A paddle fixing device

Abstract

The present invention relates to the technical field of photovoltaic module assembly, and specifically to a paddle fixing device, which aims to solve the problem in the prior art that only the paddle is fixed but the sealing with the furnace door is not achieved. The technical key points are: it includes a paddle outer tube and a paddle, the paddle outer tube is the external sealing component of the paddle, and the two ends of the paddle outer tube are respectively provided with a tail cover plate and a furnace door, one end of the paddle is arranged to abut against the tail cover plate, and the other end points to the furnace door and extends outward, and the paddle passes through the furnace door. Several support rings are arranged on the paddle outer tube for fixing the position of the paddle. Through the arrangement of the support ring, the fixation of the paddle and the sealing of the paddle with the furnace door are achieved at the same time, ensuring the normal operation of the equipment.

Description

Technical Field

[0001] The invention relates to the technical field of photovoltaic assembly preparation, and in particular to a paddle fixing device. Background Art

[0002] As one of the important equipment in semiconductor device process equipment, diffusion equipment is widely used in the production of integrated circuits, power electronics, solar cells and other industries. In the photovoltaic industry, high-temperature diffusion furnaces are mainly used to dope single-crystal silicon wafers and polycrystalline silicon wafers to form PN junctions. Annealing equipment is mainly used for annealing and activation. Low-pressure chemical vapor deposition (LPCVD) equipment is mainly used for thin film growth, which can be used for the growth of intrinsic amorphous silicon, doped amorphous silicon, silicon oxide and other thin films. The main function of plasma enhanced chemical vapor deposition (PECVD) equipment in the process flow of solar photovoltaic cells is thin film growth, which can be used for the growth of silicon nitride, aluminum oxide, intrinsic silicon, doped amorphous silicon and other thin films. One of the common features of diffusion equipment, annealing equipment and PECVD equipment is that they all need to push the boat with silicon wafers into the furnace tube and exit the furnace tube.

[0003] The existing conventional mechanism only fixes the paddle but does not seal it with the furnace door. The function of the independent paddle in this structure is only to serve as a vehicle for entry and exit. The furnace door is opened and closed and sealed independently. This method requires a paddle mechanism to realize the process of lowering and taking up the boat, and one process flow requires multiple actions of putting in the paddle, putting down the boat, taking out the paddle, putting in the paddle, taking out the boat, and taking out the paddle. There are many processes, and the risks of putting down and taking out the boat are increased. The paddle is sealed with the furnace door but not fixed. The paddle is inserted in the sealing cylinder and limited within a certain range, and the cylinder is sealed with the furnace door. As the positioning requirements of the mechanical structure of the equipment become higher and higher, and the safety requirements become higher and higher, the paddle position needs to be fixed. Summary of the invention

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defect in the prior art that only the paddle is fixed but the sealing with the furnace door is not achieved, thereby providing a paddle fixing device.

[0005] The above technical objectives of the present invention are achieved through the following technical solutions:

[0006] 1. A paddle fixing device, characterized in that it comprises a paddle outer tube and a paddle, wherein the paddle outer tube is an external sealing component of the paddle, and the two ends of the paddle outer tube are respectively provided with a tail cover plate and a furnace door, one end of the paddle is mutually abutted with the tail cover plate, and the other end points to the furnace door and extends outward, and the paddle passes through the furnace door. The paddle outer tube is provided with a plurality of support rings for fixing the position of the paddle.

[0007] 2. A propeller fixing device according to claim 1, characterized in that: one of the support rings is arranged on the end portion of the propeller outer tube pointing to the tail cover plate, the support ring is arranged on the inner wall of the propeller outer tube, and a pressure block and an adjusting bolt are respectively arranged on the inner walls of three sides of the support ring, and the adjusting bolt is perpendicular to the side where it is located and is used to adjust the position of the pressure block.

[0008] 3. A paddle fixing device according to claim 2, characterized in that: one of the support rings is located at the middle position in the length direction of the paddle, the support ring is arranged on the inner wall of the paddle outer tube, three side walls of the support ring are respectively provided with through holes, springs are arranged in the through holes, the side walls of the support ring with the through holes are respectively provided with a paddle pressure block and a fixed block, the paddle pressure block is located on the inner wall of the support ring, the fixed block is inserted in the spring and fixedly arranged with the paddle pressure block, and the paddle pressure block is provided with fixing bolts for fixing the fixed block and the paddle pressure block.

[0009] 4. A paddle fixing device according to claim 3, characterized in that: a through hole matching the through hole is provided on the side wall of the paddle outer tube, a first machine screw and a second machine screw are provided in the through hole, the first machine screw is threadedly fixed on the side wall of the through hole, and the first machine screw is arranged to be in contact with the outer wall of the fixing block at one end pointing to the side wall of the support ring.

[0010] 5. A paddle fixing device according to claim 4, characterized in that a sealing nut is further arranged on the outer side of the through hole, and a sealing ring is arranged on the inner wall of the sealing nut.

[0011] 6. A paddle fixing device according to claim 5, characterized in that: a plurality of cover plate fixing buckles are arranged on the tail cover plate, the tail cover plate is fixed to the end of the paddle outer tube through the cover plate fixing buckles, and a sealing ring is also arranged on the inner wall of the tail cover plate.

[0012] One of the above BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0014] Figure 1 It is a structural schematic diagram of a paddle fixing device according to an embodiment of the present invention;

[0015] Figure 2 It is an enlarged schematic diagram of a support wheel in one embodiment of the present invention;

[0016] Figure 3 is an enlarged schematic diagram of another support ring in one embodiment of the present invention;

[0017] Figure 4 It is a schematic diagram of the disassembly of the propeller outer cylinder in one embodiment of the present invention.

[0018] Description of reference numerals:

[0019] 1. Paddle; 2. Paddle outer tube; 21. Through hole; 211. First machine screw; 212. Second machine screw; 22. Sealing nut; 221. Sealing ring; 3. Tail cover; 31. Cover fixing buckle; 32. Sealing ring; 4. Furnace door; 5. Support ring; 51. Pressure block; 52. Adjusting bolt; 53. Through hole; 54. Spring; 541. Paddle pressure block; 542. Fixing block; 543. Fixing bolt. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0021] See also Figure 1 and Figure 2 A paddle fixing device includes a paddle outer tube 2 and a paddle 1. The paddle outer tube 2 is an external sealing component of the paddle 1. The two ends of the paddle outer tube 2 are respectively provided with a tail cover plate 3 and a furnace door 4. One end of the paddle 1 is mutually abutted with the tail cover plate 3, and the other end points to the furnace door 4 and extends outward. The paddle 1 passes through the furnace door 4. A plurality of support rings 5 ​​are provided on the paddle outer tube 2 to fix the position of the paddle 1.

[0022] See also Figure 1 and Figure 2 ,, one of the support rings 5 ​​is arranged at one end of the propeller outer tube 2 pointing to the tail cover plate 3, the support ring 5 is arranged on the inner wall of the propeller outer tube 2, and a pressure block 51 and an adjusting bolt 52 are respectively arranged on the inner walls of three sides of the support ring 5, and the adjusting bolt 52 is perpendicular to the side where the adjusting bolt 52 is located, and is used to adjust the position of the pressure block 51. During use, one side wall of the propeller 1 is arranged to fit against the inner wall of the support ring 5, and the other three sides are arranged to abut against the pressure block 51.

[0023] See also Figure 3In one embodiment, one of the support rings 5 ​​is located at the middle position in the length direction of the paddle 1, and the support ring 5 is arranged on the inner wall of the paddle outer tube 2. The three side walls of the support ring 5 are respectively provided with through holes 53, and the side wall of the paddle outer tube 2 is provided with a through hole 21 matching the through hole 53. A spring 54 is arranged in the through hole 53, and the side walls of the support ring 5 provided with the through hole 53 are respectively provided with a paddle pressure block 51 and a fixing block 542. The paddle pressure block 51 is located on the inner wall of the support ring 5, and the fixing block 542 is inserted in the spring 54 and fixed with the paddle pressure block 51. The paddle pressure block 51 is provided with a fixing bolt 543 for fixing the fixing block 542 and the paddle pressure block 51. The through hole 21 is provided with a first machine screw 211 and a second machine screw 212, wherein the first machine screw 211 is threadedly fixed on the side wall of the through hole 21, and the first machine screw 211 is arranged to be in contact with the outer wall of the fixed block 542 by pointing to one end of the side wall of the support ring 5, and the position of the fixed block 542 is adjusted by the first machine screw 211, thereby achieving the adjustment of the position of the paddle pressure block 51. The second machine screw 212 is used to fix the position of the first machine screw 211 to prevent it from loosening. In one embodiment, a sealing nut 22 is further provided on the outside of the through hole 21, and a sealing ring 221 is provided on the inner wall of the sealing nut 22. The sealing nut 22 is sealed between the sealing ring 221 and the through hole 21.

[0024] The tail cover plate 3 and the propeller outer tube 2 are arranged in close contact with each other. In one embodiment, please refer to Figure 4 The tail cover plate 3 is provided with a plurality of cover plate fixing buckles 31, and the tail cover plate 3 is fixedly provided at the end of the paddle outer tube 2 through the cover plate fixing buckles 31. In one embodiment, a sealing ring 32 is also provided on the inner wall of the tail cover plate 3, and the sealing ring 32 is respectively attached to the tail cover plate 3 and the inner wall of the paddle outer tube 2 of the paddle 1 to achieve the sealing of the paddle outer tube 2.

[0025] The present application provides a paddle fixing device, which, through the provision of a support ring 5, simultaneously achieves the fixation of the paddle 1 and the sealing of the paddle 1 and the furnace door 4, thereby ensuring the normal operation of the equipment.

[0026] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention.

Claims

1. A paddle fixing device, characterized in that: The invention comprises a paddle outer tube (2) and a paddle (1), wherein the paddle outer tube (2) is an external sealing component of the paddle (1), and a tail cover plate (3) and a furnace door (4) are respectively arranged at two ends of the paddle outer tube (2), one end of the paddle (1) is arranged to abut against the tail cover plate (3), and the other end points to the furnace door (4) and extends outwards, and the paddle (1) passes through the furnace door (4); a plurality of support rings (5) are arranged on the paddle outer tube (2) for fixing the position of the paddle (1); One of the support rings (5) is arranged at one end of the propeller outer tube (2) pointing to the tail cover plate (3), and the support ring (5) is arranged on the inner wall of the propeller outer tube (2). In addition, a pressure block (51) and an adjusting bolt (52) are respectively arranged on the inner walls of three sides of the support ring (5), and the adjusting bolt (52) is perpendicular to the side where the adjusting bolt (52) is located, and is used to adjust the position of the pressure block (51); One of the support rings (5) is located at the middle position of the length direction of the paddle (1). The support ring (5) is arranged on the inner wall of the paddle outer tube (2). The three side walls of the support ring (5) are respectively provided with through holes (53). A spring (54) is arranged in the through hole (53). The side walls of the support ring (5) provided with the through hole (53) are respectively provided with a paddle pressure block (541) and a fixing block (542). The paddle pressure block (541) is located on the inner wall of the support ring (5). The fixing block (542) is inserted in the spring (54) and fixedly arranged with the paddle pressure block (541). The paddle pressure block (541) is provided with a fixing bolt (543) for fixing the fixing block (542) and the paddle pressure block (541).

2. A paddle fixing device according to claim 1, characterized in that: A through hole (21) matching the through hole (53) is provided on the side wall of the paddle outer tube (2), and a first machine screw (211) and a second machine screw (212) are provided in the through hole (21), and the first machine screw (211) is threadedly fixed on the side wall of the through hole (21), and one end of the first machine screw (211) pointing to the side wall of the support ring (5) is arranged to fit the outer wall of the fixing block (542).

3. A paddle fixing device according to claim 2, characterized in that: A sealing nut (22) is also provided on the outside of the through hole (21), and a sealing ring (221) is provided on the inner wall of the sealing nut (22).

4. A paddle fixing device according to claim 3, characterized in that: The tail cover plate (3) is provided with a plurality of cover plate fixing buckles (31), the tail cover plate (3) is fixedly arranged at the end of the propeller outer tube (2) via the cover plate fixing buckles (31), and the inner wall of the tail cover plate (3) is also provided with a sealing ring (32).

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