An air-floating adjustment probe station

Abstract

The invention discloses an air-floating type adjustable probe station, comprising a machine station, a microscope and a probe feeding unit arranged on the machine station, and is characterized in that: a movable stage and a probe moving control seat are arranged on the operating platform of the machine station, an air-floating bearing is arranged at the bottom of the movable stage, a supporting shaft and a rotating lifting structure which is rotatably matched with the supporting shaft and can be lifted and lowered are arranged on the movable stage, a mounting plate, an X-direction adjusting mechanism, a Y-direction adjusting mechanism and a Z-direction adjusting mechanism are arranged on the probe moving control seat, the probe feeding unit is arranged on the mounting plate, a mounting plate for placing a test element is arranged on the rotating lifting structure, and the mounting plate is driven by the X-direction adjusting mechanism, the Y-direction adjusting mechanism and the Z-direction adjusting mechanism to make the probe of the probe feeding unit contact and conduct with the test element.

Description

Technical Field

[0001] The invention relates to an electronic component testing device, in particular to an air-floating regulating probe station. Background Art

[0002] Nowadays, probe stations are precision machines that mainly test and analyze electronic components (such as chips, wafers, etc.) in the semiconductor industry and optoelectronics industry. Probe stations are widely used in the research and development of precision electrical measurements of complex and high-speed devices, aiming to ensure quality and reliability, and reduce research and development time and device manufacturing process costs. With the development of semiconductor technology, the integration of chips is getting higher and higher, and the requirements for probe stations are also getting higher and higher. The applicant has designed a manual air-floating adjustment probe station that is easy to operate and has high precision. Summary of the invention

[0003] In order to overcome the deficiencies of the prior art, the present invention provides an air-floating adjustment probe station.

[0004] The technical solution adopted by the present invention to solve its technical problem is:

[0005] An air-floating adjustable probe station comprises a machine platform, a microscope and a probe feeding unit arranged on the machine platform, characterized in that: a movable stage and a probe moving control seat are arranged on the operating platform of the machine platform, an air-floating bearing is arranged at the bottom of the movable stage, a support shaft and a rotating lifting structure which is rotatably matched with the support shaft and can be lifted and lowered are arranged on the movable stage, a mounting plate, an X-direction adjustment mechanism, a Y-direction adjustment mechanism and a Z-direction adjustment mechanism are arranged on the probe moving control seat, and the probe feeding unit is arranged on the mounting plate, a carrier plate for placing a test element is arranged on the rotating lifting structure, and the mounting plate is driven by the X-direction adjustment mechanism, the Y-direction adjustment mechanism and the Z-direction adjustment mechanism to make the probe of the probe feeding unit contact and conduct with the test element.

[0006] The rotary lifting structure comprises a supporting sleeve and a rotating seat. The supporting sleeve cooperates with the supporting shaft through a ball sleeve. The rotating seat is connected to the supporting sleeve through a bearing assembly. The loading plate is connected to the supporting sleeve.

[0007] The rotating seat is provided with an inclined groove and a hand lever, the movable loading platform is provided with a support plate, and the support plate is provided with a guide column located in the inclined groove.

[0008] An angle fine-tuning mechanism is provided on the movable loading platform, and the angle fine-tuning mechanism includes an angle adjustment plate, an adjustment support plate arranged oppositely, an elastic push rod arranged on one adjustment support plate, and an angle adjustment rod arranged on the other adjustment support plate. The angle adjustment plate is connected to the support sleeve, and the angle adjustment plate is located between the elastic push rod and the angle adjustment rod and is in contact with both of them.

[0009] The X-direction adjustment mechanism includes an X-direction slide and an X-direction fine-tuning rod, the Y-direction adjustment mechanism includes a Y-direction slide and a Y-direction fine-tuning rod arranged on the X-direction slide; the Z-direction adjustment mechanism includes a Z-direction slide and a Z-direction fine-tuning rod arranged on the Y-direction slide, and the mounting plate is connected to the Z-direction slide.

[0010] The X-axis slide is provided with a V-shaped rod 1 that can rotate on the X-axis slide, the Y-axis fine-tuning rod can squeeze one rod foot of the V-shaped rod 1 to rotate the V-shaped rod 1, and at the same time, the other rod foot of the V-shaped rod 1 can push the Y-axis slide to move, and an elastic member 1 that can reset the Y-axis slide is provided between the Y-axis slide and the X-axis slide.

[0011] The Y-axis slide is provided with a V-shaped rod 25 that can rotate on the Y-axis slide. The Z-axis fine-tuning rod can squeeze one rod foot of the V-shaped rod 25 to rotate the V-shaped rod 25, and at the same time, the other rod foot of the V-shaped rod 25 can drive the Z-axis slide to rise.

[0012] The Y-axis slide plate is provided with a roller one, and the other rod foot of the V-shaped rod one can push the roller one.

[0013] A second roller is disposed on the other rod foot of the second V-shaped rod 25, and the second roller is in contact with the Z-direction slide plate.

[0014] A second elastic member capable of resetting the X-direction slide is provided between the X-direction slide and the operating platform.

[0015] The beneficial effects of the present invention are as follows: the movable stage of the present invention adopts an air bearing support, so that only a small force is required to move it during manual operation, so it is convenient and easy to accurately and conveniently position it quickly; the probe feeding unit adopts an X-direction adjustment mechanism, a Y-direction adjustment mechanism and a Z-direction adjustment mechanism to achieve three-dimensional spatial adjustment, so that the probe of the probe feeding unit can be easily and accurately brought into contact with the tested component. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0017] Figure 1 It is the overall structural view of the present invention;

[0018] Figure 2 It is the overall structural view of the mobile stage;

[0019] Figure 3 It is a cross-sectional structural view of the moving stage;

[0020] Figure 4 This is the overall structural view of the probe movement control seat;

[0021] Figure 5 This is a view of the internal structure of the probe movement control seat;

[0022] Figure 6 This is a view of the internal structure of the bottom of the probe movement control base. DETAILED DESCRIPTION

[0023] Reference Figures 1 to 6 The present invention discloses an air-floating adjustable probe station, comprising a machine 1, a microscope 2 and a probe feeding unit 3 arranged on the machine 1. Because the electrical connection holes on the chip or wafer are very small, we need to use the microscope 2 to see clearly, so as to accurately insert the probe of the probe feeding unit 3. The probe feeding unit 3 is purchased from outside, so the specific structure and function are not described in detail.

[0024] As shown in the figure, the operating platform 4 of the machine 1 is provided with a moving stage and a probe moving control seat. The operating platform 4 is made of marble. The bottom surface of the base of the moving stage is equipped with four air bearings (not shown in the figure). The moving stage is lifted by the air bearings, thereby avoiding the friction between the moving stage and the operating platform 4. The operation is light and easy to position. The moving stage is provided with a support shaft 5 and a rotating lifting structure that is rotatably matched with the support shaft 5 and can be lifted and lowered. The probe moving control seat is provided with a mounting plate 6, an X-direction adjustment mechanism, a Y-direction adjustment mechanism and a Z-direction adjustment mechanism, and the probe feeding unit 3 is arranged on the mounting plate 6. The rotating lifting structure is provided with a carrier plate 7 for placing the test element. The mounting plate 6 is driven by the X-direction adjustment mechanism, the Y-direction adjustment mechanism and the Z-direction adjustment mechanism to make the probe of the probe feeding unit 3 contact and conduct with the test element.

[0025] As shown in the figure, the rotary lifting structure includes a supporting sleeve 8 and a rotating seat 9. The supporting sleeve 8 cooperates with the supporting shaft 5 through a ball sleeve 13. The ball sleeve is fixed to the supporting shaft 5, and the supporting sleeve 8 and the ball sleeve 13 can slide relative to each other. In order to prevent deviation and improve stability, a guide sleeve 10 is actually provided between the supporting sleeve 8 and the ball sleeve 13. The guide sleeve 10 is fixed to the supporting sleeve 8, and the guide sleeve 10 and the ball sleeve can slide relative to each other. The rotating seat 9 is connected to the supporting sleeve 8 through a bearing assembly, and the loading plate 7 is connected to the supporting sleeve 8. The bearing assembly includes a deep groove ball bearing 11 arranged at the bottom and a plane bearing 12 located at the top. The purpose of such arrangement is to ensure that the rotating seat 9 can rotate relatively independently with the support sleeve 8, but the rotating seat 9 can drive the support sleeve 8 to rise and fall when it is raised or lowered. The rotating seat 9 is provided with an inclined groove 14 and a hand lever 15, and the movable loading platform is provided with a support plate 16, and the support plate 16 is provided with a guide column (not shown in the figure) located in the inclined groove 14. Through the above structure, when the hand lever 15 drives the rotating seat 9 to rotate, the rotating seat 9 rises or falls at the same time through the inclined groove 14 and the guide column, thereby also driving the support sleeve 8 and the loading plate 7 to rise, thereby realizing rapid lifting and lowering, and a small plane is designed at the top of the inclined groove 14, so that the guide column can keep the rotating seat 9 at a height without falling when it is stuck on the plane.

[0026] As shown in the figure, the movable stage is provided with an angle fine-tuning mechanism, which includes an angle adjustment plate 16, an adjustment support plate 17 arranged oppositely, an elastic push rod 18 arranged on one adjustment support plate 17 and an angle adjustment rod 19 arranged on the other adjustment support plate 17. The angle adjustment plate 16 is connected to the support sleeve 8, and the angle adjustment plate 16 is located between the elastic push rod 18 and the angle adjustment rod 19 and contacts the above two. Through the above structure, we can adjust the rotation angle of the support sleeve 8 and thus adjust the angle of the stage 7, so as to make it easier for the probe to align with the tested component. The angle adjustment rod 19 is an externally purchased differential head, and the elastic push rod 18 includes a tail section and a head section, the head section is inserted into the tail section and the head section contacts the angle adjustment plate 16, and a spring is provided in the tail section to squeeze the head section and has elasticity. Because the support sleeve 8 needs to be raised and lowered, in order to avoid excessive friction, balls are provided at the ends of the head section and the angle adjustment rod 19.

[0027] As shown in the figure, the X-direction adjustment mechanism includes an X-direction slide 20 and an X-direction fine-tuning rod 21, the Y-direction adjustment mechanism includes a Y-direction slide 22 and a Y-direction fine-tuning rod 23 arranged on the X-direction slide 20; the Z-direction adjustment mechanism includes a Z-direction slide and a Z-direction fine-tuning rod 27 arranged on the Y-direction slide 22, and the mounting plate 6 is connected to the Z-direction slide. The specific structure is as follows: the X-axis slide 20 is provided with a V-shaped rod 24 that can rotate on the X-axis slide 20, and the middle position of the V-shaped rod 24 is rotatably connected to the X-axis slide 20 through a pin, so as to realize rotation, the Y-axis fine-tuning rod 23 can squeeze one rod foot of the V-shaped rod 24 to rotate the V-shaped rod 24, and at the same time, the other rod foot of the V-shaped rod 24 can push the Y-axis slide 22 to move, and an elastic member 1 (not shown in the figure) that can reset the Y-axis slide 22 is provided between the Y-axis slide 22 and the X-axis slide 20, and the elastic member 1 is a tension spring, one end of which is connected to the Y-axis slide 22, and the other end is connected to the X-axis slide 20; the Y-axis slide 22 is provided with a V-shaped rod 24, and the other end is connected to the X-axis slide 20; A V-shaped rod 25 capable of rotating on the Y-direction slide 22 is provided. The Y-direction slide 22 is an L-shaped plate. The V-shaped rod 25 is located on the vertical plate of the Y-direction slide 22. An empty slot 26 is provided on the Y-direction slide 22. The V-shaped rod 25 is located in the empty slot 26 and is hinged to the Y-direction slide 22 through a pin. The Z-direction fine-tuning rod 27 can squeeze one rod foot of the V-shaped rod 25 to rotate the V-shaped rod 25, and at the same time, the other rod foot of the V-shaped rod 25 can drive the Z-direction slide 28 to rise. Through the arrangement of the above structure, we can make all the fine-tuning rods concentrated on the same side while ensuring accuracy, so that the operation is very convenient and fast, and the structure is simple and durable. Of course, an elastic member 2 capable of resetting the X-direction slide 20 is provided between the X-direction slide 20 and the operating platform 4. The elastic member 2 is a tension spring, and its purpose and principle are the same as those of the elastic member 1, so it will not be repeated. In order to ensure that the adjustment is done without excessive friction resistance that makes adjustment inconvenient and affects the accuracy, a roller one is provided on the Y-axis slide plate 22, and the other rod foot of the V-shaped rod one 24 can push roller one; the other rod foot of the V-shaped rod two 25 is provided with a roller two, and the roller two is in contact with the Z-axis slide plate 28, so that the contact between the V-shaped rod one 24 and the V-shaped rod two 25 and the roller is rolling friction, so that the friction resistance is small, the adjustment is easy and the influence on the accuracy is avoided.

[0028] In the above structure, V-shaped guide rails are provided between the X-axis slide 20 and the operating platform 4, between the Y-axis slide 22 and the X-axis slide 20, and between the Y-axis slide 22 and the Z-axis slide 28, so that the two can slide smoothly. The above-mentioned V-shaped guide rails, X-axis fine-tuning rod 21, Y-axis fine-tuning rod 23 and Z-axis fine-tuning rod 27 are all purchased micrometer heads, so their specific structure and installation are not described in detail.

[0029] The above is a detailed introduction to an air-floating adjustment probe station provided in an embodiment of the present invention. Specific examples are used in this article to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea; at the same time, for general technical personnel in this field, according to the idea of ​​the present invention, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. An air-floating adjustable probe station, comprising a platform, a microscope and a probe feeding unit arranged on the platform, characterized in that: The operating platform of the machine is provided with a movable stage and a probe moving control seat, the bottom of the movable stage is provided with an air bearing, the movable stage is provided with a support shaft and a rotating lifting structure that is rotatably matched with the support shaft and can be lifted and lowered, the probe moving control seat is provided with a mounting plate, an X-direction adjustment mechanism, a Y-direction adjustment mechanism and a Z-direction adjustment mechanism, and the probe feeding unit is arranged on the mounting plate, the rotating lifting structure is provided with a carrier plate for placing the test element, the mounting plate is driven by the X-direction adjustment mechanism, the Y-direction adjustment mechanism and the Z-direction adjustment mechanism to make the probe of the probe feeding unit contact and conduct, the rotating lifting structure includes a support The sleeve and the rotating seat, the supporting sleeve cooperates with the supporting shaft through the ball sleeve, the rotating seat is connected to the supporting sleeve through the bearing assembly, the loading plate is connected to the supporting sleeve, the rotating seat is provided with an inclined groove and a hand lever, the movable loading platform is provided with a support plate, the support plate is provided with a guide column located in the inclined groove, the movable loading platform is provided with an angle fine-tuning mechanism, the angle fine-tuning mechanism includes an angle adjustment plate, an adjusting support plate arranged relatively, an elastic push rod arranged on one adjusting support plate and an angle adjustment rod arranged on the other adjusting support plate, the angle adjustment plate is connected to the supporting sleeve, the angle adjustment plate is located between the elastic push rod and the angle adjustment rod and contacts with the above two.

2. The air-floating adjustment probe station according to claim 1, characterized in that: The X-direction adjustment mechanism includes an X-direction slide and an X-direction fine-tuning rod, the Y-direction adjustment mechanism includes a Y-direction slide and a Y-direction fine-tuning rod arranged on the X-direction slide; the Z-direction adjustment mechanism includes a Z-direction slide and a Z-direction fine-tuning rod arranged on the Y-direction slide, and the mounting plate is connected to the Z-direction slide.

3. The air-floating adjustment probe station according to claim 2, characterized in that: The X-axis slide is provided with a V-shaped rod 1 that can rotate on the X-axis slide, the Y-axis fine-tuning rod can squeeze one rod foot of the V-shaped rod 1 to rotate the V-shaped rod 1, and at the same time, the other rod foot of the V-shaped rod 1 can push the Y-axis slide to move, and an elastic member 1 that can reset the Y-axis slide is provided between the Y-axis slide and the X-axis slide.

4. The air-floating adjustment probe station according to claim 2, characterized in that: The Y-axis slide is provided with a V-shaped rod 2 which can rotate on the Y-axis slide. The Z-axis fine-tuning rod can squeeze one rod foot of the V-shaped rod 2 to rotate the V-shaped rod 2, and at the same time, the other rod foot of the V-shaped rod 2 can drive the Z-axis slide to rise.

5. The air-floating adjustment probe station according to claim 3, characterized in that: The Y-axis slide plate is provided with a roller one, and the other rod foot of the V-shaped rod one can push the roller one.

6. The air-floating adjustment probe station according to claim 4, characterized in that: A second roller is arranged on the other rod foot of the second V-shaped rod, and the second roller is in contact with the Z-direction sliding plate.

7. The air-floating adjustment probe station according to claim 2, characterized in that: The operating platform is provided with an X-direction guide rail and an X-direction guide seat, the X-direction guide seat is provided with a Y-direction guide rail, the movable stage is provided with a guide groove, and the Y-direction guide rail is located in the guide groove.

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