A non-contact sealing structure for the main shaft of a direct-injection silicon slicer

Abstract

The invention discloses a non-contact sealing structure for a spindle of a direct-injection crystalline silicon slicer, and relates to the technical field of spindle sealing. The key points of the technical solution are as follows: the structure comprises a spindle outer sleeve, which is sleeved on the outer side of a spindle core shaft and is used to support the spindle core shaft; a sealing static ring 1, which is fixed on one side of the spindle outer sleeve close to the end of the spindle core shaft, and a sealing static ring 1 air supply hole is provided on the sealing static ring 1; and a sealing dynamic ring, which is fixed on the spindle core shaft; a first air curtain gap is formed on the side where the sealing dynamic ring and the sealing static ring 1 are close to each other, the first air curtain gap is communicated with the outside, and the air curtain gap is communicated with the air supply hole of the sealing static ring 1, and an air curtain blowing outward is formed in the first air curtain gap by high-pressure gas, so that external pollutants are not easy to enter the bearing through the air curtain gap.

Description

Technical Field

[0001] The invention relates to the technical field of spindle sealing, and more specifically, to a non-contact sealing structure of a spindle of a direct-injection silicon slicing machine. Background Art

[0002] With the development of the photovoltaic industry, the reliability requirements for crystalline silicon slicers are getting higher and higher. Among them, the sealing problem of the main shaft of the crystalline silicon slicer directly affects the reliability of the crystalline silicon slicer. The main shaft in the crystalline silicon slicer has the function of support and rotation; the main shaft includes a main shaft core shaft, a main shaft outer sleeve arranged on the outside of the main shaft core shaft, and internal parts; the main shaft core shaft and the main shaft outer sleeve have relative rotational motion, and there is a certain space for parts installation between the two, and the internal parts are arranged in the parts installation space; the parts installation space is usually installed with bearings or spacers and other parts to realize the function of the main shaft; the parts installation space is generally separated from the outside by a sealing structure. When the crystalline silicon slicer is working, the working environment of the main shaft is usually relatively harsh, with a large amount of water vapor and silicon powder and other contaminants. These impurities can easily pass through the sealing structure into the main shaft. Once these contaminants enter the main shaft, it will cause the failure of the main shaft. Most of the damage to the existing slicer main shaft is due to the failure of the seal, which causes the contaminants to enter the main shaft and damage the internal parts. Now there is an urgent need for a crystalline silicon slicer main shaft sealing structure that is not prone to sealing failure. Summary of the invention

[0003] In view of the shortcomings of the prior art, the purpose of the present invention is to provide a non-contact sealing structure for the spindle of a direct-injection crystalline silicon slicer, which forms an outward-blowing air curtain in the air curtain gap through high-pressure gas, so that external pollutants and impurities are not easily able to enter the component installation space through the air curtain gap, thereby making it less likely for the problem of sealing failure to occur through the spindle of the slicer.

[0004] To achieve the above-mentioned object, the present invention provides the following technical solutions: a non-contact sealing structure for a spindle of a direct-injection silicon wafer slicer, comprising a spindle outer sleeve, which is sleeved on the outside of the spindle core shaft and is used to support the spindle core shaft;

[0005] A sealing static ring 1 is fixed on one side of the main shaft outer sleeve close to the end of the main shaft core shaft, and a sealing static ring 1 air supply hole is opened on the sealing static ring 1;

[0006] and a sealing dynamic ring fixed on the spindle core shaft;

[0007] A first air curtain gap is formed on the side where the sealing dynamic ring and the sealing static ring are close to each other. The first air curtain gap is communicated with the outside and the air curtain gap is communicated with an air supply hole of the sealing static ring.

[0008] By adopting the above technical solution, high-pressure gas is introduced into an air supply hole of the sealing static ring, and the high-pressure gas enters into the first air curtain gap through the air supply hole of the sealing static ring, and forms an air curtain blowing outward in the first air curtain gap, so that external pollutants are not easy to enter the first air curtain gap, and are even less likely to enter the component installation space through the first air curtain gap, thereby making it less likely for the main shaft to have a sealing failure problem.

[0009] The present invention is further configured as follows: the first sealing static ring comprises a main body portion, which is fixed on the main shaft outer sleeve;

[0010] The step portion is located on a side of the main body close to the component installation space, and the step portion protrudes toward the direction close to the spindle core axis, and a first dynamic and static ring gap is formed between the step portion and the sealing dynamic ring;

[0011] A sealing part is fixed on the outer side of the sealing dynamic ring and is arranged on the side of the step part away from the component installation space. The first air curtain gap is located between the sealing part and the main body. The first sealing gap is connected with the first dynamic and static ring gap.

[0012] By adopting the above technical solution and setting the first gap between the moving and stationary rings, the path through which pollutants and impurities enter the component installation space is increased, thereby making it more difficult for pollutants and impurities to enter the component installation space.

[0013] The present invention is further configured as follows: it also includes a second sealing static ring, the second sealing static ring is located between the step portion and the sealing portion, a second air curtain gap is formed between the second sealing static ring close to the main body portion and the main body portion, and the second air curtain gap is connected to the first air curtain gap;

[0014] A second dynamic-static ring gap is formed between the second sealing static ring and the sealing portion. The second dynamic-static ring gap is directly connected to the first air curtain gap. The second air curtain gap is directly connected to the air supply hole of the first sealing static ring.

[0015] By adopting the above technical solution, a second air curtain gap is set, and the second air curtain gap is directly connected to an air supply hole of a sealing static ring, so that the high-pressure gas can pass through the second air curtain gap in a restricted flow direction, and flows toward the first air curtain gap, thereby making it difficult for the high-pressure gas to be blown into the second dynamic and static ring gap.

[0016] The present invention is further configured such that: the angle between the second dynamic and static ring gap and the second air curtain gap is an acute angle.

[0017] By adopting the above technical solution, the angle between the second dynamic and static ring gap and the second air curtain gap is set to an acute angle, so that when the high-pressure gas flows through the connection between the second air curtain gap and the second dynamic and static ring gap, it is not easy to enter the second dynamic and static ring gap.

[0018] The present invention is further configured as follows: the cross section of the second dynamic and static ring gap along the axis of the spindle core shaft is arranged in an arc shape, and the arc is convex toward the direction close to the second sealing static ring.

[0019] By adopting the above technical solution, the second dynamic and static ring gap is set with an arc-shaped cross-section, so that when the high-pressure gas flows through the connection between the second air curtain gap and the second dynamic and static ring gap, it is not easy to enter the second dynamic and static ring gap.

[0020] The present invention is further configured as follows: an air-uniform groove is provided on one side of the second sealing static ring close to the main body, and the air-uniform groove is an annular groove and is directly connected to the second air curtain gap.

[0021] By adopting the above technical solution, after the high-pressure gas enters the gas uniforming groove, the high-pressure gas can be evenly distributed in the gas uniforming groove along the circumferential direction of the sealing static ring 2, so that the air curtain generated in the first air curtain gap and the second air curtain gap can be more uniform.

[0022] The present invention is further configured as follows: a stationary ring drain hole for discharging polluted impurities from the first moving and stationary ring gap is opened on the step portion, and the first moving and stationary ring gap and the stationary ring drain hole are interconnected; a drain cavity is arranged between the step portion and the sealing moving ring, and the drain cavity is an annular cavity, and the drain cavity is interconnected with the first moving and stationary ring gap and the stationary ring drain hole.

[0023] By adopting the above technical solution, when external pollutants enter the gap between the first moving and static rings, the pollutants will fall into the sewage cavity, and the pollutants in the sewage cavity will fall into a sewage hole of the static ring, making it easier for the pollutants to be discharged.

[0024] The present invention is further configured as follows: the sealing static ring 1 and the sealing static ring 2 are integrated or separated. When the sealing static ring 1 and the sealing static ring 2 are separated, the relative positions of the sealing static ring 1 and the sealing static ring 2 are fixed.

[0025] The present invention is further configured as follows: the sealing dynamic ring and the main shaft core shaft are integrated or separated. When the sealing dynamic ring and the main shaft core shaft are separated, the relative positions of the sealing dynamic ring and the main shaft core shaft are fixed.

[0026] The present invention is further configured as follows: it also includes a flange, which is arranged between the main shaft outer sleeve and the sealing static ring 1, the flange is fixed on the main shaft outer sleeve, the sealing static ring 1 and the flange are integrated or separated, when the sealing static ring 1 and the flange are separated, the relative positions of the sealing static ring 1 and the flange are fixed.

[0027] In summary, compared with the prior art, the present invention has the following beneficial effects: the present invention introduces high-pressure gas into the air supply hole of the main shaft outer casing, and the high-pressure gas enters the first air curtain gap through the air supply hole of the main shaft outer casing and the air supply hole of the sealing static ring, and forms an air curtain blowing outward in the first air curtain gap, so that external pollutants are not easy to enter the first air curtain gap, and are even less likely to enter the component installation space through the first air curtain gap, thereby making it less likely for the main shaft to have a sealing failure problem. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 is a cross-sectional view showing a first air curtain gap in an embodiment;

[0029] Figure 2 for Figure 1 A magnified schematic diagram of part A;

[0030] Figure 3 A cross-sectional view of a sewage discharge chamber is shown in an embodiment;

[0031] Figure 4 for Figure 3 An enlarged schematic diagram of part B.

[0032] In the figure: 1. spindle core shaft; 2. component installation space; 3. spindle outer sleeve; 31. spindle outer sleeve air supply hole; 32. spindle outer sleeve drain hole; 4. flange; 41. flange air supply hole; 42. flange drain hole; 5. sealing static ring 1; 51. main body; 511. sealing static ring 1 air supply hole; 52. step portion; 521. static ring drain hole; 6. sealing dynamic ring; 61. sealing portion; 62. drain cavity; 7. sealing static ring 2; 71. air uniforming groove; 8. gasket; 9. first dynamic and static ring gap; 91. second dynamic and static ring gap; 92. third dynamic and static ring gap; 10. second air curtain gap; 101. first air curtain gap. DETAILED DESCRIPTION

[0033] In order to enable those skilled in the art to better understand the technical solution of the present invention, the technical solution of the present invention is clearly and completely described below in conjunction with the accompanying drawings of the present invention. Based on the embodiments in this application, other similar embodiments obtained by ordinary technicians in this field without making creative work should all fall within the scope of protection of this application. In addition, the directional words mentioned in the following embodiments, such as "up", "down", "left", "right", etc., are only reference to the directions of the accompanying drawings. Therefore, the directional words used are used to illustrate rather than limit the invention.

[0034] The present invention will be further described below in conjunction with the accompanying drawings and preferred embodiments.

[0035] Embodiment: A non-contact sealing structure for the spindle of a direct injection silicon slicer, see the attached Figure 1 and attached Figure 2 , including a spindle sleeve 3 sleeved on the outside of the spindle core shaft 1, a flange 4 fixedly connected to the spindle sleeve 3, a sealing static ring 1 5 fixedly connected to the side of the flange 4 away from the spindle sleeve 3, a sealing dynamic ring 6 sleeved on the outside of the spindle core shaft 1, and a sealing static ring 2 7 arranged between the sealing static ring 1 5 and the sealing dynamic ring 6. The flange 4 is located on the side of the spindle sleeve 3 close to the end of the spindle core shaft 1, and the sealing static ring 1 5 is fixedly connected to the side of the flange 4 away from the spindle sleeve 3. The sealing static ring 1 5 and the flange 4 can be designed as an integral body or a split body. When the sealing static ring 1 5 and the flange 4 are designed as a split body, the relative position of the sealing static ring 1 5 and the flange 4 is fixed; the setting method of the sealing static ring 1 5 and the flange 4 includes but is not limited to the above methods; the sealing dynamic ring 6 and the spindle core shaft 1 can be designed as an integral body or a split body. When the sealing dynamic ring 6 and the spindle core shaft 1 are designed as a split body, the relative position of the sealing dynamic ring 6 and the spindle core shaft 1 is fixed; the setting method of the sealing dynamic ring 6 and the spindle core shaft 1 includes but is not limited to the above methods.

[0036] Preferably, in this embodiment, the flange 4 is fixed to the main shaft sleeve 3 by bolts, the sealing static ring 5 is fixed to the flange 4 by bolts, and the sealing dynamic ring 6 is fixed to the main shaft core shaft 1 by bolts; a component installation space is reserved between the main shaft sleeve 3 and the main shaft sleeve 3. In some embodiments, bearings and the like are arranged in the component installation space to support the main shaft core shaft 1.

[0037] The sealing static ring 5 includes a main body portion 51 and a step portion 52, both of which are arranged in a ring shape and arranged around the main shaft; the main body portion 51 is fixed on the flange 4, the step portion 52 is located on the side of the main body portion 51 close to the component installation space 2, and the step portion 52 protrudes in the direction close to the main shaft core axis 1. A first dynamic-static ring gap 9 is formed between the side of the step portion 52 close to the sealing dynamic ring 6 and the sealing dynamic ring 6. A sealing portion 61 is integrally formed on the side of the sealing dynamic ring 6 close to the main body 51. The sealing portion 61 is also arranged in an annular shape. The sealing portion 61 is located on the side of the step portion 52 away from the component installation space 2; the sealing static ring 2 7 is located on the side of the main body 51 close to the sealing dynamic ring 6, and the sealing static ring 2 7 is located between the step portion 52 and the sealing portion 61, and the sealing static ring 2 7 is fixed on the side of the step portion 52 close to the sealing portion 61; the sealing static ring 1 5 and the sealing static ring 2 7 can be a split design or an integrated design. When the sealing static ring 1 5 and the sealing static ring 2 7 are split designs, the relative positions of the sealing static ring 1 5 and the sealing static ring 2 7 are fixed; the arrangement methods of the sealing static ring 1 5 and the sealing static ring 2 7 include but are not limited to the above methods;

[0038] Preferably, in this embodiment, the sealing static ring 2 7 and the sealing static ring 1 5 are designed as separate bodies, and the sealing static ring 2 7 is fixed to the step portion 52 by bolts. A second dynamic and static ring gap 91 is formed between the sealing static ring 2 7 and the sealing portion 61, a third dynamic and static ring gap 92 is formed between the sealing static ring 2 7 and the sealing dynamic ring 6, and the first dynamic and static ring gap 9, the third dynamic and static ring gap 92 and the second dynamic and static ring gap 91 are connected in sequence. A second air curtain gap 10 is formed between the side of the sealing static ring 2 7 close to the main body 51 and the main body 51, and a first air curtain gap 101 is formed between the sealing portion 61 and the main body 51, and the first air curtain gap 101 and the second air curtain gap 10 are connected to each other. The first dynamic and static ring gap 9, the second dynamic and static ring gap 91, the third dynamic and static ring gap 92, the first air curtain gap 101 and the second air curtain gap 10 are all annular gaps.

[0039] The spindle housing 3 is provided with a spindle housing air supply hole 31, the flange 4 is provided with a flange air supply hole 41, and the main body 51 is provided with a sealing static ring air supply hole 511. The spindle housing air supply hole 31, the flange air supply hole 41, and the sealing static ring air supply hole 511 are connected in sequence, and the sealing static ring air supply hole 511 is connected with the second air curtain gap 10.

[0040] High-pressure gas is input into the main shaft outer sleeve air supply hole 31, and then passes through the main shaft outer sleeve air supply hole 31, the flange air supply hole 41, and the sealing static ring air supply hole 511 in sequence into the second air curtain gap 10, and then enters the first air curtain gap 101 through the second air curtain gap 10, and is finally sent out through the first air curtain gap 101. The high-pressure gas forms an air curtain between the first air curtain gap 101 and the second air curtain gap 10, making it difficult for external contaminants to enter the second dynamic and static ring gap 91 through the first air curtain gap 101, thereby making it difficult for contaminants to enter the component installation space 2.

[0041] The first air curtain gap 101 and the second air curtain gap 10 are arranged along the axial direction of the main shaft core shaft 1. Preferably, in this embodiment, the outer diameter of the sealing static ring 7 is equal to the outer diameter of the sealing part 61. When the high-pressure gas flows from the second air curtain gap 10 into the first air curtain gap 101, it can transition more smoothly, making it difficult for the high-pressure gas to flow into the second dynamic and static ring gap 91.

[0042] The side of the sealing static ring 2 7 and the sealing portion 61 close to each other are both inclined surfaces, and the side of the inclined surface close to the spindle core shaft 1 is inclined toward the direction close to the component installation space 2. Preferably, in this embodiment, the cross-sections of the two inclined surfaces along any radial direction of the spindle are parallel to each other; the setting of the two inclined surfaces makes the angle between the second dynamic and static ring gap 91 and the second air curtain gap 10 an acute angle, so that when the high-pressure air flows through the junction of the second air curtain gap 10, the second dynamic and static ring gap 91 and the first air curtain gap 101, the high-pressure air is not easy to enter the second dynamic and static ring gap 91.

[0043] A gas-uniform groove 71 is provided on one side of the sealing static ring 2 7 close to the main body 51. The gas-uniform groove 71 is an annular groove and is directly connected to the second air curtain gap 10. After the high-pressure gas enters the gas-uniform groove 71, the high-pressure gas can be evenly distributed in the gas-uniform groove 71 along the circumferential direction of the sealing static ring 2 7, so that the air curtain generated in the first air curtain gap 101 and the second air curtain gap 10 can be more uniform.

[0044] A gasket 8 is arranged between the main shaft sleeve 3 and the main shaft core shaft 1. The gasket 8 is annular and is arranged around the main shaft core shaft 1. The step portion 52 and the sealing dynamic ring 6 are in contact with the gasket 8 on one side close to the gasket 8. If the contaminants break through the first air curtain gap 101 and enter the contact point between the gasket 8 and the step portion 52 and the sealing dynamic ring 6 through the gap between the dynamic and static rings, the gasket 8 serves as the last protection to block the contaminants.

[0045] See attached Figure 3 and attached Figure 4 , a spindle housing drain hole 32 is provided on the spindle housing 3, a flange drain hole 42 is provided on the flange 4 and is interconnected with the spindle housing drain hole 32, a stationary ring drain hole 521 is provided on the step portion 52 and is interconnected with the flange drain hole 42, and the stationary ring drain hole 521 is interconnected with the first dynamic and static ring gap 9. Preferably, in this embodiment, the stationary ring drain hole 521 is located directly below the spindle core shaft 1, and the flange drain hole 42 is located directly below the stationary ring drain hole 521.

[0046] When the contaminants break through the first air curtain gap 101 and enter the second moving-static ring gap 91, and enter the first moving-static ring gap 9 through the second moving-static ring gap 91 and the third moving-static ring gap 92, the contaminants will rotate with the sealing moving ring 6 in the first moving-static ring gap 9. When the contaminants rotate to the bottom of the spindle core shaft 1, the contaminants fall into the static ring drain hole 521 under the action of centrifugal force and the contaminants' own gravity, and are sent out through the flange drain hole 42 and the spindle sleeve drain hole 32.

[0047] A drainage cavity 62 is provided between the step portion 52 and the sealing dynamic ring 6. The drainage cavity 62 is annular and is provided around the main shaft core shaft 1. The drainage cavity 62 is connected with the first dynamic and static ring gap 9. When the pollutants break into the first dynamic and static ring gap 9, the pollutants can more easily fall into the drainage cavity 62 from the dynamic and static ring gap, and the pollutants in the drainage cavity 62 can also more easily fall into the first drainage hole 521 of the static ring from the drainage cavity 62.

[0048] The working principle of the non-contact sealing structure of the direct-injection silicon slicer spindle during use is as follows: high-pressure gas is input into the spindle outer sleeve air supply hole 31, and then the high-pressure gas passes through the spindle outer sleeve air supply hole 31, the flange air supply hole 41, and the sealing static ring air supply hole 511 in sequence into the second air curtain gap 10, and then enters the first air curtain gap 101 through the second air curtain gap 10, and finally is sent out through the first air curtain gap 101. The high-pressure gas forms an air curtain between the first air curtain gap 101 and the second air curtain gap 10, so that external contamination impurities are not easy to enter the second dynamic and static ring gap 91 through the first air curtain gap 101, thereby making it difficult for contamination impurities to enter the component installation space 2. When the contaminants break through the second air curtain gap 10 and enter the second moving and static ring gap 91, and enter the first moving and static ring gap 9 through the second moving and static ring gap 91 and the third moving and static ring gap 92, the contaminants will fall from the first moving and static ring gap 9 into the drain chamber 62, and then fall from the drain chamber 62 into the static ring drain hole 521, and then be discharged through the flange drain hole 42 and the spindle sleeve drain hole 32.

[0049] The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A non-contact sealing structure for the spindle of a direct-injection silicon wafer slicer, characterized in that: It includes a main shaft outer sleeve, which is sleeved on the outside of the main shaft core shaft and is used to support the main shaft core shaft; A sealing static ring 1 is fixed on one side of the main shaft outer sleeve close to the end of the main shaft core shaft, and a sealing static ring 1 air supply hole is opened on the sealing static ring 1; and a sealing dynamic ring fixed on the spindle core shaft; The first air curtain gap is formed on the side where the sealing dynamic ring and the sealing static ring are close to each other. The first air curtain gap is connected to the outside and the air curtain gap is connected to the air supply hole of the sealing static ring. The first sealing static ring comprises a main body, which is fixed on the main shaft outer sleeve; The step portion is located on a side of the main body close to the component installation space, and the step portion protrudes toward the direction close to the spindle core axis, and a first dynamic and static ring gap is formed between the step portion and the sealing dynamic ring; A sealing part arranged on the side of the step part away from the component installation space is fixed on the outer side of the sealing dynamic ring, the first air curtain gap is located between the sealing part and the main body, and the first sealing gap is connected with the first dynamic and static ring gap; The second sealing static ring is located between the step portion and the sealing portion, and a second air curtain gap is formed between the second sealing static ring close to the main body portion and the main body portion, and the second air curtain gap is connected to the first air curtain gap; A second dynamic-static ring gap is formed between the second sealing static ring and the sealing portion, the second dynamic-static ring gap is directly connected to the first air curtain gap, and the second air curtain gap is directly connected to the air supply hole of the first sealing static ring; The sides of the sealing static ring 2 and the sealing part close to each other are both inclined surfaces, and the side of the inclined surface close to the spindle core shaft is inclined toward the direction close to the component installation space.

2. The non-contact sealing structure for the main shaft of a direct-injection silicon wafer slicer according to claim 1, characterized in that: The angle between the second dynamic and static ring gap and the second air curtain gap is an acute angle.

3. The non-contact sealing structure for the main shaft of a direct-injection silicon wafer slicer according to claim 1, characterized in that: The cross section of the second dynamic and static ring gap along the axis of the main shaft is arranged in an arc shape, and the arc is convex toward the direction close to the second sealing static ring.

4. The non-contact sealing structure for the main shaft of a direct-injection silicon wafer slicer according to claim 1, characterized in that: A gas-uniform groove is provided on one side of the second sealing static ring close to the main body. The gas-uniform groove is an annular groove and is directly connected to the second air curtain gap.

5. A non-contact sealing structure for a spindle of a direct-injection silicon wafer slicer according to any one of claims 1 to 4, characterized in that: The step portion is provided with a static ring drain hole for discharging polluted impurities from the first dynamic and static ring gap, and the first dynamic and static ring gap and the static ring drain hole are interconnected; a drain cavity is provided between the step portion and the sealing dynamic ring, and the drain cavity is an annular cavity, and the drain cavity is interconnected with the first dynamic and static ring gap and the static ring drain hole.

6. The non-contact sealing structure for the main shaft of a direct-injection silicon wafer slicer according to claim 1, characterized in that: The first sealing static ring and the second sealing static ring are integrated or separated. When the first sealing static ring and the second sealing static ring are separated, the relative positions of the first sealing static ring and the second sealing static ring are fixed.

7. The non-contact sealing structure for the main shaft of a direct-injection silicon wafer slicer according to claim 1, characterized in that: The sealing dynamic ring and the main shaft core shaft are integrated or separated. When the sealing dynamic ring and the main shaft core shaft are separated, the relative positions of the sealing dynamic ring and the main shaft core shaft are fixed.

8. The non-contact sealing structure for the main shaft of a direct-injection silicon wafer slicer according to claim 1, characterized in that: It also includes a flange, which is arranged between the main shaft outer sleeve and the sealing static ring 1. The flange is fixed on the main shaft outer sleeve. The sealing static ring 1 and the flange are integrated or separated. When the sealing static ring 1 and the flange are separated, the relative positions of the sealing static ring 1 and the flange are fixed.

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