Bonding equipment

Abstract

The present application discloses a bonding device. The bonding device includes a first stage, a second stage and a roller member, wherein a first substrate is arranged on the first stage, a second substrate facing the first substrate is arranged on the second stage, and the roller member includes a roller portion and an air inlet portion. The roller portion includes an inner hole extending in one direction and a plurality of openings connecting the inner hole with an external space and is configured to bond the first substrate with the second substrate by pressing the first substrate. The air inlet portion is connected to the roller portion and configured to inhale air of the inner hole.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This patent application claims the benefit of Korean Patent Application No. 10-2019-0030749, filed on March 18, 2019, the entire contents of which are incorporated herein by reference. Technical Field

[0003] The present disclosure relates to a bonding apparatus, and more particularly, to an apparatus for bonding substrates and a method of bonding substrates using the apparatus. Background Art

[0004] Various display devices used in multimedia devices such as televisions, portable phones, tablet computers, navigation systems, and game consoles have been developed. For example, the display device may include an organic light emitting display (OLED) device, a liquid crystal display (LCD) device, an electrophoretic display (ED) device, a surface conduction electron emission display (SED) device, and a vacuum fluorescent display (VFD) device.

[0005] In addition, the display device may include a display panel for displaying an image, an input sensing unit for sensing an external input, and a window. The display panel, the input sensing unit, and the window may be provided as separate components and may be coupled to each other through a bonding process therebetween. Summary of the invention

[0006] The present disclosure may provide a bonding apparatus capable of bonding two substrates using a roller member including an opening, and a method of bonding substrates using the bonding apparatus.

[0007] In an embodiment of the inventive concept, a bonding device includes a first stage, a second stage, and a roller member, wherein a first substrate is arranged on the first stage, a second substrate facing the first substrate is arranged on the second stage, and the roller member includes a roller portion and an air intake portion. The roller portion includes an inner hole extending in one direction and a plurality of openings connecting the inner hole with an external space and is configured to bond the first substrate with the second substrate. The air intake portion is connected to the roller portion and configured to suck air of the inner hole.

[0008] In an embodiment, the roller portion may include a supporting portion and a pressing portion, wherein the supporting portion has an inner hole defined therein, and the pressing portion is disposed on the supporting portion. Each of the openings may be a hole penetrating the supporting portion and the pressing portion.

[0009] In an embodiment, the support portion may include a first side surface and a second side surface, and an outer surface, wherein the first side surface and the second side surface expose the inner hole to the outside, and the outer surface defines an opening and connects the first side surface and the second side surface. The air inlet portion completely overlaps the inner hole exposed from the first side surface and is connected to the first side surface.

[0010] In an embodiment, the roller member may further include an aligning portion, wherein the aligning portion is connected to the second side surface and configured to rotate the supporting portion.

[0011] In an embodiment, the alignment portion may include a cover portion and a stem portion, wherein the cover portion completely overlaps the inner hole and is connected to the second side surface, and the stem portion is connected to the cover portion.

[0012] In an embodiment, the pressing portion may be arranged on the entire portion of the outer surface.

[0013] In an embodiment, the support portion may be formed of metal, and the pressing portion may be formed of polyurethane.

[0014] In an embodiment, when viewed in a cross-sectional view of the roller portion, a thickness of the support portion may be greater than a thickness of the pressing portion.

[0015] In an embodiment, the opening may include a first opening and a second opening that do not overlap each other in the length direction of the roller member. When viewed in a cross-sectional view of the roller portion, the support portion may have a shape in which the first and second portions are spaced apart from each other by the first opening and the second opening.

[0016] In an embodiment, the opening may include a first opening and a second opening. The first opening may not overlap with the second opening in a length direction of the roller member.

[0017] In an embodiment, the first openings may overlap with the second openings in a thickness direction of the roller member, respectively.

[0018] In an embodiment, the openings may be spaced apart from each other and may be aligned in one direction.

[0019] In an embodiment of the present inventive concept, a method for bonding substrates includes: adsorbing one end of a first substrate arranged on a first stage onto a roller member through an opening included in the roller member; aligning one end of the first substrate with one end of a second substrate arranged on a second stage; contacting one end of the first substrate adsorbed on the roller member with one end of the second substrate; and rolling the roller member in one direction while pressing the first substrate by the roller member.

[0020] In an embodiment, the method may further include: before adsorbing the one end portion of the first substrate onto the roller member, aligning the opening with the one end portion of the first substrate so that the opening faces the one end portion of the first substrate.

[0021] In an embodiment, the roller member may be rotated by an aligning portion connected to an end portion of the roller member so that the opening is aligned with the one end portion of the first substrate.

[0022] In an embodiment, the roller member may include an inner hole connected to the external space through the opening.

[0023] In an embodiment, the air inlet may be connected to one end portion of the roller member, and the one end portion of the first substrate may be adsorbed on the roller member through the opening by a suction operation of the air inlet.

[0024] In an embodiment, the alignment of the one end portion of the first substrate with the one end portion of the second substrate may be performed in a gettering operation of the gas intake portion.

[0025] In an embodiment, the suction operation of the gas inlet may be stopped after one end portion of the first substrate contacts one end portion of the second substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The accompanying drawings are included to provide a further understanding of the inventive concept and are incorporated in and constitute a part of this specification. The accompanying drawings illustrate exemplary embodiments of the inventive concept and together with the description serve to explain the principles of the inventive concept. In the drawings:

[0027] Figure 1 is a perspective view showing a display device manufactured using a bonding apparatus according to an embodiment of the present inventive concept;

[0028] Figure 2 is an exploded perspective view showing a bonding device according to an embodiment of the present inventive concept;

[0029] Figure 3A is a perspective view showing a roller member according to an embodiment of the present invention;

[0030] Figure 3B is a perspective view showing a portion of a roller member according to an embodiment of the present inventive concept;

[0031] Figure 3C is a perspective view showing another part of the roller member according to the embodiment of the present inventive concept;

[0032] Figure 4A It is along Figure 3A A cross-sectional view of a roller member according to an embodiment of the present inventive concept is taken along line II' to illustrate the roller member;

[0033] Figure 4B is along Figure 3A A cross-sectional view of a roller member according to another embodiment of the present invention is shown along line II';

[0034] Figure 5 is a flow chart showing a method of bonding substrates according to an embodiment of the present inventive concept;

[0035] Figure 6 is a cross-sectional view showing a first substrate arranged on a first stage; and

[0036] 7A to 7E 2 is a cross-sectional view showing a method of bonding substrates according to an embodiment of the present inventive concept. DETAILED DESCRIPTION

[0037] Now, the inventive concept will be described more completely below with reference to the accompanying drawings showing various embodiments. However, the inventive concept can be implemented in many different forms and should not be interpreted as being limited to the embodiments set forth herein. On the contrary, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the inventive concept to those skilled in the art. Throughout the specification, the same reference numerals indicate the same elements.

[0038] It should be understood that when an element such as a layer, region, or substrate is referred to as being "on" another element, the element can be directly on the other element or there can be intervening elements. In contrast, the term "directly" means there are no intervening elements. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0039] The terms used herein are for the purpose of describing specific embodiments only and are not intended to be limiting. Unless the content clearly states otherwise, the singular forms "a", "an" and "the" as used herein are also intended to include plural forms, and include "at least one". "Or" means "and / or". As used herein, the term "and / or" includes any and all combinations of one or more of the relevant listed items. It should also be understood that when the terms "comprise" and / or "comprising" or "include" and / or "including" are used in this specification, the presence of the stated features, regions, integers, steps, operations, elements and / or parts is indicated, but the presence or addition of one or more other features, regions, integers, steps, operations, elements, parts and / or clusters thereof is not excluded.

[0040] Spatially relative terms such as "beneath", "below", "lower", "above", "upper", etc. may be used herein for convenience of description to describe the relationship of one element or feature to another element or feature as shown in the figures. It should be understood that the spatially relative terms are intended to include different orientations of the device in use or operation, in addition to the orientation shown in the drawings. For example, if the device in the figure is turned over, the elements described as being "below" or "beneath" other elements or features will then be oriented to be above the other elements or features. Therefore, the exemplary term "below" can include both the orientations of above and below. The device can be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein are interpreted accordingly.

[0041] It should be understood that although the words first, second, etc. can be used in this article to describe various elements, components, regions, layers and / or parts, these elements, components, regions, layers and / or parts should not be limited by these words. These words are only used to distinguish one element, component, region, layer or part from another region, layer or part. Therefore, the first element, component, region, layer or part discussed below can be referred to as the second element, component, region, layer or part without departing from the teachings herein.

[0042] As used herein, "about" or "approximately" includes the stated value and mean within an acceptable range of deviation for the particular value as determined by one of ordinary skill in the art, taking into account the measurements and errors associated with measurement of the particular quantity (i.e., the limitations of the measurement system).

[0043] Exemplary embodiments are described herein with reference to cross-sectional views and / or plan views as idealized exemplary illustrations. In the accompanying drawings, the sizes of layers and regions are exaggerated for clarity. Accordingly, variations in the shapes of the illustrations caused by, for example, manufacturing techniques and / or tolerances are foreseeable. Therefore, the exemplary embodiments should not be interpreted as being limited to the regional shapes shown herein, but rather include deviations in shape caused by, for example, manufacturing. For example, an etched region shown as a rectangle will typically have rounded or curved features. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to limit the actual shapes of the regions, and are not intended to limit the scope of the exemplary embodiments.

[0044] Hereinafter, exemplary embodiments of the inventive concept will be described in detail with reference to the accompanying drawings.

[0045] Figure 1is a perspective view showing a display device manufactured using a bonding apparatus according to an embodiment of the inventive concept.

[0046] Reference Figure 1 , as an example, a display device DD manufactured using a bonding device according to an embodiment of the inventive concept is shown. The display device DD may display an image IM through a display surface DD-IS. A time display frame and application icons are shown as examples of images. The display surface DD-IS may include a display area DD-DA in which the image IM is displayed and a non-display area DD-NDA adjacent to the display area DD-DA. No image may be displayed in the non-display area DD-NDA.

[0047] The display surface DD-IS may have a shape extending in a first direction DR1 and a second direction DR2 intersecting the first direction DR1. The normal direction of the display surface DD-IS (i.e., the thickness direction of the display device DD) may be indicated by a third direction DR3. The expression "when viewed in a plan view" or "in a plan view" used herein may mean the expression "when viewed in the third direction DR3". Hereinafter, the front surface (or top surface) and the rear surface (or bottom surface) of each of the layers or units may be defined by the third direction DR3. However, the directions indicated by the first direction DR1, the second direction DR2, and the third direction DR3 may be relative concepts and may be changed to other directions (e.g., opposite directions).

[0048] In this embodiment, a display device DD applicable to a mobile phone is shown as an example. Even if not shown in the drawings, the electronic module, camera module, and power module mounted on the main board may be placed in a bracket and / or a housing together with the display device DD to constitute a mobile phone. The display device DD to which the inventive concept relates may be applied to large electronic devices (e.g., televisions and monitors) and small and medium-sized electronic devices (e.g., tablet computers, car navigation units, game consoles, and smart watches).

[0049] Figure 2 1 is an exploded perspective view showing a bonding device according to an embodiment of the present inventive concept. Figure 3A It is a perspective view showing a roller member according to an embodiment of the concept of the present invention. Figure 3B It is a perspective view showing a part of a roller member according to an embodiment of the concept of the present invention. Figure 3C It is a perspective view showing another part of the roller member according to the embodiment of the present inventive concept.

[0050] Reference Figure 2 The bonding device BD may include a first stage ST1, a second stage ST2 and a roller member RT. The bonding device BD may bond Figure 1In some embodiments, the two components may be a first substrate P1 disposed on a first stage ST1 and a second substrate P2 disposed on a second stage ST2.

[0051] For example, the first substrate P1 and the second substrate P2 may be a display panel for displaying an image and an input sensing unit for sensing an external input, respectively. For another example, each of the first substrate P1 and the second substrate P2 may be a display substrate included in the display panel. In some embodiments, one of the first substrate P1 and the second substrate P2 may be a window. In this embodiment, the bonding device BD may be used to bond two components included in the display device DD. However, the embodiments of the inventive concept are not limited thereto. In some embodiments, the bonding device BD may be used to bond two substrates of various devices.

[0052] Each of the first stage ST1 and the second stage ST2 may have a shape extending in a first direction DR1 and a second direction DR2 intersecting the first direction DR1. The first stage ST1 may have a shape for supporting a partial area of ​​the first substrate P1, and the second stage ST2 may have a shape for supporting an entire area of ​​the second substrate P2. In addition, the first stage ST1 and the second stage ST2 may have a thickness greater than that of the first substrate P1 and the second substrate P2, respectively, and may support the first substrate P1 and the second substrate P2, respectively.

[0053] The roller member RT may include a roller portion RD, an air inlet portion VD, an alignment portion AD, a first fixing portion FD1, and a second fixing portion FD2. The roller member RT may roll in the second direction DR2 while pressing one of the first substrate P1 and the second substrate P2. In the present embodiment, the roller member RT may press the first substrate P1 from the first substrate P1 toward the second substrate P2 in the third direction DR3. In addition, the roller member RT may roll in the second direction DR2.

[0054] according to Figure 2 The first substrate P1 disposed on the first stage ST1 may include a first portion P1a overlapping the first stage ST1 in the third direction DR3 and a second portion P1b not overlapping the first stage ST1 in the third direction DR3. The second portion P1b of the first substrate P1 pressed by the roller member RT may not overlap the first stage ST1.

[0055] Reference Figure 3A, the roller portion RD may have a shape extending in the first direction DR1, and may have a circular shape when viewed in a cross-sectional view. The wording "cross-sectional view" may mean a cross-sectional view of the roller portion RD taken along the thickness direction (i.e., the third direction DR3) of the roller portion RD. The above-mentioned operation of the roller member RT rolling in the second direction DR2 during pressing the first substrate P1 may be substantially performed by the roller portion RD. In other words, the first substrate P1 and the second substrate P2 may be joined to each other by the pressing motion and the rolling motion of the roller portion RD.

[0056] The roller portion RD may include an outer surface RD-O, a first side surface SS1, and a second side surface SS2. The outer surface RD-O may be disposed between the first side surface SS1 and the second side surface SS2. In some embodiments, the roller portion RD may include an inner hole HO, and the inner hole HO may define an inner space of the roller portion RD. The inner hole HO may extend in the first direction DR1 and may correspond to the length of the roller portion RD.

[0057] Each of the first and second side surfaces SS1 and SS2 may expose the inner hole HO to the outside. The inner hole HO exposed through the first and second side surfaces SS1 and SS2 may be located at the center of the first and second side surfaces SS1 and SS2.

[0058] According to an embodiment of the inventive concept, the roller portion RD may include a plurality of openings OP arranged in the first direction DR1 and spaced apart from each other. Each of the openings OP may have a shape extending in the third direction DR3, and may connect the inner hole HO to the external space. In the present embodiment, the opening OP defined at the outer surface RD-O of the roller portion RD has a circular shape. However, embodiments of the inventive concept are not limited thereto. The shape of the opening OP may be variously modified.

[0059] At the same time, in the joint Figure 2 Before the process of aligning the first substrate P1 and the second substrate P2, a process of aligning one end of the first substrate P1 with one end of the second substrate P2 may be performed. However, if one end of the first substrate P1 is not parallel to a plane defined by the first direction DR1 and the second direction DR2, it may be difficult to align one end of the first substrate P1 with one end of the second substrate P2. For example, if the second portion P1b of the first substrate P1 is bent from the first portion P1a of the first substrate P1, it may be difficult to align one end of the first substrate P1 with one end of the second substrate P2.

[0060] According to an embodiment of the inventive concept, one end of the first substrate P1 may be controlled by the opening OP of the roller portion RD to be parallel to a plane defined by the first and second directions DR1 and DR2. Hereinafter, the plane defined by the first and second directions DR1 and DR2 is defined as an alignment plane.

[0061] In detail, air intake (or air suction) may be performed through the opening OP of the roller portion RD, and thus, one end portion of the first substrate P1 may be adsorbed on the roller portion RD. Air intake of the opening OP may be performed through air intake (or air suction) of an inner hole HO included in the roller portion RD. The second portion P1b of the first substrate P1 may be adsorbed through the opening OP, and thus, the second portion P1b of the first substrate P1 may be parallel to the alignment plane. As a result, one end portion of the first substrate P1 may be easily aligned with one end portion of the second substrate P2. The roller portion RD will be described in more detail later.

[0062] Reference Figure 3B , the air intake portion VD may be connected to the first side surface SS1 of the roller portion RD. The air intake portion VD may completely overlap the inner hole HO exposed through the first side surface SS1. In other words, the air intake portion VD may completely cover the inner hole HO and may be connected to the first side surface SS1. The air intake (or air suction) of the above-mentioned opening OP may be performed by the air intake portion VD. For example, the air intake portion VD may be controlled using electrical energy so that the air pressure of the air intake portion VD is lower than the air pressure of the inner hole HO. As a result, when the air intake portion VD is operated, the air of the inner hole HO may be sucked into the air intake portion VD. Hereinafter, the operation performed by the air intake portion VD may be defined as an air suction operation.

[0063] Reference Figure 3C , the alignment portion AD may be connected to the second side surface SS2 of the roll portion RD. The alignment portion AD may completely overlap the inner hole HO exposed through the second side surface SS2, and may be connected to the second side surface SS2.

[0064] The alignment portion AD may include a cover portion PN directly connected to the second side surface SS2 and a rod portion CN connected to the cover portion PN. The cover portion PN may completely cover the inner hole HO and may be connected to the second side surface SS2. The rod portion CN may overlap a portion of the inner hole HO and may be connected to a portion of the cover portion PN. The roller portion RD may roll or rotate by movement of the rod portion CN.

[0065] Refer again Figure 2 , the first fixing portion FD1 may be coupled to one end portion of the roller portion RD. The first fixing portion FD1 may include a first coupling hole FOP1, and one end portion of the roller portion RD may be inserted into the first coupling hole FOP1.

[0066] The second fixing portion FD2 may be coupled to the other end portion of the roller portion RD. The second fixing portion FD2 may include a second coupling hole FOP2, and the other end portion of the roller portion RD may be inserted into the second coupling hole FOP2.

[0067] Even though not shown in the drawings, the first fixing portion FD1 and the second fixing portion FD2 and the first stage ST1 may be coupled to the main stage. For example, the first fixing portion FD1 and the second fixing portion FD2 may be tiltable or movable in the second direction DR2 on the main stage. Therefore, the roller portion RD coupled to the first fixing portion FD1 and the second fixing portion FD2 may also be tiltable or movable in the second direction DR2.

[0068] Figure 4A It is along Figure 3A A cross-sectional view of a roller member according to an embodiment of the present inventive concept is shown taken along line II'. Figure 4B is along Figure 3A A cross-sectional view of a roller member according to another embodiment of the present inventive concept is shown taken along line II'.

[0069] exist Figure 4A and Figure 4B The roller portion RD and the roller portion RDa are shown in FIG. Figure 3A The opening OP.

[0070] Reference Figure 4A , the roller portion RD may include a supporting portion H1 and a pressing portion A1. The supporting portion H1 may include an inner hole HO. The supporting portion H1 may include a first side surface, a second side surface, and an outer surface arranged between the first side surface and the second side surface. The first side surface SS1 and the second side surface SS2 of the roller portion RD described above may correspond to the first side surface and the second side surface of the supporting portion H1, respectively. In other words, the air intake portion VD may be connected to the first side surface of the supporting portion H1, and the alignment portion AD may be connected to the second side surface of the supporting portion H1. For example, the supporting portion H1 may be formed of a rigid material such as metal.

[0071] The pressing portion A1 may be arranged on the supporting portion H1. The pressing portion A1 may cover the entire outer surface of the supporting portion H1. In some embodiments, the opening OP may be a hole penetrating the supporting portion H1 and the pressing portion A1, and the inner hole HO may be connected to the external space through the opening OP. In some embodiments, the thickness of the pressing portion A1 may be less than the thickness of the supporting portion H1, and the pressing portion A1 may be formed of, for example, polyurethane.

[0072] For example, when referring to Figure 3B When the air intake portion VD described above performs an air intake operation, the air of the inner hole HO may be sucked into the air intake portion VD. In this case, the air of the external space may also be sucked through the opening OP and the inner hole HO. In other words, the air of the external space may be sucked through the opening OP, and the air sucked through the opening OP may be sucked into the air intake portion VD through the inner hole HO.

[0073] For example, when the intake portion VD is in the suction operation Figure 2 When one of the first substrate P1 and the second substrate P2 is adjacent to the opening OP, the one substrate may be adsorbed onto the outer surface RD-O of the roller portion RD.

[0074] Reference Figure 4B , showing a roller portion RDa according to another embodiment of the inventive concept. The opening OP may include a plurality of first openings OP1 arranged in the first direction DR1 and a plurality of second openings OP2 arranged in the first direction DR1. The first opening OP1 may not overlap with the second opening OP2 in the length direction of the roller portion RDa (ie, the first direction DR1).

[0075] According to an embodiment of the present inventive concept, the first opening OP1 may overlap the second opening OP2 in the thickness direction (i.e., the third direction DR3) of the roller portion RDa, respectively. The inner hole HO may be connected to the external space through the first opening OP1 and the second opening OP2. In addition, during the suction operation of the air intake portion VD, foreign objects may be adsorbed onto the roller portion RDa through the first opening OP1 and the second opening OP2.

[0076] In the above-described embodiment, the first opening OP1 may overlap with the second opening OP2 in the third direction DR3. However, embodiments of the inventive concept are not limited thereto. In some embodiments, the first opening OP1 may not overlap with the second opening OP2 in the third direction DR3, and / or the number of openings OP that do not overlap with each other in the first direction DR1 may be variously changed.

[0077] In addition, according to Figure 4B When viewed in a cross-sectional view of the roller portion RDa, the support portion H1 may have a shape in which the first portion H1a and the second portion H1b are spaced apart from each other by the first opening OP1 and the second opening OP2. When viewed in a cross-sectional view of the roller portion RDa, the pressing portion A1z may have a shape in which the first portion A1a and the second portion A1b are spaced apart from each other by the first opening OP1 and the second opening OP2.

[0078] Figure 5 is a flowchart illustrating a method of bonding substrates according to an embodiment of the present inventive concept. Figure 6 is a cross-sectional view showing a first substrate arranged on a first stage. 7A to 7E 2 is a cross-sectional view showing a method of bonding substrates according to an embodiment of the present inventive concept.

[0079] Figure 5 Shown is a reference Figure 2 The operation of the bonding device BD is described. As described above, Figure 2The first substrate P1 and the second substrate P2 may be bonded to each other by a roller member RT. Even though not shown in the drawings, an adhesive member may be disposed between the first substrate P1 and the second substrate P2. Before bonding the first substrate P1 to the second substrate P2, the adhesive member may be disposed on one of the first substrate P1 and the second substrate P2.

[0080] At the same time, according to Figure 6 , a first portion P1a of the first substrate P1 disposed on the first stage ST1 may be fixed by the first stage ST1 and thus may be parallel to the alignment plane. However, a second portion P1b of the first substrate P1 not overlapping the first stage ST1 may be bent from the first portion P1a and thus may not be parallel to the alignment plane. If one end portion of the first substrate P1 and one end portion of the second substrate P2 are not aligned with each other, the bonding reliability between the substrates may be deteriorated.

[0081] According to an embodiment of the inventive concept, the roller member RT may control the second portion P1b of the first substrate P1 so that the second portion P1b is parallel to the alignment plane.

[0082] like Figure 5 As shown in , the opening OP included in the roller portion RD may be aligned with the one end portion P1-E of the first substrate P1 disposed on the first stage ST1 so that the opening OP faces the one end portion P1-E of the first substrate P1 (S110). The one end portion P1-E of the first substrate P1 may correspond to the one end portion of the second portion P1b and may be the end portion of the first substrate P1. The one end portion P2-E of the second substrate P2 may be the end portion of the second substrate P2 adjacent to the one end portion P1-E of the first substrate P1.

[0083] For details, refer to Fig. 7A and Figure 7B The roller portion RD can be rotated so that the opening OP of the roller portion RD faces the end portion P1-E of the first substrate P1. Figure 3C For example, the roller portion RD can be rotated in the clockwise direction by a predetermined angle by rotating the rod portion CN of the alignment portion AD in the clockwise direction by a predetermined angle. As a result, Figure 7B As shown in FIG. 1 , the opening OP of the roller portion RD may be aligned in such a manner as to face the end portion P1 -E of the first substrate P1 .

[0084] exist Fig. 7A and Figure 7B It is shown in Figure 4A However, the embodiments of the present inventive concept are not limited thereto. In some embodiments, Figure 4B The roller portion RDa can be applied to a method of operating a bonding device. For example, Figure 4BThe roller portion RDa may include at least two or more openings that do not overlap each other in the length direction of the roller portion RDa. One of the two openings may be aligned with one end portion P1-E of the first substrate P1, thereby making it easier to align the opening with one end portion P1-E of the first substrate P1.

[0085] Thereafter, the end portion P1-E of the first substrate P1 may be adsorbed onto the roller portion RD through the opening OP (S120). Figure 3B For example, in the suction operation of the air inlet portion VD, the first substrate P1 may be sucked through the opening OP of the roller portion RD, and thus the second portion P1b of the first substrate P1 may be parallel to the alignment plane.

[0086] One end P1-E of the first substrate P1 may be aligned with one end P2-E of the second substrate P2 (S130). In particular, the alignment between the first substrate P1 and the second substrate P2 adsorbed on the roller portion RD may be performed during the suction operation of the air inlet portion VD. Since the one end P1-E of the first substrate P1 is adsorbed on the roller portion RD, the second portion P1b of the first substrate P1 may be maintained parallel to the alignment plane.

[0087] Subsequently, one end portion P1 -E of the first substrate P1 adsorbed through the opening OP may be brought into contact with one end portion P2 -E of the second substrate P2 ( S140 ). Fig.7D , the roller portion RD may move vertically and the first substrate P1 may be tilted at a predetermined angle az, so that one end P1-E of the first substrate P1 may be bonded to one end P2-E of the second substrate P2. At this time, the suction operation of the air intake portion VD may be continuously maintained. In addition, the first stage ST1 may also be tilted relative to the alignment plane based on the movement of the roller portion RD, but the second stage ST2 may remain parallel to the alignment plane.

[0088] Next, the roller portion RD may be rolled in the second direction DR2 while the first substrate P1 is pressed (S150). Fig.7D and Fig. 7E , the first substrate P1 may be pressed by the pressing portion A1 of the roller portion RD in a direction toward the second substrate P2. In addition, since the roller portion RD rolls in the second direction DR2, the first substrate P1 may be integrally joined to the second substrate P2. The first substrate P1 may be separated from the first stage ST1 and may be disposed on the second substrate P2.

[0089] In addition, according to the concept of the present invention, the suction operation of the roller portion RD can be stopped during the pressing motion and the rolling motion of the roller portion RD. In other words, after the end portion P1-E of the first substrate P1 contacts the end portion P2-E of the second substrate P2 through the opening OP, the operation of the air intake portion VD can be stopped.

[0090] According to an embodiment of the inventive concept, one end of the first substrate of the two substrates may be adsorbed on the roller member through an opening included in the roller member. In a state where the first substrate is adsorbed on the roller member, the first substrate and the second substrate may be aligned with each other.

[0091] Therefore, before bonding the first substrate and the second substrate, a process of aligning the first substrate with the second substrate can be easily performed.

[0092] Although the inventive concept has been described with reference to exemplary embodiments, it is apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the inventive concept. Therefore, it should be understood that the above embodiments are not limiting but illustrative. Therefore, the scope of the inventive concept is determined by the broadest permissible interpretation of the appended claims and their equivalents, and should not be restricted or limited by the foregoing description.

Claims

1. A bonding device comprising: a first stage, wherein a first substrate is arranged on the first stage; a second stage on which a second substrate facing the first substrate is arranged; as well as a roller member including a roller portion and an air intake portion, wherein the roller portion includes an inner hole extending in one direction and a plurality of openings connecting the inner hole with an external space and configured to join the first substrate and the second substrate, and the air intake portion is connected to the roller portion and configured to suck air from the inner hole, Wherein, the first substrate comprises: a first portion, the first portion overlapping the first stage; and a second portion, the second portion not overlapping the first portion, wherein the first portion is planar, the second portion is bent from the first portion, and wherein the second portion is adsorbed onto the roller portion and aligned with the first portion in a plane, Wherein, the roller portion comprises: a support portion having the inner hole defined therein; and a pressing portion, the pressing portion being arranged on the supporting portion, and wherein each of the openings is a hole penetrating the support portion and the pressing portion, and Wherein, the support portion comprises: a first side surface and a second side surface, the first side surface and the second side surface exposing the inner hole to the outside; and an outer surface defining the opening therein and connecting the first side surface and the second side surface, and The air inlet portion completely overlaps with the inner hole exposed from the first side surface and is connected to the first side surface.

2. The bonding device according to claim 1, wherein: The roller member further comprises: An aligning portion is connected to the second side surface and is configured to rotate the supporting portion.

3. The bonding device according to claim 2, wherein: The alignment unit comprises: a cover portion that completely overlaps the inner hole and is connected to the second side surface; and A rod portion is connected to the cover portion.

4. The bonding apparatus according to claim 1, wherein: The pressing portion is arranged over the entire portion of the outer surface.

5. The bonding apparatus according to claim 1, wherein: The support portion is formed of metal, and the pressing portion is formed of polyurethane.

6. The bonding apparatus according to claim 1, wherein: When viewed in a cross-sectional view of the roller portion, the support portion has a thickness greater than a thickness of the pressing portion.

7. The bonding apparatus according to claim 1, wherein: The openings include a first opening and a second opening that do not overlap each other in the length direction of the roller member, and When viewed in a cross-sectional view of the roller portion, the support portion has a shape in which a first portion and a second portion are separated from each other by the first opening and the second opening.

8. The bonding apparatus according to claim 1, wherein: The opening includes a first opening and a second opening, and The first opening does not overlap with the second opening in the length direction of the roller member.

9. The bonding apparatus according to claim 8, wherein: The first openings overlap the second openings in the thickness direction of the roller member, respectively.

10. The bonding apparatus according to claim 1, wherein: The openings are spaced apart from each other and are aligned in the one direction.

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