Probe module applicable to multiple units under test with inclined conductive contacts

Abstract

The present invention relates to a probe module applicable to multiple units under test having inclined conductive contacts, comprising first and second probe seats with inner sides facing opposite directions, and a plurality of first and second probes respectively disposed on the first and second probe seats. Each probe includes a cantilever segment and a touch segment. The cantilever segment has a fixing portion fixedly connected to the first or second probe seat, and an exposed portion connected to the fixing portion and extending out from the inner side of the first or second probe seat. The touch segment is connected to the exposed portion. The probe module can define at least one imaginary probe unit dividing line to divide into a plurality of probe units. Only the first or second probe exists in the same probe unit, and the ends of their touch segments are all located on the same side of the imaginary probe unit dividing line. Thus, the probe module can simultaneously detect more units under test and avoid probe interference.

Description

Technical Field

[0001] The present invention relates to a probe module of a probe card, and particularly to a probe module suitable for a multi-unit under test (multi-UUT) having inclined conductive contacts. Background Art

[0002] Please refer to Figure 1 , which shows a unit under test (UUT) 10 having inclined conductive contacts. The unit under test 10 can be an unpackaged die or a packaged chip. The unit under test 10 has a plurality of first conductive contacts 11 arranged in one or more rows for outputting signals, and a plurality of second conductive contacts 12 arranged in a row for inputting signals. For example Figure 1 The shown unit under test 10 has three rows of first conductive contacts 11 arranged from a first long side 131 to a second long side 132 of one of its substrates 13, and a row of second conductive contacts 12 arranged along the second long side 132 of the substrate 13. Each of the first and second conductive contacts 11, 12 is arranged in multiple columns, and the arrangement direction of each column is substantially parallel to an imaginary boundary axis L perpendicular to the first and second long sides 131, 132. And for the columns close to the imaginary boundary axis L, for example Figure 1 those included in an intermediate block 14 therein, the long sides 111, 121 of the first and second conductive contacts 11, 12 are substantially parallel to the imaginary boundary axis L, while for the columns farther away from the imaginary boundary axis L, the first and second conductive contacts 11, 12 are inclined conductive contacts, and the end closer to the first long side 131 of the substrate 13 is also closer to the imaginary boundary axis L, and the end farther away from the first long side 131 of the substrate 13 is also farther away from the imaginary boundary axis L. That is, the inclined conductive contacts are inclined from top to bottom and from inside to outside in the direction of Figure 1 , and the farther the first and second conductive contacts 11, 12 are from the imaginary boundary axis L, the larger the angle of the first and second conductive contacts 11, 12 with respect to the imaginary boundary axis L. For example Figure 1 the long sides 111, 121 of the first and second conductive contacts 11, 12 included in two outer blocks 15, 16 in have the largest angles θ1, θ2 with respect to the imaginary boundary axis L.

[0003] The aforementioned unit under test 10 can be detected by a probe card with cantilever probes. To simplify the drawing Figure 1 only a probe 17 corresponding to the leftmost second conductive contact 12 is schematically shown therein. In fact, each conductive contact 11, 12 corresponds to a probe. The cantilever section 171 of the probe 17 can extend from a probe seat 18 above the outside of the second long side 132 of the unit under test 10 to above the conductive contact 12, so that a tip section (not shown in the figure) extending downward from the end of its cantilever section 171 can touch the corresponding conductive contact 12.

[0004] However, since the unit under test 10 has inclined conductive contacts with inconsistent inclination angles, it is difficult to configure the probes required for its detection on the probe holder. Especially for the detection of multiple units under test, that is, detecting at least two units under test 10 simultaneously, there will be concerns about interference between the probes 17. Even more, in order to improve the detection efficiency, it may be necessary to use the same probe card to detect four, six, eight or more units under test 10 simultaneously, which is more likely to cause problems of interference between the probes 17. Summary of the Invention

[0005] In view of the above problems, the main object of the present invention is to provide a probe module, which is suitable for detecting multiple units under test with inclined conductive contacts as described above, can avoid interference between probes, and can detect more units under test simultaneously, thereby achieving a higher detection efficiency.

[0006] To achieve the above object, a probe module suitable for multiple units under test with inclined conductive contacts provided by the present invention is used to simultaneously detect at least one first unit under test and at least one second unit under test. Each of the first unit under test and the second unit under test has a plurality of conductive contacts arranged in at least one row. The probe module is characterized in that it includes: a first probe holder and a second probe holder, each having an inner side surface, and the inner side surface of the first probe holder and the inner side surface of the second probe holder are substantially facing in opposite directions; a plurality of probes, including a plurality of first probes disposed on the first probe holder and a plurality of second probes disposed on the second probe holder. Each probe includes a cantilever section and a touch section. The cantilever section of each first probe has a fixing portion fixed to the first probe holder, and an exposed portion connected to the fixing portion and extending from the inner side surface of the first probe holder. The cantilever section of each second probe has a fixing portion fixed to the second probe holder, and an exposed portion connected to the fixing portion and extending from the inner side surface of the second probe holder. The touch section of each probe is connected to the exposed portion. Wherein, the probe module can define at least one imaginary probe unit dividing line, and each probe is divided into a plurality of probe units by the at least one imaginary probe unit dividing line. The same probe unit only includes first probes or only includes second probes, and the ends of the touch sections of the probes in the same probe unit are all located on the same side of one of the imaginary probe unit dividing lines; when the probe module detects each of the first unit under test and the second unit under test, all of the first probes touch the conductive contacts of the at least one first unit under test with their touch sections, and all of the second probes touch the conductive contacts of the at least one second unit under test with their touch sections.

[0007] In the above technical solution of the present invention, the plurality of probe units include a first probe unit including all the first probes and a second probe unit including all the second probes.

[0008] The at least one imaginary probe unit dividing line includes a first imaginary probe unit dividing line and a second imaginary probe unit dividing line. The plurality of probe units includes a first probe unit only including a first probe, a second probe unit only including a second probe, and a third probe unit only including a first probe. The first probe unit and the second probe unit are respectively located on two sides of the first imaginary probe unit dividing line, and the second probe unit and the third probe unit are respectively located on two sides of the second imaginary probe unit dividing line.

[0009] The at least one imaginary probe unit dividing line further includes a third imaginary probe unit dividing line. The plurality of probe units further includes a fourth probe unit only including a second probe. The third probe unit and the fourth probe unit are respectively located on two sides of the third imaginary probe unit dividing line.

[0010] The end of the contact section of each of the first probes is all located between the imaginary probe unit dividing line and the first probe base, and the end of the contact section of each of the second probes is all located between the imaginary probe unit dividing line and the second probe base.

[0011] The at least one imaginary probe unit dividing line includes a first imaginary probe unit dividing line, a second imaginary probe unit dividing line and a third imaginary probe unit dividing line substantially perpendicular to the first imaginary probe unit dividing line. The plurality of probe units includes a first probe unit only including a first probe, a second probe unit only including a second probe, a third probe unit only including a first probe, and a fourth probe unit only including a second probe. The first probe unit and the third probe unit are located between the first imaginary probe unit dividing line and the first probe base, and the second probe unit and the fourth probe unit are located between the first imaginary probe unit dividing line and the second probe base. There is a spaced space without the end of the contact section of any probe between the second imaginary probe unit dividing line and the third imaginary probe unit dividing line. The first probe unit and the second probe unit and the spaced space are located on different sides of the second imaginary probe unit dividing line, and the third probe unit and the fourth probe unit and the spaced space are located on different sides of the third imaginary probe unit dividing line. The width of the spaced space is greater than the width of one of the first and second units to be measured.

[0012] Each of the first probes forms a plurality of needle layers with different heights on the first probe base, and each of the second probes forms a plurality of needle layers with different heights on the second probe base; when the probe module detects each of the first units to be measured and the second units to be measured, the probes of the same needle layer and the same probe unit touch the same row of conductive contacts with their contact sections.

[0013] The end of the contact section of the first probe of the higher needle layer is farther from the inner side surface of the first probe base, and the end of the contact section of the second probe of the higher needle layer is farther from the inner side surface of the second probe base.

[0014] For simultaneously detecting a plurality of the first units to be measured arranged in at least one column through each of the first probes and detecting a plurality of the second units to be measured arranged in at least another column through each of the second probes; when the probe module detects each of the first units to be measured and the second units to be measured, the first probes of the same needle layer and the same probe unit contact the same row of conductive contacts of the same first unit to be measured, and the second probes of the same needle layer and the same probe unit contact the same row of conductive contacts of the same second unit to be measured.

[0015] For simultaneously detecting a plurality of the first units to be measured through each of the first probes and detecting a plurality of the second units to be measured through each of the second probes, and all the first units to be measured and the second units to be measured are arranged in a common column; when the probe module detects each of the first units to be measured and the second units to be measured, the first probes of the same needle layer contact the same row of conductive contacts of the same first unit to be measured, and the second probes of the same needle layer contact the same row of conductive contacts of the same second unit to be measured.

[0016] When the probe module detects each of the first units to be measured and the second units to be measured, each of the first probes only contacts the row of conductive contacts of each of the first units to be measured that is the farthest from the first probe base, and each of the second probes only contacts the row of conductive contacts of each of the second units to be measured that is the closest to the second probe base.

[0017] When simultaneously detecting eight units to be measured, including four of the first units to be measured and four of the second units to be measured, the first unit to be measured closest to the second probe base among the eight units to be measured is adjacent to the second unit to be measured closest to the first probe base among the eight units to be measured.

[0018] Each of the first units to be measured and the second units to be measured has a first main edge and a second main edge that are substantially in opposite directions, and a first side edge and a second side edge that connect the first main edge and the second main edge and are substantially in opposite directions. An intersection point of the second main edge and the second side edge of one of the first units to be measured is adjacent to an intersection point of the first main edge and the first side edge of one of the second units to be measured.

[0019] Each of the first unit under test and the second unit under test has a first main edge and a second main edge substantially facing opposite directions, and a first side edge and a second side edge connecting the first main edge and the second main edge and substantially facing opposite directions. The second side edge of one first unit under test is adjacent to the first side edge of one second unit under test.

[0020] The first probe of the same probe unit can define a first imaginary dividing line perpendicular to the inner side surface of the first probe seat. The direction in which the exposed portion of the first probe of the same probe unit extends out from the inner side surface is parallel to the first imaginary dividing line or is inclined relative to the first imaginary dividing line and gradually moves away from the first imaginary dividing line; the second probe of the same probe unit can define a second imaginary dividing line perpendicular to the inner side surface of the second probe seat. The direction in which the exposed portion of the second probe of the same probe unit extends out from the inner side surface is parallel to the second imaginary dividing line or is inclined relative to the second imaginary dividing line and approaches the second imaginary dividing line.

[0021] The probe unit only including the first probe can define a first fixed part distribution width by the distance between the fixing parts of the two outermost first probes thereof. The probe unit only including the second probe can define a second fixed part distribution width by the distance between the fixing parts of the two outermost second probes thereof. The second fixed part distribution width is greater than the first fixed part distribution width.

[0022] The first fixed part distribution width is less than the width of the first unit under test, and the second fixed part distribution width is greater than the width of the second unit under test.

[0023] To achieve the above object, the present invention further provides a probe module applicable to multiple units under test having inclined conductive contacts, which is characterized by comprising: a first probe base and a second probe base, each having an inner side surface, and the inner side surface of the first probe base and the inner side surface of the second probe base are substantially facing in opposite directions; a plurality of probes, including a plurality of first probes disposed on the first probe base and a plurality of second probes disposed on the second probe base, each probe including a cantilever segment and a touch segment, the cantilever segment of each first probe having a fixing portion fixed to the first probe base, and an exposed portion connected to the fixing portion and extending from the inner side surface of the first probe base, the cantilever segment of each second probe having a fixing portion fixed to the second probe base, and an exposed portion connected to the fixing portion and extending from the inner side surface of the second probe base, and the touch segment of each probe being connected to the exposed portion; wherein, the probe module can define at least one imaginary probe unit dividing line, each probe is divided into a plurality of probe units by the at least one imaginary probe unit dividing line, the same probe unit only includes a first probe or only includes a second probe, and the ends of the touch segments of the probes in the same probe unit are all located on the same side of one of the imaginary probe unit dividing lines.

[0024] Wherein, the plurality of probe units include a first probe unit including all the first probes, and a second probe unit including all the second probes.

[0025] The at least one imaginary probe unit dividing line includes a first imaginary probe unit dividing line and a second imaginary probe unit dividing line, the plurality of probe units include a first probe unit only including first probes, a second probe unit only including second probes, and a third probe unit only including first probes, the first probe unit and the second probe unit are respectively located on two sides of the first imaginary probe unit dividing line, and the second probe unit and the third probe unit are respectively located on two sides of the second imaginary probe unit dividing line.

[0026] The at least one imaginary probe unit dividing line further includes a third imaginary probe unit dividing line, the plurality of probe units further include a fourth probe unit only including second probes, and the third probe unit and the fourth probe unit are respectively located on two sides of the third imaginary probe unit dividing line.

[0027] The ends of the touch segments of all the first probes are all located between the imaginary probe unit dividing line and the first probe base, and the ends of the touch segments of all the second probes are all located between the imaginary probe unit dividing line and the second probe base.

[0028] The at least one imaginary probe unit dividing line includes a first imaginary probe unit dividing line, a second imaginary probe unit dividing line and a third imaginary probe unit dividing line substantially perpendicular to the first imaginary probe unit dividing line. The plurality of probe units include a first probe unit including only a first probe, a second probe unit including only a second probe, a third probe unit including only a first probe, and a fourth probe unit including only a second probe. The first probe unit and the third probe unit are located between the first imaginary probe unit dividing line and the first probe base. The second probe unit and the fourth probe unit are located between the first imaginary probe unit dividing line and the second probe base. There is a spaced space at the end of a touch section where no probe is provided between the second imaginary probe unit dividing line and the third imaginary probe unit dividing line. The first probe unit and the second probe unit are on different sides of the second imaginary probe unit dividing line from the spaced space. The third probe unit and the fourth probe unit are on different sides of the third imaginary probe unit dividing line from the spaced space.

[0029] Each of the first probes forms a plurality of needle layers with different heights in the first probe base. Each of the second probes forms a plurality of needle layers with different heights in the second probe base. The perpendicular distance from the end of the touch section of the first probes in the same needle layer to the inner side surface of the first probe base is substantially the same. The perpendicular distance from the end of the touch section of the second probes in the same needle layer to the inner side surface of the first probe base is substantially the same.

[0030] The distance from the end of the touch section of the first probes in the needle layer with a higher position to the inner side surface of the first probe base is farther. The distance from the end of the touch section of the second probes in the needle layer with a higher position to the inner side surface of the second probe base is farther.

[0031] The first probes of the same probe unit can define a first imaginary dividing line perpendicular to the inner side surface of the first probe base. The direction in which the exposed portions of the first probes of the same probe unit extend from the inner side surface is parallel to the first imaginary dividing line or is inclined with respect to the first imaginary dividing line gradually away from the first imaginary dividing line. The second probes of the same probe unit can define a second imaginary dividing line perpendicular to the inner side surface of the second probe base. The direction in which the exposed portions of the second probes of the same probe unit extend from the inner side surface is parallel to the second imaginary dividing line or is inclined with respect to the second imaginary dividing line approaching the second imaginary dividing line.

[0032] The probe unit including only the first probe can define the distance between the fixing parts of the outermost two first probes as a first fixing part distribution width, and the probe unit including only the second probe can define the distance between the fixing parts of the outermost two second probes as a second fixing part distribution width, and the second fixing part distribution width is greater than the first fixing part distribution width.

[0033] In other words, all the conductive contacts of the first unit under test touched by the probe module are touched by the first probe, and all the conductive contacts of the second unit under test touched by the probe module are touched by the second probe. That is, the conductive contacts of the same unit under test are touched by the probes extending from the same probe base. Therefore, when the distribution positions of the first and second units under test are clearly distinguishable, the first and second probes can also be correspondingly divided into multiple probe units. When the probe module detects the first and second units under test, the conductive contacts of the first unit under test and the conductive contacts of the second unit under test are on different sides of the imaginary probe unit dividing line. That is, the probe module of the present invention is mainly used to simultaneously detect the units under test whose distribution positions can be separated by the imaginary probe unit dividing line. In this way, even if there is still a first unit under test adjacent to a second unit under test, their corresponding probes extend from the first and second probe bases respectively, so the problem of probe interference can be avoided. The probe module of the present invention is particularly suitable for detecting multiple units under test arranged in a matrix. At least one first unit under test and at least one second unit under test can be some of the units under test and are respectively located in two adjacent columns. After the probe module simultaneously detects the said part of the units under test, as long as it moves a small distance, it can detect another part of the units under test located in two adjacent columns. Thus, the probe module can not only simultaneously detect more units under test, but also perform sub-detections on a larger number of units under test to generate higher detection efficiency.

[0034] Regardless of whether the number of the first and second units under test detected simultaneously is one or more, a first unit under test can be adjacent to a second unit under test. Even if each unit under test is a unit under test with inclined conductive contacts as described in the prior art, the extending directions of the exposed parts of the cantilever segments of the first and second probes extending from the inner sides of the first and second probe bases can still match the extending directions of the corresponding conductive contacts to prevent the probes from accidentally sliding onto non-corresponding conductive contacts during point measurement. In this case, since the first and second probes respectively used to touch the first and second units under test are on different sides of the imaginary probe unit dividing line, the problem of probe mutual interference can be avoided. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 is a top view schematic diagram of a unit under test with inclined conductive contacts, a probe, and a probe base;

[0036] Figure 2It is a top view schematic diagram of a probe module and eight units under test provided by a first preferred embodiment of the present invention, but the probes shown therein are only the first and second probes of the first probe layer;

[0037] Figure 3 Similar to Figure 2 , but the probes shown therein are only the first and second probes of the second probe layer;

[0038] Figure 4 Similar to Figure 3 , but the probes shown therein are only the first and second probes of the third probe layer;

[0039] Figure 5 Similar to Figure 4 , but the probes shown therein are only the first and second probes of the fourth probe layer;

[0040] Figure 6 It is a side view of the probe module, each unit under test and a circuit board provided by the first preferred embodiment of the present invention;

[0041] Figure 7 Similar to Figure 5 , but showing eight units under test with different arrangements and the probe module provided by a second preferred embodiment of the present invention corresponding thereto;

[0042] Figure 8 It is a side view of the probe module, each unit under test and a circuit board provided by the second preferred embodiment of the present invention;

[0043] Figure 9 It is a top view schematic diagram of a probe module and twelve units under test provided by a third preferred embodiment of the present invention, but the probes shown therein are only the first and second probes of the fourth probe layer;

[0044] Figure 10 It is a top view schematic diagram of a probe module and twelve units under test provided by a fourth preferred embodiment of the present invention, but the probes shown therein are only the first and second probes of the fourth probe layer;

[0045] Figure 11 It is a top view schematic diagram of a probe module and sixteen units under test provided by a fifth preferred embodiment of the present invention, but the probes shown therein are only the first and second probes of the fourth probe layer;

[0046] Figure 12 It is a top view schematic diagram of a probe module and sixteen units under test provided by a sixth preferred embodiment of the present invention, but the probes shown therein are only the first and second probes of the fourth probe layer;

[0047] Figure 13It is a top view schematic diagram of a probe module and eight DUTs provided by a seventh preferred embodiment of the present invention, but the probes shown therein are only the first and second probes of the fourth probe layer;

[0048] Figure 14 It is a top view schematic diagram of a probe module and sixteen DUTs provided by an eighth preferred embodiment of the present invention, but the probes shown therein are only the first and second probes of the fourth probe layer. Detailed implementation manners

[0049] The following embodiments are now given and, in conjunction with the accompanying drawings, the structure, characteristics, assembly or usage mode, and efficacy of the present invention are described in detail. However, those with ordinary knowledge in the field of the present invention should understand that these detailed descriptions and the specific embodiments listed for implementing the present invention are only used to illustrate the present invention and are not used to limit the patent protection scope of the present invention.

[0050] The applicant hereby explains that, in the embodiments and drawings to be introduced below, the same reference numerals represent the same or similar elements or their structural features. It should be noted that the elements and structures in the drawings are for illustrative convenience and are not drawn according to the actual ratio and quantity. And if possible in implementation, the features of different embodiments can be applied interactively.

[0051] Please refer to Figures 2 to 6 As shown, the probe module 20 provided by a first preferred embodiment of the present invention mainly includes a first probe base 21, a second probe base 22, a plurality of first probes 30A - 30D, and a plurality of second probes 30E - 30H.

[0052] Each of the first and second probes 30A - 30H is formed by bending a straight needle made of a conductive material (such as metal) through machining. As Figure 6 shown, each of the first and second probes 30A - 30H includes a cantilever section 31 and a touch section 32. The cantilever section 31 has a fixing portion 311 fixedly connected to the first probe base 21 or the second probe base 22, and an exposed portion 312 connected to the fixing portion 311 and extending from an inner side surface 211 of the first probe base 21 or an inner side surface 221 of the second probe base 22. As Figures 2 to 5 shown, for some of the first and second probes 30A - 30H, the cantilever section 31 is not bent so that the fixing portion 311 and the exposed portion 312 are in a straight line, while for the other part of the first and second probes 30A - 30H, the cantilever section 31 is bent so that the fixing portion 311 and the exposed portion 312 are not in a straight line. As Figure 6 shown, the touch section 32 of each of the first and second probes 30A - 30H extends downward from the end of the exposed portion 312.

[0053] The first probe base 21 and the second probe base 22 are made of an insulating material (such as epoxy resin commonly known as black glue). The first and second probe bases 21, 22 are arranged with their inner sides 211, 221 facing each other, that is, the inner sides 211, 221 of the first and second probe bases 21, 22 substantially face opposite directions. In addition, as Figure 6 shown, the first and second probe bases 21, 22 are usually fixed to the bottom surface 41 of a circuit board 40, so that the circuit board 40, the first and second probe bases 21, 22, and the first and second probes 30A to 30H are combined into a probe card.

[0054] In an embodiment of the present invention, the fixing portions 311 of the first and second probes 30A to 30H are located within the first or second probe bases 21, 22. The fixing method is to use black glue to simultaneously set the probes of the same needle layer (detailed below) at predetermined positions on the probe base, and then bake the black glue dry to fix the probes on the probe base. However, the fixing portions 311 of the first and second probes 30A to 30H can also be fixed to the outer surface of the first or second probe bases 21, 22 by an adhesive. Each of the first and second probes 30A to 30H may further have a connecting section (not shown in the figure) extending from an outer side surface 212 of the first probe base 21 or an outer side surface 222 of the second probe base 22 to electrically connect to a conductive contact point (not shown in the figure) on the bottom surface 41 of the circuit board 40.

[0055] The fixing portions 311 of the inclined probes 30A to 30H (that is, the first and second probes 30A to 30H with the exposed portions 312 being inclined) in this embodiment include an inner side section 311a connected to the exposed portion 312 (as Figure 2 shown), and an outer side section 311b extending from the inner side section 311a to the outer side surface of the probe base and connected to the aforementioned connecting section. The inner side section 311a is in a straight line with the exposed portion 312 and is inclined, and the outer side section 311b is in a straight line with the aforementioned connecting section and perpendicular to the inner and outer side surfaces of the probe base (that is, parallel to the non-inclined probe). The way such a probe is formed to be inclined is to first place the straight needle on the probe base according to the extending direction D2 of the corresponding conductive contact point (detailed below) and fix the inner side section 311a of its fixing portion 311 with black glue to fix the exposed portion 312 of the probe at the required angle (that is, parallel to the extending direction D2 of the corresponding conductive contact point). At this time, the probe is already fixed on the probe base, then bend its fixing portion 311 so that its outer side section 311b together with the connecting section is perpendicular to the inner and outer side surfaces of the probe base, and then fix the outer side section 311b with black glue. Such a way is beneficial for the bending operation and can make the bending angle of the probe fixed well and not easily rebound.

[0056] The probe module of the present invention is used for detecting multiple units to be measured, that is, detecting multiple units to be measured simultaneously. For example, as Figure 2As shown, the probe module 20 of this embodiment is used to detect eight DUTs (devices under test) simultaneously, including four first DUTs 50A - 50D arranged in a first column C1 and biased towards the first probe base 21, and four second DUTs 50E - 50H arranged in a second column C2 and biased towards the second probe base 22. The DUTs in the embodiments of the present invention are the same as the DUTs 10 described in the prior art (as Figure 1 shown), but for a more explicit description of the features of the present invention, different description methods are used in the embodiments and different component reference numerals are used in Figure 1 to further illustrate the DUTs.

[0057] The first DUT 50D closest to the second probe base 22 among the eight DUTs is adjacent to the second DUT 50H closest to the first probe base 21 among the eight DUTs. More specifically, as Figure 3 shown, an upper surface 56 of each DUT 50A - 50H has first and second main edges 51, 52 (usually long sides) facing opposite directions, first and second side edges 53, 54 (usually short sides) connecting the first and second main edges 51, 52 and facing opposite directions, and a plurality of conductive contacts 55. The intersection point of the second main edge 52 and the second side edge 54 of the first DUT 50D is adjacent to the intersection point of the first main edge 51 and the first side edge 53 of the second DUT 50H. When the probe module 20 detects each DUT 50A - 50H, the first probe base 21 is located above the outside of the first main edge 51 of the first DUT 50A, and the second probe base 22 is located above the outside of the second main edge 52 of the second DUT 50E. In other words, the first main edge 51 of each DUT 50A - 50H is closer to the first probe base 21 than the second main edge 52, and the second main edge 52 of each DUT 50A - 50H is closer to the second probe base 22 than the first main edge 51. The probe module 20 moves downward as a whole (together with the circuit board 40), and then the end points of the contact segments 32 of the first and second probes 30A - 30H contact the conductive contacts 55 of each DUT 50A - 50H.

[0058] It should be noted here that the units under test 50A-50H of this embodiment respectively have a plurality of rows of conductive contacts, including a plurality of rows of conductive contacts for outputting signals near the first main edge 51 and a row of conductive contacts 55 for inputting signals arranged along the second main edge 52. The probe module 20 of the present embodiment mainly detects only this row of conductive contacts 55 for inputting signals. More specifically, when the probe module 20 detects each of the first and second units to be tested 50A-50H, each of the first probes 30A-30D only touches a row of conductive contacts 55 of each of the first units to be tested 50A-50D that is farthest from the first probe seat 21, and each of the second probes 30E-30H only touches a row of conductive contacts 55 of each of the second units to be tested 50E-50H that is closest to the second probe seat 22. Therefore, in the drawings of the present invention, only one row of conductive contacts is provided with a label 55, and other conductive contacts are not labeled. In the following text, only the conductive contact 55 is used as a representative to further describe the conductive contacts, and the shapes and configurations of the other conductive contacts are similar to those of the conductive contact 55.

[0059] In addition, the present invention changes the contact direction D1 (eg Figure 6 As shown in the figure, the direction of other features is defined as downward, and this is used as a reference to describe the directionality of other features (such as terms such as up, down, top, and bottom). For example, the upper surface 56 of each unit under test 50A~50H having a conductive contact 55 is the surface facing the opposite direction of the touch direction D1, and the bottom surface 41 of the circuit board 40 on which the first and second probe seats 21 and 22 are fixed is the surface facing the touch direction D1. However, the aforementioned directionality only describes that each feature tends to the touch direction D1 (for example, downward) or the opposite direction of the touch direction D1 (for example, upward), rather than conforming to the touch direction D1 or the opposite direction of the touch direction D1 without error. For example, the touch segment 32 of each first and second probe 30A~30H extends downward from the end of the exposed portion 312, which may include the touch segment 32 extending toward the touch direction D1, or the touch segment 32 is as shown in the figure. Figure 6 As shown, the portion tending toward the touching direction D1 is inclined relative to the touching direction D1 .

[0060] In each of the units under test 50A-50H, each conductive contact 55 has a first end 551 facing the first main edge 51 and a second end 552 facing the second main edge 52. To simplify the diagram, only the first end 551 and the second end 552 are shown in FIG. Figure 3 The three conductive contacts 55 in the figure are marked with their first ends 551 and second ends 552. Each conductive contact 55 can define an extension direction D2 from its first end 551 to the second end 552. In this embodiment, each unit under test 50A-50H can define an imaginary dividing axis A1 (such as Figure 2As shown, the extending direction D2 of the conductive contact point 55 between the imaginary demarcation axis A1 of each unit under test 50A - 50H and the first side edge 53 is parallel to the imaginary demarcation axis A1 (for example, the conductive contact point 55 of the middle block 57 marked as Figure 4 ), or is inclined relative to the imaginary demarcation axis A1 towards the first side edge 53 (for example, the conductive contact point 55 of the left block 58 marked as Figure 4 ). The extending direction D2 of the conductive contact point 55 between the imaginary demarcation axis A1 of each unit under test 50A - 50H and the second side edge 54 is parallel to the imaginary demarcation axis A1 (for example, the conductive contact point 55 of the middle block 57 marked as Figure 4 ), or is inclined relative to the imaginary demarcation axis A1 towards the second side edge 54 (for example, the conductive contact point 55 of the right block 59 marked as Figure 4 ). More specifically, the extending direction D2 of the conductive contact point 55 near the imaginary demarcation axis A1 (the conductive contact point 55 of the middle block 57) is parallel to the imaginary demarcation axis A1. The farther the conductive contact point 55 is from the imaginary demarcation axis A1, the greater the degree of inclination relative to the imaginary demarcation axis A1.

[0061] The probe module 20 of this embodiment can define an imaginary probe unit demarcation line A2 (as Figure 2 shown). Most of the first probe base 21 and each first probe 30A - 30D are located on a first side (left side) of the imaginary probe unit demarcation line A2, and the ends of the contact segments 32 of each first probe 30A - 30D are all located on the first side of the imaginary probe unit demarcation line A2, for contacting the conductive contact points 55 of each first unit under test 50A - 50D; most of the second probe base 22 and each second probe 30E - 30H are located on a second side (right side) of the imaginary probe unit demarcation line A2, and the ends of the contact segments 32 of each second probe 30E - 30H are all located on the second side of the imaginary probe unit demarcation line A2, for contacting the conductive contact points 55 of each second unit under test 50E - 50H.

[0062] As Figures 2 to 6As shown, each of the first probes 30A to 30D is arranged in four rows substantially corresponding to the arrangement of the conductive contacts 55 of the first DUTs 50A to 50D, and the first to fourth pin layers L11 to L14 with different heights are formed on the first probe base 21. The first probes 30A to 30D in the same pin layer extend to the conductive contacts 55 in the same row. More specifically, the vertical distance from the end of the contact segment 22 of the first probes 30A to 30D in the same pin layer to the inner side surface 211 of the first probe base 21 may be substantially the same, but it does not necessarily have to be exactly the same, as long as it can be used to contact the conductive contacts in the same row. The first to fourth pin layers L11 to L14 of the first probe base 21 are sequentially arranged from bottom to top. The cantilever segment 31 of the first probe in the pin layer with a higher position is longer, and the distance from the end of the contact segment 32 to the inner side surface 211 of the first probe base 21 is farther, which is used to contact the conductive contacts 55 of the first DUTs 50A to 50D that are farther from the first probe base 21. That is, the first to fourth pin layers L11 to L14 respectively correspond to the first DUTs 50A to 50D. When the probe module 20 detects the DUTs 50A to 50H, the first probe 30A of the first pin layer L11 extends above the conductive contact 55 of the first DUT 50A with its cantilever segment 31 passing above the first main edge 51 of the first DUT 50A (as shown in Figure 2 ), and then contacts the conductive contact 55 of the first DUT 50A with its contact segment 32. The first probe 30B of the second pin layer L12 extends above the conductive contact 55 of the first DUT 50B with its cantilever segment 31 passing above the first and second main edges 51 and 52 of the first DUT 50A and the first main edge 51 of the first DUT 50B (as shown in Figure 3 ), and then contacts the conductive contact 55 of the first DUT 50B with its contact segment, and so on.

[0063] Similarly, each of the second probes 30E to 30H is arranged in four rows substantially corresponding to the arrangement of the conductive contacts 55 of the second DUTs 50E to 50H, and the first to fourth pin layers L21 to L24 with different heights are formed on the second probe base 22. The second probes 30E to 30H in the same pin layer extend to the conductive contacts 55 in the same row. More specifically, the vertical distance from the end of the contact segment 32 of the second probes 30E to 30H in the same pin layer to the inner side surface 221 of the second probe base 22 (for example Figure 6The vertical distance d shown (which is the vertical distance from the end of the contact section 32 of the second probe 30E of the first probe layer L21 to the inner side surface 221 of the second probe base 22) can be substantially the same, but does not necessarily have to be exactly the same, as long as it can be used to contact the same row of conductive contacts. The first to fourth probe layers L21 to L24 of the second probe base 22 are arranged in sequence from bottom to top. The cantilever sections 31 of the second probes 30E to 30H in the probe layer with a higher position are longer, and the distance from the end of the contact section 32 to the inner side surface 221 of the second probe base 22 is farther, for contacting the conductive contacts 55 of the second to-be-tested units 50E to 50H that are farther from the second probe base 22. That is, the first to fourth probe layers L21 to L24 respectively correspond to the second to-be-tested units 50E to 50H. When the probe module 20 detects each to-be-tested unit 50A to 50H, the second probe 30E of the first probe layer L21 extends above the conductive contact 55 of the second to-be-tested unit 50E with its cantilever section 31 passing above the second main edge 52 of the second to-be-tested unit 50E (as Figure 2 shown), and then contacts the conductive contact 55 of the second to-be-tested unit 50E with its contact section 32 respectively. The second probe 30F of the second probe layer L22 extends above the conductive contact 55 of the second to-be-tested unit 50F with its cantilever section 31 passing above the first and second main edges 51 and 52 of the second to-be-tested unit 50E and the second main edge 52 of the second to-be-tested unit 50F (as Figure 3 shown), and then contacts the conductive contact 55 of the second to-be-tested unit 50F with its contact section 32 respectively, and so on.

[0064] In this embodiment, the extending directions of the exposed portions 312 of the first and second probes 30A to 30H extending from the probe bases 21 and 22 substantially correspond to the extending direction D2 of the conductive contacts 55 that the first and second probes 30A to 30H will contact. Here, the so-called "substantially correspond" means that the extending direction of the exposed portion 312 extending from the probe bases 21 and 22 does not necessarily have to be the same or opposite to the extending direction D2 of the corresponding conductive contact 55, but when looking from top to bottom (i.e., Figures 2 to 5 in the direction), the exposed portion 312 is generally parallel to the extending direction D2 of the corresponding conductive contact 55, so as to avoid the problem that the contact section 32 of the first and second probes 30A to 30H deviates outside the corresponding conductive contact 55 during contact, resulting in inaccurate contact. In other words, the inclination angle configurations of the exposed portions 312 of the first and second probes 30A to 30H are similar to the inclination angle configurations of the conductive contacts 55.

[0065] Specifically, as Figure 2As shown, each of the first probes 30A - 30D can define a first imaginary dividing line A3 perpendicular to the inner side surface 211 of the first probe base 21 (coinciding with the imaginary dividing axis A1 of the first units under test 50A - 50D). The extending directions of the exposed portions 312 of each of the first probes 30A - 30D from the inner side surface 211 are parallel to the first imaginary dividing line A3 (for example, the first probes 30A - 30D corresponding to Figure 4 the marked middle block 57) or are inclined relative to the first imaginary dividing line A3 gradually away from the first imaginary dividing line A3 (for example, the first probes 30A - 30D corresponding to Figure 4 the marked left and right blocks 58, 59). Similarly, each of the second probes 30E - 30H can define a second imaginary dividing line A4 perpendicular to the inner side surface 221 of the second probe base 22 (coinciding with the imaginary dividing axis A1 of the second units under test 50E - 50H). The extending directions of the exposed portions 312 of each of the second probes 30E - 30H from the inner side surface 221 are parallel to the second imaginary dividing line A4 (for example, the second probes 30E - 30H corresponding to Figure 4 the marked middle block 57) or are inclined relative to the second imaginary dividing line A4 approaching the second imaginary dividing line A4 (for example, the second probes 30E - 30H corresponding to Figure 4 the marked left and right blocks 58, 59).

[0066] Through the probe configuration of the probe module of the present invention, on the premise of arranging such a large number of probes at appropriate intervals in the probe base, the aforementioned effect of ensuring reliable probe contact can still be achieved. In addition, in this embodiment, the outer sections 311b of the fixing portions 311 of each of the first and second probes 30A - 30H are substantially parallel to each other, which is more convenient for arranging the probes in the probe base; however, through the probe configuration of the probe module of the present invention, it is also convenient to arrange the probes whose fixing portions 311 and exposed portions 312 are substantially in a straight line (that is, the inclined probes are bent at the connection point of the fixing portion and the exposed portion, and their fixing portions are not divided into inner and outer sections but are in the same overall direction) in the probe base, which can further simplify the bending processing procedure of the probes.

[0067] More importantly, the probe module of the present invention can be used to simultaneously detect a relatively large number of units under test, and is particularly suitable for detecting a plurality of units under test arranged in a matrix. Each of the first and second units under test can be a part of the units under test and are respectively located in two adjacent columns. After the probe module simultaneously detects a part of the units under test, as long as it moves a small distance, it can then detect another part of the units under test located in two adjacent columns. Taking the probe module 20 and the units under test 50A - 50H in this embodiment as an example, and taking Figures 2 to 5In terms of direction, other DUTs can be provided on the lower side (or even the upper side) of the first DUTs 50A to 50D and on the upper side (or even the lower side) of the second DUTs 50E to 50H. That is, the first column C1 and the second column C2 can each have more DUTs in addition to the first and second DUTs 50A to 50H, and more columns of DUTs can be provided on the left side of the first column C1 and on the right side of the second column C2. After the probe module 20 detects the eight DUTs 50A to 50H shown in the diagram of this embodiment, it can then detect another eight adjacent DUTs, such as the four DUTs on the upper side and the four DUTs on the right side of each of the second DUTs 50E to 50H (not shown in the figure). By performing multiple detections in this way, all DUTs can be quickly detected to achieve good detection efficiency.

[0068] In the foregoing embodiment, it is an example of simultaneously detecting eight DUTs 50A to 50H and only detecting one row of conductive contacts 55 of each DUT 50A to 50H. Therefore, the total number of needle layers L11 to L14, L21 to L24 is the same as the number of DUTs 50A to 50H. In this way, on the premise of facilitating the configuration of the probes, the required detection purpose can be achieved and good detection efficiency can be achieved. However, the probe module of the present invention can be configured according to the usage requirements for single or multiple first DUTs and single or multiple second DUTs, and multiple rows of conductive contacts of the same DUT can also be detected by multiple needle layers of the same probe base. That is, the total number of needle layers is not necessarily the same as the number of DUTs, but is the same as the number of rows of conductive contacts to be detected.

[0069] Regardless of whether the number of first and second DUTs detected simultaneously is one or more, a first DUT can be adjacent to a second DUT, and their adjacent forms can be the same as the adjacent form of the first DUT 50D and the second DUT 50H in the foregoing first preferred embodiment, or, as Figure 7 and Figure 8 shown in the second preferred embodiment of the present invention, in the second preferred embodiment, the second side edge 54 of the first DUT 50D is adjacent to the first side edge 53 of the second DUT 50H. Therefore, the extension direction D2 of the conductive contact 55 near the second side edge 54 of the first DUT 50D is close to the extension direction D2 of the conductive contact 55 near the first side edge 53 of the second DUT 50H. Even in such a case, since the first and second probes respectively used for touching the first and second DUTs are on different sides, the extending directions of the exposed portions 312 of the cantilever segments 31 of the first and second probes 30A to 30H extending from the inner side surfaces 211, 221 of the first and second probe bases 21, 22 can still match the extension direction D2 of the corresponding conductive contact 55, and there will be no problem of probe interference.

[0070] In the aforementioned embodiment, the probes of the probe module 20 are divided into two probe units by only an imaginary probe unit dividing line A2, namely, a first probe unit 61 including all first probes 30A-30D, and a second probe unit 62 including all second probes 30E-30H. Figure 2 and Figure 7 As shown ( Figure 2 and Figure 7 Only some of the probes are shown). However, the present invention can also be applied to Figure 9 and Figure 10 The units to be tested in the third and fourth preferred embodiments of the present invention are arranged in three rows, wherein the first row C1 and the third row C3 are first units to be tested 50A to 50D biased toward the first probe seat 21, and the second row C2 is second units to be tested 50E to 50H biased toward the second probe seat 22, that is, the units to be tested in the third and fourth preferred embodiments are respectively the units to be tested in the first and second preferred embodiments plus the units to be tested in the third row C3 which are the same as the first row C1. In the third and fourth preferred embodiments, the probes of the probe module 20 are divided into a first imaginary probe unit dividing line A21 and a second imaginary probe unit dividing line A22 into a first probe unit 30A to 30D ( Figure 9 and Figure 10 The first probe unit 61 (showing only the first probe 30D) and the second probe unit 61 (showing only the first probe 30E to 30H) Figure 9 and Figure 10 The second probe unit 62 (showing only the second probe 30H) and a ... first probe 30A-30D) Figure 9 and Figure 10 Only the third probe unit 63 of the first probe 30D is shown, that is, the probe module 20 in the third and fourth preferred embodiments is respectively the probe module 20 of the first and second preferred embodiments plus a third probe unit 63 which is the same as the first probe unit 61, the first probe unit 61 and the second probe unit 62 are respectively located on the two sides of the first imaginary probe unit dividing line A21, the second probe unit 62 and the third probe unit 63 are respectively located on the two sides of the second imaginary probe unit dividing line A22, that is, the end of the touch segment 32 of the first probe 30A~30D of the first probe unit 61 and the end of the touch segment 32 of the second probe 30E~30H of the second probe unit 62 are located on different sides of the first imaginary probe unit dividing line A21, the end of the touch segment 32 of the second probe 30E~30H of the second probe unit 62 and the end of the touch segment 32 of the first probe 30A~30D of the third probe unit 63 are located on different sides of the second imaginary probe unit dividing line A22, so that the aforementioned effect can be achieved.

[0071] It is conceivable that the present invention can also be applied to units under test that are arranged in more rows in a similar manner to the above arrangement, for example Figure 11and Figure 12 In the fifth and sixth preferred embodiments of the present invention shown in Figure 12 , the DUTs arranged in four columns are respectively the DUTs of the third and fourth preferred embodiments plus a second DUT 50E-50H of a fourth column C4 identical to the second column C2. In the fifth and sixth preferred embodiments, the probes of the probe module 20 are divided into four probe units by the first to third imaginary probe unit dividing lines A21-A23. Among them, in addition to the first to third probe units 61-63 described in the third and fourth preferred embodiments, there is further added a fourth probe unit 64 identical to the second probe unit 62 and only including the second probes 30E-30H( Figure 11 and Figure 12 and only the second probe 30H is shown in Figure 12 ). The third probe unit 63 and the fourth probe unit 64 are respectively located on both sides of the third imaginary probe unit dividing line A23, that is, the ends of the contact segments 32 of the first probes 30A-30D of the third probe unit 63 and the ends of the contact segments 32 of the second probes 30E-30H of the fourth probe unit 64 are located on different sides of the third imaginary probe unit dividing line A23. In this way, the aforementioned effects can also be achieved.

[0072] Furthermore, the present invention can also be applied to the DUTs arranged in a single column in a seventh preferred embodiment of the present invention as shown in Figure 13 Figure 13 . In this embodiment, the distribution mode of the DUTs is that the first and second DUTs 50A-50H in the first preferred embodiment are changed from being arranged in two adjacent columns to being arranged in the same column. The first and second probes of the probe module 20 in this embodiment can be separated by an imaginary probe unit dividing line A2 parallel to the inner side surfaces 211 and 221 of the first and second probe seats 21 and 22. The ends of the contact segments 32 of each of the first probes 30A-30D( Figure 13 and only the first probe 30D is shown in Figure 13 ) are all located between the imaginary probe unit dividing line A2 and the first probe seat 21. The ends of the contact segments 32 of each of the second probes 30E-30H( Figure 13 and only the second probe 30H is shown in Figure 13 ) are all located between the imaginary probe unit dividing line A2 and the second probe seat 22. In this way, the aforementioned effects can also be achieved.

[0073] Furthermore, the probe module 20 of the present invention can also be applied to as shown in Figure 14In an eighth preferred embodiment of the present invention as shown, the units under test 50A to 50H arranged in a first column C1 and a second column C2 (even more columns are possible). The units under test 50A to 50H in the first column C1 and the second column C2 are respectively arranged in the same way as the first and second units under test 50A to 50H in the seventh preferred embodiment, and the first column C1 and the second column C2 are spaced apart by a distance greater than the widths W3 and W4 of the first and second units under test 50A to 50H (W3 and W4 are equal in this embodiment). Correspondingly, the probe module 20 of this embodiment includes a first probe unit 61 and a second probe unit 62, which have the same probe distribution as that in the seventh preferred embodiment and are used to touch the units under test 50A to 50H in the first column C1, and a third probe unit 63 and a fourth probe unit 64, which are the same as the first probe unit 61 and the second probe unit 62 and are used to touch the units under test 50A to 50H in the second column C2.

[0074] In detail, the probe module 20 of this embodiment can define a first imaginary probe unit dividing line A21 parallel to the inner side surfaces 211 and 221 of the first and second probe seats 21 and 22, and a second imaginary probe unit dividing line A22 and a third imaginary probe unit dividing line A23 substantially perpendicular to the first imaginary probe unit dividing line A21. The first and third probe units 61 and 63, which only include the first probes 30A to 30D ( Figure 14 only the first probe 30D is shown in the figure) are located between the first imaginary probe unit dividing line A21 and the first probe seat 21. The second and fourth probe units 62 and 64, which only include the second probes 30E to 30H ( Figure 14 only the second probe 30H is shown in the figure) are located between the first imaginary probe unit dividing line A21 and the second probe seat 22. There is an interval space P at the end of the touch section where no probe is provided between the second imaginary probe unit dividing line A22 and the third imaginary probe unit dividing line A23. The width W5 of the interval space P is greater than the widths W3 and W4 of the first and second units under test 50A to 50H. The first and second probe units 61 and 62 and the interval space P are located on different sides of the second imaginary probe unit dividing line A22, and the third and fourth probe units 63 and 64 and the interval space P are located on different sides of the third imaginary probe unit dividing line A23. More specifically, the interval space P is located on the right side of the second imaginary probe unit dividing line A22 and the left side of the third imaginary probe unit dividing line A23, that is, the interval space P is located between the second imaginary probe unit dividing line A22 and the third imaginary probe unit dividing line A23. The ends of the touch sections of the probes 30A to 30H ( Figure 14 only the probes 30D and 30H are shown in the figure) of the first and second probe units 61 and 62 are all located on the left side of the second imaginary probe unit dividing line A22. The ends of the touch sections of the probes 30A to 30H ( Figure 14Only the tip ends of the contact segments of the probes 30D and 30H are all located on the right side of the third imaginary probe unit demarcation line A23.

[0075] The probe module 20 of this embodiment can not only achieve the functions of high detection efficiency and avoiding probe interference as described above. More importantly, in fact, another column of units under test 50A-50H is arranged in the interval space P, and more columns of units under test 50A-50H are also arranged on the left side of the first column C1 of units under test and on the right side of the second column C2 of units under test. After the probe module 20 of this embodiment simultaneously detects Figure 14 the first and second columns C1 and C2, a total of sixteen units under test 50A-50H as shown, as long as it moves a small distance, it can detect another two columns of units under test 50A-50H adjacent to the first and second columns C1 and C2 of units under test 50A-50H respectively, such as a column of units under test 50A-50H (not shown in the figure) in the interval space P and a column of units under test 50A-50H (not shown in the figure) on the right side of the second column C2 of units under test. By performing multiple detections in this way, all the units under test can be quickly detected to achieve better detection efficiency.

[0076] In the foregoing preferred embodiment of the present invention, the probe unit only includes the first probes 30A-30D, such as the first and third probe units 61 and 63 described above. The distance between the fixing parts 311 of the two outermost first probes (i.e., the outermost first probe 30A) can be defined as a first fixed part distribution width W1 (as Figure 2 shown), and the first fixed part distribution width W1 is less than the width W3 of the first units under test 50A-50D. In addition, the probe unit only includes the second probes 30E-30H, such as the second and fourth probe units 62 and 64 described above. The distance between the fixing parts 311 of the two outermost second probes (i.e., the outermost second probe 30H) can be defined as a second fixed part distribution width W2, and the second fixed part distribution width W2 is greater than the width W4 of the second units under test 50E-50H (in the preferred embodiment of the present invention, W3 and W4 are equal). Furthermore, the second fixed part distribution width W2 is greater than the first fixed part distribution width W1. Through the foregoing distribution method of the probe units and in combination with the foregoing distribution method of the probe fixing parts, a large number of such probes can be arranged on the probe base at appropriate intervals to achieve the functions of high detection efficiency and avoiding probe interference.

[0077] Finally, it must be stated again that the constituent elements disclosed in the foregoing embodiments of the present invention are only for illustrative purposes and are not used to limit the patent protection scope of this case. The substitution or change of other equivalent elements should also be covered by the patent protection scope of this case.

Claims

1. A probe module applicable to multiple units under test with inclined conductive contacts, for simultaneously detecting at least one first unit under test and at least one second unit under test, each of the first and second units under test having a plurality of conductive contacts arranged in at least one row; characterized in that The probe module includes: A first probe base and a second probe base, each having an inner side surface, and the inner side surfaces of the first probe base and the second probe base face opposite directions; A plurality of probes, including a plurality of first probes disposed on the first probe base and a plurality of second probes disposed on the second probe base. Each probe includes a cantilever segment and a touch segment. The cantilever segment of each first probe has a fixing portion fixed to the first probe base, and an exposed portion connected to the fixing portion and extending from the inner side surface of the first probe base. The cantilever segment of each second probe has a fixing portion fixed to the second probe base, and an exposed portion connected to the fixing portion and extending from the inner side surface of the second probe base. The touch segment of each probe is connected to the exposed portion; the first and second probes respectively extend from the inner side surfaces of the first and second probe bases facing opposite directions; Wherein, the probe module can define at least one imaginary probe unit dividing line perpendicular or parallel to the inner side surface of the first probe base. Each probe is divided into a plurality of probe units by the at least one imaginary probe unit dividing line. The same probe unit only includes first probes or only includes second probes, and the ends of the touch segments of the probes in the same probe unit are all located on the same side of an imaginary probe unit dividing line; when the probe module detects each of the first and second units to be measured, all of the first probes touch the conductive contacts of the at least one first unit to be measured with their touch segments, and all of the second probes touch the conductive contacts of the at least one second unit to be measured with their touch segments; Wherein, the probe unit only including first probes can define a first fixed portion distribution width with the distance between the fixing portions of the two outermost first probes, and the probe unit only including second probes can define a second fixed portion distribution width with the distance between the fixing portions of the two outermost second probes, and the second fixed portion distribution width is greater than the first fixed portion distribution width.

2. The probe module applicable to multiple units under test having inclined conductive contacts as claimed in claim 1, wherein: The plurality of probe units include a first probe unit including all the first probes and a second probe unit including all the second probes.

3. The probe module applicable to multiple units under test having inclined conductive contacts as claimed in claim 1, wherein: The at least one imaginary probe unit dividing line includes a first imaginary probe unit dividing line and a second imaginary probe unit dividing line. The plurality of probe units include a first probe unit only including first probes, a second probe unit only including second probes, and a third probe unit only including first probes. The first probe unit and the second probe unit are respectively located on two sides of the first imaginary probe unit dividing line, and the second probe unit and the third probe unit are respectively located on two sides of the second imaginary probe unit dividing line.

4. The probe module applicable to multiple units under test having inclined conductive contacts as claimed in claim 3, wherein: The at least one imaginary probe unit dividing line further includes a third imaginary probe unit dividing line, and the plurality of probe units further include a fourth probe unit only including second probes. The third probe unit and the fourth probe unit are respectively located on two sides of the third imaginary probe unit dividing line.

5. The probe module applicable to multiple units under test having inclined conductive contacts as claimed in claim 1, wherein: The end of the contact segment of each of the first probes is entirely located between the imaginary probe unit dividing line and the first probe base, and the end of the contact segment of each of the second probes is entirely located between the imaginary probe unit dividing line and the second probe base.

6. The probe module applicable to multiple units under test having inclined conductive contacts as claimed in claim 1, wherein: The at least one imaginary probe unit dividing line includes a first imaginary probe unit dividing line, a second imaginary probe unit dividing line perpendicular to the first imaginary probe unit dividing line, and a third imaginary probe unit dividing line. The plurality of probe units include a first probe unit including only first probes, a second probe unit including only second probes, a third probe unit including only first probes, and a fourth probe unit including only second probes. The first probe unit and the third probe unit are located between the first imaginary probe unit dividing line and the first probe base, and the second probe unit and the fourth probe unit are located between the first imaginary probe unit dividing line and the second probe base. There is a spaced space without the end of the contact segment of any probe between the second imaginary probe unit dividing line and the third imaginary probe unit dividing line. The first probe unit and the second probe unit are on different sides of the spaced space with respect to the second imaginary probe unit dividing line, and the third probe unit and the fourth probe unit are on different sides of the spaced space with respect to the third imaginary probe unit dividing line. The width of the spaced space is greater than the width of one of the first and second units to be measured.

7. The probe module applicable to multiple units under test having inclined conductive contacts as described in claim 1, wherein: Each of the first probes forms a plurality of needle layers with different heights on the first probe base, and each of the second probes forms a plurality of needle layers with different heights on the second probe base; when the probe module detects each of the first units to be measured and the second units to be measured, the probes of the same needle layer and the same probe unit touch the same row of conductive contacts with their contact segments.

8. The probe module applicable to multiple units under test having inclined conductive contacts as claimed in claim 7, wherein: The end of the contact segment of the first probe in the needle layer with a higher position is farther from the inner side surface of the first probe base, and the end of the contact segment of the second probe in the needle layer with a higher position is farther from the inner side surface of the second probe base.

9. The probe module applicable to multiple units under test having inclined conductive contacts as claimed in claim 7, wherein: For simultaneously detecting a plurality of the first units to be measured arranged in at least one column through each of the first probes and detecting a plurality of the second units to be measured arranged in at least another column through each of the second probes; When the probe module detects each of the first units to be measured and the second units to be measured, the first probes of the same needle layer and the same probe unit touch the same row of conductive contacts of the same first unit to be measured, and the second probes of the same needle layer and the same probe unit touch the same row of conductive contacts of the same second unit to be measured.

10. The probe module applicable to multiple units under test with inclined conductive contacts as claimed in claim 7, wherein: For simultaneously detecting a plurality of the first units to be measured through each of the first probes and detecting a plurality of the second units to be measured through each of the second probes, and each of the first units to be measured and the second units to be measured are arranged in a common column; when the probe module detects each of the first units to be measured and the second units to be measured, the first probes of the same needle layer touch the same row of conductive contacts of the same first unit to be measured, and the second probes of the same needle layer touch the same row of conductive contacts of the same second unit to be measured.

11. The probe module applicable to multiple units under test having inclined conductive contacts as claimed in claim 9 or 10, characterized in that: When the probe module detects each of the first and second units to be measured, each of the first probes only touches the row of conductive contacts that is the farthest from the first probe base of each of the first units to be measured, and each of the second probes only touches the row of conductive contacts that is the closest to the second probe base of each of the second units to be measured.

12. The probe module applicable to multiple units under test having inclined conductive contacts as claimed in claim 9, wherein: When used to detect eight units to be measured simultaneously, including four of the first units to be measured and four of the second units to be measured, the first unit to be measured that is closest to the second probe base among the eight units to be measured is adjacent to the second unit to be measured that is closest to the first probe base among the eight units to be measured.

13. The probe module applicable to multiple units under test having inclined conductive contacts as claimed in claim 1 or 12, wherein: Each of the first and second units to be measured has a first main edge and a second main edge facing opposite directions, and a first side edge and a second side edge that connect the first main edge and the second main edge and face opposite directions. An intersection point of the second main edge and the second side edge of one of the first units to be measured is adjacent to an intersection point of the first main edge and the first side edge of one of the second units to be measured.

14. The probe module applicable to multiple units under test having inclined conductive contacts as claimed in claim 1 or 12, wherein: Each of the first and second units to be measured has a first main edge and a second main edge facing opposite directions, and a first side edge and a second side edge that connect the first main edge and the second main edge and face opposite directions. The second side edge of one of the first units to be measured is adjacent to the first side edge of one of the second units to be measured.

15. The probe module applicable to multiple units under test having inclined conductive contacts as described in claim 1, characterized in that: The first probes of the same probe unit can define a first imaginary dividing line perpendicular to the inner side surface of the first probe base. The direction in which the exposed part of the first probe of the same probe unit extends out from the inner side surface is parallel to the first imaginary dividing line or is inclined relative to the first imaginary dividing line and gradually moves away from the first imaginary dividing line; the second probes of the same probe unit can define a second imaginary dividing line perpendicular to the inner side surface of the second probe base. The direction in which the exposed part of the second probe of the same probe unit extends out from the inner side surface is parallel to the second imaginary dividing line or is inclined relative to the second imaginary dividing line and approaches the second imaginary dividing line.

16. The probe module applicable to multiple units under test having inclined conductive contacts as claimed in claim 1, wherein: The distribution width of the first fixing portion is smaller than the width of the first unit to be measured, and the distribution width of the second fixing portion is larger than the width of the second unit to be measured.

17. A probe module applicable to multiple units under test with inclined conductive contacts, characterized in that It includes: A first probe base and a second probe base, each having an inner side surface, and the inner side surfaces of the first probe base and the second probe base face opposite directions; A plurality of probes, including a plurality of first probes disposed on the first probe base and a plurality of second probes disposed on the second probe base. Each probe includes a cantilever segment and a touch segment. The cantilever segment of each first probe has a fixing portion fixed to the first probe base, and an exposed portion connected to the fixing portion and extending from the inner side surface of the first probe base. The cantilever segment of each second probe has a fixing portion fixed to the second probe base, and an exposed portion connected to the fixing portion and extending from the inner side surface of the second probe base. The touch segment of each probe is connected to the exposed portion. The first and second probes extend from the inner side surfaces of the first and second probe bases facing opposite directions respectively. Wherein, the probe module can define at least one imaginary probe unit dividing line perpendicular or parallel to the inner side surface of the first probe base. Each probe is divided into a plurality of probe units by the at least one imaginary probe unit dividing line. The same probe unit only includes first probes or only includes second probes, and the touch segment ends of the probes in the same probe unit are all located on the same side of an imaginary probe unit dividing line. Wherein, the probe unit only including first probes can define a first fixing portion distribution width with the distance between the fixing portions of the two outermost first probes. The probe unit only including second probes can define a second fixing portion distribution width with the distance between the fixing portions of the two outermost second probes. The second fixing portion distribution width is greater than the first fixing portion distribution width.

18. The probe module applicable to multiple units under test having inclined conductive contacts as claimed in claim 17, wherein: The plurality of probe units include a first probe unit including all the first probes and a second probe unit including all the second probes.

19. The probe module applicable to multiple units under test having inclined conductive contacts as claimed in claim 17, wherein: The at least one imaginary probe unit dividing line includes a first imaginary probe unit dividing line and a second imaginary probe unit dividing line. The plurality of probe units include a first probe unit only including first probes, a second probe unit only including second probes, and a third probe unit only including first probes. The first probe unit and the second probe unit are respectively located on two sides of the first imaginary probe unit dividing line. The second probe unit and the third probe unit are respectively located on two sides of the second imaginary probe unit dividing line.

20. The probe module applicable to multiple units under test having inclined conductive contacts as claimed in claim 19, wherein: The at least one imaginary probe unit dividing line further includes a third imaginary probe unit dividing line. The plurality of probe units further include a fourth probe unit only including second probes. The third probe unit and the fourth probe unit are respectively located on two sides of the third imaginary probe unit dividing line.

21. The probe module applicable to multiple units under test having inclined conductive contacts as claimed in claim 17, wherein: The touch segment ends of all the first probes are all located between the imaginary probe unit dividing line and the first probe base. The touch segment ends of all the second probes are all located between the imaginary probe unit dividing line and the second probe base.

22. The probe module applicable to multiple units under test having inclined conductive contacts as claimed in claim 17, wherein: The at least one imaginary probe unit dividing line includes a first imaginary probe unit dividing line, a second imaginary probe unit dividing line perpendicular to the first imaginary probe unit dividing line, and a third imaginary probe unit dividing line. The plurality of probe units include a first probe unit only including a first probe, a second probe unit only including a second probe, a third probe unit only including a first probe, and a fourth probe unit only including a second probe. The first probe unit and the third probe unit are located between the first imaginary probe unit dividing line and the first probe base. The second probe unit and the fourth probe unit are located between the first imaginary probe unit dividing line and the second probe base. There is an interval space at the end of the touch section where no probe is provided between the second imaginary probe unit dividing line and the third imaginary probe unit dividing line. The first probe unit and the second probe unit are on different sides of the second imaginary probe unit dividing line with respect to the interval space. The third probe unit and the fourth probe unit are on different sides of the third imaginary probe unit dividing line with respect to the interval space.

23. The probe module applicable to multiple units under test having inclined conductive contacts as described in claim 17, characterized in that: Each of the first probes forms a plurality of needle layers with different heights on the first probe base. Each of the second probes forms a plurality of needle layers with different heights on the second probe base. The perpendicular distance from the end of the touch section of the first probes in the same needle layer to the inner side surface of the first probe base is the same. The perpendicular distance from the end of the touch section of the second probes in the same needle layer to the inner side surface of the first probe base is the same.

24. The probe module applicable to multiple units under test having inclined conductive contacts as described in claim 23, wherein: The distance from the end of the touch section of the first probes in the needle layer with a higher position to the inner side surface of the first probe base is farther. The distance from the end of the touch section of the second probes in the needle layer with a higher position to the inner side surface of the second probe base is farther.

25. The probe module applicable to multiple units under test with inclined conductive contacts as claimed in claim 17, wherein: The first probes in the same probe unit can define a first imaginary dividing line perpendicular to the inner side surface of the first probe base. The extending direction of the exposed part of the first probes in the same probe unit from the inner side surface is parallel to the first imaginary dividing line or is inclined with respect to the first imaginary dividing line by gradually moving away from the first imaginary dividing line. The second probes in the same probe unit can define a second imaginary dividing line perpendicular to the inner side surface of the second probe base. The extending direction of the exposed part of the second probes in the same probe unit from the inner side surface is parallel to the second imaginary dividing line or is inclined with respect to the second imaginary dividing line by approaching the second imaginary dividing line.

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