A plasma cleaning machine

Abstract

The invention relates to a plasma cleaning machine, belonging to the technical field of plasma cleaning; the invention comprises a box body and a box door, the box body is divided into a plurality of cleaning chambers by an insulating isolation device, each cleaning chamber is provided with a storage frame, the storage frame is made of a conductive material, comprises a positive conductive half and a negative conductive half, the negative conductive half is electrically connected to the box body, the positive conductive half is electrically connected to the positive pole of a power supply outside the box body and is not in contact with the negative half, the storage frame is divided into a plurality of storage chambers by the positive conductive half and the negative conductive half, the box body and the box door are provided with a gas guide device, the gas guide device can supply and exhaust gas to each storage chamber; the invention provides a plasma cleaning machine, which has a simple and reasonable structure, high space utilization, convenient use and maintenance, uniform gas distribution, and good gas ionization and cleaning effects.

Description

Technical Field

[0001] The invention relates to a plasma cleaning machine and belongs to the technical field of plasma cleaning. Background Art

[0002] Plasma cleaning machines are commonly used in the semiconductor field and can clean lead frames, PCB boards, wafers, ceramics and other materials. The existing plasma cleaning machines have unreasonable structural design, small cleaning space and low efficiency. Plasma cleaning machines need to ionize the gas during operation to form plasma to clean the materials. The existing plasma cleaning machines have complex and redundant internal conductive circuits, occupy volume, and are very inconvenient for daily use and maintenance, which affects production efficiency and has high production costs. The existing plasma cleaning machines have a relatively concentrated airflow direction, uneven gas diffusion distribution, poor gas ionization effect, and poor cleaning effect. Summary of the invention

[0003] The purpose of the present invention is to overcome the deficiencies in the prior art and to provide a plasma cleaning machine with a simple and reasonable structure, high space utilization, convenient use and maintenance, uniform gas distribution, and good gas ionization and cleaning effects.

[0004] To achieve the above object, the present invention adopts the following technical solution:

[0005] A plasma cleaning machine comprises a box body and a box door. The box body is divided into a plurality of cleaning chambers by an insulating isolation device. A storage frame is arranged in each cleaning chamber. The storage frame is made of a conductive material and comprises a positive conductive half and a negative conductive half. The negative conductive half is electrically connected to the box body. The positive conductive half is electrically connected to the positive pole of a power supply outside the box body and is not in contact with the negative half. The storage frame is divided into a plurality of storage chambers by the positive conductive half and the negative conductive half. A gas guide device is arranged on the box body and the box door. The gas guide device can supply and exhaust gas to each storage chamber.

[0006] Furthermore, the gas diversion device includes an air intake device arranged on the door panel and an air extraction device arranged on the box body, the air intake device includes a plurality of air intake holes, each storage cavity corresponds to an air intake hole, the air extraction device includes a guide interlayer arranged on the opposite side of the air intake hole, the guide interlayer is arranged in the box body and connected to the outside of the box body, the guide interlayer includes two layers of guide plates, each guide plate is provided with a plurality of through air extraction holes distributed in an array, the aperture of the air extraction holes on the guide plate close to the cleaning cavity is smaller than the aperture of the air extraction holes on the other guide plate.

[0007] Furthermore, the insulating isolation device includes an isolation plate and a mounting seat, the mounting seat is arranged in the box body, the isolation plate and the mounting seat are detachably connected, a box door insulating plate is provided on the inner side of the box door, the guide interlayer is made of insulating material, a cleaning chamber is formed between the isolation plate, the box door insulating plate and the guide interlayer, and adjacent isolation plates share a mounting seat.

[0008] Furthermore, the air intake device includes an air intake pipeline arranged on the insulation board of the box door, a plurality of air intake holes are opened on the air intake pipeline, the air intake pipeline is connected with the air supply interface, the air supply interface is arranged on the box door and is connected with the external air supply machine;

[0009] The air intake pipeline includes two air intake cross pipes, an air intake vertical pipe arranged between the two air intake cross pipes, and a main air supply pipe for connecting the air intake cross pipes and the air supply interface. An air intake vertical pipe is provided in the middle position of the corresponding storage cavity, and the two ends of the air intake vertical pipe are respectively connected to an air intake cross pipe, and the two ends of the main air supply pipe are respectively connected to the middle position of the two air intake cross pipes, and the middle position of the main air supply pipe is connected to the air supply interface.

[0010] Furthermore, the positive conductive half includes a positive conductive top plate and a positive conductive wall plate, and the negative conductive half includes a negative conductive layer plate and a negative conductive wall plate. The positive conductive wall plate and the negative conductive wall plate are both arranged vertically. The outermost sides of the two ends of the storage frame are negative conductive wall plates. A positive conductive wall plate is arranged between two adjacent negative conductive wall plates. A horizontal positive conductive top plate is arranged on the top of the storage frame. The positive conductive top plate is electrically connected to each positive conductive wall plate. A negative conductive layer plate is horizontally arranged below the positive conductive top plate. The negative conductive layer plate is electrically connected to the negative conductive wall plate. The lowest negative conductive layer plate is electrically connected to the box. The negative conductive layer plate and the positive conductive top plate are connected through an insulating column. The box is grounded.

[0011] Furthermore, a positive conductive connecting plate is provided on the upper part of the box body, and the positive conductive top plate in each storage frame is electrically connected to the positive conductive connecting plate, and the positive conductive connecting plate is electrically connected to the positive pole of the power supply, and the positive conductive top plate and the positive conductive connecting plate are electrically connected through a positive conductive column, and the positive conductive column can pass through the upper part of the box body to electrically connect the positive conductive top plate and the positive conductive connecting plate, and an insulating sleeve is provided between the positive conductive column and the box body.

[0012] Furthermore, each storage cavity is provided with a drawing and releasing device, which includes a slide rail and a sliding support plate, the slide rail is arranged on both sides of the sliding support plate, and a concave slide groove is provided on the inner side of the slide rail, and the sliding support plate can be clamped in the slide groove and move horizontally.

[0013] Furthermore, a through push-pull grip groove is provided at the front end of the sliding support plate, a plurality of storage cavities are provided in the horizontal direction of the storage frame, the front ends of the plurality of sliding support plates in the horizontal direction are connected by a push-pull connecting rod, and raised limiting panels are provided around the sliding support plate.

[0014] Furthermore, a sealing groove is provided on the box door, a sealing strip is installed in the sealing groove, and the sealing strip can be clamped between the sealing groove and the box door.

[0015] Furthermore, a transparent observation window is provided on the box door.

[0016] This technical solution is provided with multiple cleaning chambers, which are separated by insulating isolation devices, so the cleaning efficiency is higher, the interference between the cleaning chambers is less, the ionization effect is good, the energy dissipation is less, and the cleaning effect is better;

[0017] The storage frame of this technical solution has a conductive function, which reduces the redundancy of structural design, reduces the workload caused by line layout and the occupation of box space, is more convenient to use, and has a more compact overall structure;

[0018] The technical solution is provided with a guide interlayer and an air inlet pipeline, which can make the gas diffuse more evenly and fully in the cleaning chamber, so that each storage cavity can be fully and evenly covered by the gas, and the ionization cleaning effect is better and the efficiency is higher;

[0019] This technical solution is equipped with a draw-out device, which can facilitate the placement and removal of materials, making it easier to use, reducing equipment loss and improving operating efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a three-dimensional structural schematic diagram of a plasma cleaning machine provided by an embodiment of the present invention;

[0021] Figure 2 It is a schematic diagram of the internal structure of a plasma cleaning machine provided by an embodiment of the present invention;

[0022] Figure 3 It is a three-dimensional structural schematic diagram of a storage frame and a positive electrode conductive connecting plate of a plasma cleaning machine provided in an embodiment of the present invention;

[0023] Figure 4 It is a three-dimensional structural schematic diagram of a storage frame and an extraction and discharge device of a plasma cleaning machine provided by an embodiment of the present invention;

[0024] Figure 5 It is a schematic diagram of the three-dimensional structure of a positive conductive top plate and a positive conductive column of a plasma cleaning machine provided by an embodiment of the present invention;

[0025] Figure 6The present invention provides a plasma cleaning machine pull-out device in a three-dimensional schematic diagram of the use of the state Figure 1 (When the sliding support plate is pulled out);

[0026] Figure 7 The present invention provides a plasma cleaning machine pull-out device in a three-dimensional schematic diagram of the use of the rotation state Figure 2 (When the sliding support plate is pushed in);

[0027] Figure 8 It is a structural schematic diagram of an air intake pipeline of a plasma cleaning machine provided in an embodiment of the present invention;

[0028] Fig. 9 It is a schematic diagram of a partial structure enlargement of a guide interlayer of a plasma cleaning machine provided by an embodiment of the present invention;

[0029] Fig.10 It is a schematic diagram of a side cross-sectional structure of a plasma cleaning machine provided by an embodiment of the present invention;

[0030] Fig.11 It is a schematic diagram of an enlarged local structure of a door of a plasma cleaning machine provided in an embodiment of the present invention.

[0031] Explanation of reference numbers: 1-box body, 2-box door, 3-insulation isolation device, 4-cleaning chamber, 5-storage frame, 6-positive conductive half, 7-negative conductive half, 8-storage chamber, 9-intake vertical pipe, 11-intake hole, 12-guide interlayer, 13-guide plate, 14-exhaust hole, 15-isolation plate, 16-mounting seat, 17-box door insulation board, 18-intake pipeline, 19-air supply interface, 20-intake cross pipe, 21-main air supply pipe, 22-positive conductive top plate, 23-positive conductive wall plate, 24-negative conductive layer plate, 25-negative conductive wall plate, 26-insulating column, 27-positive conductive connecting plate, 28-positive conductive column, 29-insulating sleeve, 30-extraction device, 31-slide rail, 32-sliding support plate, 33-slide groove, 34-push-pull grip groove, 35-push-pull connecting rod, 36-limiting enclosure, 37-sealing card slot, 38-sealing strip, 39-transparent observation window. DETAILED DESCRIPTION

[0032] The present invention will be further described below in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and cannot be used to limit the protection scope of the present invention.

[0033] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and the like are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", and the like may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0034] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0035] A plasma cleaning machine, comprising a box body 1 and a box door 2, characterized in that: the box body is divided into a plurality of cleaning chambers 4 by an insulating isolation device 3, each cleaning chamber is provided with a storage frame 5, the storage frame is made of conductive material, and comprises a positive conductive half 6 and a negative conductive half 7, the negative conductive half is electrically connected to the box body, the positive conductive half is electrically connected to the positive pole of a power source outside the box body and is not in contact with the negative half, the storage frame is divided into a plurality of storage chambers 8 by the positive conductive half and the negative conductive half, the box body and the box door are provided with a gas guide device, the gas guide device can supply and exhaust gas to each storage chamber;

[0036] Multiple cleaning chambers can improve cleaning efficiency. The cleaning chambers are isolated by insulating isolation devices to make them relatively independent, reduce mutual interference, reduce mutual electromagnetic interference and energy dissipation in the ionization process. Different materials can be placed in different cleaning chambers for cleaning, which makes the cleaning efficiency higher and the adaptability better. The storage frame is made of conductive material and is used directly as a conductive structure. It is simple and convenient. There is no need to design an additional circuit structure for ionization, which has lower costs and high space utilization.

[0037] In one embodiment, the gas guide device includes an air intake device arranged on the door panel and an air extraction device arranged on the box body, the air intake device includes a plurality of air intake holes 11, each storage cavity corresponds to an air intake hole, the air extraction device includes a guide interlayer 12 arranged on the opposite side of the air intake hole, the guide interlayer is arranged in the box body and connected to the outside of the box body, the guide interlayer includes two layers of guide plates 13, each guide plate is provided with a plurality of through air extraction holes 14 in an array, and the aperture of the air extraction hole on the guide plate close to the cleaning cavity is smaller than the aperture of the air extraction hole on the other guide plate;

[0038] The air intake device is used to provide a gas source. After the gas enters the box, it enters each cleaning chamber respectively. The gas between the cleaning chambers is relatively isolated and forms plasma after ionization to clean the material box in the storage frame. The exhaust device is connected to an external vacuum pump to extract and collect excess gas for the convenience of the next operation. In actual use, the guide interlayer is connected to the vacuum pipeline, and the vacuum pipeline is connected to the vacuum pump. The guide plate is multi-layered, and a pad is provided between adjacent guide plates to ensure a certain distance between the two. The multi-layer guide plates have inconsistent apertures of the exhaust holes on each layer. Along the airflow direction, the aperture of the exhaust holes on the guide plate gradually increases, which can slow down the flow rate of the gas, improve the diffusion and distribution effect of the gas, make the gas distribution more uniform and sufficient, and achieve better ionization cleaning effect.

[0039] In actual production use, in order to ensure the space of the cleaning chamber and reduce the waste of space in the box, the guide plate is set to two layers. To ensure the insulation and isolation effect, the guide plate can be made of insulating materials such as rubber and plastic, or made of materials such as aluminum alloy plates after insulation treatment on the surface; each storage cavity is provided with an air inlet hole, which can make the gas diffuse more fully in the cleaning cavity, and each storage cavity can be evenly and fully covered by the gas, so that the ionization effect is better and the cleaning effect is better. The gas supply device is connected to the gas source, and the gas extraction device is connected to the vacuum pump.

[0040] More specifically, the insulating isolation device includes an isolation plate 15 and a mounting seat 16, the mounting seat is arranged in the box body, the isolation plate and the mounting seat are detachably connected, a box door insulating plate 17 is arranged on the inner side of the box door, the guide interlayer is made of insulating material, a cleaning cavity is formed between the isolation plate, the box door insulating plate and the guide interlayer, and adjacent isolation plates share a mounting seat;

[0041] In this embodiment, the mounting seat and the isolation plate are also made of insulating materials. The mounting seat can be provided with a mounting groove along the length direction, and the isolation plate can be stuck in the mounting groove, which is convenient for the installation and removal of the isolation plate and is more convenient to use. The surrounding area of ​​the cleaning chamber is all made of insulating materials, which can ensure the isolation effect, reduce the mutual airflow ionization interference, and reduce energy dissipation and electromagnetic interference.

[0042] An embodiment, the intake device includes an intake pipeline 18 provided on the insulating board of the cabinet door. A plurality of intake holes are formed in the intake pipeline, and the intake pipeline is communicated with a gas supply interface 19. The gas supply interface is arranged on the cabinet door and communicated with an external air supply machine;

[0043] The intake pipeline includes two intake cross pipes 20, an intake vertical pipe 9 arranged between the two intake cross pipes, and a main gas supply pipe 21 for connecting the intake cross pipe and the gas supply interface. An intake vertical pipe is provided at the middle position corresponding to the storage cavity. Both ends of the intake vertical pipe are respectively communicated with an intake cross pipe. The middle positions of both ends of the main gas supply pipe are communicated with the two intake cross pipes. The middle position of the main gas supply pipe is communicated with the gas supply interface;

[0044] For the convenience of installation and fixation, the intake pipeline adopts a rigid pipe. The intake direction of the intake holes should be as perpendicular to the cabinet door as possible to ensure the intake effect. The gas supply interface can be a fluid interface with components such as a flow regulating valve and a flow meter;

[0045] In this embodiment, each storage frame has four storage cavities arranged in a "field" shape. Each storage frame corresponds to two intake vertical pipes (the intake vertical pipes corresponding to the upper and lower adjacent storage cavities are of an integral structure and are a complete intake vertical pipe). The intake vertical pipes are corresponding to the middle positions of the storage cavities, which can ensure that the gas diffuses evenly and sufficiently in the storage cavities. The main gas supply pipe is communicated with the middle positions of the intake cross pipes, which can ensure that the gas in the intake cross pipes can diffuse symmetrically and at a constant speed to both sides, ensuring the gas diffusion effect. The middle position of the main gas supply pipe is communicated with the gas supply interface, which can ensure that the gas in the main gas supply pipe can diffuse symmetrically and at a constant speed to both sides and enter the two intake cross pipes respectively, ensuring the gas diffusion effect;

[0046] In this embodiment, a plurality of intake holes are correspondingly provided on both the gas cross pipe and the vertical pipe. In actual use, the number and arrangement layout of the intake holes corresponding to each storage cavity should be ensured to be consistent as much as possible.

[0047] An embodiment, the positive conductive half part includes a positive conductive top plate 22 and a positive conductive wall plate 23. The negative conductive half part includes a negative conductive layer plate 24 and a negative conductive wall plate 25. The positive conductive wall plate and the negative conductive wall plate are both vertically arranged. The outermost sides at both ends of the storage frame are negative conductive wall plates. A positive conductive wall plate is provided between two adjacent negative conductive wall plates. A horizontal positive conductive top plate is provided at the top of the storage frame. The positive conductive top plate is electrically connected to each positive conductive wall plate. A negative conductive layer plate is horizontally arranged below the positive conductive top plate. The negative conductive layer plate is electrically connected to the negative conductive wall plate. The lowermost negative conductive layer plate is electrically connected to the box body. The negative conductive layer plate and the positive conductive top plate are connected by insulating columns 26, and the box body is grounded;

[0048] Each storage frame not only provides support and placement space for the material box, but also serves as a conductive structure for ionized gas, reducing structural design redundancy and avoiding the need to design and install complex conductive lines. The structure is more compact and easier to use. The positive conductive half and the negative conductive half do not contact each other and are insulated to ensure insulation. The bottom layer of the negative conductive layer plate and the inner wall of the box can be detachably connected by plugging. Specifically, a conductive column made of metal can be used to pass through the isolation plate to electrically connect the two, and the two can be connected to the metal conductive column by screws or axial hole plugging.

[0049] In one embodiment, a positive conductive connecting plate 27 is provided on the upper part of the box body, and the positive conductive top plate in each storage frame is electrically connected to the positive conductive connecting plate, and the positive conductive connecting plate is electrically connected to the positive electrode of the power supply, and the positive conductive top plate and the positive conductive connecting plate are electrically connected through a positive conductive column 28, and the positive conductive column can pass through the upper part of the box body to electrically connect the positive conductive top plate and the positive conductive connecting plate, and an insulating sleeve 29 is provided between the positive conductive column and the box body;

[0050] The positive conductive connecting plate is arranged outside the box body and connected to the positive power supply electrode. It can be made of a copper plate with good conductivity. In this embodiment, in order to reduce the mass of the conductive carrier frame and facilitate installation and fixation, the middle of the positive conductive top plate is hollowed out to form a structure similar to the frame. The insulating column and the insulating sleeve are made of plastic material, which can avoid electrical contact between the positive conductive top plate and the negative conductive layer plate, resulting in a short circuit and affecting the ionization cleaning effect.

[0051] The positive conductive column can be made of a copper column with good conductivity. The positive conductive column must ensure a sufficiently good electrical connection between the positive conductive top plate and the positive conductive connecting plate, and must ensure that it cannot contact the box body to cause a short circuit. Therefore, an insulating sleeve is provided between the positive conductive column and the box body to ensure that there is no direct contact between the positive conductive column and the box body. Even if the box body or the positive conductive column is deformed or displaced during use or installation, it can ensure that the positive conductive column will not contact the box body directly.

[0052] In one embodiment, each storage cavity is provided with a drawing and releasing device 30, the drawing and releasing device comprises a slide rail 31 and a sliding support plate 32, the slide rails are arranged on both sides of the sliding support plate, the inner side of the slide rail is provided with a concave slide groove 33, the sliding support plate can be clamped in the slide groove and move horizontally;

[0053] When the material box needs to be placed, first pull the sliding support plate out of the slide rail to a sufficient length, then place the material box flat on the sliding support plate, and then push the sliding support plate into the storage cavity;

[0054] The technical solution utilizes the sliding connection of the slide rail and the sliding support plate to replace the direct contact between the existing material box and the storage frame, making the placement and removal of the material box more convenient, reducing the wear of the material box and the storage frame, extending the service life of the storage frame and the material box, reducing the production cost, and ensuring the safety of use;

[0055] In actual production use, the slide rail and the sliding support plate are insulated, using materials such as plastic and rubber, or aluminum alloy and other materials with insulating materials coated on the surface, and the slide rail is installed on the bottom negative conductive layer plate.

[0056] More specifically, a through push-pull grip groove 34 is provided at the front end of the sliding support plate, a plurality of storage cavities are provided in the horizontal direction of the storage frame, the front ends of the plurality of sliding support plates in the horizontal direction are connected by a push-pull connecting rod 35, and a raised limiting enclosure 36 is provided around the sliding support plate;

[0057] The push-pull grip groove allows operators to easily place their fingers, grasp and apply force, and pull out or push in the sliding support plate; the push-pull connecting rod can improve the efficiency of pushing and pulling the sliding support plate. Simply move the push-pull connecting rod to conveniently move all the sliding support plates connected to it;

[0058] In actual use, the push-pull connecting rod is not limited to the horizontal direction, and can be arranged according to the actual layout of the storage cavity. For example, if the material rack is provided with multiple storage cavities in the vertical direction, the push-pull connecting rod can also be arranged in the vertical direction;

[0059] The limit enclosure protrudes upward, which can prevent the material box from sliding horizontally too far and detaching from the sliding support plate after being placed on the sliding support plate. The material box can play a limiting role, and the raised strip-shaped limit enclosure can also enhance the structural strength and deformation resistance of the entire sliding support plate to ensure its service life.

[0060] Furthermore, a sealing groove 37 is provided on the box door, a sealing strip 38 is installed in the sealing groove, and the sealing strip can be sandwiched between the sealing groove and the box door;

[0061] The sealing strip can be made of rubber, silicone or other materials with good sealing and elasticity. In actual use, the thickness of the sealing strip in the normal stretched state should be greater than the depth of the sealing groove to ensure that after the door and the box body are fitted together, the sealing strip can be in close contact with both of them respectively, to ensure the sealing effect, avoid the outflow of excess gas, ensure the gas ionization effect, ensure the cleaning effect, reduce energy dissipation, and make the use more stable and safe.

[0062] In one embodiment, a transparent observation window 39 is provided on the box door;

[0063] The transparent observation window can be made of glass or plastic, and can be fixed on the box door or hingedly connected to the box door, and the sealing between the box body should be ensured, so that outside personnel can easily view the working status inside the cleaning machine, making it more convenient and safe to use.

[0064] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A plasma cleaning machine, comprising a housing (1) and a housing door (2), characterized in that: The box body is divided into a plurality of cleaning chambers (4) by an insulating isolation device (3), each cleaning chamber is provided with a storage frame (5), the storage frame is made of a conductive material, and comprises a positive conductive half (6) and a negative conductive half (7), the negative conductive half is electrically connected to the box body, the positive conductive half is electrically connected to the positive pole of a power source outside the box body and is not in contact with the negative half, the storage frame is divided into a plurality of storage chambers (8) by the positive conductive half and the negative conductive half, the box body and the box door are provided with a gas guide device, the gas guide device can supply and exhaust gas to each storage chamber; The gas flow guiding device comprises an air intake device arranged on the door panel and an air extraction device arranged on the box body, the air intake device comprises a plurality of air intake holes (11), each storage cavity corresponds to an air intake hole, the air extraction device comprises a flow guiding interlayer (12) arranged on the opposite side of the air intake hole, the flow guiding interlayer is arranged in the box body and connected to the outside of the box body, the flow guiding interlayer comprises two layers of flow guiding plates (13), each flow guiding plate is provided with a plurality of through-flow extraction holes (14) distributed in an array, the aperture of the air extraction holes on the flow guiding plate close to the cleaning cavity is smaller than the aperture of the air extraction holes on the other flow guiding plate; The insulating isolation device comprises an isolation plate (15) and a mounting seat (16), the mounting seat being arranged in the box body, the isolation plate and the mounting seat being detachably connected, a box door insulating plate (17) being arranged on the inner side of the box door, the guide interlayer being made of insulating material, a cleaning cavity being formed between the isolation plate, the box door insulating plate and the guide interlayer, and adjacent isolation plates sharing a mounting seat; The air intake device comprises an air intake pipeline (18) arranged on the insulation plate of the box door, the air intake pipeline is provided with a plurality of air intake holes, the air intake pipeline is communicated with an air supply interface (19), the air supply interface is arranged on the box door and is communicated with an external air supply machine; The air intake pipeline comprises two air intake cross pipes (20), an air intake vertical pipe (9) arranged between the two air intake cross pipes, and a main air supply pipe (21) for connecting the air intake cross pipes and the air supply interface, the air intake vertical pipe is arranged at the middle position of the corresponding storage cavity, the two ends of the air intake vertical pipe are respectively connected to an air intake cross pipe, the two ends of the main air supply pipe are respectively connected to the middle position of the two air intake cross pipes, and the middle position of the main air supply pipe is connected to the air supply interface; The positive conductive half comprises a positive conductive top plate (22) and a positive conductive wall plate (23), and the negative conductive half comprises a negative conductive layer plate (24) and a negative conductive wall plate (25). The positive conductive wall plates and the negative conductive wall plates are both arranged vertically. The outermost sides of the two ends of the storage frame are negative conductive wall plates. A positive conductive wall plate is arranged between two adjacent negative conductive wall plates. A horizontal positive conductive top plate is arranged on the top of the storage frame. The positive conductive top plate is electrically connected to each positive conductive wall plate. A negative conductive layer plate is arranged horizontally below the positive conductive top plate. The negative conductive layer plate is electrically connected to the negative conductive wall plate. The lowest negative conductive layer plate is electrically connected to the box. The negative conductive layer plate is connected to the positive conductive top plate via an insulating column (26). The box is grounded.

2. A plasma cleaning machine according to claim 1, characterized in that: A positive conductive connecting plate (27) is arranged on the upper part of the box body, and the positive conductive top plate in each storage frame is electrically connected to the positive conductive connecting plate. The positive conductive connecting plate is electrically connected to the positive electrode of the power supply. The positive conductive top plate and the positive conductive connecting plate are electrically connected via a positive conductive column (28). The positive conductive column can pass through the upper part of the box body to electrically connect the positive conductive top plate and the positive conductive connecting plate. An insulating sleeve (29) is arranged between the positive conductive column and the box body.

3. A plasma cleaning machine according to claim 1, characterized in that: Each storage cavity is provided with a draw-out device (30), the draw-out device comprising a slide rail (31) and a slide support plate (32), the slide rails being arranged on both sides of the slide support plate, the inner side of the slide rails being provided with a concave slide groove (33), the slide support plate being able to be clamped in the slide groove and move horizontally.

4. A plasma cleaning machine according to claim 3, characterized in that: The front end of the sliding support plate is provided with a through push-pull grip groove (34), the storage frame is provided with a plurality of storage cavities in the horizontal direction, the front ends of the plurality of sliding support plates in the horizontal direction are connected via a push-pull connecting rod (35), and the sliding support plates are provided with raised limiting enclosure plates (36) around their periphery.

5. The plasma cleaning machine according to claim 1, characterized in that: The box door is provided with a sealing groove (37), a sealing strip (38) is installed in the sealing groove, and the sealing strip can be clamped between the sealing groove and the box door.

6. The plasma cleaning machine according to claim 1, characterized in that: A transparent observation window (39) is provided on the box door.

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