A vacuum box and helium mass spectrometer sealing test equipment

Abstract

The present invention discloses a vacuum box and a helium mass spectrometry sealing test device. The vacuum box includes: a box body, the box body includes a box body and a box door body, the box body includes a accommodating chamber; a translation drive mechanism, connecting the box door body and the box body, and used to drive the box door body to slide relative to the box body to open or close the accommodating chamber; a clamping mechanism, the clamping mechanism includes a clamping member; when the box door body slides to a position closing the accommodating chamber, the clamping mechanism is suitable for driving the clamping member to clamp or loosen the box door body. The vacuum box of the present invention adopts a translational clamping design, which can automatically control the opening or closing of the box door, and has the characteristics of easy operation, small space occupation and good sealing effect. The helium mass spectrometry sealing test device switches through two vacuum boxes. When the product inspection of one of the vacuum boxes is completed, the other vacuum box can be inspected, that is, the two vacuum boxes can be in the process of testing and helium recovery, cleaning, and vacuum release at the same time, thereby improving the inspection efficiency of the product.

Description

Technical Field

[0001] The present invention relates to the technical field of sealing testing, and in particular to a vacuum box and helium mass spectrometry sealing testing equipment. Background Art

[0002] A helium mass spectrometer leak detector is a specialized leak detection instrument that uses helium as a leak detector gas. It features stable performance and high sensitivity. It is the most sensitive and widely used leak detector in vacuum leak detection technology. With the development of new energy vehicles, their power batteries, motors, and motor drivers have increasingly stringent sealing requirements. The reasons for these sealing requirements for power batteries are: the battery pack / casing must be protected from water ingress that could cause short circuits; the liquid cooling lines within the battery pack must be leak-free; and the electrolyte within the battery cells must be protected from leakage and moisture. The sealing requirements for motors and motor drivers are driven by the fact that coolant seepage into the motor affects vehicle safety, and its performance and lifespan are crucial factors in determining its continued, stable operation. Traditional airtightness testing technologies sometimes fail to meet the airtightness requirements of new energy vehicles. Helium mass spectrometers offer advantages such as stability, reliability, and high sensitivity, better adapting to the demands of evolving sealing technologies.

[0003] Traditional helium mass spectrometry testing equipment involves placing the helium-filled product under test in a vacuum chamber, evacuating the chamber, and then testing with a helium mass spectrometer. The helium mass spectrometer measures the product's leak rate, and the helium is then released. Traditional helium mass spectrometer testing equipment has the following drawbacks: the vacuum chamber door flips open, requiring manual control to open and close. This results in cumbersome operation, large space requirements, and poor sealing. Because vacuum boxes are generally designed to be thicker and heavier to prevent deformation during vacuuming, once the box is deformed, the sealing ability of the sealing plane may fail, and the welding parts of the box or the fragile parts of the structure may deform and fatigue and crack during repeated tests, resulting in the box being scrapped. Because the vacuum box is relatively thick, its door cover is naturally very heavy. Generally, one side of the box with a flip-type door is fixed by an axis (that is, like the door at home, with a door axis) and only one side is movable. The risk of sealing failure is greater than our sliding door, and if a person manually operates the flip-type door, a lot of strength is required. If a cylinder is used to drive it, a large-diameter and large-volume cylinder is required. Summary of the Invention

[0004] In order to overcome the deficiencies of the prior art, one of the purposes of the present invention is to provide a vacuum box which adopts a translational pressing design, can automatically control the opening or closing of the box door, and has the characteristics of easy operation, small space occupation and good sealing effect.

[0005] A second object of the present invention is to provide a helium mass spectrometer sealing test device comprising the above-mentioned vacuum box.

[0006] One of the purposes of the present invention is achieved by the following technical solution:

[0007] A vacuum box, characterized by comprising:

[0008] Box, the box body includes a box body and a box door body, the box body includes a accommodating chamber;

[0009] a translation drive mechanism, connecting the box door and the box body, and configured to drive the box door to slide relative to the box body to open or close the accommodating chamber;

[0010] The pressing mechanism includes a pressing piece; when the door body slides to a position closing the accommodating chamber, the pressing mechanism is suitable for driving the pressing piece to press or release the door body.

[0011] In an optional embodiment, a support frame is further included, and the translation drive mechanism and the clamping mechanism are respectively installed on the support frame; the support frame includes a first vertical support plate and a second vertical support plate symmetrically arranged on the left and right sides of the box body, and a first horizontal connecting plate connected between the first vertical support plate and the second vertical support plate, and the first horizontal connecting plate is located above the box body.

[0012] In an optional embodiment, a backward tilt angle is formed between the box body and the vertical plane, so that the box body forms an inclined product placement opening; the box door body includes a sealing portion covering the product placement opening of the box body, and the inclination angle of the sealing portion is the same as the inclination angle of the box body; the first vertical support plate and the second vertical support plate both have a front inclined surface with the same inclination angle as the box body; the inclination angle is 10°-30°.

[0013] In an optional embodiment, the translation drive mechanism includes a translation cylinder, a piston rod connector, and a translation guide mechanism;

[0014] The door body further includes a first slider connecting portion and a second slider connecting portion extending outwardly along the left and right sides of the cover portion;

[0015] The translation cylinder is fixedly mounted on the outer side wall of the first vertical support plate or the second vertical support plate;

[0016] The translation guide mechanism includes a first guide assembly and a second guide assembly;

[0017] The first guide assembly includes a first sprocket arranged on the top of the first vertical support plate, a first chain arranged on the first sprocket, a first front guide rail arranged on the front inclined surface of the first vertical support plate, a first front slider slidably fitted on the first front guide rail, a first rear guide rail arranged on the rear side surface of the first vertical support plate, a first rear slider slidably fitted on the first rear guide rail, and a first slider connecting assembly; one end of the first chain is fixedly connected to the first front slider, and the other end of the first chain is fixedly connected to the first rear slider; one end of the first slider connecting assembly is connected to the first front slider, and the other end of the first slider is connected to the first slider connecting portion;

[0018] The second guide assembly includes a second sprocket arranged on the top of the second vertical support plate, a second chain arranged on the second sprocket, a second front guide rail arranged on the front inclined surface of the second vertical support plate, a second front slider slidably fitted on the second front guide rail, a second rear guide rail arranged on the rear side surface of the second vertical support plate, a second rear slider slidably fitted on the second rear guide rail, and a second slider connecting assembly; one end of the second chain is fixedly connected to the second front slider, and the other end of the second chain is fixedly connected to the second rear slider; one end of the second slider connecting assembly is connected to the second front slider, and the other end of the second slider is connected to the second slider connecting portion;

[0019] The piston rod of the translation cylinder is fixedly connected to the first front slider or the second front slider through a piston rod connecting piece.

[0020] In an optional embodiment, a counterweight block is further provided on the first rear sliding block and / or the second rear sliding block.

[0021] In an optional embodiment, the first slider connecting assembly includes a first guide post and a first spring; one end of the first guide post is fixedly mounted on the first front slider, and the other end thereof extends outward through the first slider connecting portion, and a first limit plate is provided at the extended end of the first guide post; the first spring is sleeved on the first guide post between the first front slider and the first slider connecting portion;

[0022] The second slider connecting assembly includes a second guide post and a second spring; one end of the second guide post is fixedly mounted on the second front slider, and the other end thereof extends outward through the second slider connecting portion, and a second limit plate is provided at the protruding end of the second guide post; the second spring is sleeved on the second guide post between the second front slider and the second slider connecting portion.

[0023] In an optional embodiment, the door body also includes a pressure-bearing part extending outward along the first slider connecting part or the second slider connecting part; the clamping mechanism also includes a clamping cylinder fixedly installed on the outer side wall of the first vertical support plate or the second vertical support plate, and the clamping part includes a fixed block and a clamping block arranged in parallel, and a connecting block connected between the fixed block and the clamping block; one end of the fixed block is fixedly connected to the piston rod of the clamping cylinder, and the other end thereof is fixedly connected to the clamping block through the connecting block; a channel for the pressure-bearing part to pass through is formed between the fixed block and the clamping block; when the door body slides to the position closing the accommodating chamber, the clamping cylinder is suitable for driving the clamping block to clamp or release the pressure-bearing part.

[0024] In an optional embodiment, the number of the pressure-bearing parts is two, and they are symmetrically arranged on the outside of the first slider connecting part and the second slider connecting part; the number of the clamping mechanisms is two, and they are symmetrically installed on the first vertical support plate and the second vertical support plate.

[0025] In an optional embodiment, a plurality of buffer members are provided on the support frame, and an abutment member is provided at a position corresponding to each buffer member on the first front slider and the second front slider; the buffer member is used to provide damping to the abutment member along the up and down sliding directions.

[0026] The second object of the present invention is achieved by adopting the following technical solution:

[0027] Helium mass spectrometry sealing test equipment is characterized by comprising the vacuum box described in one of the objectives of the present invention.

[0028] In an optional embodiment, the number of the vacuum boxes is two, respectively referred to as a first vacuum box and a second vacuum box; further comprising a helium source, a helium mass spectrometer leak detector, a first vacuum pump, a second vacuum pump, a third vacuum pump, and a helium recovery device;

[0029] The helium source is connected to the gas inlet of the first vacuum box through a first helium delivery pipe, and the helium source is also connected to the gas inlet of the second vacuum box through a second helium delivery pipe;

[0030] The air extraction port of the first vacuum box is connected to the first vacuum pump through a first air extraction pipe, and the air extraction port of the second vacuum box is connected to the first vacuum pump through a second air extraction pipe;

[0031] The inspection vent of the first vacuum box is connected to the air inlet of the helium mass spectrometer leak detector through a first inspection vent pipe, and the inspection vent of the second vacuum box is connected to the air inlet of the helium mass spectrometer leak detector through a second inspection vent pipe; the exhaust port of the helium mass spectrometer leak detector is connected to the second vacuum pump through a suction pipe;

[0032] The helium recovery port of the first vacuum box is connected to the air inlet of the third vacuum pump through a first helium recovery pipe, the helium recovery port of the second vacuum box is connected to the air inlet of the third vacuum pump through a second helium recovery pipe, and the air outlet of the third vacuum pump is connected to the helium recovery device through a pipeline;

[0033] The first vacuum box and the second vacuum box are respectively provided with a first atmospheric pipe and a second atmospheric pipe connected to the atmosphere;

[0034] The first helium delivery pipe, the second helium delivery pipe, the first exhaust pipe, the second exhaust pipe, the first inspection vent pipe, the second inspection vent pipe, the suction pipe, the first helium recovery pipe, the second helium recovery pipe, the first atmospheric pipe, and the second atmospheric pipe are all provided with electric control valves.

[0035] In an optional embodiment, a nitrogen scavenging system is further included, which includes a nitrogen source, a first nitrogen delivery pipe and a second nitrogen delivery pipe. The nitrogen source is connected to the nitrogen input port of the first vacuum box through the first nitrogen delivery pipe, and the nitrogen source is also connected to the nitrogen input port of the second vacuum box through the second nitrogen delivery pipe; the first nitrogen delivery pipe and the second nitrogen delivery pipe are both provided with electric control valves.

[0036] In an optional embodiment, a self-test system is further included, which includes a helium standard leak hole, a first self-test air tube and a second self-test air tube; the helium standard leak hole is connected to the first vacuum box through the first self-test air tube, and the helium standard leak hole is also connected to the second vacuum box through the second self-test air tube; the first self-test air tube and the second self-test air tube are both provided with electric control valves.

[0037] In an optional embodiment, a cabinet is further included, wherein a workbench for placing two vacuum boxes is provided in the middle of the cabinet, and a first accommodation space for placing a first vacuum pump, a second vacuum pump, and a third vacuum pump is provided on the cabinet below the workbench; a placement platform for placing a helium mass spectrometer leak detector is provided on the middle of the back side of the workbench on the cabinet, so that the helium mass spectrometer leak detector is located between the vacuum box and the first vacuum pump in the height direction of the cabinet.

[0038] Compared with the prior art, the present invention has the following beneficial effects:

[0039] 1. The vacuum box of the present invention includes a translation drive mechanism and a clamping mechanism. The translation drive mechanism is used to drive the box door body to slide relative to the box body to open or close the accommodating chamber; when the box door body slides to the position closing the accommodating chamber, the clamping mechanism is suitable for driving the clamping member to clamp or loosen the box door body. It adopts a translational clamping design, which can automatically control the opening or closing of the box door body, and has the characteristics of easy operation, small space occupation and good sealing effect. The present invention changes the flip-opening of the door into a translational opening of the door, and the entire box door body can be clamped to improve the reliability of the seal. Because the box door body is very thick, the present invention also designs and uses a counterweight method, so that a relatively small cylinder can be used to realize the opening and closing of the door. If a counterweight is not used, the cylinder for opening the door will be much larger.

[0040] 2. The helium mass spectrometry leak-tightness testing equipment of the present invention has the following advantages:

[0041] a. By switching between the first and second vacuum chambers, the helium mass spectrometer can be kept in working condition, improving test efficiency.

[0042] b. Add a helium recovery system. The recovered helium can be used for product testing, improving helium utilization and reducing testing costs. At the same time, it can also prevent the risk of helium being directly discharged and contaminating the helium mass spectrometer leak detector.

[0043] c. Adding a cleaning system to clean the vacuum box with nitrogen can effectively clean the residual helium in the vacuum box and improve the reliability of the test data.

[0044] d. Add a self-check system so that self-check can be performed when doubt arises about the data of the helium mass spectrometer leak detector.

[0045] e. The vacuum chamber is compatible with testing various types of products.

[0046] f. Filling the product with helium in a vacuum chamber can reduce the number of steps required to fill the product with helium before testing, and can achieve automatic helium filling and recovery. If it is an independent helium filling process outside the equipment, the degree of automation is low. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] Figure 1 is a perspective view of the vacuum box of Example 1;

[0048] Figure 2 A perspective view of the vacuum box of Example 1 from another angle;

[0049] Figure 3 This is a structural diagram of the door body of Example 1;

[0050] Figure 4 This is a three-dimensional diagram of the helium mass spectrometer sealing test equipment of Example 2;

[0051] Figure 5 A three-dimensional view of the helium mass spectrometer sealing test device of Example 2 from another angle;

[0052] Figure 6 This is a schematic diagram of the partial structure of the helium mass spectrometer sealing test equipment of Example 2;

[0053] Figure 7 This is a schematic diagram of the pipeline connection of the helium mass spectrometer sealing test equipment in Example 2; Figure 7 In the figure, P1-P13 and V1-V9 are all electric control valves; L is the first vacuum box 110, R is the second vacuum box 120; A and B are the products to be tested.

[0054] Figure 1-7 Middle: 100, vacuum box; 10, box body; 11, box body; 111, accommodating chamber; 12, box door; 121, cover; 122, first slider connection; 123, second slider connection; 124, pressure-bearing part; 21, translation cylinder; 22, piston rod connection; 231, first sprocket; 233, first front guide rail; 234, first front slider; 235, first rear guide rail; 236, first rear slider; 237, first slider connection assembly; 2371, first Guide post; 2372, first spring; 2373, first stop plate; 241, second sprocket; 243, second front guide rail; 244, second front slider; 245, second rear guide rail; 246, second rear slider; 247, second slider connecting assembly; 2471, second guide post; 2472, second spring; 2473, second stop plate; 25, counterweight; 31, pressing member; 311, fixing block; 312, pressing block; 313, connecting block; 32, pressing cylinder; 40, support Support frame; 41, first vertical support plate; 42, second vertical support plate; 43, first horizontal connecting plate; 50, buffer member; 60, abutment member; 110, first vacuum box; 120, second vacuum box; 200, helium source; 300, helium mass spectrometer leak detector; 400, first vacuum pump; 500, second vacuum pump; 600, third vacuum pump; 711, first helium delivery pipe; 712, second helium delivery pipe; 721, first exhaust pipe; 722, second exhaust pipe; 731 , first inspection vent pipe; 732, second inspection vent pipe; 741, suction pipe; 751, first helium recovery pipe; 752, second helium recovery pipe; 761, first atmospheric pipe; 762, second atmospheric pipe; 771, nitrogen source; 773, first nitrogen delivery pipe; 774, second nitrogen delivery pipe; 781, helium standard leak; 782, first self-test pipe; 783, second self-test pipe; 800, cabinet; 810, workbench; 820, placement platform. DETAILED DESCRIPTION

[0055] Below, the present invention is further described in conjunction with the accompanying drawings and specific embodiments. It should be noted that, under the premise of no conflict, the various embodiments described below or the various technical features can be arbitrarily combined to form a new embodiment. Unless otherwise specified, the materials and equipment used in this embodiment can be purchased from the market. Examples of the embodiments are shown in the accompanying drawings, in which the same or similar numbers throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and cannot be understood as limiting this application.

[0056] In the description of this application, it should be understood that the terms "upper," "lower," "front," "back," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended only to facilitate the description of this application and simplify the description. They do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limiting this application. In the description of this application, "plurality" means two or more, unless otherwise specifically specified.

[0057] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "connected," "connected," and "connected" should be understood in a broad sense. For example, they may refer to a fixed connection, a connection through an intermediary medium, internal communication between two components, or an interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0058] The terms "first," "second," and the like in the specification and claims of this application and the accompanying drawings are used to distinguish similar objects and are not necessarily used to describe a particular order or sequential sequence. In addition, the terms "including," "comprising," and "having," and any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or apparatus that includes a series of steps or elements is not necessarily limited to those steps or elements explicitly listed, but may include other steps or elements not explicitly listed or inherent to the process, method, product, or apparatus.

[0059] Example 1:

[0060] Reference Figure 1-3 , a vacuum box 100, comprising:

[0061] The box body 10, the box body 10 includes a box body 11 and a door body 12, the box body 11 includes a accommodating chamber 111;

[0062] A translation drive mechanism, connecting the box door body 12 and the box body 11, and used to drive the box door body 12 to slide relative to the box body 11 to open or close the accommodating chamber 111;

[0063] The pressing mechanism includes a pressing member 31 ; when the door body 12 slides to a position closing the accommodating chamber 111 , the pressing mechanism is suitable for driving the pressing member 31 to press or release the door body 12 .

[0064] In this embodiment, both the main body 11 and door 12 of the vacuum chamber 100 can be constructed of thick stainless steel. This ensures that the main body 11 does not deform during vacuuming, which in turn ensures that the door 12 does not deform during sealing, allowing for a better fit with the main body 11. Furthermore, the stainless steel structure of the vacuum chamber 100 utilizes welding technology, balancing both economic and technical performance. To ensure test accuracy, the weld roughness must be maintained and micro-gaps must be avoided. Surface roughness requirements for welds are: Ra ≤ 0.3 μm, l = 2.5 mm.

[0065] In a preferred embodiment of the present invention, a support frame 40 is further included, on which the translation drive mechanism and the pressing mechanism are respectively mounted. The support frame 40 includes a first vertical support plate 41 and a second vertical support plate 42 symmetrically arranged on the left and right sides of the box body 11, and a first horizontal connecting plate 43 connected between the first vertical support plate 41 and the second vertical support plate 42. The first horizontal connecting plate 43 is located above the box body 11. This allows sufficient installation space to prevent the translation drive mechanism and the pressing mechanism from interfering with the sliding of the box door body 12, while also providing the advantage of convenient assembly and disassembly.

[0066] In a preferred embodiment of the present invention, a backward tilt angle is formed between the box body 11 and the vertical plane, so that the box body 11 forms an inclined product placement opening; the box door body 12 includes a cover portion 121 covering the product placement opening of the box body 11, and the inclination angle of the cover portion 121 is the same as the inclination angle of the box body 11; the first vertical support plate 41 and the second vertical support plate 42 both have a front inclined surface with the same inclination angle as the box body 11. Preferably, the inclination angle is 10°-30°. More preferably, the inclination angle is 20°. This design has the following advantages: it is convenient to put in and take out the tested products, and it can also clean the residual helium in the vacuum box 100 more quickly.

[0067] In a preferred embodiment of the present invention, the translation drive mechanism includes a translation cylinder 21, a piston rod connector 22, and a translation guide mechanism;

[0068] The door body 12 further includes a first slider connecting portion 122 and a second slider connecting portion 123 extending outwardly along the left and right sides of the cover portion 121;

[0069] The translation cylinder 21 is fixedly mounted on the outer side wall of the first vertical support plate 41;

[0070] The translation guide mechanism includes a first guide assembly and a second guide assembly;

[0071] The first guide assembly includes a first sprocket 231 provided on the top of the first vertical support plate 41, a first chain (not shown in the figure) provided on the first sprocket 231, a first front guide rail 233 provided on the front inclined surface of the first vertical support plate 41, a first front slider 234 slidably fitted on the first front guide rail 233, a first rear guide rail 235 provided on the rear side surface of the first vertical support plate 41, a first rear slider 236 slidably fitted on the first rear guide rail 235, and a first slider connecting assembly 237; one end of the first chain (not shown in the figure) is fixedly connected to the first front slider 234, and the other end thereof is fixedly connected to the first rear slider 236; one end of the first slider connecting assembly 237 is connected to the first front slider 234, and the other end thereof is connected to the first slider connecting portion 122;

[0072] The second guide assembly includes a second sprocket 241 provided on the top of the second vertical support plate 42, a second chain (not shown in the figure) provided on the second sprocket 241, a second front guide rail 243 provided on the front inclined surface of the second vertical support plate 42, a second front slider 244 slidably fitted on the second front guide rail 243, a second rear guide rail 245 provided on the rear side surface of the second vertical support plate 42, a second rear slider 246 slidably fitted on the second rear guide rail 245, and a second slider connecting assembly 247; one end of the second chain (not shown in the figure) is fixedly connected to the second front slider 244, and the other end thereof is fixedly connected to the second rear slider 246; one end of the second slider connecting assembly 247 is connected to the second front slider 244, and the other end thereof is connected to the second slider connecting portion 123;

[0073] The piston rod of the translation cylinder 21 is fixedly connected to the first front slide block 234 through the piston rod connector 22. Designed like this, owing to the adoption of two sets of sprocket transmission mechanisms, the translation process is more stable and the working efficiency is high.

[0074] The door closing process is as follows: the piston rod is driven downward by the translation cylinder 21, and the piston rod drives the piston rod connecting member 22 to move downward, and the piston rod connecting member 22 drives the box door body 12 to move downward along the first front guide rail 233 through the first front slider 234, the first slider connecting assembly 237, and the first slider connecting portion 122 in sequence, and then can slide to the preset position to close the accommodating chamber 111; during the movement of the box door body 12, the first front slider 234 drives the first rear slider 236 to move upward along the first rear guide rail 235 through the first chain (not shown in the figure) and the first sprocket 231; the second slider connecting portion 123 of the box door body 12 drives the second front slider 244 to move downward along the second front guide rail 243 through the second slider connecting assembly 247, and the second front slider 244 drives the second rear slider 246 to move upward along the second rear guide rail 245 through the second chain (not shown in the figure) and the second sprocket 241;

[0075] The door opening process is as follows: the piston rod is driven upward by the translation cylinder 21, and the piston rod drives the piston rod connecting member 22 to move upward, and the piston rod connecting member 22 drives the box door body 12 to move upward along the first front guide rail 233 through the first front slider 234, the first slider connecting assembly 237, and the first slider connecting portion 122 in sequence, and then can slide to the preset position to open the accommodating chamber 111; during the movement of the box door body 12, the first front slider 234 drives the first rear slider 236 to move downward along the first rear guide rail 235 through the first chain (not shown in the figure) and the first sprocket 231; the second slider connecting portion 123 of the box door body 12 drives the second front slider 244 to move upward along the second front guide rail 243 through the second slider connecting assembly 247, and the second front slider 244 drives the second rear slider 246 to move downward along the second rear guide rail 245 through the second chain (not shown in the figure) and the second sprocket 241;

[0076] In a preferred embodiment of the present invention, a counterweight 25 is further provided on the first rear slider 236 and / or the second rear slider 246. In actual application, since the door body 12 is large and heavy, a cylinder with a long range and high pulling force is required when resetting the door body 12. A cylinder that meets these two conditions is relatively large in size. Therefore, the provision of the counterweight 25 can reduce the pulling force used to pull the door body 12 upward.

[0077] In a preferred embodiment of the present invention, the first slider connecting assembly 237 includes a first guide column 2371 and a first spring 2372; one end of the first guide column 2371 is fixedly mounted on the first front slider, and the other end thereof extends outward through the first slider connecting portion 122, and the extended end of the first guide column 2371 is provided with a first limiting plate 2373; the first spring 2372 is sleeved on the first guide column 2371 between the first front slider and the first slider connecting portion 122; the second slider connecting assembly 247 includes a second guide column 2471 and a second spring 2472; one end of the second guide column 2471 is fixedly mounted on the second front slider, and the other end thereof extends outward through the second slider connecting portion 123, and the extended end of the second guide column 2471 is provided with a second limiting plate 2473; the second spring 2472 is sleeved on the second guide column 2471 between the second front slider and the second slider connecting portion 123. With this design, the first spring 2372 and the second spring 2472 cooperate with the compression cylinder 32 to realize the function of automatic opening and compression. The compression cylinder 32 is installed on the support frame 40 to increase the force and strength of the compression. In addition, the first limit plate 2373 and the second limit plate 2473 can limit the open position.

[0078] In a preferred embodiment of the present invention, the door body 12 also includes a pressure-bearing portion 124 extending outward along the first slider connecting portion 122 and the second slider connecting portion 123; the clamping mechanism also includes a clamping cylinder 32 fixedly installed on the outer wall of the first vertical support plate 41, and the clamping member 31 includes a fixed block 311 and a clamping block 312 arranged in parallel, and a connecting block 313 connected between the fixed block 311 and the clamping block 312; one end of the fixed block 311 is fixedly connected to the piston rod of the clamping cylinder 32, and the other end thereof is fixedly connected to the clamping block 312 through the connecting block 313; a channel for the pressure-bearing portion 124 to pass through is formed between the fixed block 311 and the clamping block 312; when the door body 12 slides to the position of closing the accommodating chamber 111, the clamping cylinder 32 is suitable for driving the clamping block 312 to clamp or release the pressure-bearing portion 124.

[0079] In a preferred embodiment of the present invention, there are two pressure-bearing portions 124, symmetrically arranged outside the first slider connecting portion 122 and the second slider connecting portion 123; and there are two pressing mechanisms, symmetrically mounted on the first vertical support plate 41 and the second vertical support plate 42. This design ensures uniform force at all points during sealing, resulting in a better sealing effect.

[0080] In a preferred embodiment of the present invention, a plurality of buffer members 50 are provided on the support frame 40. An abutment member 60 is provided on the first and second front sliders at a position corresponding to each buffer member 50. The buffer members 50 are used to provide damping for the abutment members 60 in the upward and downward sliding directions. Due to the heavy weight of the door body 12, it is necessary to provide buffer members 50 at both the upper and lower limits of the door body 12's translation to provide a buffering and shock-absorbing effect.

[0081] In a preferred embodiment of the present invention, a clamping mechanism for clamping the product to be tested may also be provided on the box body 11 .

[0082] Example 2:

[0083] Reference Figure 4-7 , a helium mass spectrometer sealing test device includes the vacuum box 100 of Example 1.

[0084] In a preferred embodiment of the present invention, there are two vacuum boxes 100, namely a first vacuum box 110 and a second vacuum box 120; the system also includes a helium source 200, a helium mass spectrometer leak detector 300, a first vacuum pump 400, a second vacuum pump 500, a third vacuum pump 600, and a helium recovery device.

[0085] The helium source 200 is connected to the gas inlet of the first vacuum box 110 through a first helium delivery pipe 711 , and the helium source 200 is also connected to the gas inlet of the second vacuum box 120 through a second helium delivery pipe 712 ;

[0086] The exhaust port of the first vacuum box 110 is connected to the first vacuum pump 400 through the first exhaust pipe 721, and the exhaust port of the second vacuum box 120 is connected to the first vacuum pump 400 through the second exhaust pipe 722;

[0087] The inspection vent of the first vacuum box 110 is connected to the air inlet of the helium mass spectrometer leak detector 300 via a first inspection vent pipe 731 , and the inspection vent of the second vacuum box 120 is connected to the air inlet of the helium mass spectrometer leak detector 300 via a second inspection vent pipe 732 ; the exhaust port of the helium mass spectrometer leak detector 300 is connected to the second vacuum pump 500 via a suction pipe 741 ;

[0088] The helium recovery port of the first vacuum box 110 is connected to the air inlet of the third vacuum pump 600 via a first helium recovery pipe 751. The helium recovery port of the second vacuum box 120 is connected to the air inlet of the third vacuum pump 600 via a second helium recovery pipe 752. The air outlet of the third vacuum pump 600 is connected to the helium recovery device via a pipeline.

[0089] The first vacuum box 110 and the second vacuum box 120 are respectively provided with a first atmospheric pipe 761 and a second atmospheric pipe 762 connected to the atmosphere;

[0090] Electric control valves are provided on the first helium delivery pipe 711, the second helium delivery pipe 712, the first exhaust pipe 721, the second exhaust pipe 722, the first inspection vent pipe 731, the second inspection vent pipe 732, the suction pipe 741, the first helium recovery pipe 751, the second helium recovery pipe 752, the first atmospheric pipe 761, and the second atmospheric pipe 762.

[0091] In a preferred embodiment of the present invention, a nitrogen purge system is further included. The nitrogen purge system includes a nitrogen source 771, a first nitrogen delivery pipe 773, and a second nitrogen delivery pipe 774. The nitrogen source 771 is connected to the nitrogen inlet of the first vacuum chamber 110 via the first nitrogen delivery pipe 773. The nitrogen source 771 is also connected to the nitrogen inlet of the second vacuum chamber 120 via the second nitrogen delivery pipe 774. Both the first nitrogen delivery pipe 773 and the second nitrogen delivery pipe 774 are equipped with electric control valves. Thus, by purging the vacuum chamber 100 with nitrogen, residual helium in the vacuum chamber 100 can be effectively purged, thereby improving the reliability of test data.

[0092] In a preferred embodiment of the present invention, a self-test system is also included. The self-test system includes a helium standard leak 781, a first self-test air pipe 782, and a second self-test air pipe 783. The helium standard leak 781 is connected to the first vacuum chamber 110 via the first self-test air pipe 782, and the helium standard leak 781 is also connected to the second vacuum chamber 120 via the second self-test air pipe 783. Both the first self-test air pipe 782 and the second self-test air pipe 783 are equipped with electric control valves. A self-test can be performed when doubt arises about the data from the helium mass spectrometer leak detector 300.

[0093] In a preferred embodiment of the present invention, a cabinet 800 is further provided. A workbench 810 for placing two vacuum chambers 100 is provided in the middle of the cabinet 800. A first storage space for placing a first vacuum pump 400, a second vacuum pump 500, and a third vacuum pump 600 is provided below the workbench 810 on the cabinet 800. A placement platform 820 for placing a helium mass spectrometer leak detector 300 is provided in the middle of the back side of the workbench 810 on the cabinet 800. This allows the helium mass spectrometer leak detector 300 to be positioned between the vacuum chambers 100 and the first vacuum pump 400 in the height direction of the cabinet. Specifically, the helium mass spectrometer leak detector 300 must be positioned away from the vibration source of the first vacuum pump 400 and must not be higher than the stainless steel vacuum chamber 100. This is because, during cleaning of the vacuum chamber 100, residual helium gas from the test will be discharged into the air, which will rise into the air and potentially contaminate the helium mass spectrometer.

[0094] Reference Figure 7, where P1-P13 and V1-V9 are all electrically controlled valves; L is the first vacuum box 110, and R is the second vacuum box 120; the product is placed in the vacuum box 100 and filled with helium for testing, and A and B are the products to be tested.

[0095] The first vacuum pump 400 is used to convert the environments in the first vacuum box 110 and the second vacuum box 120 into vacuum.

[0096] The second vacuum pump 500 is used to provide a working environment for the helium mass spectrometer leak detector 300 .

[0097] The function of the third vacuum pump 600 is to pump the helium into the helium recovery system for recycling.

[0098] The helium standard leak 781 is used for self-test of the equipment.

[0099] The equipment leak testing process involves evacuating the first and second vacuum chambers 110, 120. The product under test is then filled with helium. The product in either the first or second vacuum chamber 110, 120, is tested. The helium mass spectrometer leak detector 300 performs the test, determining the product's leakage rate. The helium is then discharged to a recovery system, and the vacuum chamber 100 is purged with nitrogen before the vacuum is released. By switching between the first and second vacuum chambers 110, 120, once the product in one vacuum chamber 100 has been tested, the other vacuum chamber 100 can begin testing. This allows both vacuum chambers 100 to simultaneously undergo testing, helium recovery, purging, and vacuum release, improving product testing efficiency. The equipment is equipped with a helium standard leak 781, calibrated by a CNAS-accredited laboratory, to ensure accurate and reliable test data.

[0100] Working process of the equipment:

[0101] 1. Place the product to be tested into the vacuum box 100 and connect it to the helium outlet in the vacuum box 100;

[0102] 2. The first vacuum pump 400 extracts the gas from the vacuum box 100 to make the environment inside the vacuum box 100 vacuum, and then fills the product under test with helium through the helium supply system;

[0103] 3. After a period of time, the helium mass spectrometer leak detector 300 detects the time and leakage amount to obtain the leakage rate of the product. The third vacuum pump 600 pumps the helium gas tested in the product into the recovery system for recycling and reuse in the next test.

[0104] 4. After the helium recovery is completed, the vacuum box 100 will be cleaned by the nitrogen cleaning system.

[0105] 5. The vacuum box 100 is exhausted, that is, the vacuum environment of the vacuum box 100 is destroyed. After exhausting, the door 12 of the vacuum box 100 is opened and the product is taken out to complete a product test.

[0106] Other embodiments:

[0107] The clamping mechanism and the translation drive mechanism may also use a hydraulic cylinder as a power source, and the specific adjustment may be made according to the needs of the user. Although only certain components and embodiments of the present application have been illustrated and described, those skilled in the art may conceive of many modifications and changes (e.g., changes in the size, dimensions, structure, shape and proportion of each component, mounting arrangement, material usage, color, orientation, etc.) without actually departing from the scope and spirit of the claims.

[0108] Finally, it should be noted that the above-mentioned implementation mode is only a preferred embodiment of the present invention and cannot be used to limit the scope of protection of the present invention. Any non-substantial changes and replacements made by technicians in this field on the basis of the present invention fall within the scope of protection required by the present invention.

Claims

1. A vacuum box, characterized in that: include: Box, the box body includes a box body and a box door body, the box body includes a accommodating chamber; a translation drive mechanism, connecting the box door and the box body, and configured to drive the box door to slide relative to the box body to open or close the accommodating chamber; A clamping mechanism, the clamping mechanism comprising a clamping member; when the door body slides to a position closing the accommodating chamber, the clamping mechanism is adapted to drive the clamping member to clamp or release the door body; Also includes a support frame, the translation drive mechanism and the pressing mechanism are respectively mounted on the support frame; the support frame includes a first vertical support plate and a second vertical support plate symmetrically arranged on the left and right sides of the box body, and a first horizontal connecting plate connected between the first vertical support plate and the second vertical support plate, the first horizontal connecting plate is located above the box body; The box body forms an inclination angle tilted backward with respect to the vertical plane, so that the box body forms an inclined product placement opening; the box door body includes a cover portion covering the product placement opening of the box body, and the inclination angle of the cover portion is the same as the inclination angle of the box body; the first vertical support plate and the second vertical support plate each have a front inclined surface with the same inclination angle as the box body; the inclination angle is 10°-30°; The translation drive mechanism includes a translation cylinder, a piston rod connector, and a translation guide mechanism; The door body further includes a first slider connecting portion and a second slider connecting portion extending outwardly along the left and right sides of the cover portion; The translation cylinder is fixedly mounted on the outer side wall of the first vertical support plate or the second vertical support plate; The translation guide mechanism includes a first guide assembly and a second guide assembly; The first guide assembly includes a first sprocket arranged on the top of the first vertical support plate, a first chain arranged on the first sprocket, a first front guide rail arranged on the front inclined surface of the first vertical support plate, a first front slider slidably fitted on the first front guide rail, a first rear guide rail arranged on the rear side surface of the first vertical support plate, a first rear slider slidably fitted on the first rear guide rail, and a first slider connecting assembly; one end of the first chain is fixedly connected to the first front slider, and the other end of the first chain is fixedly connected to the first rear slider; one end of the first slider connecting assembly is connected to the first front slider, and the other end of the first slider is connected to the first slider connecting portion; The second guide assembly includes a second sprocket arranged on the top of the second vertical support plate, a second chain arranged on the second sprocket, a second front guide rail arranged on the front inclined surface of the second vertical support plate, a second front slider slidably fitted on the second front guide rail, a second rear guide rail arranged on the rear side surface of the second vertical support plate, a second rear slider slidably fitted on the second rear guide rail, and a second slider connecting assembly; one end of the second chain is fixedly connected to the second front slider, and the other end of the second chain is fixedly connected to the second rear slider; one end of the second slider connecting assembly is connected to the second front slider, and the other end of the second slider is connected to the second slider connecting portion; The piston rod of the translation cylinder is fixedly connected to the first front slider or the second front slider via a piston rod connector; The box door body also includes a pressure-bearing part extending outward along the first slider connecting part or the second slider connecting part; the pressing mechanism also includes a pressing cylinder fixedly mounted on the outer side wall of the first vertical support plate or the second vertical support plate, the pressing member includes a fixed block and a pressing block arranged in parallel, and a connecting block connected between the fixed block and the pressing block; one end of the fixed block is fixedly connected to the piston rod of the pressing cylinder, and the other end is fixedly connected to the pressing block through the connecting block; a channel for the pressure-bearing part to pass through is formed between the fixed block and the pressing block; when the box door body slides to a position closing the accommodating chamber, the pressing cylinder is suitable for driving the pressing block to press or release the pressure-bearing part; There are two pressure-bearing parts, which are symmetrically arranged on the outside of the first slider connecting part and the second slider connecting part; there are two clamping mechanisms, which are symmetrically installed on the first vertical support plate and the second vertical support plate.

2. The vacuum box according to claim 1, characterized in that The first rear sliding block and / or the second rear sliding block are further provided with a counterweight.

3. The vacuum box according to claim 1, characterized in that The first slider connecting assembly includes a first guide post and a first spring; one end of the first guide post is fixedly mounted on the first front slider, and the other end thereof extends outward through the first slider connecting portion, and a first limit plate is provided at the extended end of the first guide post; the first spring is sleeved on the first guide post between the first front slider and the first slider connecting portion; The second slider connecting assembly includes a second guide post and a second spring; one end of the second guide post is fixedly mounted on the second front slider, and the other end thereof extends outward through the second slider connecting portion, and a second limit plate is provided at the protruding end of the second guide post; the second spring is sleeved on the second guide post between the second front slider and the second slider connecting portion.

4. The vacuum box according to claim 1, characterized in that The support frame is provided with a plurality of buffer members, and an abutment member is provided on the first front slider and the second front slider at a position corresponding to each buffer member; the buffer member is used to provide damping for the abutment member along the up and down sliding direction.

5. Helium mass spectrometer leak-tightness test equipment, characterized in that: The vacuum box comprises the vacuum box according to any one of claims 1 to 4.

6. The helium mass spectrometer leak-tightness testing equipment according to claim 5, characterized in that: There are two vacuum boxes, which are respectively referred to as a first vacuum box and a second vacuum box; and the vacuum box also includes a helium source, a helium mass spectrometer leak detector, a first vacuum pump, a second vacuum pump, a third vacuum pump, and a helium recovery device; The helium source is connected to the gas inlet of the first vacuum box through a first helium delivery pipe, and the helium source is also connected to the gas inlet of the second vacuum box through a second helium delivery pipe; The air extraction port of the first vacuum box is connected to the first vacuum pump through a first air extraction pipe, and the air extraction port of the second vacuum box is connected to the first vacuum pump through a second air extraction pipe; The inspection vent of the first vacuum box is connected to the air inlet of the helium mass spectrometer leak detector through a first inspection vent pipe, and the inspection vent of the second vacuum box is connected to the air inlet of the helium mass spectrometer leak detector through a second inspection vent pipe; the exhaust port of the helium mass spectrometer leak detector is connected to the second vacuum pump through a suction pipe; The helium recovery port of the first vacuum box is connected to the air inlet of the third vacuum pump through a first helium recovery pipe, the helium recovery port of the second vacuum box is connected to the air inlet of the third vacuum pump through a second helium recovery pipe, and the air outlet of the third vacuum pump is connected to the helium recovery device through a pipeline; The first vacuum box and the second vacuum box are respectively provided with a first atmospheric pipe and a second atmospheric pipe connected to the atmosphere; The first helium delivery pipe, the second helium delivery pipe, the first exhaust pipe, the second exhaust pipe, the first inspection vent pipe, the second inspection vent pipe, the suction pipe, the first helium recovery pipe, the second helium recovery pipe, the first atmospheric pipe, and the second atmospheric pipe are all provided with electric control valves.

7. The helium mass spectrometer leak-tightness testing equipment according to claim 6, characterized in that: The device further includes a nitrogen purge system, which includes a nitrogen source, a first nitrogen delivery pipe, and a second nitrogen delivery pipe. The nitrogen source is connected to the nitrogen input port of the first vacuum box through the first nitrogen delivery pipe, and the nitrogen source is also connected to the nitrogen input port of the second vacuum box through the second nitrogen delivery pipe. The first nitrogen delivery pipe and the second nitrogen delivery pipe are both provided with electric control valves.

8. The helium mass spectrometer leak-tightness testing equipment according to claim 6, characterized in that: The device also includes a self-test system, which includes a helium standard leak hole, a first self-test air pipe, and a second self-test air pipe; the helium standard leak hole is connected to the first vacuum box via the first self-test air pipe, and the helium standard leak hole is also connected to the second vacuum box via the second self-test air pipe; the first self-test air pipe and the second self-test air pipe are both provided with electric control valves.

9. The helium mass spectrometer leak-tightness testing equipment according to claim 7, characterized in that: The cabinet further includes a workbench for placing two vacuum boxes in the middle of the cabinet, and a first accommodation space for placing a first vacuum pump, a second vacuum pump, and a third vacuum pump is provided on the cabinet below the workbench; a placement platform for placing a helium mass spectrometer leak detector is provided on the middle of the back side of the workbench on the cabinet, so that the helium mass spectrometer leak detector is located between the vacuum box and the first vacuum pump in the height direction of the cabinet.

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