Pallet transport device and pallet transport method

Abstract

A pallet transport device comprises: a transport rail, which carries a pallet equipped with a fluid pressure device so as to be movable; a transport unit, which transports the pallet mounted on the transport rail; a fluid rail, which is arranged along the transport rail and has a fluid passage formed therein; and a fluid supply and suction unit, which is arranged to communicate with the fluid passage and supply fluid to the fluid passage or suction fluid from the fluid passage. The fluid rail is provided with a plurality of through holes that connect the fluid passage with the outside, and an opposing component and a connecting passage are provided on the pallet, wherein the opposing component is formed with a recess that covers a portion of the plurality of through holes and is opposed to the fluid rail, and the connecting passage connects the recess with the fluid pressure device.

Description

Technical Field

[0001] The invention relates to a pallet transport device and a pallet transport method. Background Art

[0002] In the past, there was a transport device on the production line, which transported the workpiece using a conveyor belt, and the machine tool at the destination of the transport performed a predetermined process on the workpiece. However, when a heavy workpiece such as a stator is placed on a conveyor belt for transport using the conventional transport device, the inertia force acting on the workpiece when the transport of the workpiece is stopped is large. Therefore, there is a disadvantage that it is difficult to increase the transport speed and it is difficult to accurately position the workpiece using a stopper.

[0003] In order to solve the above-mentioned disadvantages, for example, Japanese Patent Application Laid-Open No. 2007-21629 proposes a pallet transport device, which transports a plurality of pallets carrying workpieces relative to a machine tool via a quadrangular track. In the pallet transport device, a plurality of pallets are mounted on the track, clamped between a left pallet transport mechanism and a right pallet transport mechanism, and transported by moving the plurality of pallets a distance of one pallet in a clamped state. Summary of the invention

[0004] In recent years, there has been a growing demand for mounting a fluid pressure device that operates by fluid pressure on a pallet and for transporting the pallet by operating the fluid pressure device.

[0005] Then, when the fluid pressure device is mounted on the pallet, a fluid supply and suction unit for supplying or suctioning the fluid to operate the fluid pressure device needs to be mounted on the pallet. In addition, there is a disadvantage that the weight of the pallet increases, and the loading area of ​​the workpiece on the pallet decreases, making it difficult to effectively transport the workpiece.

[0006] Furthermore, when multiple pallets are loaded onto a transport rail for transport, when fluid pressure devices are loaded onto the multiple pallets, fluid supply and suction units for operating the fluid pressure devices also need to be loaded onto the multiple pallets. Furthermore, since the same number of fluid supply and suction units as the number of pallets is required, the problem of excessively high unit price of the pallet transport device still exists.

[0007] An object of the present invention is to provide a pallet transport device and a pallet transport method that can avoid mounting a fluid supply and suction unit that operates a fluid pressure device on a pallet.

[0008] According to one embodiment of the present invention, there is provided a pallet transport device, comprising: a transport rail, which carries a pallet equipped with a fluid pressure device so as to be movable; a transport unit, which transports the pallet mounted on the transport rail; a fluid rail, which is arranged along the transport rail and has a fluid passage formed therein; a fluid supply and suction unit, which is arranged to be connected to the fluid passage and to supply fluid to the fluid passage or to suction fluid from the fluid passage, a plurality of through holes are formed on the fluid rail for connecting the fluid passage with the outside, an opposing component and a connecting path are provided on the pallet, the opposing component is formed with a recessed portion covering a portion of the plurality of through holes, and is opposed to the fluid rail, and the connecting path connects the recessed portion with the fluid pressure device.

[0009] According to another embodiment of the present invention, a pallet transporting method is provided, wherein a pallet equipped with a fluid pressure device is mounted on a transport rail for transport, a fluid rail having a fluid through hole formed inside and a plurality of through holes connecting the fluid passage with the outside is arranged along the transport rail, fluid is supplied to the fluid passage or fluid is sucked from the fluid passage, an opposing component having a recessed portion covering a portion of the plurality of through holes is opposed to the fluid rail, the recessed portion is connected to the fluid pressure device mounted on the pallet, and the pallet and the opposing component are transported while the fluid pressure device is operated.

[0010] According to the embodiment of the present invention, it is possible to avoid mounting the fluid supply and suction unit for operating the fluid pressure device on the tray. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a front view showing the pallet transport device according to the present embodiment.

[0012] Figure 2 It is along Figure 1 Cross-sectional view along line AA.

[0013] Figure 3 It indicates the front of the tray. Figure 1 Enlarged view of part E.

[0014] Figure 4 This is a plan view of the pallet mounted on the transport rail as viewed from above.

[0015] Figure 5 It indicates the locking state of the pallet and the circulating belt. Figure 4 Cross-sectional view of line BB.

[0016] Figure 6 It indicates the direction of the pallet transfer mechanism. Fig. 9An enlarged cross-sectional view of line DD.

[0017] Figure 7 It indicates the direction of the pallet transfer mechanism. Fig.10 An enlarged cross-sectional view of the CC line.

[0018] Figure 8 It is a plan view showing a state before the pallet is transported along the transport rails.

[0019] Fig. 9 This is a plan view showing a state after the pallet is transported along the transport rail and before the pallet is moved to the return rail.

[0020] Fig.10 This is a plan view showing a state after the pallet has moved to the return rail and before the pallet moves backward along the return rail.

[0021] Fig.11 This is a plan view showing a state after the pallet has retreated along the return rail and before the pallet has moved to the transport rail. DETAILED DESCRIPTION

[0022] Hereinafter, the present embodiment will be described with reference to the drawings.

[0023] exist Figures 1 to 8 1 shows a pallet transport device 10 of the present invention. In each figure, an X-axis, a Y-axis, and a Z-axis are set to be orthogonal to each other, the X-axis is set to be substantially horizontal, the Y-axis is set to be substantially horizontal, and the Z-axis is set to be substantially vertical, and the structure of the pallet transport device 10 is described.

[0024] like Figure 1 as well as Figure 8 As shown, the pallet transport device 10 of this embodiment is set in a production line for manufacturing smaller products. In addition, the pallet transport device 10 carries a plurality of pallets 21 equipped with suction nozzles 26 as fluid pressure equipment on a transport rail 31 for transport. The production line is a production line in which three processing stations 11, 12, and 13 are arranged in a row at predetermined intervals along the X-axis direction. Each processing station 11, 12, and 13 is formed in a box shape, and a machine tool (not shown) is arranged inside.

[0025] Furthermore, the machine tools in the processing stations 11, 12, and 13 are configured to receive the workpiece 14 (see Figure 2 ) various necessary processes such as drilling, fastening, welding, etc. are sequentially performed to automatically manufacture a product not shown. A workpiece supply machine 16 for supplying the workpiece 14 and a workpiece recovery machine 17 for recovering the workpiece 14 are respectively arranged on the upstream side and downstream side of the processing stations 11, 12, 13 in a manner of separating the processing stations 11, 12, 13.

[0026] like Figures 8 to 11 As shown, the pallet transport device 10 of the present embodiment comprises: a transport rail 31, which is arranged to extend along the X-axis direction; a return rail 41, which is arranged to be separated from the transport rail 31 in the Y-axis direction and parallel to the transport rail 31; a pallet transport unit 51, which transports the pallet 21 mounted on the transport rail 31; a pallet return unit 61, which moves the pallet 21 mounted on the return rail 41 in a direction opposite to the transport direction; a return pallet transfer mechanism 70, which transfers the pallet 21 mounted on the transport rail 31 from the top end of the transport rail 31 to the top end of the return rail 41; and a transport pallet transfer mechanism 80, which transfers the pallet 21 mounted on the return rail 41 from the base end of the return rail 41 to the base end of the transport rail 31.

[0027] like Figure 2 As shown, the conveying rail 31 of this embodiment has a support plate 32 that forms a rectangle in the cross section along the Z-axis direction, a commercially available linear motion guide 33 fixed to the upper edge of the support plate 32 by screwing, and a mounting plate 34 welded to the lower end of the support plate 32.

[0028] like Figure 8 As shown, the return rail 41 has the same structure as the transport rail 31, and has a support plate 42 with the same cross-sectional shape as the support plate 32 of the transport rail 31, a commercially available linear motion guide 43 fixed to the upper edge of the support plate 42 by screwing, and a mounting plate 44 welded to the lower end of the support plate 42.

[0029] The transport rail 31 and the return rail 41 are installed on the stands 71 ​​and 81 at both ends thereof in parallel with each other across the three processing stations 11, 12, and 13. The stands 71 ​​and 81 are separated in the X-axis direction in a manner of sandwiching the three processing stations 11, 12, and 13 and the workpiece feeder 16 and the workpiece recovery machine 17 provided at both ends of the three processing stations 11, 12, and 13.

[0030] The racks 71 and 81 are formed to be long in the Y-axis direction. The ends of the mounting plates 34 and 44 on the transport rail 31 and the return rail 41 in the longitudinal direction are screwed to the racks 71 and 81. Thus, the transport rail 31 is mounted on the racks 71 and 81 at both ends in a manner that connects the workpiece supply machine 16 via the three processing stations 11, 12, and 13 to the workpiece recovery machine 17 (see Figure 1 as well as Figure 8 ).

[0031] The transport rail 31 and the return rail 41 respectively carry the tray 21 so that it can move. Figure 2As shown, the pallet 21 mounted on the transport rail 31 or the return rail 41 includes: a linear motion block 22, which is configured as a linear motion guide rail 33, 43 that spans the transport rail 31 or the return rail 41 and can move on the linear motion guide rail 33, 43; and a base 23 that is screwed to the linear motion block 22. On the lower side of the base 23, along both sides of the transport rail 31 and the return rail 41, locking parts 24 are respectively provided.

[0032] The linear motion block 22 is a commercially available product sold in pairs with the linear motion guide rails 33 and 43 on the transport rail 31 and the return rail 41. Figure 4 As shown, the linear motion block 22 is provided as two separated in the X-axis direction relative to the pedestal 23. By using the linear motion block 22, the movement of the linear motion block 22 in the width direction (Y-axis direction) can be prohibited, and the resistance of the tray 21 moving on the transport rail 31 or the return rail 41 can be reduced. Therefore, the tray 21 is mounted so as to be movable on the transport rail 31 or the return rail 41.

[0033] like Figure 2 As shown, a suction nozzle 26 is mounted on the base 23 of the tray 21. The suction nozzle 26 shown in the figure is a component for sucking the workpiece 14. The suction nozzle 26 is set on the base 23 of the tray 21 via a mounting fixture 27, and extends in the vertical direction above the base 23. Thus, the tray 21 is configured to suck and hold the workpiece 14 via the suction nozzle 26. In addition, the workpiece 14 not shown in the figure is a workpiece processed in each processing station 11, 12, 13. Figure 2 The middle is a flat plate that can be sucked by the suction nozzle 26.

[0034] like Figure 1 as well as Figure 8 As shown, the tray transport unit 51 that transports the tray 21 mounted on the transport rail 31 includes a transport belt 52 that is configured to be engageable with the tray 21 mounted on the transport rail 31 and is provided in an endless form so as to be circulatable along the transport rail 31 .

[0035] The first support platform 53 and the second support platform 54 are provided on the stands 71 ​​and 81 supporting both ends of the transport rail 31, and the first support platform 53 and the second support platform 54 are located on the extension line of the transport rail 31. The first pulley 55 and the second pulley 56 of the same shape and size are provided on the first support platform 53 and the second support platform 54. The transport belt 52 is provided to be hung on the first pulley 55 and the second pulley 56, and can circulate along the transport rail 31 by the rotation of the first pulley 55 and the second pulley 56.

[0036] Therefore, if Figure 1As shown, the conveying belt 52 is arranged along the conveying rail 31 (specifically, the extending direction of the conveying rail 31), and is spaced apart from the conveying rail 31 in the vertical direction, and the spacing is substantially equal to the outer diameter of the first pulley 55 and the second pulley 56. Figure 2 As shown, a belt rail 57 and a support rail 58 are provided on the conveying rail 31. The belt rail 57 supports the lower conveying belt 52c of the conveying belt 52 hung on the first pulley 55 and the second pulley 56, thereby suppressing the slack of the lower conveying belt 52c. The support rail 58 prevents the upper conveying belt 52d from hanging down.

[0037] A plurality of first mounting members 57a for mounting the belt rail 57 on the transport rail 31 are provided on the support plate 32 of the transport rail 31, and the plurality of first mounting members 57a are provided at predetermined intervals in the longitudinal direction of the support plate 32. The belt rail 57 is mounted on the transport rail 31 via the plurality of first mounting members 57a. In addition, a plurality of second mounting members 58a for mounting the support rail 58 on the transport rail 31 are provided on the support plate 32, and the plurality of second mounting members 58a are provided at predetermined intervals in the longitudinal direction of the support plate 32. The support rail 58 is mounted on the transport rail 31 via the plurality of second mounting members 58a.

[0038] On the one hand, the conveying belt 52 of this embodiment is a so-called toothed belt. Figure 5 As shown, the conveying belt 52 as a toothed belt is a conveying belt in which the concave and convex 52a, 52b extending in the width direction are staggered and continuous in the length direction. The reverse concave and convex 24a, 24b capable of locking with the concave and convex 52a, 52b is formed on the locking member 24 of the tray 21.

[0039] like Figure 2 as well as Figure 5 As shown in the figure, when the pallet 21 is placed on the transport rail 31, the locking member 24 is overlapped from the upper side on the upper transport belt 52d supported by the support rail 58. In the overlapped state, the concave-convex 52a, 52b formed on the transport belt 52 are locked with the reverse concave-convex 24a, 24b of the locking member 24. In addition, the support rail 58 is provided over the entire length in the transport direction between the workpiece feeder 16 and the workpiece recovery machine 17 to prevent the upper transport belt 52d from hanging down and the locking of the concave-convex 52a, 52b and the reverse concave-convex 24a, 24b from being released.

[0040] like Figure 5 As shown, the locking member 24 of the tray 21 is provided with reversed concave-convex 24a, 24b formed continuously in the length direction so as to be locked with the concave-convex 52a, 52b of the conveying belt 52. Therefore, when the reversed concave-convex 24a, 24b of the tray 21 is locked with the concave-convex 52a, 52b, the movement of the tray 21 independently of the conveying belt 52 is prohibited. Thus, the tray 21 is locked on the conveying belt 52.

[0041] like Figure 1 as well as Figure 8 As shown, the pallet conveying unit 51 includes a first circulation unit 59 for circulating the conveying belt 52. The first circulation unit 59 of this embodiment is an electrically driven servo motor 59 for rotating and driving the first pulley 55. The servo motor 59 having the first pulley 55 mounted on a rotating shaft 59a is mounted on a support table 53 erected on a stand 71.

[0042] The servo motor 59 is connected to a control output from a controller (not shown). When the servo motor 59 is driven by the control output from the controller, the first pulley 55 rotates together with the rotating shaft 59a. As a result, the conveying belt 52 hung between the first pulley 55 and the second pulley 56 is circulated, and the pallet 21 stuck to the conveying belt 52 is conveyed while being mounted on the conveying rail 31.

[0043] like Figures 8 to 11 As shown, the pallet return unit 61 for moving the pallet 21 mounted on the return rail 41 in the direction opposite to the conveying direction has the same structure as the above-mentioned pallet conveying unit 51. In addition, the pallet return unit 61 includes a return belt 62, which is configured to be able to be locked with the pallet 21 mounted on the return rail 41 and is arranged in a ring-shaped manner so as to be able to circulate along the return rail 41.

[0044] The third support platform 63 and the fourth support platform 64 are provided on the stands 71 ​​and 81 supporting both ends of the return rail 41, and the third support platform 63 and the fourth support platform 64 are located on the extension line of the return rail 41. The third pulley 65 and the fourth pulley 66 are provided on the third support platform 63 and the fourth support platform 64. The return belt 62 is hung on the third support platform 63 and the fourth support platform 64 provided on the extension line of both ends of the return rail 41.

[0045] The second circulation unit for circulating the return belt 62 is a servo motor 69 that drives the fourth pulley 66 mounted on the fourth support platform 64 at the base end in the backward direction to rotate. Similar to the pallet transport unit 51, the return rail 41 is provided with a belt rail (not shown) that supports the lower return belt and a support rail 68 that prevents the upper return belt 62d from hanging down.

[0046] The return belt 62 is a so-called toothed belt similar to the conveying belt 52 of the tray conveying unit 51. The return belt 62 is formed such that the concave and convex portions 62a and 62b extending in the width direction are staggered and continuous in the length direction. The reverse concave and convex portions 24a and 24b capable of being locked with the concave and convex portions 62a and 62b are formed on the other locking member 24 of the tray 21 (see Figure 7 ).

[0047] Specifically, Figure 2As shown, the locking member 24 is provided on both sides of the lower side of the base 23 on the tray 21 in a manner of sandwiching the linear motion block 22. Fig.10 As shown, when the tray 21 is continuous with the return rail 41, as shown in Figure 7 As shown, the other locking member 24 is provided to face the return belt 62. The reverse concave and convex 24a, 24b of the locking member 24 are formed to move in the width direction of the return belt 62 and to lock with the concave and convex 62a, 62b of the return belt 62 from above.

[0048] like Figures 8 to 11 As shown, a return pallet transfer mechanism 70 is provided on a top end side of a platform 71 on which the conveying rail 31 and the return rail 41 are installed, and the return pallet transfer mechanism 70 transfers the pallet 21 mounted on the conveying rail 31 from the top end of the conveying rail 31 to the top end of the return rail 41. On the other hand, a conveying pallet transfer mechanism 80 is provided on a base end side of a platform 81 on which the conveying rail 31 and the return rail 41 are installed, and the conveying pallet transfer mechanism 80 transfers the pallet 21 mounted on the return rail 41 from the base end of the return rail 41 to the base end of the conveying rail 31.

[0049] The return tray transfer mechanism 70 and the transport tray transfer mechanism 80 have the same structure. The racks 71 and 81 separated in the X-axis direction are respectively extended in the Y-axis direction. The interval L (refer to Figure 8 ) is formed to be equal to the width W1 of the base 23 of the tray 21 in the conveying direction (i.e., the length of the tray 21 in the extending direction of the fluid rail 91 described later, see Figure 8 Furthermore, the return tray transfer mechanism 70 and the transport tray transfer mechanism 80 are provided with movable bodies 72 and 82, respectively, and the movable bodies 72 and 82 block the gap L between the support platforms 53, 54, 63, and 64 provided on the end edges of the transport rail 31 and the return rail 41 and the extension lines of the transport rail 31 and the return rail 41.

[0050] The movable bodies 72 and 82 respectively include table plates 72a and 82a and short rails 72b and 82b. The table plates 72a and 82a are continuous with the support plates 32 and 42 on the transport rails 31 and the return rails 41 when they are accommodated between the end edges of the transport rails 31 and the return rails 41 and the support platforms 53, 54, 63 and 64. The short rails 72b and 82b are installed on the upper edges of the table plates 72a and 82a and are continuous with the linear motion guide rails 33 and 43.

[0051] The short rails 72b and 82b have the same cross-sectional shape as the linear motion guide rails 33 and 43. The pallet 21 moving on the linear motion guide rails 33 and 43 is configured to be movable to the short rails 72b and 82b when the movable bodies 72 and 82 block the space between the end edges of the conveying rails 31 and the return rails 41 and the support platforms 53, 54, 63, and 64. Thus, the movable bodies 72 and 82 are configured to be able to carry the moving pallet 21.

[0052] The return pallet transfer mechanism 70 and the transport pallet transfer mechanism 80 have the same structure. The return pallet transfer mechanism 70 and the transport pallet transfer mechanism 80 are respectively provided with: a pair of rails 73, 83, which are respectively extended along the Y-axis direction on the frames 71, 81 in a manner that the movable bodies 72, 82 can be carried; table components 74, 84, which are movably provided on the pair of rails 73, 83; ball screws 75, 85, which are screwed to the table components 74, 84 and are provided parallel to the rails 73, 83; and motors 76, 86, which rotate the ball screws 75, 85. In addition, table plates 72a, 82a of the movable bodies 72, 82 are respectively provided upright on the table components 74, 84.

[0053] In the return pallet transfer mechanism 70 and the conveying pallet transfer mechanism 80 thus configured, by driving the motors 76 and 86 to rotate the ball screws 75 and 85 , the table members 74 and 84 mounted on the pair of rails 73 and 83 can be moved along the rails 73 and 83 together with the movable bodies 72 and 82 .

[0054] Therefore, in the return tray transfer mechanism 70, the movable body 72 which is continuous with the top end of the conveying rail 31 can be moved to a position which is continuous with the top end of the return rail 41. Figure 6 as well as Fig. 9 As shown in FIG. 2 , the pallet 21 that has left the top end of the transport rail 31 is moved to the movable body 72 for loading. Figure 7 as well as Fig.10 As shown, by moving the movable body 72 together with the pallet 21 in the Y-axis direction from the top of the conveying rail 31 to the top of the return rail 41, and then moving the pallet 21 from the movable body 72 toward the top of the return rail 41 again, the pallet 21 can be transferred from the top of the conveying rail 31 to the top of the return rail 41.

[0055] On the other hand, in the transport tray transfer mechanism 80, the movable body 72 which is continuous with the base end of the return rail 41 is moved to a position which is continuous with the base end of the transport rail 31. Fig.11 As shown, the tray 21 that has left the base end of the return rail 41 is moved to the movable body 82 for loading. Figure 8As shown, by moving the movable body 82 together with the pallet 21 in the Y-axis direction from the base end of the return rail 41 to the base end of the conveying rail 31, and then moving the pallet 21 from the movable body 82 toward the base end of the conveying rail 31 again, the pallet 21 can be transferred from the base end of the return rail 41 to the base end of the conveying rail 31.

[0056] like Figure 8 As shown, in this embodiment, a workpiece feeder 16 and a workpiece recovery machine 17 are provided in a manner that they are separated by three processing stations 11, 12, and 13. The workpiece feeder 16 and the workpiece recovery machine 17 are provided at the same pitch P as the processing stations 11, 12, and 13. Furthermore, the movable bodies 72 and 82 provided continuously with the end edges of the transport rail 31 and the return rail 41 are provided at the same pitch P from the workpiece feeder 16 and the supply recovery machine 17.

[0057] like Figures 1 to 4 As shown, the pallet transport device 10 includes a fluid rail 91 having a groove 91d formed therein as a fluid passage. The fluid rail 91 is a component provided along the transport rail 31 (specifically, the extending direction of the transport rail 31), and includes a base material 91a formed in a long strip shape, and a cover plate 91b mounted on the base material 91a.

[0058] like Figure 2 as well as Figure 3 As shown, a support member 91c is provided on the support plate 32. The base material 91a is installed parallel to the conveying rail 31 via the support member 91c. A groove 91d extending along the length direction is formed on the upper surface covered by the cover plate 91b of the base material 91a. Figure 1 As shown, a fluid pump 92 as a fluid supply and suction unit for supplying a fluid toward the groove 91 d or suctioning a fluid from the groove 91 d is provided on the base end side stand 81 .

[0059] The fluid pump 92 in this embodiment is a fluid pump that ejects or sucks gas as a fluid. One end of a communication path 92a is installed at the ejection and suction port of the fluid pump 92. The other end of the communication path 92a is installed on the substrate 91a in a manner open to the groove 91d. Thus, the fluid pump 92 is configured to supply fluid to the groove 91d constituting the fluid passage of the substrate 91a covered by the cover plate 91b or to suck fluid from the recess 91d.

[0060] And, if Figure 1 As shown in the enlarged view of FIG. 1 , a through hole 91e is formed on the cover plate 91b and passes through in the up-down direction and communicates with the groove 91d. The plurality of through holes 91e are formed to be continuous with a predetermined interval T in the longitudinal direction of the fluid rail 91 (ie, the extension direction of the fluid rail 91).

[0061] On the other hand, Figure 2 as well as Figure 3 As shown, the opposing member 93, which is opposed to the fluid rail 91 and has a recess 93a covering one or more through holes 91e, is disposed on each of the plurality of trays 21. Figure 3 As shown, the opposing member 93 is a rod-shaped member whose length W2 (i.e., the length W2 of the opposing member 93 in the extension direction of the fluid rail 91) is longer than the width W1 of the pedestal 23 on the tray 21 in the direction of the transport rail 31. The opposing member 93 is formed in a square cross section, and a recess 93a extending in the longitudinal direction and having a length M longer than the interval T between the plurality of through holes 91e is formed on the side opposite to the fluid rail 91.

[0062] The opposing member 93 is provided on the base 23 of the tray 21 via the suspension unit 94. The suspension unit 94 is a member that applies force in a manner of pressing the opposing member 93 toward the fluid rail 91. A support shaft 94a penetrating in the vertical direction is provided on the outer side of the base 23 on the tray 21 where the locking member 24 is mounted, and the support shaft 94a is movable in the axial direction.

[0063] like Figure 3 As shown in the figure, the support shaft 94a is a member having an opposing member 93 mounted at its lower end. The single opposing member 93 is supported by two support shafts 94a. The side edge of the pedestal 23 supporting the single opposing member 93 is provided with two support shafts 94a at a predetermined interval in the longitudinal direction of the transport rail 31. The single opposing member 93 is mounted at the lower end of the two support shafts 94a. Here, the symbol 94b in the figure represents a sliding sleeve provided on the pedestal 23 and supporting the support shaft 94a so that it can move in the axial direction.

[0064] A coil spring 94c as a biasing member is installed in a compressed state on the support shaft 94a between the opposing member 93 and the base 23. The extension force of the coil spring 94c acts in a direction to separate the opposing member 93 from the base 23 of the tray 21. When the opposing member 93 is opposed to the fluid rail 91, the opposing member 93 can be pressed toward the fluid rail 91.

[0065] like Figure 6 as well as Figure 7 As shown, when the opposing member 93 is not opposed to the fluid rail 91, the support shaft 94a moves downward in the Z-axis direction due to the force of the coil spring 94c. A ring 94d is installed at the upper part of the support shaft 94a that passes through the base 23 on the tray 21. The ring 94d is configured so that when the support shaft 94a and the opposing member 93 are lowered together and the ring 94d abuts against the upper surface of the base 23 of the tray 21, the support shaft 94a is prohibited from further descending. Therefore, the ring 94d is a member that limits the movable range on the opposing member 93.

[0066] like Figure 3 as well as Figure 4 As shown, the length W2 of the opposing member 93 in the direction of the fluid rail 91 is formed to be longer than the length W1 of the base 23 on the tray 21 in the direction of the fluid rail 91. That is, the tray 21 is formed so that the end in the extension direction of the fluid rail 91 does not protrude from the end of the opposing member 93. As a result, it is possible to prevent the generation of a gap between the ends of adjacent opposing members 93 due to the abutment of the ends of adjacent trays 21. In addition, in the present embodiment, the length W2 of the opposing member 93 is formed to be the same as or slightly smaller than the spacing P at which the processing stations 11, 12, and 13 are provided.

[0067] Furthermore, a roller 96 is pivotally supported on the opposing member 93, and the roller 96 rolls on the fluid rail 91, and the opposing member 93 and the fluid rail 91 are opposed to each other with a predetermined gap therebetween. In addition, the predetermined gap is 0-0.1 mm. Figure 1 As shown in the enlarged view of , the upper surface of the base end side of the fluid rail 91 is formed with an inclined surface 91f for rolling the roller 96 to guide the opposing member 93 toward the upper surface of the fluid rail 91. In this embodiment, a pair of rollers 96 are pivotally supported on the opposing member 93 near the support shaft 94a.

[0068] A connecting member 93b connected to the recessed portion 93a is provided on the opposing member 93. The connecting member 93b is connected to the suction nozzle 26 via a connecting passage 93c. That is, one end of the connecting passage 93c is installed in a manner open to the recessed portion 93a via the connecting member 93b, and the other end of the connecting passage 93c is connected to the suction nozzle 26 as a fluid pressure device. In this way, a connecting passage 93c is formed on the tray 21, and the connecting passage 93c connects the fluid rail 91 and the suction nozzle 26 when the tray 21 is mounted on the transport rail 31.

[0069] Therefore, when the fluid pump 92 (see Figure 1 ) is driven, for example, when the gas in the groove 91d covered by the cover plate 91b is sucked into a negative pressure, such as Figure 2 As shown, the fluid in the recess 93a of the opposing member 93 that is opposed to the groove 91d via the through hole 91e is sucked. Furthermore, since the suction nozzle 26 is connected to the recess 93a via the connecting passage 93c, when the fluid in the recess 93a is sucked, the suction nozzle 26 connected via the connecting passage 93c is configured to suck the workpiece 14 at the lower end of the suction nozzle 26.

[0070] Furthermore, the conveying belt 52 as a toothed belt is configured to be able to lock the tray 21 mounted on the conveying rail 31. Figure 8) is driven to circulate the conveying belt 52 on which the pallet 21 is fixed, and the pallet 21 provided with the suction nozzle 26 which sucks the workpiece 14 at the lower end is conveyed along the conveying rail 31 along which the conveying belt 52 continues.

[0071] Next, the pallet transport method of the present invention using the pallet transport device 10 will be described.

[0072] The pallet transport method of the present invention is a pallet transport method for transporting a plurality of pallets 21 equipped with suction nozzles 26 by placing them on transport rails 31 .

[0073] like Figure 8 As shown, in the above-mentioned pallet transport device 10, the return rail 41 is provided in parallel with the transport rail 31. Thus, after the pallet 21 mounted on the transport rail 31 is transported, the pallet 21 is moved from the top end of the transport rail 31 to the top end of the return rail 41, and then the pallet 21 is moved back to the base end side of the return rail 41. Thereafter, by returning the pallet 21 to the base end side of the transport rail 31, a plurality of pallets 21 are transported in a circular manner.

[0074] In addition, if Figure 3 As shown, in the above-mentioned pallet transport device 10, the groove 91d formed inside and the plurality of through holes 91e connected to the outside are formed to be arranged along the transport rail 31 (i.e., the extension direction of the transport rail 31) with a predetermined interval T in the extension direction of the transport rail 31. Thus, during the transport of the pallet 21 carried on the transport rail 31, by supplying fluid toward the groove 91d as a fluid passage or sucking fluid from the groove 91d, and making the opposing component 93 having the recess 93a covering one or more through holes 91e opposed to the fluid rail 91, the recess 93a can be connected to the suction nozzle 26 carried on the pallet 21, and the pallet 21 and the opposing component 93 can be transported while the suction nozzle 26 is operated.

[0075] The description will start with conveying a plurality of pallets 21 to circulate. First, the plurality of pallets 21 are loaded onto the conveying rail 31. When loading the pallets 21, the pallets 21 are first loaded onto the base end side of the conveying rail 31, that is, the base end side stand 81. When the pallets 21 are loaded onto the conveying rail 31, the locking member 24 of the pallets 21 overlaps with the conveying belt 52.

[0076] After the tray 21 is loaded on the base end side of the transport rail 31, the transport belt 52 is circulated to transport the loaded tray 21 only by the predetermined pitch P. Then, the tray 21 is loaded on the transport rail 31 again from the base end side of the transport rail 31. This operation is repeated. Figure 8 As shown, a plurality of pallets 21 (six in this embodiment) are mounted on the transport rail 31 at the same pitch P as the pitch P of the processing stations 11 , 12 , and 13 .

[0077] Here, when the length of the opposing component 93 arranged on the pallet 21 is less than or the same as the predetermined pitch P, the opposing components 93 can be made to contact (abut) each other by sequentially loading the pallets 21 on the conveying rail 31, thereby making it easier to load the pallets 21 at the predetermined pitch P.

[0078] Next, a state in which a plurality of trays 21 are circulated and conveyed will be described.

[0079] When from Figure 8 The state shown in FIG. 1 makes the plurality of trays 21 advance while maintaining the predetermined interval P when the conveying belt 52 circulates along the conveying rail 31. Also, when the plurality of trays 21 advance only the predetermined interval P, as shown in FIG. Fig. 9 As shown in FIG. 1 , the tray 21 is initially separated from the top end of the transport rail 31. Also, since the movable body 72 is continuous with the top end of the transport rail 31, Figure 6 As shown, the pallet 21 that moves on the linear motion guide rail 33 on the transport rail 31 can be moved to the short rail 72 b of the movable body 72 , so that the initial pallet 21 can be mounted on the movable body 72 .

[0080] Next, if Figure 7 as well as Fig.10 As shown, the return tray transfer mechanism 70 is used to move the tray 21 mounted on the movable body 72 to the top of the return rail 41. Specifically, the ball screw 75 is rotated by the driving motor 76 to move the movable body 72 in the Y-axis direction, so that the movable body 72 can be moved from the top of the conveying rail 31 to the top of the conveying rail 31. Figure 6 The state shown moves to Figure 7 The tray 21 is then moved from the movable body 72 to the top of the return rail 41 , thereby transferring the tray 21 from the top of the transport rail 31 to the top of the return rail 41 .

[0081] Here, when the movable body 72 carrying the pallet 21 is moved together with the pallet 21 in the Y-axis direction orthogonal to the conveying belt 52, the protrusions 24a, 24b on the locking part 24 of the pallet 21 are offset and disengaged from the protrusions 52a, 52b extending in the width direction of the conveying belt 52 along the width direction thereof, so that the locking of the pallet 21 and the conveying belt 52 is released.

[0082] Furthermore, by moving the tray 21 together with the movable body 72 in the Y-axis direction, the tray 21 can be connected to the return rail 41, so that the movable bodies 72 and 82 are aligned with the return rail 41. Furthermore, when the tray 21 moves in the width direction of the return belt 62, the locking member 24 of the tray 21 is locked again on the return belt 62 provided along the return rail 41.

[0083] Therefore, by using the conveying belt 52 and the return belt 62 formed of so-called toothed belts, the tray 21 can be moved together with the movable body 72 in the Y-axis direction without any hindrance, thereby facilitating the re-engagement of the conveying belt 52 and the return belt 62 of the tray 21.

[0084] Next, the tray 21 is moved in the direction opposite to the conveying direction, and the tray 21 is placed on the return rail 41. Therefore, when the servo motor 69 of the tray return unit 61 is driven to circulate the return belt 62, the tray 21 placed on the movable body 72 moves from the top edge of the return rail 41 to the top end thereof. Thus, the tray 21 is transferred from the top end of the conveying rail 31 to the top end of the return rail 41.

[0085] In this way, after the tray 21 is transferred to the top end of the return rail 41, when the tray return unit 61 continues to circulate the return belt 62, the tray 21 moved from the movable body 72 to the return rail 41 further retreats on the return rail 41. And, the retreat of the tray 21 is implemented until the tray 21 reaches the base end of the return rail 41.

[0086] like Fig.11 As shown, when the pallet 21 is moved backward in such a manner that the movable body 82 of the transport pallet transfer mechanism 80 is accommodated on the base end side of the return rail 41, the pallet 21 that is mounted on the return rail 41 and moved backward moves to the movable body 82 on the transport pallet transfer mechanism 80, so that the pallet 21 is mounted on the movable body 82.

[0087] Next, the pallet 21 moved from the return rail 41 and mounted on the movable body 82 is moved from the base end of the return rail 41 to the base end of the transport rail 31 by the transport pallet transfer mechanism 80. Specifically, the motor 86 on the transport pallet transfer mechanism 80 is driven to rotate the ball screw 85 to move the movable body 82 in the Y-axis direction, so that the movable body 82 is moved from the base end of the return rail 41 to the base end of the transport rail 31. Fig.11 The status shown moves to Figure 8 The position shown is continuous with the base end of the transport rail 31.

[0088] After that, the pallet 21 is moved from the movable body 82 to the base end of the transport rail 31 again, so that the pallet 21 is transferred from the base end of the return rail 41 to the base end of the transport rail 31. That is, in a state where the movable body 82 and the transport rail 31 are continuous, the movable body 82 and the transport rail 31 are in the same straight line, so that the pallet 21 is again locked with the transport belt 52 provided along the transport rail 31. Therefore, the pallet 21 mounted on the movable body 82 continuous with the transport rail 31 can be transported again due to the circulation of the transport belt 52 and transferred to the base end of the transport rail 31. Thus, a plurality of pallets 21 including the pallet 21 can be circulated in a square shape in a plane.

[0089] Next, conveyance of the pallet 21 while operating the suction nozzle 26 as a fluid pressure device will be described.

[0090] That is, Figure 1 As shown, during the conveyance of the tray 21 mounted on the conveyance rail 31, the conveyance belt 52 provided along the conveyance rail 31 is circulated while the fluid is supplied toward the groove 91d serving as the fluid passage of the fluid rail 91 or the fluid is sucked from the groove 91d. Furthermore, the suction nozzle 26 mounted on the tray 21 is connected to the groove 91d, and the tray 21 is conveyed while the suction nozzle 26 is operated.

[0091] Specifically, if Figure 1 As shown in the enlarged view of FIG. 1 , a groove 91d serving as a fluid passage is formed on the fluid rail 91 opposite to the workpiece feeder 16. A plurality of through holes 91e are formed on a cover plate 91d mounted on a substrate 91a so as to cover the groove 91d. Therefore, the fluid pump 92 serving as a fluid supply suction unit is first driven to suction the gas inside the groove 91d covered by the cover plate 91b, thereby causing the inside of the groove 91d to become negative pressure.

[0092] In this state, when the tray 21 is placed opposite to the workpiece feeder 16, a facing member 93 is provided on the tray 21. The facing member 93 has a recessed portion 93a formed therein to cover the plurality of through holes 91e. Thus, the gas in the recessed portion 93a covering the through holes 91e is sucked through the through holes 91e of the fluid rail 91, and the recessed portion 93a becomes negative pressure. Figure 2 As shown, since the concave portion 93a and the suction nozzle 26 are connected by the communication path 93c, air is sucked from the suction nozzle 26 of the tray 21 communicating with the concave portion 93a through the communication path 93c. Therefore, the workpiece 14 supplied by the workpiece supply device 16 can be sucked at the lower end of the suction nozzle 26.

[0093] After the workpiece 14 is adsorbed, when the conveying belt 52 along the conveying rail 31 is circulated again, the tray 21 is moved forward in the state of adsorbing the workpiece 14. Figure 1 As shown, the pallet 21 is then located opposite the third processing station 13 .

[0094] Furthermore, the conveyance of the pallet 21 is stopped at the stage where the pallet 21 faces the third processing station 13. Furthermore, in the third processing station 13, the workpiece 14 adsorbed on the suction nozzle 26 of the pallet 21 is subjected to a predetermined process. Furthermore, after the predetermined process is completed, the conveying belt 52 is circulated again to convey the pallet 21 again. Such operations are repeated, and the conveyed pallet 21 faces the processing stations 11, 12, and 13 in sequence, so that the workpiece 14 adsorbed on the suction nozzle 26 of the pallet 21 is subjected to the processing in sequence.

[0095] Here, a plurality of through holes 91e are formed on the fluid rail 91 provided along the transport rail 31, and the plurality of through holes 91e are continuous in the length direction with a predetermined interval T therebetween. Thus, the pallet 21 in the process of being transported and the recessed portion 93a of the opposing member 93 of the pallet 21 opposing each processing station 11, 12, 13 cover any of the through holes 91e on the fluid rail 91.

[0096] Therefore, when the fluid pump 92 serving as a fluid supply suction unit is driven, the suction nozzle 26 connected to the recess 93a of the opposing part 93 on the tray 21 can always suck gas regardless of whether it is being transported, so that the adsorption state of the workpiece 14 at the lower end of the suction nozzle 26 is maintained.

[0097] After the processing by all the processing stations 11, 12, 13 is completed, the further conveyed pallet 21 faces the workpiece recovery machine 17. In the workpiece recovery machine 17 facing the pallet 21, the workpiece 14 subjected to a series of processing is removed from the suction nozzle 26 and recovered.

[0098] After the workpiece 14 is recovered, Figure 6 as well as Fig. 9 As shown, the further transported pallet 21 separates from the top end of the transport rail 31 , and the pallet 21 moves to the movable body 72 of the return pallet transfer mechanism 70 and is mounted on the movable body 72 .

[0099] Here, the fluid rail 91 disappears at the movable body 72. That is, the fluid rail 91 is not provided on the movable body 72. Therefore, even if the fluid pump 92 as the fluid supply suction unit is driven, the suction of the gas from the suction nozzle 26 of the tray 21 disappears on the movable body 72 where the fluid rail 91 disappears, and the tray 21 can be transferred to the return rail 41.

[0100] Furthermore, the movable body 72 continuous with the front end side of the transport rail 31 is provided so as to be movable in the Y-axis direction so as to be arranged with the processing stations 11, 12, and 13 arranged in the X-axis direction at the same pitch P. Thus, when a plurality of pallets 21 are mounted on the transport rail 31 at the same pitch P as the pitch P, when the first pallet 21 reaches the movable body 72, the other pallets 21 are also opposed to the processing stations 11, 12, and 13. Therefore, in each processing station 11, 12, and 13, the transport of the pallet 21 is temporarily stopped for processing of the workpiece 14.

[0101] For processing of the workpiece 14, while the transport of the pallet 21 is stopped, the first pallet 21 that has reached the top end of the transport rail 31 is transferred to the top end of the return rail 41 by the movable body 72. Then, the pallet 21 is moved back along the return rail 41, and the pallet 21 is transferred from the base end of the return rail 41 to the base end of the transport rail 31 again.

[0102] In this way, when a cycle of returning the tray 21 from the front end of the transport rail 31 to the base end of the transport rail 31 is performed once, the plurality of trays 21 mounted on the transport rail 31 can be transported in the counterclockwise direction.

[0103] Furthermore, each time such a cycle is implemented, the processing stations 11, 12, and 13 are operated while the movement of the pallet transport device 10 is stopped, and various processing, adsorption, and recovery of the workpieces 14 are synchronously performed on the suction nozzles 26 of the pallets 21 arranged on the transport rails 31.

[0104] Thus, in the pallet transport device 10 and the pallet transport method of the present invention, multiple pallets 21 can be transported in a circulating manner. By using the fluid rail 91 arranged in parallel with the transport rail 31, even a single fluid pump 92 as a fluid supply suction unit can simultaneously transport multiple pallets 21 while the suction nozzles 26 of the multiple pallets 21 are operated separately.

[0105] Furthermore, the groove 91d forming the fluid passage of the fluid rail 91 is formed to extend in the length direction of the fluid rail 91, that is, the conveying direction of the tray 21. Thus, even if the tray 21 mounted on the conveying rail 31 is conveyed, any through hole 91e of the fluid rail 91 covered by the opposing member 93 is necessarily connected to the recess 93a, and the tray 21 moves together with the opposing member 93, so any through hole 91e is necessarily connected to the recess 93a of the opposing member 93. As a result, even if the tray 21 moves, the adsorption of the workpiece 14 at the lower end of the suction nozzle 26 can be maintained (see Figure 2 ).

[0106] Therefore, in the pallet transport device 10 , the pallet 21 can be moved while the suction nozzle 26 is operated, and the fluid pump 92 that operates the suction nozzle 26 can be prevented from being mounted on the pallet 21 .

[0107] Here, when the gas in the groove 91d constituting the fluid passage is sucked by the fluid pump 92 and the gas in the recess 93a of the opposing member 93 is sucked through the through hole 91e, the opposing member 93 is adsorbed on the upper surface of the fluid rail 91, and this adsorption may become a resistance to the conveyance of the tray 21.

[0108] In this embodiment, in order to prevent the opposing member 93 from being adsorbed on the upper surface of the fluid rail 91, a roller 96 that rolls on the fluid rail 91 is pivotally supported on the opposing member 93. Thus, even if the opposing member 93 is aligned with the upper surface of the fluid rail 91, the resistance to the conveyance of the tray 21 can be reduced.

[0109] On the other hand, it can be considered that when the opposing member 93 is placed opposite to the fluid rail 91 with a predetermined gap from the upper surface of the fluid rail 91, the gas as the fluid flows into the recess 93a from the predetermined gap, so that it becomes difficult to suck the gas from the suction nozzle 26 connected to the recess 93a. Therefore, by setting the predetermined gap to 0-0.1mm, the amount of gas that makes it difficult to suck the gas from the suction nozzle 26 flows into the recess 93a less. In addition, considering the inflow of gas from the gap, it is possible to continue the suction of gas from the suction nozzle 26 by ensuring a sufficient cross-sectional area of ​​the groove 91d and the number or size of the through holes 91e.

[0110] Furthermore, it is also conceivable that if a through hole 91e not covered by the opposing member 93 is generated, gas flows from the through hole 91e into the groove 91d, and it becomes difficult to draw gas from the recessed portion 93a that communicates with the groove 91d via other through holes 91e covered by the opposing member 93. Therefore, it is possible to avoid the situation where the opposing member 93 does not cover the through hole 91e by continuously loading a plurality of trays 21 on the transport rail 31 and transporting the plurality of trays 21 by bringing the opposing members 93 close to or in contact with each other. In addition, it is preferred that the opposing ends of the adjacent opposing members 93 abut against each other.

[0111] Furthermore, it can be considered that if the length of the transport rail 31 is long, the fluid rail 91 provided in parallel with the transport rail 31 also becomes long, so that the fluid rail 91 may be distorted relative to the transport rail 31 to be carried and transported with respect to the pallet 21. Therefore, by mounting the opposing member 93 on the pallet 21 via the hanging unit 94, the opposing member 93 is always pressed toward the fluid rail 91 by the hanging unit 94. As a result, the distortion of the fluid rail 91 is absorbed by the hanging unit 94, so that the pallet 21 can be transported while maintaining a predetermined gap from the upper surface of the fluid rail 91 of the opposing member 93.

[0112] Next, the effects of this embodiment will be described.

[0113] The pallet transport device 10 involved in this embodiment includes: a transport rail 31, which carries the pallet 21 equipped with the suction nozzle 26 so as to be movable; a pallet transport unit 51, which transports the pallet 21 mounted on the transport rail 31; a fluid rail 91, which is arranged along the transport rail 31 and has a groove 91d formed therein; and a fluid pump 92, which is arranged to communicate with the groove 91d and supply fluid to the groove 91d or suck fluid from the groove 91d. A plurality of through holes 91e are formed in the fluid rail 91 to connect the groove 91d with the outside, and an opposing component 93 and a connecting path 93c are provided on the pallet 21. The opposing component 93 has a recess 93a that covers a portion of the plurality of through holes 91e and is opposed to the fluid rail 91, and the connecting path 93c connects the recess 93a with the suction nozzle 26.

[0114] The pallet conveying method involved in the present embodiment carries the pallet 21 equipped with the suction nozzle 26 on the conveying rail 31 for conveying, and sets the fluid rail 91 having a groove 91d formed inside and a plurality of through holes 91e connecting the groove 91d with the outside along the conveying rail 31, supplies fluid toward the groove 91d or sucks fluid from the groove 91d, and makes the opposing component 93 having a recess 93a covering a part of the plurality of through holes 91e opposed to the fluid rail 91, so that the recess 93a is connected with the suction nozzle 26 carried on the pallet 21, and the suction nozzle 26 is operated while the pallet 21 and the opposing component 93 are conveyed.

[0115] According to such a structure, since the fluid rail 91 is set along the conveying rail 31, fluid is supplied or sucked toward the fluid rail 91 from the fluid pump 92, the suction nozzle 26 mounted on the tray 21 is connected to the fluid rail 91, and the tray 21 is conveyed while the suction nozzle 26 is operated, it is possible to avoid the fluid pump 26 that operates the suction nozzle 26 being mounted on the tray 21.

[0116] Furthermore, even when a plurality of trays 21 are carried on the transport rail 31, the fluid rail 91 can be arranged along the transport rail 31 so that the suction nozzles 26 carried on the plurality of trays 21 are connected to the fluid rail 91. As a result, even with a single fluid pump 92, the suction nozzles 26 carried on the plurality of trays 21 can be operated simultaneously by supplying or sucking fluid toward the fluid rail 91 using the fluid pump 92.

[0117] Furthermore, in the present embodiment, even when the tray 21 is transported to any position on the transport rail 31 by the tray transport unit 51 , the recessed portion 93 a covers a portion of the plurality of through holes 91 e .

[0118] According to this structure, the suction nozzle 26 of the tray 21 and the groove 91d of the fluid rail 91 can be reliably connected via the recess 93a that covers part of the plurality of through holes 91e formed in the fluid rail 91. As a result, the tray 21 can be conveyed while the suction nozzle 26 is operated.

[0119] Furthermore, in the present embodiment, the roller 96 is pivotally supported on the facing member 93 , and the roller 96 rolls on the fluid rail 91 , so that the facing member 93 and the fluid rail 91 face each other with a predetermined gap therebetween.

[0120] According to such a configuration, since the facing member 93 can be prevented from being adsorbed on the upper surface of the fluid rail 91, the sliding resistance caused by the contact between the facing member 93 and the fluid rail 91 can be eliminated. As a result, the resistance to the conveyance of the tray 21 can be reduced.

[0121] Furthermore, in the present embodiment, the tray 21 is provided with a hanging unit 94 , and the hanging unit 94 presses the facing member 93 toward the fluid rail 91 .

[0122] According to this structure, the distortion of the fluid 91 is absorbed by the suspension unit 94 , so that the pallet 21 can be conveyed while maintaining a predetermined gap from the upper surface of the fluid rail 91 of the opposing member 93 .

[0123] Furthermore, in the present embodiment, a plurality of trays 21 are mounted on the transport rail 91 and arranged along the transport rail 31 , and the opposing ends of adjacent facing members 93 abut against each other.

[0124] According to this structure, since the ends of the adjacent opposing parts 93 facing each other abut against each other, it is possible to eliminate the gap between the ends of the adjacent opposing parts 93. As a result, it is possible to avoid the occurrence of the through hole 91e that is not covered by the opposing part 93 during the transportation of the pallet 21, thereby preventing air leakage caused by the through hole 91e.

[0125] Furthermore, in the present embodiment, the tray 21 is formed so that the end portion of the fluid rail 91 in the extending direction does not protrude from the end portion of the opposing member 93 .

[0126] According to this structure, since the end of the tray 21 in the extension direction of the fluid rail 91 does not protrude from the end of the opposing member 93, it is possible to prevent the formation of gaps between the ends of adjacent opposing members 93 caused by the abutment of the ends of adjacent trays 21. As a result, it is possible to avoid the formation of through holes 91e that are not covered by the opposing member 93 during the transportation of the tray 21, thereby preventing air leakage caused by the through holes 91e.

[0127] In addition, in the present embodiment, the pallet transport device 10 further comprises: a return rail 41, which is arranged parallel to the transport rail 31 and carries the pallet 21 so as to be movable; a pallet return unit 61, which moves the pallet 21 carried on the return rail 41 in a direction opposite to the transport direction; a return pallet transfer mechanism 70, which transfers the pallet 21 carried on the transport rail 31 from the top end of the transport rail 31 to the top end of the return rail 41; and a transport pallet transfer mechanism 80, which transfers the pallet 21 carried on the return rail 41 from the base end of the return rail 41 to the base end of the transport rail 21.

[0128] According to this configuration, the tray 21 can be conveyed so as to circulate along the conveyance rails 31 and the return rails 41 .

[0129] In addition, in the present embodiment, the pallet conveying unit 51 includes a conveying belt 52 which is provided so as to be able to circulate along the conveying rail 31, and a servo motor 59 which circulates the conveying belt 52, and the pallet returning unit 61 includes a return belt 62 which is provided so as to be able to circulate along the return rail 41, and a servo motor 69 which circulates the return belt 62. The pallet 21 is provided with a locking member 24 which moves in the width direction of the conveying belt 52 or the return belt 62 together with the pallet 21 so as to be able to be locked with the conveying belt 52 or the return belt 62.

[0130] According to this configuration, since the movement of the tray 21 independently of the conveying belt 52 or the returning belt 62 is prohibited, the tray 21 is conveyed while being locked to the conveying belt 52 or the returning belt 62 .

[0131] Furthermore, a plurality of trays 21 are continuously mounted on the transport rails 31 , and the trays 21 are transported while the facing members 93 provided on the plurality of trays 21 are brought close to or in contact with each other.

[0132] According to this configuration, it is possible to avoid the occurrence of the through-hole 91 e that is not covered by the facing member 93 during the conveyance of the tray 21 , and to prevent air leakage due to the through-hole 91 e .

[0133] Although the embodiments of the present invention have been described above, the above embodiments merely illustrate a part of application examples of the present invention and do not intend to limit the technical scope of the present invention to the specific configurations of the above embodiments.

[0134] Next, modified examples of the present invention will be described.

[0135] In the above-mentioned embodiment, the case where the length W2 of the opposing part 93 in the direction of the fluid rail 91 is longer than the length W1 in the direction of the fluid rail 91 of the base 23 of the tray 21 is described. However, the length W2 of the opposing part 93 in the direction of the fluid rail 91 is not limited to this, and may be the same as the length W1 in the direction of the fluid rail 91 of the base 23 of the tray 21. Even in this case, the trays 21 can be transported by continuously placing a plurality of trays 21 on the transport rail 31 and bringing the opposing parts 93 of the plurality of trays 21 close to or in contact with each other, thereby avoiding the situation where the opposing part 93 does not cover the through hole 91e.

[0136] In the above embodiment, the electrically driven servomotors 59 and 69 are used to rotate the pulleys 55 and 66 to circulate the conveying belt 52 and the return belt 62. However, the present invention is not limited to this, and as long as the pulleys 55 and 66 can be rotated, a fluid pressure cylinder or a fluid pressure motor may be used instead of the servomotor.

[0137] In addition, in the above-mentioned embodiment, the fluid rail 91 is not allowed to follow the return rail 41, and the case where the suction nozzle 26 is not operated in the tray 21 mounted on the return rail 41 is described. However, this is not limited to this, and the fluid rail 91 may be formed along the return rail 41 that moves the tray 21 backward. In this case, by making the opposing member 93 opposed to the fluid rail 91 provided along the return rail 41, the suction nozzle 26 can be operated even in the tray 21 mounted on the return rail 41.

[0138] In addition, in the above-mentioned embodiment, the fluid pressure device is described as a suction nozzle 26 that sucks the workpiece 14 by suction of gas. However, the fluid pressure device is not limited to this as long as it can work using fluid. For example, it can also be a component that rotates the workpiece 14 by suction of fluid, or a component that processes the workpiece 14.

[0139] In the above embodiment, the suction nozzle 26 is operated by sucking the gas in the groove 91d of the fluid rail 91 to a negative pressure using the fluid pump 92. However, the suction nozzle 26 may be operated by supplying fluid to the groove 91d to pressurize the groove 91d and provided on the tray 21 using the fluid supplied from the groove 91d.

[0140] In this case, it is conceivable that the opposing member 93 covering the through hole 91e communicating with the groove 91d floats up, thereby causing fluid leakage. Therefore, by providing a suspension unit 94 that presses the opposing member 93 toward the fluid rail 91 on the tray 21, the opposing member 93 can be prevented from floating up from the fluid rail 91, and leakage of the fluid can be suppressed, thereby ensuring the operation of the suction nozzle 26.

[0141] This application claims priority based on Japanese Patent Application No. 2019-151021 filed with the Japan Patent Office on August 21, 2019, and all the contents of that application are incorporated into this specification by reference.

Claims

1. A pallet transport device, comprising: A transport rail that carries the pallet carrying the fluid pressure device so that it can move; a pallet transport unit for transporting the pallet mounted on the transport rail; a fluid rail, which is arranged along the transport rail and has a fluid passage formed therein; a fluid supply and suction unit, which is arranged to communicate with the fluid passage and supplies fluid toward the fluid passage or suctions fluid from the fluid passage, The fluid rail is provided with a plurality of through holes for connecting the fluid passage with the outside. The tray is provided with an opposing member and a communication path, wherein the opposing member is formed with a recessed portion covering a portion of the plurality of through holes and is opposed to the fluid rail, and the communication path connects the recessed portion with the fluid pressure device. A roller is pivotally supported on the opposing member, and the roller rolls on the fluid rail so that the opposing member and the fluid rail are opposed to each other with a predetermined gap therebetween.

2. The pallet handling device according to claim 1, wherein: When the pallet is conveyed to any position of the conveyance rail by the pallet conveyance unit, the recessed portions cover a portion of the plurality of through holes.

3. The pallet transport device according to claim 1 or 2, wherein: The tray is provided with a suspension unit, and the suspension unit presses the opposing component toward the fluid rail.

4. The pallet transport device according to claim 1 or 2, wherein: A plurality of the trays are mounted on the transport rail and arranged along the transport rail. The opposing ends of the adjacent opposing members abut against each other.

5. The pallet handling device as claimed in claim 4, wherein: The tray is formed so that an end portion of the fluid rail in the extending direction does not protrude from the end portion of the opposing member.

6. The pallet transport device according to claim 1 or 2, wherein: Also available: A return rail, which is arranged in parallel with the transport rail and carries the pallet so as to be movable; a pallet return unit that moves the pallet mounted on the return rail in a direction opposite to a conveying direction; a return pallet transfer mechanism, which transfers the pallet mounted on the transport rail from the top end of the transport rail to the top end of the return rail; The transport pallet transfer mechanism transfers the pallet mounted on the return rail from the base end of the return rail to the base end of the transport rail.

7. The pallet handling device according to claim 6, wherein: The pallet handling unit comprises: a conveying belt, wherein the conveying belt is configured to be able to circulate along the conveying rail, a first circulation unit, the first circulation unit circulates the conveyor belt, The tray return unit has: a return belt, the return belt being arranged to be able to circulate along the return rail, a second circulation unit, the second circulation unit circulates the return belt, The pallet is provided with a locking member that can be moved in the width direction of the conveying belt or the return belt together with the pallet and can be locked with the conveying belt or the return belt.

8. A pallet transport method, comprising: placing a pallet equipped with a fluid pressure device on a transport rail for transport; A fluid rail having a fluid passage formed therein and a plurality of through holes for connecting the fluid passage with the outside is arranged along the transport rail. supplying fluid toward the fluid passage or drawing fluid from the fluid passage, placing an opposing member having a recessed portion covering a portion of the plurality of through holes opposed to the fluid rail, The recess is connected to the fluid pressure device mounted on the pallet, and the pallet and the opposing member are transported while the fluid pressure device is operated. A roller is pivotally supported on the facing member, and the roller rolls on the fluid rail to convey the tray while the facing member and the fluid rail are facing each other with a predetermined gap therebetween.

9. The pallet handling method according to claim 8, wherein: The tray is conveyed while the opposing member is pressed against the fluid rail.

10. The pallet transport method according to claim 8 or 9, wherein: The plurality of trays are continuously mounted on the transport rail, and the trays are transported while the facing members provided on the plurality of trays are brought close to or in contact with each other.

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