Laser light source and laser crystallization apparatus including the same

Abstract

A laser light source and a laser crystallization apparatus including the same are provided. The laser light source includes a gas-tight container. A first resonator mirror and a second resonator mirror are disposed outside the gas-tight container. The first resonator mirror includes a lens unit and a reflective coating. The lens unit includes a first surface and a second surface, and the first surface is tilted with respect to the second surface.

Description

[0001] This application claims priority to Korean Patent Application No. 10-2019-0104692, filed on August 26, 2019, in the Korean Intellectual Property Office, the entire disclosure of which is incorporated herein by reference in its entirety. TECHNICAL FIELD

[0002] The present application relates to a laser light source and a laser crystallization apparatus including the same. BACKGROUND

[0003] A thin film transistor (TFT) including a semiconductor layer is disposed in a pixel of an active driving display apparatus such as an organic light emitting device (OLED) or a liquid crystal display (LCD). The semiconductor layer can be formed of polysilicon.

[0004] Polysilicon can be formed by irradiating amorphous silicon with a laser and annealing the amorphous silicon. A laser crystallization apparatus is used in this process. The laser crystallization apparatus can be a gas laser apparatus (e.g., an excimer laser apparatus). The laser crystallization apparatus generates a laser by discharging through an excitation medium gas, amplifies the laser by resonance, and then outputs the laser.

[0005] The laser of the laser crystallization apparatus travels along a predetermined line when irradiating the amorphous silicon, and can eventually irradiate regions of the amorphous silicon with a time difference. If the energy of the laser of the laser crystallization apparatus is not uniform, the degree of crystallization of the amorphous silicon is different for each region, such that the performance of the TFT or display device is degraded, or a stripe is visible to the user. SUMMARY

[0006] According to an exemplary embodiment of the present application, a laser light source including a gas-tight container is provided. A first resonator mirror and a second resonator mirror are disposed outside the gas-tight container. The first resonator mirror includes a lens unit and a reflective coating. The lens unit includes a first surface and a second surface, and the first surface is tilted with respect to the second surface.

[0007] According to an exemplary embodiment of the present application, the first surface is disposed between the gas-tight container and the second surface.

[0008] According to an exemplary embodiment of the present application, the second resonator mirror includes a third surface and a fourth surface, and the fourth surface is tilted with respect to the third surface or parallel to the third surface.

[0009] According to an example embodiment of the present invention, the first resonator mirror includes: a first point corresponding to a portion where a thickness of the first resonator mirror is thickest in a direction extending perpendicularly from a second surface of a lens unit of the first resonator mirror; a second point corresponding to a portion where the thickness of the first resonator mirror is thinnest in the direction extending perpendicularly from the second surface of the lens unit of the first resonator mirror; and a first axis passing through the first point and the second point. The second resonator mirror includes: a third point corresponding to a portion where a thickness of the second resonator mirror is thickest in a direction extending perpendicularly from a third surface of the second resonator mirror; a fourth point corresponding to a portion where the thickness of the second resonator mirror is thinnest in the direction extending perpendicularly from the third surface of the second resonator mirror; and a second axis passing through the third point and the fourth point. An angle between the first axis and the second axis is 80° to 100°.

[0010] According to an example embodiment of the present invention, a reflective coating is disposed on the second surface of the lens unit of the first resonator mirror.

[0011] According to an example embodiment of the present invention, a reflective coating is disposed inside the lens unit and between the first surface and the second surface of the lens unit of the first resonator mirror.

[0012] According to an example embodiment of the present invention, a reflective coating is disposed on the first surface of the lens unit of the first resonator mirror.

[0013] According to an example embodiment of the present invention, the third surface of the second resonator mirror is disposed between the fourth surface of the second resonator mirror and the airtight container.

[0014] According to an example embodiment of the present invention, the second resonator mirror includes the third surface and the fourth surface facing each other, and the third surface and the fourth surface are parallel to each other.

[0015] According to an example embodiment of the present invention, the first surface of the lens unit of the first resonator mirror is spiral-shaped.

[0016] According to an example embodiment of the present invention, the first surface of the lens unit of the first resonator mirror includes a plurality of inclined surfaces that are not parallel to each other.

[0017] According to an example embodiment of the present invention, there is provided a laser crystallization apparatus including a laser light source for generating laser light. A stage is mounted with a substrate. The laser light source includes: an airtight container; a first resonator mirror disposed outside the airtight container; and a second resonator mirror disposed outside the airtight container. The first resonator mirror includes a lens unit and a reflective coating. The lens unit includes a first surface and a second surface facing each other, and the first surface is inclined with respect to the second surface.

[0018] According to an example embodiment of the present invention, the second resonator mirror includes a third surface and a fourth surface facing each other, and the fourth surface is inclined with respect to the third surface.

[0019] According to an exemplary embodiment of the present application, the first resonator mirror includes a first point corresponding to a portion where a thickness of the first resonator mirror is thickest in a direction extending perpendicularly from a second surface of a lens unit of the first resonator mirror, a second point corresponding to a portion where the thickness of the first resonator mirror is thinnest in the direction extending perpendicularly from the second surface of the lens unit of the first resonator mirror, and a first axis passing through the first point and the second point. The second resonator mirror includes a third point corresponding to a portion where a thickness of the second resonator mirror is thickest in a direction extending perpendicularly from a third surface of a lens unit of the second resonator mirror, a fourth point corresponding to a portion where the thickness of the second resonator mirror is thinnest in the direction extending perpendicularly from the third surface of the lens unit of the second resonator mirror, and a second axis passing through the third point and the fourth point. An angle between the first axis and the second axis is 80° to 100°.

[0020] According to an exemplary embodiment of the present application, the first beam splitter is disposed to reflect a first portion of laser light output from a laser light source and to transmit a second portion of the laser light output from the laser light source. The second beam splitter is disposed to reflect a third portion of the laser light passing through the first beam splitter and to transmit a fourth portion of the laser light. A laser intensity sensing unit measures a pulse intensity of the first portion of the laser light reflected from the first beam splitter. A first monitoring unit is disposed to capture a focused image of the third portion of the laser light reflected from the second beam splitter. A second monitoring unit is disposed to capture a fifth portion of the laser light irradiating a substrate. A controller is disposed to adjust an angle between a first axis of the first resonator mirror and a second axis of the second resonator mirror.

[0021] According to an exemplary embodiment of the present application, the first optical system includes a beam splitter disposed on a path of progress of laser light output from a laser light source. A first mirror is disposed on a path of progress of the laser light passing through the beam splitter. A second mirror is disposed on a path of progress of the laser light reflected from the first mirror. The laser light passing through the beam splitter and reflected from the first mirror and the second mirror is incident to the beam splitter.

[0022] According to an exemplary embodiment of the present application, a second optical system is provided. The second optical system includes a beam splitter disposed on a path of progress of laser light output from a laser light source. A combiner is disposed on a path of progress of a first portion of the laser light passing through the beam splitter. A plurality of mirrors is disposed to reflect a second portion of the laser light reflected from the beam splitter toward the combiner.

[0023] According to an exemplary embodiment of the present application, a Dove prism is disposed on a path of progress of laser light output from a laser light source, the Dove prism having a trapezoidal shape.

[0024] According to an exemplary embodiment of the present application, a laser light source including a gas-tight container is provided. A first resonator mirror is provided. A second resonator mirror is disposed outside the gas-tight container and faces the first resonator mirror. First and second surfaces of the first resonator mirror, which face each other, are not parallel, and first and second surfaces of the second resonator mirror, which face each other, are not parallel.

[0025] According to an exemplary embodiment of the present application, a thickest portion of the first resonator mirror and a thickest portion of the second resonator mirror face each other. BRIEF DESCRIPTION OF DRAWINGS

[0026] The above and other features of the present application will become more apparent by describing in detail exemplary embodiments thereof with reference to the attached drawings in which:

[0027] Figure 1 is a schematic view of a laser light source according to an exemplary embodiment of the present application;

[0028] Figure 2 is a perspective view of a first resonator mirror included in a laser light source according to an exemplary embodiment of the present application;

[0029] Figure 3 is a perspective view of a second resonator mirror included in a laser light source according to an exemplary embodiment of the present application;

[0030] Figure 4 is a schematic view showing a positional relationship of the first and second resonator mirrors;

[0031] Figure 5 is a plan view showing an image of laser light output from a laser light source according to a comparative example;

[0032] Figure 6 is a plan view showing an image of laser light output from a laser light source according to a comparative example; Figure 3

[0033] Figure 7 is a plan view showing an image of laser light output from a laser light source according to a comparative example; Figure 2

[0034] Figure 8 is a plan view showing an image of laser light output from a laser light source according to an exemplary embodiment of the present application;

[0035] Figure 9 is a chart showing a percentage of an energy distribution of laser light output from a laser light source according to a comparative example and an exemplary embodiment of the present application;

[0036] Figure 10 is a chart showing a percentage of a center position distribution of laser light output from a laser light source according to a comparative example and an exemplary embodiment of the present application; ​​

[0037] Figure 11 is a schematic diagram of a laser crystallization apparatus according to an example embodiment of the present application;

[0038] Figure 12 is a perspective view of a first resonator mirror included in a laser light source according to an example embodiment of the present application;

[0039] Figure 13 is a perspective view of a first resonator mirror included in a laser light source according to an example embodiment of the present application;

[0040] Figure 14 is a schematic diagram of a laser light source according to an example embodiment of the present application;

[0041] Figure 15 is a schematic diagram of a laser light source according to an example embodiment of the present application;

[0042] Figure 16 is a perspective view of a first resonator mirror included in a laser light source according to an example embodiment of the present application;

[0043] Figure 17 is a perspective view of a first resonator mirror included in a laser light source according to an example embodiment of the present application;

[0044] Figure 18 is a perspective view of a first resonator mirror included in a laser light source according to an example embodiment of the present application;

[0045] Figure 19 is a perspective view of a first resonator mirror included in a laser light source according to an example embodiment of the present application;

[0046] Figure 20 is a perspective view of a first resonator mirror included in a laser light source according to an example embodiment of the present application;

[0047] Figure 21 is a schematic diagram of a laser crystallization apparatus according to an example embodiment of the present application;

[0048] Figure 22 is a schematic diagram of a laser crystallization apparatus according to an example embodiment of the present application; and

[0049] Figure 23 is a schematic diagram of a laser crystallization apparatus according to an example embodiment of the present application. DETAILED DESCRIPTION

[0050] The present application will be described more fully hereinafter with reference to the accompanying drawings, in which example embodiments of the present application are shown. Like reference numerals can be used to refer to like elements throughout this application.

[0051] In the drawings, the thicknesses of layers, films, panels, regions, etc., can be exaggerated for clarity. It will be understood that when an element such as a layer, film, region or substrate is referred to as being "on" another element, it can be directly on the other element or intervening elements can also be present.

[0052] First, referring to Figures 1 to 4 A laser light source 100 according to an exemplary embodiment of the present application is described. Figure 1 is a schematic view of a laser light source 100 according to an exemplary embodiment of the present application. Figure 2 is a perspective view of a first resonator mirror 130 included in the laser light source 100 according to an exemplary embodiment of the present application. Figure 3 is a perspective view of a second resonator mirror 140 included in the laser light source 100 according to an exemplary embodiment of the present application. Figure 4 is a schematic view showing a positional relationship of a first point A of the first resonator mirror 130 and a third point C of the second resonator mirror 140.

[0053] Referring to Figure 1 The laser light source 100 according to an exemplary embodiment of the present application includes a gas-tight container 110 in which a medium gas is sealed, first and second electrodes 121 and 122 disposed inside the gas-tight container 110, and a laser resonator unit (130 and 140) disposed outside the gas-tight container 110.

[0054] The gas-tight container 110 can include a tube, and the medium gas inside the gas-tight container 110 can include an excimer. For example, the medium gas can include at least one of neon (Ne), krypton (Kr), argon (Ar), and xenon (Xe). Depending on the type of gas molecules, the wavelength of the generated laser light can be determined.

[0055] The first and second electrodes 121 and 122 can be disposed to face each other inside the gas-tight container 110. For example, the first and second electrodes 121 and 122 can be disposed to be parallel to each other. One of the first and second electrodes 121 and 122 can be grounded, and the other can be applied with a high voltage. When a voltage is applied to the first or second electrode 121 or 122, discharge starts in a space between the first and second electrodes 121 and 122. Accordingly, laser light can be generated by repeatedly amplifying light generated when an electron of an atom or molecule of the medium gas is excited and then lowered again.

[0056] A first transparent window 115 and a second transparent window 116 are provided at opposite ends of the airtight container 110, respectively. The first transparent window 115 and the second transparent window 116 face each other and can transmit laser light. For example, the first transparent window 115 and the second transparent window 116 can be aligned laser ports provided at parallel sides of the airtight container 110. The first transparent window 115 and the second transparent window 116 can include glass or sapphire, etc., and can include an anti-reflection coating on a surface thereof to increase transmittance.

[0057] The laser resonance units (130 and 140) include a first resonance mirror 130 facing the first transparent window 115 outside the airtight container 110 and a second resonance mirror 140 facing the second transparent window 116 outside the airtight container 110.

[0058] Referring to Figure 2 The first resonance mirror 130 includes a lens unit 131 and a reflective coating 132.

[0059] The laser light generated in the airtight container 110 can pass through the first transparent window 115 and pass through the lens unit 131 of the first resonance mirror 130. The lens unit 131 of the first resonance mirror 130 includes a first surface 135 and a second surface 136 facing each other. The first surface 135 of the lens unit 131 of the first resonance mirror 130 can be a surface facing the first transparent window 115. The first surface 135 of the lens unit 131 of the first resonance mirror 130 can be disposed closer to the airtight container 110 than the second surface 136. The first surface 135 and the second surface 136 of the lens unit 131 can not be parallel, and the first surface 135 can have an inclined surface inclined at an angle with respect to the second surface 136.

[0060] The first resonance mirror 130 includes a first point A corresponding to a portion in which a thickness of the first resonance mirror 130 is thickest in a direction extending perpendicularly from the second surface 136 of the lens unit 131. The first resonance mirror 130 can have a second point B corresponding to a portion in which the thickness of the first resonance mirror 130 is thinnest in a direction extending perpendicularly from the second surface 136 of the first resonance mirror 130. A first axis L1 connects the first point A and the second point B. The second surface 136 can be circular, and the first axis L1 can pass through a center point O1 of the second surface 136. For example, the first point A and the second point B can represent points on a circumference of the second surface 136 spaced apart by a diameter of the second surface 136.

[0061] The lens unit 131 of the first resonance mirror 130 can include at least one of fused quartz, magnesium fluoride (MgF2), aluminum oxide (Al2O3), and silicon oxide (SiO2).

[0062] A reflective coating 132 is disposed on the second surface 136 of the lens unit 131. Laser light transmitted through the lens unit 131 of the first resonator 130 can be reflected by the reflective coating 132. The reflective coating 132 is integrally formed with the lens unit 131 so that the reflective coating 132 can be in contact with the second surface 136 of the lens unit 131. The reflective coating 132 of the first resonator 130 can have a reflectivity of 99% or more.

[0063] The reflective coating 132 of the first resonator 130 can include at least one of hafnium oxide (HfO2), aluminum oxide (Al2O3), silicon oxide (SiO2). In addition, the reflective coating 132 of the first resonator 130 can include a multi-layer of hafnium oxide (HfO2) and silicon oxide (SiO2), or a multi-layer of aluminum oxide (Al2O3) and silicon oxide (SiO2).

[0064] Referring to Figure 3 The second resonator 140 can be a low reflector in which the reflectivity is lower than the transmissivity. For example, the second resonator 140 can have a transmissivity of about 90% or more.

[0065] The second resonator 140 includes a third surface 145 and a fourth surface 146 facing each other. The third surface 145 of the second resonator 140 can be a surface facing the second transparent window 116. The third surface 145 of the second resonator 140 can be disposed closer to the airtight container 110 than the fourth surface 146. The third surface 145 and the fourth surface 146 of the second resonator 140 can not be parallel, and the fourth surface 146 of the second resonator 140 can be an inclined surface having a predetermined angle with respect to the third surface 145. If one surface of the second resonator 140 is configured as an inclined surface, external light can be prevented from being reflected from or transmitted through the second resonator 140 to be incident into the airtight container 110. The second surface 136 of the first resonator 130 and the third surface 145 of the second resonator 140 can be spaced apart by a cavity length CL.

[0066] The second resonator 140 includes a third point C corresponding to a portion in which the thickness of the second resonator 140 is thickest in a direction extending perpendicularly from the third surface 145 of the second resonator 140. The second resonator 140 includes a fourth point D corresponding to a portion in which the thickness of the second resonator 140 is thinnest in a direction extending perpendicularly from the third surface 145 of the second resonator 140. A second axis L2 connects the third point C and the fourth point D. The third surface 145 can be circular, and the second axis L2 can pass through a center point O2 of the third surface 145. For example, the third point C and the fourth point D can represent points on a circumference of the third surface 145 spaced apart by a diameter of the third surface 145.

[0067] The second resonator mirror 140 can include at least one of fused quartz, magnesium fluoride (MgF2), aluminum oxide (Al2O3), and silicon oxide (SiO2).

[0068] The laser light transmitted through the first transparent window 115 from the inside of the airtight container 110 is reflected by the reflective coating 132 of the first resonator mirror 130 and proceeds into the airtight container 110. A first portion of the laser light transmitted through the second transparent window 116 from the inside of the airtight container 110 is reflected by the second resonator mirror 140 and proceeds into the airtight container 110, and a second portion thereof passes through the second resonator mirror 140. The laser light is amplified by resonance of the first portion that travels between the first resonator mirror 130 and the second resonator mirror 140. The amplified laser light can be output from the laser light source 100 through the second resonator mirror 140.

[0069] Referring to Figure 4 The first resonator mirror 130 and the second resonator mirror 140, which face each other, can be offset by an angle θ (i.e., 80° to 100°) between the first axis L1 and the second axis L2 (i.e., the angle between the line parallel to the first axis L1 and connecting the point A' and the point B' shown in FIG. 1B). Figure 4 If the positions of the first point A (where the thickness is the thickest in the first resonator mirror 130) and the third point C (where the thickness is the thickest in the second resonator mirror 140) are set to cross, the intensity of interference of the laser light generated at the laser resonance unit (130 and 140) can be mitigated. In addition, the energy uniformity of the laser light is improved, and the energy asymmetry of the laser light can be reduced.

[0070] The second resonator mirror 140, which is disposed on the side where the laser light is output among the two mirrors constituting the laser resonance unit (130 and 140), can also be referred to as an output coupler mirror here.

[0071] The laser light source 100 can include a fan motor and a cooling pipe coupled to the airtight container 110. The fan motor can circulate the medium gas in the airtight container 110, and the cooling pipe can cool the medium gas by heat-exchanging the medium gas with cooling water.

[0072] Figure 5 is an image of laser light output from a laser light source according to a comparative example including a first resonator mirror in which a first surface and a second surface are parallel. Referring to Figure 5 It can be seen that, according to the comparative example, an interference pattern in a diagonal shape extending in one direction is generated by the laser light output from the laser light source. For example, in Figure 5 a band in which the interference pattern can be discerned in the comparative example of the laser light source output in

[0073] Figure 6 isFigure 3 The interference pattern image of the second resonant mirror 140. Figure 6 In the image, the third point C of the second resonant mirror 140 is positioned at the bottom left. In this case, it can be seen that the interference pattern of the laser is a straight line extending in a direction intersecting the axis passing through the third point C and the fourth point D.

[0074] Figure 7 yes Figure 2 Interference pattern image of the first resonant mirror 130. Figure 7 In the middle, the first point A of the first resonant mirror 130 is set at the bottom right. Figure 7 In the middle, the axis passing through the first point A and the second point B of the first resonant mirror 130 can be parallel to the axis passing through... Figure 6 The axes of the third point C and the fourth point D of the second resonant mirror 140 form a 90° angle. Figure 7 In the experiment, the interference pattern of the laser has a straight line shape extending in a direction that intersects the axis passing through the first point A and the second point B.

[0075] Reference Figure 6 and Figure 7 As can be seen, the interference pattern of the second resonant mirror 140 is symmetrical to that of the first resonant mirror 130. Therefore, by simultaneously setting the first resonant mirror 130 and the second resonant mirror 140, such that the angle between the first axis L1 of the first resonant mirror 130 and the second axis L2 of the second resonant mirror 140 is between 80° and 100°, the interference intensity of the laser can be reduced.

[0076] Figure 8 This is an image of laser light output from a laser source 100 according to an exemplary embodiment of the present invention. Specifically, the laser source 100 according to an exemplary embodiment of the present invention and... Figure 1 The laser source 100 is identical, and the first resonant mirror 130 and the second resonant mirror 140 are configured such that the angle between the first axis L1 of the first resonant mirror 130 and the second axis L2 of the second resonant mirror 140 is between 80° and 100°. (Refer to...) Figure 8 ,and Figure 5 Compared to the comparative example, in the image of the laser output from the laser source 100 according to an exemplary embodiment of the present invention, the interference pattern is not recognizable.

[0077] Figure 9 This is a graph showing the percentage of energy distribution of laser light output from a laser source according to the comparative example and exemplary embodiments of the present invention. Figure 10 This is a graph showing the percentage distribution of the center position of the laser output from the laser source according to the comparative example and exemplary embodiments of the present invention.

[0078] Reference Figure 9, the percentage of the energy distribution of the laser light output from the laser light source according to Comparative Example R including the first resonator in which the first surface and the second surface are parallel is greater than the percentage of the energy distribution of the laser light output from the laser light source 100 according to the exemplary embodiment E of the present application.

[0079] Referring to Figure 10 , the percentage of the center position distribution of the laser light output from the laser light source according to Comparative Example R including the first resonator in which the first surface and the second surface are parallel is greater than the percentage of the center position distribution of the laser light output from the laser light source 100 according to the exemplary embodiment E of the present application. In other words, it can be confirmed that the energy asymmetry of the laser light output from the laser light source 100 according to the exemplary embodiment E of the present application is reduced.

[0080] In the case of the laser light output from the laser light source 100 according to the exemplary embodiment of the present application, the intensity of interference is mitigated, thereby improving the energy uniformity of the laser light and reducing the energy asymmetry of the laser light.

[0081] Referring to Figure 11 A laser crystallization apparatus 10 according to the exemplary embodiment of the present application is described. Figure 11 is a schematic diagram illustrating the laser crystallization apparatus 10 according to the exemplary embodiment of the present application.

[0082] The laser crystallization apparatus 10 according to the exemplary embodiment of the present application includes a laser light source 100, a laser intensity sensing unit 200, a first monitoring unit 300, a stage 510, a second monitoring unit 600, and a controller 700.

[0083] The laser light source 100 of the laser crystallization apparatus 10 according to the exemplary embodiment of the present application can be the same as the laser light source 100 of Figure 1 .

[0084] The first beam splitter BS1 is disposed on a path of progress of the laser light LB output from the laser light source 100. For example, a plane of the first beam splitter BS1 can be disposed at an angle with respect to a trajectory of the laser light LB incident thereon. A first portion of the laser light LB output from the laser light source 100 is reflected by the first beam splitter BS1 and progresses to the laser intensity sensing unit 200. For example, the first portion of the laser light LB can be reflected in a direction perpendicular with respect to the trajectory of the laser light LB incident on the first beam splitter BS1. A second portion of the laser light LB output from the laser light source 100 passes through the first beam splitter BS1. The laser intensity sensing unit 200 can measure a pulse intensity of the first portion of the laser light LB with respect to time.

[0085] A second beam splitter BS2 is disposed on an advancing path of the second portion of the laser LB that passes through the first beam splitter BS1. A third portion of the laser LB that passes through the first beam splitter BS1 is reflected by the second beam splitter BS2 and advances to the first monitoring unit 300. A fourth portion of the laser LB that passes through the first beam splitter BS1 passes through the second beam splitter BS2. The first monitoring unit 300 photographs a focused image of the third portion of the laser LB to measure an energy distribution or a focus position of the laser LB.

[0086] An optical system 400 is disposed on an advancing path of the fourth portion of the laser LB that is transmitted through the second beam splitter BS2. The optical system 400 can include a plurality of lenses or mirrors. The optical system 400 can adjust the laser LB so that the laser LB generated from the laser light source 100 satisfies parameters required to process the substrate 520.

[0087] The fourth portion of the laser LB that passes through the optical system 400 is reflected by the first mirror 501, is collected by the condensing lens 502, and is irradiated onto the substrate 520 disposed on the object table 510.

[0088] The substrate 520 can include an amorphous silicon layer. The laser crystallization apparatus 10 according to an exemplary embodiment of the present application irradiates the substrate 520 with a fifth portion of the laser LB, thereby crystallizing the amorphous silicon layer of the substrate 520 into a polysilicon layer.

[0089] The second monitoring unit 600 can include a charge-coupled device (CCD) camera and photographs the fifth portion of the laser LB that irradiates the substrate 520 to determine a state of the fifth portion of the laser LB that irradiates the substrate 520.

[0090] Information for the laser LB obtained by the laser intensity sensing unit 200, the first monitoring unit 300, and the second monitoring unit 600 can be transmitted to the controller 700. The controller 700 can adjust positions of the first resonant mirror 130 and the second resonant mirror 140 based on the information obtained from the laser intensity sensing unit 200, the first monitoring unit 300, and the second monitoring unit 600. The controller 700 can rotate the first resonant mirror 130 or the second resonant mirror 140 or adjust a gap between the first resonant mirror 130 and the second resonant mirror 140. For example, the controller 700 can adjust an angle between the first axis L1 of the first resonant mirror 130 and the second axis L2 of the second resonant mirror 140.

[0091] Figure 12 is a perspective view of the first resonant mirror 130 included in the laser light source 100 according to an exemplary embodiment of the present application.

[0092] Referring to Figure 12The first resonator mirror 130 includes a lens unit 131 and a reflective coating 132. Laser light can pass through the lens unit 131 of the first resonator mirror 130, and can be reflected by the reflective coating 132.

[0093] The lens unit 131 of the first resonator mirror 130 includes a first surface 135 and a second surface 136 facing each other. The first surface 135 of the lens unit 131 of the first resonator mirror 130 is a surface facing the first transparent window 115. The first surface 135 of the lens unit 131 of the first resonator mirror 130 can be disposed closer to the airtight container 110 than the second surface 136. The first surface 135 of the lens unit 131 can be a surface inclined at an angle with respect to the second surface 136.

[0094] The reflective coating 132 can be disposed between the first surface 135 and the second surface 136 of the lens unit 131. The reflective coating 132 can be parallel to the second surface 136 of the lens unit 131. The lens unit 131 can include a first portion 131a including the first surface 135 of the lens unit 131 and a second portion 131b including the second surface 136 of the lens unit 131. The reflective coating 132 can be disposed between the first portion 131a and the second portion 131b.

[0095] The first resonator mirror 130 includes a first point A corresponding to a portion in which the thickness of the first resonator mirror 130 is thickest in a direction extending perpendicularly from the second surface 136 of the first resonator mirror 130. The first resonator mirror 130 includes a second point B corresponding to a portion in which the thickness of the first resonator mirror 130 is thinnest in a direction extending perpendicularly from the second surface 136 of the first resonator mirror 130. A first axis L1 connects the first point A and the second point B. The second surface 136 can be circular, and the first axis L1 can pass through a center point O1 of the second surface 136.

[0096] When the first resonator mirror 130 of the laser light source 100 faces the second resonator mirror 140 of the laser light source 100, Figure 12 When the first resonator mirror 130 of the laser light source 100 faces the second resonator mirror 140 of the laser light source 100, Figure 3 An angle θ between the first axis L1 of the first resonator mirror 130 and a second axis L2 of the second resonator mirror 140 can be between 80° and 100° when the first resonator mirror 130 faces the second resonator mirror 140.

[0097] Figure 13 is a perspective view of the first resonator mirror 130 included in the laser light source 100 according to an exemplary embodiment of the present application.

[0098] Referring to Figure 13 The first resonator mirror 130 includes a lens unit 131 and a reflective coating 132.

[0099] The lens unit 131 of the first resonant mirror 130 includes a first surface 135 and a second surface 136. The first surface 135 of the lens unit 131 of the first resonant mirror 130 is the surface facing the first transparent window 115. The first surface 135 of the lens unit 131 of the first resonant mirror 130 can be configured to be closer to the airtight container 110 relative to the second surface 136. The first surface 135 of the lens unit 131 can be an inclined surface forming a certain angle with respect to the second surface 136. A reflective coating 132 can be disposed on the first surface 135 of the lens unit 131 and can be in contact with the first surface 135. For example, the first surface 135 can be disposed between the reflective coating 132 and the second surface 136. The reflective coating 132 can be configured to be parallel to the inclined first surface 135 and can be exposed to the outside.

[0100] The first resonant mirror 130 includes a first point A, which corresponds to the thickest portion of the first resonant mirror 130 in a direction perpendicular to the second surface 136 of the first resonant mirror 130. The first resonant mirror 130 includes a second point B, which corresponds to the thinnest portion of the first resonant mirror 130 in a direction perpendicular to the second surface 136 of the first resonant mirror 130. A first axis L1 connects the first point A and the second point B. The second surface 136 may be circular, and the first axis L1 may pass through the center point O1 of the second surface 136.

[0101] when Figure 13 The first resonator 130 faces Figure 3 When the second resonant mirror 140 is used, the angle θ between the first axis L1 of the first resonant mirror 130 and the second axis L2 of the second resonant mirror 140 can be between 80° and 100°.

[0102] Figure 14 This is a schematic diagram of a laser source 100 according to an exemplary embodiment of the present invention. Except for the shape of the second resonant mirror 140, Figure 14 The laser source 100 is similar to Figure 1 The laser source is 100.

[0103] Reference Figure 14 According to an exemplary embodiment of the present invention, a laser source 100 includes an airtight container 110 in which a medium gas is sealed, a first electrode 121 and a second electrode 122 disposed inside the airtight container 110, and laser resonant units (130 and 140) disposed outside the airtight container 110.

[0104] The laser resonant units (130 and 140) include a first resonant mirror 130 facing the first transparent window 115 outside the airtight container 110 and a second resonant mirror 140 facing the second transparent window 116 outside the airtight container 110.

[0105] The second resonator mirror 140 includes a third surface 145 and a fourth surface 146 facing each other. The third surface 145 of the second resonator mirror 140 can be a surface facing the second transparent window 116, and can be closer to the airtight container 110 than the fourth surface 146. The third surface 145 and the fourth surface 146 can be parallel.

[0106] Figure 15 is a schematic view of a laser light source 100 according to an exemplary embodiment of the present application. Except for the profile of the second resonator mirror 140, Figure 15 the laser light source 100 of Figure 1 is similar to the laser light source 100 of

[0107] Referring to Figure 15 , the laser light source 100 according to an exemplary embodiment of the present application includes an airtight container 110 in which a medium gas is sealed, a first electrode 121 and a second electrode 122 disposed inside the airtight container 110, and a laser resonator unit (130 and 140) disposed outside the airtight container 110.

[0108] The laser resonator unit (130 and 140) includes a first resonator mirror 130 facing a first transparent window 115 outside the airtight container 110 and a second resonator mirror 140 facing a second transparent window 116 outside the airtight container 110.

[0109] The second resonator mirror 140 includes a third surface 145 and a fourth surface 146 facing each other. The third surface 145 of the second resonator mirror 140 can be a surface facing the second transparent window 116, and can be closer to the airtight container 110 than the fourth surface 146. The third surface 145 can be an inclined surface forming a certain angle with respect to the fourth surface 146. For example, the third surface 145 can be inclined.

[0110] Figure 16 is a perspective view of the first resonator mirror 130 included in the laser light source 100 according to an exemplary embodiment of the present application.

[0111] Referring to Figure 1 and Figure 16The lens unit 131 of the first resonator 130 includes a first surface 135 and a second surface 136 facing each other. The first surface 135 of the lens unit 131 of the first resonator 130 can be a surface facing the first transparent window 115 and can be disposed closer to the airtight container 110 than the second surface 136. The first surface 135 of the lens unit 131 can be an inclined surface forming an angle with respect to the second surface 136. The first surface 135 of the lens unit 131 can be a clockwise or counterclockwise rising spiral in which a thickness gradually thickens in a direction perpendicular to the second surface 136. The reflective coating 132 is disposed on the second surface 136 of the lens unit 131. It is described that the reflective coating 132 is disposed on the second surface 136 of the lens unit 131, however, the reflective coating 132 can be disposed between the first surface 135 and the second surface 136 of the lens unit 131 or can be disposed on the first surface 135.

[0112] Figure 17 is a perspective view of the first resonator 130 included in the laser light source 100 according to an exemplary embodiment of the present application.

[0113] Referring to Figure 1 and Figure 17 The lens unit 131 of the first resonator 130 includes a first surface 135 and a second surface 136 facing each other. The first surface 135 of the lens unit 131 of the first resonator 130 can be a surface facing the first transparent window 115 and can be disposed closer to the airtight container 110 than the second surface 136.

[0114] The first surface 135 of the lens unit 131 can be an inclined surface inclined with respect to the second surface 136. The first surface 135 of the lens unit 131 includes a first inclined surface 135a and a second inclined surface 135b. The first inclined surface 135a and the second inclined surface 135b are not parallel. A portion where the first inclined surface 135a and the second inclined surface 135b meet can have a minimum thickness. For example, an interface formed between the first inclined surface 135a and the second inclined surface 135b can form a line parallel to a short side of the first resonator 130, which bisects the second surface 136. The first inclined surface 135a and the second inclined surface 135b can gradually incline in a direction moving away from the middle of the second surface 136 toward the parallel short side. An angle a1 formed between the first inclined surface 135a and the second inclined surface 135b can be greater than 180° and less than 360°.

[0115] A reflective coating 132 is disposed on the second surface 136 of the lens unit 131. It is described that the reflective coating 132 is disposed on the second surface 136 of the lens unit 131, however the reflective coating 132 can be disposed between the first surface 135 and the second surface 136 of the lens unit 131, or can be disposed on the first surface 135.

[0116] Figure 18 is a perspective view of the first resonator mirror 130 included in the laser light source 100 according to an exemplary embodiment of the present invention.

[0117] Referring to Figure 1 and Figure 18 The lens unit 131 of the first resonator mirror 130 includes a first surface 135 and a second surface 136 facing each other. The first surface 135 of the lens unit 131 of the first resonator mirror 130 can be a surface facing the first transparent window 115, and can be a surface closer to the gas-tight container 110 than the second surface 136.

[0118] The first surface 135 of the lens unit 131 can be an inclined surface inclined with respect to the second surface 136. The first surface 135 of the lens unit 131 includes a first inclined surface 135a and a second inclined surface 135b. The first inclined surface 135a and the second inclined surface 135b are not parallel. A portion where the first inclined surface 135a and the second inclined surface 135b meet can be a thickest portion of the lens unit 131. For example, an interface formed between the first inclined surface 135a and the second inclined surface 135b can form a line bisecting the second surface 136, and the lens unit 131 can have a greatest thickness at the interface in a direction extending perpendicularly from the second surface 136. For example, the thickness of the lens unit 131 can increase in a direction from a parallel edge of the second surface 136 toward a center line thereof. An angle a1 between the first inclined surface 135a and the second inclined surface 135b can be greater than 0° and less than 180°.

[0119] A reflective coating 132 is disposed on the second surface 136 of the lens unit 131. It is described that the reflective coating 132 is disposed on the second surface 136 of the lens unit 131, however the reflective coating 132 can be disposed between the first surface 135 and the second surface 136 of the lens unit 131, or can be disposed on the first surface 135.

[0120] Figure 19 is a perspective view of the first resonator mirror 130 included in the laser light source 100 according to an exemplary embodiment of the present invention.

[0121] The lens unit 131 of the first resonator 130 includes a first surface 135 and a second surface 136 facing each other. The first surface 135 of the lens unit 131 of the first resonator 130 can be a surface facing the first transparent window 115, and can be disposed closer to the airtight container 110 than the second surface 136.

[0122] The first surface 135 of the lens unit 131 includes a first inclined surface 135a, a second inclined surface 135b, a third inclined surface 135c, and a fourth inclined surface 135d. The first inclined surface 135a, the second inclined surface 135b, the third inclined surface 135c, and the fourth inclined surface 135d are not parallel to each other. At a point O3 where the first inclined surface 135a, the second inclined surface 135b, the third inclined surface 135c, and the fourth inclined surface 135d of the lens unit 131 all meet, the thickness of the lens unit 131 can be at a minimum thickness in a direction extending perpendicularly from the second surface 136.

[0123] The reflective coating 132 is disposed on the second surface 136 of the lens unit 131. It is described that the reflective coating 132 is disposed on the second surface 136 of the lens unit 131, however the reflective coating 132 can be disposed between the first surface 135 and the second surface 136 of the lens unit 131, or can be disposed on the first surface 135.

[0124] Figure 20 is a perspective view of the first resonator 130 included in the laser light source 100 according to an exemplary embodiment of the present application.

[0125] The lens unit 131 of the first resonator 130 includes a first surface 135 and a second surface 136 facing each other. The first surface 135 of the lens unit 131 of the first resonator 130 can be a surface facing the first transparent window 115, and can be disposed closer to the airtight container 110 than the second surface 136.

[0126] The first surface 135 of the lens unit 131 includes a first inclined surface 135a, a second inclined surface 135b, a third inclined surface 135c, and a fourth inclined surface 135d. The first inclined surface 135a, the second inclined surface 135b, the third inclined surface 135c, and the fourth inclined surface 135d are not parallel to each other. At a point O3 where the first inclined surface 135a, the second inclined surface 135b, the third inclined surface 135c, and the fourth inclined surface 135d of the lens unit 131 all meet, the thickness of the lens unit 131 can be the thickest compared to other portions of the lens unit 131. The first inclined surface 135a and the third inclined surface 135c can be mirror-symmetrical about a third axis passing through the point O3 and parallel to the short side of the first resonator mirror 130. The second inclined surface 135b and the fourth inclined surface 135d can be mirror-symmetrical about a fourth axis passing through the point O3 and parallel to the long side of the first resonator mirror 130. The third axis and the fourth axis can be perpendicular to each other, for example.

[0127] The reflective coating 132 is disposed on the second surface 136 of the lens unit 131. It is described that the reflective coating 132 is disposed on the second surface 136 of the lens unit 131, however the reflective coating 132 can be disposed between the first surface 135 and the second surface 136 of the lens unit 131, or can be disposed on the first surface 135.

[0128] Next, referring to Figure 21 A laser crystallization apparatus according to an exemplary embodiment of the present application is described. Figure 21 is a schematic view of a laser crystallization apparatus according to an exemplary embodiment of the present application.

[0129] Referring to Figure 21 A laser crystallization apparatus according to an exemplary embodiment of the present application includes a laser light source 100 and a first optical system 810. The first optical system 810 includes a third beam splitter 811, a second mirror 812, and a third mirror 813.

[0130] The laser light source 100 can be Figure 1A portion of the laser LB (e.g., first laser LB') output from the laser light source 100 is reflected from the third beam splitter 811, and the remaining portion (e.g., second laser LB") passes through the third beam splitter 811 and is sequentially reflected at the second mirror 812 and the third mirror 813. The laser reflected from the third mirror 813 passes through the third beam splitter 811. The first laser LB' reflected from the third beam splitter 811 and the second laser LB" passing through the third beam splitter 811 are mixed. For example, the first laser LB' reflected from the third beam splitter 811 and the second laser LB" passing through the third beam splitter 811 can be parallel rays. A time difference corresponding to a difference in the path length of progress can be exhibited between the first laser LB' and the second laser LB". In other words, the first optical system 810 can further reduce the intensity of interference by dividing and remixing the laser LB output from the laser light source 100.

[0131] Next, referring to Figure 22 A laser crystallization apparatus according to an exemplary embodiment of the present application is described. Figure 22 is a schematic diagram of a laser crystallization apparatus according to an exemplary embodiment of the present application.

[0132] Referring to Figure 22 A laser crystallization apparatus according to an exemplary embodiment of the present application includes a laser light source 100 and a second optical system 820. The second optical system 820 includes a fourth beam splitter 821, a combiner 824, a fourth mirror 822, and a fifth mirror 823.

[0133] The laser light source 100 can be Figure 1 A portion of the laser LB (e.g., first laser LB') output from the laser light source 100 is reflected from the third beam splitter 811, and the remaining portion (e.g., second laser LB") passes through the third beam splitter 811 and is sequentially reflected at the second mirror 812 and the third mirror 813. The laser reflected from the third mirror 813 passes through the third beam splitter 811. The first laser LB' reflected from the third beam splitter 811 and the second laser LB" passing through the third beam splitter 811 are mixed. For example, the first laser LB' reflected from the third beam splitter 811 and the second laser LB" passing through the third beam splitter 811 can be parallel rays. A time difference corresponding to a difference in the path length of progress can be exhibited between the first laser LB' and the second laser LB". In other words, the first optical system 810 can further reduce the intensity of interference by dividing and remixing the laser LB output from the laser light source 100.

[0134] Next, referring to Figure 23 A laser crystallization apparatus according to an exemplary embodiment of the present application is described. Figure 23 is a schematic diagram of a laser crystallization apparatus according to an exemplary embodiment of the present application.

[0135] Referring to Figure 23The laser crystallization apparatus according to the exemplary embodiment of the present application includes a laser light source 100 and a Dove prism 830. The Dove prism 830 can be a prism having a trapezoidal shape.

[0136] The laser light source 100 can be Figure 1 The laser light source 100. The advancing paths of the first laser LB1 and the second laser LB2 output from the laser light source 100 are flipped up and down while passing through the Dove prism 830. In other words, the phases of the lasers output from the laser light source 100 can be flipped up and down while passing through the Dove prism 830.

[0137] While exemplary embodiments of the present application have been shown and described above, it will be apparent to those having ordinary skill in the art that various changes in form and details can be made thereto without departing from the spirit and scope of the present application as defined by the appended claims.

Claims

1.A laser light source comprising: an airtight container; and a first resonator mirror and a second resonator mirror outside the airtight container, wherein the first resonator mirror includes a lens unit and a reflective coating, the lens unit includes a first surface and a second surface, the first surface is inclined with respect to the second surface, the second resonator mirror includes a third surface and a fourth surface, the fourth surface is inclined with respect to the third surface, the first resonator mirror includes: a first point corresponding to a portion where a thickness of the first resonator mirror is thickest in a direction perpendicular to the second surface of the lens unit of the first resonator mirror; a second point corresponding to a portion where the thickness of the first resonator mirror is thinnest in the direction perpendicular to the second surface of the lens unit of the first resonator mirror; and a first axis passing through the first point and the second point, the second resonator mirror includes: a third point corresponding to a portion where a thickness of the second resonator mirror is thickest in a direction perpendicular to the third surface of the second resonator mirror; a fourth point corresponding to a portion where the thickness of the second resonator mirror is thinnest in the direction perpendicular to the third surface of the second resonator mirror; and a second axis passing through the third point and the fourth point, and an angle between the first axis and the second axis is 80° to 100°. 2.The laser light source according to claim 1, wherein the first surface is disposed between the airtight container and the second surface. 3.A laser crystallization apparatus comprising: a laser light source for generating a laser light; and a stage on which a substrate is mounted, wherein the laser light source includes: an airtight container; a first resonator mirror outside the airtight container; and a second resonator mirror outside the airtight container, wherein the first resonator mirror includes a lens unit and a reflective coating, wherein the lens unit includes a first surface and a second surface facing each other, wherein the first surface is inclined with respect to the second surface, wherein the second resonator mirror includes a third surface and a fourth surface facing each other, wherein the fourth surface is inclined with respect to the third surface, wherein the first resonator mirror includes: a first point corresponding to a portion where a thickness of the first resonator mirror is thickest in a direction perpendicular to the second surface of the lens unit of the first resonator mirror; a second point corresponding to a portion where the thickness of the first resonator mirror is thinnest in the direction perpendicular to the second surface of the lens unit of the first resonator mirror; and a first axis passing through the first point and the second point, wherein the second resonator mirror includes: a third point corresponding to a portion where a thickness of the second resonator mirror is thickest in a direction perpendicular to the third surface of the second resonator mirror; a fourth point corresponding to a portion where the thickness of the second resonator mirror is thinnest in the direction perpendicular to the third surface of the second resonator mirror; and a second axis passing through the third point and the fourth point, and wherein an angle between the first axis and the second axis is 80° to 100°. wherein an angle between the first axis and the second axis is 80° to 100°. 4.The laser crystallization apparatus of claim 3, further comprising: a first beam splitter that reflects a first portion of the laser output from the laser light source and transmits a second portion of the laser output from the laser light source; a second beam splitter that reflects a third portion of the laser that passes through the first beam splitter and transmits a fourth portion of the laser; a laser intensity sensing unit that measures a pulse intensity of the first portion of the laser reflected from the first beam splitter; a first monitoring unit that photographs a focused image of the third portion of the laser reflected from the second beam splitter; a second monitoring unit that photographs a fifth portion of the laser that irradiates the substrate; and a controller that adjusts an angle between the first axis of the first resonant mirror and the second axis of the second resonant mirror. 5.The laser crystallization apparatus of claim 3, further comprising: a first optical system, wherein the first optical system includes a beam splitter disposed on a path of progress of the laser output from the laser light source, a first mirror disposed on a path of progress of the laser that passes through the beam splitter, and a second mirror disposed on a path of progress of the laser reflected from the first mirror, and wherein the laser that passes through the beam splitter and is reflected from the first mirror and the second mirror is incident to the beam splitter. 6.The laser crystallization apparatus of claim 3, further comprising: a second optical system, wherein the second optical system includes a beam splitter disposed on a path of progress of the laser output from the laser light source, a beam combiner disposed on a path of progress of a first portion of the laser that passes through the beam splitter, and a plurality of mirrors that reflect a second portion of the laser reflected from the beam splitter toward the beam combiner. 7.The laser crystallization apparatus of claim 3, further comprising: a dove prism disposed on a path of progress of the laser output from the laser light source, the dove prism having a trapezoidal shape. ​

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