A lifting and rotating device for auxiliary furnace chamber of single crystal furnace

Abstract

The present application relates to a field involving a single crystal furnace, in particular, a lifting and rotating device for a secondary furnace chamber of a single crystal furnace, which is arranged on one side of a main furnace chamber and connected to the secondary furnace chamber, and includes a support frame, a lifting mechanism, a rotating mechanism, and a connecting mechanism connected to the secondary furnace chamber, wherein the support frame is connected to a main furnace chamber frame, a main shaft is arranged on the support frame, the lifting mechanism is arranged on the support frame and is movably connected to the main shaft, the rotating mechanism is arranged on the top of the support frame and is connected to the main shaft, one end of the connecting mechanism is connected to the lifting mechanism, and the other end is connected to the rotating mechanism, and the connecting mechanism is arranged on the side of the main shaft and is fixedly connected to the main shaft. The present application has the effect of improving the stability of the operation of the single crystal furnace and ensuring that the single crystal furnace can operate safely and reliably for a long time during the production process.

Description

Technical Field

[0001] The present application relates to the field of single crystal furnaces, and in particular to a lifting and rotating device for an auxiliary furnace chamber of a single crystal furnace. Background Art

[0002] At present, the single crystal furnace is the equipment with the highest production capacity for producing solar-grade single crystal silicon rods. In order to further increase its production capacity, reduce production costs, and improve the production efficiency of single crystal silicon rods, many silicon rod manufacturers use a single furnace to add materials multiple times and pull single crystal silicon rods multiple times to increase production capacity. This requires that the auxiliary furnace chamber of the single crystal furnace be raised and unscrewed multiple times when preparing silicon rods to achieve multiple feeding.

[0003] At present, the auxiliary furnace chamber lifting device of the single crystal furnace equipment on the market is mostly driven by hydraulic pressure. This method is relatively expensive and not very convenient for subsequent maintenance. The rotating device is mostly driven by a wedge-shaped wheel. During the frequent rotation of the auxiliary chamber furnace, the wedge-shaped belt is prone to loosening and slipping. At the same time, the wedge-shaped belt is prone to fatigue and breakage after long-term use.

[0004] With respect to the above-mentioned related technologies, the inventors believe that there are defects such as unstable operation and low reliability of the lifting and rotating device of the auxiliary furnace chamber of the single crystal furnace. Summary of the invention

[0005] In order to improve the stability and reliability of a lifting and rotating device for an auxiliary furnace chamber of a single crystal furnace, the present application provides a lifting and rotating device for an auxiliary furnace chamber of a single crystal furnace.

[0006] The present application provides a lifting and rotating device for an auxiliary furnace chamber of a single crystal furnace, which adopts the following technical solution:

[0007] A lifting and rotating device for an auxiliary furnace chamber of a single crystal furnace is arranged on one side of a main furnace chamber and connected to the auxiliary furnace chamber, comprising a support frame, a lifting mechanism, a rotating mechanism and a connecting mechanism connected to the auxiliary furnace chamber, wherein the support frame is connected to a main furnace chamber frame, a main shaft is arranged on the support frame, the lifting mechanism is arranged on the support frame and movably connected to the main shaft, the rotating mechanism is arranged on the top of the support frame and connected to the main shaft, one end of the connecting mechanism is connected to the lifting mechanism, and the other end is connected to the rotating mechanism, and the connecting mechanism is arranged on the side of the main shaft and fixedly connected to the main shaft.

[0008] By adopting the above technical solution, the connecting mechanism is connected to the auxiliary furnace chamber. When the auxiliary furnace chamber needs to be opened, the lifting mechanism drives the connecting mechanism to rise, thereby driving the auxiliary furnace chamber to rise. After the connecting mechanism rises, the rotating mechanism starts, driving the connecting mechanism to rotate outward with the main axis as the axis and around the main axis, thereby driving the auxiliary furnace chamber to rotate outward, and the auxiliary furnace chamber of the single crystal furnace is opened; when the auxiliary furnace chamber needs to be closed, the rotating mechanism starts, driving the connecting mechanism to rotate inward, thereby driving the auxiliary furnace chamber to rotate inward, the auxiliary furnace chamber stops rotating inward, the lifting mechanism starts, driving the connecting mechanism to descend, thereby driving the auxiliary furnace chamber to descend, and the auxiliary furnace chamber is closed. The lifting mechanism, the rotating mechanism and the connecting mechanism can stably and flexibly complete the opening and closing of the auxiliary furnace chamber, thereby improving the reliability of the operation of the single crystal furnace.

[0009] Preferably, the frame includes a main column, the bottom of the main column is connected to the frame of the main furnace body, the main shaft is fixedly connected to the side of the main column, and a first supporting seat, a second supporting seat and a third supporting seat are arranged in sequence from bottom to top on the side of the main column opposite to the main shaft, one end of the main shaft passes through the first supporting seat, the second supporting seat and the third supporting seat in sequence from bottom to top, a slide rail is arranged on the main column, a rod is arranged on a side surface of the main column away from the main shaft, and a secondary furnace chamber inner rotation stroke limit switch is arranged on the end of the rod extending outward.

[0010] By adopting the above technical solution, the main shaft passes through the lifting mechanism, the rotating mechanism and the connecting mechanism, and the main shaft is fixedly connected to the support frame, so that the lifting mechanism, the rotating mechanism and the connecting mechanism are arranged on the main column, and the auxiliary furnace chamber inner rotation stroke limit switch arranged on the rod can limit the inward rotation position of the auxiliary furnace chamber. The lifting and rotation of the auxiliary furnace chamber are realized by the lifting mechanism, the rotating mechanism and the connecting mechanism, and the auxiliary furnace chamber inner rotation stroke limit switch makes the auxiliary furnace chamber automatically stop when it rotates to a position, ensuring that the rotation of the auxiliary furnace chamber does not deviate.

[0011] Preferably, the main column is provided with a secondary furnace chamber descending stroke limit switch and a secondary furnace chamber ascending stroke displacement limit switch, the secondary furnace chamber descending stroke limit switch is located below the secondary furnace chamber ascending stroke displacement limit switch, and the secondary furnace chamber ascending stroke displacement limit switch is located below the first supporting seat.

[0012] By adopting the above technical solution, when the lifting mechanism touches the auxiliary furnace chamber ascending stroke displacement limit switch during the ascending process, the lifting mechanism stops the ascending action, and when the lifting mechanism touches the auxiliary furnace chamber descending stroke limit switch during the descending process, the lifting mechanism stops the descending action. The auxiliary furnace chamber descending stroke limit switch and the auxiliary furnace chamber ascending stroke displacement limit switch cause the lifting mechanism to stop automatically, thereby ensuring that the lifting position of the auxiliary furnace chamber does not deviate.

[0013] Preferably, the lifting mechanism includes a first motor, a first worm gear reducer and a lead screw, the first worm gear reducer is fixedly connected to the main column, the first worm gear reducer is connected to the first motor, the lead screw is located at the top of the first worm gear reducer, and a first nut, a second nut and a support seat are sequentially mounted on the lead screw from bottom to top, the second nut is fixedly connected to the support seat, the second nut is longitudinally fixedly connected to the first nut, the end of the main shaft is inserted into the support seat and fixedly connected, one end of the lead screw passes through the first nut, the second nut and the support seat and extends into the main shaft, the support seat is slidably connected to the main column and is located between the auxiliary furnace chamber descending stroke limit switch and the auxiliary furnace chamber ascending stroke displacement limit switch, and the auxiliary furnace chamber descending stroke limit switch is located between the first nut and the first worm gear reducer.

[0014] By adopting the above technical solution, the lifting mechanism rises, the first motor is started, the first motor drives the first worm gear reducer to operate, the first worm gear reducer drives the lead screw connected thereto to operate, drives the first nut sleeved on the lead screw to move upward, causes the second nut to move upward and pushes the support seat, the support seat drives the main shaft to rise, thereby raising the auxiliary furnace chamber, when the support seat touches the auxiliary furnace chamber ascending stroke displacement limit switch, the first motor stops working; the lifting mechanism descends, the first motor is started, the first motor drives the first worm gear reducer to reversely operate, the first worm gear reducer drives the lead screw connected thereto to reversely operate, the support seat drives the main shaft to descend, thereby lowering the auxiliary furnace chamber, when the support seat touches the auxiliary furnace chamber descending stroke displacement limit switch, the first motor stops working, and the switch action of the auxiliary furnace chamber is completed. The automation of the lifting of the auxiliary furnace chamber is realized, and the operation is more flexible, stable, and the positioning is precise.

[0015] Preferably, a guide rail is provided on the main column, and the guide rail is located below the first supporting seat. A sliding groove for use with the guide rail is provided on the side of the supporting seat close to the main column, and the supporting seat is slidably connected to the guide rail.

[0016] By adopting the above technical solution, the support seat slides along the guide rail, so that the main shaft moves up and down on the main column. It has a simple structure and is easy to operate, making the up and down movement of the main shaft more stable.

[0017] Preferably, the connecting mechanism comprises a swing arm assembly and a connecting assembly, and the swing arm assembly is fixedly connected to at least one connecting assembly;

[0018] The swing arm assembly includes a first connecting column and a second connecting column, wherein the first connecting column is connected to the main shaft, and the first connecting column and the second connecting column are parallel to and connected to each other;

[0019] The connection assembly includes a connection block and at least one clamping block connected to the connection block, the connection block is connected to the auxiliary furnace chamber, the clamping block is floatingly connected to the connection block, and the clamping block is fixedly connected to the second connection column.

[0020] By adopting the above technical solution, the first connecting column of the swing arm assembly is connected to the main shaft, and the connecting block of the connecting assembly is connected to the auxiliary furnace chamber, so that the auxiliary furnace chamber is connected to the main shaft through the connecting mechanism, so that when the main shaft moves, the auxiliary furnace chamber will be driven to move. The connecting mechanism ensures the stability and safety of the operation of the auxiliary furnace chamber.

[0021] Preferably, the main shaft is sequentially mounted with a first connecting seat and a second connecting seat from bottom to top, the first connecting seat and the second connecting seat are respectively fixedly connected to the first connecting column, the first connecting seat is located above the first supporting seat, the second connecting seat is located above the second supporting seat, and a fixing sleeve is respectively provided at the bottom of the first connecting seat and the bottom of the second connecting seat.

[0022] By adopting the above technical solution, the arrangement of the first connecting seat and the second connecting seat increases the contact between the main shaft and the connecting mechanism, increases the stability of the operation of the auxiliary furnace chamber, and the fixing sleeve plays a supporting role on the first connecting seat and the second connecting seat.

[0023] Preferably, the rotating mechanism includes a second motor, a second worm gear reducer, a crank-connecting rod mechanism and a shift fork. The second worm gear reducer is located at the top of the main column, one end of the second worm gear reducer is connected to the second motor, and the other end is connected to the crank-connecting rod mechanism. The crank-connecting rod mechanism is movably connected to the shift fork, and the first connecting column is located between the two arms of the shift fork. A transition sleeve is provided below the shift fork, and the shift fork is mounted on the transition sleeve. The transition sleeve is located at the top of the third supporting seat, and one end of the main shaft extends upward and is inserted into the transition sleeve. A secondary furnace chamber outer rotation stroke limit switch is provided on the third supporting seat.

[0024] By adopting the above technical solution, the rotating mechanism rotates outward, the second motor starts, drives the second worm gear reducer to operate, the second worm gear reducer drives the crank connecting rod mechanism connected thereto to move, thereby driving the shift fork to rotate outward around the transition sleeve, the shift fork drives the connecting mechanism to rotate, and the auxiliary furnace chamber rotates outward. When the first connecting column touches the external rotation stroke limit switch of the auxiliary furnace chamber during rotation, the second motor stops working; the rotating mechanism rotates inward, the second motor starts, drives the second worm gear reducer to operate in the opposite direction, the second worm gear reducer drives the crank connecting rod mechanism connected thereto to move, thereby driving the shift fork to rotate inward around the transition sleeve, the shift fork drives the connecting mechanism to rotate, and the auxiliary furnace chamber rotates inward. When the first connecting column touches the internal rotation stroke limit switch of the auxiliary furnace chamber during rotation, the second motor stops working. The rotation of the auxiliary furnace chamber is automated, and the operation is more flexible, stable, and the positioning is precise.

[0025] Preferably, the rotating mechanism further includes a third worm gear reducer, and the third worm gear reducer is located between the second motor and the second worm gear reducer and is connected to each other.

[0026] By adopting the above technical solution and setting the third worm gear reducer, the transmission torque and speed ratio are increased, and the reliability of the single crystal furnace operation is improved.

[0027] In summary, the present application includes at least one of the following beneficial technical effects:

[0028] 1. The lifting mechanism, rotating mechanism and connecting mechanism in this application realize automatic operation, can flexibly complete the opening and closing of the auxiliary furnace chamber, improve the stability of the single crystal furnace operation, and ensure that the single crystal furnace can operate safely and reliably for a long time during the production process;

[0029] 2. The setting of the third worm gear reducer in this application increases the transmission torque and speed ratio, and improves the reliability of the single crystal furnace operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a schematic diagram of the overall structure of this application.

[0031] Figure 2 It is a structural schematic diagram of the lifting mechanism and guide rail of the present application.

[0032] Figure 3 It is a structural schematic diagram of the rotating mechanism and the connecting mechanism of the present application.

[0033] Figure 4 It is a schematic diagram of the structure of the connection component of the present application.

[0034] Figure 5 It is a schematic diagram of the structure of the clamping block of the present application.

[0035] Figure 6 It is a structural schematic diagram of the rotating mechanism of the present application.

[0036] Description of reference numerals: 1, support frame, 11, main column, 12, auxiliary column;

[0037] 2. lifting mechanism, 21. first motor, 22. first worm gear reducer, 23. lead screw, 24. first nut, 25. second nut, 26. support seat;

[0038] 3. Rotating mechanism, 31. Second motor, 32. Second worm gear reducer, 33. Crank connecting rod mechanism, 34. Shift fork, 35. Transition sleeve, 36. Third worm gear reducer;

[0039] 4. Connecting mechanism, 41. Swing arm assembly, 411. First connecting column, 412. Second connecting column, 413. Third connecting column, 414. Fourth connecting column, 42. Connecting assembly, 421. Connecting block, 422. Clamping block, 4221. Long round hole, 4222. Long hole, 423. First pad, 424. Second pad;

[0040] 5. Main shaft, 6. First supporting seat, 7. Second supporting seat, 8. Third supporting seat, 9. Auxiliary furnace chamber descending stroke limit switch, 10. Auxiliary furnace chamber ascending stroke displacement limit switch, 20. Auxiliary furnace chamber outer rotation stroke limit switch, 30. Rod, 40. Auxiliary furnace chamber inner rotation stroke limit switch, 50. Guide rail, 60. First connecting seat, 70. Second connecting seat, 80. First pin. DETAILED DESCRIPTION

[0041] The following is combined with Figure 1-6 This application is described in further detail.

[0042] The present application embodiment discloses a lifting and rotating device for an auxiliary furnace chamber of a single crystal furnace. Figure 1 A lifting and rotating device for an auxiliary furnace chamber of a single crystal furnace is arranged at one side of a main furnace chamber and connected to the auxiliary furnace chamber, comprising a support frame 1, a lifting mechanism 2, a rotating mechanism 3 and a connecting mechanism 4 connected to the auxiliary furnace chamber, the support frame 1 is connected to a main furnace chamber frame, a main shaft 5 is arranged on the support frame 1, the lifting mechanism 2 is arranged on the support frame 1 and connected to the main shaft 5, the rotating mechanism 3 is arranged on the top of the support frame 1 and is movably connected to the main shaft 5, one end of the connecting mechanism 4 is connected to the lifting mechanism 2, and the other end thereof is connected to the rotating mechanism 3, and the connecting mechanism 4 is arranged on the side of the main shaft 5 and is fixedly connected to the main shaft 5.

[0043] The support frame 1 includes a main column 11 and a secondary column 12. The main column 11 and the secondary column 12 are arranged in parallel. The bottom of the main column 11 and the secondary column 12 are connected to the frame of the main furnace body. The main shaft 5 is fixedly connected to the side of the main column 11. The first support seat 6, the second support seat 7 and the third support seat 8 are arranged in sequence from bottom to top on the side of the main column 11 opposite to the main shaft 5. One end of the main shaft 5 passes through the first support seat 6, the second support seat 7 and the third support seat 8 in sequence from bottom to top. An L-shaped rod 30 is arranged on the side surface of the main column 11 away from the main shaft 5. The short side of the rod 30 is connected to the main column 11, and the end of the long side is provided with a secondary furnace chamber inner rotation stroke limit switch 40.

[0044] The main column 11 is provided with an auxiliary furnace chamber descending stroke limit switch 9 and an auxiliary furnace chamber ascending stroke displacement limit switch 10. The auxiliary furnace chamber descending stroke limit switch 9 is located below the auxiliary furnace chamber ascending stroke displacement limit switch 10, and the auxiliary furnace chamber ascending stroke displacement limit switch 10 is located below the first supporting seat 6.

[0045] Reference Figure 2 The lifting mechanism 2 includes a first motor 21, a first worm gear reducer 22 and a lead screw 23. A mounting seat is provided at the bottom of the first worm gear reducer 22. The first worm gear reducer 22 is fixedly connected to the main column 11 through the mounting seat. The first worm gear reducer 22 is connected to the first motor 21. The lead screw 23 is located at the top of the first worm gear reducer 22. A first nut 24, a second nut 25 and a support seat 26 are sequentially mounted on the lead screw 23 from bottom to top. The second nut 25 is fixedly connected to the support seat 26. Two vertical grooves are respectively opened on the second nut 25 and the first nut 24. They are longitudinally fixedly connected by pins. The end of the main shaft 5 is inserted into the support seat 26 and fixedly connected. One end of the lead screw 23 passes through the first nut 24, the second nut 25 and the support seat 26 and extends into the main shaft 5. The support seat 26 is slidably connected to the main column 11 and is located between the auxiliary furnace chamber descending stroke limit switch 9 and the auxiliary furnace chamber ascending stroke displacement limit switch 10.

[0046] A guide rail 50 is provided on the main column 11 , and the guide rail 50 is located below the first supporting seat 6 . A sliding groove for use with the guide rail 50 is provided on the side of the support seat 26 close to the main column 11 , and the support seat 26 is slidably connected to the guide rail 50 .

[0047] The second nut 25 will bear the load of the auxiliary furnace chamber for a long time, and the inner thread will be worn, causing the second nut 25 to fail and lose its tightening function. If the second nut 25 fails, the auxiliary furnace chamber will suddenly fall down, causing damage to the main furnace body. The first nut 24 is located below the second nut 25 and has a protective function. Since the distance between the first nut 24 and the second nut 25 is very small, when the second nut 25 fails, the auxiliary furnace chamber suddenly falls. The first nut 24 can withstand the impact force generated by the fall of the auxiliary furnace chamber, and can prevent the auxiliary furnace chamber from continuing to fall or slow down the speed of the auxiliary furnace chamber falling, thereby protecting the main furnace chamber.

[0048] Reference Figure 3 The connecting mechanism 4 includes a swing arm assembly 41 and two connecting assemblies 42. The two connecting assemblies 42 are respectively located at the upper and lower ends of the swing arm assembly 41 and are connected to each other;

[0049] The swing arm assembly 41 includes a first connecting column 411 and a second connecting column 412, the first connecting column 411 and the second connecting column 412 are parallel to each other, five transverse third connecting columns 413 are arranged between the first connecting column 411 and the second connecting column 412, two ends of the third connecting column 413 are respectively fixedly connected to the first connecting column 411 and the second connecting column 412, and two connecting assemblies 42 are respectively located at the upper and lower ends of the second connecting column 412 and are arranged opposite to each other;

[0050] The length of the second connecting column 412 is less than that of the first connecting column 411, and the tops of the first connecting column 411 and the second connecting column 412 are in the same horizontal plane. An oblique fourth connecting column 414 is arranged between the bottoms of the first connecting column 411 and the second connecting column 412, and a longitudinal first reinforcing rib is arranged between the third connecting column 413 and the fourth connecting column 414 located at the bottom, and a longitudinal second reinforcing rib is arranged between the first third connecting column 413 and the second third connecting column 413, and the first reinforcing rib and the second reinforcing rib are in contact with the second connecting column 412. The first reinforcing rib and the second reinforcing rib have the effect of reinforcing the swing arm assembly 41, and maintain the stability of the swing arm assembly 41.

[0051] Reference Figure 4 The connecting assembly 42 includes a connecting block 421 and two clamping blocks 422 connected to the connecting block 421. The outer side of the connecting block 421 is fixedly connected to a mounting plate. The connecting block 421 is connected to the auxiliary furnace chamber through the mounting plate. The two clamping blocks 422 are floatingly connected to the connecting block 421. The two clamping blocks 422 are fixedly connected to the second connecting column 412. The two clamping blocks 422 are respectively arranged at the upper part and the lower part of the second connecting column 412 and are arranged opposite to each other.

[0052] Reference Figure 5 Four oblong holes 4221 are provided on the rear section of the clamping block 422, and an oblong hole 4222 is provided on the front section of the clamping block 422. The space of the oblong hole 4222 gradually increases from one end to the other end. The connecting block 421 is located at the front section between the two clamping blocks 422. A first pad 423 is provided between the connecting block 421 and the clamping block 422. A through hole corresponding to the oblong hole 4222 is provided on the first pad 423, and a round through hole corresponding to the oblong hole 4222 is provided on the connecting block 421. The two clamping blocks 422 are fixedly connected to the two first pads 423 and the connecting block 421 by inserting the first pin 80 into the two oblong holes 4222, the through hole and the round through hole.

[0053] When the lifting mechanism 2 lifts the connecting mechanism 4, because the connecting block 421 is connected to the auxiliary furnace chamber, the auxiliary furnace chamber is lifted. Due to the gravity of the auxiliary furnace chamber, the auxiliary furnace chamber presses the first pin 80 to the end of the elongated hole 4222 with a smaller space. When the lifting mechanism 2 lowers the connecting mechanism 4, the auxiliary furnace chamber also descends along with the connecting block 421. After the auxiliary furnace chamber is lowered, the swing arm assembly 41 will continue to descend, and then the two clamping blocks 422 begin to float, and the elongated hole 4222 floats up and down along the first pin 80, and finally the first pin 80 is located in the middle position of the elongated hole 4222 to prevent the auxiliary furnace chamber from getting stuck. At the same time, the first pin 80 located in the middle position of the elongated hole 4222 has space away from the other end of the elongated hole 4222 with a larger space, which is used to prevent the furnace pressure in the auxiliary furnace chamber from being too high, jacking up the auxiliary furnace chamber, and causing damage to the main furnace chamber and other devices.

[0054] The second connecting column 412 is located at the rear section between the two clamping blocks 422. A second pad 424 is arranged between the second connecting column 412 and the clamping block 422. The second pad 424 is provided with long holes corresponding to the four long oval holes 4221. The second connecting column 412 is provided with long through holes corresponding to the four long oval holes 4221. The two clamping blocks 422 are fixedly connected to the two second pads 424 and the second connecting column 412 by inserting screws into the long oval holes 4221, the long holes and the long through holes.

[0055] The second pad 424 located at the top is fixedly connected to the second connecting column 412 , and is fixedly connected to the first reinforcing rib and the third connecting column 413 located at the bottom.

[0056] The second pad 424 located at the bottom is fixedly connected to the second connecting column 412 , and is fixedly connected to the second reinforcing rib and the third connecting column 413 located at the top.

[0057] The main shaft 5 is sequentially mounted with a first connecting seat 60 and a second connecting seat 70 from bottom to top. Two limit plates are respectively arranged on the first connecting seat 60 and the second connecting seat 70. The first connecting column 411 is located between the two limit plates to connect the first connecting column 411 to the main shaft 5. The first connecting seat 60 is located above the first supporting seat 6, and the second connecting seat 70 is located above the second supporting seat 7. A fixing sleeve is respectively arranged at the bottom of the first connecting seat 60 and the bottom of the second connecting seat 70.

[0058] Reference Figure 6 The rotating mechanism 3 includes a second motor 31, a second worm gear reducer 32, a crank connecting rod mechanism 33, a shift fork 34 and a third worm gear reducer 36. The third worm gear reducer 36 is located between the second motor 31 and the second worm gear reducer 32 and is connected to each other. The second worm gear reducer 32 is located at the top of the main column 11. One end of the second worm gear reducer 32 is connected to the second motor 31, and the other end is connected to the crank connecting rod mechanism 33. The crank connecting rod mechanism 33 is movably connected to the shift fork 34. A guide wheel is respectively provided at the end of the two arms of the shift fork 34. The first connecting column 411 is located between the two arms of the shift fork 34 and the two guide wheels. Between the wheels, a sliding bar is provided on the side surfaces of the first connecting column 411 opposite to the two guide wheels. When the lifting mechanism 2 is raised, the main shaft 5 is driven to rise, and the auxiliary furnace chamber is lifted accordingly. At this time, the guide wheel slides along the sliding bar on the first connecting column 411, increasing the friction between the first connecting column 411 and the main shaft 5, which has an anti-slip effect. A transition sleeve 35 is provided below the shift fork 34, and the shift fork 34 is mounted on the transition sleeve 35. The transition sleeve 35 is located above the third support seat 8 and inserted into the third support seat 8. One end of the main shaft 5 extends upward and is inserted into the transition sleeve 35. An auxiliary furnace chamber outer rotation stroke limit switch 20 is provided on the third support seat 8.

[0059] The implementation principle of the auxiliary furnace chamber lifting and rotating device for a single crystal furnace in the embodiment of the present application is as follows: during the production process of the single crystal furnace, the auxiliary furnace chamber needs to be opened, the lifting mechanism 2 starts to work, and the first motor 21 is started. The first motor 21 drives the first worm gear reducer 22 to operate, and the first worm gear reducer 22 drives the lead screw 23 connected thereto to operate, driving the first nut 24 sleeved on the lead screw 23 to move upward, the first nut 24 drives the second nut 25 to move upward and push the support seat 26, the support seat 26 drives the main shaft 5 to rise, the main shaft 5 pushes the first connecting seat 60 and the second connecting seat 70 to make the connecting mechanism 4 rise, thereby raising the auxiliary furnace chamber, when the support seat 26 touches the auxiliary furnace chamber rising line during the rising process When the travel displacement limit switch 10 is reached, the first motor 21 stops working, and the rotating mechanism 3 starts working and starts to rotate outward. The second motor 31 starts, driving the third worm gear reducer 36 to operate, and the third worm gear reducer 36 drives the second worm gear reducer 32 to operate, and the second worm gear reducer 32 drives the crank connecting rod mechanism 33 connected thereto to move, thereby driving the shift fork 34 to rotate outward around the transition sleeve 35, and the shift fork 34 drives the first connecting column 411 to rotate, so that the connecting mechanism 4 rotates outward, thereby rotating the auxiliary furnace chamber outward. When the first connecting column 411 touches the external rotation travel limit switch 20 of the auxiliary furnace chamber during the outward rotation, the second motor 31 stops working, and at this time, the auxiliary furnace chamber is opened;

[0060] When the relevant production process is completed and the auxiliary furnace chamber needs to be closed, the rotating mechanism 3 works and starts to rotate inward, the second motor 31 starts, drives the third worm gear reducer 36 to rotate in the reverse direction, the third worm gear reducer 36 drives the second worm gear reducer 32 to rotate in the reverse direction, and the second worm gear reducer 32 drives the crank connecting rod mechanism 33 connected thereto to move, thereby driving the shift fork 34 to rotate inward around the transition sleeve 35, the shift fork 34 drives the first connecting column 411 to rotate, so that the connecting mechanism 4 rotates outward, thereby rotating the auxiliary furnace chamber inward, and when the auxiliary furnace chamber touches the auxiliary furnace during rotation, When the indoor rotation stroke limit switch 40 is reached, the second motor 31 stops working, and the lifting mechanism 2 descends at this time, and the first motor 21 is started. The first motor 21 drives the first worm gear reducer 22 to rotate in reverse, and the first worm gear reducer 22 drives the lead screw 23 connected thereto to rotate in reverse, and the support seat 26 drives the main shaft 5 to descend, and the connecting mechanism 4 descends, thereby causing the auxiliary furnace chamber to descend. When the support seat 26 touches the auxiliary furnace chamber descending stroke displacement limit switch 9, the first motor 21 stops working, and the auxiliary furnace chamber stops descending. At this time, the auxiliary furnace chamber is closed, and subsequent related production processes can be carried out.

[0061] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A lifting and rotating device for an auxiliary furnace chamber of a single crystal furnace, arranged on one side of the main furnace chamber and connected to the auxiliary furnace chamber, characterized in that: The invention comprises a support frame (1), a lifting mechanism (2), a rotating mechanism (3) and a connecting mechanism (4) connected to a secondary furnace chamber, wherein the support frame (1) is connected to a main furnace chamber frame, a main shaft (5) is arranged on the support frame (1), the lifting mechanism (2) is arranged on the support frame (1) and is movably connected to the main shaft (5), the rotating mechanism (3) is arranged on the top of the support frame (1) and is connected to the main shaft (5), one end of the connecting mechanism (4) is connected to the lifting mechanism (2), and the other end thereof is connected to the rotating mechanism (3), and the connecting mechanism (4) is arranged on the side of the main shaft (5) and is fixedly connected to the main shaft (5); The support frame (1) comprises a main column (11), the bottom of the main column (11) is connected to the frame of the main furnace body, and the main shaft (5) is fixedly connected to the side of the main column (11); The lifting mechanism (2) comprises a first motor (21), a first worm gear reducer (22) and a lead screw (23); the first worm gear reducer (22) is fixedly connected to the main column (11); the first worm gear reducer (22) is connected to the first motor (21); the lead screw (23) is located at the top of the first worm gear reducer (22); a first nut (24), a second nut (25) and a support seat (26) are sequentially mounted on the lead screw (23) from bottom to top; the second nut (25) is fixedly connected to the support seat (26); the second nut (25) is longitudinally fixedly connected to the first nut (24); the end of the main shaft (5) is inserted into the support seat (26) and fixedly connected; one end of the lead screw (23) passes through the first nut (24), the second nut (25) and the support seat (26) and extends into the main shaft (5); The connecting mechanism (4) comprises a swing arm assembly (41) and at least one connecting assembly (42), wherein the swing arm assembly (41) is fixedly connected to the connecting assembly (42); The swing arm assembly (41) comprises a first connecting column (411) and a second connecting column (412), wherein the first connecting column (411) is connected to the main shaft (5), and the first connecting column (411) and the second connecting column (412) are parallel to and connected to each other; The connecting assembly (42) comprises a connecting block (421) and at least one clamping block (422) connected to the connecting block (421); the connecting block (421) is connected to the auxiliary furnace chamber; the clamping block (422) is floatingly connected to the connecting block (421); and the clamping block (422) is fixedly connected to the second connecting column (412); A long hole (4222) is provided on the front section of the clamping block (422), and the space of the long hole (4222) gradually increases from one end to the other end. A round through hole corresponding to the long hole (4222) is provided on the connecting block (421), and the first pin (80) is inserted into the two long holes (4222) and the round through hole.

2. The auxiliary furnace chamber lifting and rotating device for a single crystal furnace according to claim 1, characterized in that: A first support seat (6), a second support seat (7) and a third support seat (8) are arranged in sequence from bottom to top on the side surface of the main column (11) opposite to the main shaft (5); one end of the main shaft (5) passes through the first support seat (6), the second support seat (7) and the third support seat (8) in sequence from bottom to top; a rod (30) is arranged on a side surface of the main column (11) away from the main shaft (5); and a secondary furnace chamber inner rotation stroke limit switch (40) is arranged on the end of the rod (30) extending outward.

3. The auxiliary furnace chamber lifting and rotating device for a single crystal furnace according to claim 2, characterized in that: The main body column (11) is provided with a secondary furnace chamber descending stroke limit switch (9) and a secondary furnace chamber ascending stroke displacement limit switch (10); the secondary furnace chamber descending stroke limit switch (9) is located below the secondary furnace chamber ascending stroke displacement limit switch (10), and the secondary furnace chamber ascending stroke displacement limit switch (10) is located below the first support seat (6).

4. The auxiliary furnace chamber lifting and rotating device for a single crystal furnace according to claim 3, characterized in that: The support seat (26) is slidably connected to the main column (11) and is located between the auxiliary furnace chamber descending stroke limit switch (9) and the auxiliary furnace chamber ascending stroke displacement limit switch (10), and the auxiliary furnace chamber descending stroke limit switch (9) is located between the first nut (24) and the first worm gear reducer (22).

5. The auxiliary furnace chamber lifting and rotating device for a single crystal furnace according to claim 4, characterized in that: A guide rail (50) is provided on the main column (11), and the guide rail (50) is located below the first support seat (6). A sliding groove for use with the guide rail (50) is provided on the side of the support seat (26) close to the main column (11), and the support seat (26) is slidably connected to the guide rail (50).

6. The auxiliary furnace chamber lifting and rotating device for a single crystal furnace according to claim 1, characterized in that: The main shaft (5) is provided with a first connecting seat (60) and a second connecting seat (70) in sequence from bottom to top. The first connecting seat (60) and the second connecting seat (70) are respectively fixedly connected to the first connecting column (411). The first connecting seat (60) is located above the first supporting seat (6), and the second connecting seat (70) is located above the second supporting seat (7). A fixing sleeve is respectively provided at the bottom of the first connecting seat (60) and the bottom of the second connecting seat (70).

7. The auxiliary furnace chamber lifting and rotating device for a single crystal furnace according to claim 1, characterized in that: The rotating mechanism (3) comprises a second motor (31), a second worm gear reducer (32), a crank connecting rod mechanism (33) and a shift fork (34). The second worm gear reducer (32) is located at the top of the main column (11). One end of the second worm gear reducer (32) is connected to the second motor (31), and the other end is connected to the crank connecting rod mechanism (33). The crank connecting rod mechanism (33) is movably connected to the shift fork (34). The first connecting column (411) is located between two arms of the shift fork (34). A transition sleeve (35) is provided below the shift fork (34). The shift fork (34) is sleeved on the transition sleeve (35). The transition sleeve (35) is located at the top of the third support seat (8). One end of the main shaft (5) extends upward and is inserted into the transition sleeve (35). A secondary furnace chamber outer rotation stroke limit switch (20) is provided on the third support seat (8).

8. The auxiliary furnace chamber lifting and rotating device for a single crystal furnace according to claim 7, characterized in that: The rotating mechanism (3) further comprises a third worm gear reducer (36), wherein the third worm gear reducer (36) is located between the second motor (31) and the second worm gear reducer (32) and is connected to each other.

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