Microscopic imaging device

Abstract

The present application provides a microscopic imaging device, comprising: a light source for emitting an initial light; a frequency doubling crystal, arranged on the propagation path of the initial light, for forming a first initial light and a second initial light; a first light component, for converting the first initial light into a first target light, the first target light being a pump light, the first target light being used to irradiate the surface of a target structure at a first time to stimulate a change in the properties of the target structure; a second light component, for converting the second initial light into a second target light, the second target light being a structured light, the second target light being used to irradiate the surface of a target structure at a preset time after the first time to form backscattered light; an imaging component, for receiving the backscattered light, and obtaining image information of the target structure based on the backscattered light. The image of the target structure obtained by the microscopic imaging device has a high resolution.

Description

Technical Field

[0001] The present application belongs to the technical field of imaging equipment, and more specifically, relates to a microscopic imaging device. Background Art

[0002] Ultrafast and super-resolution imaging of the microscopic world is an important means of observing and understanding the microscopic world. The research on imaging methods of the microscopic world is of great significance to the fields of materials science, life science, chemical industry, etc. In related technologies, femtosecond laser pump-probe technology is usually used to perform microscopic imaging of materials. Femtosecond laser pump-probe technology is a widely used technology. This technology divides femtosecond laser into two light channels: pump light and probe light. The pump light can be used to irradiate the target structure to cause ultrafast changes in the physical and chemical properties of the target structure, such as changes in morphology, changes in dielectric constant, changes in fluorescence lifetime, etc. The probe light is then used to irradiate the target structure to form backscattered light. The image of the changed target structure can then be obtained using an imaging component. By adjusting the time delay of the two light channels, a time resolution of femtoseconds can be achieved, which is conducive to observing ultrafast processes in the microscopic world. However, the resolution of the image of the target structure obtained using femtosecond laser pump-probe technology is low. Summary of the invention

[0003] The purpose of the embodiments of the present application is to provide a microscopic imaging device to solve the technical problem of low resolution of images of target structures acquired by microscopic imaging devices in the prior art.

[0004] To achieve the above purpose, the technical solution adopted in this application is:

[0005] Provided is a microscopic imaging device, comprising: a light source for emitting an initial light; a frequency doubling crystal, arranged on a propagation path of the initial light, for forming a first initial light and a second initial light; a first light component, for converting the first initial light into a first target light, the first target light being a pump light, the first target light being used to irradiate a surface of a target structure at a first time to stimulate a change in properties of the target structure; a second light component, for converting the second initial light into a second target light, the second target light being a structured light, the second target light being used to irradiate the surface of the target structure at a preset time after the first time to form backscattered light; and an imaging component, for receiving the backscattered light and acquiring image information of the target structure based on the backscattered light.

[0006] In one embodiment, it further includes: a first dichroic mirror, which is arranged on the propagation paths of the first initial light and the second initial light, and is used to guide the propagation direction of the first initial light to deviate from the propagation direction of the second initial light.

[0007] In one embodiment, the first light component includes: a light shutter, which is arranged on a propagation path of the first initial light and is used to control the irradiation time of the first initial light.

[0008] In one embodiment, the second light component includes: a filtering component, arranged on the propagation path of the second initial light, for converting the second initial light into a mixed light composed of +1-order diffraction light and -1-order diffraction light; an interference component, arranged on the propagation path of the mixed light, for causing the +1-order diffraction light and the -1-order diffraction light in the mixed light to form interference fringes on the surface of the target structure.

[0009] In one embodiment, the filtering component includes: a digital micromirror array, arranged on the propagation path of the second initial light, for reflecting the second initial light so that the second initial light forms multi-order diffraction light; a first convex lens, arranged on the propagation path of the multi-order diffraction light, for adjusting the propagation path of diffraction light of different orders in the multi-order diffraction light; a first template, arranged on the propagation path of the multi-order diffraction light, for filtering the multi-order diffraction light passing through the first convex lens to obtain +1-order diffraction light and -1-order diffraction light; a second convex lens, arranged on the propagation path of the +1-order diffraction light and the -1-order diffraction light, for forming a 4F system with the first convex lens to form a mixed light composed of the +1-order diffraction light and the -1-order diffraction light.

[0010] In one embodiment, the interference component includes: a third convex lens, arranged on the propagation path of the mixed light, and used to adjust the propagation direction of the +1 order diffraction light and the -1 order diffraction light; an objective lens, arranged on the propagation path of the mixed light, the focal plane of the objective lens is located on the surface of the target structure, and the objective lens is used to form a 4F system with the third convex lens so that the +1 order diffraction light and the -1 order diffraction light form interference fringes on the surface of the target structure.

[0011] In one embodiment, the second target light component further includes: a time delay component, arranged on the propagation path of the second initial light, for controlling the time for the second initial light to travel from the light source to the filtering component; and a pulse shaping component, arranged on the propagation path of the second initial light, for pre-compensating the pulse dispersion of the second initial light.

[0012] In one embodiment, the time delay component includes: a first reflector, arranged on the propagation path of the second initial light, for changing the propagation direction of the second initial light from a first direction to a second direction; a second reflector, arranged on the propagation path of the second initial light, for changing the propagation direction of the second initial light from the second direction to the opposite direction of the first direction.

[0013] In one embodiment, the pulse shaping component includes: a grating, arranged on the propagation path of the second initial light, for dispersing the second initial light; a cylindrical lens, arranged on the propagation path of the second initial light, for changing the propagation direction of the dispersed second initial light from a dispersed direction to a parallel direction; a spatial light modulator, arranged on the propagation path of the second initial light, for adjusting the phase of the spectrum of the second initial light passing through the cylindrical lens, and changing the propagation direction of the adjusted second initial light from its incident direction to a direction opposite to the incident direction.

[0014] In one embodiment, the imaging component includes: an objective lens; a fourth convex lens, arranged on the propagation path of the backscattered light, and used to form a 4F system with the objective lens; a camera, arranged on the propagation path of the backscattered light, and used to receive the fourth scattered light passing through the fourth convex lens to obtain image information of the target structure.

[0015] The microscopic imaging device provided by the present application has the following beneficial effects: the microscopic imaging device comprises: a light source, a frequency doubling crystal, a first light component, a second light component and an imaging component, the light source can be used to emit initial light, which can be an ultrashort laser pulse; after the initial light passes through the frequency doubling crystal, part of it remains unchanged, the unchanged part forms the first initial light, while the other part becomes an ultrashort laser pulse with a shorter wavelength, the changed part forms the second initial light; the first initial light is converted into a first target light by the first light component, the first target light is a pump light, and the target structure will undergo physical, chemical and other property changes under the irradiation of the first target light; the second initial light is converted into a second target light by the second light component, the second target light is a structured light, and the target structure can form backscattered light under the irradiation of the second target light; the imaging component can receive the backscattered light to obtain the image information of the target structure; since multiple microscopic images can be obtained by irradiating the target structure with structured light of different phases, the multiple images can be processed by using relevant algorithms, which can break through the optical diffraction limit and obtain three-dimensional, super-resolution microscopic images. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0017] Figure 1 A schematic diagram of the structure of a microscopic imaging device provided in an embodiment of the present application;

[0018] Figure 2 A structured light image of a silicon-based surface provided in an embodiment of the present application;

[0019] Figure 3 A three-dimensional topographic image of a silicon-based surface provided in an embodiment of the present application;

[0020] Figure 4 The embodiments of the present application provide a three-dimensional structural schematic diagram of a standard target structure, an illuminated microscopic image of a standard target structure, and a three-dimensional morphological image of a standard target structure.

[0021] Among them, the reference numerals in the figure are:

[0022] 100-microscope imaging device; 101-light source; 102-frequency doubling crystal; 103-first dichroic mirror; 104-second filter; 105-first reflector; 106-second reflector; 107-spatial light modulator; 108-cylindrical lens; 109-grating; 110-second filter; 111-third reflector; 112-light shutter; 113-concave lens; 114-fourth reflector; 115-second dichroic mirror; 116-first beam splitter; 117-fourth convex lens; 118-camera; 119-third convex lens; 120-second convex lens; 121-first template; 122-first convex lens; 123-digital micromirror array; 124-second beam splitter; 200-target structure. DETAILED DESCRIPTION

[0023] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0024] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0025] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0026] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0027] The microscopic imaging device provided in the embodiments of the present application is now described.

[0028] like Figure 1 As shown, the microscopic imaging device 100 provided in the embodiment of the present application includes: a light source 101, a frequency doubling crystal 102, a first light component, a second light component and an imaging component.

[0029] The light source 101 is used to emit initial light, which may be an ultrashort laser pulse. Specifically, the initial light may be an ultrashort laser pulse with a central wavelength of 800 nm, a pulse width of 120 fs, and an energy of 6 mJ.

[0030] The frequency doubling crystal 102 can be a structure made of β-barium borate. The frequency doubling crystal 102 can be a secondary frequency doubling. After the initial light passes through the frequency doubling crystal 102, the wavelength of most photons in the initial light still remains at 800nm, and the part of the initial light with unchanged wavelength is the first initial light; and the wavelength of a small part (3%-5%) of the photons in the initial light is doubled to 400nm, and the part of the initial light with a wavelength changed to 400nm is the second initial light.

[0031] The first light component is used to convert the first initial light into the first target light. The first target light can be a pump light. The power density of the first target light is not less than a preset value to ensure that the first target light can cause physical and chemical properties of the target structure 200 to change when irradiated on the surface of the target structure 200. The preset value varies according to the target structure 200. For example, when the target structure 200 is metal zinc, the preset value can be 0.1 J / cm 2 , that is, the power density of the first target light can be 0.1 J / cm 2 , 0.15J / cm2 , 0.2J / cm 2 wait.

[0032] The second light component is used to convert the second initial light into a second target light. The second target light can be a structured light. The power density of the second target light is not higher than a preset value to ensure that the second target light is irradiated on the surface of the target structure 200 to avoid physical, chemical and other property changes in the target structure 200. The preset value varies according to the target structure 200. For example, when the target structure 200 is metal zinc, the preset value can be 1μJ / cm2, that is, the power density of the second target light can be 1μJ / cm 2 , 0.9μJ / cm 2 , 0.8μJ / cm 2 The second target light is used to irradiate the surface of the target structure 200 after a preset time after the first target light irradiates the surface of the target structure 200, thereby generating backscattered light. The preset time can be determined according to actual needs, for example, it can be 800ps, 807ps, 813ps, 820ps, etc.

[0033] The imaging component is used to receive the backscattered light and obtain image information of the target structure 200 according to the backscattered light. Specifically, the imaging component can obtain an image of the target structure 200 according to the backscattered light.

[0034] The microscopic imaging device 100 comprises: a light source 101, a frequency doubling crystal 102, a first light component, a second light component and an imaging component. The light source 101 can emit an initial light, which can be an ultrashort laser pulse. After the initial light passes through the frequency doubling crystal 102, part of the initial light remains unchanged, and the unchanged part forms the first initial light, while the other part becomes an ultrashort laser pulse with a shorter wavelength, and the changed part forms the second initial light. The first initial light is converted into a first target light by the first light component, and the first target light is a pump light. The target structure 20 Under the irradiation of the first target light, physical, chemical and other properties will change; the second initial light is converted into the second target light by the second light component, and the second target light is structured light. The target structure 200 can form backscattered light under the irradiation of the second target light; the imaging component can receive the backscattered light to obtain the image information of the target structure 200; since multiple microscopic images can be obtained by irradiating the target structure 200 with structured light of different phases, the multiple images can be processed by using relevant algorithms, which can break through the optical diffraction limit and obtain a three-dimensional, super-resolution microscopic image.

[0035] like Figure 1As shown, in some embodiments of the present application, the microscopic imaging device 100 further includes: a first dichroic mirror 103 .

[0036] The first dichroic mirror 103 is arranged on the propagation paths of the first initial light and the second initial light. Since the initial light still moves in the original direction after passing through the frequency doubling crystal 102, the original direction can be a horizontal direction. The first dichroic mirror 103 can be placed on the propagation paths of the first initial light and the second initial light at a direction inclined at 45° to the horizontal plane. The first dichroic mirror 103 can be used to reflect the first initial light, so that the propagation direction of the first initial light becomes a vertical direction; and the first dichroic mirror 103 can allow the second initial light to pass directly, and the propagation direction of the second initial light is still a horizontal direction; thus, the first dichroic mirror 103 is used to guide the propagation direction of the first initial light to deviate from the propagation direction of the second initial light, thereby completing the separation of the first initial light and the second initial light.

[0037] like Figure 1 As shown, in some embodiments of the present application, the first optical component may include: a first filter.

[0038] The first filter is arranged on the propagation path of the first initial light and is used for adjusting the pulse energy of the first initial light.

[0039] like Figure 1 As shown, in some embodiments of the present application, the first light assembly may further include: a light shutter 112 .

[0040] The optical shutter 112 is disposed on the propagation path of the first initial light and is used to adjust the pulse quantity of the first initial light.

[0041] like Figure 1 As shown, in some embodiments of the present application, the first light assembly may further include: a third reflector 111 .

[0042] The third reflector 111 is disposed on the propagation path of the first initial light, and is used to adjust the propagation path of the first initial light. Specifically, the third reflector 111 can be placed in a direction inclined at 45° to the horizontal plane, so that the propagation path of the first initial light is changed from the vertical direction after passing through the first dichroic mirror 103 to the horizontal direction.

[0043] like Figure 1 As shown, in some embodiments of the present application, the first light assembly may further include: a fourth reflector 114 .

[0044] The fourth reflector 114 is disposed on the propagation path of the first initial light, and is used to adjust the propagation path of the first initial light. Specifically, the fourth reflector 114 can be placed in a direction inclined at 45° to the horizontal plane, so that the propagation path of the first initial light is changed from the horizontal direction to the vertical direction after passing through the third reflector 111.

[0045] like Figure 1 As shown, in some embodiments of the present application, the first light assembly may further include: a second dichroic mirror 115 .

[0046] The second dichroic mirror 115 is disposed on the propagation path of the first initial light, and the second reflector 106 is used to adjust the propagation path of the first initial light. Specifically, the second dichroic mirror 115 can be placed in a direction inclined at 45° to the horizontal plane, so that the propagation path of the first initial light is changed from the vertical direction to the horizontal direction after passing through the second reflector 106. Moreover, after passing through the second dichroic mirror 115, the first initial light is changed into the first target light.

[0047] like Figure 1 As shown, in some embodiments of the present application, the first optical component may further include: an objective lens.

[0048] The objective lens is set on the propagation path of the first initial light, and the focal plane of the objective lens is set on the surface of the target structure 200. The first target light irradiates the target structure 200 through the objective lens, which can cause physical, chemical and other property changes on the surface of the target structure 200.

[0049] like Figure 1 As shown, in some embodiments of the present application, the first light assembly may further include: a first concave lens 113 .

[0050] The first concave lens 113 is disposed on the propagation path of the first initial light and is used to diffuse the first initial light to increase the cross section of the first target light, thereby increasing the area of ​​the first target light irradiating the surface of the target structure 200 .

[0051] like Figure 1 As shown, in some embodiments of the present application, the second optical component may include: a second filter 110104.

[0052] The second filter 110104 is arranged on the propagation path of the second initial light and is used to adjust the pulse energy of the second initial light.

[0053] like Figure 1 As shown, in some embodiments of the present application, the second optical component may further include: a filtering component and an interference component.

[0054] The filter component is arranged on the propagation path of the second initial light, and is used for converting the second initial light into a mixed light composed of +1-order diffraction light and -1-order diffraction light.

[0055] Specifically, the filtering component may include: a digital micromirror array 123 , a first convex lens 122 , a first template 121 and a second convex lens 120 .

[0056] The digital micromirror array 123 is arranged on the propagation path of the second initial light, and the digital micromirror array 123 is used to reflect the second initial light so that the second initial light forms multi-order diffraction light. Specifically, the digital micromirror array 123 is composed of a large number of reflector units, each of which can be a 7.4μm×7.4μm micro-mirror, and the reflection angles of these micro-mirrors can be digitally controlled. After loading the stripe image on the digital micromirror array 123, the reflection angles of the micro-mirrors on the digital micromirror array 123 also present a distribution of stripe structures, thereby realizing a function similar to that of the reflective grating 109. At this time, the second initial light will be diffracted after passing through the digital micromirror array 123, thereby forming multi-order diffraction light.

[0057] The first convex lens 122 is disposed on the propagation path of the multi-order diffracted light and is used to adjust the propagation paths of the diffracted light of different orders in the multi-order diffracted light. Specifically, after passing through the first convex lens 122, the +1-order diffracted light and -1-order diffracted light in the multi-order diffracted light are located above and below the entire light path, respectively.

[0058] The first template 121 is arranged on the propagation path of the multi-order diffracted light, and is used to filter the multi-order diffracted light passing through the first convex lens 122 to obtain +1-order diffracted light and -1-order diffracted light. Since the +1-order diffracted light and -1-order diffracted light in the multi-order diffracted light are respectively located above and below the entire optical path, only two through holes need to be provided in the first template 121, and the two through holes are respectively located above and below the entire optical path, and the two through holes can respectively allow the +1-order diffracted light and -1-order diffracted light to pass through, so as to obtain the +1-order diffracted light and -1-order diffracted light.

[0059] The second convex lens 120 is disposed on the propagation path of the +1-order diffracted light and the -1-order diffracted light, and is used to form a 4F system with the first convex lens 122 to form a mixed light composed of the +1-order diffracted light and the -1-order diffracted light. Through the second convex lens 120, the +1-order diffracted light and the -1-order diffracted light are reunited, and the propagation direction is inclined along the horizontal direction.

[0060] The interference component is disposed on the propagation path of the mixed light, and is used to make the +1-order diffracted light and the −1-order diffracted light in the mixed light form interference fringes on the surface of the target structure 200 .

[0061] Specifically, the interference assembly may include: a third convex lens 119 and an objective lens.

[0062] The third convex lens 119 is disposed on the propagation path of the mixed light and is used to adjust the propagation direction of the +1-order diffracted light and the -1-order diffracted light. After passing through the third convex lens 119, the +1-order diffracted light and the -1-order diffracted light can be focused on one point.

[0063] The objective lens is arranged on the propagation path of the mixed light, and the focal plane of the objective lens is located on the surface of the target structure 200. The objective lens is used to form a 4F system with the third convex lens 119, so that the +1-order diffracted light and the -1-order diffracted light form interference fringes on the surface of the target structure 200, and the second initial light becomes structured light after passing through the objective lens. The first light component and the second light component share the same objective lens.

[0064] like Figure 1 As shown, in some embodiments of the present application, the second optical component may further include: a time delay component and a pulse shaping component.

[0065] The time delay component is disposed on the propagation path of the second initial light, and is used to control the time for the second initial light to travel from the light source 101 to the large filter component.

[0066] Specifically, the time delay component may include: a first reflector 105 and a second reflector 106 .

[0067] The first reflector 105 is disposed on the propagation path of the second initial light, and is used to change the propagation direction of the second initial light from the first direction to the second direction. The first direction may be a horizontal direction, and the second direction may be a vertical direction. Specifically, the first reflector 105 may be placed in a direction inclined at 45° to the horizontal plane, so that the propagation path of the second initial light is changed from the horizontal direction to the vertical direction.

[0068] The second reflector 106 is disposed on the propagation path of the second initial light, and is used to change the propagation direction of the second initial light from the second direction to the opposite direction of the first direction. Specifically, the second reflector 106 can be placed in a direction inclined at 45° to the horizontal plane, so that the propagation path of the second initial light is changed from the vertical direction passing through the first reflector 105 to the horizontal direction.

[0069] By adjusting the first reflector 105 and the second reflector 106 to move in the horizontal direction, the length of the propagation path of the second initial light can be adjusted, so that the time for the second target light to irradiate the target structure 200 can be controlled.

[0070] The pulse shaping component is arranged on the propagation path of the second initial light and is used for pre-compensating the pulse dispersion of the second initial light.

[0071] Specifically, the pulse shaping component may include: a grating 109 , a cylindrical lens 108 and a spatial light modulator 107 .

[0072] The grating 109 is disposed on the propagation path of the second initial light and is used to disperse the second initial light.

[0073] The cylindrical lens 108 is disposed on the propagation path of the second initial light, and is used to change the propagation direction of the dispersed second initial light from a dispersed direction to a parallel direction.

[0074] The spatial light modulator 107 is disposed on the propagation path of the second initial light, and is used to adjust the phase of the spectrum of the second initial light passing through the cylindrical lens 108, and to change the propagation direction of the adjusted second initial light from its incident direction to the opposite direction of the incident direction. Since the adjusted second initial light returns to the optical path of the second initial light along the original path, the second initial light can be pulse-shaped to ensure that the second initial light is an ultra-short pulse.

[0075] like Figure 1 As shown, in some embodiments of the present application, the second optical component may further include: a second beam splitter 124 .

[0076] The second beam splitter 124 is disposed on the propagation path of the second initial light and is used to split the second initial light into two parts, one of which propagates horizontally from the time delay component to enter the pulse shaping component, and the other part is converted to propagate vertically to directly enter the filtering component.

[0077] like Figure 1 As shown, in some embodiments of the present application, the imaging assembly may include: an objective lens, a fourth convex lens 117 and a camera 118.

[0078] The objective lens may be a common structure of the first optical component and the second optical component.

[0079] The fourth convex lens 117 is disposed on the propagation path of the backscattered light and is used to form a 4F system with the objective lens, thereby ensuring that the image of the surface of the target structure 200 located on the focal plane of the objective lens can be clearly imaged on the photosensitive surface of the camera 118 .

[0080] like Figure 1 As shown, in some embodiments of the present application, the imaging component may further include: a first beam splitter 116 .

[0081] The first beam splitter 116 is disposed on the propagation path of the backscattered light, and is used to split the backscattered light into two parts, one of which is transformed from a horizontal direction to a vertical direction so as to be received by the camera 118 .

[0082] The camera 118 is disposed on the propagation path of the backscattered light, and is used to receive the fourth scattered light passing through the fourth convex lens 117 to obtain image information of the target structure 200. Specifically, the image information may be picture information.

[0083] like Figure 1 As shown, in some embodiments of the present application, the method for determining the time zero point of the first target light and the second target light can be: the initial light is frequency-doubled to a pulse with a wavelength of 400nm and the 800nm ​​wavelength component is filtered out, the digital micromirror array 123 does not load an image and removes the first template 121, the first reflector 105 and the second reflector 106 are adjusted to make the intensity of the first target light and the second target light equivalent so that they overlap and interfere on the smooth surface of the target structure 200, and the first reflector 105 and the second reflector 106 are moved to make the contrast of the interference fringes the highest, and this time is the time zero point.

[0084] The above-mentioned microscopic imaging device 100 can be used to obtain an image of the ultrafast change process when a femtosecond laser etches a silicon-based surface. The image is also a structured light illumination microscopic image. Figure 2 In the middle, from left to right, they are the structured light images of the silicon surface when the time delay is T=800ps, T=807ps, T=813ps, and T=820ps respectively. Figure 3 The middle one corresponds to the first row. By processing these structured light images using the currently very mature Fourier transform algorithm, the three-dimensional morphology of the silicon-based surface can be obtained; these structured light images can also be processed using a multi-step phase shift method to obtain a super-resolution image.

[0085] Using the above-mentioned microscopic imaging device 100, the three-dimensional morphology of the standard sample is obtained, such as Figure 4 As shown, from left to right are a schematic diagram of the three-dimensional structure of the standard target structure 200, a microscopic image of the standard target structure 200 illuminated by light, and a three-dimensional morphology of the standard target structure 200 obtained using a Fourier transform algorithm. From the results, it can be seen that the use of the microscopic imaging device 100 can achieve a three-dimensional morphology reconstruction effect.

[0086] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A microscopic imaging device, characterized in that: include: A light source, used to emit initial light; A frequency doubling crystal is arranged on the propagation path of the initial light, and the frequency doubling crystal is a second frequency doubling crystal; Used to form a first initial light and a second initial light; A first dichroic mirror, disposed on the propagation paths of the first initial light and the second initial light, and used to guide the propagation direction of the first initial light to deviate from the propagation direction of the second initial light; A first light component is used to transform the first initial light into a first target light, wherein the first target light is a pump light, and the first target light is used to irradiate the surface of the target structure at a first time to stimulate a change in the property of the target structure; The second light component is used to convert the second initial light into a second target light, wherein the second target light is a structured light, and the second target light is used to irradiate the surface of the target structure at a preset time after the first time to form backscattered light; the second light component includes a filtering component and an interference component, wherein the filtering component is arranged on the propagation path of the second initial light, and is used to convert the second initial light into a mixed light composed of +1-order diffraction light and -1-order diffraction light; the filtering component includes a digital micromirror array, a first convex lens, a first template and a second convex lens, wherein the digital micromirror array is arranged on the propagation path of the second initial light, and is used to reflect the second initial light so that the second initial light forms multi-order diffraction light; the first convex lens is arranged on the propagation path of the multi-order diffraction light, and is used to adjust the propagation path of diffraction lights of different orders in the multi-order diffraction light; the first template is arranged on the propagation path of the multi-order diffraction light, and is used to adjust the propagation path of the diffraction lights of different orders in the multi-order diffraction light. The multi-order diffraction light is filtered to obtain +1-order diffraction light and -1-order diffraction light; the second convex lens is arranged on the propagation path of the +1-order diffraction light and the -1-order diffraction light, and is used to form a 4F system with the first convex lens to form a mixed light composed of the +1-order diffraction light and the -1-order diffraction light; the interference component is arranged on the propagation path of the mixed light, and is used to make the +1-order diffraction light and the -1-order diffraction light in the mixed light form interference fringes on the surface of the target structure; the interference component includes a third convex lens and an objective lens, the third convex lens is arranged on the propagation path of the mixed light, and is used to adjust the propagation direction of the +1-order diffraction light and the -1-order diffraction light; the objective lens is arranged on the propagation path of the mixed light, the focal plane of the objective lens is located on the surface of the target structure, and the objective lens is used to form a 4F system with the third convex lens, so that the +1-order diffraction light and the -1-order diffraction light form interference fringes on the surface of the target structure; An imaging component is used to receive the backscattered light and obtain image information of the target structure according to the backscattered light.

2. The microscopic imaging device according to claim 1, characterized in that: The first optical component comprises: A light shutter is arranged on a propagation path of the first initial light and is used to control the irradiation time of the first initial light.

3. The microscopic imaging device according to claim 1, characterized in that: The second optical component further comprises: A time delay component, disposed on a propagation path of the second initial light, for controlling the time for the second initial light to travel from the light source to the filter component; The pulse shaping component is arranged on the propagation path of the second initial light and is used for pre-compensating the pulse dispersion of the second initial light.

4. The microscopic imaging device according to claim 3, characterized in that: The time delay component comprises: A first reflector, disposed on a propagation path of the second initial light, and configured to change a propagation direction of the second initial light from a first direction to a second direction; A second reflector is disposed on a propagation path of the second initial light, and is used to change a propagation direction of the second initial light from the second direction to a direction opposite to the first direction.

5. The microscopic imaging device according to claim 3, characterized in that: The pulse shaping component comprises: a grating, arranged on a propagation path of the second initial light, and used for dispersing the second initial light; A cylindrical lens, disposed on a propagation path of the second initial light, and used to change the propagation direction of the dispersed second initial light from a dispersed direction to a parallel direction; The spatial light modulator is arranged on the propagation path of the second initial light, and is used to adjust the phase of the spectrum of the second initial light passing through the cylindrical lens, and change the propagation direction of the adjusted second initial light from its incident direction to the opposite direction of the incident direction.

6. The microscopic imaging device according to claim 1, characterized in that: The imaging assembly comprises: Objective lens; a fourth convex lens, arranged on the propagation path of the backscattered light, and used to form a 4F system with the objective lens; The camera is arranged on the propagation path of the backscattered light and is used to receive the scattered light passing through the fourth convex lens to obtain image information of the target structure.

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