Powder preparation apparatus

Abstract

The present invention relates to a powder preparation device. The powder preparation device comprises a housing, a fixture, a nozzle, an airflow pulse component, a heat source, a circulation pump, a fixture drive mechanism and a multi-axis drive mechanism. The fixture is connected to the housing for clamping a substrate, and the fixture drive mechanism is connected to the fixture for driving the fixture to rotate to realize the substrate rotation. The multi-axis drive mechanism is connected to the heat source for driving the heat source to move in multiple different directions, and the heat source can move close to the substrate and form a melting zone on the surface of the substrate. The airflow pulse component is connected to the housing for forming a pulse airflow and blowing the pulse airflow to the melting zone, and the circulation pump is connected to the airflow pulse component for transporting gas to the airflow pulse component. The nozzle is connected to the housing for introducing an airflow into the melting zone and blowing out the molten material. When the preparation device of the present invention is used to prepare powder, the sphericity of the powder can be effectively improved, the particle size of the powder can be effectively controlled, and the powder making efficiency can be improved.

Description

Technical Field

[0001] The invention relates to the field of powder material preparation, in particular to a powder preparation device. Background Art

[0002] With the continuous development of industrial technology, the preparation of corresponding products using powder as raw material has become a hot topic of research. In this process, powder is one of the most basic raw materials, so the preparation of powder has become an important factor restricting product manufacturing. Although there are many powder preparation methods, such as chemical vapor deposition, evaporation condensation, thermal decomposition and direct reaction. However, when these traditional methods are used to prepare powder, the preparation device structure is complex and the sphericity of the obtained powder is low. Summary of the invention

[0003] Based on this, it is necessary to provide a powder preparation device, which has a simple and reasonable structure, can effectively improve the sphericity of the powder, and the processing method is simple and easy.

[0004] In order to solve the above technical problems, the technical solution of the present invention is:

[0005] A powder preparation device comprises a box, a fixture, a nozzle, an air flow pulse component, a heat source, a circulation pump, a fixture drive mechanism and a multi-axis drive mechanism;

[0006] The clamp is connected to the box body for clamping the substrate, and the clamp driving mechanism is connected to the clamp for driving the clamp to rotate to realize the substrate rotation;

[0007] The multi-axis driving mechanism is connected to the heat source to drive the heat source to move in multiple different directions, and the heat source can move close to the substrate and form a molten zone on the surface of the substrate;

[0008] The airflow pulse component is connected to the box body to form a pulse airflow and blow the pulse airflow to the melting zone, and the circulation pump is connected to the airflow pulse component to transport gas to the airflow pulse component;

[0009] The nozzle is connected to the box to introduce a gas flow into the melting zone and blow out the molten material.

[0010] In one embodiment, the air outlet direction of the nozzle is perpendicular to the air outlet direction of the air flow pulse member.

[0011] In one embodiment, the heat source is a plasma heat source, an electron beam heat source or a laser heat source.

[0012] In one embodiment, one end of the circulation pump is connected to the nozzle, and the other end passes through and communicates with the box.

[0013] In one of the embodiments, the powder preparation device further comprises a filter element, wherein the filter element is disposed inside the housing and is located at a position where the circulation pump is in communication with the housing.

[0014] In one of the embodiments, the powder preparation device further comprises a pressure relief valve, which is arranged outside the housing and located at a position where the circulation pump is connected to the housing to relieve pressure on the housing.

[0015] In one of the embodiments, the powder preparation device further comprises a condensing element, which is disposed inside the box body and is used to condense the molten material.

[0016] In one embodiment, the powder preparation device further comprises a heat exchanger connected to the condensing element to reduce the temperature of the condensing element.

[0017] In one embodiment, the powder preparation device further comprises a protective gas providing device, and the protective gas providing device is connected to the box body to provide protective gas for the box body.

[0018] In one embodiment, the powder preparation device further includes a reversing valve, which is connected to the outside of the box body for adjusting the direction of the airflow, and the airflow pulse component, the circulation pump, and the protective gas providing device are respectively connected to the reversing valve.

[0019] The powder preparation device of the present invention comprises a box, a fixture, a nozzle, an airflow pulse part, a heat source, a circulation pump, a fixture driving mechanism and a multi-axis driving mechanism. The fixture is connected to the box for clamping the substrate, and the fixture driving mechanism is connected to the fixture for driving the fixture to rotate to realize the substrate rotation. The multi-axis driving mechanism is connected to the heat source for driving the heat source to move in multiple different directions, and the heat source can move close to the substrate and form a melting zone on the surface of the substrate. The airflow pulse part is connected to the box for forming a pulse airflow and blowing the pulse airflow to the melting zone, and the circulation pump is connected to the airflow pulse part for transferring the gas to the airflow pulse part. The nozzle is connected to the box for introducing airflow in the melting zone and blowing out the molten material. When the preparation device of the present invention is used to prepare powder, the substrate is installed on the fixture, the fixture is driven to rotate by the fixture driving mechanism to realize the substrate rotation, the position of the heat source is adjusted by the multi-axis driving mechanism, so that the heat source acts on the substrate and forms a melting zone on the surface of the substrate, the airflow pulse part forms a pulse airflow and blows the pulse airflow to the melting zone, and the nozzle introduces airflow in the melting zone to blow out the molten material. Under the action of the pulsed airflow and the airflow introduced by the nozzle, the molten material in the melting zone is dispersed to form droplets and blown out. After being blown out, the droplets condense to form powder. At the same time, under the action of the clamp, the substrate is in a state of self-rotation, so that the droplets can be thrown out by centrifugal action, the dispersion degree of the droplets can be improved, the mutual influence between the droplets can be reduced, and the sphericity of the powder can be improved. In this process, the particle size of the powder can be effectively controlled by controlling the clamp rotation speed, the power of the heat source, the frequency of the airflow pulse component, and the flow rate of the fluid medium. In addition, when using the powder preparation device of the present invention, the relative movement of the heat source and the substrate can be achieved by adjusting the position of the heat source, so that the processing range of the heat source for the substrate to be processed can be guaranteed, and the powder making efficiency can be improved.

[0020] Furthermore, the processing process using the powder preparation device of the present invention is environmentally friendly and does not generate harmful substances such as waste gas, waste liquid, solid waste, etc., which is conducive to promoting the green development of powder processing. In addition, when using the powder preparation device of the present invention to process powder, the required powder can be obtained by the coordination of the clamp, heat source, air flow pulse part and nozzle, without relying on strict reaction conditions, and the operation method is simple, which is suitable for industrial production.

[0021] Furthermore, in the powder preparation device of the present invention, a circulating flow field can be formed inside the box by setting a circulating pump, so as to realize the recycling of gas, effectively avoid the emission of gas, reduce the gas consumption, and help reduce the preparation cost of powder. In addition, due to the recycling of gas, other impurities will not be introduced in the process of processing powder, which can effectively improve the purity of powder. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1It is a schematic diagram of the structure of a powder preparation device in one embodiment of the present invention;

[0023] Figure 2 for Figure 1 A partial enlarged view of the middle A;

[0024] Figure 3 for Figure 1 A schematic diagram of the corresponding powder preparation device from another angle;

[0025] Figure 4 for Figure 1 A schematic diagram of the corresponding powder preparation device from another angle;

[0026] Description of the markings in the figure:

[0027] 100. Powder preparation device; 101. Box body; 102. Clamp; 103. Nozzle; 104. Airflow pulse component; 105. Heat source; 106. Circulation pump; 107. Clamp drive mechanism; 108. Multi-axis drive mechanism; 109. Filter element; 110. Pressure relief valve; 111. Condensation element; 112. Heat exchanger; 113. Protective gas supply device; 114. Reversing valve; 115. Partition; 116. Box door; 1161. Transparent window; 117. Controller; 200. Base material; 300. Powder. DETAILED DESCRIPTION

[0028] For ease of understanding of the present invention, the present invention will be described more fully below with reference to relevant embodiments. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the present invention more thorough and comprehensive.

[0029] In the description of the present invention, it should be understood that the terms "center", "upper", "lower", "bottom", "inside" and "outside" used in the present invention to indicate orientation or positional relationship are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention.

[0030] It should be understood that the terms "first", "second", etc. are used in the present invention to describe various information, but such information should not be limited to these terms, and these terms are only used to distinguish the same type of information from each other. For example, without departing from the scope of the present invention, "first" information may also be referred to as "second" information, and similarly, "second" information may also be referred to as "first" information. When two elements are an integrally formed structure, the two elements may also be considered to be in a "connected" relationship.

[0031] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element at the same time.

[0032] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those generally understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0033] See also Figure 1 to Figure 4 One embodiment of the present invention provides a powder preparation device 100, which includes a housing 101, a fixture 102, a nozzle 103, an airflow pulse member 104, a heat source 105, a circulation pump 106, a fixture driving mechanism 107, and a multi-axis driving mechanism 108. The fixture 102 is connected to the housing 101 to clamp the substrate 200, and the fixture driving mechanism 107 is connected to the fixture 102 to drive the fixture 102 to rotate so as to realize the rotation of the substrate 200. The multi-axis driving mechanism 108 is connected to the heat source 105 to drive the heat source 105 to move in multiple different directions, and the heat source 105 can move close to the substrate 200 and form a melting zone on the surface of the substrate 200. The airflow pulse member 104 is connected to the housing 101 to form a pulse airflow and blow the pulse airflow to the melting zone, and the circulation pump 106 is connected to the airflow pulse member 104 to transport the gas to the airflow pulse member 104. The nozzle 103 is connected to the box 101 to introduce air flow into the melting zone and blow out the molten material.

[0034] When the preparation device in this embodiment is used to prepare the powder 300, the substrate 200 is mounted on the fixture 102, and the fixture driving mechanism 107 drives the fixture 102 to rotate to realize the rotation of the substrate 200. The position of the heat source 105 is adjusted by the multi-axis driving mechanism 108, so that the heat source 105 acts on the substrate 200 and forms a melting zone on the surface of the substrate 200. The airflow pulse member 104 forms a pulsed airflow and blows the pulsed airflow to the melting zone. At the same time, the nozzle 103 introduces an airflow in the melting zone to blow out the molten material. Under the action of the pulsed airflow and the airflow introduced by the nozzle 103, the molten material in the melting zone is dispersed to form droplets and blown out. After the droplets are blown out, they condense to form the powder 300. At the same time, under the action of the fixture 102, the substrate 200 is in a state of rotation, so that the droplets can be thrown out by centrifugal action, the dispersion degree of the droplets is improved, and the mutual influence between the droplets is reduced, which is conducive to improving the sphericity of the powder 300. In this process, by controlling the rotation speed of the fixture 102, the power of the heat source 105, the frequency of the airflow pulse member 104, and the flow rate of the fluid medium, the particle size of the powder 300 can be effectively controlled. In addition, when using the powder 300 preparation device of the present invention, the relative movement of the heat source 105 and the substrate 200 can be achieved by adjusting the position of the heat source 105, so that the processing stroke range of the heat source 105 on the substrate 200 to be processed can be ensured, thereby improving the powder production efficiency.

[0035] Further, when the powder 300 preparation device of the present invention is used to process the powder 300, the required powder 300 can be obtained by the cooperation of the fixture 102, the heat source 105, the airflow pulse member 104 and the nozzle 103, without relying on harsh reaction conditions, the operation method is simple, and it is suitable for industrial production. In addition, through the setting of the circulating pump 106, a circulating flow field can be formed inside the box 101, and the gas recycling is realized, which effectively avoids the emission of gas, reduces the gas consumption, and is conducive to reducing the preparation cost of the powder 300. In addition, due to the recycling of gas, other impurities will not be introduced in the process of processing the powder 300, which can effectively improve the purity of the powder 300.

[0036] In a preferred example, the number of nozzles 103 is multiple, and the multiple nozzles 103 are evenly distributed on the outer edge of the fixture 102 to blow out the molten material at different positions when the substrate 200 rotates. Further preferably, the multiple nozzles 103 are located on the same circumference. In this embodiment, the number of nozzles 103 is 4, and the 4 nozzles 103 are located on the same circumference. During the rotation of the substrate 200, the molten material at different positions on the substrate 200 can be blown out in time through the 4 nozzles 103 to avoid the molten material condensing and solidifying on the substrate and affecting the preparation of the powder. It is understandable that the number of nozzles 103 can be but is not limited to 1, 2, 3, 4 or 5, etc.

[0037] It is understood that the substrate 200 is a rotating body structure or a non-rotating body structure. Preferably, it is a rotating body structure, in which case the rotation of the substrate 200 is more stable, which is convenient for the heat source 105 and the gas to stabilize and make it easier for the molten material to be blown out. Preferably, the substrate 200 is a cylindrical rotating body structure.

[0038] It can also be understood that in this embodiment, the gas flows in the gas pipeline, that is, the gas is transported through the gas pipeline. The gas pipeline can be a conventional gas pipeline.

[0039] Preferably, the preparation device in this embodiment is suitable for processing non-conductor powder. When the substrate 200 is a non-conductor substrate, non-conductor powder can be processed. For example, when the substrate 200 is an insulator substrate, insulator powder can be processed; when the substrate 200 is a semiconductor substrate, semiconductor powder can be processed. Further preferably, the material of the substrate 200 is at least one of an aluminum oxide substrate, a silicon oxide substrate, a zirconium oxide substrate, a magnesium oxide substrate, an aluminum nitride substrate, a silicon nitride substrate, a zirconium nitride substrate, a magnesium nitride substrate, an aluminum carbide substrate, a silicon carbide substrate, a zirconium carbide substrate, a magnesium carbide substrate and a silicon substrate.

[0040] Specifically, another embodiment of the present invention provides a non-conductor powder preparation device 100, which includes a housing 101, a fixture 102, a nozzle 103, an airflow pulse member 104, a heat source 105, a circulation pump 106, a fixture drive mechanism 107, and a multi-axis drive mechanism 108. The fixture 102 is connected to the housing 101 to clamp the substrate 200, and the fixture drive mechanism 107 is connected to the fixture 102 to drive the fixture 102 to rotate so as to realize the rotation of the substrate 200. The multi-axis drive mechanism 108 is connected to the heat source 105 to drive the heat source 105 to move in multiple different directions, and the heat source 105 can move close to the substrate 200 and form a melting zone on the surface of the substrate 200. The airflow pulse member 104 is connected to the housing 101 to form a pulsed airflow and blow the pulsed airflow to the melting zone, and the circulation pump 106 is connected to the airflow pulse member 104 to transport the gas to the airflow pulse member 104. The nozzle 103 is connected to the box 101 to introduce air flow into the melting zone and blow out the molten material.

[0041] As a preferred solution, when the airflow pulse element 104 is selected, an airflow pulse element that generates a pulse waveform of a sinusoidal waveform is selected.

[0042] It can be understood that the multi-axis drive mechanism 108 is connected to the heat source 105 to drive the heat source 105 to move in multiple different directions. Specifically, the multi-axis drive mechanism 108 is connected to the heat source 105 to drive the heat source 105 to move on the X-axis, Y-axis and Z-axis.

[0043] In a specific example, the gas outlet direction of the nozzle 103 is perpendicular to the gas outlet direction of the airflow pulse member 104. By setting the gas outlet direction of the nozzle 103 and the gas outlet direction of the airflow pulse member 104 to be perpendicular, the gas ejected from the nozzle 103 and the pulsed airflow formed by the airflow pulse member 104 can better interact with each other. Further, the gas outlet direction of the nozzle 103 is parallel to the rotation axis of the substrate 200, and the gas outlet direction of the airflow pulse member 104 is perpendicular to the rotation axis of the substrate 200, so that the pulsed airflow can act more fully on the melting zone of the substrate 200, forming a more uniform molten material, which is conducive to improving the uniformity of the powder 300.

[0044] In a specific example, the heat source 105 is a plasma heat source, an electron beam heat source or a laser heat source. During the processing, different heat sources 105 can be configured for the preparation device according to different customer needs, material properties and particle size requirements of the powder 300 to improve heating efficiency.

[0045] It is understandable that one end of the circulation pump 106 is connected to the nozzle 103, and the other end is connected to the box 101. In this way, the gas in the box 101 can be circulated to the nozzle 103 through the circulation pump 106 for recycling. This process does not generate harmful substances such as waste gas, waste liquid, solid waste, etc., which is conducive to promoting the green development of powder preparation.

[0046] Preferably, the powder preparation device 100 further includes a filter 109, which is disposed inside the housing 101 and located at a position where the circulation pump 106 is connected to the housing 101. The setting of the filter 109 can effectively separate the powder 300 from the gas, effectively preventing the powder 300 from circulating in the pipeline and causing adverse effects on the circulation pipeline. In this embodiment, the number of filters 109 is 2, and the two filters 109 are respectively located at the air inlet and air outlet positions of the circulating airflow in the housing 101 to prevent the powder 300 from circulating in the pipeline.

[0047] In a preferred embodiment, the powder preparation device 100 further includes a pressure relief valve 110, which is disposed outside the housing 101 and located at a position where the circulation pump 106 is connected to the housing 101 to relieve pressure on the housing 101. During the preparation of the powder 300, a relatively high pressure environment may be formed inside the housing 101. By relieving pressure on the housing 101 through the pressure relief valve 110, when the pressure inside the housing 101 is too high, the pressure inside the housing 101 can be reduced in time, so that the preparation of the powder 300 can proceed smoothly, and the stability of the housing 101 can be improved to avoid adverse effects of high pressure on the device.

[0048] In another preferred embodiment, the powder preparation device 100 further includes a condensation member 111, which is disposed inside the housing 101 for condensing the molten material. When the molten material is blown out by the gas, the temperature of the molten material is relatively high. At this time, the cooling efficiency of the molten material can be improved by the provision of the condensation member 111, and the powdering efficiency of the powder 300 can be improved. It is understandable that when the powder 300 is attached to the condensation member 111, the powder 300 can be scraped off. In addition, a storage plate or a storage cloth can be attached to the condensation member 111. When the powder 300 is attached to the storage plate or the storage cloth, the powder 300 can be taken out by removing the storage plate or the storage cloth.

[0049] Furthermore, the powder preparation device 100 also includes a heat exchanger 112, which is connected to the condensation element 111 to reduce the temperature of the condensation element 111. The setting of the heat exchanger 112 can reduce the temperature of the condensation element 111 and improve the condensation efficiency. At the same time, the setting of the heat exchanger 112 can also adjust the temperature in the box 101, so that the temperature in the box 101 is kept suitable for preparing powder, which makes it easy to adjust the temperature in the box 101, which can further improve the preparation efficiency of the powder 300 and improve the quality of the powder 300.

[0050] It is understandable that the powder preparation device 100 further includes a protective gas providing device 113, which is connected to the box 101 to provide protective gas for the box 101. The protective gas providing device 113 provides protective gas for the box 101, so that the powder 300 is prepared under a protective gas atmosphere, which prevents external impurities from entering the box 101, and is conducive to improving the purity of the powder 300.

[0051] Preferably, the protective gas providing device 113 is located outside the box 101, and the protective gas providing device 113 is connected to the box 101 to provide protective gas to the inside of the box 101. The protective gas providing device 113 provides protective gas to the inside of the box 101 to form a protective gas atmosphere in the box 101, which can further improve the purity of the powder 300 and avoid oxidation, corrosion and other problems of the powder 300 during the preparation process. The protective gas provided by the protective gas providing device 113 can be an inert gas such as nitrogen and a rare gas.

[0052] Furthermore, the powder preparation device 100 further includes a reversing valve 114, which is connected to the outside of the box 101 to adjust the direction of the airflow, and the airflow pulse member 104, the circulation pump 106, and the protective gas providing device 113 are respectively connected to the reversing valve 114. In this way, the flow direction of the gas can be easily controlled, and the preparation efficiency of the powder 300 can be improved.

[0053] In a specific example, the powder preparation device 100 further includes a partition 115, the partition 115 protrudes from the bottom of the box 101 and / or the partition 115 protrudes from the top of the box 101 to separate powders 300 of different particle sizes. It can be understood that the powder 300 has a certain particle size range. Under the action of the airflow field, the powder 300 with a larger particle size has a shorter flight time, and the powder 300 with a smaller particle size has a longer flight time. The setting of the partition 115 can preliminarily screen the powder 300, reducing the workload of subsequent screening. In this embodiment, the number of partitions 115 is 2, and the two partitions 115 are respectively located at the top and bottom of the box 101 for preliminarily screening the powder 300.

[0054] Please refer again Figure 4 It can be understood that the powder preparation device 100 further includes a box door 116, which cooperates with the box body 101 to form a sealed processing space, in which the substrate 200 is processed to obtain the corresponding powder 300. Further, a transparent window 1161 is provided on the box door 116 for observing the preparation status inside the box body 101. Furthermore, the powder preparation device 100 further includes a controller 117, which is used to control the rotation speed of the fixture 102, the power of the heat source 105, the frequency of the airflow pulse part 104, the parameters of the circulation pump 106, etc. to realize the intelligent processing of the powder 300.

[0055] Please refer again Figure 1 and Figure 2 When preparing powder 300, substrate 200 rotates under the drive of fixture 102, heat source 105 heats substrate 200 to form a melting zone, pulse airflow is formed by airflow pulse member 104, pulse airflow acts on the melting zone and blows out the molten material in cooperation with nozzle 103. In powder preparation, heat source 105 can move in three directions of X-axis, Y-axis and Z-axis, so as to ensure the processing range of heat source 105 on substrate 200 and improve powder preparation efficiency.

[0056] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0057] The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A powder preparation device, characterized in that: It includes a box, a fixture, a nozzle, an air flow pulse component, a heat source, a circulation pump, a fixture driving mechanism and a multi-axis driving mechanism; The clamp is connected to the box body for clamping the substrate, and the clamp driving mechanism is connected to the clamp for driving the clamp to rotate to realize the substrate rotation; The multi-axis driving mechanism is connected to the heat source to drive the heat source to move in multiple different directions, and the heat source can move close to the substrate and form a molten zone on the surface of the substrate; The airflow pulse component is connected to the box body to form a pulse airflow and blow the pulse airflow to the melting zone, and the circulation pump is connected to the airflow pulse component to transport gas to the airflow pulse component; The nozzle is connected to the box to introduce a gas flow into the melting zone and blow out the molten material.

2. The powder preparation device according to claim 1, characterized in that: The air outlet direction of the nozzle is perpendicular to the air outlet direction of the air flow pulse member.

3. The powder preparation device according to claim 1, characterized in that: The heat source is a plasma heat source, an electron beam heat source or a laser heat source.

4. The powder preparation device according to claim 1, characterized in that: One end of the circulation pump is connected to the nozzle, and the other end thereof penetrates and communicates with the box body.

5. The powder preparation device according to claim 4, characterized in that: It also includes a filter element, which is arranged inside the box and located at a position where the circulation pump is connected to the box.

6. The powder preparation device according to claim 4, characterized in that: It also includes a pressure relief valve, which is arranged outside the box and located at a position where the circulation pump is connected to the box to relieve pressure on the box.

7. The powder preparation device according to claim 1, characterized in that: It also includes a condensing member, which is arranged inside the box body and is used for condensing the molten material.

8. The powder preparation device according to claim 7, characterized in that: A heat exchanger is also included, and the heat exchanger is connected to the condensing element to reduce the temperature of the condensing element.

9. The powder preparation device according to claim 1, characterized in that: It also includes a protective gas supply device, which is connected to the box body to provide protective gas for the box body.

10. The powder preparation device according to claim 9, characterized in that: It also includes a reversing valve, which is connected to the outside of the box body to adjust the direction of the airflow, and the airflow pulse component, the circulation pump, and the protective gas providing device are respectively connected to the reversing valve.

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