Stripping device

Abstract

A peeling device, which is applicable to separating a protective sheet and a substrate that are adhered together. The peeling device includes an adsorption mechanism and a driving mechanism. The adsorption mechanism includes a carrying module, a first suction module, and a second suction module. The carrying module has a carrier and a connecting member. The first suction module is disposed on the carrier and near the connecting member and is used to vacuum adsorb near the edge of the protective sheet. The second suction module is spaced from the first suction module and is farther away from the connecting member. The driving mechanism includes a machine base, a linear moving element, and a linkage member. The linear moving element is disposed on the machine base and extends in an inclined direction. The linkage member is fixedly connected to the connecting member and can be driven by the linear moving element to reciprocate along the inclined direction, and drive the adsorption mechanism to move along the inclined direction, so as to gradually separate the protective sheet from the substrate starting from the edge, thus significantly reducing the risk of fragmentation of the protective sheet and damage to the substrate.

Description

Technical Field

[0001] The present invention relates to a peeling device, and particularly to a peeling device used in semiconductor manufacturing processes. Background Art

[0002] In semiconductor manufacturing processes, some substrates need to have a glass protective sheet adhered to the back surface to strengthen the substrate during the process and prevent the substrate from cracking. When the process is completed, the protective sheet needs to be peeled off from the substrate.

[0003] However, since the protective sheet is made of glass and is also a fragile material, in the current process of peeling the protective sheet from the substrate, the protective sheet often breaks and is not easily separated from the substrate, or the substrate breaks. Whether the protective sheet breaks or the substrate breaks, the substrate that has completed the process will be scrapped, resulting in wasted effort and cost. Summary of the Invention

[0004] One object of the present invention is to provide a peeling device that can reduce the risk of damage to the substrate during the peeling process.

[0005] In some embodiments of the peeling device of the present invention, it is suitable for separating a bonded protective sheet and substrate. The peeling device includes an adsorption mechanism and a driving mechanism. The adsorption mechanism includes a carrying module, a first suction module, and a second suction module. The carrying module has a carrier and a connecting member. The carrier is horizontally arranged and has an end. The connecting member is connected to the upper surface of the end. The first suction module is disposed on the carrier and near the connecting member, and has a first suction cup assembly located below the carrier. The first suction cup assembly is used for vacuum-sucking near the edge of the protective sheet. The second suction module is disposed on the carrier and spaced from the first suction module and farther away from the connecting member, and has a second suction cup assembly located below the carrier. The second suction cup assembly is used for jointly vacuum-sucking the protective sheet with the first suction cup assembly. The driving mechanism includes a machine base, a linear moving element, and a linkage member. The machine base can be operatively moved in the up and down direction. The linear moving element is disposed on the machine base and extends in an inclined direction relative to the up and down direction. The linkage member is fixedly connected to the connecting member and can be driven by the linear moving element to reciprocate along the inclined direction, and drive the adsorption mechanism to move along the inclined direction.

[0006] In some embodiments, the first suction module further has a support assembly disposed on the carrier. The support assembly extends along the up and down direction and the bottom end is connected to the first suction cup assembly. The support assembly and the first suction cup assembly are connected by a ball and socket joint structure so that the first suction cup assembly can swing slightly. The structure of the second suction module is the same as that of the first suction module.

[0007] In some embodiments, the first suction cup assembly has a suction cup base and an inner disk body located within the suction cup base to jointly define a gas flow space. The suction cup base has a mounting groove that extends downward from the upper surface of the suction cup base and gradually expands into a hemispherical shape. The support assembly has a supporting member at the bottom end. The supporting member passes through the mounting groove and has an arc-shaped surface that mates with the arc-shaped wall surface defining the mounting groove, such that the supporting member and the suction cup base jointly form a ball-and-socket joint structure.

[0008] In some embodiments, the support assembly further has a bushing fixed to the carrier, a main rod body slidably passing through the bushing in the up-and-down direction, a gland sandwiched between the bottom end of the main rod body and the top end of the supporting member, and an elastic member sleeved on the main rod body and abutting between the bushing and the gland.

[0009] In some embodiments, the support assembly further has an elastic washer sleeved on the supporting member and sandwiched between the gland and the suction cup base.

[0010] In some embodiments, the support assembly further has a sensing head connected to the top end of the main rod body. The sensing head has a small-diameter portion and a large-diameter portion that protrudes laterally from the small-diameter portion. The first suction module further has a position detector disposed on the carrier and located beside the sensing head. The position detector has a detection position and is used to determine which of the small-diameter portion and the large-diameter portion is located at the detection position.

[0011] In some embodiments, the first suction cup assembly further has an airtight gasket disposed on the bottom surface of the suction cup base.

[0012] In some embodiments, the centers of the second suction module, the first suction module, and the protective sheet are collinear.

[0013] In some embodiments, the second suction module is located at a position corresponding to adsorb the center of the protective sheet.

[0014] The present invention has at least the following effects: Driven by the linear moving element, the entire adsorption mechanism can move obliquely upward at a uniform speed and apply an oblique force to the protective sheet with the first suction cup assembly and the second suction cup assembly, so that the protective sheet can be gradually peeled off from the edge, thus greatly reducing the risk of the protective sheet being broken and the substrate being damaged. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, wherein:

[0016] Figure 1 is a cross-sectional schematic view of the initial position of the embodiment of the peeling device of the present invention and the protective sheet and substrate to be peeled off during the peeling process;

[0017] Figure 2 is a schematic diagram showing the relative positions of two suction cup assemblies of this embodiment with respect to the protective sheet and the substrate;

[0018] Figure 3 is a cross-sectional schematic diagram of the first suction module of this embodiment;

[0019] Figure 4 is a cross-sectional schematic diagram showing the state of pressing against the protective sheet during the peeling process of this embodiment;

[0020] Figure 5 is a cross-sectional schematic diagram showing the state of obliquely moving to peel the protective sheet during the peeling process of this embodiment; and

[0021] Figure 6 is a cross-sectional schematic diagram showing the slight swinging of the first suction module during the process of peeling the protective sheet. Detailed Embodiment

[0022] Refer to Figures 1 to 3 , an embodiment of the peeling device 100 of the present invention, which is applicable to separating a protective sheet 6 and a substrate 7 that are adhered together. The peeling device 100 includes a suction mechanism 10 and a driving mechanism 5.

[0023] The suction mechanism 10 includes a carrying module 1, a first suction module 2, and a second suction module 3. The carrying module 1 has a carrier 11 and a connecting member 12. The carrier 11 is horizontally arranged to be located above the protective sheet 6 in the working state and has an end portion 111 corresponding to the edge of the protective sheet 6. The connecting member 12 is connected to the upper surface of the end portion 111. The first suction module 2 is disposed on the carrier 11 and near the connecting member 12, and has a first suction cup assembly 21 located below the carrier 11. The first suction cup assembly 21 is used for vacuum adsorbing the edge of the protective sheet 6. The second suction module 3 is disposed on the carrier 11 and is spaced apart from the first suction module 2 and farther from the connecting member 12, and has a second suction cup assembly 31 located below the carrier 11. The second suction cup assembly 31 is used for jointly vacuum adsorbing the protective sheet 6 with the first suction cup assembly 21. Preferably, in the working state, the second suction module 3, the first suction module 2, and the center of the protective sheet 6 are collinear. In this embodiment, the substrate 7 and the protective sheet 6 are circular. As Figure 2 shown, in the working state, an imaginary line passing through the second suction module 3 and the first suction module 2 passes through the center of the protective sheet 6. Moreover, in this embodiment, the second suction module 3 is located at a position corresponding to adsorb the center of the protective sheet 6. Similarly, if the substrate 7 and the protective sheet 6 are square, the first suction module 2 and the second suction module 3 can also be arranged in the same way.

[0024] In this embodiment, the structure of the second suction module 3 is the same as that of the first suction module 2. Therefore, the following description will only take the first suction module 2 as an example. For the structure of the second suction module 3, please refer to the first suction module 2 and will not be repeated here.

[0025] The first suction module 2 further has a support assembly 22 and a position detector 23 disposed on the carrier 11. The support assembly 22 extends along a vertical direction D1 and its bottom end is connected to the first suction cup assembly 21. The support assembly 22 and the first suction cup assembly 21 are connected by a ball-and-socket joint structure so that the first suction cup assembly 21 can swing slightly. Specifically, the support assembly 22 has a bushing 221 fixed to the carrier 11, a main rod body 222 slidably disposed in the bushing 221 in the vertical direction D1, a support member 223 connected to the bottom end of the main rod body 222, a gland 224 sandwiched between the bottom end of the main rod body 222 and the top end of the support member 223, an elastic member 225 sleeved on the main rod body 222 and abutted between the bushing 221 and the gland 224, an elastic washer 226 sleeved on the support member 223 and sandwiched between the gland 224 and the first suction cup assembly 21, and a sensing head 227 connected to the top end of the main rod body 222. The support member 223 is fixedly connected to the main rod body 222 by a bolt 228.

[0026] The first suction cup assembly 21 has a suction cup seat 211 and an inner disk body 212 located in the suction cup seat 211 to jointly define a gas flow space 213. The suction cup seat 211 has a mounting groove 211b that extends downward from the upper surface of the suction cup seat 211 and gradually expands into a hemispherical shape. The support member 223 is disposed through the mounting groove 211b and has an arc surface that matches the arc-shaped wall surface defining the mounting groove 211b, so that the support member 223 and the suction cup seat 211 jointly form a ball-and-socket joint structure. In addition, the first suction cup assembly 21 further has an airtight gasket 214 disposed on the bottom surface of the suction cup seat 211 to prevent external gas from entering the gas flow space 213 during vacuum adsorption.

[0027] The position detector 23 is disposed on the carrier 11 and is located beside the sensing head 227, and has a detection position. The sensing head 227 has a small-diameter portion 227a and a large-diameter portion 227b that protrudes laterally from the small-diameter portion 227a. When the small-diameter portion 227a is located at the detection position of the position detector 23, the distance between the small-diameter portion 227a and the position detector 23 is greater than the distance between the large-diameter portion 227b and the position detector 23 when the large-diameter portion 227b is located at the detection position. By the difference in the distances between the small-diameter portion 227a and the large-diameter portion 227b and the position detector 23 when they are located at the detection position, it is determined which one is located at the detection position, and thus it can be known whether the first suction cup assembly 21 has reached the positioning. Its specific operation method will be described in detail below.

[0028] In this embodiment, the elastic member 225 is a compression spring for helping the first suction cup assembly 21 to fit with the protective sheet 6; the elastic washer 226 is made of polyurethane (PU) and is sleeved on the supporting member 223 and clamped between the gland 224 and the suction cup seat 211; the airtight washer 214 is made of fluororubber.

[0029] The driving mechanism 5 includes a machine base 51, a linear moving element 52, and a linkage 53. The machine base 51 is operably movable in the up-and-down direction D1. In this embodiment, the machine base 51 is driven by a pneumatic cylinder (not shown). The linear moving element 52 is disposed on the machine base 51 and extends in an inclined direction D2 that is inclined with respect to the up-and-down direction D1. The linkage 53 is fixedly connected to the connecting member 12 of the carrying module 1 and can be driven by the linear moving element 52 to reciprocate along the inclined direction D2, and drive the adsorption mechanism 10 to move along the inclined direction D2. In this embodiment, the linear moving element 52 is a lead screw and is driven by a motor (not shown). When the linear moving element 52 rotates forward, it can drive the linkage 53, so that the linkage 53 moves obliquely upward along the inclined direction D2. At the same time, the entire adsorption mechanism 10 also moves obliquely upward along the inclined direction D2 with the linkage 53. Conversely, when the linear moving element 52 rotates reversely, it can drive the linkage 53, so that the linkage 53 moves obliquely downward along the inclined direction D2 to return to the original position. At the same time, the entire adsorption mechanism 10 also moves obliquely downward along the inclined direction D2 with the linkage 53.

[0030] When the protective sheet 6 is to be peeled off from the substrate 7, as Figure 1 shown, first place the adhered substrate 7 and the protective sheet 6 at a predetermined position below the adsorption mechanism 10, so that the center of the protective sheet 6 is correspondingly located below the second suction cup assembly 31, and the vicinity of the edge of the protective sheet 6 is located below the first suction cup assembly 21. At this time, the bottom surfaces of the first suction cup assembly 21 and the second suction cup assembly 31 are spaced a certain distance from the surface of the protective sheet 6. Then, as Figure 4As shown, the base 51 is moved downward, and the entire adsorption mechanism 10 is driven to move downward together through the linkage 53, so that the bottom surfaces of the first suction cup assembly 21 and the second suction cup assembly 31 are pressed against the surface of the protection sheet 6. When the bottom surfaces of the first suction cup assembly 21 and the second suction cup assembly 31 contact the surface of the protection sheet 6, the base 51 still drives the entire adsorption mechanism 10 to move downward together until the position detector 23 detects that the small-diameter portion 227a moves to the detection position, then the downward movement of the base 51 is stopped. That is to say, when the adsorption mechanism 10 is continuously driven downward by the base 51, the main rod body 222 of the first attraction module 2 is pushed upward relative to the bushing 221 by the first suction cup assembly 21, and at the same time the sensing head 227 also moves upward relative to the position detector 23. When the sensing head 227 changes from the original detection position where the large-diameter portion 227b is sensed by the position detector 23 to the height where the small-diameter portion 227a moves upward to the detection position sensed by the position detector 23, the position detector 23 senses that the distance from the small-diameter portion 227a is larger than the distance from the large-diameter portion 227b, so that it can be confirmed that the first suction cup assembly 21 has indeed been pressed against the surface of the protection sheet 6. Moreover, when the position detector 23 detects a change in distance, it means that the main rod body 222 also moves the same height as the sensing head 227. Since the upward movement of the main rod body 222 relative to the bushing 221 shortens the distance between the bottom end of the bushing 221 and the gland 224, the elastic member 225 is compressed and stores elastic restoring force to exert pressure on the gland 224 and the pressure can be transmitted to the first suction cup assembly 21, thereby increasing the degree of fit between the first suction cup assembly 21 and the protection sheet 6. In addition, when the position detector 23 detects the small-diameter portion 227a, in addition to confirming that the first suction cup assembly 21 reaches the position to stop the downward movement of the base 51, a start signal is further generated to start the linear moving element 52 to perform the peeling procedure.

[0031] The actuation mode of the second attraction module 3 is the same as that of the first attraction module 2. After the first suction cup assembly 21 and the second suction cup assembly 31 are pressed against the surface of the protection sheet 6, the gas flow space 213 in the first suction cup assembly 21 and the second suction cup assembly 31 is evacuated, so that the first suction cup assembly 21 and the second suction cup assembly 31 vacuum-adsorb the protection sheet 6.

[0032] As Figure 5As shown, after the first suction cup assembly 21 and the second suction cup assembly 31 vacuum-adsorb the protection sheet 6, start the linear movement element 52. The linear movement element 52 rotates at a constant speed to drive the linkage 53 to move obliquely upward above the protection sheet 6 along the inclined direction D2 at a constant speed, and the linkage 53 simultaneously drives the entire adsorption mechanism 10 to move obliquely upward along the inclined direction D2. During the movement, since the first suction module 2 is close to the connecting member 12, which is the force-receiving part of the adsorption mechanism 10 where the connecting member 12 receives the thrust of the linkage 53, the first suction module 2 is first subjected to the thrust of the oblique upward movement through the transmission of force compared to the second suction module 3. Also, with reference to Figure 6 , when the first suction module 2 moves obliquely upward, during the peeling process of the protection sheet 6, the first suction cup assembly 21 can swing slightly. In this embodiment, the maximum swing amplitude of the first suction cup assembly 21 is 3.5 degrees. Since the bonding force between the edge of the protection sheet 6 and the substrate 7 is weak, the protection sheet 6 can be peeled off from the substrate 7 first from the edge, and then the protection sheet 6 is gradually peeled off from the substrate 7 while maintaining the oblique force application. That is to say, the linear movement element 52 drives the linkage 53 to move obliquely upward above the protection sheet 6 along the inclined direction D2 at a constant speed, enabling the first suction cup assembly 21 to first peel the protection sheet 6 from the edge from the substrate 7. As the linkage 53 continues to move obliquely upward, the first suction cup assembly 21 adsorbs the protection sheet 6 to gradually peel the protection sheet 6 from the edge to the center, and the second suction cup assembly 31 jointly adsorbs the protection sheet 6 to gradually and completely peel the protection sheet 6 from the substrate 7. In other words, compared with the method of applying force to the protection sheet 6 integrally in the vertical direction, peeling the protection sheet 6 from the substrate 7 by applying oblique force from the edge to the center and then to the edge can reduce the force applied to the protection sheet 6 and easily peel the protection sheet 6 from the substrate 7, thereby reducing the risk of the glass protection sheet 6 being broken and the substrate 7 being damaged.

[0033] When the protection sheet 6 is completely peeled off from the substrate 7, the oblique force applied to the first suction cup assembly 21 due to adsorbing the protection sheet 6 is removed, and the first suction cup assembly 21 can be restored to its original position by the restoring force after the elastic deformation of the elastic washer 226.

[0034] After completely peeling off the protection sheet 6, move the base 51 upward to drive the entire adsorption mechanism 10 upward, then the linear movement element 52 drives the linkage 53 to move obliquely downward to return to its original position, and at the same time, the adsorption mechanism 10 returns to its initial position to prepare for the next peeling process of the protection sheet 6.

[0035] In summary, driven by the linear moving element 52, the entire adsorption mechanism 10 can move obliquely upward at a uniform speed, and the first suction cup assembly 21 and the second suction cup assembly 31 apply an oblique force to the protective sheet 6, enabling the protective sheet 6 to be gradually peeled off from the edge. In this way, the risk of cracking of the protective sheet 6 and damage to the substrate 7 can be significantly reduced.

[0036] The above are only examples of the present invention, and the scope of implementation of the present invention cannot be limited thereby. That is, all simple equivalent changes and modifications made according to the claims and the content of the specification of the present invention still fall within the scope of the present invention.

Claims

1. A peeling device, applicable to separating a protective sheet and a substrate that are adhered to each other, characterized in that: The peeling device includes: An adsorption mechanism, including A carrying module, having a carrier base and a connecting member. The carrier base is horizontally arranged and has an end portion. The connecting member is connected to the upper surface of the end portion. A first suction module, disposed on the carrier base and near the connecting member, and having a first suction cup assembly located below the carrier base. The first suction cup assembly is used for vacuum adsorbing near the edge of the protective sheet, and A second suction module, disposed on the carrier base and at a position corresponding to adsorb the center of the protective sheet. The second suction module is spaced from the first suction module and farther away from the connecting member, and has a second suction cup assembly located below the carrier base. The second suction cup assembly is used for jointly vacuum adsorbing the protective sheet with the first suction cup assembly; and A driving mechanism, including A machine base, operably movable in the up and down direction, A linear moving element, disposed on the machine base and extending in an inclined direction inclined relative to the up and down direction, and A linkage member, fixedly connected to the connecting member and capable of being driven by the linear moving element to reciprocate along the inclined direction, and driving the adsorption mechanism to move along the inclined direction.

2. The peeling device according to claim 1, wherein: The first suction module further has a support assembly disposed on the carrier base. The support assembly extends along the up and down direction and the bottom end is connected to the first suction cup assembly. The support assembly and the first suction cup assembly are connected by a ball-and-socket joint structure so that the first suction cup assembly can swing slightly. The structure of the second suction module is the same as that of the first suction module.

3. The peeling device according to claim 2, wherein: The first suction cup assembly has a suction cup seat and an inner disk body located inside the suction cup seat to jointly define a gas flow space. The suction cup seat has a mounting groove. The mounting groove extends downward from the upper surface of the suction cup seat and gradually expands into a hemispherical shape. The support assembly has a supporting member at the bottom end. The supporting member passes through the mounting groove and has an arc surface that matches the arc-shaped wall surface defining the mounting groove, so that the supporting member and the suction cup seat jointly form a ball-and-socket joint structure.

4. The peeling device according to claim 3, characterized in that: The support assembly further has a bushing fixed to the carrier base, a main rod body slidably passing through the bushing in the up and down direction, a gland sandwiched between the bottom end of the main rod body and the top end of the supporting member, and an elastic member sleeved on the main rod body and abutting between the bushing and the gland.

5. The peeling device according to claim 4, wherein: The support assembly further has an elastic washer sleeved on the supporting member and sandwiched between the gland and the suction cup seat.

6. The peeling device according to claim 4, wherein: The support assembly further has a sensing head connected to the top end of the main rod body. The sensing head has a small-diameter portion and a large-diameter portion protruding laterally from the small-diameter portion. The first suction module further has a position detector disposed on the carrier base and at a position beside the sensing head. The position detector has a detection position and is used to judge which of the small-diameter portion and the large-diameter portion is located at the detection position.

7. The peeling device according to claim 3, characterized in that: The first suction cup assembly further has an airtight gasket disposed on the bottom surface of the suction cup seat.

8. The peeling device according to claim 1, wherein: The second suction module, the first suction module and the center of the protective sheet are collinear.

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