Optical path adjustment method, detection device and storage medium

Abstract

The optical path adjustment method of the embodiment of the present application is used for a detection device, the detection device includes a pump optical path and a detection optical path, the pump beam is transmitted to the workpiece along the pump optical path, and the detection beam is transmitted to the workpiece along the detection optical path, and the optical path adjustment method includes: setting the reflection surface of the detection reflector at the position of the workpiece, and making the detection reflector perpendicular to the incident surface where the detection beam and the pump beam are located; and adjusting the propagation direction of the pump beam, and / or adjusting the propagation direction of the detection beam, so that the pump beam in the pump optical path coincides with the detection beam after being reflected by the detection reflector, and the detection beam in the detection optical path coincides with the pump beam after being reflected by the detection reflector. The optical path adjustment method and the detection device can realize the cooperation between the detection beam and the pump beam, so as to be incident on the same position of the workpiece to detect the workpiece, thereby improving the detection accuracy.

Description

Technical Field

[0001] The present application relates to the field of detection technology, and more specifically, to an optical path adjustment method, a detection device, and a non-volatile computer-readable storage medium. Background Art

[0002] The pump light needs to be irradiated onto the workpiece surface to stimulate the workpiece to generate heat and vibrate, and further form an acoustic pulse. At the same time, the detection light needs to be irradiated onto the workpiece surface to detect the sample. If the pump light and the detection light converge at different positions on the workpiece surface, the pump light will not be able to cooperate with the detection light for detection, thus affecting the detection effect. Summary of the invention

[0003] Embodiments of the present application provide an optical path adjustment method, a detection device, and a non-volatile computer-readable storage medium.

[0004] The optical path adjustment method of the embodiment of the present application is used for a detection device, which includes a pump optical path and a detection optical path, the pump optical path is transmitted to the workpiece along the pump optical path, and the detection optical path is transmitted to the workpiece along the detection optical path, and the optical path adjustment method includes: setting a reflection surface of a detection reflector at a position where the workpiece is located, and making the detection reflector perpendicular to an incident surface where the detection beam and the pump beam are located; and adjusting a propagation direction of the pump beam, and / or adjusting a propagation direction of the detection beam, so that the pump beam in the pump optical path coincides with the detection beam after being reflected by the detection reflector, and the detection beam in the detection optical path coincides with the pump beam after being reflected by the detection reflector.

[0005] The detection device of the embodiment of the present application includes a detection optical path, a pump optical path and one or more processors. The detection optical path is a detection optical path along which a detection beam is transmitted to a workpiece; the pump optical path is a pump optical path along which a pump optical path is transmitted to the workpiece; and one or more processors are used to: set a detection reflector at the position of the workpiece, and make the detection reflector perpendicular to the incident surface where the detection beam and the pump optical path are located; and adjust the propagation direction of the pump optical path, and / or adjust the propagation direction of the detection beam, so that the pump optical path in the pump optical path coincides with the detection optical path after being reflected by the detection reflector, and the detection optical path in the detection optical path coincides with the pump optical path after being reflected by the detection reflector.

[0006] A non-volatile computer-readable storage medium containing a computer program in an embodiment of the present application, when the computer program is executed by one or more processors, enables the processor to execute the optical path adjustment method. The optical path adjustment method is used for a detection device, the detection device includes a pump optical path and a detection optical path, the pump light beam is transmitted to the workpiece along the pump optical path, and the detection light beam is transmitted to the workpiece along the detection optical path, and the optical path adjustment method includes: setting the reflection surface of the detection reflector at the position where the workpiece is located, and making the detection reflector perpendicular to the incident surface where the detection light beam and the pump light beam are located; and adjusting the propagation direction of the pump light beam, and / or adjusting the propagation direction of the detection light beam, so that the pump light beam in the pump optical path coincides with the detection light beam after being reflected by the detection reflector, and the detection light beam in the detection optical path coincides with the pump light beam after being reflected by the detection reflector.

[0007] In the detection device of the embodiment of the present application, by setting a detection reflector perpendicular to the detection beam and the pump beam, and by adjusting the propagation directions of the detection beam and the pump beam, the pump beam in the pump light path is made to coincide with the detection beam after being reflected by the detection reflector, and the detection beam in the detection light path is made to coincide with the pump beam after being reflected by the detection reflector, thereby achieving the cooperation between the detection beam and the pump beam, so that they are incident on the same position of the workpiece to detect the workpiece, thereby improving the detection accuracy.

[0008] Additional aspects and advantages of the embodiments of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the embodiments of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0010] Figure 1 is a flow chart of a light path adjustment method in certain embodiments of the present application;

[0011] Figure 2 is a schematic diagram of the structure of a detection device according to some embodiments of the present application;

[0012] Figure 3 is a schematic diagram of the structure of a detection device according to some embodiments of the present application;

[0013] Figure 4 is a flow chart of a light path adjustment method in certain embodiments of the present application;

[0014] Figure 5 is a schematic diagram of the structure of a detection device according to some embodiments of the present application;

[0015] Figure 6 is a flow chart of a light path adjustment method in certain embodiments of the present application;

[0016] Figure 7 is a flow chart of a light path adjustment method in certain embodiments of the present application;

[0017] Figure 8 is a flow chart of a light path adjustment method in certain embodiments of the present application;

[0018] Fig. 9 is a flow chart of a light path adjustment method in certain embodiments of the present application;

[0019] Fig.10 It is a schematic diagram of the principle of the optical path adjustment method of certain embodiments of the present application;

[0020] Fig.11 is a flow chart of a light path adjustment method in certain embodiments of the present application;

[0021] Fig.12 is a flow chart of a light path adjustment method in certain embodiments of the present application;

[0022] Fig.13 is a schematic diagram of the structure of a detection device of certain embodiments of the present application; and

[0023] Fig.14 It is a connection diagram of a processor and a computer-readable storage medium in certain embodiments of the present application. DETAILED DESCRIPTION

[0024] The following is a further description of the embodiments of the present application in conjunction with the accompanying drawings. The same or similar reference numerals in the accompanying drawings represent the same or similar elements or elements with the same or similar functions from beginning to end. In addition, the embodiments of the present application described below in conjunction with the accompanying drawings are exemplary and are only used to explain the embodiments of the present application, and cannot be understood as limiting the present application.

[0025] See also Figures 1 to 3 The optical path adjustment method of the embodiment of the present application is applied to a detection device 100, the detection device 100 includes a pump optical path 101 and a detection optical path 102, the pump light beam is transmitted to the workpiece 200 along the pump optical path 101, and the detection light beam is transmitted to the workpiece 200 along the detection optical path 102. The optical path adjustment method includes the following steps:

[0026] 011: Setting the reflection surface 111 of the detection reflection mirror 11 at the position where the workpiece 200 is located, and making the detection reflection mirror 11 perpendicular to the incident surface where the detection beam and the pump beam are located; and

[0027] 012: Adjust the propagation direction of the pump beam and / or adjust the propagation direction of the detection beam so that the pump beam in the pump optical path 101 coincides with the detection beam reflected by the detection reflector 11, and the detection beam in the detection optical path 102 coincides with the pump beam reflected by the detection reflector 11.

[0028] The detection device 100 of the embodiment of the present application includes a detection optical path 102, a pump optical path 101 and a processor 30. The detection beam is transmitted to the workpiece 200 along the detection optical path 102; the pump beam is transmitted to the workpiece 200 along the pump optical path 101; the processor 30 is used to set the detection reflector 11 at the position of the workpiece 200, and make the detection reflector 11 perpendicular to the incident surface where the detection beam and the pump beam are located; and adjust the propagation direction of the pump beam, and / or adjust the propagation direction of the detection beam, so that the pump beam in the pump optical path 101 coincides with the detection beam after being reflected by the detection reflector 11, and the detection beam in the detection optical path 102 coincides with the pump beam after being reflected by the detection reflector 11. That is to say, steps 011 and 012 can be executed by the processor 30.

[0029] The detection device includes a light source 21 , a beam splitter 22 , a motor 25 , a converging lens 12 , a first reflection component 13 and a second reflection component 14 .

[0030] The light source 21 is used to emit light, and the beam splitter 22 splits the light into a pump beam and a detection beam. The processor 30 can adjust the first reflective component 13 and the second reflective component 14 by controlling the motor 25 to adjust the propagation direction of the pump beam and the propagation direction of the detection beam. The first reflective component 13 is arranged in the pump optical path 101, and the first reflective component 13 is used to change the propagation direction of the pump beam. The pump beam is incident on the converging lens 12 after being reflected by the first reflective component 13. The second reflective component 14 is arranged in the detection optical path 102, and the second reflective component 14 is used to change the propagation direction of the detection beam. The detection beam is incident on the converging lens 12 after being reflected by the second reflective component 14; adjusting the propagation direction of the pump beam includes adjusting the angle and / or position of the first reflective component 13 so that the pump beam in the pump optical path coincides with the detection beam reflected by the detection reflector 11; adjusting the propagation direction of the detection beam includes adjusting the angle and / or position of the second reflective component 14 so that the detection beam in the detection optical path coincides with the pump beam reflected by the detection reflector 11.

[0031] When inspecting the workpiece 200, in order to ensure the accuracy of the inspection result, it is necessary to adjust the propagation direction of the pump beam and / or the detection beam so that the light spot generated by the pump beam and the detection beam converges at the same position on the surface of the workpiece 200 to detect the film thickness on the surface of the workpiece 200. Therefore, the inspection device 100 can be provided with a detection reflector 11 at the position where the workpiece 200 is located, and the reflection surface 111 of the detection reflector 11 is located at the position where the workpiece 200 is located. The processor 30 can control the motor 25 to adjust the propagation direction of the pump beam and / or the detection beam so that the incident plane where the pump beam and the detection beam are located is perpendicular to the reflection surface of the detection reflector 11, that is, the incident plane where the pump beam and the detection beam are located is parallel to the optical axis of the detection reflector 11. Among them, the pump beam and the detection beam are located at the incident plane and propagate in the incident plane.

[0032] In one embodiment, the processor 30 can adjust the propagation direction of the pump beam by controlling the motor 25, so that the pump beam in the pump optical path 101 coincides with the detection beam reflected by the detection reflector 11, and the detection beam in the detection optical path 102 coincides with the pump beam reflected by the detection reflector 11. At this time, it can be said that the incident angles of the pump beam and the detection beam are the same, and the light spots generated by the pump beam and the detection beam converge at the same position of the detection reflector 11. Since the reflective surface 111 of the detection reflector 11 is located at the position where the workpiece 200 is located, when the detection reflector 11 is replaced by the workpiece 200, the light spots generated by the pump beam and the detection beam will also converge at the same position on the surface of the workpiece 200, thereby ensuring the accuracy of the detection result of the detection device 100.

[0033] The first reflective assembly 13 includes two first reflective mirrors 131. When the propagation direction of the pump beam needs to be adjusted, the processor 30 can control the motor 25 to adjust the placement angle of one or two first reflective mirrors 131 in the first reflective assembly 13, thereby changing the propagation direction of the pump beam. The processor 30 can also control the motor 25 to simultaneously adjust the placement position of one or two first reflective mirrors 131 in the first reflective assembly 13, thereby changing the propagation direction of the pump beam. The processor 30 can also control the motor 25 to simultaneously adjust the placement angle and placement position of one or two first reflective mirrors 131 in the first reflective assembly 13, thereby changing the propagation direction of the pump beam.

[0034] For example, if there is a first reflector 131 in the first reflective assembly 13 that is perpendicular to the propagation direction of the pump beam, when the pump beam propagates to the first reflector 131, since the incident angle of the pump beam is 90 degrees, the pump beam is completely reflected by the first reflector 131. At this time, the processor 30 can control the motor 25 to adjust the angle between the first reflector 131 and the propagation direction of the pump beam to 45 degrees. Then, when the pump beam propagates to the first reflector 131, since the incident angle of the pump beam is 45 degrees, the angle between the pump beam and the first reflector 131 after being reflected by the first reflector 131 is 45 degrees, so that the angle between the propagation direction of the pump beam and the original propagation direction is 90 degrees, thereby adjusting the propagation direction of the pump beam.

[0035] For another example, if the two first reflectors 131 are placed left and right, the processor 30 can control the motor 25 to change the placement of one of the first reflectors 131 so that the reflection points of the two first reflectors 131 change, thereby changing the propagation direction of the pump beam.

[0036] For another example, if the two first reflectors 131 are placed side by side, the processor 30 can control the motor 25 to change the placement position of one of the first reflectors 131 so that the two first reflectors 131 are placed side by side, and the processor 30 can control the motor 25 to change the placement angle of the two first reflectors 131, thereby changing the propagation direction of the pump beam. In one embodiment, the angle and / or position of the first reflector 131 in the first reflective assembly 13 can be directly adjusted without using the motor 25, which can reduce costs.

[0037] In another embodiment, the processor 30 can also control the motor 25 to adjust the propagation direction of the detection light beam so that the pump light beam in the pump light path 101 coincides with the detection light beam emitted by the detection reflector 11, and the detection light beam in the detection light path 102 coincides with the pump light beam reflected by the detection reflector 11. This can also ensure that the light spots generated by the pump light beam and the detection light beam will converge at the same position on the surface of the workpiece 200, thereby ensuring the accuracy of the detection results of the detection equipment 100.

[0038] For example, if there is a second reflector 141 in the second reflective assembly 14 that is perpendicular to the propagation direction of the detection beam, when the detection beam propagates to the second reflector 141, since the incident angle of the detection beam is 90 degrees, the detection beam is completely reflected by the second reflector 141. At this time, the processor 30 can control the motor 25 to adjust the angle between the second reflector 141 and the propagation direction of the detection beam to 45 degrees. Then, when the detection beam propagates to the second reflector 141, since the incident angle of the detection beam is 45 degrees, the angle between the detection beam and the second reflector 141 after being reflected by the second reflector 141 is 45 degrees, so that the angle between the propagation direction of the detection beam and the original propagation direction is 90 degrees, thereby adjusting the propagation direction of the detection beam.

[0039] For another example, if the two second reflectors 141 are placed left and right, the processor 30 can control the motor 25 to change the placement of one of the second reflectors 141 so that the reflection points of the two second reflectors 141 change, thereby changing the propagation direction of the detection light beam.

[0040] For example, if the two second reflectors 141 are placed left and right, the processor 30 can control the motor 25 to change the placement position of one of the second reflectors 141 so that the two second reflectors 141 are placed up and down. The processor 30 can further change the placement angles of the two second reflectors 141 by controlling the motor 25, thereby changing the propagation direction of the detection light beam.

[0041] In another embodiment, the processor 30 can also control the motor 25 to simultaneously adjust the propagation directions of the pump beam and the detection beam, so that the pump beam in the pump light path 101 coincides with the detection beam emitted by the detection reflector 11, and the detection beam in the detection light path 102 coincides with the pump beam reflected by the detection reflector 11, thereby ensuring that the light spots generated by the pump beam and the detection beam will also converge at the same position on the surface of the workpiece 200, so as to ensure the accuracy of the detection results of the detection equipment 100.

[0042] In the optical path adjustment method and detection device 100 of the embodiment of the present application, by setting a detection reflector 11 perpendicular to the detection beam and the pump beam, and adjusting the propagation directions of the detection beam and the pump beam, the pump beam in the pump optical path 101 is made to coincide with the detection beam after being reflected by the detection reflector 11, and the detection beam in the detection optical path 102 is made to coincide with the pump beam after being reflected by the detection reflector 11, thereby achieving mutual coordination between the detection beam and the pump beam, so that the detection beam and the pump beam are incident on the same position of the workpiece 200, thereby detecting the film thickness on the surface of the workpiece 200, thereby improving the detection accuracy.

[0043] See also Figure 4 and Figure 5 In some embodiments, step 012 further includes:

[0044] 0121: a double-aperture first aperture 15 and a double-aperture second aperture 16 are arranged in the optical path between the first reflecting assembly 13, the second reflecting assembly 14 and the converging lens 12, the center of the first aperture 151 of the first aperture 15 and the center of the first aperture 161 of the second aperture 16 form a first connecting line, the center of the second aperture 152 of the first aperture 15 and the center of the second aperture 162 of the second aperture 16 form a second connecting line, and the first connecting line is parallel to the second connecting line;

[0045] 0122: Adjust the angle and / or position of the first reflecting component 13 so that the pumping beam passes through the first hole 151 of the first aperture 15 and the first hole 161 of the second aperture 16; and / or adjust the angle and / or position of the second reflecting component 14 so that the detection beam passes through the second hole 152 of the first aperture 15 and the second hole 162 of the second aperture 16.

[0046] In some embodiments, the processor 30 is further used to set the double-aperture first aperture 15 and the double-aperture second aperture 16 in the optical path between the first reflective component 13, the second reflective component 14 and the converging lens 12, the center of the first aperture 151 of the first aperture 15 and the center of the first aperture 161 of the second aperture 16 form a first connecting line, the center of the second aperture 152 of the first aperture 15 and the center of the second aperture 162 of the second aperture 16 form a second connecting line, and the first connecting line is parallel to the second connecting line; adjust the angle and / or position of the first reflective component 13 so that the pumping light beam passes through the first aperture 151 of the first aperture 15 and the first aperture 161 of the second aperture 16; and / or adjust the angle and / or position of the second reflective component 14 so that the detection light passes through the second aperture 152 of the first aperture 15 and the second aperture 162 of the second aperture 16. That is, step 0121 and step 0122 can be executed by the processor 30.

[0047] Specifically, the double hole spacing of the first aperture 15 is the same as the double hole spacing of the second aperture 16. To ensure that the pump beam in the pump optical path 101 coincides with the detection beam reflected by the detection reflector 11, and that the detection beam in the detection optical path 102 coincides with the pump beam reflected by the detection reflector 11, it is necessary to ensure that the detection beam is parallel to the pump beam before the pump optical path 101 and the detection optical path 102 are incident on the converging lens 12.

[0048] In one embodiment, if the detection beam has passed through the second hole 152 of the first aperture 15 and the second hole 162 of the second aperture 16, the processor 30 may control the motor 25 to adjust the angle and / or position of the first reflective assembly 13 so that the pump beam passes through the first hole 151 of the first aperture 15 and the first hole 161 of the second aperture 16. Since the center of the first hole 151 of the first aperture 15 and the center of the first hole 161 of the second aperture 16 form a first connecting line, the center of the second hole 152 of the first aperture 15 and the center of the second hole 162 of the second aperture 16 form a second connecting line, and the first connecting line and the second connecting line are parallel, the pump beam and the detection beam are parallel before entering the converging lens 12. When the pump beam and the detection beam are incident on the converging lens 12, the converging lens 12 will converge the pump beam and the detection beam to the same position, that is, the converging lens 12 converges the pump beam and the detection beam to the same position of the reflection surface 111 of the detection reflector 11, and the incident angles of the pump beam and the detection beam on the detection reflector 11 are the same, so that the pump beam in the pump optical path 101 coincides with the detection beam after being reflected by the detection reflector 11, and the detection beam in the detection optical path 102 coincides with the pump beam after being reflected by the detection reflector 11. Since the reflection surface 111 of the detection reflector 11 is located at the position of the workpiece 200, when the detection reflector 11 is replaced by the workpiece 200, the light spots generated by the pump beam and the detection beam will also converge at the same position on the surface of the workpiece 200, thereby ensuring the accuracy of the detection result of the detection device 100.

[0049] In another embodiment, if the pump beam has passed through the first hole 151 of the first aperture 15 and the first hole 161 of the second aperture 16, the processor 30 can control the motor 25 to adjust the angle and / or position of the second reflection component 14 so that the detection beam passes through the second hole 152 of the first aperture 15 and the second hole 162 of the second aperture 16, so that the pump beam and the detection beam are parallel before entering the converging lens 12, and the converging lens 12 will converge the pump beam and the detection beam to the same position, thereby ensuring that the light spots generated by the pump beam and the detection beam will also converge at the same position on the surface of the workpiece 200, so as to ensure the accuracy of the detection results of the detection equipment 100.

[0050] In another embodiment, if the pumping beam does not pass through the first hole 151 of the first aperture 15 and the first hole 161 of the second aperture 16, and the detection beam does not pass through the second hole 152 of the first aperture 15 and the second hole 162 of the second aperture 16, the processor 30 can control the motor 25 to adjust the angle and / or position of the first reflection component 13 and the angle and / or position of the second reflection component 14, so that the pumping beam passes through the first hole 151 of the first aperture 15 and the first hole 161 of the second aperture 16, and the detection beam passes through the second hole 152 of the first aperture 15 and the second hole 162 of the second aperture 16, thereby ensuring that the pumping beam and the detection beam are parallel before entering the converging lens 12, and the converging lens 12 will converge the pumping beam and the detection beam to the same position, thereby ensuring that the light spots generated by the pumping beam and the detection beam will also converge at the same position on the surface of the workpiece 200, so as to ensure the accuracy of the detection result of the detection equipment 100.

[0051] In summary, when the processor 30 can control the motor 25 to make the pump beam pass through the first hole 151 of the first aperture 15 and the first hole 161 of the second aperture 16, and the detection beam pass through the second hole 152 of the first aperture 15 and the second hole 162 of the second aperture 16, the propagation directions of the pump beam and the detection beam are adjusted to be parallel, so that the pump beam in the pump light path 101 coincides with the detection beam reflected by the detection reflector 11, and the detection beam in the detection light path 102 coincides with the pump beam reflected by the detection reflector 11, thereby ensuring that the light spots generated by the pump beam and the detection beam will also converge at the same position on the surface of the workpiece 200, so as to ensure the accuracy of the detection result of the detection equipment 100.

[0052] In the optical path adjustment method and detection device 100 of the implementation mode of the present application, the processor 30 can adjust the pump beam through the first hole 151 of the first aperture 15 and the first hole 161 of the second aperture 16 by controlling the motor 25. The processor 30 can also adjust the detection beam through the second hole 152 of the first aperture 15 and the second hole 162 of the second aperture 16 by controlling the motor 25, so that the pump beam and the detection beam are parallel before entering the converging lens 12, thereby ensuring that the light spots generated by the pump beam and the detection beam will also converge at the same position on the surface of the workpiece 200, so as to ensure the accuracy of the detection result of the detection device 100.

[0053] See also Figure 3 and Figure 6 In some embodiments, the detection device 100 includes a third reflective component 17 and a converging lens 12, and the detection beam and the pump beam are reflected by the third reflector 171 and incident on the converging lens 12, and step 012 also includes:

[0054] 0123: Adjust the angle and / or position of the third reflective component 17.

[0055] In some embodiments, the processor 30 is further configured to adjust the angle and / or position of the third reflective component 17. In other words, step 0123 may be executed by the processor 30.

[0056] Specifically, after the pump beam and the detection beam are reflected by the first reflection component 13 and the second reflection component 14, they can be incident on the converging lens 12 through the third reflection component 17. At this time, the processor 30 can adjust the angle and / or position of the third reflection component 17 by controlling the motor 25 to adjust the propagation direction of the pump beam and the propagation direction of the detection beam.

[0057] In one embodiment, the processor 30 can adjust the propagation direction of the pump beam and the propagation direction of the detection beam by controlling the motor 25 to adjust the angle of the two third reflectors 171. For example, when the pump beam and the detection beam are reflected by the two third reflectors 171, the propagation direction of the pump beam and the propagation direction of the detection beam are at an angle of 45 degrees with the converging lens 12, and the processor 30 can adjust the propagation direction of the pump beam and the propagation direction of the detection beam to be 90 degrees with the converging lens 12 by adjusting the angle of the two third reflectors 171.

[0058] In another embodiment, the processor 30 can adjust the propagation direction of the pump beam and the propagation direction of the detection beam by controlling the motor 25 to adjust the positions of the two third reflectors 171. For example, when the pump beam and the detection beam are reflected by the two third reflectors 171, the propagation direction of the pump beam and the propagation direction of the detection beam are at an angle of 45 degrees with the converging lens 12, and the processor 30 can adjust the placement positions of the two third reflectors 171 to adjust the propagation direction of the pump beam and the propagation direction of the detection beam to 90 degrees.

[0059] In another embodiment, the processor 30 can adjust the propagation direction of the pump beam and the propagation direction of the detection beam by controlling the motor 25 to adjust the angle and position of the two third reflectors 171. For example, when the pump beam and the detection beam are reflected by the two third reflectors 171, the propagation direction of the pump beam and the propagation direction of the detection beam are at an angle of 45 degrees with the converging lens 12, and the processor 30 can adjust the angle and position of the two third reflectors 171 to adjust the propagation direction of the pump beam and the propagation direction of the detection beam to 90 degrees with the converging lens 12.

[0060] In some embodiments, the user can adjust the propagation direction of the pump beam by manually adjusting the angle and / or position of the first reflective component 13. For example, the user manually adjusts the angle of the two first reflectors 131 to adjust the propagation direction of the pump beam. For another example, the user manually adjusts the position of the two first reflectors 131 to adjust the propagation direction of the pump beam.

[0061] In the optical path adjustment method and detection device 100 of the embodiment of the present application, the processor 30 can adjust the angle and / or position of the third reflection component 17 by controlling the motor 25, thereby adjusting the propagation direction of the pump light beam, and / or adjusting the propagation direction of the detection light beam, so that the light spots generated by the pump light beam and the detection light beam will also converge at the same position on the surface of the workpiece 200, so as to ensure the accuracy of the detection results of the detection device 100.

[0062] See also Figure 3 and Figure 7 In some embodiments, step 012 further includes:

[0063] 0124: a third double-aperture aperture 18 is provided between the third reflective assembly 17 and the detection reflective mirror 11;

[0064] 0125: Adjust the angle and / or position of the third reflecting component 17 so that the pump beam and the detection beam pass through the first hole 181 and the second hole 182 of the third aperture 18 respectively, and so that the pump beam and the detection beam reflected by the detection reflector 11 pass through the first hole 181 and the second hole 182 of the third aperture 18 respectively.

[0065] In some embodiments, the processor 30 is further configured to set a double-aperture third aperture 18 between the third reflective assembly 17 and the detection reflector 11; adjust the angle and / or position of the third reflective assembly 17 so that the pump light beam and the detection light beam pass through the first aperture 181 and the second aperture 182 of the third aperture 18, respectively, and so that the pump light and the detection light reflected by the detection reflector 11 pass through the first aperture 181 and the second aperture 182 of the third aperture 18, respectively. That is, steps 0124 and 0125 can be executed by the processor 30.

[0066] Specifically, in order to ensure that the pump beam in the pump optical path 101 coincides with the detection beam after being reflected by the detection reflector 11, and the detection beam in the detection optical path 102 coincides with the pump beam after being reflected by the detection reflector 11, it is necessary to ensure that when the pump optical path 101 and the detection optical path 102 are incident on the converging lens 12, the detection beam is parallel to the pump beam.

[0067] The processor 30 can adjust the angle and / or position of the third reflection component 17 so that the pump light beam and the detection light beam pass through the first hole 181 and the second hole 182 of the third aperture 18 respectively. At this time, if the pump light and the detection light reflected by the detection reflector 11 pass through the first hole 181 and the second hole 182 of the third aperture 18 respectively at the same time, it means that when the pump light path 101 and the detection light path 102 are incident on the converging lens 12, the detection light beam is parallel to the pump light beam. When the pump beam and the detection beam are incident on the converging lens 12, the converging lens 12 will converge the pump beam and the detection beam to the same position, that is, the converging lens 12 converges the pump beam and the detection beam to the same position of the reflection surface 111 of the detection reflector 11, and the incident angles of the pump beam and the detection beam on the detection reflector 11 are the same, so that the pump beam in the pump optical path 101 coincides with the detection beam after being reflected by the detection reflector 11, and the detection beam in the detection optical path 102 coincides with the pump beam after being reflected by the detection reflector 11. Since the reflection surface 111 of the detection reflector 11 is located at the position of the workpiece 200, when the detection reflector 11 is replaced by the workpiece 200, the light spots generated by the pump beam and the detection beam will also converge at the same position on the surface of the workpiece 200, thereby ensuring the accuracy of the detection result of the detection device 100.

[0068] In the optical path adjustment method and detection device 100 of the embodiment of the present application, the processor 30 can adjust the angle and / or position of the third reflection component 17 by controlling the motor 25 so that the pump light beam and the detection light beam pass through the first hole 181 and the second hole 182 of the third aperture 18 respectively, and so that the pump light and the detection light reflected by the detection reflector 11 pass through the first hole 181 and the second hole 182 of the third aperture 18 respectively, thereby ensuring that the pump light beam and the detection light beam are parallel before entering the converging lens 12, thereby ensuring that the light spots generated by the pump light beam and the detection light beam will also converge at the same position on the surface of the workpiece 200, so as to ensure the accuracy of the detection result of the detection device 100.

[0069] See also Figure 3 and Figure 8 In some embodiments, step 012 further includes:

[0070] 0126: Adjust the angle and / or position of the converging lens 12.

[0071] In some embodiments, the processor 30 is further configured to adjust the angle and / or position of the converging lens 12. In other words, step 0126 can be implemented by the processor 30.

[0072] Specifically, the processor 30 may adjust the angle and / or position of the converging lens 12 by controlling the motor 25 , thereby adjusting the propagation direction of the pump light beam and the propagation direction of the detection light beam.

[0073] In one embodiment, when the processor 30 controls the motor 25 to adjust the third reflection component 17, at this time, if the focus of the converging lens 12 is not on the reflection surface 111 of the detection reflector 11, the processor 30 needs to adjust the position of the converging lens 12 through the motor 25 so that the focus of the converging lens 12 is located on the reflection surface 111 of the detection reflector 11, thereby ensuring that the processor 30 controls the motor 25 to adjust the third reflection component 17 so that the pumping beam and the detection beam pass through the first hole 181 and the second hole 182 of the third aperture 18 respectively, and so that the pumping beam and the detection beam reflected by the detection reflector 11 pass through the first hole 181 and the second hole 182 of the third aperture 18 respectively, and then the pumping light path 101 and the detection light path 102 can be converged on the reflection surface 111 of the detection reflector 11 through the converging lens 12, thereby ensuring that the light spots generated by the pumping beam and the detection beam will also converge at the same position on the surface of the workpiece 200, so as to ensure the accuracy of the detection result of the detection equipment 100.

[0074] In another embodiment, when the processor 30 controls the motor 25 to adjust the third reflective component 17, at this time, if the optical axis of the converging lens 12 is not perpendicular to the detection reflector 11, the pump beam and the detection beam will be incident on the detection reflector 11 at different angles after being converged by the converging lens 12, thereby causing the pump beam in the pump optical path 101 and the detection beam reflected by the detection reflector 11 to be unable to overlap, and the detection beam in the detection optical path 102 and the pump beam reflected by the detection reflector 11 to be unable to overlap, then the processor 30 needs to adjust the position of the converging lens 12 through the motor 25 , so that the optical axis of the converging lens 12 is perpendicular to the detection reflector 11, thereby ensuring that the pump light beam and the detection light beam have the same incident angle on the detection reflector 11 after being converged by the converging lens 12, and the light spots generated by the pump light beam and the detection light beam converge at the same position of the detection reflector 11. Since the reflecting surface 111 of the detection reflector 11 is located at the position where the workpiece 200 is located, when the detection reflector 11 is replaced by the workpiece 200, the light spots generated by the pump light beam and the detection light beam will also converge at the same position on the surface of the workpiece 200, thereby ensuring the accuracy of the detection result of the detection device 100.

[0075] In the optical path adjustment method and the detection device 100 of the embodiment of the present application, the processor 30 can adjust the angle and / or position of the converging lens 12 to ensure that the pump light beam and the detection light beam are incident on the same position of the detection reflector 11 and have the same incident angle after being converged by the converging lens 12. Since the reflective surface 111 of the detection reflector 11 is located at the position where the workpiece 200 is located, when the detection reflector 11 is replaced by the workpiece 200, the light spots generated by the pump light beam and the detection light beam will also converge at the same position on the surface of the workpiece 200, thereby ensuring the accuracy of the detection result of the detection device 100.

[0076] See also Figure 3 , Fig. 9 and Fig.10 In some embodiments, the optical path adjustment method further comprises:

[0077] 013: Replace the detection reflector 11 with the beam quality analyzer 19;

[0078] 014: Adjust the position of the beam quality analyzer 19 so that after the pump beam and the detection beam are refracted by the converging lens 12, the overlap degree of the pump light spot 191 and the detection light spot 192 formed on the beam quality analyzer 19 meets the predetermined value; and

[0079] 015: Replace the beam quality analyzer 19 with the workpiece 200 and make the positions of the workpiece 200 consistent with those of the beam quality analyzer 19.

[0080] In some embodiments, the processor 30 is further configured to replace the detection reflector 11 with the beam quality analyzer 19; adjust the position of the beam quality analyzer 19 so that the pump light spot 191 and the detection light spot 192 formed on the beam quality analyzer 19 after the pump light beam and the detection light beam are refracted by the converging lens 12 meet a predetermined value; and replace the beam quality analyzer 19 with the workpiece 200, and make the positions of the workpiece 200 consistent with those of the beam quality analyzer 19. That is, step 013, step 014, and step 015 can be executed by the processor 30.

[0081] Specifically, in order to further determine the plane where the pump beam and the detection beam converge, the beam quality analyzer 19 can be used to replace the detection reflector 11, that is, the beam quality analyzer 19 is set at the position where the detection reflector 11 is located, so that the light receiving surface 193 of the beam quality analyzer 19 is located at the position where the reflection surface 111 of the detection reflector 11 is located.

[0082] The beam quality analyzer 19 can receive the pump beam and the detection beam to form a pump spot 191 and a detection spot 192 respectively. It can be understood that if the light receiving surface 193 of the beam quality analyzer 19 is just located in the plane where the pump beam and the detection beam converge, then the pump spot 191 and the detection spot 192 respectively formed by the pump beam and the detection beam are basically overlapped. Therefore, the processor 30 can determine whether the light receiving surface 193 of the beam quality analyzer 19 is located in the plane where the pump beam and the detection beam converge by judging the degree of overlap between the pump spot 191 and the detection spot 192.

[0083] Among them, the degree of overlap can be determined according to the proportion of the overlapping parts of the pump light spot 191 and the detection light spot 192, such as according to the proportion of the area of ​​the overlapping part to the area of ​​the pump light spot 191, or according to the proportion of the area of ​​the overlapping part to the area of ​​the detection light spot 192, or according to the proportion of the area of ​​the overlapping part to the sum of the areas of the detection light spot 192 and the pump light spot 191, etc.

[0084] After determining the overlap, the processor 30 compares the overlap with a predetermined value. When the overlap is less than the predetermined value, it can be determined that the overlap between the pump spot 191 and the detection spot 192 is low, indicating that the setting position of the light-receiving surface 193 of the beam quality analyzer 19 and the plane where the pump beam and the detection beam converge are deviated greatly; and when the overlap is greater than the predetermined value, it can be determined that the overlap between the pump spot 191 and the detection spot 192 is high, indicating that the setting position of the light-receiving surface 193 of the beam quality analyzer 19 and the plane where the pump beam and the detection beam converge are deviated greatly, and the light-receiving surface 193 is located on the plane where the pump beam and the detection beam converge. At this time, the workpiece 200 is used to replace the beam quality analyzer 19, and the positions of the workpiece 200 and the beam quality analyzer 19 are kept consistent, so that the plane where the pump beam and the detection beam converge is located on the surface of the workpiece 200, thereby improving the detection accuracy.

[0085] See also Figure 3 , Fig.10 and Fig.11 In some embodiments, the detection device 100 includes a first reflection component 13 disposed in the pump light path 101 and a second reflection component 14 disposed in the detection light path 102, and the first reflection component 13 or the second reflection component 14 includes a piezoelectric deflection mirror 23; step 014 includes:

[0086] 0141: When the overlap between the pump light spot 191 and the detection light spot 192 is less than a predetermined value and the difference between the two is within a preset range, adjust the angle of the piezoelectric deflection mirror 23 until the overlap between the pump light spot 191 and the detection light spot 192 meets the predetermined value.

[0087] In some embodiments, the processor 30 is further configured to adjust the angle of the piezoelectric deflection mirror 23 until the overlap between the pump light spot 191 and the detection light spot 192 meets the predetermined value when the overlap between the pump light spot 191 and the detection light spot 192 is less than a predetermined value and the difference between the two is within a preset range. In other words, step 0141 can be executed by the processor 30.

[0088] Specifically, when the overlap between the pump light spot 191 and the detection light spot 192 is less than a predetermined value, the setting position of the light-collecting surface 193 of the beam quality analyzer 19 deviates greatly from the plane where the pump light beam and the detection light beam converge. At this time, it is necessary to adjust the pump light beam or the detection light beam to move the pump light spot 191 or the detection light spot 192 to increase the overlap between the two until the predetermined value is reached.

[0089] The first reflection component 13 or the second reflection component 14 includes a piezoelectric deflection mirror 23. For example, the first reflection component 13 is provided with a piezoelectric deflection mirror 23. By adjusting the angle of the piezoelectric deflection mirror 23, the angle of the pump light beam incident on the third reflection component 17 can be realized, so that the pump light spot 191 moves. Specifically, the piezoelectric deflection mirror 23 can be adjusted to make the pump light spot 191 move toward the detection light spot 192, thereby gradually increasing the overlap between the two. When the overlap between the two increases to a predetermined value, the angle of the piezoelectric deflection mirror 23 is stopped to achieve the adjustment of the position of the beam quality analyzer 19.

[0090] See also Fig.12 and Fig.13 In some embodiments, step 015 includes:

[0091] 0151: According to the measured height of the beam quality analyzer 19 , adjust the height of the support platform 24 supporting the workpiece 200 so that the height of the surface of the workpiece 200 is the same as the height of the beam quality analyzer 19 .

[0092] In some embodiments, the processor 30 is further configured to adjust the height of the support platform 24 supporting the workpiece 200 according to the measured height of the beam quality profiler 19, so that the height of the surface of the workpiece 200 is the same as the height of the beam quality profiler 19. In other words, step 0151 can be executed by the processor 30.

[0093] Specifically, after completing the adjustment of the position of the beam quality analyzer 19, the processor 30 can obtain the height of the beam quality analyzer 19, such as measuring the height of the beam quality analyzer 19 by a distance measuring instrument (not shown). Then the processor 30 adjusts the height of the carrier 24 so that the height of the workpiece 200 is the same as the height of the beam quality analyzer 19. For example, the processor 30 adjusts the height of the carrier 24 so that the height of the center of the surface of the workpiece 200 is the same as the height of the center of the light receiving surface 193 of the beam quality analyzer 19, so that the surface of the workpiece 200 is located in the plane where the light receiving surface 193 is located, and then the plane where the pump beam and the detection beam converge is located is located on the surface of the workpiece 200, thereby improving the detection effect.

[0094] See also Fig.14One or more non-volatile computer-readable storage media 300 containing a computer program 302 according to an embodiment of the present application, when the computer program 302 is executed by one or more processors 30, enables the processor 30 to execute the optical path adjustment method of any of the above-mentioned embodiments.

[0095] For example, please combine Figures 1 to 3 , when the computer program 302 is executed by one or more processors 30, the processor 30 performs the following steps:

[0096] 011: Setting the reflection surface 111 of the detection reflection mirror 11 at the position where the workpiece 200 is located, and making the detection reflection mirror 11 perpendicular to the incident surface where the detection beam and the pump beam are located; and

[0097] 012: Adjust the propagation direction of the pump beam and / or adjust the propagation direction of the detection beam so that the pump beam in the pump optical path 101 coincides with the detection beam reflected by the detection reflector 11, and the detection beam in the detection optical path 102 coincides with the pump beam reflected by the detection reflector 11.

[0098] For another example, please combine Figure 4 and Figure 5 When the computer program 302 is executed by one or more processors 30, the processor 30 may further perform the following steps:

[0099] 0121: a double-aperture first aperture 15 and a double-aperture second aperture 16 are arranged in the optical path between the first reflecting assembly 13, the second reflecting assembly 14 and the converging lens 12, the center of the first aperture 151 of the first aperture 15 and the center of the first aperture 161 of the second aperture 16 form a first connecting line, the center of the second aperture 152 of the first aperture 15 and the center of the second aperture 162 of the second aperture 16 form a second connecting line, and the first connecting line is parallel to the second connecting line;

[0100] 0122: Adjust the angle and / or position of the first reflecting component 13 so that the pumping beam passes through the first hole 151 of the first aperture 15 and the first hole 161 of the second aperture 16; and / or adjust the angle and / or position of the second reflecting component 14 so that the detection beam passes through the second hole 152 of the first aperture 15 and the second hole 162 of the second aperture 16.

[0101] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiments or examples are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.

[0102] Any process or method description in a flowchart or otherwise described herein may be understood to represent a module, segment or portion of code that includes one or more executable instructions for implementing the steps of a specific logical function or process, and the scope of the preferred embodiments of the present application includes alternative implementations in which functions may not be performed in the order shown or discussed, including performing functions in a substantially simultaneous manner or in the reverse order depending on the functions involved, which should be understood by technicians in the technical field to which the embodiments of the present application belong.

[0103] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A method for adjusting an optical path, used in a detection device, wherein the detection device comprises a pump optical path and a detection optical path, wherein a pump optical path is used to transmit a pump optical beam to a workpiece, and a detection optical path is used to transmit a detection optical beam to the workpiece, wherein: The optical path adjustment method comprises: Disposing a reflective surface of a detection reflector at the position where the workpiece is located, and making the detection reflector parallel to an incident surface where the detection beam and the pump beam are located; and Adjusting the propagation direction of the pump light beam and / or adjusting the propagation direction of the detection light beam, so that the pump light beam in the pump light path coincides with the detection light beam after being reflected by the detection reflector, and the detection light beam in the detection light path coincides with the pump light beam after being reflected by the detection reflector; The detection device further comprises a converging lens, the detection light beam and / or the pump light beam are incident on the converging lens after changing the propagation direction, and the optical axis of the converging lens is perpendicular to the detection reflector; The detection device comprises a first reflection component arranged on the pump light path and a second reflection component arranged on the detection light path, the first reflection component is used to change the propagation direction of the pump light beam, the second reflection component is used to change the propagation direction of the detection light beam, the pump light beam is incident on the converging lens after being reflected by the first reflection component, and the detection light beam is incident on the converging lens after being reflected by the second reflection component; wherein: The adjusting the propagation direction of the pump light beam comprises: adjusting the angle and / or position of the first reflective component so that the pump light beam in the pump light path coincides with the detection light beam reflected by the detection reflector; The adjusting the propagation direction of the detection light beam comprises: adjusting the angle and / or position of the second reflection component so that the detection light beam in the detection light path coincides with the pump light beam reflected by the detection reflection mirror; The adjusting the propagation direction of the pump light beam and / or adjusting the propagation direction of the detection light beam comprises: A double-aperture first aperture and a double-aperture second aperture are arranged in an optical path between the first reflecting assembly, the second reflecting assembly and the converging lens, wherein the center of the first aperture of the first aperture and the center of the first aperture of the second aperture form a first connecting line, and the center of the second aperture of the first aperture and the center of the second aperture of the second aperture form a second connecting line, and the first connecting line is parallel to the second connecting line; Adjust the angle and / or position of the first reflecting component so that the pumping beam passes through the first hole of the first aperture and the first hole of the second aperture; and / or adjust the angle and / or position of the second reflecting component so that the detection beam passes through the second hole of the first aperture and the second hole of the second aperture.

2. The optical path adjustment method according to claim 1, characterized in that: The double aperture distance of the first aperture is the same as the double aperture distance of the second aperture.

3. The optical path adjustment method according to claim 1, characterized in that: The detection device includes a third reflection component, the detection beam and the pump beam are reflected by the third reflection mirror and then incident on the converging lens, and the adjusting the propagation direction of the pump beam and / or the adjusting the propagation direction of the detection beam includes: Adjust the angle and / or position of the third reflective component.

4. The optical path adjustment method according to claim 1, characterized in that: The detection device includes a third reflection component, and the third reflection component is used to change the propagation direction of the detection beam and the pump beam. The adjusting the propagation direction of the pump beam and / or adjusting the propagation direction of the detection beam includes: A third double-aperture aperture is arranged between the third reflection component and the detection reflection mirror; The angle and / or position of the third reflection component is adjusted so that the pump light and the detection light pass through the first hole and the second hole of the third aperture respectively, and the pump light and the detection light reflected by the detection reflector pass through the first hole and the second hole of the third aperture respectively.

5. The optical path adjustment method according to claim 3, characterized in that: The step of adjusting the propagation direction of the pump light beam and / or adjusting the propagation direction of the detection light beam further includes: Adjust the angle and / or position of the converging lens.

6. The optical path adjustment method according to claim 3, characterized in that: The optical path adjustment method further comprises: Replace the detection reflector with a beam quality analyzer; Adjusting the position of the beam quality analyzer so that the overlap between the pump light spot and the detection light spot formed on the beam quality analyzer after the pump light beam and the detection light beam are refracted by the converging lens meets a predetermined value; and The beam quality profiler is replaced by a workpiece, and the positions of the workpiece and the beam quality profiler are aligned.

7. The optical path adjustment method according to claim 6, characterized in that: The detection device comprises a first reflection component arranged on the pump light path and a second reflection component arranged on the detection light path, wherein the first reflection component or the second reflection component comprises a piezoelectric deflection mirror; the position of the beam quality analyzer is adjusted so that the overlap between the pump light spot and the detection light spot formed on the beam quality analyzer by the pump light and the detection light meets a predetermined value, and further comprises: When the overlap between the pump light spot and the detection light spot is less than a predetermined value and the difference between the two is within a preset range, the angle of the piezoelectric deflection mirror is adjusted until the overlap between the pump light spot and the detection light spot meets the predetermined value.

8. The optical path adjustment method according to claim 6, characterized in that: The step of replacing the beam quality analyzer with a workpiece and making the positions of the workpiece consistent with those of the beam quality analyzer comprises: According to the measured height of the beam quality analyzer, the height of the support platform for the workpiece is adjusted so that the height of the surface of the workpiece is the same as the height of the beam quality analyzer.

9. A detection device, characterized in that: include: a detection light path, along which the detection light beam is transmitted to the workpiece; A pump optical path, along which a pump optical beam is transmitted to the workpiece; One or more processors, wherein the one or more processors are used to: set a detection reflector at the position where the workpiece is located, and make the detection reflector parallel to the incident surface where the detection beam and the pump beam are located; and adjust the propagation direction of the pump beam, and / or adjust the propagation direction of the detection beam, so that the pump beam in the pump light path coincides with the detection beam after being reflected by the detection reflector, and the detection beam in the detection light path coincides with the pump beam after being reflected by the detection reflector; The detection device further comprises a converging lens, the detection light beam and / or the pump light beam are incident on the converging lens after changing the propagation direction, and the optical axis of the converging lens is perpendicular to the detection reflector; The detection device comprises a first reflection component arranged on the pump light path and a second reflection component arranged on the detection light path, the first reflection component is used to change the propagation direction of the pump light beam, the second reflection component is used to change the propagation direction of the detection light beam, the pump light beam is incident on the converging lens after being reflected by the first reflection component, and the detection light beam is incident on the converging lens after being reflected by the second reflection component; wherein: One or more of the processors are used to adjust the angle and / or position of the first reflective component so that the pump light beam in the pump light path coincides with the detection light beam reflected by the detection reflector; adjust the angle and / or position of the second reflective component so that the detection light beam in the detection light path coincides with the pump light beam reflected by the detection reflector; One or more of the processors are further used to set a first double-aperture aperture and a second double-aperture aperture in an optical path between the first reflecting assembly, the second reflecting assembly and the converging lens, wherein the center of the first aperture of the first aperture and the center of the first aperture of the second aperture form a first connecting line, the center of the second aperture of the first aperture and the center of the second aperture of the second aperture form a second connecting line, and the first connecting line is parallel to the second connecting line; Adjust the angle and / or position of the first reflecting component so that the pumping beam passes through the first hole of the first aperture and the first hole of the second aperture; and / or adjust the angle and / or position of the second reflecting component so that the detection beam passes through the second hole of the first aperture and the second hole of the second aperture.

10. A non-volatile computer-readable storage medium storing a computer program, wherein when the computer program is executed by one or more processors, the optical path adjustment method according to any one of claims 1 to 8 is implemented.

Images