Sealing disc for vacuum sealing

Abstract

A sealing disc for vacuum sealing is suitable for reciprocating to an open position or a closed position to open or seal the valve port of an all-metal valve. The sealing plate of the sealing disc is formed with a first sealing surface, and the sealing disc directly abuts the valve port of the all-metal vacuum valve with the first sealing surface in the closed position. The present invention can improve the vacuum sealing performance and extend the service life by the compensating movement and adjusting movement when the sealing surfaces of metal materials abut each other.

Description

Technical Field

[0001] The present invention relates to a sealing disc, and in particular to a sealing disc for vacuum sealing. Background Art

[0002] Most traditional vacuum valves use rubber elastic materials commonly known as O-rings as sealing components between the valve plate and the valve body. Since O-rings achieve the required sealing effect through extrusion deformation, they are only suitable for valve bodies that do not require high sealing properties. Therefore, this type of sealing component cannot be used in high vacuum systems and cannot be used in high temperature environments.

[0003] Although some high vacuum systems use all-metal valves to replace rubber sealing components, the sealing surface is formed by the contact between two metal layers. Therefore, the closing force applied needs to increase with the increase in the number of valve openings and closings, and its service life will be shortened. In addition, the dimensional changes of the metal layer caused by heating or cooling will cause relative movement between the two metal layers and cause shear deformation, thereby destroying the sealing surface. Summary of the invention

[0004] In view of this, an object of the present invention is to provide a sealing disc for vacuum sealing, which can be applied to an ultra-high vacuum system to solve the above-mentioned problems of the conventional technology.

[0005] To achieve the aforementioned objectives, the present invention provides a sealing disc for vacuum sealing, which is suitable for reciprocatingly moving to an open position or a closed position to open or seal a valve port of a metal material of a vacuum valve, the sealing disc at least comprising: a base having a first surface; and a sealing plate, the sealing plate being ring-connected to the base, wherein the sealing disc in the closed position simultaneously withstands a closing force applied from the inside of the vacuum valve and an atmospheric pressure applied from the outside of the vacuum valve, so that a first sealing surface of the sealing plate directly abuts a second sealing surface in the valve port of the vacuum valve, and the first sealing surface can simultaneously rotate relative to the second sealing surface with the application of the closing force and the atmospheric pressure to maintain the vacuum sealing of the valve port.

[0006] Wherein, the sealing plate is a bent plate, a corrugated plate or an arc-shaped plate.

[0007] The sealing plate comprises: a first wing plate, which is connected to the base at a first ring joint and extends outward at a first angle relative to an annular surface of the first ring joint in a direction away from the first ring joint; and a second wing plate, which is connected to the first wing plate at a second ring joint and extends outward at a second angle relative to the first wing plate in a direction away from the first surface of the base, so that a third angle is formed between the second wing plate and the annular surface of the first ring joint, wherein the first sealing surface is located on the end edge of the second wing plate.

[0008] The closing force is directly applied to the second ring joint where the second wing plate is connected to the first wing plate and the base at the same time.

[0009] The closing force is directly applied to the base and then indirectly applied to the sealing plate via the base.

[0010] Among them, the angle value of the first angle is between 5 degrees and 45 degrees, the angle value of the third angle is between 5 degrees and 45 degrees, and the sum of the angle values ​​of the first angle, the second angle and the third angle is 180 degrees.

[0011] The base has a second surface opposite to the first surface, and a positioning member is provided on the second surface for positioning the sealing disc relative to the valve port of the vacuum valve when the sealing disc is assembled on the vacuum valve.

[0012] Wherein, the first sealing surface of the sealing plate is an arc surface or a spherical surface.

[0013] Wherein, the first sealing surface of the sealing plate is a surface that has been lubricated and polished.

[0014] Wherein, the sealing plate is made of metal.

[0015] Among them, the vacuum valve is an all-metal valve.

[0016] Among them, the vacuum valve is an all-metal high-frequency shielded gate valve.

[0017] Wherein, the sealing plate is integrally connected to the base.

[0018] The sealing plate is detachably connected to the base.

[0019] To achieve the aforementioned objectives, the present invention further proposes a sealing disc, which is suitable for reciprocatingly moving to an open position or a closed position to open or seal a valve port of a valve body, and is characterized in that an outer edge of a sealing plate of the sealing disc has a first sealing surface, and the sealing disc only rotatably abuts against a second sealing surface in the valve port of the valve body with the first sealing surface in the closed position to vacuum seal the valve port, and the sealing plate is a bent plate, a corrugated plate or an arc-shaped plate.

[0020] The sealing plate comprises: a first wing plate, which is connected to a base at a first ring joint and extends outward at a first angle relative to an annular surface of the first ring joint in a direction away from the first ring joint; and a second wing plate, which is connected to the first wing plate at a second ring joint and extends outward at a second angle relative to the first wing plate in a direction away from a first surface of the base, so that a third angle is formed between the second wing plate and the annular surface of the first ring joint, wherein the first sealing surface is located on the end edge of the second wing plate.

[0021] The base is connected to a supporting member, and a closing force is applied to the second ring joint where the second wing plate is connected to the first wing plate and / or the base via the supporting member.

[0022] Among them, the angle value of the first angle is between 5 degrees and 45 degrees, the angle value of the third angle is between 5 degrees and 45 degrees, and the sum of the angle values ​​of the first angle, the second angle and the third angle is 180 degrees.

[0023] The first sealing surface of the sealing plate is a surface that has been lubricated and polished.

[0024] Wherein, the sealing plate is made of metal.

[0025] Wherein, the valve body is a vacuum valve.

[0026] Among them, the valve body is an all-metal vacuum valve.

[0027] In summary, the sealing disc for vacuum sealing of the present invention has the following advantages:

[0028] (1) The sealing disc can directly contact the valve port of the vacuum valve with the first sealing surface on the sealing plate to achieve a vacuum sealing effect, and even an ultra-high vacuum sealing effect, without the need for additional gaskets or spacers.

[0029] (2) The sealing disc will not release gas in an ultra-high vacuum environment, so it can be used in valve bodies with high specifications, such as all-metal high-frequency shielded gate valves.

[0030] (3) Even in an ultra-high vacuum environment, the sealing disc can still withstand the closing force applied to the sealing disc from the inside of the vacuum valve and the atmospheric pressure applied to the sealing disc from the outside of the vacuum valve, and can also maintain vacuum sealing properties.

[0031] (4) The first sealing surface of the sealing plate can rotate relative to the second sealing surface and always maintain contact, thereby providing a lubrication effect when the metal sealing surfaces abut against each other, and also providing compensating movement and adjusting movement, thereby improving the sealing performance and extending the service life.

[0032] In order to enable you to have a further understanding and recognition of the technical features and technical effects of the present invention, preferred embodiments and detailed descriptions are provided as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is a top perspective schematic diagram of a sealed disc according to a preferred embodiment of the present invention.

[0034] Figure 2 It is a bottom view schematically showing a sealed disc according to a preferred embodiment of the present invention.

[0035] Figure 3 It is a cross-sectional schematic diagram of a sealing disc of a preferred embodiment of the present invention.

[0036] Figure 4 It is a cross-sectional schematic diagram of a sealing disc in an open position according to a preferred embodiment of the present invention.

[0037] Figure 5 It is a cross-sectional schematic diagram of the sealing disc in the closed position of the preferred embodiment of the present invention.

[0038] in:

[0039] 10: Sealed disc

[0040] 20: Base

[0041] 21: Screw hole

[0042] 22: First Surface

[0043] 24: Second Surface

[0044] 26: Positioning piece

[0045] 30: Sealing plate

[0046] 32: First sealing surface

[0047] 34: First wing

[0048] 35: First ring connection

[0049] 36: Second wing

[0050] 37: Second ring connection

[0051] 100: Vacuum valve

[0052] 102: Valve port

[0053] 104: Second sealing surface

[0054] 110: Bearing

[0055] 114: Storage tank

[0056] A1: First angle

[0057] A2: Second angle

[0058] A3: The third angle

[0059] F: Closing force DETAILED DESCRIPTION

[0060] In order to facilitate understanding of the technical features, contents and advantages of the present invention and the effects that can be achieved, the present invention is hereby described in detail in the form of embodiments in conjunction with the drawings. The drawings used therein are only for illustration and auxiliary description purposes, and may not be the actual proportions and precise configurations after the implementation of the present invention. Therefore, the proportions and configurations of the attached drawings should not be interpreted or limited to the scope of rights of the present invention in actual implementation. In addition, for ease of understanding, the same components in the following embodiments are described with the same symbols.

[0061] The sealing disc for vacuum sealing of the present invention is suitable for reciprocating to the open position or closed position of the vacuum valve to open or seal the valve port of the vacuum valve. The vacuum valve applicable to the present invention is an all-metal valve (All-MetalValve), such as an all-metal high-frequency shielded gate valve, and its vacuum degree can reach the ultra-high vacuum level, so as to illustrate the high sealing performance and structural strength of the sealing disc of the present invention. However, the vacuum valve applicable to the present invention is not limited to the gate valve, but can also be, for example, an angle valve, a pendulum valve or various types of valves. The above-mentioned vacuum valve can be, for example, a metal valve, that is, a metal material valve, and preferably an all-metal valve, wherein the valve port is preferably made of metal material. The sealing disc of the present invention can also be applied to valve bodies of various materials according to actual use conditions, so it is not limited to metal valves. The sealing disc of the present invention can be, for example, a single-side sealing type or a double-side sealing type. Taking the single-side sealing type as an example, it includes a sealing plate and a base connected in one piece. The sealing disc of the present invention can also be, for example, a double-side sealing type, which is composed of a sealing plate.

[0062] In detail, Figures 1 to 5As shown, the preferred embodiment of the present invention is a single-side sealing type sealing disc as an example. The sealing disc 10 of the present invention is suitable for opening or sealing the valve port 102 of the vacuum valve 100. The vacuum valve 100 can be, for example, but not limited to, a full metal high-frequency shielding gate valve. The sealing disc 10 of the present invention includes a base 20 and a sealing plate 30 connected in one piece. The material of the base 20 and the sealing plate 30 is, for example, but not limited to, a metal material such as stainless steel or spring steel. The first surface 22 of the first side of the base 20 of the sealing disc 10 is used to connect the carrier 110, and the carrier 110 is, for example, connected to the driving component (not shown) of the vacuum valve 100, so as to reciprocate the sealing disc 10 to the open position or the closed position to open or seal the valve port 102 of the vacuum valve 100. However, the present invention is not limited to this, and the present invention can also omit the carrier 110, that is, the sealing disc 10 can selectively be directly connected to the driving component of the vacuum valve 100. In addition, the carrier 110 may also be, for example, a component of a driving component of the vacuum valve 100. The outer shape of the base 20 is, for example, but not limited to, a cylinder. The type of this carrier 110 may be, for example, but not limited to, a carrier plate, a shaft rod or a connecting rod that can be connected to the sealing disc 10. The carrier 110 may be, for example, connected to the first surface 22 of the base 20 of the sealing disc 10 by screwing, so the first surface 22 of the base 20 may, for example, but not limited to, have one or more screw holes 21. The depth of the screw hole 21 is preferably not to penetrate the base 20. In addition, the surface of the carrier 110 may, for example, be penetrated by a corresponding number of screw holes (not shown). Taking the carrier 110 as a carrier plate as an example, the carrier 110 preferably has a receiving groove 114 to receive the first side of the base 20. The surface of the receiving groove 114 of the carrier 110 preferably contacts the first surface 22 of the base 20.

[0063] In addition, the second side of the base 20 of the sealing disc 10 has a second surface 24 opposite to the first surface 22. The second surface 24 of the base 20 may selectively have a positioning member 26, such as but not limited to a positioning groove. If the second surface 24 of the base 20 of the sealing disc 10 has a positioning member 26, during the process of assembling the sealing disc 10 on the vacuum valve 100, a tool such as a jig may be inserted into the positioning member 26 to position the sealing disc 10 relative to the valve port 102 of the vacuum valve 100. For example, the central axis of the positioning member 26 is preferably the same as the central axis of the base 20 and the sealing disc 10. When the sealing disc 10 seals the valve port 102 of the vacuum valve 100, the central axis of the sealing disc 10 is, for example, coaxially aligned with the central axis of the valve port 102.

[0064] In a preferred embodiment of the present invention, the sealing plate 30 of the sealing disc 10 is integrally connected to the side edge of the first side or the second side of the base 20, and the sealing plate 30 is preferably integrally connected to the side edge of the second side of the base 20. The sealing plate 30 has a first sealing surface 32, and the first sealing surface 32 can be located at any position of the sealing plate 30, wherein the first sealing surface 32 is preferably located at the outer edge of the sealing plate 30. The valve port 102 has a second sealing surface 104, and is preferably located at the inner side of the valve port 102. In terms of appearance, the cross-sectional shape of the sealing plate 30 of the sealing disc 10 can be, for example, a bent plate, a corrugated plate, or an arc plate, which can increase the structural strength and structural rigidity, that is, increase the structural toughness, so that the sealing disc 10 becomes a tough structure that retains both strength and rigidity, but the present invention is not limited thereto, and the cross-sectional shape of the sealing plate 30 can also be, for example, a flat plate. When the sealing disc 10 of the present invention is used for vacuum sealing, the sealing disc 10 of the present invention can not only withstand the closing force F applied to the sealing disc 10 from the inside of the vacuum valve 100, but also withstand the atmospheric pressure applied to the sealing disc 10 from the outside of the vacuum valve 100 when the vacuum valve 100 is in a vacuum state. When the vacuum level of the vacuum valve 100 is higher, the above-mentioned closing force F and atmospheric pressure will be higher accordingly. For example, when the sealing disc 10 is a stainless steel metal with a thickness of about 1.8 mm, the closing force F that can be borne can reach about 500 kg, and when evacuated, its vacuum degree can reach about 7.33x10 -11 Since the present invention is applicable to the all-metal high-frequency shielding gate valve installed in the electron beam channel of the superconducting accelerator, it is obvious that the various functions and indicators of the sealing disc 10 of the present invention, such as sealing, cleanliness and structural strength, do meet the specification requirements of the ultra-high vacuum valve body.

[0065] The sealing plate 30 of the sealing disc 10 of the present invention, for example, includes a first wing plate 34 and a second wing plate 36 connected in one piece. The first wing plate 34 and / or the second wing plate 36 may be, for example, but not limited to, a flat plate, an arc-shaped plate or a bent plate. Taking the flat plate shown in the figure as an example, the inclination direction of the first wing plate 34 is different from that of the second wing plate 36. The first wing plate 34 is connected to the base 20 at the first annular joint 35 and extends outwardly at a first angle A1 relative to the annular surface of the first annular joint 35 in a direction away from the first annular joint 35. The second wing plate 36 is connected to the first wing plate 34 at the second annular joint 37 and extends outwardly at a second angle A2 relative to the first wing plate 34 in a direction away from the first surface 22 of the base 20, so that the second wing plate 36 and the annular surface of the first annular joint 35 form a third angle A3, wherein the first sealing surface 32 is located on the end edge of the second wing plate 36.

[0066] When the carrier 110 is connected to the first surface 22 of the base 20 of the sealing disc 10 and the closing force F is applied to the carrier 110, the closing force can be applied to the first surface 22 of the base 20 and / or the sealing plate 30 through the carrier 110, so that the sealing disc 10 is in the closed position with the first sealing surface 32 of the sealing plate 30 abutting against the second sealing surface 104 in the valve port 102 of the vacuum valve 100. The first sealing surface 32 is, for example, in line contact with the second sealing surface 104. The surface morphology of the first sealing surface 32 is, for example, but not limited to, a circular arc surface or a spherical surface. The second sealing surface 104 can be, for example, but not limited to, an inclined surface, a circular arc surface or a spherical surface. When the sealing disc 10 enters the closed position from the open position, the first sealing surface 32 can contact the second sealing surface 104, and even if the closing force F applied from the inside of the vacuum valve 100 causes the sealing disc 10 to slightly deform elastically, the first sealing surface 32 can still rotate (toward or away from the valve port 102) to abut the second sealing surface 104.

[0067] In addition, when the vacuum degree of the vacuum valve is in the closed position, as the air is drawn out, the closing force F applied from the inside of the vacuum valve 100 will push the sealing disc 10 to the outside of the vacuum valve, and the atmospheric pressure applied from the outside of the vacuum valve will also push the sealing disc 10 to the inside of the vacuum valve. Even if the sealing plate 30 is slightly elastically deformed, the first sealing surface 32 can rotate and abut the second sealing surface 104 with the applied closing force F and the atmospheric pressure. In other words, when the first sealing surface 32 of the sealing plate 30 directly abuts the second sealing surface 104 in the valve port 102 of the vacuum valve 100, the first sealing surface 32 of the arc surface or the spherical surface can be allowed to rotate relative to the second sealing surface 104, and the first sealing surface 32 can be kept abutting the second sealing surface 104, so as to constantly maintain the vacuum sealing performance. Therefore, the compensating movement and adjusting movement when the sealing surfaces of the metal material abut each other can improve the sealing performance and extend the service life, and can avoid the wear (Abrasion) caused by the collision between the metals.

[0068] The angle value of the first angle A1 is, for example, between 5 and 45 degrees, preferably between 10 and 25 degrees, and more preferably 15 degrees. The angle value of the third angle A3 is, for example, between 5 and 45 degrees, preferably between 10 and 25 degrees, and more preferably 15 degrees. The sum of the angle values ​​of the first angle A1, the second angle A2, and the third angle A3 is 180 degrees. Therefore, when the sealing disc 10 of the present invention is applied to vacuum sealing, the sealing plate 30 of the present invention can not only withstand the closing force F applied to the carrier 110 from the inside of the vacuum valve 100, but also withstand the atmospheric pressure applied to the outside of the vacuum valve 100 after the vacuum valve 100 is evacuated, and can also maintain the vacuum sealing property. In addition, taking the sealing plate 30 in the form of a bent plate as an example, the sealing plate 30 of the sealed disc 10 of the present invention is not limited to including a first wing plate 34 and a second wing plate 36 that are integrally connected. The sealing plate 30 may also, for example, further include another first wing plate connected to the above-mentioned second wing plate 36, and may also, for example, further include another second wing plate 36 connected to the above-mentioned another first wing plate, and so on.

[0069] As shown in the figure, when the carrier 110 is connected to the sealing disc 10, the carrier 110 can be connected to the base 20. The carrier 110 preferably abuts the sealing plate 30, and preferably abuts the second annular joint 37 of the second wing plate 36 and the first wing plate 34 and the base 20 at the same time, so that when the closing force F is applied to the carrier 110, the closing force F can be directly applied to the sealing plate 30 and the base 20 through the carrier 110 at the same time, so that the sealing disc 10 directly abuts the second sealing surface 104 of the valve port 102 of the vacuum valve 100 with the first sealing surface 32 in the closed position. In addition, if the carrier 110 does not abut the sealing plate 30, the closing force F can be indirectly applied to the sealing plate 30, for example, through the base 20. The thickness of the first wing plate 34 is, for example, but not limited to, the same as the thickness of the second wing plate 36. The projection length of the first wing plate 34 is, for example, but not limited to, the same as the projection length of the second wing plate 36. The projection length of the first wing plate 34 is approximately 0.8 to 1.5 times the projection length of the second wing plate 36. The projection length of the base 20 is approximately 2 to 5 times the projection length of the first wing plate 34. However, the above values ​​are only examples and are not intended to limit the present invention.

[0070] The first sealing surface 32 of the sealing plate 30 of the sealing disc 10 of the present invention can be selectively subjected to mechanical processing such as lubrication polishing, preferably using dry polishing technology, such as dry blasting technology or fluid-jet polishing technology, by spraying abrasive particles to reduce surface roughness and increase lubricity, so that the surface roughness (Ra) is preferably less than about 0.3 μm, and more preferably less than about 0.1 μm. The present invention is not limited to a specific type of polishing technology and material of abrasive particles, as long as the first sealing surface can have a surface roughness and lubricity that can vacuum seal the valve port, it can be applied to the present invention.

[0071] In another preferred embodiment of the present invention, the sealing disc can also be, for example, a double-sided sealing type. Compared with the single-sided sealing disc of the above preferred embodiment, the difference between the other preferred embodiment and the above preferred embodiment is that the double-sided sealing type sealing plate has a first sealing surface and a third sealing surface (not shown) on both sides, wherein the first sealing surface is used to seal the valve port of the vacuum valve, and the third sealing surface is used to abut against the fourth sealing surface (not shown) of the base. That is, the double-sided sealing type sealing plate of this other preferred embodiment is not integrally connected to the base. Among them, the material and shape of the third sealing surface are, for example, the same as the first sealing surface.

[0072] In summary, the sealing disc for vacuum sealing of the present invention has the following advantages:

[0073] (1) The sealing disc can directly contact the valve port of the vacuum valve with the first sealing surface on the sealing plate to achieve a vacuum sealing effect, and even an ultra-high vacuum sealing effect, without the need for additional gaskets or spacers.

[0074] (2) The sealing disc will not release gas in an ultra-high vacuum environment, so it can be used in valve bodies with high specifications, such as all-metal high-frequency shielded gate valves.

[0075] (3) Even in an ultra-high vacuum environment, the sealing disc can still withstand the closing force applied to the sealing disc from the inside of the vacuum valve and the atmospheric pressure applied to the sealing disc from the outside of the vacuum valve, and can also maintain vacuum sealing properties.

[0076] (4) The first sealing surface of the sealing disc can rotate relative to the second sealing surface and always maintain contact, thereby providing a lubrication effect when the metal sealing surfaces abut against each other, and also providing compensating movement and adjusting movement, thereby improving the sealing performance and extending the service life.

[0077] The above description is for illustrative purposes only and is not intended to be limiting. Any equivalent modifications or changes made thereto without departing from the spirit and scope of the present invention shall be included in the scope of the appended patent applications.

Claims

1. A sealing disc for vacuum sealing, adapted to be reciprocatedly moved to an open position or a closed position to open or seal a valve port of a metal material of a vacuum valve, the sealing disc comprising at least: a base having a first surface; and a sealing plate, the sealing plate is connected to the base in an annular manner, wherein the sealing disc is subjected to the closing force applied from the inside of the vacuum valve and the atmospheric pressure applied from the outside of the vacuum valve at the same time in the closed position, so that a first sealing surface of the sealing plate is rotatably abutted against a second sealing surface in the valve port of the vacuum valve simultaneously with the applied closing force and the atmospheric pressure, and the valve port is kept vacuum-sealed by the compensating movement and adjusting movement of the first sealing surface and the second sealing surface when they abut against each other, The sealing plate is composed of a first wing plate and a second wing plate. The first wing plate is connected to the base at a first ring joint and extends outwardly at a first angle relative to an annular surface of the first ring joint in a direction away from the first ring joint. The second wing plate is connected to the first wing plate at a second annular joint and extends outwardly at a second angle relative to the first wing plate in a direction away from the first surface of the base, so that a third angle is formed between the second wing plate and the annular surface at the first annular joint, wherein the first sealing surface is located on the end edge of the second wing plate, and the first sealing surface of the sealing plate is an arc surface, Features: The angle value of the first angle is 15 degrees, the angle value of the third angle is 15 degrees, and the sum of the angle values ​​of the first angle, the second angle, and the third angle is 180 degrees; and A projection length of the first wing plate is between 0.8 and 1.5 times of a projection length of the second wing plate, and a projection length of the base is between 2 and 5 times of the projection length of the first wing plate.

2. The sealed disc for vacuum sealing as claimed in claim 1, wherein the closing force is directly applied to the second ring joint where the second wing plate is connected to the first wing plate and the base at the same time.

3. The sealed disc for vacuum sealing as claimed in claim 1, wherein the closing force is directly applied to the base and indirectly applied to the sealing plate via the base.

4. A sealing disc for vacuum sealing as described in claim 1, wherein the base has a second surface opposite to the first surface, and the second surface is provided with a positioning member for positioning the sealing disc relative to the valve port of the vacuum valve during the process of assembling the sealing disc on the vacuum valve.

5. The sealed disc for vacuum sealing as claimed in claim 1, wherein the first sealing surface of the sealing plate is a surface treated with lubrication and polishing.

6. The sealed disc for vacuum sealing as claimed in claim 1, wherein the sealing plate is made of metal and the vacuum valve is an all-metal valve.

7. The sealed disc for vacuum sealing as claimed in claim 1, wherein the sealing plate is made of metal, and the vacuum valve is an all-metal high-frequency shielding gate valve.

8. The sealed disc for vacuum sealing as claimed in claim 1, wherein the sealing plate is integrally connected to the base.

9. The sealed disc for vacuum sealing as claimed in claim 1, wherein the sealing plate is detachably connected to the base.

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