Vibration power generation device and vibration power generation element

Abstract

The vibration power generation device comprises: a vibration power generation structure composed of a first fixed comb tooth portion and a first movable comb tooth portion that are meshed with each other; a vibration power generation structure composed of a second fixed comb tooth portion and a second movable comb tooth portion that are meshed with each other; an electrode for power output connected to the vibration power generation structure; and a monitor electrode connected to the vibration power generation structure, the output of the vibration power generation structure is different from the output of the vibration power generation structure.

Description

Technical Field

[0001] The present invention relates to a vibration power generation device and a vibration power generation element. Background Art

[0002] In recent years, as one of the energy harvesting technologies for obtaining energy from the environment, a method of generating electricity using a vibration power generation element by utilizing environmental vibration has attracted much attention (for example, see Patent Document 1). In the vibration power generation element described in Patent Document 1, a fixed electrode and a movable electrode having a comb-tooth structure are provided, and due to the vibration of the movable electrode, the opposing area of ​​the fixed electrode and the movable electrode changes, thereby generating electricity.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2017-070163 Summary of the invention

[0006] Problems to be solved by the invention

[0007] However, when a power supply circuit for extracting power from the vibration power generating element is connected to the vibration power generating element, the output waveform from the vibration power generating element changes due to the influence of the power supply circuit, making it difficult to accurately grasp the vibration state of the vibration power generating element.

[0008] Solutions to Solve Problems

[0009] According to a first embodiment of the present invention, a vibration power generation device comprises: a first vibration power generation structure, which is composed of a first fixed comb tooth portion and a first movable comb tooth portion that are meshed with each other; a second vibration power generation structure, which is composed of a second fixed comb tooth portion and a second movable comb tooth portion that are meshed with each other; a first output electrode, which is connected to the above-mentioned first vibration power generation structure; and a second output electrode, which is connected to the above-mentioned second vibration power generation structure, and the output of the above-mentioned first vibration power generation structure is different from the output of the above-mentioned second vibration power generation structure.

[0010] According to the second scheme of the present invention, a vibration power generation element is used in the vibration power generation device of the first scheme, and the vibration power generation element comprises: the above-mentioned first vibration power generation structure, which is composed of the above-mentioned first fixed comb tooth portion and the above-mentioned first movable comb tooth portion; and the above-mentioned second vibration power generation structure, which is composed of the above-mentioned second fixed comb tooth portion and the above-mentioned second movable comb tooth portion, the comb teeth contained in the above-mentioned first fixed comb tooth portion and the above-mentioned second fixed comb tooth portion are respectively electrically insulated, and the above-mentioned first fixed comb tooth portion is connected to the above-mentioned first output electrode, and the above-mentioned second fixed comb tooth portion is connected to the above-mentioned second output electrode, or the comb teeth contained in the above-mentioned first movable comb tooth portion and the above-mentioned second movable comb tooth portion are respectively electrically insulated, and the above-mentioned first movable comb tooth portion is connected to the above-mentioned first output electrode, and the above-mentioned second movable comb tooth portion is connected to the above-mentioned second output electrode.

[0011] According to the third scheme of the present invention, a vibration power generation element is used in the vibration power generation device of the first scheme, and the vibration power generation element comprises: the above-mentioned first vibration power generation structure, which is composed of the above-mentioned first fixed comb tooth portion and the above-mentioned first movable comb tooth portion; and the above-mentioned second vibration power generation structure, which is composed of the above-mentioned second fixed comb tooth portion and the above-mentioned second movable comb tooth portion, the above-mentioned first fixed comb tooth portion and the above-mentioned second fixed comb tooth portion are electrically insulated, and the above-mentioned first fixed comb tooth portion is connected to the above-mentioned first output electrode, and the above-mentioned second fixed comb tooth portion is connected to the above-mentioned second output electrode, or the above-mentioned first movable comb tooth portion and the above-mentioned second movable comb tooth portion are electrically insulated, and the above-mentioned first output electrode is connected to the above-mentioned first movable comb tooth portion, and the above-mentioned second output electrode is connected to the above-mentioned second movable comb tooth portion.

[0012] According to the fourth scheme of the present invention, in the vibration power generating element of the third scheme, it is preferred that at least one of the above-mentioned first fixed comb tooth portion and the above-mentioned second fixed comb tooth portion that are electrically insulated from each other has two or more fixed comb tooth groups that are electrically insulated, or at least one of the above-mentioned first movable comb tooth portion and the above-mentioned second movable comb tooth portion that are electrically insulated from each other has two or more movable comb tooth groups that are electrically insulated.

[0013] According to the fifth embodiment of the present invention, in the vibration power generating element of any one of the second to fourth embodiments, it is preferred that it comprises: the first vibration power generating structure, which is composed of the first fixed comb tooth portion and the first movable comb tooth portion; and the second vibration power generating structure, which is composed of the second fixed comb tooth portion and the second movable comb tooth portion, and the total number of comb teeth contained in the first fixed comb tooth portion and the first movable comb tooth portion is different from the total number of comb teeth contained in the second fixed comb tooth portion and the second movable comb tooth portion.

[0014] According to the sixth embodiment of the present invention, in the vibration power generating element of any one of the second to fourth embodiments, it is preferred that it comprises: the first vibration power generating structure, which is composed of the first fixed comb tooth portion and the first movable comb tooth portion; and the second vibration power generating structure, which is composed of the second fixed comb tooth portion and the second movable comb tooth portion, and the comb tooth height of at least one of the first fixed comb tooth portion and the first movable comb tooth portion that are meshed with each other is different from the comb tooth height of the second fixed comb tooth portion and the second movable comb tooth portion that are meshed with each other.

[0015] According to the seventh embodiment of the present invention, in the vibration power generating element of any one of the second to fourth embodiments, it is preferred that it comprises: the first vibration power generating structure, which is composed of the first fixed comb tooth portion and the first movable comb tooth portion; and the second vibration power generating structure, which is composed of the second fixed comb tooth portion and the second movable comb tooth portion, and the interval between the mutually meshing comb teeth of the first fixed comb tooth portion and the first movable comb tooth portion is different from the interval between the mutually meshing comb teeth of the second fixed comb tooth portion and the second movable comb tooth portion.

[0016] According to the eighth embodiment of the present invention, in the vibration power generation element of any one of the second to fourth embodiments, it is preferred that it comprises: the above-mentioned first vibration power generation structure, which is composed of the above-mentioned first fixed comb tooth portion and the above-mentioned first movable comb tooth portion; and the above-mentioned second vibration power generation structure, which is composed of the above-mentioned second fixed comb tooth portion and the above-mentioned second movable comb tooth portion, and the comb tooth length of the above-mentioned second fixed comb tooth portion or the above-mentioned second movable comb tooth portion is set to be shorter than the comb tooth length of the above-mentioned first fixed comb tooth portion and the above-mentioned first movable comb tooth portion, and is set so that the above-mentioned second fixed comb tooth portion and the above-mentioned second movable comb tooth portion are in a non-meshing state when not vibrating.

[0017] According to a ninth aspect of the present invention, in the vibration power generating element according to any one of the second to eighth aspects, preferably, an electret is formed on at least one of the comb teeth meshing with each other in the first vibration power generating structure and the second vibration power generating structure.

[0018] According to the tenth embodiment of the present invention, a vibration power generation element is used in the vibration power generation device of the first embodiment, and the vibration power generation element comprises: the first vibration power generation structure, which is composed of the first fixed comb tooth portion and the first movable comb tooth portion; and the second vibration power generation structure, which is composed of the second fixed comb tooth portion and the second movable comb tooth portion, the first vibration power generation structure and the second vibration power generation structure have an electret formed on at least one side of the mutually meshing comb teeth, and the amount of charge per unit area of ​​the electret is different in the first vibration power generation structure and the second vibration power generation structure.

[0019] Effects of the Invention

[0020] According to the present invention, the vibration state of the vibration power generating element can be accurately grasped. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a diagram showing a schematic structure of a vibration power generating device according to one embodiment of the present invention.

[0022] Figure 2 It is a diagram showing another structure of the first fixed comb-tooth portion.

[0023] Figure 3 It is a diagram for explaining a comparative example of the present embodiment.

[0024] Figure 4 It is a diagram for explaining the operation of the vibration power generator according to the present embodiment.

[0025] Figure 5 This is a block diagram of a power supply device using a vibration power generator.

[0026] Figure 6 It is a diagram showing Modification 1 of the vibration power generator.

[0027] Figure 7 It is a diagram showing a second modification of the vibration power generator.

[0028] Figure 8 It is a diagram showing a third modification of the vibration power generator.

[0029] Fig. 9 It is a diagram showing a modification 4 of the vibration power generator.

[0030] Fig.10 It is a diagram showing a fifth modification of the vibration power generator.

[0031] Fig.11 It is a diagram showing a modification 6 of the vibration power generator.

[0032] Fig.12 This is a diagram showing a structure in which a plurality of movable comb-tooth electrodes provided on a movable portion are electrically separated.

[0033] Fig.13 It is a figure explaining the fixed comb tooth group and the movable comb tooth group. DETAILED DESCRIPTION

[0034] Hereinafter, a mode for carrying out the present invention will be described with reference to the drawings. Figure 1 1 is a diagram showing a schematic structure of a vibration power generating device 1 according to an embodiment of the present invention. Figure 1 (a) is a top view, Figure 1 (b) Yes Figure 1 (a) A-A section view. Figure 1The vibration power generation device 1 shown has: a vibration power generation device 10 having two vibration power generation structures 11A and 11B; an electrode 20A for power output connected to the vibration power generation structure 11A; and a monitor electrode 20B connected to the vibration power generation structure 11B. The vibration power generation device 10 is formed by using a general MEMS (Microelectromechanical Systems) processing technology using an SOI (Silicon On Insulator) substrate. The SOI substrate is composed of, for example, a lower Si layer forming a processing layer, a SiO2 layer forming a BOX layer, and an upper Si layer forming a device layer.

[0035] The vibration power generating device 10 includes: a base 12; a fixed portion 13 formed with fixed comb-tooth electrodes 13a, 13b, 13c, and 13d; a movable portion 14 formed with movable comb-tooth electrodes 14a, 14b, 14c, 14d, and 14e; and an elastic support portion 15 elastically supporting the movable portion 14. The movable portion 14 is elastically supported relative to the base 12 by a pair of elastic support portions 15. The number of fixed comb-tooth electrodes and movable comb-tooth electrodes is not limited to Figure 1 shown.

[0036] As per Figure 1 As can be seen from the AA cross-sectional view of (b), the movable portion 14 having movable comb-tooth electrodes 14a to 14e and the fixed comb-tooth electrodes 13a to 13d are formed by the upper Si layer 120 of the SOI substrate, and aluminum layers 131 and 141 as conductive layers are formed on the upper surfaces of the movable portion 14 and the fixed comb-tooth electrodes 13a to 13d. In addition, the aluminum layers 131 and 141 do not necessarily have to be formed on the entire upper surfaces of the movable portion 14 and the fixed comb-tooth electrodes 13a to 13d. The fixed comb-tooth electrodes 13a to 13d are fixed to the base 12 formed on the lower Si layer 100 via the SiO2 layer 110.

[0037] An electret is formed near the surface of the opposing surface of at least one of the meshing fixed comb-tooth electrodes 13a to 13d and the movable comb-tooth electrodes 14a to 14e. As a result, at least one of the opposing surfaces of the fixed comb-tooth electrodes 13a to 13d and the movable comb-tooth electrodes 14a to 14e is charged. In addition, as a method of forming an electret, for example, a method suggested by Japanese Patent Publication No. 2016-149914 is known.

[0038] The vibration power generation device 10 generates electricity by using vibration from the outside to vibrate the movable comb-tooth electrodes 14a to 14e in the x-axis direction relative to the fixed comb-tooth electrodes 13a to 13d. The power output electrode 20A is connected to the fixed comb-tooth electrodes 13a, 13b and 13c constituting the vibration power generation structure 11A, and serves as an output terminal for the current generated by the vibration power generation structure 11A. On the other hand, the monitor electrode 20B is connected to the fixed comb-tooth electrode 13d, and serves as an output terminal for the current generated by the vibration power generation structure 11B.

[0039] In addition, Figure 1 In the embodiment shown, the fixed comb-tooth electrodes 13a to 13d provided in the vibration power generating device 10 are formed separately from each other and are electrically insulated. The comb-tooth electrode group composed of the fixed comb-tooth electrodes 13a to 13c constitutes a first fixed comb-tooth portion, and the fixed comb-tooth electrode 13d constitutes a second fixed comb-tooth portion. Figure 1 In the example shown, the fixed comb-teeth electrodes constituting the second fixed comb-teeth portion are composed of only one fixed comb-teeth electrode 13d. However, when there are a plurality of fixed comb-teeth electrodes constituting the second fixed comb-teeth portion, for example, the monitor electrode 20B is connected to all of these fixed comb-teeth electrodes.

[0040] Each fixed comb-tooth electrode 13a to 13c of the first fixed comb-tooth portion is electrically connected to the power output electrode 20A inside or outside the vibration power generating device 10. Here, inside the vibration power generating device 10 means that wiring is formed in the vibration power generating device 10 alone. On the other hand, outside the vibration power generating device 10 means that the fixed comb-tooth electrodes 13a to 13c are not electrically connected to the vibration power generating device 10 alone, but are electrically connected to the circuit substrate side on which the vibration power generating device 10 is mounted through the wiring of the circuit substrate. The fixed comb-tooth electrode 13d of the second fixed comb-tooth portion is connected to the monitor electrode 20B.

[0041] Figure 1 The fixed comb-teeth electrodes 13a to 13d are separated, but it is also possible to Figure 2 As shown, the fixed comb-teeth electrodes 13a to 13c are integrated. Figure 2 In the example shown, the fixed comb-tooth electrodes 13a to 13c constituting the first fixed comb-tooth portion are connected via a connecting portion 13e, and the power output electrode 20A is connected to the connecting portion 13e. Figure 1 The vibration power generation device 1 shown is the same. Figure 1 In the case of the structure, the number of fixed comb-tooth electrodes connected to the second fixed comb-tooth portion of the monitor electrode 20B can be adjusted according to the size of the output required as the monitor signal and the purpose of the monitor signal.

[0042] Figure 32 is a diagram showing a comparative example of the present embodiment. In the vibration power generating device 1 of the present embodiment, two outputs can be taken out from the power output electrode 20A and the monitor electrode 20B. Figure 3 The vibration power generating device 30 shown in (a) includes one vibration power generating structure composed of a set of movable comb teeth 31 and fixed comb teeth 32, and has a single output structure in which current is output from the one vibration power generating structure. Figure 3 (b) represents the amplitude x of the vibration of the movable comb-tooth portion 31, Figure 3 (c) indicates Figure 3 (b) is the open circuit voltage V between the movable comb-tooth portion 31 and the fixed comb-tooth portion 32 in the vibrating state.

[0043] When the opposing area of ​​the movable comb-tooth electrode and the fixed comb-tooth electrode in the meshing state changes due to the movement of the movable comb-tooth portion 31, the charge of the comb-tooth electrode moves, and a voltage is generated between the movable comb-tooth electrode and the fixed comb-tooth electrode. As a result, the waveform of the open voltage V is a waveform having an amplitude that is synchronized and proportional to the amplitude x of the vibration of the movable comb-tooth portion 31. On the other hand, when the power supply circuit 33 is connected to the vibration power generation device 30, the following behavior is exhibited: when the output voltage of the rectifier circuit rises to the rated voltage of the capacitor, the current flows through the resistor while the voltage remains constant. As a result, when the rated voltage of the capacitor is just reached, the voltage is saturated, and the voltage V between the terminals is as follows. Figure 3 As shown in (d), the waveform having an amplitude proportional to the amplitude x of the movable comb-tooth portion 31 does not become. Figure 3 The voltage signal V shown in (d) cannot accurately grasp the vibration state of the movable comb-tooth portion 31.

[0044] Figure 4 is Figure 2 FIG. 1 is a diagram showing a state where the vibration power generating device 1 is connected to a power supply circuit 33. Figure 2 As shown, the movable comb-tooth electrode of the vibration power generation structure 11A having the power output electrode 20A and the movable comb-tooth electrode of the vibration power generation structure 11B having the monitor electrode 20B are provided in the same movable part 14. Therefore, even when the power supply circuit 33 is connected, Figure 4 The voltage V2 of the monitor electrode 20B shown in (d) is similar to Figure 4 (b) shows a waveform with an amplitude proportional to the amplitude x of the movable part 14. On the other hand, the waveform of the voltage V1 of the power output electrode 20A is affected by the power supply circuit 33 and becomes Figure 4 (c) Such a waveform.

[0045] In the above Figure 3 In the structure shown in (a), the number of fixed comb-tooth electrodes of the fixed comb-tooth portion 32 is 4, but Figure 4The number of fixed comb-tooth electrodes of the vibration power generation structure 11B of (a) is 1. Therefore, Figure 4 (d) The amplitude ratio of the voltage waveform Figure 3 Thus, in the vibration power generating device 1 of the present embodiment, by making the number of fixed comb-tooth electrodes of the vibration power generating structure 11B for monitor signal smaller than the number of fixed comb-tooth electrodes of the vibration power generating structure 11A for power, it is configured to suppress the reduction of output power from the power output electrode 20A and obtain the monitor signal.

[0046] Figure 5 An example of an application example of the output signal of the monitor electrode 20B is a block diagram of a power supply device using the vibration power generation device 1. The output of the vibration power generation structure 11A for power is input to the voltage conversion circuit 21 of the power supply unit 2. In addition to the voltage conversion circuit 21, the power supply unit 2 is also provided with an amplitude detection circuit 22 and a charging unit 23. The output of the vibration power generation structure 11B for monitoring is input to the amplitude detection circuit 22, and the amplitude information detected by the amplitude detection circuit 22 is input to the voltage conversion circuit 21. The voltage conversion circuit 21 performs voltage conversion based on the amplitude information input from the amplitude detection circuit 22, for example, in a manner that allows the power from the vibration power generation structure 11A to be efficiently input, and outputs it to the charging unit 23. Therefore, it is necessary to accurately grasp the amplitude information of the output of the vibration power generation structure 11A. In the present embodiment, by utilizing the output of the vibration power generation structure 11B, the amplitude information can be accurately grasped.

[0047] (Variant 1)

[0048] Figure 6 It is a diagram for explaining Modification 1 of the vibration power generator 1 . Figure 6 (a) is a schematic diagram of the structure of the movable comb-tooth electrode and the fixed comb-tooth electrode provided in the vibration power generating device 10. Figure 4 In the structure shown, by setting the number of fixed comb-tooth electrodes of the vibration power generating structure 11B to be smaller than the number of fixed comb-tooth electrodes of the vibration power generating structure 11A, the amplitude of the monitor signal of the vibration power generating structure 11B is made smaller than the amplitude of the output signal of the vibration power generating structure 11A.

[0049] In variant example 1, instead of fixing the number of comb-tooth electrodes, the intervals between the fixed comb-tooth electrodes and the movable comb-tooth electrodes are made different between the vibration power generation structure 11A and the vibration power generation structure 11B, thereby making the capacitance of the vibration power generation structure 11A and the vibration power generation structure 11B different, and making the outputs of the vibration power generation structures 11A and 11B different. Figure 6In (a), the lateral width W2 of the fixed comb-tooth electrodes 13c and 13d of the vibration power generation structure 11B is set to be smaller than the lateral width W1 of the fixed comb-tooth electrodes 13a and 13b of the vibration power generation structure 11A. As a result, the intervals d1 and d2 between the fixed comb-tooth electrodes and the movable comb-tooth electrodes of the vibration power generation structures 11A and 11B are d1<d2. In addition, instead of setting the lateral width of the fixed comb-tooth electrodes 13c and 13d of the vibration power generation structure 11B to W2, for example, the lateral width of the movable comb-tooth electrodes 14d and 14e may be set to W2.

[0050] In addition, Figure 6 In (a), in order to explain that the output is different between the vibration power generation structure 11A and the vibration power generation structure 11B by making the lateral width of the fixed comb-tooth electrodes different, the number of fixed comb-tooth electrodes is set to the same number in the vibration power generation structure 11A and the vibration power generation structure 11B. However, even when the lateral width of the fixed comb-tooth electrodes is different, in order to maximize the output of the vibration power generation structure 11A, it is preferable to set the number of fixed comb-tooth electrodes of the vibration power generation structure 11B to be the same as that of the vibration power generation structure 11A. Figure 4 The number of comb-tooth electrodes is fixed in the same manner as in case (a).

[0051] like Figure 6 As shown in (a), when the lateral width W2 of the fixed comb-tooth electrodes 13c and 13d is set to W2<W1, the gap between the side surfaces of the fixed comb-tooth electrodes 13c and 13d and the side surfaces of the movable comb-tooth electrodes 14c to 14e is expanded, and the capacitance of the vibration power generation structure 11B is smaller than the capacitance of the vibration power generation structure 11A. As for the amount of charge transfer when the movable part 14 vibrates, the larger the capacitance, the greater the capacitance. Figure 6 The amplitude ratio of the open circuit voltage V4 of the vibration power generating structure 11B shown in (c) Figure 6 The open circuit voltage V3 of the vibration power generating structure 11A shown in (b) is small. The amplitudes of the open circuit voltages V3 and V4 both change in proportion to the amplitude of the vibrating movable portion 14 .

[0052] also, Figure 6 In Figure 2 The case where a plurality of fixed comb-teeth electrodes are separated into two groups is described as an example, but even in the case Figure 1 When the plurality of fixed comb-tooth electrodes are separated as shown, the output of the vibration power generating structure 11A and the output of the vibration power generating structure 11B can be made different by making the intervals between the comb teeth different between the vibration power generating structure 11A and the vibration power generating structure 11B.

[0053] (Variant 2)

[0054] Figure 7It is a diagram for explaining Modification 2 of the vibration power generator 1 . Figure 7 1 is a schematic diagram showing the structure of a movable comb-teeth electrode and a fixed comb-teeth electrode provided in the vibration power generating device 10 . Figure 7 (a) is a top view of the vibration power generation device 10, Figure 7 (b) is the D1-D1 cross-sectional view, Figure 7 (c) is the D2-D2 cross-sectional view.

[0055] In Modification 2, the heights of the fixed comb-teeth electrodes are made different between the vibration power generating structure 11A and the vibration power generating structure 11B, and the facing areas of the movable electrode and the fixed electrode are made different, thereby making the outputs of the vibration power generating structures 11A and 11B different. Figure 7 In the embodiment, the height H2 (refer to Figure 7 (c)) is set to be higher than the height H1 (see Figure 7 (b)) Small.

[0056] In addition, Figure 7 In order to explain that the output is different between the vibration power generation structure 11A and the vibration power generation structure 11B by making the height of the fixed comb-tooth electrodes different, the number of fixed comb-tooth electrodes in the vibration power generation structure 11A and the vibration power generation structure 11B is set to the same number. However, even when the height of the fixed comb-tooth electrodes is different, in order to make the output of the vibration power generation structure 11A as large as possible, it is preferable to make the number of fixed comb-tooth electrodes in the vibration power generation structure 11B the same number. Figure 4 The number of comb-tooth electrodes is fixed in the same manner as in case (a).

[0057] like Figure 7 As shown in FIG. 1 , when the height H2 of the fixed comb-tooth electrodes 13c and 13d is set to H2

[0058] Figure 7 In the embodiment, the height of the fixed comb-tooth electrode is made different between the vibration power generation structure 11A and the vibration power generation structure 11B, but the height of the movable comb-tooth electrode is also made different. Figure 7 ​In (c), in the vibration power generating structure 11B, only the fixed comb-teeth electrode 13d is set to have a height H2, but, for example, the heights of the movable comb-teeth electrodes 14d and 14e may also be set to H2.

[0059] In addition, Figure 7 China Figure 2 The case where a plurality of fixed comb-teeth electrodes are separated into two groups is described as an example, but even in the case Figure 1 When the plurality of fixed comb-teeth electrodes are separated as shown, the output of the vibration power generating structure 11A and the output of the vibration power generating structure 11B can be made different by making the comb-teeth heights different between the vibration power generating structure 11A and the vibration power generating structure 11B.

[0060] (Variant 3)

[0061] Figure 8 It is a diagram for explaining Modification 3 of the vibration power generator 1 . Figure 8 (a) is a schematic diagram showing the structure of a movable comb-teeth electrode and a fixed comb-teeth electrode provided in the vibration power generating device 10 . Figure 8 (b) shows the waveform of the open circuit voltage V5 of the vibration power generation structure 11A, Figure 8 (c) shows the waveform of the open voltage V6 of the vibration power generation structure 11B. In the modification 3, instead of fixing the number of comb-tooth electrodes, the length of the fixed comb-tooth electrodes is made different between the vibration power generation structure 11A and the vibration power generation structure 11B, so that the meshing start of the movable electrode and the fixed electrode is different, and the output of the vibration power generation structures 11A and 11B is different.

[0062] exist Figure 8 In (a), the length L2 of the fixed comb-shaped electrodes 13c and 13d of the vibration power generation structure 11B is set shorter than the length L1 of the fixed comb-shaped electrodes 13a and 13b of the vibration power generation structure 11A. Figure 8 In (a), in order to explain that the output is different between the vibration power generation structure 11A and the vibration power generation structure 11B by making the length of the fixed comb-tooth electrodes different, the number of fixed comb-tooth electrodes in the vibration power generation structure 11A and the vibration power generation structure 11B is set to the same number. However, in order to maximize the output of the vibration power generation structure 11A when the length of the fixed comb-tooth electrodes is different, it is preferable to set the number of fixed comb-tooth electrodes in the vibration power generation structure 11B to the same number. Figure 4 The number of comb-tooth electrodes is fixed in the same manner as in case (a).

[0063] Through Figure 8As shown in (a), the lengths L1 and L2 of the fixed comb-shaped electrodes 13a to 13d are set to L2<L1, and the open circuit voltage V5 of the vibration power generating structure 11A becomes synchronous with the amplitude of the vibration of the movable part 14. Figure 8 (b) The open circuit voltage V6 of the vibration power generation structure 11B becomes Figure 8 (c) Such a waveform.

[0064] Figure 8 The position of the movable part 14 in the x direction in (a) indicates a state where the electrical force of the electret and the elastic force of the elastic support part 15 are balanced. Figure 8 In the state shown in (a), the fixed comb-tooth electrodes 13c and 13d and the movable comb-tooth electrodes 14c to 14e of the vibration power generation structure 11B are not meshed. x0 is the amplitude of the movable part 14. Figure 8 When T=0 in (b) and (c), the movable part 14 is in a balanced position.

[0065] Starting from time T=0, when the movable part 14 starts to move in the positive direction of the x-axis, Figure 8 As shown in (b), the open circuit voltage V5 of the vibration power generating structure 11A starts to rise. However, in the vibration power generating structure 11B, the fixed comb-tooth electrodes 13c and 13d and the movable comb-tooth electrodes 14c to 14e are not engaged, so there is no charge transfer and the open circuit voltage V6 remains at V6=0.

[0066] When at time T1, the movable part 14 moves to Figure 8 At the position indicated by symbol T1 in (a), the fixed comb-tooth electrodes 13c, 13d and the movable comb-tooth electrodes 14c-14e of the vibration power generation structure 11B are meshed. After time T1, the facing area of ​​the fixed comb-tooth electrodes and the movable comb-tooth electrodes of the vibration power generation structure 11A and the vibration power generation structure 11B increases, and both open voltages V5 and V6 rise.

[0067] The displacement of the movable part 14 moving to the upper side of the figure reaches the amplitude x0 at time T2. At this time, the open voltages V5 and V6 of the vibration power generation structures 11A and 11B become positive peaks. After time T2, the movable part 14 moves in the negative direction of the x-axis, so the facing area of ​​the fixed comb-tooth electrodes and the movable comb-tooth electrodes of the vibration power generation structures 11A and 11B is reduced. As a result, the open voltages V5 and V6 decrease.

[0068] After the movable part 14 starts to move to the lower side in the figure, when reaching time T3, the facing area of ​​the vibration power generation structure 11B becomes zero, and after time T3, the facing area remains zero, so the open voltage V6 is V6 = 0. On the other hand, the facing area of ​​the vibration power generation structure 11A also decreases after time T3, so the open voltage V5 decreases while maintaining positive. Then, at time T4, the movable part 14 reaches the equilibrium position, and after time T4, the direction of charge movement is reversed, so the open voltage V5 becomes negative.

[0069] As described above, the length L2 of the fixed comb-tooth electrodes 13c and 13d of the vibration power generation structure 11B is set shorter than the length L1 of the fixed comb-tooth electrodes 13a and 13b of the vibration power generation structure 11A, so that the open voltage V6 is V6≠0 only near the maximum peak of the open voltage V5. That is, the monitor signal is output only near the maximum peak of the output when the fixed comb-tooth electrodes 13c and 13d of the vibration power generation structure 11B and the movable comb-tooth electrodes 14c to 14e are in the meshing state.

[0070] exist Figure 8 In the structure shown, the comb teeth length on the fixed comb teeth electrode side is set to L1 in the vibration power generation structure 11A and is set to L2 in the vibration power generation structure 11B, but the comb teeth length on the movable comb teeth electrode side may also be set to L1 or L2. For example, the movable comb teeth electrodes 14a to 14c are set to L1, and the movable comb teeth electrodes 14d and 14e are set to L2.

[0071] In addition, Figure 8 China Figure 2 The case where a plurality of fixed comb-tooth electrodes are separated into two groups is described as an example, but in the Figure 1 When a plurality of fixed comb-tooth electrodes are separated as shown, the comb-tooth length of the fixed comb electrode of the vibration power generation structure 11B can be set shorter than the comb-tooth length of the fixed comb electrode of the vibration power generation structure 11A, and by setting the vibration power generation structure 11B to a non-meshing state when not vibrating, the output of the vibration power generation structure 11A and the output of the vibration power generation structure 11B can be made different.

[0072] (Variant 4)

[0073] Fig. 9 1 is a diagram for explaining a fourth modification of the vibration power generator 1. Figure 2In the structure shown, the movable comb-tooth electrodes of the vibration power generation structure 11A and 11B are all arranged on the right side of the movable part 14 in the figure, but in the modification 4, the movable comb-tooth electrodes 14d and 14e of the vibration power generation structure 11B are arranged on the left side of the movable part 14 in the figure. The vibration power generation structure 11A is composed of the movable comb-tooth electrodes 14a to 14d arranged on the right side of the movable part 14 and the fixed comb-tooth electrodes 13a to 13c meshed with the movable comb-tooth electrodes 14a to 14d. The vibration power generation structure 11B is composed of the movable comb-tooth electrodes 14e and 14f arranged on the left side of the movable part 14 and the fixed comb-tooth electrode 13d meshed with the movable comb-tooth electrodes 14e and 14f.

[0074] When the movable part 14 is displaced in the positive direction of the x-axis, the facing area of ​​the movable comb-teeth electrodes 14a to 14d of the vibration power generation structure 11A and the fixed comb-teeth electrodes 13a to 13c increases, and the facing area of ​​the movable comb-teeth electrodes 14e and 14f of the vibration power generation structure 11B and the fixed comb-teeth electrode 13d decreases. On the contrary, when the movable part 14 is displaced in the negative direction of the x-axis, the facing area of ​​the movable comb-teeth electrodes 14a to 14d of the vibration power generation structure 11A and the fixed comb-teeth electrodes 13a to 13c decreases, and the facing area of ​​the movable comb-teeth electrodes 14e and 14f of the vibration power generation structure 11B and the fixed comb-teeth electrode 13d increases. Therefore, the phase of the waveform of the open-circuit voltage of the vibration power generation structure 11B is shifted by 180 degrees with respect to the waveform of the open-circuit voltage of the vibration power generation structure 11A, but the waveforms of the open-circuit voltages of the vibration power generation structures 11A and 11B are waveforms synchronized with the amplitude of the movable part 14. That is, similarly to the case of the above-described embodiment, the signal output from the monitor electrode 20B of the vibration power generating structure 11B can be used as a monitor signal of the electric power output from the vibration power generating structure 11A.

[0075] also, Fig. 9 In the above description, a case where a plurality of fixed comb-teeth electrodes are separated into two groups is used as an example. However, a plurality of fixed comb-teeth electrodes may also be separated into two groups. Figure 1 They are separated in this way and arranged separately on the right side and the left side of the movable portion 14 in the figure.

[0076] (Variant 5)

[0077] Fig.10 1 is a diagram for explaining a fifth modification of the vibration power generating device 1. In the above-mentioned embodiment and modification, the vibration power generating device 10 is a structure in which the movable comb-teeth electrode is displaced within the same plane relative to the fixed comb-teeth electrode. However, it may be configured as follows: Fig.10 The movable comb-teeth electrode shown performs out-of-plane vibrations.

[0078] exist Fig.10In the embodiment, a first fixed comb-tooth portion 41A, a second fixed comb-tooth portion 41B, and a cantilever beam 42 are formed on a base 12 formed by a lower Si layer 100 of an SOI substrate via a SiO2 layer 110. A first movable comb-tooth portion 40A meshing with the first fixed comb-tooth portion 41A and a second movable comb-tooth portion 40B meshing with the second fixed comb-tooth portion 41B are formed on the cantilever beam 42. An electrode 20A for power output is connected to the first fixed comb-tooth portion 41A, and an electrode 20B for monitoring is connected to the second fixed comb-tooth portion 41B. In addition, the first and second movable comb-tooth portions 40A, 40B, the first and second fixed comb-tooth portions 41A, 41B, and a conductive layer (equivalent to Figure 1 Aluminum layers 131, 141) are omitted from the illustration.

[0079] The vibration power generation structure 11A is composed of a first movable comb tooth portion 40A and a first fixed comb tooth portion 41A, and the vibration power generation structure 11B is composed of a second movable comb tooth portion 40B and a second fixed comb tooth portion 41B. As in the case of the first embodiment, an electret is provided on the electrode surface. When external vibration is applied to the vibration power generation device 10, the cantilever beam 42 bends in the z direction, and the first and second movable comb tooth portions 40A, 40B vibrate in the z direction relative to the first and second fixed comb tooth portions 41A, 41B. The number of comb tooth electrodes of the vibration power generation structure 11B is less than the number of comb tooth electrodes of the vibration power generation structure 11A, so the output of the vibration power generation structure 11B is smaller than the output of the vibration power generation structure 11A.

[0080] In addition, Fig.10 In the structure shown, the output amplitude is different by making the total number of fixed comb-tooth electrodes and movable comb-tooth electrodes different in the vibration power generation structure 11A and the vibration power generation structure 11B, but because it is an out-of-plane vibration, the output amplitude can be different even if the length of the fixed comb-tooth electrodes and the movable comb-tooth electrodes is different. Of course, even if it is different from the modification example 1 (refer to Figure 6 ) In the same manner, the intervals between the meshing fixed comb-tooth electrodes and the movable comb-tooth electrodes can be made different between the vibration power generating structure 11A and the vibration power generating structure 11B, thereby making it possible to make the output amplitude different.

[0081] However, the magnitude of each output of the vibration power generation structures 11A and 11B depends on the electrode spacing between the fixed comb-tooth electrode and the movable comb-tooth electrode, the facing area between the fixed comb-tooth electrode and the movable comb-tooth electrode, and the amount of charge of the electret formed on the fixed comb-tooth electrode and the movable comb-tooth electrode. In the above-mentioned embodiments and modified examples, the facing areas of the vibration power generation structures 11A and 11B are made different by making the length and height of the fixed comb-tooth electrodes different, or the comb-tooth electrode spacing of the vibration power generation structures 11A and 11B is made different by making the width of the fixed comb-tooth electrodes different. However, by making the electret charge per unit area different between the vibration power generation structure 11A and the vibration power generation structure 11B, the output of the vibration power generation structure 11A and the output of the vibration power generation structure 11B can also be made different.

[0082] (Variant 6)

[0083] In the above-mentioned embodiments and variations, a plurality of fixed comb-tooth electrodes are separated into two insulated fixed comb-tooth portions, but a plurality of movable comb-tooth electrodes provided in a movable portion 14 may be separated into two insulated movable comb-tooth portions, or a plurality of movable comb-tooth electrodes provided in a movable portion 14 may be formed to be electrically insulated from each other.

[0084] exist Fig.11 In the embodiment, the movable comb-teeth electrodes 14a to 14c of the movable comb-teeth electrodes 14a to 14e formed in the movable part 14 are set as the movable comb-teeth part of the vibration power generation structure 11A, and the movable comb-teeth electrodes 14d and 14e are set as the movable comb-teeth part of the vibration power generation structure 11B. In the movable part 14, the upper Si layer 120 forming the movable comb-teeth electrodes 14a to 14c and the upper Si layer 120 forming the movable comb-teeth electrodes 14d and 14e are separated, and the movable comb-teeth electrodes 14a to 14c and the movable comb-teeth electrodes 14d and 14e are electrically insulated. The movable comb-teeth electrodes 14a to 14c are connected to the power output electrode 20A, and the movable comb-teeth electrodes 14d and 14e are connected to the monitor electrode 20B.

[0085] Fig.12 The figure shows a case where a plurality of movable comb-tooth electrodes 14a to 14e provided in a movable portion 14 are formed to be electrically insulated from each other. The movable comb-tooth electrodes 14a to 14e are formed on the lower Si layer 100 via the SiO2 layer 110, and the upper Si layer 120 of each movable comb-tooth electrode 14a to 14e is configured to be separated from each other and electrically insulated. The movable comb-tooth electrodes 14a to 14c are connected to the power output electrode 20A, and the movable comb-tooth electrodes 14d and 14e are connected to the monitor electrode 20B. The connection between the power output electrode 20A and the monitor electrode 20B can be configured to be connected inside the vibration power generation device 10, or can be configured to be connected outside the vibration power generation device 10. Fig.12In the case of a structure, it is also possible to Figure 1 In the case of the structure of , the number of movable comb-tooth electrodes connected to the monitor electrode 20B is adjusted according to the size of the output required as the monitor signal and the purpose of the monitor signal.

[0086] The vibration power generating device 1 and the vibration power generating apparatus 10 described in the above-mentioned embodiment and the modified example are summarized as follows.

[0087] (1) Figure 1 , Figure 2 As shown, the vibration power generating device 1 includes a vibration power generating device 10, and the vibration power generating device 10 includes fixed comb-tooth electrodes 13a to 13c and movable comb-tooth electrodes 14a to 14d constituting a vibration power generating structure 11A, and a fixed comb-tooth electrode 13d and movable comb-tooth electrodes 14d and 14e constituting a vibration power generating structure 11B. Furthermore, by making the number of fixed comb-tooth electrodes 13a to 13c connected to the power output electrode 20A different from the number of fixed comb-tooth electrodes 13d connected to the monitor electrode 20B, even if the total number of fixed comb-tooth electrodes and movable comb-tooth electrodes is different between the vibration power generating structure 11A and the vibration power generating structure 11A, the output of the vibration power generating structure 11A and the output of the vibration power generating structure 11B are different. Here, the difference in output means that the amplitude of the monitor signal of the vibration power generating structure 11B is different from the amplitude of the output signal of the vibration power generating structure 11A.

[0088] In this way, by configuring the monitor signal to be outputted in synchronization with the amplitude of the movable part 14 separately from the power output, the vibration state of the vibration power generating device 10 can be accurately grasped using the monitor signal. Figure 5 As described in , by utilizing the monitor signal, the generated electric power can be utilized efficiently.

[0089] Furthermore, the case where the monitor signal is used to improve the efficiency of generated power has been described, but the monitor signal may be used, for example, as a trigger signal for fault detection or as an input signal to a protection circuit during abnormal operation.

[0090] (2) In the vibration power generating device 10, the fixed comb-shaped electrodes 13a to 13d of the vibration power generating structures 11A and 11B are respectively as follows: Figure 1 In the case of electrical insulation as shown, the fixed comb-tooth electrodes 13a to 13c of the vibration power generation structure 11A are connected to the power output electrode 20A, and the fixed comb-tooth electrode 13d of the vibration power generation structure 11B is connected to the monitor electrode 20B. Fig.12As shown, when the movable comb-tooth electrodes 14a~14e of the vibration power generation structures 11A and 11B are electrically insulated, the movable comb-tooth electrodes 14a~14d of the vibration power generation structure 11A are connected to the power output electrode 20A, and the movable comb-tooth electrodes 14d, 14e of the vibration power generation structure 11B are connected to the monitoring electrode 20B.

[0091] With Figure 2 In the case where the comb-teeth electrodes connected to the power output electrode 20A and the comb-teeth electrodes connected to the monitor electrode 20B are grouped at the stage of the vibration power generating device 10, Figure 1 When all the fixed comb-teeth electrodes are formed to be electrically insulated from each other as in the structure of , the number of comb-teeth electrodes connected to the monitor electrode 20B can be easily adjusted according to the size of the output required as the monitor signal and the purpose of the monitor signal.

[0092] In addition. Figure 1 or Fig.12 In the example shown, the fixed comb-tooth electrodes 13a to 13d or the movable comb-tooth electrodes 14a to 14e are electrically insulated. Figure 2 In the example shown, the fixed comb-teeth electrodes 13a to 13c of the vibration power generation structure 11A are electrically integrated. Fig.11 In the example shown, the movable comb-tooth electrodes 14a to 14c of the vibration power generation structure 11A and the movable comb-tooth electrodes 14d and 14e of the vibration power generation structure 11B are electrically integrated. However, the present invention is not limited to this structure, and other structures may be used. Fig.13 (a) and 13(b).

[0093] exist Fig.13 In (a), the fixed comb-teeth electrodes 13a to 13c connected to the power output electrode 20A include a fixed comb-teeth electrode 13c and a fixed comb-teeth group G1 composed of the fixed comb-teeth electrodes 13a and 13b formed electrically integrally. In addition, the fixed comb-teeth electrode 13c can also be regarded as a fixed comb-teeth group composed of one fixed comb-teeth electrode. The fixed comb-teeth electrodes 13d and 13e connected to the monitor electrode 20B are electrically insulated from each other. In this case, the fixed comb-teeth electrode 13d and the fixed comb-teeth electrode 13e can also be regarded as respectively constituting a fixed comb-teeth group.

[0094] exist Fig.13In the example shown in (b), among 14a to 14d connected to the power output electrode 20A, the movable comb-tooth electrodes 14c and 14d are electrically insulated from the electrically integrated movable comb-tooth electrodes 14a and 14b (fixed comb-tooth group G2). The movable comb-tooth electrodes 14c and 14d each constitute a movable comb-tooth group consisting of one movable comb-tooth electrode. The movable comb-tooth electrodes 14e and 14f connected to the monitor electrode 20B are electrically insulated from each other. The movable comb-tooth electrodes 14e and 14f also each constitute a movable comb-tooth group consisting of one movable comb-tooth electrode.

[0095] In this way, Fig.13 In (a), at least one of the first fixed comb-tooth portion (fixed comb-tooth electrodes 13a to 13c) and the second fixed comb-tooth portion (fixed comb-tooth electrodes 13d and 13e) which are electrically insulated from each other has a fixed comb-tooth group of two or more electrically insulated teeth. Fig.13 In (b), at least one of the first movable comb-tooth portion (movable comb-tooth electrodes 14a to 14d) and the second movable comb-tooth portion (movable comb-tooth electrodes 14e and 14f) which are electrically insulated from each other has a group of two or more electrically insulated movable comb teeth.

[0096] (3) As a method of making the output of the vibration power generation structure 11A and the output of the vibration power generation structure 11B different from each other, the following method can be used: Figure 1 , 2 9 to 13, the total number of fixed comb-tooth electrodes and movable comb-tooth electrodes is different in the vibration power generation structure 11A and the vibration power generation structure 11B. Figure 7 ) as described above, the comb teeth height of at least one of the meshing fixed comb teeth electrode and the movable comb teeth electrode is made different between the vibration power generation structure 11A and the vibration power generation structure 11B. Figure 6 ) is described, the interval between the fixed comb-tooth electrode and the movable comb-tooth electrode that are meshed with each other is made different between the vibration power generating structure 11A and the vibration power generating structure 11B.

[0097] (4) In addition, Figure 8 In the vibration power generation device 10 having a structure in which the movable comb-tooth electrode is caused to vibrate in a plane relative to the fixed comb-tooth electrode, the comb-tooth length of the fixed comb-tooth electrodes 13d, 13d of the vibration power generation structure 11B is set to be shorter than the comb-tooth length of the fixed comb-tooth electrodes 13a, 13b of the vibration power generation structure 11A. In addition, the comb-tooth length of the movable comb-tooth electrodes 14d, 14e of the vibration power generation structure 11B can also be set to be shorter than the comb-tooth length of the movable comb-tooth electrodes 14a, 14b of the vibration power generation structure 11A. Moreover, the fixed comb-tooth electrodes 13d, 13d and the movable comb-tooth electrodes 14d, 14e are set to be in a non-meshing state when not vibrating.

[0098] With this structure, the monitor signal is output only near the maximum output peak when the fixed comb electrodes 13c, 13d and the movable comb electrodes 14c to 14e of the vibration power generating structure 11B are in meshing state. This structure can detect the output peak timing of the power output electrode 20A with the monitor signal.

[0099] (5) In addition, as described in Modification 5, by making the amount of charge per unit area of ​​the electret different between the vibration power generation structure 11A and the vibration power generation structure 11B, the amplitude of the output can be made different between the vibration power generation structure 11A and the vibration power generation structure 11B. As a result, the amplitude of the output of the vibration power generation structure 11B becomes a waveform proportional to the vibration amplitude of the movable part 14, and the output of the vibration power generation structure 11B can be used as a monitor signal.

[0100] In addition, in the above-mentioned embodiment, if Figure 1 , Figure 2 As shown in the figure, the comb-tooth electrodes are formed using the upper Si layer 120 of the SOI substrate, and electrical insulation is achieved by physically separating the fixed comb-tooth electrodes. However, the method of achieving electrical insulation is not limited to this. For example, the comb teeth can be formed using quartz, a silicon layer can be formed on the comb teeth, and the silicon layer can be electretized to form the comb-tooth electrodes. In this case, when forming the silicon layer, it is also possible to Figure 1 As shown, each time a comb tooth is formed, an electrically insulated comb electrode is formed. Figure 2 In that way, two groups of comb-teeth electrodes which are electrically insulated are formed by forming the silicon layer in two groups.

[0101] Although various embodiments and modifications have been described above, the present invention is not limited to these contents, and other aspects that can be conceived within the scope of the technical concept of the present invention also belong to the scope of the present invention.

[0102] The disclosures of the following priority basic applications are incorporated herein by reference.

[0103] Japanese Patent Application No. 2018-105434 (filed on May 31, 2018)

[0104] Explanation of symbols

[0105] 1, 30—vibration power generation device, 10—vibration power generation equipment, 11A, 11B—vibration power generation structure, 12—base, 13a~13d—fixed comb tooth electrode, 14—movable part, 14a~14e—movable comb tooth electrode, 15—elastic support part, 20A—electrode for power output, 20B—electrode for monitor, 21—power conversion part, 22—amplitude detection circuit, 23—charging part, 31—movable comb tooth part, 32—fixed comb tooth part, 40A—first movable comb tooth part, 40B—second movable comb tooth part, 41A—first fixed comb tooth part, 41B—second fixed comb tooth part, 42—cantilever beam, G1—fixed comb tooth group, G2—movable comb tooth group.

Claims

1. A vibration power generation device, characterized in that: have: A first vibration power generation structure, which is composed of a first fixed comb tooth portion and a first movable comb tooth portion that mesh with each other; A second vibration power generation structure, which is composed of a second fixed comb tooth portion and a second movable comb tooth portion that mesh with each other; A first output electrode connected to the first vibration power generation structure; and a second output electrode connected to the second vibration power generation structure; The output of the first vibration power generation structure is different from the output of the second vibration power generation structure. The first output electrode is a power output electrode, and the second output electrode is a monitor electrode, and is configured to output a monitor signal synchronized with the amplitude of the movable portion separately from the power output.

2. A vibration power generating element used in the vibration power generating device according to claim 1, wherein the vibration power generating element comprises: The first vibration power generation structure is composed of the first fixed comb-tooth portion and the first movable comb-tooth portion; and The second vibration power generation structure is composed of the second fixed comb-tooth portion and the second movable comb-tooth portion. The comb teeth included in the first fixed comb tooth portion and the second fixed comb tooth portion are electrically insulated, and the first fixed comb tooth portion is connected to the first output electrode, and the second fixed comb tooth portion is connected to the second output electrode, or the comb teeth included in the first movable comb tooth portion and the second movable comb tooth portion are electrically insulated, and the first movable comb tooth portion is connected to the first output electrode, and the second movable comb tooth portion is connected to the second output electrode, The first output electrode is a power output electrode, and the second output electrode is a monitor electrode, and is configured to output a monitor signal synchronized with the amplitude of the movable portion separately from the power output.

3. A vibration power generating element used in the vibration power generating device according to claim 1, wherein the vibration power generating element comprises: The first vibration power generation structure is composed of the first fixed comb-tooth portion and the first movable comb-tooth portion; and The second vibration power generation structure is composed of the second fixed comb-tooth portion and the second movable comb-tooth portion. The first fixed comb-tooth portion and the second fixed comb-tooth portion are electrically insulated, and the first fixed comb-tooth portion is connected to the first output electrode, and the second fixed comb-tooth portion is connected to the second output electrode, or the first movable comb-tooth portion and the second movable comb-tooth portion are electrically insulated, and the first movable comb-tooth portion is connected to the first output electrode, and the second movable comb-tooth portion is connected to the second output electrode, The first output electrode is a power output electrode, and the second output electrode is a monitor electrode, and is configured to output a monitor signal synchronized with the amplitude of the movable portion separately from the power output.

4. The vibration power generating element according to claim 3, characterized in that: At least one of the first fixed comb tooth portion and the second fixed comb tooth portion electrically insulated from each other has two or more electrically insulated fixed comb tooth groups, or at least one of the first movable comb tooth portion and the second movable comb tooth portion electrically insulated from each other has two or more electrically insulated movable comb tooth groups.

5. The vibration power generating element according to any one of claims 2 to 4, characterized in that: have: The first vibration power generation structure is composed of the first fixed comb-tooth portion and the first movable comb-tooth portion; and The second vibration power generation structure is composed of the second fixed comb-tooth portion and the second movable comb-tooth portion. The total number of comb teeth included in the first fixed comb-tooth portion and the first movable comb-tooth portion is different from the total number of comb teeth included in the second fixed comb-tooth portion and the second movable comb-tooth portion.

6. The vibration power generating element according to any one of claims 2 to 4, characterized in that: have: The first vibration power generation structure is composed of the first fixed comb-tooth portion and the first movable comb-tooth portion; and The second vibration power generation structure is composed of the second fixed comb-tooth portion and the second movable comb-tooth portion. A comb tooth height of at least one of the first fixed comb tooth portion and the first movable comb tooth portion meshing with each other is different from a comb tooth height of the second fixed comb tooth portion and the second movable comb tooth portion meshing with each other.

7. The vibration power generating element according to any one of claims 2 to 4, characterized in that: have: The first vibration power generation structure is composed of the first fixed comb-tooth portion and the first movable comb-tooth portion; and The second vibration power generation structure is composed of the second fixed comb-tooth portion and the second movable comb-tooth portion. The interval between the mutually meshing comb teeth of the first fixed comb-tooth portion and the first movable comb-tooth portion is different from the interval between the mutually meshing comb teeth of the second fixed comb-tooth portion and the second movable comb-tooth portion.

8. The vibration power generating element according to any one of claims 2 to 4, characterized in that: have: The first vibration power generation structure is composed of the first fixed comb-tooth portion and the first movable comb-tooth portion; and The second vibration power generation structure is composed of the second fixed comb-tooth portion and the second movable comb-tooth portion. The comb tooth length of the second fixed comb tooth portion or the second movable comb tooth portion is set to be shorter than the comb tooth length of the first fixed comb tooth portion and the first movable comb tooth portion, and is set so that the second fixed comb tooth portion and the second movable comb tooth portion are in a non-meshing state when not vibrating.

9. The vibration power generating element according to any one of claims 2 to 4, characterized in that: The first vibration power generation structure and the second vibration power generation structure have an electret formed on at least one of the comb teeth that mesh with each other.

10. A vibration power generating element used in the vibration power generating device according to claim 1, wherein the vibration power generating element comprises: The first vibration power generation structure is composed of the first fixed comb-tooth portion and the first movable comb-tooth portion; and The second vibration power generation structure is composed of the second fixed comb-tooth portion and the second movable comb-tooth portion. The first vibration power generation structure and the second vibration power generation structure have an electret formed on at least one of the comb teeth that mesh with each other. The amount of charge per unit area of ​​the electret is different between the first vibration power generation structure and the second vibration power generation structure. The first output electrode is a power output electrode, and the second output electrode is a monitor electrode, and is configured to output a monitor signal synchronized with the amplitude of the movable portion separately from the power output.

Images