Carrier swing mechanism and processing equipment

Abstract

Embodiments of the present invention provide a carrier swing mechanism and a processing device. The carrier swing mechanism includes: a swing platform, a swing shaft is provided at the bottom of the swing platform; a power assembly; a transmission assembly, both ends of the transmission assembly are respectively connected to the power assembly and the swing platform, and the power assembly is used to drive the swing platform to swing around the swing shaft through the transmission assembly. In the technical solution of the present invention, the power assembly can drive the swing platform to swing through the transmission assembly, that is, the swing platform can swing relative to the processing tank, and the workpiece to be processed placed on the swing platform can make a reciprocating change in the tilt angle as required, so that the workpiece to be processed can be tilted in a preset direction in the processing tank, thereby achieving the purpose of dynamic cleaning. This method can largely eliminate the cleaning and drying dead zones and improve the cleaning effect and cleaning efficiency.

Description

Technical Field

[0001] Embodiments of the present invention relate to the technical field of semiconductor processing equipment. Specifically, the present invention relates to a carrier swing mechanism and a processing device. Background Art

[0002] In the related art, wafers are static both during conventional cleaning and after cleaning. Dead zones are likely to form in some parts of the wafers, and these parts cannot be completely cleaned or dried. Summary of the Invention

[0003] To solve at least one of the above technical problems, an object of an embodiment of the present invention is to provide a carrier swing mechanism.

[0004] Another object of an embodiment of the present invention is to provide a processing device having the above carrier swing mechanism.

[0005] To achieve the above object, an embodiment of the first aspect of the present invention provides a carrier swing mechanism, including: a swing platform, a swing shaft is provided at the bottom of the swing platform; a power assembly; a transmission assembly, both ends of the transmission assembly are respectively connected to the power assembly and the swing platform, and the power assembly is used to drive the swing platform to swing around the swing shaft through the transmission assembly.

[0006] According to the embodiment of the carrier swing mechanism provided by the present invention, the power assembly can drive the swing platform to swing through the transmission assembly, that is, the swing platform can swing relative to the processing tank. The processing tank can be a cleaning tank filled with a solution, or a drying tank for drying the workpiece to be processed after cleaning. The workpiece to be processed placed on the swing platform can change the inclination angle reciprocally as required, so that the workpiece to be processed can be inclined in a preset direction in the processing tank, thereby achieving the purpose of dynamic processing. This method can largely eliminate the cleaning or drying dead zones, and improve the cleaning or drying effect and efficiency.

[0007] Specifically, the carrier swing mechanism includes a swing platform, a power assembly and a transmission assembly. Generally, the swing platform is arranged in the processing tank of the processing device. The processing tank can be a cleaning tank filled with a solution, or a drying tank for drying the workpiece to be processed after cleaning. The swing platform is connected to other components of the processing device through the transmission assembly, such as: the power assembly, etc. Further, a swing shaft is provided at the bottom of the swing platform, and the swing platform can swing around the swing shaft. The workpiece to be processed placed on the swing platform can change the inclination angle reciprocally as required, so that the workpiece to be processed can be inclined in a preset direction in the processing tank, thereby achieving the purpose of dynamic cleaning or drying. This method can largely eliminate the cleaning or drying dead zones, and improve the cleaning or drying effect and efficiency.

[0008] Further, both ends of the transmission assembly are respectively connected to the power assembly and the swing platform. Specifically, the transmission assembly may include a transmission rod. One end of the transmission rod is rotatably connected to the swing platform, and the other end of the transmission rod is connected to the power assembly. The power assembly can drive the swing platform to swing around the swing axis through the transmission assembly.

[0009] In the technical solution defined in this application, the workpiece to be processed may be a semiconductor component, such as a wafer. The wafer is static during the conventional cleaning process or the drying process. Some parts of the wafer are prone to form dead zones and cannot be completely cleaned or dried. In the technical solution defined in this application, the wafer placed on the swing platform can change the inclination angle reciprocally as required, so that the wafer can be inclined in a preset direction, thereby achieving the purpose of dynamic cleaning or drying. This method can largely eliminate the cleaning or drying dead zones and improve the cleaning or drying effect and efficiency. In addition, the carrier swing mechanism also has the advantages of simple structure, stable operation, and low frequency of daily maintenance.

[0010] In addition, the above technical solution provided by the present invention may also have the following additional technical features:

[0011] In the above technical solution, the transmission assembly includes: a transmission rod, with both ends of the transmission rod respectively connected to the power assembly and the swing platform; a ball head rod, with a ball head formed at one end of the ball head rod, and the end of the ball head rod away from the ball head is connected to the end of the transmission rod close to the swing platform; a mating part, provided on the swing platform, and the mating part is provided with a ball socket, and the ball head is mated with the ball socket.

[0012] In this technical solution, the transmission assembly includes a transmission rod, a ball head rod, and a mating part. Specifically, one end of the transmission rod is rotatably connected to the swing platform, and the other end of the transmission rod is connected to the power assembly. The power assembly can drive the swing platform to swing around the swing axis through the transmission assembly.

[0013] Further, a ball head is formed at one end of the ball head rod, and the ball head is spherical. The end of the ball head rod away from the ball head is connected to the end of the transmission rod close to the swing platform. It can be understood that the transmission rod is connected to the swing platform through the ball head rod. It is worth noting that the axis of the ball head rod is parallel or coincident with the axis of the transmission rod.

[0014] Further, the mating part is provided on the swing platform, and the mating part is provided with a ball socket. The ball head is mutually mated with the ball socket, and the ball head can rotate relative to the ball socket, so that the ball head rod is rotatably connected to the swing platform.

[0015] In the above technical solution, the transmission assembly further includes: a first sliding assembly for connecting with the housing assembly; a sliding plate, connected to the transmission rod and adapted to the first sliding assembly, and the sliding plate can slide relative to the first sliding assembly.

[0016] In this technical solution, the transmission assembly further includes a first sliding assembly and a sliding plate. Specifically, the first sliding assembly is connected to the housing assembly, the sliding plate is connected to the transmission rod and is adapted to the first sliding assembly, and the sliding plate can slide relative to the first sliding assembly.

[0017] Further, the first sliding assembly includes a connecting plate and two sliding guide rails. The cross-section of the connecting plate and the cross-sections of the two sliding guide rails form a C-shaped structure. The sliding plate is located in the C-shaped structure, and the sliding plate can slide along the length direction of the C-shaped structure.

[0018] In the above technical solution, the power assembly further includes: a driving part, which is connected to one end of the transmission assembly away from the swing platform and is used to drive the transmission assembly to drive the swing platform to swing.

[0019] In this technical solution, the power assembly further includes a driving part. Specifically, the driving part is connected to one end of the transmission assembly away from the swing platform, and the driving part can drive the transmission assembly to drive the swing platform to swing.

[0020] It should be noted that the driving part here can be a cylinder, a hydraulic cylinder or other forms of power components.

[0021] In the above technical solution, the power assembly further includes: a second sliding assembly, which is connected to the transmission assembly; the driving part includes a first driving part and a second driving part. The first driving part is used to drive the transmission assembly to move in the first direction; the second driving part is used to drive the transmission assembly to move in the second direction.

[0022] In this technical solution, the power assembly further includes a second sliding assembly. The second sliding assembly is connected to the transmission assembly. Specifically, the second sliding assembly includes a guide rail slider structure and a connecting part. The guide rail slider structure includes a first part and a second part; the power assembly further includes a limiting part connected to one end of the transmission assembly away from the swing platform. The limiting part is fixedly connected to the transmission assembly. The guide rail slider structure is connected to the connecting part, and the connecting part is connected to the limiting part. When the limiting part moves, it drives the transmission assembly to move. At the same time, the relative positions of the first part and the second part can change.

[0023] Further, the driving part specifically includes a first driving part and a second driving part. Specifically, the first driving part can drive the transmission assembly to move in the first direction, and the second driving part can drive the transmission assembly to move in the second direction. Specifically, the driving part drives the limiting part to move, and the limiting part drives the transmission assembly to move, that is, the first driving part drives the limiting part and then drives the transmission assembly to move in the first direction, and the second driving part can drive the limiting part and then drive the transmission assembly to move in the second direction.

[0024] It should be noted that when the transmission rod in the transmission assembly is arranged in the vertical direction, the first direction is vertically upward and the second direction is vertically downward, that is, the first direction is opposite to the second direction. In other words, the first driving part and the second driving part are inverted with each other, that is, the installation directions are opposite.

[0025] Both the first driving part and the second driving part can be cylinders. The two cylinders can also increase the stroke. One way is to change the relative positions of the two cylinders, so as to adjust the overall stroke of the two cylinders, and then the swing amplitude of the swing platform can be controlled; another way is to replace the specifications of the two cylinders with cylinders with a larger stroke, so as to control the swing amplitude of the screen plate assembly 118.

[0026] Adopting the method of mutual cooperation of two cylinders to indirectly drive the swing of the screen plate assembly has the advantages of small placement space and convenient operation compared with the conventional motor driving method. The power assembly is arranged in the processing equipment, and the processing equipment includes multiple areas, and the space of each area is limited. In order to realize the swing of the wafer in the drying tank within a limited space, on the one hand, the method of mutual cooperation of two cylinders can realize the swing of the wafer in the drying tank, and on the other hand, the equipment space is reasonably utilized. In addition, adopting the method of driving with two cylinders can more easily control the balance point of the screen plate assembly, that is, when both cylinders are in a non-moving state, the screen plate is in a balanced state. When in the balanced state, it is convenient for manual or handling devices (such as manipulators) to pick up and place. Especially during mechanized control, the swing platform is in a balanced state, that is, in a horizontal state, and the wafer cassette for placing wafers is in a horizontal state, which is convenient for the handling device to synchronously and accurately grab or place the wafer cassette. If a single cylinder is used to indirectly drive the swing of the screen plate assembly to realize the switching of 3 positions, then when the swing platform needs to be in a horizontal state, due to the principle that the cylinder converts the pressure of compressed air into mechanical energy, the horizontal state cannot be accurately controlled, thus affecting the picking and placing of wafers on the screen plate.

[0027] In the above technical solution, it further includes: at least one swing support part, and the swing support part is provided with a swing groove, and the swing shaft is matched with the swing groove.

[0028] In this technical solution, the carrier swing mechanism further includes at least one swing support part. The number of swing support parts is at least one, that is, the swing support part can be one, two or more, and is flexibly set according to actual needs.

[0029] Furthermore, the swing support part is provided with a swing groove, and the swing shaft is matched with the swing groove. Specifically, the cross-sectional shape of the swing shaft is adapted to the cross-sectional shape of the swing groove, and the swing shaft can swing relative to the swing support part, so as to realize the swing of the swing platform relative to the swing support part.

[0030] In the above technical solution, it further includes: a position detection component, including: a magnetic switch disposed on the power component; an origin position detection component disposed on the power component.

[0031] In this technical solution, the carrier swing mechanism further includes a position detection component. Specifically, the position detection component includes a magnetic switch and an origin position detection component. The power component includes a driving part, and the driving part can be a cylinder. The magnetic switch is disposed on the cylinder and is used to detect the position of the cylinder.

[0032] Furthermore, the origin position detection component includes a detection piece and a detection element. Specifically, the detection element is disposed on the partition plate or the support block connected to the partition plate, and the detection piece is disposed on the connection part connected to the driving part. The origin position detection component is used to detect the state when the cylinder is not moving. When the cylinder is not moving, the swing platform should be in a horizontal state. By providing the position detection component, the carrier swing mechanism can achieve automatic swinging.

[0033] An embodiment of the second aspect of the present invention provides a processing device, including: a housing component; the carrier swing mechanism in any of the above embodiments, and the carrier swing mechanism is connected to the housing component.

[0034] According to the embodiment of the processing device of the present invention, the processing device includes a housing component and a carrier swing mechanism connected to the housing component. Specifically, a part of the power component in the carrier swing mechanism is connected to the housing component, and the partition plate in the carrier swing mechanism is connected to the housing component. In addition, the swing component in the carrier swing mechanism is disposed in the processing tank, and the swing platform in the swing component can swing relative to the processing tank, so as to be able to realize dynamic cleaning or drying of the workpiece to be processed.

[0035] Furthermore, the housing component in the processing device mainly functions to support and connect the carrier. The housing component can be connected by corrosion-resistant metal plates.

[0036] In the above technical solution, the housing component is divided into a first area and a second area. The swing component in the carrier swing mechanism is disposed in the first area, and the power component in the carrier swing mechanism is disposed in the second area.

[0037] In this technical solution, by dividing the housing component into two areas, namely the first area and the second area, it is beneficial to separate the working area and the assembly area, and improve the compactness of the overall structure of the processing device.

[0038] Furthermore, the first area is the working area and the second area is the assembly area. The swing component in the carrier swing mechanism is disposed in the first area, and the power component in the carrier swing mechanism is disposed in the second area. Since the partition plate in the carrier swing mechanism is connected to the housing component, the partition plate divides the inside of the housing component into the first area and the second area, which is beneficial to improve the cleanliness of each area.

[0039] In the above technical solution, it further includes: a processing tank, which is arranged at the bottom of the shell assembly, and the swing platform in the carrier swing mechanism is arranged in the processing tank.

[0040] In this technical solution, the processing device further includes a processing tank arranged at the bottom of the shell assembly. The swing platform in the carrier swing mechanism is arranged in the processing tank, and the workpiece to be processed is placed on the swing platform. During the working process, the swing platform can swing relative to the processing tank, so as to realize the dynamic cleaning or drying of the workpiece to be processed, improve the cleaning or drying effect and the cleaning or drying efficiency.

[0041] Among them, since the processing device includes any one of the carrier swing mechanisms in the above first aspect, it has the beneficial effects of any one of the above embodiments, which will not be elaborated here.

[0042] The additional aspects and advantages of the embodiments of the present invention will become obvious in the following description part, or be learned through the practice of the present invention. Description of the Drawings

[0043] Figure 1 Shows a schematic structural diagram of a carrier swing mechanism according to an embodiment of the present invention;

[0044] Figure 2 Shows a schematic structural diagram of a carrier swing mechanism according to another embodiment of the present invention;

[0045] Figure 3 Shows a schematic structural diagram of a carrier swing mechanism according to another embodiment of the present invention;

[0046] Figure 4 Shows a schematic connection structure diagram of a transmission rod and a limiting part according to an embodiment of the present invention;

[0047] Figure 5 Shows a schematic structural diagram of a transmission component according to an embodiment of the present invention;

[0048] Figure 6 Shows a schematic structural diagram of a carrier swing mechanism according to another embodiment of the present invention;

[0049] Figure 7 Shows a schematic structural diagram of a carrier swing mechanism according to another embodiment of the present invention;

[0050] Figure 8 Shows a schematic structural diagram of a processing device according to an embodiment of the present invention.

[0051] Among them, Figures 1 to 8 the corresponding relationship between the reference numerals in the drawings and the component names is:

[0052] 100: Carrier swing mechanism; 110: Swing assembly; 111: Swing support part; 1111: Swing groove; 112: Swing platform; 1121: Swing shaft; 1122: Support seat; 113: Carrier; 1131: Wafer cassette; 1132: Workpiece to be processed; 120: Transmission assembly; 121: Transmission rod; 1211: Mounting hole; 122: Ball head rod; 1221: Ball head part; 123: Fitting part; 1231: Ball socket; 1232: Upper ball bowl; 1233: Lower ball bowl; 1234: Ball bowl fixing cover; 124: Slide rail; 125: Pad; 1251: Second lifting and moving port; 126: Connecting plate; 127: Slide plate; 128: First sliding assembly; 130: Power assembly; 131: Limiting part; 132: Baffle plate; 1321: First lifting and moving port; 133: Support block; 134: First connecting part; 135: Second connecting part; 136: Adapter plate; 137: Driving part; 1371: First driving part; 1372: Second driving part; 138: Second sliding assembly; 1391: Base plate; 1392: Connecting block; 140: Position detection assembly; 141: Magnetic switch; 142: Home position detection assembly; 1421: Detection element; 1422: Detection piece; 150: Cover plate; 160: Guide rail slider structure; 161: First part; 162: Second part; 200: Processing equipment; 210: Housing assembly; 220: First area; 230: Second area; 240: Processing tank. Detailed implementation manners

[0053] In order to more clearly understand the above - mentioned objects, features, and advantages of the embodiments of the present invention, the embodiments of the present invention will be further described in detail below with reference to the drawings and specific implementation manners. It should be noted that, without conflict, the embodiments of the present application and the features in the embodiments can be combined with each other.

[0054] In the following description, many specific details are set forth in order to fully understand the present application. However, the embodiments of the present invention can also be implemented in other ways different from those described herein. Therefore, the protection scope of the present application is not limited to the limitations of the specific embodiments disclosed below.

[0055] Next, refer to Figures 1 to 8 Describe the carrier swing mechanism 100 and the processing equipment 200 provided according to some embodiments of the present invention.

[0056] Embodiment 1

[0057] As Figure 1As shown, the carrier swing mechanism 100 provided by an embodiment of the present invention includes a swing platform 112, a power assembly 130, and a transmission assembly 120. Generally, the swing platform 112 is disposed in a processing tank 240 of a processing device 200. The swing platform 112 is connected to other components of the processing device 200 through the transmission assembly 120, such as the power assembly 130 and the like. Further, a swing shaft 1121 is provided at the bottom of the swing platform 112, and the swing platform 112 can swing around the swing shaft 1121. The workpiece to be processed 1132 placed on the swing platform 112 can make reciprocating inclination angle changes as required, so that the workpiece to be processed 1132 can be inclined in a preset direction in the processing tank 240, thereby achieving the purpose of dynamic cleaning or drying. This method can largely eliminate the cleaning or drying dead zones, and improve the cleaning or drying effect and cleaning or drying efficiency.

[0058] Further, two ends of the transmission assembly 120 are respectively connected to the power assembly 130 and the swing platform 112. Specifically, the transmission assembly 120 may include a transmission rod 121. One end of the transmission rod 121 is rotatably connected to the swing platform 112, and the other end of the transmission rod 121 is connected to the power assembly 130. The power assembly 130 can drive the swing platform 112 to swing around the swing shaft 1121 through the transmission assembly 120.

[0059] Embodiment Two

[0060] As Figure 1 As shown, the carrier swing mechanism 100 provided by an embodiment of the present invention includes a swing assembly 110, a power assembly 130, and a transmission assembly 120. Generally, the swing assembly 110 is disposed in a processing tank 240 of a processing device 200. The swing assembly 110 is connected to other components of the processing device 200 through the transmission assembly 120, such as the power assembly 130 and the like. Further, the swing assembly 110 includes a swing platform 112. A swing shaft 1121 is provided at the bottom of the swing platform 112, and the swing platform 112 can swing around the swing shaft 1121. The workpiece to be processed 1132 placed on the swing platform 112 can make reciprocating inclination angle changes as required, so that the workpiece to be processed 1132 can be inclined in a preset direction in the processing tank 240, thereby achieving the purpose of dynamic cleaning or drying. This method can largely eliminate the cleaning or drying dead zones, and improve the cleaning or drying effect and cleaning or drying efficiency.

[0061] Further, two ends of the transmission assembly 120 are respectively connected to the power assembly 130 and the swing platform 112. Specifically, the transmission assembly 120 may include a transmission rod 121. One end of the transmission rod 121 is rotatably connected to the swing platform 112, and the other end of the transmission rod 121 is connected to the power assembly 130. The power assembly 130 can drive the swing platform 112 to swing around the swing shaft 1121 through the transmission assembly 120.

[0062] Embodiment III

[0063] As Figure 1 shown, a carrier swing mechanism 100 provided by an embodiment of the present invention includes a swing assembly 110 and a transmission assembly 120. Generally, the swing assembly 110 is disposed in a processing tank 240 of a processing device 200. The swing assembly 110 is connected to other components of the processing device 200 through the transmission assembly 120, such as a power assembly 130 and the like. Further, the swing assembly 110 includes a swing support portion 111 and a swing platform 112. Specifically, a swing groove 1111 is provided on the swing support portion 111, and a swing shaft 1121 is provided on a surface of the swing platform 112 away from a support seat 1122. The swing shaft 1121 is engaged with the swing groove 1111. Both the swing support portion 111 and the swing platform 112 are disposed in the processing tank 240. A workpiece to be processed 1132 is placed on the swing platform 112. The swing support portion 111 can be connected to the bottom of the processing tank 240, that is, the swing support portion 111 is relatively fixed to the processing tank 240, and the swing platform 112 can swing relative to the swing support portion 111. In other words, the swing platform 112 can swing relative to the processing tank 240. The workpiece to be processed 1132 placed on the swing platform 112 can make a reciprocating tilt angle change as required, so that the workpiece to be processed 1132 can be tilted in a preset direction in the processing tank 240, thereby achieving the purpose of dynamic cleaning or drying. This method can largely eliminate cleaning or drying dead zones and improve cleaning or drying effects and cleaning or drying efficiency.

[0064] It is worth noting that the swing support portion 111 and the processing tank 240 can be of an integral structure. Compared with the post-processing method, it has good mechanical properties, higher connection strength, and is beneficial to reducing the number of components. Furthermore, it can reduce the installation process and improve the installation efficiency. The material and surface treatment of the swing support portion 111 can be the same as those of the processing tank 240. In addition, the swing shaft 1121 can be made of a Teflon material with high temperature resistance and high lubricity. The swing shaft 1121 is engaged with the swing groove 1111 of the swing support portion 111, and the swing shaft 1121 can swing relative to the swing support portion 111. According to the structural requirements of the processing tank 240, the swing shaft 1121 can be assembled at various positions of the swing platform 112. Further, the material and surface treatment of the swing platform 112 can be the same as those of the processing tank 240.

[0065] Further, the transmission assembly 120 includes a transmission rod 121. Specifically, one end of the transmission rod 121 is rotatably connected to the swing platform 112, and the other end of the transmission rod 121 is connected to the power assembly 130. In other words, the power assembly 130 is a component that provides power, and the power assembly 130 is in transmission connection with the swing assembly 110 through the transmission assembly 120. The power assembly 130 can drive the swing platform 112 to swing relative to the processing tank 240 through the transmission rod 121 in the transmission assembly 120, so as to realize the dynamic cleaning or processing of the workpiece to be processed 1132. It should be noted that the transmission rod 121 and the swing platform 112 can be rotatably connected through a universal connection assembly that can move freely.

[0066] Further, the axial direction of the transmission rod 121 is always perpendicular to and does not intersect the length direction of the swing groove 1111. Specifically, the fact that the axial direction of the transmission rod 121 does not intersect the length direction of the swing groove 1111 can be understood as that the transmission rod 121 only plays a role in transmitting power and will not affect the normal swing of the swing platform 112. In addition, the axial direction of the transmission rod 121 is always perpendicular to the length direction of the swing groove 1111, which can be understood as that the axis of the transmission rod 121 is perpendicular to the center line of the swing groove 1111. When the carrier swing mechanism 100 works, the transmission rod 121 can only move axially, that is, the power assembly 130 drives the transmission rod 121 to move axially, and then can drive the swing platform 112 to swing reciprocally. It should be noted that the transmission rod 121 can be vertically arranged, and the transmission rod 121 only moves up and down in the vertical direction during the working process. Of course, the transmission rod 121 can also be arranged in other ways according to actual needs, such as horizontal arrangement, etc.

[0067] In the technical solution defined in this application, the workpiece to be processed 1132 can be a semiconductor component, such as a wafer, etc. The wafer is static during the conventional cleaning process and after cleaning (drying stage). Dead zones are likely to form in some parts of the wafer, and it cannot be completely cleaned or dried. However, in the technical solution defined in this application, the wafer placed on the swing platform 112 can change the reciprocating tilt angle as required, so that the wafer can tilt in a preset direction, thereby achieving the purpose of dynamic cleaning or processing. This method can largely eliminate the cleaning or drying dead zones and improve the cleaning or drying effect and cleaning or processing efficiency. In addition, the carrier swing mechanism 100 also has the advantages of simple structure, stable operation, and low frequency of daily maintenance.

[0068] In another embodiment, the number of the swing support parts 111 is at least one, that is, the swing support parts 111 can be one, two or more, and can be flexibly set according to actual needs.

[0069] Embodiment 4

[0070] AsFigure 1 As shown, the swinging assembly 110 further includes at least one carrier 113. Specifically, the carrier 113 includes a wafer cassette 1131 and a workpiece to be processed 1132. The wafer cassette 1131 is disposed on the swinging platform 112. The wafer cassette 1131 is placed on the swinging platform 112. Further, a plurality of support seats 1122 are provided on the swinging platform 112, and the support seats 1122 are used for carrying and limiting the wafer cassette 1131.

[0071] Further, the workpiece to be processed 1132 is disposed in the wafer cassette 1131. Specifically, during the reciprocating swing of the swinging platform 112, the cleaning or drying dead zones on the workpiece to be processed 1132 in the wafer cassette can be further eliminated, which is beneficial to improving the cleaning or drying effect and the cleaning or drying efficiency.

[0072] It should be noted that the support seats 1122 can be made of anti-corrosion and clean materials, such as PVDF, HTPVC, etc. In addition, the number of carriers 113 is at least one, that is, the carrier 113 can be one, two or more. By placing a plurality of carriers 113 on the swinging platform 112, a plurality of workpieces to be processed 1132 can be cleaned or dried simultaneously, which is beneficial to improving the cleaning or drying efficiency.

[0073] Embodiment Five

[0074] As Figure 1 and Figure 5 shown, the transmission assembly 120 further includes a ball head rod 122 and a mating portion 123. Specifically, a ball head portion 1221 is formed at one end of the ball head rod 122, and the ball head portion 1221 is spherical. The end of the ball head rod 122 away from the ball head portion 1221 is connected to the end of the transmission rod 121 close to the swinging platform 112. It can be understood that the transmission rod 121 is connected to the swinging platform 112 through the ball head rod 122. It should be noted that the axis of the ball head rod 122 is parallel or coincident with the axis of the transmission rod 121.

[0075] Further, the mating portion 123 is disposed on the swinging platform 112, and a ball socket 1231 is provided on the mating portion 123. The ball head portion 1221 and the ball socket 1231 cooperate with each other, and the ball head portion 1221 can rotate relative to the ball socket 1231, so that the ball head rod 122 and the swinging platform 112 are rotatably connected.

[0076] In another embodiment, the mating portion 123 includes an upper ball bowl 1232, a lower ball bowl 1233, and a ball bowl fixing cover 1234. Specifically, the upper ball bowl 1232 abuts against the lower ball bowl 1233, and a ball socket 1231 is formed between the two ball bowls. The ball head portion 1221 is disposed in the ball socket 1231, and the ball head portion 1221 can rotate relative to the ball socket 1231. Further, the ball bowl fixing cover 1234 is disposed on the swing platform 112. Specifically, the ball bowl fixing cover 1234 is located on the side of the swing platform 112 away from the swing axis 1121. The two ball bowls are disposed inside the ball bowl fixing cover 1234.

[0077] In another embodiment, as Figure 1 and Figure 3 shown, the transmission assembly 120 further includes a first sliding assembly 128 and a sliding plate 127. Specifically, the first sliding assembly 128 is used to connect to the housing assembly 210. The sliding plate 127 is connected to the transmission rod 121 and is adapted to the first sliding assembly 128, and the sliding plate 127 can slide relative to the first sliding assembly 128.

[0078] Further, the first sliding assembly 128 includes a connecting plate 126 and two sliding guide rails 124. The cross-section of the connecting plate 126 and the cross-sections of the two sliding guide rails 124 form a C-shaped structure. The sliding plate 127 is located in the C-shaped structure, and the sliding plate 127 can slide along the length direction of the C-shaped structure. By sliding the sliding plate 127 in the C-shaped structure, the C-shaped structure can play a guiding role, making the movement process of the sliding plate 127 smoother and more stable, and thus improving the stability of the transmission assembly 120 during movement.

[0079] Embodiment Six

[0080] As Figure 5 shown, one end of the ball head rod 122 away from the ball head portion 1221 is threadedly connected to the transmission rod 121. By threadedly connecting one end of the ball head rod 122 away from the ball head portion 1221 to the transmission rod 121, the ball head rod 122 and the transmission rod 121 form a combined rod. By rotating the ball head rod 122 or the transmission rod 121, the overall length of the combined rod can be increased or decreased, and thus the initial horizontal position of the swing platform 112 can be adjusted. Specifically, one end of the transmission rod 121 close to the swing platform 112 is provided with a mounting hole 1211, and the inner wall of the mounting hole 1211 is provided with internal threads. One end of the ball head rod 122 away from the ball head portion 1221 is provided with external threads, and the end portion of the ball head rod 122 is threadedly connected in the mounting hole 1211.

[0081] Further, the axis of the ball head rod 122 coincides with the axis of the transmission rod 121, which is beneficial to reducing the occupied space and making the structure of the carrier swing mechanism 100 more compact.

[0082] Embodiment Seven

[0083] As Figures 1 to 3 shown, the carrier swing mechanism 100 further includes a power component 130 connected to the housing component 210. The housing component 210 is a part of the processing device 200. The power component 130 is disposed on the housing component 210, and the housing component 210 mainly plays a supporting role for the power component 130.

[0084] Furthermore, as Figure 2 and Figure 3 shown, the power component 130 includes a driving part 137. Specifically, the driving part 137 is connected to one end of the transmission component 120 away from the swing platform 112. The driving part 137 can drive the transmission component 120 to drive the swing platform 112 to swing.

[0085] It should be noted that the driving part 137 here can be a cylinder, a hydraulic cylinder or other forms of power components.

[0086] In another embodiment, as Figure 2 shown, the power component 130 further includes a second sliding component 138. The second sliding component 138 is connected to the transmission component 120. Specifically, the second sliding component 138 includes a guide rail slider structure 160 and a first connecting part 134. The power component 130 further includes a limiting part 131 connected to one end of the transmission component 120 away from the swing platform 112. The first connecting part 134 is connected to one end of the limiting part 131 away from the transmission component 120. The limiting part 131 is connected to the driving part 137. The driving part 137 drives the limiting part 131 to move, and then drives the transmission component 120 to move, thereby realizing the swing of the swing platform 112.

[0087] The connection between the first connecting part 134 and the limiting part 131. The first connecting part 134 plays a supporting role for the limiting part 131, and the first connecting part 134 assists the swing of the limiting part 131.

[0088] Furthermore, the carrier swing mechanism 100 further includes a baffle 132. The baffle 132 is connected to the housing component 210. The housing component 210 is a part of the processing device 200. The guide rail slider structure 160 includes a first part 161 and a second part 162. Specifically, the first part 161 is a slide rail, and the second part 162 is a slider. The first part 161 can be arranged on the baffle 132 through a support block 133. The second part 162 is connected to the limiting part 131 through the first connecting part 134. When the limiting part 131 moves, the relative position between the first part 161 and the second part 162 can also change, which can also be understood as the relative position between the limiting part 131 and the baffle 132 can change.

[0089] Furthermore, the driving part 137 specifically includes a first driving part 1371 and a second driving part 1372. Specifically, the first driving part 1371 can drive the transmission assembly 120 to move in a first direction, and the second driving part 1372 can drive the transmission assembly 120 to move in a second direction. Specifically, the driving part 137 drives the limiting part 131 to move, and the limiting part 131 drives the transmission assembly 120 to move, that is, the first driving part 1371 drives the limiting part 131 and then drives the transmission assembly 120 to move in the first direction, and the second driving part 1372 can drive the limiting part 131 and then drive the transmission assembly 120 to move in the second direction. It should be noted that when the transmission rod 121 in the transmission assembly 120 is arranged in the vertical direction, the first direction is vertically upward and the second direction is vertically downward, that is, the first direction is opposite to the second direction. In other words, the first driving part 1371 and the second driving part 1372 are inverted with each other, that is, the installation directions are opposite.

[0090] In another embodiment, the first driving part 1371 and the second driving part 1372 in the driving part 137 of the power assembly 130 can be understood as two cylinders, and the two cylinders are inverted with each other. Specifically, a cylinder includes a cylinder body and a telescopic rod. One end of the telescopic rod is arranged inside the cylinder body, and the other end of the telescopic rod is outside the cylinder body. When the number of cylinders is two, the movement directions of the telescopic rods in the two cylinders are opposite. The telescopic rod in the cylinder is connected to the end of the transmission rod 121 far from the swing platform 112, and thus the cylinder can drive the transmission rod 121 to move in the axial direction.

[0091] It should be noted that by controlling the telescopic rod of the cylinder or selecting cylinders of different models, the movement range of the transmission rod 121 can be adjusted, and thus the swing angle of the swing platform 112 can be adjusted. The carrier swing mechanism 100 in the present application has high versatility and can adjust the change of the swing inclination angle of the swing platform 112 according to actual production needs to meet the requirements of different occasions.

[0092] In another embodiment, as Figure 1 and Figure 2As shown, the carrier swing mechanism 100 includes a reciprocating motion mechanism (i.e., the power component 130). Specifically, the reciprocating motion mechanism (i.e., the power component 130) includes a partition plate 132 and a bottom plate 1391. The partition plate 132 is perpendicularly connected to the bottom plate 1391, and a second connection portion 135 is provided on the bottom plate 1391. Further, the reciprocating motion mechanism (i.e., the power component 130) further includes: a second sliding component 138 and a driving portion 137. Specifically, the second sliding component 138 includes a first portion 161, a second portion 162, and a first connection portion 134. The driving portion 137 includes a first driving portion 1371 and a second driving portion 1372. Two sides of the second connection portion 135 are respectively connected to the first driving portion 1371 and a connection block 1392. The second driving portion 1372 is provided on the bottom plate 1391. The first driving portion 1371 can be a first air cylinder, and the second driving portion 1372 can be a second air cylinder. The air cylinder includes a telescopic rod. The first air cylinder and the second air cylinder are installed in reverse. In other words, the telescopic rod of the second air cylinder is connected to the connection block 1392. When the telescopic rod of the second air cylinder moves, it drives the connection block 1392 to move synchronously, and then drives the first driving portion 1371 to move synchronously. The telescopic rod of the first air cylinder is fixedly connected to the limiting portion 131. Preferably, a transfer plate 136 is provided, that is, the telescopic rod of the first air cylinder is fixedly connected to the transfer plate 136, and the transfer plate 136 is then connected to the limiting portion 131. The height of the transfer plate 136 can be determined according to the actual telescopic distance of the air cylinder. When the telescopic rod of the first air cylinder moves, the limiting portion 131 moves synchronously therewith. Or when the first driving portion 1371 does not move, the telescopic rod of the second air cylinder moves, and it can also drive the limiting portion 131 to move synchronously, because the telescopic rod of the second air cylinder is fixedly connected to the connection block 1392, the connection block 1392 is fixedly connected to the second connection portion 135, the first driving portion 1371 is fixedly provided on the second connection portion 135, and the first driving portion 1371 is fixedly connected to the limiting portion 131, thereby realizing synchronous movement. By providing two air cylinders with opposite telescopic directions, the movement direction of the transmission rod 121 in the transmission component 120 can be accurately controlled, and then the transmission rod 121 can drive the swing platform 112 to swing. In addition, the two air cylinders can also increase the stroke. By changing the relative positions of the two air cylinders, the overall stroke of the two air cylinders can be adjusted, and then the swing amplitude of the swing platform 112 can be regulated.

[0093] Embodiment VIII

[0094] As Figure 1 、 Figure 3 、 Figure 6 and Figure 7As shown, the power assembly 130 further includes a limiting portion 131 and a partition plate 132. Specifically, the partition plate 132 is connected to the housing assembly 210 in the processing device 200. It should be noted that the partition plate 132 and the housing assembly 210 can be relatively fixed by welding, which is convenient for processing; or, the partition plate 132 and the housing assembly 210 are detachably connected, which is convenient for installation and disassembly; or, the partition plate 132 and the housing assembly 210 are of an integral structure. Compared with the post-processing method, it has good mechanical properties, higher connection strength, and is beneficial to reducing the number of parts, thereby reducing the installation process and improving the installation efficiency.

[0095] Further, a first lifting movable opening 1321 is provided on the partition plate 132. The limiting portion 131 is connected to the end of the transmission rod 121 away from the swing platform 112, and the limiting portion 131 passes through the first lifting movable opening 1321. During the axial movement of the transmission rod 121, the transmission rod 121 can be lifted and lowered along with the movement of the limiting portion 131, and the limiting portion 131 can be lifted and lowered relative to the first lifting movable opening 1321. By the cooperation of the limiting portion 131 and the first lifting movable opening 1321, the axial movement range of the transmission rod 121 can be restricted to ensure that the transmission rod 121 can move within a reasonable range.

[0096] In another embodiment, as Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 6 and Figure 7 shown, the carrier swing mechanism 100 further includes a cover plate 150. The cover plate 150 is connected to the limiting portion 131 and is also connected to the transmission rod 121. It can be understood that the limiting portion 131 and the transmission rod 121 are connected through the cover plate 150.

[0097] Specifically, the cover plate 150 is bolted to the limiting portion 131, and the cover plate 150 is bolted to the transmission rod 121. The limiting portion 131 and the transmission rod 121 are detachably connected through the cover plate 150, which is convenient for installation and disassembly and is beneficial for the staff to perform maintenance and replacement.

[0098] Embodiment Nine

[0099] As Figure 6 and Figure 7 shown, the transmission assembly 120 further includes a backing plate 125 and two sliding guide rails 124. Specifically, the backing plate 125 is connected to the housing assembly 210 in the processing device 200. A second lifting movable opening 1251 is provided on the backing plate 125. The second lifting movable opening 1251 is disposed opposite to the first lifting movable opening 1321, and the limiting portion 131 passes through the second lifting movable opening 1251. In other words, the limiting portion 131 passes through the two lifting movable openings at the same time.

[0100] Further, two sliding guide rails 124 are provided on the backing plate 125, and the two sliding guide rails 124 are located on both sides of the second lifting and moving opening 1251. The sliding guide rails 124 and the backing plate 125 may be of an integral structure. Compared with the post-processing method, the mechanical properties are better, the connection strength is higher, and it is beneficial to reduce the number of components. Further, the length direction of the sliding guide rails 124 is consistent with the axial direction of the transmission rod 121, and the limiting part 131 can cooperate with the sliding guide rails 124, and the limiting part 131 can slide along the length direction of the sliding guide rails 124. By using the cooperation of the limiting part 131 and the sliding guide rails 124, it can be ensured that the transmission rod 121 moves axially, and the movement process is smoother and more stable.

[0101] In another embodiment, the first sliding assembly 128 includes a connecting plate 126 and a sliding plate 127. The connecting plate 126 is provided between the two sliding guide rails 124, and the connecting plate 126 is connected to the backing plate 125. Square openings are provided on both the connecting plate 126 and the backing plate 125. The height of the square opening determines the up and down movement height of the limiting part 131. In addition, the height of the first lifting and moving opening 1321 on the partition plate 132 should be greater than or equal to the height of the square opening. The cross-section of the connecting plate 126 and the cross-sections of the two sliding guide rails 124 form a C-shaped structure. The sliding plate 127 is provided inside the C-shaped structure. The sliding plate 127 is provided with a mounting opening, the size of which should be adapted to the limiting part 131. The sliding plate 127 is connected to the limiting part 131, and the sliding plate 127 can move together with the limiting part 131. The sliding plate 127 plays a blocking role. When the limiting part 131 moves, the sliding plate 127 moves accordingly. In the semiconductor processing equipment as a whole, the working areas of the swinging assembly and the power assembly can be separated to maintain the cleanliness of the working area.

[0102] It should be noted that the sliding guide rails 124 can be made of PTFE material with corrosion resistance, wear resistance and self-lubrication.

[0103] Embodiment Ten

[0104] As Figure 2 and Figure 3 shown, the carrier swinging mechanism 100 further includes a position detection assembly 140. Specifically, the position detection assembly 140 includes a magnetic switch 141 and a home position detection assembly 142. The power assembly 130 includes a driving part 137, and the driving part 137 includes a first driving part 1371 and a second driving part 1372. The driving part 137 can be a cylinder. It can be understood that the first driving part 1371 is the first cylinder and the second driving part 1372 is the second cylinder. The magnetic switch 141 is provided on the cylinder for detecting the position of the cylinder.

[0105] Furthermore, the original position detection component 142 includes a detection element 1421 and a detection piece 1422. Specifically, the detection element 1421 is disposed on the partition plate 132 or the support block 133 connected to the partition plate 132, and the detection piece 1422 is disposed on the connecting portion connected to the driving portion 137. The original position detection component 142 is used to detect the state when the cylinder is not moving. When the cylinder is not moving, the swing platform 112 is in a horizontal state, which is the original position state. By setting the position detection component 140, the carrier swing mechanism 100 can achieve automatic swinging.

[0106] Specifically, the power component 130 includes two cylinders. By the coordinated use of the two cylinders, the transmission rod 121 is lifted and lowered, thereby driving the swing platform 112 to swing.

[0107] When the swing platform 112 maintains a horizontal state, it is the original position state, and both cylinders have no action.

[0108] In the original position state, if the swing platform 112 is swung upward, the specific operation is as follows: the second cylinder does not act, the telescopic rod of the first cylinder extends, driving the transmission component 120 and then driving the swing platform 112 to lift upward. After reaching the preset position, according to the process parameter settings, the state is maintained or the reverse action is performed to reset to the original position state;

[0109] In the original position state, if the swing platform 112 is swung downward, the specific operation is as follows: the first cylinder does not act, the telescopic rod of the second cylinder extends, driving the transmission component 120 and then driving the swing platform 112 to descend. After reaching the preset position, according to the process parameter settings, the state is maintained or the reverse action is performed to reset to the original position state;

[0110] The original position state is the basic state, and the other two actions (the swing platform 112 swings upward or downward) are completed based on this. For example: when swinging from downward to upward, it must pass through the original position state. In the original position state, the magnetic switch 141 detects the position of the telescopic rod of the cylinder and judges it together with the detection result of the original position detection component 142:

[0111] If the judgment is normal, that is, the photoelectric switch in the original position detection component 142 can detect the induction piece, and at the same time the magnetic switch 141 can detect the position of the telescopic rod of each cylinder, the carrier swing mechanism enters the next action;

[0112] If the judgment is abnormal, that is, the photoelectric switch in the original position detection component 142 cannot detect the induction piece, or the magnetic switch 141 cannot detect the position of the telescopic rod of each cylinder, an alarm is given, and the carrier swing mechanism 100 stops, waiting for the abnormality to be processed and then reset.

[0113] When cooperating with automation, in the original position state: If no abnormality is judged, the mechanism proceeds to the next action, and the automated manipulator comes to grab the wafer cassette; If an abnormality is judged, an alarm is given, the carrier swing mechanism 100 stops, and after manual troubleshooting and confirmation of reset, the automated manipulator comes to grab the wafer cassette.

[0114] Embodiment XI

[0115] As Figure 8 As shown, a processing device 200 provided by an embodiment of the present invention includes a housing assembly 210 and the carrier swing mechanism 100 in any of the above embodiments, and the carrier swing mechanism 100 is connected to the housing assembly 210. Specifically, a part of the power assembly 130 in the carrier swing mechanism 100 is connected to the housing assembly 210, and the partition plate 132 in the carrier swing mechanism 100 is connected to the housing assembly 210. In addition, the swing assembly 110 in the carrier swing mechanism 100 is disposed in the processing tank 240. The processing tank 240 can be a cleaning tank or a drying tank. When the processing tank 240 is a cleaning tank, the cleaning tank can hold a cleaning liquid to clean the workpiece to be processed. When the processing tank 240 is a drying tank, a drying device is provided in the drying tank to dry the workpiece to be processed.

[0116] The swing platform 112 in the swing assembly 110 can swing relative to the processing tank 240, so as to realize the dynamic cleaning or drying of the workpiece to be processed 1132.

[0117] Furthermore, the housing assembly 210 in the processing device 200 mainly functions to support and connect the carrier 113. The housing assembly 210 can be connected by corrosion-resistant metal plates.

[0118] In another embodiment, the housing assembly 210 is divided into a first area 220 and a second area 230. By dividing the inside of the housing assembly 210 into two areas, namely the first area 220 and the second area 230, it is beneficial to separate the working area and the assembly area, and improve the compactness of the overall structure of the processing device 200.

[0119] Furthermore, the first area 220 is the working area, and the second area 230 is the assembly area. The swing assembly 110 in the carrier swing mechanism 100 is arranged in the first area 220, and the power assembly 130 in the carrier swing mechanism 100 is arranged in the second area 230. Since the partition plate 132 in the carrier swing mechanism 100 is connected to the housing assembly 210, the partition plate 132 divides the inside of the housing assembly 210 into the first area 220 and the second area 230, which is beneficial to improve the cleanliness of each area.

[0120] In another embodiment, the processing device 200 further includes a processing tank 240 disposed at the bottom of the housing assembly 210. The swing platform 112 in the carrier swing mechanism 100 is disposed in the processing tank 240, and the workpiece to be processed 1132 is placed on the swing platform 112. During the working process, the swing platform 112 can swing relative to the processing tank 240, thereby realizing dynamic cleaning or drying of the workpiece to be processed 1132, improving the cleaning or drying effect and the cleaning or drying efficiency.

[0121] According to the embodiments of the carrier swing mechanism and the processing device of the present invention, the power assembly can drive the swing platform to swing through the transmission assembly, that is, the swing platform can swing relative to the processing tank, and the workpiece to be processed placed on the swing platform can make a reciprocating change in the tilt angle as required, so that the workpiece to be processed can be tilted in a preset direction in the processing tank, thereby achieving the purpose of dynamic cleaning. This method can largely eliminate the cleaning and drying dead zones and improve the cleaning effect and cleaning efficiency.

[0122] In the present invention, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance; the term "plurality" refers to two or more, unless otherwise clearly defined. Terms such as "installed", "connected", "connected", and "fixed" should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; "connected" can be a direct connection or an indirect connection through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0123] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "front", "rear", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or unit referred to must have a specific direction, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation of the present invention.

[0124] In the description of this specification, the description of terms such as "one embodiment", "some embodiments", "specific embodiments", etc. means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0125] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A carrier swing mechanism, characterized in that, comprising: A swing platform (112) is arranged in a processing tank (240) of a processing device, and a swing shaft (1121) is arranged at the bottom of the swing platform (112); A power assembly (130); A transmission assembly (120), both ends of the transmission assembly (120) are respectively connected to the power assembly (130) and the swing platform (112), wherein, the power assembly (130) is used to drive the swing platform (112) to swing around the swing shaft (1121) through the transmission assembly (120); The transmission assembly (120) includes: A transmission rod (121), one end of the transmission rod (121) is rotatably connected to the swing platform (112), and the other end of the transmission rod (121) is connected to the power assembly (130); The power assembly (130) drives the transmission rod (121) to move axially, thereby driving the swing platform (112) to swing reciprocally; The power assembly (130) includes: A driving part (137), the driving part (137) is connected to the end of the transmission assembly (120) far from the swing platform (112), and is used to drive the transmission assembly (120) to drive the swing platform (112) to swing; The power assembly (130) further includes a second sliding assembly (138) connected to the transmission assembly (120); the power assembly (130) further includes a limiting part (131) connected to the end of the transmission assembly (120) far from the swing platform (112); a first connecting part (134) of the second sliding assembly (138) is connected to the end of the limiting part (131) far from the transmission assembly (120); The driving part (137) includes a first driving part (1371) and a second driving part (1372); the first driving part (1371) drives the limiting part (131), and thereby drives the transmission assembly (120) to move in a first direction; the second driving part (1372) drives the limiting part (131), and thereby drives the transmission assembly (120) to move in a second direction.

2. The carrier swing mechanism according to claim 1, characterized in that, The transmission assembly (120) further includes: A ball head rod (122), a ball head portion (1221) is formed at one end of the ball head rod (122), and the end of the ball head rod (122) far from the ball head portion (1221) is connected to the end of the transmission rod (121) close to the swing platform (112); A mating part (123) is arranged on the swing platform (112), and a ball socket (1231) is arranged on the mating part (123), and the ball head portion (1221) is mated with the ball socket (1231).

3. The carrier swing mechanism according to claim 1, characterized in that, The transmission assembly (120) further includes: A first sliding assembly (128), the first sliding assembly (128) is used to connect with a housing assembly (210); A sliding plate (127), the sliding plate (127) is connected to the transmission rod (121) and is adapted to the first sliding assembly (128), and the sliding plate (127) slides relative to the first sliding assembly (128).

4. The carrier swing mechanism according to any one of claims 1 to 3, characterized in that, further comprising: at least one swing support portion (111), the swing support portion (111) is provided with a swing groove (1111), and the swing shaft (1121) cooperates with the swing groove (1111).

5. The carrier swing mechanism according to any one of claims 1 to 3, characterized in that, further comprising: a position detection assembly (140), including: a magnetic switch (141), provided on the power assembly (130); a home position detection assembly (142), provided on the power assembly (130).

6. A processing device, characterized in that, comprising: a housing assembly (210); the carrier swing mechanism according to any one of claims 1 to 5, and the carrier swing mechanism is connected to the housing assembly (210).

7. The processing device according to claim 6, characterized in that, the interior of the housing assembly (210) is divided into a first region (220) and a second region (230), the swing platform (112) in the carrier swing mechanism is provided in the first region (220), and the power assembly (130) in the carrier swing mechanism is provided in the second region (230).

8. The processing device according to claim 6 or 7, characterized in that, further comprising: a processing tank (240), provided at the bottom of the housing assembly (210), and the swing platform (112) in the carrier swing mechanism is provided in the processing tank (240).

Images