Production system

Abstract

Provided is a production system that effectively detects anomalies in a production process. The production system includes: a plurality of first devices that perform a first process on a workpiece; a second device that performs a second process on the workpiece after the first process; a recording unit that records which workpiece is processed by which first device from the first process to the second process; and a control unit that controls the first device, the second device, and the recording unit. The second device includes: an inspection unit that inspects the workpiece to detect defects; a determination unit that determines which first device processed the workpiece with more defects; and a notification unit that notifies the determination result of the determination unit.

Description

Technical Field

[0001] The present invention relates to a production system. Background Art

[0002] In production processes for producing various products such as semiconductor device production processes, a factory is constructed that incorporates a system that identifies and manages each workpiece and can track when which workpiece is processed by which device. In this factory, by introducing this system, the operating rate of the entire process can be managed, and in the case where a defect occurs in a completed device chip, it is possible to trace where the problem occurred.

[0003] In addition, in the above production process, in order to reduce the labor cost and misextinguishment of operators, multiple processes are automated and unmanned. Through automation, an automatic transfer unit that transfers workpieces between devices in multiple processes is controlled by a server or the like, realizing an efficient process of transferring a workpiece to an idle processing device in the next process as soon as the previous process ends (for example, refer to Patent Documents 1 and 2).

[0004] Patent Document 1: Japanese Patent Application Laid-Open No. 2017-076686

[0005] Patent Document 2: Japanese Patent Application Laid-Open No. 2016-149437

[0006] In addition, since the control of each device in the above production process is centrally managed by a server or the like, multiple devices can be used effectively, but the work of maintaining the devices is still carried out by operators. However, since the opportunity for operators to operate the devices decreases, there is a problem that the opportunity for operators to perceive device abnormalities themselves also decreases. Summary of the Invention

[0007] Therefore, an object of the present invention is to provide a production system that can efficiently detect abnormalities in a production process.

[0008] According to the present invention, there is provided a production system having: a plurality of first devices that perform a first process on a workpiece; a plurality of second devices that perform a second process on the workpiece after the first process; a recording unit that records which of the workpieces is processed by which of the first devices from the first process to the second process; and a control unit that controls the first device, the second device, and the recording unit, wherein the second device includes: an inspection unit that inspects the workpiece to detect a defect; a determination unit that determines which of the workpieces processed by which of the first devices has more defects; and a notification unit that notifies the determination result of the determination unit.

[0009] Preferably, the production system further has a transfer unit that transfers the workpiece from the first device to the second device, and the control unit controls the transfer unit.

[0010] According to the present invention, it has the effect of being able to effectively detect abnormalities in the production process. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a schematic diagram showing a structural example of the production system of the embodiment.

[0012] Figure 2 It is a schematic diagram showing a functional structural example of the production system of the embodiment.

[0013] Figure 3 It is a diagram showing an outline of the information stored in the recording unit of the embodiment.

[0014] Figure 4 It is a diagram showing an outline of the information stored in the inspection result storage unit of the embodiment.

[0015] Figure 5 It is a diagram showing an outline of the information stored in the determination result storage unit of the embodiment.

[0016] Figure 6 It is a diagram showing an example of the error rate of the embodiment.

[0017] Figure 7 It is a flowchart showing an example of the processing sequence of the second device of the embodiment.

[0018] REFERENCE SIGNS LIST

[0019] 1: Production system; 2: Communication network; 10: Management server; 11: Communication unit; 12: Storage unit; 12-1: Recording unit; 13: Control unit; 20: Conveying unit; 21: Communication unit; 22: Storage unit; 23: Control unit; 30-1 to 30-4: First device; 31: Communication unit; 32: Storage unit; 33: Control unit; 40-1 to 40-4: Second device; 104: Communication unit; 42: Storage unit; 42-1: Inspection result storage unit; 42-2: Determination result storage unit; 43: Control unit; 43-1: Inspection unit; 43-2: Determination unit; 43-3: Notification unit. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0020] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The present invention is not limited to the content described in the following embodiments. And, among the constituent elements described below, there are constituent elements that are easily conceivable by those skilled in the art and are actually the same. Moreover, the configurations described below can be appropriately combined. In addition, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[0021] Also, in this specification and the drawings, for a plurality of structural elements having substantially the same functional structure, different letters are sometimes appended after the same reference numeral for distinction. For example, for a plurality of structures having substantially the same functional configuration, they are separately described as needed in the manner of the first apparatuses 30-1 to 30-4 and the second apparatuses 40-1 to 40-4. However, in cases where it is not necessary to particularly distinguish a plurality of structural elements having substantially the same functional structure, only the same reference numeral is used. For example, in cases where it is not necessary to particularly distinguish the first apparatuses 30-1 to 30-4, they are only described as the first apparatus 30, and in cases where it is not necessary to particularly distinguish the second apparatuses 40-1 to 40-4, they are only described as the second apparatus 40.

[0022] Figure 1 is a schematic diagram showing a structural example of a production system according to an embodiment. The production system 1 according to the embodiment includes a management server 10, a transfer unit 20, a plurality of first apparatuses 30-1 to 30-4, and a plurality of second apparatuses 40-1 to 40-4, and is a system for mass-producing workpieces.

[0023] The management server 10, the transfer unit 20, the plurality of first apparatuses 30-1 to 30-4, and the plurality of second apparatuses 40-1 to 40-4 are respectively connected to a communication network 2. The communication network 2 is, for example, a LAN (Local Area Network), a WAN (Wide Area Network), a telephone network (such as a mobile phone network or a fixed telephone network), a regional IP (Internet Protocol) network, the Internet, or the like.

[0024] The structure of the production system 1 does not need to be limited to Figure 1 the example shown, and may also include other apparatuses other than the first apparatus 30 and the second apparatus 40. Additionally, in Figure 1 the example shown, the number of the first apparatuses 30-1 to 30-4 is the same as the number of the second apparatuses 40-1 to 40-4, but they do not necessarily have to be the same.

[0025] The workpiece is, for example, a circular semiconductor wafer with a base material such as silicon. The front surface of the workpiece is divided into a plurality of small regions by grid-shaped dicing lines, and devices such as ICs (Integrated Circuits) and MEMS (Micro Electro Mechanical Systems) are respectively formed in the plurality of small regions. The workpiece is supported, for example, via an adhesive tape (such as a dicing tape) 34 adhered to the back surface by a ring-shaped frame surrounding the workpiece.

[0026] In addition, the workpiece can be an optical device wafer, a packaged resin substrate, a ceramic substrate, a glass substrate, etc. with sapphire, SiC (silicon carbide), etc. as the base material, and there are no particular restrictions on the material, shape, structure, size, etc. Similarly, there are no particular restrictions on the type, quantity, shape, structure, size, arrangement, etc. of the devices. In addition, devices may not be formed on the workpiece.

[0027] An information medium is provided on the workpiece, and this information medium records, for example, the lot number assigned according to the production unit and the identification information assigned according to the workpiece unit. The information medium can be a two-dimensional bar code or two-dimensional code, or an RF tag such as an RFID (Radio Frequency Identification).

[0028] The management server 10 manages a plurality of processes related to the production of the workpiece through the transfer unit 20, the first devices 30-1 to 30-4, and the second devices 40-1 to 40-4. The management server 10 is connected to the communication network 2 and can communicate with the transfer unit 20, the first devices 30-1 to 30-4, and the second devices 40-1 to 40-4 via the communication network 2.

[0029] The transfer unit 20 is connected to the communication network 2 and can communicate with the management server 10 via the communication network 2. The transfer unit 20 transfers the workpieces one by one to the devices at the transfer destination. The transfer unit 20 transfers the workpieces processed by the first devices 30-1 to 30-4 one by one to the second devices 40-1 to 40-4 according to the control signal of the management server 10.

[0030] The first devices 30-1 to 30-4 respectively perform the same process (the first process) of processing the workpiece. The second devices 40-1 to 40-4 respectively perform the same process (the second process) of processing the workpiece. The second devices 40-1 to 40-4 perform the second process that follows the first process performed on the workpiece by the first devices 30-1 to 30-4.

[0031] Illustrate the combination of the first process implemented by the first device 30 and the second process implemented by the second device 40. For example, consider the following cases: In the first device 30, perform the processing of the first process of picking up the workpiece, and subsequent to the processing of the first process, in the second device 40, perform the processing of the second process of wire bonding the chip to the substrate. In addition, consider the following cases: In the first device 30, perform the processing of the first process of forming a cutting groove on the front surface of the workpiece, and subsequent to the first process, in the second device 40, perform the processing of the second process of grinding the back surface of the workpiece to divide it into chips. In addition, consider the following cases: In the first device 30, perform the processing of the first process of grinding the back surface of the workpiece to divide it into chips, and subsequent to the processing of the first process, in the second device 40, perform the processing of the second process of picking up the divided chips.

[0032] Figure 2 It is a schematic diagram showing a functional structure example of the production system of the embodiment. In Figure 2 this, focus on the second device 40-1 among the plurality of second devices 40-1 to 40-4, and illustrate the case of transporting the workpiece from the first devices 30-1 to 30-4 to the second device 40-1.

[0033]

Management Server 10

[0034] The management server 10 has a communication unit 11, a storage unit 12, and a control unit 13, and executes various processes related to the management of the production process in the production system 1 through these units.

[0035] The communication unit 11 is connected to the communication network 2 by wire or wirelessly, or a combination of wire and wireless, and communicates with the transfer unit 20, the first device 30, and the second device 40 via the communication network 2. The communication unit 11 is implemented by, for example, a NIC (Network Interface Card).

[0036] The storage unit 12 stores programs that implement various functions such as the various processes executed by the control unit 13 and data used in the processes based on the programs. The storage unit 12 is implemented by an HDD (Hard Disk Drive), a semiconductor memory, etc. When the processor included in the control unit 13 executes the commands described in the program, the storage unit 12 can be used as a temporary work area.

[0037] The storage unit 12 has a recording unit 12-1. The recording unit 12-1 records, for example, which workpiece is processed in which first device 30 from the first process to the second process. Figure 3 It is a diagram showing an outline of the information stored in the recording unit of the embodiment.

[0038] The information recorded in the recording unit 12-1 is constituted by correlating the lot number given to the workpiece, the identification information given to the workpiece, the information of the first device 30 that has performed the first process on the workpiece, and the information of the second device 40 that has performed the second process on the workpiece. The lot number given to the workpiece is information uniquely given to the workpiece for each production unit. The identification information given to the workpiece is information uniquely given to each workpiece. The information of the first device 30 that has performed the first process is information uniquely assigned to the first devices 30-1 to 30-4. The information of the second device 40 that has performed the second process is, for example, information uniquely assigned to each of the second devices 40-1 to 40-4. In Figure 3 the example shown in: for the workpiece marked with the lot number: "L001" and the identification information: "abc101", the first device 30-1 performs the first process on it, and the second device 40-1 performs the second process on it. That is, the information capable of tracing which process is performed by which device in the production process of producing the workpiece in the production system 1 is recorded in the recording unit 12-1.

[0039] The control unit 13 has: an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit); a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory); and an input / output interface device. The control unit 13 is a computer that realizes or executes the functions and roles of various processes of the management server 10 through the above-mentioned respective parts.

[0040] The functions and the like of various processes of the control unit 13 are realized, for example, by the functions provided by the programs stored in the storage device. That is, the control unit 13 is realized by the arithmetic processing device executing the programs stored in the storage device with the RAM or the like as the work area. The functional structure of the control unit 13 does not need to be particularly limited to Figure 2 the structural example shown, and other structures may also be used as long as they can perform various processes in the management server 10.

[0041] The control unit 13 controls the transfer unit 20, the first device 30, the second device 40, and the recording unit 12-1.

[0042] The control unit 13 controls the transfer of the workpiece performed by the transfer unit 20 by sending a control signal to the transfer unit 20. The control unit 13 sends a control signal to the transfer unit 20 according to the lot number received from the first device 30 so as to transfer the workpieces one by one from the first device 30 to the second device 40 in units of lot numbers.

[0043] In addition, the control unit 13 controls the execution of the first process in the first device 30 by sending a control signal to the first device 30. Similarly, the control unit 13 controls the execution of the second process in the second device 40 by sending a control signal to the second device 40.

[0044] In addition, the control unit 13 records, in the recording unit 12-1, information such as which workpiece is processed in which first device 30 in the first process to the second process, based on the lot number and identification information of the workpiece received from the first device 30 and the second device 40. For example, the control unit 13 matches the lot number and identification information received from the first device 30 and the second device 40 respectively. Thereby, the control unit 13 determines which first device 30 and second device 40 perform the processing of the first process on the same workpiece and the processing of the second process after the first process respectively. Based on the determination result, the control unit 13 records the information for tracking the production process in the recording unit 12-1.

[0045] In addition, when the control unit 13 obtains the lot number and identification information of the workpiece that has been processed in the first process from the first device 30, the control unit 13 sends the lot number and identification information of the workpiece together with the information of the first device 30 from the first device 30 to the second device 40.

[0046]

Transfer Unit 20

[0047] The transfer unit 20 includes a communication unit 21, a storage unit 22, and a control unit 23.

[0048] The communication unit 21 is connected to the communication network 2 by wire or wirelessly, or a combination of wire and wireless, and communicates with the management server 10 via the communication network 2. The communication unit 21 is implemented by, for example, a NIC (Network Interface Card).

[0049] The storage unit 22 stores programs that implement various processing functions executed by the control unit 23 and data used in the processing based on the programs. The storage unit 22 is installed by an HDD (Hard Disk Drive) or a semiconductor memory, etc. The storage unit 22 can also be used as a temporary work area when the processor included in the control unit 33 executes commands described in the program.

[0050] The control unit 23 includes: an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit); a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory); and an input / output interface device. The control unit 33 is a computer that implements or executes the functions and actions of various processes of the transfer unit 20 through the above-described respective devices.

[0051] The control unit 23 conveys the workpiece from the first device 30 to the second device 40 according to the control signal received from the management server 10.

[0052]

First device 30

[0053] The first device 30-1 performs the processing of the first process on the workpiece. As Figure 2 shown, the first device 30-1 includes a communication unit 31, a storage unit 32, and a control unit 33. In addition, the first device 30-1, the first device 30-2, the first device 30-3, and the first device 30-4 each have the same structure.

[0054] The communication unit 31 is connected to the communication network 2 by wire or wirelessly, or a combination of wire and wireless, and communicates with the management server 10 via the communication network 2. The communication unit 31 is implemented by, for example, a NIC (Network Interface Card).

[0055] The storage unit 32 stores programs for implementing functions such as various processes executed by the control unit 33 and data used in the processes based on the programs. The storage unit 32 is installed by an HDD (hard disk drive), a semiconductor memory, etc. The storage unit 32 can be used as a temporary work area when the processor included in the control unit 33 executes the commands described in the program.

[0056] The control unit 33 includes: an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit); a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory); and an input / output interface device. The control unit 33 is a computer that implements or executes the functions and actions of various processes of the first device 30-1 through the above-described respective devices.

[0057] The control unit 33 controls a processing unit (not shown) etc. according to a request based on a control signal from the management server 10, and processes the workpiece carried in through a first process.

[0058] In addition, the control unit 33 reads the lot number and identification information from an information medium provided on the workpiece that has undergone the first process, and sends the obtained lot number and identification information to the management server 10. The first device 30-1 may have a reading unit that provides a reading function for reading the lot number and identification information from the information medium provided on the workpiece.

[0059]

Second device 40

[0060] The second device 40-1 processes the workpiece carried in through a second process after the first process. As Figure 2 shown, the second device 40-1 has a communication unit 41, a storage unit 42, and a control unit 43. In addition, the second device 40-1, the second device 40-2, the second device 40-3, and the second device 40-4 each have the same structure.

[0061] The communication unit 41 is connected to the communication network 2 by wire or wirelessly, or a combination of wire and wirelessly, and communicates with the management server 10 via the communication network 2. The communication unit 41 is implemented, for example, by a NIC (Network Interface Card).

[0062] The storage unit 42 stores programs for implementing various functions such as processing executed by the control unit 43 and data used in the processing based on the programs. The storage unit 42 is installed by an HDD (hard disk drive), a semiconductor memory, etc. The storage unit 42 can also be used as a temporary work area when a processor included in the control unit 43 executes commands described in the program.

[0063] The storage unit 42 has an inspection result storage unit 42-1 and a determination result storage unit 42-2. Figure 4 It is a diagram showing an outline of information stored in the inspection result storage unit of the embodiment. Figure 5 It is a diagram showing an outline of information stored in the determination result storage unit of the embodiment.

[0064] Stored in Figure 4The information in the inspection result storage unit 42-1 shown is constituted by correlating the information of the first device 30 that has performed the first process, the lot number of the workpiece, the identification number of the workpiece, and information on defects such as whether there are processing defects. For example, the information of the first device 30 that has executed the first process is the information uniquely assigned to the first devices 30-1 to 30-4. The lot number is the information uniquely given to the workpiece for each production unit. The identification information of the workpiece is the information uniquely given to each workpiece. The information on whether there are processing defects is the information indicating whether processing defects or other defects have been found on the workpiece in the inspection by the inspection unit 43-1 described below. "Yes" indicates the existence of processing defects or other defects, and "No" indicates the absence of processing defects or other defects.

[0065] Figure 5 The information stored in the determination result storage unit 42-2 shown is constituted by correlating the lot number given to the workpiece and the information of the first device 30 that has performed the first process on the workpiece with the highest error rate. The error rate is equivalent to the proportion of workpieces in which certain defects such as processing defects are found in the second process. In Figure 5 the example shown indicates that among the first devices 30-1 to 30-4 that have performed the first process on the workpiece with the lot number: "L001", the error rate of the workpiece processed by the first device 30-2 in the first process is the highest.

[0066] The control unit 43 includes: an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit); a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory); and an input / output interface device. The control unit 43 is a computer that realizes or executes the various processing functions and roles of the second device 40-1 through the above-mentioned various devices.

[0067] The control unit 43 controls a processing unit (not shown) and the like according to a request based on a control signal from the management server 10, and performs processing of the second process that is continuous with the first process on the workpiece carried in.

[0068] In addition, the control unit 43 reads the lot number and identification information from the information medium provided on the workpiece that has undergone the second process, and sends the obtained lot number and identification information to the management server 10. The control unit 43 may have a reading unit that provides a reading function for reading the lot number and identification information from the information medium provided on the workpiece.

[0069] In addition, as Figure 2As shown in the figure, the control unit 43 has an inspection unit 43-1, a determination unit 43-2, and a notification unit 43-3, and performs various processes of the second device 40-1 through these units.

[0070] The inspection unit 43-1 inspects the workpiece and detects defects. Specifically, when the inspection unit 43-1 performs the processing of the second process on each workpiece of the same lot number carried in by the transfer unit 20, it inspects whether there are certain defects such as processing defects. As the defects detected by the inspection unit 43-1, for example, chip breakage found when performing wire bonding, which is the processing of the second process, on the chips picked up by the first device 30 as the processing of the first process can be cited. In the inspection unit 43-1, the inspection of the workpiece is carried out for each same lot number in order to compare the inspection results with each other in a state where the quality deviation in the production unit of the workpiece is excluded.

[0071] Based on the information of the first device 30 received from the management server 10, the lot number of the workpiece, and the identification number, the inspection unit 43-1 can determine which of the devices 30-1 to 30-4 of the first device 30 performed the processing of the first process on the workpiece to be inspected. That is, the inspection unit 43-1 determines the first device 30 that performed the processing of the first process on the workpiece to be inspected by comparing the lot number and identification information read from the workpiece to be inspected with the lot number and identification information received from the management server 10. The inspection unit 43-1 stores the inspection result of the workpiece (refer to Figure 4 ) in the inspection result storage unit 42-1 for each first device 30.

[0072] The determination unit 43-2 determines which first device 30 has more defective workpieces among the processed workpieces. Figure 6 It is a figure showing an example of the error rate of the embodiment. The determination unit 43-2 obtains the inspection results of each of the first devices 30-1 to 30-4 from the inspection result storage unit 42-1, and as Figure 6 shown, calculates the error rate for each of the first devices 30-1 to 30-4, and this error rate represents the proportion of workpieces in which defects were detected by the inspection unit 43-1. The determination unit 43-2 stores the information of, for example, the first device 30 with the highest error rate in the determination result storage unit 42-2 corresponding to the lot number of the workpiece. In addition, the determination unit 43-2 is not particularly limited to the case of storing the information of the first device 30 with the highest error rate, and may record, for example, the information of all first devices 30 whose error rate exceeds a specified standard corresponding to the lot number of the workpiece.

[0073] The notification unit 43-3 notifies the determination result of the determination unit 43-2. The notification unit 43-3 obtains the determination result stored in the determination result storage unit 42-2 and notifies the obtained determination result to the operator. For example, the notification unit 43-3 notifies that in the processing of the second process of the workpiece with the lot number: "L001", the error rate of the workpiece processed in the first process by the first device 30-2 is high. The notification unit 43-3 can notify the determination result to the touch panel (not shown) of the second device 40-1, or can send the determination result to the management server 10 via the communication unit 41.

[0074] Reference Figure 7 Describe an example of the processing of the second device in the embodiment. Figure 7 It is a flowchart showing an example of the sequence of the processing of the second device in the embodiment. Figure 7 The processing shown is executed by each part included in the control unit 43.

[0075] As Figure 7 As shown, the determination unit 43-2 determines whether the inspection of the workpieces given the same lot number, which is sequentially performed in the inspection unit 43-1, is completed (step S101).

[0076] When the determination unit 43-2 determines that the inspection of the workpieces given the same lot number in the inspection unit 43-1 is not completed (step S101; No), it repeats the determination in step S101.

[0077] When the determination unit 43-2 determines that the inspection of the workpieces given the same lot number in the inspection unit 43-1 is completed (step S101; Yes), it calculates the error rate for each first device 30 in which the first process has been performed on the workpieces (step S102).

[0078] Next, the determination unit 43-2 determines in which first device 30 there are many defective products in the workpieces processed therein based on the error rate calculated in step S102 (step S103).

[0079] The notification unit 43-3 notifies the determination result of the determination unit 43-2 (step S104), and ends Figure 7 the processing shown.

[0080] As described above, the production system 1 according to the present embodiment includes a plurality of first devices 30, second devices 40, a recording unit 12-1, and a control unit 13. The plurality of first devices 30 perform the processing of the first process on the workpiece. The second device 40 performs the processing of the second process after the first process on the workpiece. The recording unit 12-1 records which workpiece is processed by which first device 30 from the first process to the second process. The control unit 13 controls the first device 30, the second device 40, and the recording unit 12-1. The second device 40 includes: an inspection unit 43-1 that inspects the workpiece to detect defects; a determination unit 43-2 that determines which first device 30 has processed a large number of defective workpieces; and a notification unit 43-3 that notifies the determination result of the determination unit 43-2.

[0081] Thus, according to the production system 1, even if an abnormality that cannot be detected by the first device 30 that performs the processing of the first process occurs, it can be detected by the second device 40 that performs the processing of the next second process following the first process.

[0082] Moreover, according to the production system 1, based on the information stored in the recording unit 12-1, it is possible to determine which first device 30 and which second device 40 are respectively used to perform the processing of the first process on the same workpiece and the processing of the second process after the processing of the first process. Therefore, when performing the processing of the second process on the workpiece that has been processed by the first device 30 in the first process, if the defects detected by the second device 40 are biased towards a specific first device 30, the possibility of defective processing of the workpiece can be predicted.

[0083] Thus, according to the production system 1, abnormalities in the production process can be detected efficiently.

[0084] In addition, in the production system 1 of the embodiment, there is also a transfer unit 20 that transfers the workpiece from the first device 30 to the second device 40, and the control unit 13 controls the transfer unit 20. Thus, the production system 1 can efficiently control the transfer of the workpiece from the first device 30 to the second device 40.

[0085] As the processing of the production system 1 of the above embodiment, in the case where the same pre-process is performed on each workpiece given the same lot number by different multiple devices and then the post-process is performed by one device, more efficient operation can be expected. In addition, in the above embodiment, for example, regarding the determination by the second device 40 of which first device 30 has processed a large number of defective workpieces, when the number of workpieces in the same lot is small and it is impossible to gather sufficient samples for calculating the error rate of each first device 30 as the determination material (inspection data), it can also be performed after processing a larger number of batches and gathering sufficient samples.

[0086] The processing of the production system 1 of the above-described embodiment is particularly easily applicable to a case where workpieces of the same lot number that have been processed in the first process by a plurality of first devices 30 are collectively transferred into one second device 40 that performs the processing of the second process that follows the first process, and the like. In addition, the processing of the production system 1 of the above-described embodiment is suitable for a system that performs a series of processes on workpieces of the same batch, but is also equally applicable to a system that performs a series of processes on workpieces of the same device or the same product.

Claims

1. A production system, wherein, the production system has: a plurality of first devices that perform the same first process on the workpiece; a plurality of second devices that perform the same second process on the workpiece after the first process; a recording unit that records which of the workpieces is processed by which of the plurality of first devices from the first process to the second process; and a control unit that controls the first device, the second device, and the recording unit, each of the second devices includes: an inspection unit that inspects the workpiece to detect defects; a determination unit that determines which of the workpieces processed by which of the plurality of first devices has more defects; and a notification unit that notifies the determination result of the determination unit.

2. The production system according to claim 1, wherein, the production system further has a transfer unit that transfers the workpiece from any one of the plurality of first devices to any one of the plurality of second devices, and the control unit controls the transfer unit.

Images