various shapes such as a bent portion and a cut region, a weakly adhered portion is generated when the inspection target panel IOP_3 is bonded to the cover window. Therefore, an adhesion defect in the weakly adhered portion can be detected before bonding. Therefore, it is possible to prevent a situation in which both the inspection target panel IOP_3 and the cover window are discarded due to a defect detected after bonding the inspection target panel IOP and the cover window together.

[0219] According to the embodiment, it is possible to detect defects that occur when the cover window and the display panel are combined together before combining them. Therefore, the defect rate of the display device can be significantly reduced.

[0220] However, the effects of the present invention are not limited to the effects described herein. The above and other effects of the embodiments will become more apparent to those skilled in the art to which the embodiments pertain by referring to the claims.

Claims

1. An adhesion defect detection device, comprising: An inspection window, comprising a first dummy area, a second dummy area, and an inspection area disposed between the first dummy area and the second dummy area; a first shape changer disposed on the inspection window and at least partially overlapping the inspection region in a first direction, the first shape changer being configured to change a shape of the inspection window in the first direction; as well as A second shape changer is disposed outside both the first dummy region and the second dummy region, the second shape changer being configured to change a shape of the inspection window in a second direction perpendicular to the first direction.

2. The adhesion defect detection device according to claim 1, further comprising: An inspection target panel is arranged under the inspection window; as well as A third shape changer is provided outside the inspection target panel, the third shape changer being configured to change the shape of the inspection target panel in the second direction.

3. The adhesion defect detection device according to claim 2, wherein: The inspection target panel includes a folded area and an unfolded area, and the inspection area at least partially overlaps the folded area in the first direction.

4. The adhesion defect detection device according to claim 3, further comprising an inspection adhesive disposed between the inspection area and the folding area, wherein The inspection adhesive contacts the inspection window and is spaced apart from the inspection target panel in the first direction.

5. The adhesion defect detection device according to claim 4, wherein: A distance between the inspection adhesive and the inspection target panel is in a range of 100 μm to 300 μm.

6. The adhesion defect detection device according to claim 4, wherein: The first shape changer includes a plurality of holes configured to suck in and exhaust air and change the shape of the inspection region in the first direction.

7. The adhesion defect detection device according to claim 2, wherein: The inspection target panel includes a flat portion and a first curved portion and a second curved portion, wherein the first curved portion and the second curved portion are arranged at both ends of the flat portion; the inspection area includes a first inspection area and a second inspection area, wherein the first inspection area at least partially overlaps with the first curved portion in the first direction, and the second inspection area at least partially overlaps with the second curved portion in the first direction, wherein the first inspection area and the second inspection area are separated from each other.

8. The adhesion defect detection device according to claim 7, comprising: a first inspection adhesive disposed between the first inspection area and the first curved portion; A second inspection adhesive is disposed between the second inspection area and the second bent portion, wherein both the first inspection adhesive and the second inspection adhesive contact the inspection window and are spaced apart from the inspection target panel.

9. The adhesion defect detection device according to claim 8, wherein: The first shape changer changes a shape of the first inspection area and a shape of the second inspection area in a third direction opposite to the first direction.

10. The adhesion defect detection device according to claim 9, wherein: The first inspection adhesive and the second inspection adhesive are spaced apart from the first curved portion and the second curved portion along the morphology of the first curved portion and the second curved portion.

11. The adhesion defect detection device according to claim 2, wherein: The inspection target panel includes a folding area and a non-folding area, wherein the non-folding area includes a flat portion, a first curved portion and a second curved portion, and the first curved portion and the second curved portion are arranged at opposite ends of the flat portion; the inspection area includes a first inspection area, a second inspection area and a third inspection area, the first inspection area at least partially overlaps with the folding area in the first direction, the second inspection area at least partially overlaps with the first curved portion in the first direction, and the third inspection area at least partially overlaps with the second curved portion in the first direction, wherein the first inspection area, the second inspection area and the third inspection area are separated from each other.

12. The adhesion defect detection device according to claim 11, further comprising: a first inspection adhesive disposed between the first inspection area and the folding area; a second inspection adhesive disposed between the second inspection area and the first curved portion; A third inspection adhesive is disposed between the third inspection area and the second bent portion, wherein the first inspection adhesive, the second inspection adhesive, and the third inspection adhesive all contact the inspection window and are spaced apart from the inspection target panel in the first direction.

13. The adhesion defect detection device according to claim 12, wherein: The first shape changer is configured to change the shape of the first inspection region in the first direction, change the shape of the second inspection region in a third direction opposite to the first direction, and change the shape of the third inspection region in the third direction.

14. The adhesion defect detection device according to claim 13, wherein: The second inspection adhesive and the third inspection adhesive are spaced apart from the first curved portion and the second curved portion along the forms of the first curved portion and the second curved portion, respectively.

15. A method for detecting adhesion defects, the method comprising: straightening and / or stretching inspection windows and inspection target panels; placing a first shape changer in contact with the inspection window and at least partially overlapping an inspection region of the inspection window in a first direction, and changing a shape of the inspection window in the first direction using the first shape changer; as well as The inspection window is brought close to the inspection target panel to detect adhesion defects in the inspection target panel.

16. The method according to claim 15, wherein: The step of straightening and / or stretching the inspection window and the inspection target panel comprises: fixing the inspection window to a second shape changer and changing the shape of the inspection window in a second direction perpendicular to the first direction; and The inspection target panel is fixed to a third shape changer, and the shape of the inspection target panel is changed in the second direction.

17. The method according to claim 16, wherein: The inspection window includes a first dummy area, a second dummy area, and the inspection area arranged between the first dummy area and the second dummy area, and the step of straightening and / or stretching the inspection window and the inspection target panel also includes: forming an inspection adhesive on the lower surface of the inspection window to correspond to the inspection area.

18. The method according to claim 17, wherein: The second shape changer fixes positions of the first dummy area and the second dummy area and changes the shape of the inspection window in the second direction.

19. The method according to claim 18, wherein: Changing the shape of the inspection window in the first direction using the first shape changer includes applying positive or negative air pressure to the inspection window through a plurality of holes included in the first shape changer.

20. The method according to claim 19, wherein: The inspection target panel includes a flat portion and a first curved portion and a second curved portion, the first curved portion and the second curved portion are arranged at opposite ends of the flat portion, the inspection area includes a first inspection area and a second inspection area, the first inspection area at least partially overlaps with the first curved portion in the first direction, and the second inspection area at least partially overlaps with the second curved portion in the first direction, wherein the first inspection area and the second inspection area are separated from each other in the second direction.

21. The method according to claim 20, comprising: a first inspection adhesive disposed between the first inspection area and the first curved portion; A second inspection adhesive is disposed between the second inspection area and the second bent portion, wherein both the first inspection adhesive and the second inspection adhesive contact the inspection window and are spaced apart from the inspection target panel in the first direction.

22. The method according to claim 21, wherein: The first shape changer changes the shape of the first inspection region in a third direction opposite to the first direction, and changes the shape of the second inspection region in the third direction.

23. The method according to claim 22, wherein: The first inspection adhesive and the second inspection adhesive are spaced apart from the first curved portion and the second curved portion along the morphology of the first curved portion and the second curved portion, respectively.

24. The method according to claim 19, wherein: The inspection target panel includes a folded area and an unfolded area, and the inspection area, the inspection adhesive, and the folded area at least partially overlap each other in the first direction.

25. The method according to claim 24, wherein: The non-folding area includes a flat part, a first curved part and a second curved part, and the first curved part and the second curved part are arranged at both ends of the flat part; the inspection area includes a first inspection area, a second inspection area and a third inspection area, the first inspection area at least partially overlaps with the folding area in the first direction, the second inspection area at least partially overlaps with the first curved part in the first direction, and the third inspection area at least partially overlaps with the second curved part in the first direction, wherein the first inspection area, the second inspection area and the third inspection area are separated from each other in the second direction.

26. The method according to claim 25, comprising: a first inspection adhesive disposed between the first inspection area and the folding area; a second inspection adhesive disposed between the second inspection area and the first curved portion; A third inspection adhesive is disposed between the third inspection area and the second bent portion, wherein the first inspection adhesive, the second inspection adhesive, and the third inspection adhesive all contact the inspection window and are spaced apart from the inspection target panel in the first direction.

27. The method according to claim 26, wherein: The first shape changer changes the shape of the first inspection region in the first direction, changes the shape of the second inspection region in a third direction opposite to the first direction, and changes the shape of the third inspection region in the third direction.

28. The method according to claim 27, wherein: The second inspection adhesive and the third inspection adhesive are spaced apart from the first curved portion and the second curved portion along the forms of the first curved portion and the second curved portion, respectively.

29. The method according to claim 28, wherein: The step of bringing the inspection window close to the inspection target panel to detect the adhesion defect includes detecting the adhesion defect by bending the inspection window and the inspection target panel in a state where the inspection window is brought close to the inspection target panel.

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