PICP dry etching under electric helium leak detection equipment

Abstract

The application provides a PICP dry etching under-electricity helium leakage detection equipment applied to the field of PICP dry etching technology, a detection plate fixing plate (3) is arranged on the equipment frame (1) of the PICP dry etching under-electricity helium leakage detection equipment, the upper assembly (6) of the hoisting component (2) includes an upper lifting tool (8) with a through hole, the lower assembly (7) of the hoisting component includes a fixing seat (9) arranged on the equipment frame (1), a rod (10) is arranged on the fixing seat (9), a helium detection air extraction component (30) is arranged on the lower part of the detection plate fixing plate (2), the helium detection air extraction component (30) is communicated with PICP under-electricity (20), a helium detector is communicated with the detection plate fixing plate (3), the PICP dry etching under-electricity helium leakage detection equipment can conveniently and quickly realize helium leakage detection of PICP under-electricity, effectively completes the judgment on whether the PICP under-electricity product exists leakage, and avoids the situation that the product cannot be used and is delivered.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of PICP dry etching, and more particularly relates to a PICP dry etching under electricity helium leakage detection equipment. BACKGROUND

[0002] In PICP (English full name: Planar Inductively Coupled Plasma, Chinese full name: planar inductively coupled plasma) under electricity production, according to the use requirements of the client, the PICP under electricity needs to be detected for helium leakage when the incoming material and after the process is completed, so as to judge whether the product exists leakage, and avoid the situation that the product cannot be used. The existing helium leakage detection has no positioning, and the substrate and the lower electrode may be misaligned when assembled, thereby affecting the product quality and the detection work efficiency. SUMMARY

[0003] The technical problem to be solved by the application is to provide a PICP dry etching under electricity helium leakage detection equipment which has a simple structure and can conveniently and quickly realize PICP dry etching under electricity helium leakage detection, so as to effectively complete the judgment of whether the product exists leakage and avoid the situation that the PICP dry etching under electricity helium leakage detection equipment cannot be used.

[0004] To solve the above technical problems, the technical scheme adopted by the application is as follows:

[0005] The application is a PICP dry etching under electricity helium leakage detection equipment, which comprises an equipment frame, a hoisting component and a helium detector.

[0006] The helium leakage detection air extraction component comprises a high vacuum valve mounting plate, a variable diameter pipe, a vacuum six-way pipe, a plurality of high vacuum valves and a corrugated pipe.

[0007] The helium leakage detection air extraction component of the PICP dry etching under electricity helium leakage detection equipment further comprises a buckle, a clamp, a corrugated pipe flange and a flange blind disc.

[0008] The high vacuum valve mounting plate of the helium leak detection device of the PICP dry etching lower electrode is mounted on the equipment frame, the clamp is mounted on the high vacuum valve mounting plate, the clamp is used for fixing the vacuum six-way pipe, the buckle connects the vacuum six-way pipe and the high vacuum valve, the corrugated pipe one end is connected with the corrugated pipe flange, and the other end of the corrugated pipe is connected with the high vacuum valve.

[0009] The corrugated pipe flange is arranged to be capable of being communicated with the PICP lower electrode, the reducing pipe is connected with the vacuum six-way pipe through the buckle, the reducing pipe is connected with the molecular pump, and the other end of the vacuum six-way pipe is arranged to be capable of being connected with the flange blind disc to realize structure sealing.

[0010] The upper lifting fittings of the lifting component upper assembly include a plurality of upper lifting fittings, the plurality of upper lifting fittings are arranged at intervals along the PICP lower electrode side surface, the lifting component lower assembly is arranged in one-to-one correspondence with the number and position of the lifting component upper assembly, and the rod of the lifting component lower assembly is arranged vertically.

[0011] When the PICP lower electrode is mounted on the lower surface of the detection plate fixed plate, the PICP lower electrode is fixedly connected with the detection plate fixed plate through screws, the bolt on the sealing plate on the lower surface of the detection plate fixed plate is connected with the sealing ring, the sealing ring is fixed and the sealing structure of the sealing ring is guaranteed, and the helium detector is arranged to be capable of performing helium detection on the PICP lower electrode through the helium leak detection component.

[0012] The PICP dry etching lower electrode helium leak detection equipment is provided with a slot opening in the lower part of the detection plate fixed plate, and the cooler plug plate is located in the slot opening and is fixedly connected with the PICP lower electrode through the bolt.

[0013] The equipment frame 1 comprises an aluminum profile body and an angle piece, and the aluminum profile body and the angle piece are fixedly connected to form the equipment frame.

[0014] The POM pad is fixed on the aluminum profile body to support the detection plate fixed plate, and the right-angle support is fixed on the aluminum profile body to position the detection plate fixed plate.

[0015] The technical scheme of the present application can achieve the following beneficial effects:

[0016] The PICP dry-etched helium leak detection device of this invention addresses the shortcomings of existing technologies by providing a helium leak detection device for PICP dry-etched circuits. During device setup, a raised edge is provided along the upper surface of the detection plate, with a sealing ring inside the raised edge. The PICP to be tested is placed onto the detection plate using a lifting device (lifting assembly), and after being secured with screws, the sealing ring reliably seals the joint between the PICP and the detection plate, forming a closed cavity. Then, a helium detector and a helium extraction device are used to perform helium leak detection on the PICP. This process is simple and convenient, provides reliable results, has simple steps, and high efficiency, effectively meeting the needs of mass production enterprises. Before testing the PICP, its auxiliary components must be removed. The use of lifting components not only enables the lifting function of PICP power-off, but also allows for accurate and quick positioning of the relative positions of the test board and the PICP power-off, ensuring hole alignment and facilitating subsequent helium leak detection. The PICP dry-etching power-off helium leak detection equipment described in this invention has a simple structure, enabling convenient and quick helium leak detection during PICP power-off, effectively determining whether PICP-powered products have leaks, and preventing unusable products from leaving the factory. Attached Figure Description

[0017] The following is a brief explanation of the contents depicted in the accompanying drawings and the markings therein:

[0018] Figure 1 This is a schematic diagram of the PICP dry etching helium leak detection device described in this invention;

[0019] Figure 2 This is a schematic diagram of the PICP dry etching helium leak detection device described in this invention from another angle;

[0020] Figure 3 This is a schematic diagram of the lifting component of the PICP dry etching helium leak detection device described in this invention;

[0021] Figure 4 This is a schematic diagram of the helium detection and extraction component of the PICP dry etching helium leak detection device described in this invention.

[0022] Figure 5 This is a schematic diagram of the device frame of the PICP dry etching helium leak detection device described in this invention;

[0023] Figure 6 This is a schematic diagram of the PICP power-off and detection board separation of the PICP dry etching under-electrode helium leak detection device described in this invention;

[0024] Figure 7 PICP dry etching under the electric helium leak detection device is shown in the bottom structure schematic diagram of the application;

[0025] Figure 8 PICP dry etching under the electric helium leak detection device is shown in the bottom structure schematic diagram of the application;

[0026] In the drawing, marked: 1, the equipment frame; 2, hoisting parts; 3, detection plate fixed version; 4, convex edge; 5, sealing ring; 6, hoisting parts upper assembly; 7, hoisting parts lower assembly; 8, upper lifting appliance; 9, fixed seat; 10, rod; 11, high vacuum valve mounting plate; 12, reducing pipe; 13, vacuum six-way pipe; 14, high vacuum valve; 15, bellows; 16, buckle; 17, clamp; 18, bellows flange; 20, PICP under electricity; 22, sealing plate; 23, slot; 24, cooler plug plate; 26, aluminum profile body; 27, corner piece; 28, POM pad; 29, right angle support; 30, helium detection air extraction component; 31, frame crossbeam; 32, universal caster; 31, PICP under electricity (PICP under electrode). DETAILED DESCRIPTION

[0027] The specific embodiments of the application and the shapes, structures, mutual positions and connecting relationships between the parts, functions and working principles of the components involved will be further described in detail below by comparing the drawings and the description of the embodiments:

[0028] As shown in the drawings Figure 1 - the drawings Figure 8The PICP dry etching lower electricity helium leakage detection equipment shown in the application includes an equipment frame 1, a lifting component 2, a helium detector, a detection plate setting plate 3 is arranged on the equipment frame 1, a raised edge 4 is arranged on the upper surface edge of the detection plate setting plate 3, a sealing ring 5 is arranged in the inner circle of the raised edge 4, the lifting component 2 includes a lifting component upper assembly 6 and a lifting component lower assembly 7, the lifting component upper assembly 6 includes an upper lifting tool 8 with a through hole, the lifting component lower assembly 7 includes a fixing seat 9 arranged on the equipment frame 1, a rod 10 is arranged on the fixing seat 9, a helium detection gas extraction component 30 is installed at the lower part of the detection plate setting plate 3, the helium detection gas extraction component 30 is in communication with the PICP lower electricity 20, the helium detector is in communication with the detection plate setting plate 3, and the lower part of the PICP lower electricity 3 is arranged to be capable of being installed on the surface position of the detection plate setting plate 3. The above structure, aiming at the deficiencies existing in the prior art, proposes a helium leakage detection equipment for the PICP lower electricity 20. When the equipment is set, the raised edge 4 is arranged on the upper surface edge of the detection plate setting plate 3, and the sealing ring 5 is arranged in the inner circle of the raised edge 4. In this way, the PICP lower electricity to be detected is placed on the detection plate setting plate by the lifting component 2 (hoisting device), and after the PICP lower electricity is fixed by screws, the sealing ring can realize reliable sealing of the combined part of the side surface of the PICP lower electricity and the detection plate setting plate 3, so that a closed cavity is formed between the PICP lower electricity and the detection plate setting plate 3. Then, the helium detector and the helium detection gas extraction component (helium detection gas extraction device) are used to cooperate to detect the helium leakage of the PICP lower electricity. In this way, the whole process is simple and convenient, the detection result is reliable, the detection steps are simple, the detection efficiency is high, and the batch production demand of production enterprises can be effectively met. Before the PICP lower electricity is detected, the attached parts thereof need to be removed. The use of the lifting component not only realizes the hoisting function of the PICP lower electricity 20, but also accurately and quickly positions the relative position of the detection plate setting plate and the PICP lower electricity, ensures the alignment of the hole position, and facilitates the subsequent helium leakage detection operation. The PICP dry etching lower electricity helium leakage detection equipment described in the application has the advantages of simple structure and convenient and fast realization of helium leakage detection of the PICP lower electricity, so that the judgment of whether the PICP lower electricity product exists leakage can be effectively completed, and the situation that the product cannot be used for shipment is avoided.

[0029] The helium detection exhaust component 30 comprises a high vacuum valve mounting plate 11, a variable diameter pipe 12, a vacuum six-way pipe 13, a plurality of high vacuum valves 14, and a corrugated pipe 15. The helium detection exhaust component 30 of the PICP dry etching lower electrode helium leak detection device further comprises a buckle 16, a clamp 17, a corrugated pipe flange 18, and a flange blind disc. The high vacuum valve mounting plate 11 of the helium detection exhaust component 30 of the PICP dry etching lower electrode helium leak detection device is mounted on the device frame 1, the clamp 17 is mounted on the high vacuum valve mounting plate 11, the clamp 17 is used to fix the vacuum six-way pipe 13, the buckle 16 connects the vacuum six-way pipe 13 and the high vacuum valve 14, one end of the corrugated pipe 15 is connected to the corrugated pipe flange 18, and the other end of the corrugated pipe 15 is connected to the high vacuum valve 14. The corrugated pipe flange 18 is arranged to be capable of communicating with the PICP lower electrode 20, the variable diameter pipe 12 is connected with the vacuum six-way pipe 13 through the buckle 16, the variable diameter pipe 12 is connected with a molecular pump, and when the molecular pump is working, the other end of the vacuum six-way pipe 13 is arranged to be capable of being connected with the flange blind disc to realize structural sealing.

[0030] The upper lifting assembly 6 of the lifting component 2 comprises a plurality of upper lifting assemblies 8, the plurality of upper lifting assemblies 8 are arranged at intervals along the side of the PICP lower electrode 20, the lower lifting assembly 7 is arranged in one-to-one correspondence with the number and position of the upper lifting assembly 6, and the rod of the lower lifting assembly 7 is arranged vertically. Through the arrangement of the lifting component, when the PICP lower electrode 20 needs to be placed and mounted on the detection plate fixed plate 3, the PICP lower electrode 20 is guided during lifting and mounting through the insertion and positioning of the upper lifting assembly 6 and the lower lifting assembly 7, so that the relative position of the detection plate fixed plate and the PICP lower electrode is accurately and quickly positioned, the hole positions are aligned, and the subsequent helium leak detection operation is facilitated. The lifting component 2 is convenient and reliable to use, and the lifting height can be adjusted according to different needs. Because the detection plate fixed plate needs to be precisely matched with the PICP lower electrode hole position during detection to ensure that the mounting hole positions correspond to each other, the PICP dry etching lower electrode helium leak detection device lifting component can effectively avoid the problems of detection disqualification and product fixation instability caused by mispositioning of the hole positions.

[0031] The lower PICP lower electrode 20 is fixedly connected with the detection plate die 3 by screws, the bolt on the lower surface of the detection plate die 3 is connected with the sealing ring 5, the sealing ring is fixed and the sealing structure of the sealing ring 5 is ensured, and the helium detector is arranged to be capable of performing helium detection on the PICP lower electrode 20 through the helium detection air extraction component 30. The above structure is that the sealing ring is installed in the sealing groove of the sealing plate and is fixed by bolts. At the same time, the helium detection air extraction component corresponds to a plurality of interfaces of the substrate, the helium detection air extraction component side port is connected with the vacuum molecular pump, and the molecular pump performs vacuum extraction on the substrate. The standard for judging whether the PICP lower electrode meets the requirements is that, after the vacuum molecular pump is pumped for 30 minutes, if the display air pressure is less than 1.0*10-9Pa*m3 / sec, it is indicated that the detection result meets the requirements.

[0032] The PICP dry etching lower electrode helium leakage detection equipment is provided with a slotted opening 23 at the lower part of the detection plate die 3, the cooler plug plate 24 is located in the slotted opening 23, and the cooler plug plate 24 is fixedly connected with the PICP lower electrode 20 by bolts. The above structure can reliably seal the PICP lower electrode by placing the cooler plug plate 24 in the slotted opening and fixedly connecting the cooler plug plate 24 with the PICP lower electrode 20 when helium leakage detection is required.

[0033] The equipment frame 1 comprises an aluminum profile body 26 and an angle piece 27, the aluminum profile body 26 and the angle piece 27 are fixedly connected to form the equipment frame 1. The POM pad 28 is fixed on the aluminum profile body 26 to support the detection plate die 3, and the right-angle support 29 is fixed on the aluminum profile body 26 to position the detection plate die 3. The above structure is that the aluminum profile body is light and convenient, has light weight, meets the strength requirement, is firm and reliable, and is convenient to install. The POM pad is fixed on the aluminum profile body to support the detection plate die, and the right-angle support is fixed on the aluminum profile body to position the detection plate die. The universal casters are installed at the bottom of the equipment frame, so that the equipment is convenient to use. People, vehicles and products can be moved and coordinated with each other, so as to find the best position for operation.

[0034] The PICP dry etching under electricity helium leakage detection equipment provided by the application is proposed in view of the deficiencies in the prior art. When the equipment is set, a raised edge is arranged on the upper surface of the detection plate die, and a sealing ring is arranged in the inner circle of the raised edge. In this way, the PICP under electricity to be detected is placed on the detection plate die through the hoisting component (hoisting device), and after the PICP under electricity is fixed by screws, the sealing ring can realize reliable sealing of the joint between the side surface of the PICP under electricity and the detection plate die, so that a closed cavity is formed between the PICP under electricity and the detection plate die 3. Then, the helium detector and the helium detection air extraction component (helium detection air extraction device) are used in cooperation to detect the helium leakage of the PICP under electricity. In this way, the whole process is simple and convenient, the detection result is reliable, the detection steps are simple, the detection efficiency is high, and the production enterprise batch production demand can be effectively met. Before the PICP under electricity is detected, the attached parts thereof need to be removed. The use of the hoisting component not only realizes the hoisting function of the PICP under electricity, but also accurately and quickly positions the relative positions of the detection plate die and the PICP under electricity, ensures the alignment of the hole positions, and facilitates the subsequent helium leakage detection operation. The PICP dry etching under electricity helium leakage detection equipment provided by the application has a simple structure, can conveniently and quickly realize the helium leakage detection of the PICP under electricity, effectively completes the judgment of whether the PICP under electricity product exists leakage, and avoids the situation that the product cannot be used and is out of the factory.

[0035] The application is described above in conjunction with the drawings, and it is obvious that the specific implementation of the application is not limited by the above method. Various improvements or direct applications of the application to other occasions are within the protection scope of the application.

Claims

1. A PICP dry etching helium leak detection device, characterized in that: The PICP dry-etched helium leak detection device includes a device frame (1), a lifting component (2), and a helium detector. A detection plate (3) is set on the device frame (1). A raised edge (4) is set on the upper surface edge of the detection plate (3). A sealing ring (5) is set on the inner ring of the raised edge (4). The lifting component (2) includes an upper component (6) and a lower component (7). The upper component (6) includes an upper lifting device (8) with a through hole. The lower component (7) includes a fixed seat (9) set on the device frame (1). A rod (10) is set on the fixed seat (9). A helium detection extraction component (30) is installed at the lower part of the detection plate (3). The helium detection extraction component (30) is connected to the PICP power supply (20). The helium detector is connected to the detection plate (3). The PICP power supply (20) is configured to be installed on the upper surface of the detection plate (3). The upper lifting device (8) of the upper component (6) of the lifting component includes multiple upper lifting devices (8) arranged around the side of the PICP lower power (20) with a gap. The lower component (7) of the lifting component is set to a structure that corresponds one-to-one with the number and position of the upper component (6) of the lifting component. The rods (10) of the lower component (7) of the lifting component are arranged vertically. The detection plate (3) is provided with a slot (23) at the bottom, and the cooler plug (24) is located in the slot (23). The cooler plug (24) is also fixedly connected to the PICP power supply (20) by bolts. The helium detection and extraction component (30) includes a high vacuum valve mounting plate (11), a reducing pipe (12), a vacuum six-way pipe (13), multiple high vacuum valves (14), and a bellows (15). The helium detection and extraction component (30) also includes a buckle (16), a clamp (17), a bellows flange (18), and a flange blind plate; The high vacuum valve mounting plate (11) is mounted on the equipment frame (1), and the clamp (17) is mounted on the high vacuum valve mounting plate (11). The clamp (17) is used to fix the vacuum six-way pipe (13). The buckle (16) connects the vacuum six-way pipe (13) and the high vacuum valve (14). One end of the bellows (15) is connected to the bellows flange head (18), and the other end of the bellows (15) is connected to the high vacuum valve (14).

2. The PICP dry etching helium leak detection device according to claim 1, characterized in that: The bellows flange (18) is configured to be connected to the PICP power supply (20). The reducer (12) is connected to the vacuum six-way pipe (13) via a buckle (16). The reducer (12) is connected to the molecular pump. When the molecular pump is in operation, the other end of the vacuum six-way pipe (13) is configured to be connected to the flange blind plate to achieve structural sealing.

3. The PICP dry etching helium leak detection device according to claim 1 or 2, characterized in that: When the PICP power supply (20) is installed on the upper surface of the detection plate (3), the PICP power supply (20) is fixedly connected to the detection plate (3) by screws. The bolts on the sealing plate (22) on the lower surface of the detection plate (3) are connected to the sealing ring (5) to fix the sealing ring (5) and ensure that the sealing ring (5) is sealed.

4. The PICP dry etching helium leak detection device according to claim 1 or 2, characterized in that: The equipment frame (1) includes an aluminum profile body (26) and corner pieces (27), which are fixedly connected to form the equipment frame (1).

5. The PICP dry etching helium leak detection device according to claim 4, characterized in that: POM pad (28) is fixed on the aluminum profile body (26) to support the test plate (3), and right angle bracket (29) is fixed on the aluminum profile body (26) to position the test plate (3).

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