Coating fixture and coating device

Abstract

The present invention relates to a coating jig and a coating device. The coating jig includes a frame, the frame has four sides, the sides include: a side body, a protrusion extending from the side body into the frame, each of the side bodies encloses a diaphragm space on one side of the protrusion, each of the protrusions is used to receive the diaphragm in the diaphragm space; the side body forms a first inclined surface on one side facing the diaphragm space, when the diaphragm is placed on each of the protrusions, a gap is formed between the edge of the diaphragm and the first inclined surface of the side body. When the diaphragm is placed on the four protrusions, a gap is formed between the edge of the diaphragm and the first inclined surface. When coating, the gap between the edge of the diaphragm and the first inclined surface facilitates vacuum coating, improves the coating rate of the edge of the diaphragm, and further improves the overall coating quality of the diaphragm.

Description

Technical Field

[0001] The invention relates to the field of film coating processing, and in particular to a film coating fixture and a film coating device. Background Art

[0002] With the development of economy and the progress of society, energy conservation has become inevitable and a social consensus. CVD and PVD, loading and unloading have become automated. While meeting the requirements of automated loading and unloading, it is also necessary to consider increasing the coating efficiency of the machine and enhancing the quality of the product. The coating jig in the prior art generally has a groove on the jig for placing CVD or PVD sheets. The diaphragm is inserted into the groove for coating. However, during the coating process, the edge of the diaphragm is generally close to the groove of the jig, which will result in a lower coating rate at the edge of the diaphragm. The different coating rates in the middle and edges of the diaphragm will reduce the overall coating quality of the diaphragm. Summary of the invention

[0003] Based on this, it is necessary to provide a coating fixture to address the above problems, so as to increase the coating rate at the edge of the diaphragm and thus improve the overall coating quality.

[0004] A coating jig comprises a frame, the frame having four sides, the sides comprising: a side body, a protrusion extending from the side body into the frame, each of the side bodies enclosing a diaphragm space on one side of the protrusion, each of the protrusions being used to receive the diaphragm in the diaphragm space; a first inclined surface is formed on the side of the side body facing the diaphragm space, and when the diaphragm is placed on each of the protrusions, a gap is formed between the edge of the diaphragm and the first inclined surface of the side body.

[0005] In the above-mentioned coating jig, when the diaphragm is placed on the four protrusions, a gap is formed between the edge of the diaphragm and the first inclined surface. When coating is performed, the gap between the edge of the diaphragm and the first inclined surface facilitates vacuum coating, thereby improving the coating rate of the edge of the diaphragm and thereby improving the overall coating quality of the diaphragm.

[0006] In one embodiment, the frame is rectangular or square, and the first inclined surface on each of the side bodies forms an inverted trapezoidal boss.

[0007] In one embodiment, each of the side bodies is provided with a positioning portion on the first inclined surface, and when the diaphragm is placed on each of the protrusions, it is located between the positioning points. Due to the setting of the first inclined surface, it may be difficult to position the diaphragm when feeding. In order to solve the above problem, each of the side bodies in this embodiment is provided with a positioning portion on the first inclined surface, and the positioning portion is used to limit the diaphragm. By setting the positioning portions on the four side bodies, the four edges of the diaphragm can be positioned, achieving the effect of convenient positioning and stable positioning.

[0008] In one embodiment, two positioning parts are provided on each of the side bodies, and the side bodies are divided into three equal-length side segments by the two positioning parts. When the diaphragm is positioned by the positioning parts in the diaphragm space, each edge is limited by two positioning parts respectively, and the limiting is more stable. At the same time, the edge of the diaphragm may abut against the positioning parts during limiting. The contact between the edge and multiple positioning parts can disperse the force on the edge of the diaphragm, thereby better protecting the diaphragm.

[0009] In one embodiment, a side surface of the protrusion for receiving the membrane is a receiving surface, and the side body further includes: a platform surface connected to the first inclined surface, the platform surface is parallel to the receiving surface of any protrusion, and the first inclined surface is located between the receiving surface and the platform surface.

[0010] In one embodiment, one end of the first inclined surface close to the receiving surface is connected to the receiving surface.

[0011] In one embodiment, the side body further includes: a connecting surface provided at the bottom of the first inclined surface, two ends of the connecting surface are respectively connected to the first inclined surface and the receiving surface, and the first inclined surface is higher than the receiving surface.

[0012] In one embodiment, the supporting surface has a first edge connected to the first inclined surface and a second edge opposite to the first edge. The positioning portion is arranged on the first inclined surface. The positioning portion has a limiting surface on a side facing the protrusion, and the limiting surface is aligned with the second edge.

[0013] In one embodiment, the protrusion has a vertical surface on a side facing the inside of the frame, and an angle between the first inclined surface and the vertical surface of the protrusion is between 30° and 70°.

[0014] In one embodiment, a second inclined surface is formed on one side of the side body facing the diaphragm space, the first inclined surface and the second inclined surface are respectively located on both sides of the protrusion, and the first inclined surface and the second inclined surface are close to each other toward the protrusion. When the coating jig is placed horizontally, each second protrusion forms a trapezoidal boss, which increases the coating space on the back of the diaphragm and improves the coating rate of the edge of the back of the diaphragm that contacts the protrusion.

[0015] The present invention also discloses a coating device, comprising: a coating platform and a plurality of coating jigs as described in any one of claims 1 to 8, wherein a plurality of coating tanks are provided on the coating platform, and each of the coating jigs is respectively arranged in the coating tank.

[0016] The above-mentioned coating device can be arranged under the manipulator, and the manipulator can sequentially load and remove materials from each coating fixture on the coating platform, and can also perform vacuum coating operations at the same time, thereby improving the quality of simultaneous coating of multiple membranes.

[0017] In one embodiment, each side body of the coating jig extends outward from the frame with reinforcing ribs, and when the coating jig is in the coating tank, the reinforcing ribs are placed on the coating platform. When placing the coating jig, the coating jig only needs to be placed directly on the coating tank, and the reinforcing ribs of the coating jig will automatically be placed on the coating platform to complete the placement of the coating jig. When the coating is completed and the coating jig is ready to be taken out, the coating jig can be lifted up by the reinforcing ribs and taken out of the coating tank, which is convenient and quick.

[0018] In one embodiment, a plurality of coating tanks are provided on the coating platform, and each of the coating jigs is installed in the coating tank respectively. Any two adjacent side bodies of the coating jig are connected to form a connecting angle, and the connecting angle has reinforcing ribs extending outside the frame. When the coating jig is located in the coating tank, the reinforcing ribs are erected on the coating platform.

[0019] In one embodiment, each of the coating jigs is integrally formed with the coating platform. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a front view of a coating fixture in one embodiment;

[0021] Figure 2 is an oblique view of a coating fixture in one embodiment;

[0022] Figure 3 In one embodiment Figure 1 Sectional view at AA in the middle;

[0023] Figure 4 In another embodiment Figure 1 Sectional view at AA in the middle;

[0024] Figure 5 It is a schematic diagram of the back structure of the coating fixture in the second embodiment;

[0025] Figure 6 It is a schematic structural diagram of a coating fixture in the third embodiment;

[0026] Figure 7 FIG. 4 is a schematic diagram of the structure of the coating device in the fourth embodiment.

[0027] Among them: 1. frame; 10. diaphragm space; 2. side; 3. side body; 31. first inclined surface; 32. platform surface; 33. second inclined surface; 34. connecting surface; 4. protrusion; 41. first edge; 42. second edge; 43. receiving surface; 44. vertical surface; 5. positioning part; 51. limiting surface; 6. chamfer; 7. strengthening rib; 8. connecting angle; 9. coating platform; 91. coating fixture. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods. It should be understood that the specific implementation methods described herein are only used to explain the present invention and do not limit the scope of protection of the present invention.

[0029] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation method.

[0030] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0031] The first embodiment of the present invention relates to a coating jig. The coating jig is provided in a rectangular or square frame 1. A PVD or CVD film is placed in the coating jig for coating operation.

[0032] Among them, Figure 1 As shown, the coating fixture includes a frame 1, the frame 1 has four side edges 2, the four side edges 2 are all straight edges, forming a square or rectangle, wherein the Figure 2 and Figure 3, the side 2 includes: a side body 3, a protrusion 4 extending from the side body 3 into the frame 1, and the diaphragm enters the four side bodies 3 during film coating and is received by each protrusion 4. The protrusion 4 is arranged in the middle of the side body 3, and the space surrounded by the four side bodies 3 is divided into two parts. One side of the four protrusions 4 is the diaphragm space 10, which is the upper side in this embodiment. The four side bodies 3 form a diaphragm space 10 on the upper side of the four protrusions 4. The diaphragm enters the diaphragm space 10 during operation, and each protrusion 4 receives the diaphragm to perform the film coating operation. In the scheme of the prior art, when the diaphragm is generally located in the diaphragm space 10, in order to limit the position of the diaphragm, the distance between the side body 3 and the diaphragm is too close, or even fits, which will cause the gap between the edge of the diaphragm and the side body 3 to be too small, and the coating will not change, so that the coating rate at the edge of the diaphragm is lower than the coating rate in the middle of the diaphragm, resulting in inconsistent coating rates, which affects the overall coating quality of the diaphragm.

[0033] The coating fixture in this embodiment, such as Figure 1 and Figure 2 As shown, a first inclined surface 31 is formed on one side of the side body 3 facing the diaphragm space 10. The first inclined surface 31 is located above the protrusion 4 and is inclined downward from the upper edge of the side body 3. The first inclined surfaces 31 of the four side bodies 3 form an inverted trapezoidal boss, and the four sides of the trapezoidal boss are inclined downward. The diaphragm is located in the diaphragm space 10, that is, when the diaphragm is placed on the four protrusions 4, a gap is formed between the edge of the diaphragm and the first inclined surface 31. When coating, the gap between the edge of the diaphragm and the first inclined surface 31 facilitates vacuum coating, improves the coating rate of the edge of the diaphragm, and thus improves the overall coating quality of the diaphragm.

[0034] Due to the setting of the first inclined surface 31, it may be difficult to position the diaphragm when feeding. To solve the above problem, each side body 3 in this embodiment is provided with a positioning portion 5 on the first inclined surface 31. The positioning portion 5 is used to limit the position of the diaphragm. By setting the positioning portions 5 on the four side bodies 3, the four edges of the diaphragm can be positioned to achieve the effect of convenient positioning and stable positioning. Figure 1 , Figure 2 and Figure 3 The upper surface of the protrusion 4 is a receiving surface 43. The side of the side body 3 above the protrusion 4 facing the inside of the frame 1 is: a first inclined surface 31 connected to the receiving surface 43 of the protrusion 4, a platform surface 32 connected to the first inclined surface 31, the platform surface 32 is connected to the top of the first inclined surface 31, and is parallel to any receiving surface 43 of the protrusion 4. The receiving surface 43 and the platform surface 32 are both horizontally arranged. The platform surface 32 is to make the top surface of the frame 1 horizontal, which is convenient for the coating process. The receiving surface 43 of the protrusion 4 has a first edge 41 close to the first inclined surface 31 and a second edge 42 away from the first edge 41. In one embodiment, as Figure 3As shown, the first inclined surface 31 is connected between the platform surface 32 and the receiving surface 43, that is, the top of the first inclined surface 31 is connected to the platform surface 32, and the bottom of the first inclined surface 31 is connected to the first edge 41 of the receiving surface. The positioning portion 5 is arranged on the first inclined surface 31, and the bottom end is located at the bottom of the first inclined surface 31. The side of the positioning portion 5 facing the inside of the frame 1 has a limiting surface 51, and the limiting surface 51 is connected to the first edge 41 of the receiving surface 43 of the protrusion 4. The bottom of the positioning portion 5 is connected to the receiving surface 43 to prevent the diaphragm from abutting against the lower side of the first inclined surface 31 during positioning, causing positioning deviation.

[0035] In another embodiment, Figure 4 As shown, the side body 3 also has: a connecting surface 34 arranged at the bottom of the first inclined surface 31, the top of the first inclined surface 31 is connected to the platform surface 32, the bottom end of the first inclined surface 31 is connected to the connecting surface 34, and the connecting surface 34 is connected to the first edge 41, that is, the connecting surface 34 connects the first edge 41 to the first inclined surface 31. The setting of the connecting surface 34 raises the height of the first inclined surface, so that the first inclined surface 31 is separated from the receiving surface 43, avoiding the situation that the edge of the diaphragm is easily overlapped on the first inclined surface 31 when the receiving surface 43 on the protrusion 4 is overlapped, reducing the overlap probability of the diaphragm on the first inclined surface 31, so that the diaphragm can be stably mounted on the receiving surface 43 of the protrusion 4.

[0036] The two ends of the positioning portion 5 are respectively connected to the top and bottom of the first inclined surface 31. The limiting surface 51 on the positioning portion 5 facing the inside of the frame 1 limits the position of the diaphragm by limiting the position of the edge of the diaphragm. When the diaphragm enters the diaphragm space 10, it is positioned by the positioning portions 5 on the four side edges 2. The diaphragm slides onto each protrusion 4 through the positioning portions 5, abuts against the receiving surface 43 of each protrusion 4, and is placed at the most central position of the frame 1. Among them, two positioning portions 5 are provided on the first inclined surface 31 of each side body 3, and the side body 3 is divided into three equal length side segments by the two positioning portions 5. When the diaphragm is positioned by the positioning portion 5 in the diaphragm space 10, each edge is limited by two positioning portions 5, and the limiting is more stable. At the same time, the edge of the diaphragm may abut against the positioning portion 5 during limiting. The contact between the edge and multiple positioning portions 5 can disperse the force on the edge of the diaphragm and better protect the diaphragm. Of course, other numbers of positioning parts 5, such as 3 or 4 or other numbers, may be provided on the first inclined surface 31 of each side body 3. The positioning parts 5 may be provided at equal intervals or at unequal intervals. In this embodiment, only two positioning parts 5 are used to divide the side body 3 at equal intervals as an example for illustration, without specific limitation. It is worth noting that the protrusion 4 has a vertical surface 44 on the side facing the inside of the frame 1. The angle between the first inclined surface 31 and the vertical surface 44 of the protrusion 4 is between 30° and 70°, and can be any angle between 30° and 70°. The angle within this range can better guide the diaphragm, and at the same time, a sufficiently large gap can be formed between the diaphragm to improve the coating rate of the edge of the diaphragm.

[0037] In addition, the top of the positioning portion 5 is located at the top of the first inclined surface 31 and is connected to the platform surface 32. The positioning portion 5 covers the first inclined surface 31, and the top of the positioning portion 5 is connected to the platform surface 32 to prevent the diaphragm from being placed on the positioning portion 5 during positioning, which may cause the diaphragm to be positioned incorrectly; the positioning portion 5 can be installed on the first inclined surface 31 by means of a fixing member or bonding, or it can be integrally formed with the first inclined surface 31. In this embodiment, the integral forming of the positioning portion 5 and the first inclined surface 31 is taken as an example, and no specific limitation is made. The integral forming of the positioning portion 5 and the first inclined surface 31 can better improve the stability of the position and limit of the positioning portion 5, facilitate processing, and eliminate the installation process.

[0038] It is also worth noting that among the four side edges 2, any two adjacent side edges 2 are connected to form a chamfer 6 at the connection, providing a coating space for the corners of the diaphragm. In the present embodiment, the chamfer 6 formed by the connection of the two side edges 2 also has a slope, so that a gap is formed between the corner of the diaphragm and the chamfer 6 of the frame 1. The gap can improve the coating rate of the corners of the diaphragm and avoid affecting the overall coating quality of the diaphragm due to the low coating rate of the corners of the diaphragm.

[0039] In addition, the diaphragm needs to be coated on the back side as well as the front side. The protrusion 4 is arranged in the middle of the side body 3, and the side body 3 is also at a certain distance from the lower side of the protrusion 4. In order to facilitate the coating process on the back side of the diaphragm, the side body 3 also has a second inclined surface 33 on the side facing the diaphragm space 10. The first inclined surface 31 and the second inclined surface 33 are respectively located on both sides of the protrusion 4, and the first inclined surface 31 and the second inclined surface 33 are close to each other toward the protrusion 4. When the coating jig is placed horizontally, each second protrusion 4 forms a trapezoidal boss, which increases the coating space on the back side of the diaphragm and improves the coating rate of the edge of the diaphragm that contacts the protrusion 4. The angle between the second inclined surface 33 and the vertical plane of the protrusion 4 is between 30° and 70°, and can be any angle between 30° and 70°. The angle within this range can form a sufficiently large gap with the diaphragm to improve the coating rate of the edge of the diaphragm.

[0040] The diaphragm fixture in this embodiment improves the coating rate at the edge and back of the diaphragm by setting the first bevel 31 and the second bevel 33, thereby improving the overall coating quality of the diaphragm; and solves the positioning problem caused by the gap between the bevel and the diaphragm by setting multiple positioning parts 5.

[0041] The second embodiment of the present invention discloses a coating device, which includes a coating platform and a plurality of coating jigs as in the first embodiment, the coating jigs are mounted on the coating platform, and in this embodiment, a plurality of coating tanks are provided on the coating platform, and each coating jig is disposed in each coating tank. The coating device can be disposed under a manipulator, and the manipulator can sequentially perform steps such as loading and unloading on each coating jig on the coating platform, and vacuum coating operations can also be performed simultaneously, thereby improving the overall coating quality of multiple diaphragms.

[0042] like Figure 2 and Figure 5 As shown, each side body 3 of the coating jig has a reinforcing rib 7 extending outward from the frame 1, and the reinforcing rib 7 is connected to the platform surface 32 of the side body 3 and is located at the top of the coating jig. The slot size of each coating slot is the same as the shape surrounded by the side body 3. When placing the coating jig, it is only necessary to place the coating jig directly on the coating slot, and the reinforcing rib 7 of the coating jig will automatically be placed on the coating platform to complete the placement of the coating jig. When the coating is completed and the coating jig is ready to be taken out, it is only necessary to lift the coating jig through the reinforcing rib 7 and take it out of the coating slot, which is convenient and quick.

[0043] The third embodiment of the present invention relates to a coating device, which is substantially the same as the coating device in the second embodiment, except that a reinforcing rib 7 extends from the side body 3 in the second embodiment, while in the third embodiment, Figure 6 As shown, any two adjacent side bodies 3 of the coating jig are connected to form a connection angle 8, and the connection angle 8 has a reinforcing rib 7 extending outside the frame. When the coating jig is located in the coating tank, the reinforcing rib 7 is placed on the coating platform. Compared with the coating device in the second embodiment in which the side body 3 extends the reinforcing rib 7 as a whole, the reinforcing rib 7 is only extended at the connection angle 8 in this embodiment, which can not only be stably arranged in the coating tank, but also save the material of the jig and reduce the processing cost of the jig.

[0044] A fourth embodiment of the present invention relates to a coating device, which includes a coating platform and a plurality of coating fixtures as in the first embodiment. Figure 7 As shown, the coating platform 9 and the coating fixture 91 are integrally formed, and there is no need for disassembly and assembly. The coating fixtures 91 on the coating platform 9 can be loaded and unloaded directly by the manipulator, and vacuum coating can also be performed at the same time, thereby improving the overall coating quality of multiple membranes.

[0045] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0046] The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A coating fixture, characterized in that: The invention comprises a frame, wherein the frame has four sides, wherein the sides include: a side body, a protrusion extending from the side body into the frame, each of the side bodies encloses a membrane space on one side of the protrusion, each of the protrusions is used to receive the membrane in the membrane space, and the protrusion has a vertical surface on a side facing the inside of the frame; A first inclined surface is formed on one side of the side body facing the diaphragm space, and an angle between the first inclined surface and the vertical surface of the protrusion is between 30° and 70°. The side body also includes a platform surface connected to the first inclined surface, and the platform surface is connected to the top of the first inclined surface. Each of the side bodies is provided with a positioning portion on the first inclined surface, and the positioning portion is integrally formed with the first inclined surface. The top of the positioning portion is located at the top of the first inclined surface, and the top of the positioning portion is connected to the platform surface. The positioning portion has a limiting surface on the side facing the protrusion. The diaphragm is positioned by the positioning portions on the four side bodies, and the diaphragm slides onto each of the protrusions through the limiting surface of the positioning portion. The diaphragm is abutted against the receiving surface of each of the protrusions. When the diaphragm is placed on each of the protrusions, a gap is formed between the edge of the diaphragm and the first inclined surface of the side body. Any two adjacent side edges are connected to form a chamfer at the connection, and the chamfer provides a coating space for the corners of the diaphragm.

2. The coating fixture according to claim 1, characterized in that: The frame is rectangular or square, and the first inclined surfaces on each of the side bodies form an inverted trapezoidal boss.

3. The coating fixture according to claim 1, characterized in that: When the diaphragm is placed on each of the protrusions, it is located between each of the positioning parts.

4. The coating fixture according to claim 3, characterized in that: A side surface of the protrusion for receiving the membrane is a receiving surface, the platform surface is parallel to the receiving surface of any protrusion, and the first inclined surface is located between the receiving surface and the platform surface.

5. The coating fixture according to claim 3, characterized in that: One end of the first inclined surface close to the receiving surface is connected to the receiving surface.

6. The coating fixture according to claim 3, characterized in that: The side body further includes: a connecting surface arranged at the bottom of the first inclined surface, two ends of the connecting surface are respectively connected to the first inclined surface and the receiving surface, and the first inclined surface is higher than the receiving surface.

7. The coating fixture according to claim 3, characterized in that: The receiving surface has a first edge connected to the first inclined surface and a second edge opposite to the first edge. The positioning portion is arranged on the first inclined surface. The positioning portion has a limiting surface on a side facing the protrusion, and the limiting surface is aligned with the second edge.

8. The coating fixture according to claim 1, characterized in that: A second inclined surface is formed on one side of the side body facing the diaphragm space, the first inclined surface and the second inclined surface are respectively located on both sides of the protrusion, and the first inclined surface and the second inclined surface are close to each other toward the protrusion.

9. A film coating device, characterized in that: include: A coating platform and a plurality of coating fixtures as described in any one of claims 1 to 7, each of the coating fixtures is installed on the coating platform.

10. The coating device according to claim 9, characterized in that: A plurality of coating tanks are provided on the coating platform, and each of the coating jigs is installed in the coating tank respectively. Each side body of the coating jig has a reinforcing rib extending out of the frame. When the coating jig is located in the coating tank, the reinforcing rib is arranged on the coating platform.

11. The coating device according to claim 9, characterized in that: A plurality of coating tanks are provided on the coating platform, and each of the coating jigs is installed in the coating tank respectively. Any two adjacent side bodies of the coating jig are connected to form a connecting angle, and the connecting angle has reinforcing ribs extending outside the frame. When the coating jig is located in the coating tank, the reinforcing ribs are erected on the coating platform.

12. The coating device according to claim 9, characterized in that: Each of the coating jigs is integrally formed with the coating platform.

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