Cutting tool with a base

Abstract

The present invention provides a cutter with a base, the base and the cutter being firmly bonded. The cutter with the base has a disc-shaped base and a ring-shaped cutter having an opening in the center, the base having a ring-shaped protrusion protruding from the front surface of the base, the cutter having a recess formed from the side surface exposed at the opening toward the outer peripheral edge side, the base and the cutter being attached in a state where the protrusion is fitted in the opening by means of a first adhesive attached to the front surface of the base, and being bonded by a second adhesive filled in the recess and permeated into the gap between the protrusion and the side surface.

Description

TECHNICAL FIELD

[0001] The present application relates to a blade-type tool for cutting of a workpiece. BACKGROUND

[0002] A plurality of device chips each having a device are manufactured by dicing a semiconductor wafer on which a plurality of devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integrations) are formed. In addition, a plurality of package devices each having a device chip covered with a molding resin are manufactured by dicing a package substrate on which a plurality of device chips are covered with a sealing material (molding resin) formed of a resin. The device chips or the package devices are mounted on various electronic apparatuses typified by mobile phones and personal computers.

[0003] A cutting apparatus is used in dicing of a semiconductor wafer or a package substrate. The cutting apparatus has a holding table that holds a workpiece and a cutting unit that cuts the workpiece with a ring-type tool. The tool is rotated and cut into the workpiece held by the holding table, thereby cutting and dicing the workpiece.

[0004] As a tool for cutting of a workpiece, a hub-type tool having a cutting edge obtained by fixing abrasive grains formed of diamond or the like with nickel plating or the like or a gasket-type tool composed of a ring-type cutting edge obtained by fixing abrasive grains with a bonding material formed of metal, ceramic, resin or the like is used. In cutting of a workpiece, a suitable tool is appropriately selected according to the material or the like of the workpiece.

[0005] The hub-type tool is a tool mounted on a tool mounting seat fixed to a front end portion of a rotating shaft (spindle) of a cutting unit, which is integrally formed with a disc-shaped base and a cutting edge formed along an outer periphery of the base. In addition, the gasket-type tool is mounted on the front end portion of the rotating shaft by a flange portion (fixing flange) of the tool mounting seat and an attachment / detachment flange that sandwiches the tool together with the fixing flange.

[0006] As described above, the mounting method of the hub-type tool and the gasket-type tool to the rotating shaft is different, and the shape, size or the like of the tool mounting seat fixed to the rotating shaft is also different according to the type of the tool. Therefore, for example, when the hub-type tool mounted on the front end portion of the rotating shaft is replaced with the gasket-type tool, the tool mounting seat also needs to be replaced, and the replacement work of the tool becomes complicated.

[0007] Therefore, in recent years, a blade having a base (for example, refer to Patent Document 1) in which a grommet-type blade is bonded to a disc-shaped base has been proposed. When the blade having a base is used, the grommet-type blade can be installed to a blade mounting seat for a hub-type blade, and the replacement work of the blade can be simplified.

[0008] Patent Document 1: Japanese Patent Application Publication No. 2012-135833

[0009] The blade having a base described above is manufactured by integrating a separately formed base and a blade. Specifically, after an adhesive is applied to one face of the base, the one face of the base is opposed to one face of the blade, and the base and the blade are adhered to each other by the adhesive. Thus, the base and the blade are joined and integrated.

[0010] In the blade having a base obtained through the above-described process, the blade is attached to only one face of the base, but in this state, the strength of the joint of the base and the blade is sometimes insufficient. In particular, in the case where a thicker blade is fixed to the base, it is difficult to firmly integrate the base and the blade by using only the adhesive applied to one face of the base in many cases. SUMMARY

[0011] The present application was achieved in view of the above-described problems, and an object thereof is to provide a blade having a base in which a base and a blade are firmly bonded.

[0012] According to one embodiment of the present application, a blade having a base is provided, in which the blade having a base has a disc-shaped base and a ring-shaped blade having an opening portion in the center, the base has a ring-shaped protrusion protruding from a front face of the base, the blade has a recess formed from a side face exposed at the opening portion toward an outer peripheral edge side, the base and the blade are adhered in a state in which the protrusion is fitted in the opening portion by a first adhesive attached to the front face of the base, and the base and the blade are joined by a second adhesive filled in the recess and permeated into a gap between the protrusion and the side face.

[0013] Further, it is preferable that a groove for filling the first adhesive is formed in a region of the front face side of the base in which the protrusion is not formed. Further, it is preferable that the material of the first adhesive is the same as that of the second adhesive, or the viscosity of the second adhesive is lower than that of the first adhesive.

[0014] In the blade having a base of one embodiment of the present application, the base and the blade are adhered by a first adhesive attached to a front face of the base, and the base and the blade are joined by a second adhesive filled in a recess of the blade and permeated into a gap between a protrusion of the base and a side face of the blade. Thus, the blade having a base in which the base and the blade are firmly bonded is obtained. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 is an exploded perspective view showing the tool with the base.

[0016] Figure 2 is a sectional view showing the state where the base is about to be combined with the tool.

[0017] Figure 3 is a sectional view showing the tool with the base, in which the base has been combined with the tool.

[0018] Figure 4 is a sectional view showing the tool with the base, in which the recess of the tool is filled with the adhesive.

[0019] Figure 5 is a sectional view showing the tool with the base, in which the base having the groove has been combined with the tool.

[0020] Figure 6 is a perspective view showing the cutting device.

[0021] Figure 7 is a perspective view showing the cutting unit.

[0022] Explanation of Reference Numerals

[0023] 2: tool with base; 4: base; 4a: first face (front face); 4b: second face (back face); 4c: outer peripheral edge (outer peripheral face); 4d: opening portion; 4e: protruding portion; 4f: outer peripheral face; 4g: groove; 6: tool; 6a: first face (front face); 6b: second face (back face); 6c: outer peripheral edge (outer peripheral face); 6d: opening portion; 6e: side face (inner peripheral face); 6f: recess; 8: second adhesive; 10: first adhesive (adhesive for bonding); 20: cutting device; 22: base; 24: cover; 24a: front surface; 26: cutting unit; 28: holding stage (chuck stage); 30: cassette elevator; 32: cassette; 34: monitor; 40: rotating shaft (spindle); 42: housing; 44: tool mounting seat; 46: flange portion; 46a: front face; 46b: protruding portion; 46c: front end face; 48: support shaft; 48a: threaded portion; 50: fixing nut; 50a: opening portion; 11: workpiece. DETAILED DESCRIPTION

[0024] Hereinafter, an embodiment of the present application will be described with reference to the drawings. First, a structure example of the tool with the base according to the present embodiment will be described. Figure 1 is an exploded perspective view showing the tool with the base 2.

[0025] The tool 2 with a table has a table 4 in a disc shape and a tool 6 in a ring shape. The table 4 is formed of a metal such as an aluminum alloy, for example, and has a first face (front face) 4a and a second face (back face) 4b which are substantially parallel to each other, and an outer periphery (outer peripheral face) 4c. Further, a cylindrical opening portion 4d which penetrates the table 4 from the first face 4a to the second face 4b is provided in the center of the table 4.

[0026] On the first face 4a side of the table 4, a ring-shaped protrusion 4e which protrudes from the first face 4a toward the tool 6 side is provided in a manner of surrounding the opening portion 4d. The protrusion 4e is formed in a prescribed width along the contour of the opening portion 4d, and has an outer peripheral face 4f which is substantially perpendicular to the first face 4a.

[0027] The tool 6 is formed in a ring shape by fixing abrasive grains which are composed of diamond, cubic boron nitride (cBN), or the like, with a bonding material which is formed of a metal, ceramic, resin, or the like. Further, the material of the abrasive grains and the bonding material which are included in the tool 6 is appropriately selected in accordance with the specifications or the like of the tool 2 with a table.

[0028] The tool 6 has a first face (front face) 6a and a second face (back face) 6b which are substantially parallel to each other, and an outer periphery (outer peripheral face) 6c which connects the first face 6a and the second face 6b. Further, a cylindrical opening portion 6d which penetrates the tool 6 from the first face 6a to the second face 6b is provided in the center of the tool 6. The opening portion 6d demarcates a side face (inner peripheral face) 6e of the tool 6 which is exposed at the opening portion 6d.

[0029] Further, the tool 6 has a plurality of recesses 6f which are formed from the side face 6e of the tool 6 toward the outer periphery 6c side. The plurality of recesses 6f are formed in a manner of from the first face 6a to the second face 6b of the tool 6, and are arranged at substantially equal intervals along the circumferential direction of the side face 6e. In the present embodiment, an example in which eight recesses 6f are formed on the tool 6 is shown. Figure 1

[0030] The tool 2 with a table in which the table 4 and the tool 6 are integrated is obtained by bonding the table 4 and the tool 6. Figure 2 is a cross-sectional view which shows a state in which the table 4 and the tool 6 are about to be bonded.

[0031] When the table 4 and the tool 6 are bonded, first, a first adhesive (adhesive for bonding) is attached to the first face 4a of the table 4. Specifically, the first adhesive is attached to a region in the first face 4a of the table 4 which is located on the radial direction outer side of the table 4 than the protrusion 4e. For example, a sheet-shaped adhesive (adhesive sheet) can be attached to the first face 4a, or an epoxy resin-based adhesive or the like can be applied to the first face 4a. Further, the first adhesive can be attached to the tool 6.

[0032] ​Then, the first surface 4a of the base 4 is opposed to the first surface 6a of the tool 6, and the base 4 and the tool 6 are attached to each other by the first adhesive. Thus, the base 4 and the tool 6 are joined.

[0033] Here, the protrusion 4e of the base 4 has a shape corresponding to the opening portion 6d of the tool 6. Specifically, the protrusion 4e is formed such that the diameter of the outer peripheral surface 4f of the protrusion 4e is substantially equal to the diameter of the side surface 6e of the tool 6, and the shape of the outer peripheral surface 4f substantially coincides with the shape of the side surface 6e. Further, the base 4 and the tool 6 are attached in such a manner that the protrusion 4e of the base 4 is fitted into the opening portion 6d of the tool 6. Thus, the base 4 and the tool 6 are arranged in concentric circles with each other, and the alignment of the base 4 and the tool 6 is performed.

[0034] In addition, in order to smoothly insert the protrusion 4e into the opening portion 6d of the tool 6, the diameter of the outer peripheral surface 4f of the protrusion 4e is set to be slightly smaller than the diameter of the side surface 6e of the tool 6. However, in order to achieve high-precision alignment of the base 4 and the tool 6, it is preferable that the difference between the diameter of the outer peripheral surface 4f of the protrusion 4e and the diameter of the side surface 6e of the tool 6 be 100 μm or less.

[0035] Figure 3 is a cross-sectional view of the base-equipped tool 2 showing that the base 4 and the tool 6 have been joined. The base 4 and the tool 6 are joined and integrated in a state in which the protrusion 4e of the base 4 is fitted into the opening portion 6d of the tool 6, thereby obtaining the base-equipped tool 2. In addition, the diameter of the outer peripheral edge 6c of the tool 6 is larger than the diameter of the outer peripheral edge 4c of the base 4. Therefore, when the base 4 and the tool 6 are joined, the outer peripheral edge 6c of the tool 6 is arranged at a position on the outer radial side of the outer peripheral edge 4c of the base 4, and is in a state of protruding from the outer peripheral edge 4c.

[0036] In addition, it is preferable that the height (amount of protrusion from the first surface 4a) of the protrusion 4e be equal to or less than the thickness of the tool 6. In this case, even if the protrusion 4e is inserted into the opening portion 6d of the tool 6, the protrusion 4e does not protrude from the second surface 6b side of the tool 6. Thus, when the base-equipped tool 2 is mounted on the tool mounting seat 44 (see FIG. 6) fixed to the rotary shaft 40, it is possible to prevent the protrusion 4e from coming into contact with the tool mounting seat 44 and interfering with the mounting of the base-equipped tool 2. Figure 7

[0037] Next, the recessed portion 6f of the tool 6 attached to the base 4 is filled with the second adhesive (filling adhesive). Figure 4 is a cross-sectional view of the base-equipped tool 2 showing that the recessed portion 6f of the tool 6 is filled with the second adhesive 8. As the second adhesive 8, for example, an acrylic resin-based or an epoxy resin-based adhesive is used.

[0038] ​In addition, the material of the second adhesive 8 can be the same as or different from the material of the first adhesive used in the attachment of the abutment 4 and the tool 6. In the case where the materials of the first and second adhesives are different, it is preferable to use, as the second adhesive 8, an adhesive having a lower viscosity and higher flowability than the first adhesive.

[0039] Here, a minute gap of, for example, 50 μm or less is formed between the convex portion 4e of the abutment 4 and the side surface 6e of the tool 6. Also, when the second adhesive 8 is filled in the recessed portion 6f, the second adhesive 8 flows in the gap between the outer peripheral surface 4f of the convex portion 4e and the side surface 6e of the tool 6 by capillary phenomenon, so that the second adhesive 8 penetrates into the gap. As a result, the outer peripheral surface 4f and the side surface 6e are joined by the second adhesive 8 filled in the gap between the outer peripheral surface 4f and the side surface 6e.

[0040] When the second adhesive 8 penetrates into the gap between the convex portion 4e and the side surface 6e, not only the first surface 4a of the abutment 4 and the first surface 6a of the tool 6 are joined by the first adhesive, but also the convex portion 4e and the side surface 6e are joined by the second adhesive 8. Thus, the abutment 4 and the tool 6 are firmly joined.

[0041] In particular, in the case where the tool 6 is thick, the height (amount of protrusion) of the convex portion 4e of the abutment 4 is increased in accordance with the thickness of the tool 6, so that the joining area of the outer peripheral surface 4f and the side surface 6e can be enlarged. Thus, the abutment 4 and the tool 6 are more firmly joined. For example, the height of the convex portion 4e is set to be substantially the same as the thickness of the tool 6.

[0042] The number, position (interval), shape, size, etc. of the recessed portions 6f in which the second adhesive 8 is filled are set in such a manner that the second adhesive 8 filled in the recessed portions 6f penetrates into the entire area of the gap between the convex portion 4e and the side surface 6e by capillary phenomenon. However, if the recessed portions 6f are too large, it can be possible to affect the strength of the tool 6. Therefore, it is preferable that the depth of the recessed portions 6f be ¼ or less of the width (distance between the outer peripheral edge 6c and the side surface 6e) of the tool 6.

[0043] As described above, in the tool with abutment 2 of the present embodiment, the abutment 4 and the tool 6 are attached by the first adhesive attached to the first surface 4a of the abutment 4, and are joined by the second adhesive filled in the recessed portions 6f of the tool 6 and penetrating into the gap between the convex portion 4e of the abutment 4 and the side surface 6e of the tool 6. Thus, the tool with abutment 2 in which the abutment 4 and the tool 6 are firmly joined is obtained.

[0044] Further, in the above, the case where the second adhesive 8 is filled into the recessed portion 6f of the tool 6 after the abutment of the base 4 and the tool 6 by means of the first adhesive is described, but the method of joining the base 4 and the tool 6 is not limited thereto. For example, the adhesive can be filled into the recessed portion 6f of the tool 6 at the time of abutment of the base 4 and the tool 6.

[0045] Specifically, at the time of abutment of the base 4 and the tool 6, a larger amount of the first adhesive is applied to a region (first region) of the first face 4a of the base 4 that overlaps the recessed portion 6f of the tool 6 than to other regions (second region) of the first face 4a. When the base 4 and the tool 6 are abutted in this state, the first adhesive applied to the first region is filled into the recessed portion 6f of the tool 6. Further, the first adhesive filled into the recessed portion 6f flows in the gap between the outer peripheral face 4f of the convex portion 4e and the side face 6e of the tool 6 by capillary phenomenon, so the first adhesive permeates into the gap.

[0046] In the case of using the above-described method, a part of the first adhesive corresponds to the second adhesive 8 illustrated in FIG. 2. Therefore, the material of the first adhesive and the material of the second adhesive 8 are the same. Further, in order to make the first adhesive easily permeate into the gap between the outer peripheral face 4f of the convex portion 4e and the side face 6e of the tool 6, it is preferable to use an adhesive having a higher flowability (for example, an acrylic resin-based or an epoxy resin-based adhesive) as the first adhesive. Further, the amount of the first adhesive applied to the first region of the first face 4a of the base 4 is appropriately adjusted so that the first adhesive is filled into the recessed portion 6f of the tool 6. Figure 4

[0047] Further, in the above, the case where the first adhesive is applied to the first face 4a of the base 4 that is formed in a planar shape at the time of abutment of the base 4 and the tool 6 is described. However, a groove that fills the first adhesive can be formed on the base 4. Figure 5 is a cross-sectional view of the tool 2 with base that shows the base 4 with the groove 4g formed thereon and the tool 6 joined thereto.

[0048] In Figure 5 the first face 4a of the base 4, a ring-shaped groove 4g is formed. For example, the groove 4g is formed from the first face 4a toward the second face 4b in a manner of surrounding the convex portion 4e. The outer peripheral edge (one end portion in the width direction of the groove 4g) of the groove 4g does not reach the outer peripheral edge 4c of the base 4, and the inner peripheral edge (the other end portion in the width direction of the groove 4g) of the groove 4g reaches the outer peripheral face 4f of the convex portion 4e.

[0049] Further, the specific shape of the groove 4g is not limited. For example, on the base 4, one strip-shaped groove 4g can be continuously formed along the circumferential direction of the base 4, or a plurality of grooves 4g can be formed at substantially equal intervals along the circumferential direction of the base 4. ​

[0050] When the abutment 4 and the tool 6 are abutted (refer to Figure 2 ), the first adhesive (abutment adhesive) 10 is filled in the groove 4g. The amount of the first adhesive 10 is adjusted according to the volume of the groove 4g, and the surface of the first adhesive 10 filled in the groove 4g is positioned on substantially the same plane as the first face 4a of the abutment 4.

[0051] Here, in the region of the groove 4g overlapping the recess 6f of the tool 6, the first adhesive 10 is applied in a manner protruding from the first face 4a of the abutment 4. The amount of the first adhesive 10 applied to this region is adjusted so that the volume of the first adhesive 10 protruding from the first face 4a of the abutment 4 is equal to or greater than the volume of the recess 6f of the tool 6.

[0052] In this state, when the first face 4a side of the abutment 4 and the first face 6a side of the tool 6 are abutted, the abutment 4 and the tool 6 are joined by the first adhesive 10, and the first adhesive 10 protruding from the first face 4a of the abutment 4 is filled into the recess 6f of the tool 6. Further, the first adhesive 10 filled into the recess 6f flows in the gap between the outer peripheral face 4f of the convex portion 4e and the side face 6e of the tool 6 by capillary phenomenon, so the first adhesive 10 permeates into this gap.

[0053] As described above, when the first adhesive 10 is filled inside the groove 4g, the contact area of the first adhesive 10 with the abutment 4 increases compared to the case where the first adhesive 10 is applied on the first face 4a of the abutment 4 without the groove 4g. Thus, the adhesion of the first adhesive 10 to the abutment 4 can be enhanced. Further, by filling the first adhesive 10 into the groove 4g, when the abutment 4 and the tool 6 are abutted, the first adhesive 10 can be prevented from being pressed and expanded to overflow to the outside of the outer peripheral edge 4c of the abutment 4.

[0054] However, the region where the groove 4g is formed can be appropriately changed. For example, the groove 4g can also be formed in a manner that the inner peripheral edge of the groove 4g does not overlap the recess 6f of the tool 6. In this case, after the first adhesive 10 is filled in the groove 4g and the abutment 4 and the tool 6 are abutted, the second adhesive 8 is additionally filled in the recess 6f of the tool.

[0055] The above tool with abutment 2 is attached to a cutting device, and cuts a workpiece. Hereinafter, a structure example of a cutting device that cuts a workpiece using the tool with abutment 2 will be described. Figure 6 is a perspective view showing a cutting device 20 that cuts a workpiece 11.

[0056] As an example of the workpiece 11 subjected to cutting by the cutting apparatus 20, a semiconductor wafer or a CSP (Chip Size Package) substrate, a QFN (Quad Flat Non-leaded Package) substrate, or the like on which a plurality of ICs, LSIs, or the like are formed can be given. However, the kind, material, shape, configuration, size, or the like of the workpiece 11 is not limited. For example, the workpiece 11 can also be a disc-shaped or cuboid-shaped substrate or the like formed of glass, sapphire, ceramic, resin, metal, or the like.

[0057] The cutting apparatus 20 has a base 22 that supports each structural element constituting the cutting apparatus 20, and a cover 24 that covers the upper surface side of the base 22 is provided above the base 22. A space (processing space) in which the workpiece 11 is processed is formed inside the cover 24, and a cutting unit 26 in which the tool 2 with the base is mounted is disposed in the space. The cutting unit 26 is connected to a moving mechanism (not shown) that moves the cutting unit 26 in the Y-axis direction (indexing feed direction, front-rear direction) and the Z-axis direction (vertical direction, up-down direction).

[0058] A holding stage (chuck stage) 28 that holds the workpiece 11 is provided below the cutting unit 26. The upper surface of the holding stage 28 constitutes a holding surface that holds the workpiece 11, and the holding surface is connected to a suction source (not shown) such as an ejector via a suction path (not shown) formed in the inside of the holding stage 28. In a state in which the workpiece 11 is disposed on the holding surface of the holding stage 28, when the negative pressure of the suction source is applied to the holding surface, the workpiece 11 is held by the holding stage 28 by suction.

[0059] The holding stage 28 is connected to a moving mechanism (not shown) that moves the holding stage 28 in the X-axis direction (processing feed direction, left-right direction). In addition, the holding stage 28 is connected to a rotating mechanism (not shown) that rotates the holding stage 28 about a rotation axis that is substantially parallel to the Z-axis direction.

[0060] A cassette elevator 30 is provided at the corner of the front of the base 22. A cassette 32 that can accommodate a plurality of workpieces 11 is placed on the upper surface of the cassette elevator 30. The cassette elevator 30 is configured to be able to be raised and lowered, and adjusts the height (position in the Z-axis direction) of the cassette 32 in such a manner that the carrying-out of the workpieces 11 from the cassette 32 or the carrying-in of the workpieces 11 to the cassette 32 is appropriately performed. In addition, a monitor 34 that is a touch panel type monitor that becomes a user interface is provided on the front surface 24a side of the cover 24.

[0061] Each structural element (the cutting unit 26, the moving mechanism connected to the cutting unit 26, the holding table 28, the moving mechanism and the rotating mechanism connected to the holding table 28, the cassette lifter 30, the monitor 34, and the like) constituting the cutting apparatus 20 is connected to a control unit (not shown). The control unit is constituted by a computer or the like, and controls the operation of the structural elements of the cutting apparatus 20.

[0062] Figure 7 is a perspective view showing the cutting unit 26. The cutting unit 26 has a cylindrical rotating shaft (spindle) 40 disposed along the Y-axis direction. The rotating shaft 40 is housed in a cylindrical housing 42. The front end portion (one end portion) of the rotating shaft 40 is exposed to the outside of the housing 42, and a tool mounting seat 44 is fixed to the front end portion of the rotating shaft 40. In addition, a rotating drive source (not shown) such as a motor that rotates the rotating shaft 40 is connected to the base end portion (the other end side) of the rotating shaft 40.

[0063] The tool mounting seat 44 has a flange portion 46 in a disc shape and a cylindrical support shaft 48 protruding from the center of the front surface 46a of the flange portion 46. An annular protrusion 46b protruding from the front surface 46a is provided on the front surface 46a side of the outer peripheral portion of the flange portion 46. The protrusion 46b has a front end surface 46c at the front end, which is formed substantially parallel to the front surface 46a.

[0064] A threaded portion 48a is formed on the outer peripheral surface of the front end portion of the support shaft 48, and an annular fixing nut 50 is fastened to the threaded portion 48a. A cylindrical opening portion 50a that penetrates the fixing nut 50 in the thickness direction is formed in the center of the fixing nut 50. The opening portion 50a is formed to have substantially the same diameter as the support shaft 48, and a threaded groove corresponding to the threaded portion 48a of the support shaft 48 is provided on the opening portion 50a.

[0065] When the support shaft 48 is inserted into the opening portion 4d of the base 4 of the tool with base 2, the tool with base 2 is mounted to the tool mounting seat 44. In this state, when the fixing nut 50 is fastened to the threaded portion 48a of the support shaft 48, the tool 6 is sandwiched by the first surface 4a (see Figure 1 ) of the base 4 and the front end surface 46c of the protrusion 46b of the flange portion 46. In this way, the tool with base 2 is fixed to the front end portion of the rotating shaft 40.

[0066] In the state where the tool with base 2 is mounted to the cutting unit 26, when the rotating shaft 40 is rotated by the rotating drive source, the tool with base 2 is rotated with the axis of the rotating shaft 40 as the center. Furthermore, the tool 6 of the rotating tool with base 2 is cut into the workpiece 11 held by the holding table 28 (see Figure 6 ), and the workpiece 11 is cut.

[0067] In addition, the configuration, method, and the like of the above-described embodiments can be appropriately changed and implemented within a range not departing from the object of the present application.

Claims

1. A cutting tool with a base, characterized in that, The tool with a base has a disc-shaped base and a ring-shaped tool with an opening in the center. The base has an annular protrusion projecting from the front of the base. The tool has a recess formed from the side exposed at the opening toward the outer peripheral edge. The base and the tool are bonded together with the protrusion embedded in the opening by means of a first adhesive attached to the front surface of the base, and joined by a second adhesive that fills the recess and permeates the gap between the protrusion and the side surface. The viscosity of the second adhesive is lower than that of the first adhesive, and the second adhesive has high fluidity.

2. The cutting tool with a base according to claim 1, characterized in that, A groove for filling the first adhesive is formed in the area on the front side of the base where the protrusion is not formed.

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