Display system

Abstract

The present application provides a display system that displays a reference for a filter replacement timing in a processing waste liquid treatment device connected to a processing device including a processing unit that processes a workpiece while supplying processing water to the workpiece, regenerates the processing water by filtering used processing water discharged from the processing device with a filter, and supplies the regenerated processing water to the processing device, the display system having: a processing history recording section that records a history of processing performed by the processing unit in the processing device; and a display unit that can display an information display screen including information related to the reference for the replacement timing, the information display screen including one or more of a display of a total processing amount calculated from the processing history, a display of a standard total processing amount corresponding to a processing amount in which processing water that can be filtered with the filter is consumed, a display of an expected processable time, and a display of an expected replacement timing.

Description

Technical Field

[0001] The present invention relates to a display system for indicating the replacement period of a filter used in a processing wastewater treatment apparatus that regenerates used processing water used in the processing apparatus. Background Technology

[0002] In the manufacturing process of device chips used in electronic devices, firstly, multiple intersecting dicing lines (spacers) are formed on the front side of a wafer made of semiconductor material. Then, devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integrations) are formed in the regions divided by these dicing lines. Then, when the wafer is diced along the dicing lines, multiple device chips are obtained. A cutting device is used in the wafer dicing process, which uses a ring-shaped cutting tool to cut the wafer.

[0003] Furthermore, in recent years, with the miniaturization and thinning of electronic devices, there is also a demand for thinner chip components. Therefore, sometimes a process to thin the wafer is implemented by grinding the back side of the wafer before dicing. In the wafer grinding process, grinding equipment is used, which uses grinding wheels with multiple grinding tools to grind the wafer.

[0004] When processing wafers using the aforementioned cutting or grinding equipment, processing water is supplied to the wafers. This processing water cools the wafers and processing tools (cutting tools, grinding wheels, etc.), and washes away the resulting chips (processing debris). However, if the processing water contains impurities, problems such as impurities adhering to the wafer and causing marks, or malfunctions on the device due to impurities, may occur, potentially reducing the quality of the device chip. Therefore, pure water free of impurities is used for processing.

[0005] Processing water used in the processing unit is discharged as wastewater to the outside of the processing unit for treatment. However, the processing water used in the processing unit is in large quantities, resulting in considerable treatment costs. Therefore, a method for purifying the processing water discharged from the processing unit and reusing the water has been proposed. For example, a known processing wastewater treatment device filters the wastewater to generate clean water, irradiates the clean water with ultraviolet light to destroy organic matter, and uses an ion exchange resin to remove impurity ions from the clean water, thereby generating pure water (see Patent Document 1).

[0006] Patent Document 1: Japanese Patent Application Publication No. 2009-190128

[0007] The processing wastewater treatment apparatus includes, for example, a first filtration unit that filters used processing water; an ultraviolet irradiation unit that irradiates the processing water with ultraviolet light; an ion exchange resin unit that exchanges ions contained in the processing water; and a second filtration unit (precision filtration unit) that filters the processing water. Here, filters are installed in the first and second filtration units to remove processing debris and other contaminants from the used processing water.

[0008] When processing water is filtered for an extended period, processing debris accumulates in the filter, reducing its performance and making it unable to adequately remove the debris contained in the processing water. Therefore, conventionally, pressure gauges installed along the supply path of used processing water to each filtration unit are used to monitor the filter's condition. For example, the pressure gauge reading is displayed on a monitor, and the user of the processing equipment replaces the filter when the reading exceeds the permissible value.

[0009] However, the pressure gauge readings accompanying the use of filters tend to rise sharply as they approach the permissible value. That is, users of the processing equipment cannot anticipate that the pressure gauge reading will reach the permissible value until then. Furthermore, when the reading reaches the permissible value, a hasty replacement of the filter is necessary. Therefore, filter replacement is not always performed at an optimal time, and sometimes it reduces the processing efficiency of the equipment. Summary of the Invention

[0010] The present invention was made in view of the above-mentioned problems, and its object is to provide a display system with a reference for the replacement period of the display filter.

[0011] According to one aspect of the present invention, a display system is provided that displays a reference for the replacement period of a filter in a processing wastewater treatment device connected to a processing apparatus. The filter regenerates used processing water discharged from the processing apparatus by filtering the used processing water, and the regenerated processing water is supplied to the processing apparatus. The processing apparatus includes: a holding unit for holding a workpiece; a processing unit for processing the workpiece while supplying the processing water to the workpiece held by the holding unit; and a processing feed unit for feeding the holding unit and the processing unit relative to each other. The display system is characterized by having: a processing history recording unit for recording the processing history performed by the processing unit in the processing apparatus; and a display unit, which... An information display screen is capable of displaying information related to the reference for the replacement period. This information display screen includes one or more of the following groups: a display of total processing volume, a display of standard total processing volume, a display of expected processing time, and a display of expected replacement period. The total processing volume is calculated based on the processing history recorded by the processing history recorder. The standard total processing volume corresponds to the processing volume of the amount of processing water that can be filtered by the filter. The expected processing time is calculated by dividing the value obtained by subtracting the total processing volume from the standard total processing volume by the processing volume per unit time. The processing volume per unit time is calculated based on the processing history recorded by the processing history recorder. The expected replacement period is calculated by adding a time to the expected processing time.

[0012] Preferably, in the processing wastewater treatment device, a pressure gauge is provided on the supply path for supplying the used processing water to the filter, and the standard total processing capacity is consistent with the total processing capacity of the processing unit for the workpiece when the pressure gauge reading reaches the pressure value indicating the replacement period of the filter while the used processing water is being filtered by the filter.

[0013] Furthermore, it is preferable that the processing history recorded in the processing history record unit includes the amount of relative processing feed between the holding unit and the processing unit implemented by the processing feed unit during the processing of the workpiece by the processing unit.

[0014] In one aspect of the display system of the present invention, the filter replacement period can be managed based on the amount of processing performed on the workpiece. Furthermore, since an information display screen containing information related to the reference for filter replacement period is displayed on the display unit, the user can prepare a new filter in advance based on this information, thereby enabling the filter replacement operation to be performed at a convenient time.

[0015] Therefore, according to the present invention, a display system is provided that provides a reference for the replacement period of the display filter. Attached Figure Description

[0016] Figure 1 It is a schematic perspective view of the processing equipment and the processing waste liquid treatment equipment.

[0017] Figure 2 It is a three-dimensional view schematically showing the internal structure of a processing waste liquid treatment device.

[0018] Figure 3 This is an exploded perspective view illustrating the internal structure and connections of the wastewater treatment device.

[0019] Figure 4 It is a schematic plan view showing the display of the display unit.

[0020] Label Explanation

[0021] 2: Processing device; 4: Base; 6: Box workbench; 8: Box; 10: Transfer unit; 12, 20: Transfer unit; 14: Holding unit; 16: Processing unit; 18: Cleaning unit; 22: Processing waste liquid treatment device; 24: Housing; 26: Drainage channel; 28: Water supply channel; 30a: Display unit; 30b: Input unit; 32: Control unit; 32a: Processing history recording unit; 32b: Total processing quantity calculation unit; 32c: Standard total processing quantity storage unit; 32d: Display unit control unit; 34: Frame; 36: Waste liquid storage tank; 38: Waste liquid supply pump; 40: Guide rail; 42, 72: Receiving tray (plate); 44 68: Filter section; 46, 56: Inlet section; 48: Drainage path; 50: Hose; 52: Support plate; 54: Clean water storage tank; 58: Drainage mechanism; 60: Clean water supply pump; 62: Ultraviolet irradiation section; 64: Ion exchange resin section; 66: Inlet and outlet sections; 74: Pure water supply section (temperature control unit); 76a, 76b: Switching valves; 78a, 78b: Pressure gauges; 80: Water path; 82: Display of standard total processing capacity; 84: Display of total processing capacity; 86: Display of filter usage rate; 88: Display of expected number of sheets that can be processed; 90: Display of expected processing time; 92: Display of expected replacement period. Detailed Implementation

[0022] Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. First, an example of the structure of the processing apparatus and the processing waste liquid treatment apparatus assembled with the display system of this embodiment will be described. Figure 1 This is a perspective view schematically showing the processing apparatus 2 and the processing waste liquid treatment device 22 connected to the processing apparatus 2.

[0023] In processing apparatus 2, wafers formed from semiconductor materials such as Si (silicon) and SiC (silicon carbide) are processed. Multiple ICs or LSIs are formed on the front side of the wafer. When the wafer is diced according to each device, individual device chips are formed. Furthermore, if the back side of the wafer is pre-ground to thin it before dicing, thin device chips can ultimately be obtained. Processing apparatus 2 performs grinding or dicing processes on the wafer.

[0024] Figure 1 This is a perspective view schematically showing an example of a cutting device 2 having a ring-shaped cutting tool mounted on a spindle. However, the machining device 2 used in connection with the machining waste liquid treatment device 22 is not limited to a cutting device. For example, it could be a grinding device in which a grinding wheel with grinding tools arranged in a ring is mounted on a spindle and rotated, so that the grinding tools moving on the ring track come into contact with the workpiece to perform grinding. Hereinafter, the case where the machining device 2 is a cutting device will continue to be described.

[0025] like Figure 1 As shown, a box worktable 6, on which a box 8 is placed, is provided at the corner of the base 4 of the processing device 2. The box worktable 6 can be raised and lowered in the vertical direction via a lifting mechanism (not shown). Figure 2 In the diagram, the outline of box 8 placed on box worktable 6 is represented by a double-dotted line.

[0026] A transfer unit 10 is provided on the upper surface of the base 4, adjacent to the box worktable 6. This transfer unit 10 removes the workpiece stored in the box 8 placed on the box worktable 6 from the box 8. The transfer unit 10 has a gripping part on its front surface capable of holding the workpiece. When removing the workpiece stored in the box 8, the gripping part is inserted into the box 8 and used to hold the workpiece. Then, the gripping part is moved away from the box 8.

[0027] A holding unit (chuck table) 14 capable of attracting and holding the workpiece is provided on the upper surface of the base 4 adjacent to the box worktable 6. The holding unit 14 can move in the direction of separation from and approach to the box worktable 6. In addition, a first conveying unit 12 is provided adjacent to the transfer unit 10 and the holding unit 14 on the upper surface of the base 4.

[0028] The first conveying unit 12 includes: a shaft portion that protrudes upward from the upper surface of the base 4 and is capable of lifting, lowering, and rotating; an arm portion that extends horizontally from the upper end of the shaft portion; and a holding portion disposed below the front end of the arm portion. The workpiece pulled out from the box 8 is conveyed to the holding unit 14 via the first conveying unit 12.

[0029] A machining unit (cutting unit) 16 is provided at the moving destination of the holding unit 14. This machining unit 16 performs machining (cutting) on ​​the workpiece held by the holding unit 14. The machining unit 16 includes: a cutting tool having an annular grinding portion on its outer periphery; and a spindle having the cutting tool mounted at its front end and running along the Y-axis, which serves as the rotation axis of the cutting tool. A rotation drive source (not shown) such as an electric motor is connected to the base end of the spindle.

[0030] When cutting the workpiece held in the holding unit 14 using a cutting tool, the cutting tool is rotated and lowered to a predetermined height. Then, the holding unit 14 is moved to pass through the area below the machining unit 16. The workpiece is then cut using the rotating cutting tool. The holding unit 14 then returns to a position adjacent to the box table 6.

[0031] Thus, when machining the workpiece, the machining apparatus 2 moves the holding unit 14 and the machining unit 16 relative to each other. This movement is called machining feed. The machining apparatus 2 has a machining feed unit that moves the holding unit 14 and the machining unit 16 relative to each other. Figure 1 In the processing apparatus 2 shown, a processing feed unit (not shown) that moves the holding unit 14 is located below the holding unit 14.

[0032] A cleaning unit 18 for cleaning the processed workpiece is provided on the upper surface of the base 4, adjacent to the holding unit 14 and the first conveying unit 12. The cleaning unit 18 has a rotary table for holding the workpiece. A rotary drive source (not shown) is connected to the lower part of the rotary table to rotate the rotary table at a predetermined speed. The processing device 2 has a second conveying unit 20 for conveying the workpiece from the holding unit 14 to the cleaning unit 18.

[0033] When cleaning the workpiece using the cleaning unit 18, a cleaning fluid (typically a mixture of water and air) is sprayed onto the workpiece while the rotary table rotates. Furthermore, when storing the workpiece cleaned by the cleaning unit 18 in the box 8, the first transfer unit 12 transfers the workpiece from the cleaning unit 18 to the transfer unit 10. Then, the transfer unit 10 moves toward the box 8, pressing the workpiece into the box 8.

[0034] Here, when a cutting tool cuts a workpiece, frictional heat is generated, causing the temperature of both the cutting tool and the workpiece to rise. Additionally, machining chips are generated from the workpiece. Therefore, when machining is applied to both the cutting tool and the workpiece during cutting, the machining chips can be quickly removed, and both the cutting tool and the workpiece can be cooled.

[0035] Furthermore, even when the processing device 2 is a grinding device that uses a grinding wheel mounted on a grinding wheel to grind the workpiece, frictional heat and machining chips are generated when grinding the workpiece. Moreover, when processing water is supplied to the grinding wheel and the workpiece during grinding, machining chips can be removed quickly, and the grinding wheel and the workpiece can be cooled.

[0036] However, if the processing water contains impurities, problems such as impurities adhering to the workpiece and causing residue, or impurities causing malfunctions in the devices formed on the workpiece, may occur, potentially reducing the quality of the device chips. Therefore, pure water free of impurities is used for processing.

[0037] The processing water used in the processing unit is discharged as wastewater to the outside of the processing unit for treatment. However, the amount of pure water used in the processing unit is large, resulting in considerable treatment costs. Therefore, a processing wastewater treatment device 22 is used to reuse the used processing water discharged from the processing unit.

[0038] The wastewater treatment device 22 filters used processing water to generate clean water, irradiates the clean water with ultraviolet light to destroy organic matter, and uses ion exchange resin to remove impurity ions from the clean water, thereby generating pure water. The generated pure water is then supplied to the processing unit 2 as processing water.

[0039] Next, the processing waste liquid treatment device 22 will be described. The processing waste liquid treatment device 22 is used in conjunction with the processing device 2. The processing waste liquid treatment device 22 has a cuboid housing 24 that houses the various structural elements constituting the processing waste liquid treatment device 22. A display unit 30a is provided on the upper part of the front surface of the housing 24. This display unit 30a is composed of a liquid crystal display or the like that that displays the status of the processing waste liquid treatment device 22. Furthermore, an input unit 30b is provided. This input unit 30b is composed of buttons or the like that, which serve as an interface for the operator to input commands into the processing waste liquid treatment device 22.

[0040] Alternatively, the processing waste liquid treatment device 22 may also have a touch panel superimposed on the display unit 30a as an input unit 30b. That is, the processing waste liquid treatment device 22 may also have a display with a touch panel that combines the functions of the display unit 30a and the input unit 30b. In addition, the display unit 30a is one of the elements constituting the display system of this embodiment. Moreover, the display unit 30a may also be provided in the processing device 2 instead of the processing waste liquid treatment device 22.

[0041] The processing wastewater treatment device 22 is connected to the processing unit 2 via a drainage path 26 and a water supply path 28, which are composed of pipes and other conduits. The used processing water (wastewater) generated by the processing unit 2 is sent to the processing wastewater treatment device 22 through the drainage path 26. Then, the pure water generated by regenerating the used processing water through the processing wastewater treatment device 22 is sent to the processing unit 2 as new processing water through the water supply path 28.

[0042] Figure 2 This is a perspective view schematically showing the structural elements inside the housing 24 of the processing waste liquid treatment device 22. Figure 2 For ease of explanation, some of the waterways have been omitted. Additionally, Figure 3 This is an exploded perspective view schematically showing the connection relationships of the various structural elements housed inside the casing 24 of the processing waste liquid treatment device 22. Figure 3 For ease of explanation, a portion of the water passage 80 is simplified as a line. The water passage 80 may be, for example, a pipe or tube made of metal or resin.

[0043] The processing wastewater treatment device 22 has a frame 34 that supports the various structural elements. A wastewater storage tank 36 is provided on the bottom surface of the frame 34, which stores the used processing water (wastewater) discharged from the processing unit 2. The wastewater discharged from the processing unit 2 is supplied to the wastewater storage tank 36 along the drainage path 26 and stored therein. Specifically, processing water containing processing chips and impurity ions is supplied as wastewater from the processing unit 2 to the wastewater storage tank 36.

[0044] Waste liquid storage tank 36 is connected to a waste liquid supply pump 38 that delivers the waste liquid stored in the waste liquid storage tank 36. The waste liquid supply pump 38 is a pump that supplies the waste liquid stored in the waste liquid storage tank 36 to the first filtration unit 44, which will be described later. The amount of waste liquid supplied from the waste liquid storage tank 36 to the first filtration unit 44 is controlled by the waste liquid supply pump 38.

[0045] A pair of guide rails 40 are provided above the waste liquid storage tank 36. The pair of guide rails 40 are fixed to the frame 34 along the length direction of the processing waste liquid treatment device 22, with a predetermined distance separated from the width direction of the processing waste liquid treatment device 22. In addition, a rectangular receiving tray 42 is mounted on the pair of guide rails 40 in a state that allows it to slide along the guide rails 40. As a result, it is possible to pull out the receiving tray 42 from the frame 34 and to store the receiving tray 42 into the frame 34.

[0046] A first filter unit 44 is detachably mounted on the receiving tray 42 to filter used processing water (wastewater) supplied from the wastewater storage tank 36. The inlet 46 at the upper end of the first filter unit 44 is connected to the wastewater supply pump 38 via a water passage 80 equipped with a switching valve 76a. Water stored in the wastewater storage tank 36 is supplied to the first filter unit 44 by the wastewater supply pump 38. Furthermore, in Figure 2 An example is shown where two first filter sections 44 are provided on the receiving plate 42, but the number of first filter sections 44 is not limited.

[0047] The first filtration section 44 includes, for example, a first filter (not shown) formed of activated carbon, zeolite, cloth, resin-bonded fibers, glass fibers, metal mesh, or a reverse osmosis membrane (RO membrane). Furthermore, the first filtration section 44 uses this first filter to adsorb or filter impurities such as processing debris contained in the wastewater flowing in from the inflow section 46, thereby purifying the wastewater. The water (clean water) filtered by the first filtration section 44 accumulates in the receiving tray 42 and is discharged from the drainage path 48, proceeding downstream of the water path 80.

[0048] The waste liquid storage tank 36 stores the processing water that has just been used in the processing device 2, which contains a relatively large amount of large-diameter processing chips. Therefore, the first filter used in the first filter section 44 needs to be able to efficiently and for a long time remove such processing chips. For example, the first filter section 44 uses a filter with a relatively coarse mesh.

[0049] During the filtration of used processing water (waste liquid), processing debris and other contaminants captured by the first filter continuously accumulate in the first filter. Moreover, when the amount of processing debris and other contaminants accumulated in the first filter exceeds the capacity limit of the first filter, the water cannot be properly filtered, and the insufficiently filtered water is discharged from the first filter section 44.

[0050] Therefore, the first filter in the first filter unit 44 must be replaced periodically. The first filter unit 44 can be, for example, a box that can be replaced as a whole, or a device in which the function can be restored by replacing only the first filter.

[0051] A clean water storage tank (filtered water storage tank) 54 is provided in the area adjacent to the waste liquid storage tank 36 on the lower side of the first filter section 44 and the receiving tray 42. The clean water storage tank 54 stores the processed water (clean water) filtered by the first filter section 44. The clean water storage tank 54 has an inlet section (inlet) 56, which is provided on the upper surface side of the clean water storage tank 54 for the filtered processed water to flow into.

[0052] The first filter section 44 is connected to the clean water storage tank 54 via the receiving tray 42. Specifically, the drain passage 48 of the receiving tray 42 and the inlet section 56 of the clean water storage tank 54 are connected by a flexible hose 50 that constitutes the water passage 80. The hose 50 is supported, for example, by an inclined support plate 52. Moreover, the hose 50 forms part of the water passage 80. The processed water (clean water) filtered and discharged by the first filter section 44 is temporarily stored in the receiving tray 42 and then supplied to the clean water storage tank 54 via the hose 50 for storage.

[0053] A pair of guide rails 70 are installed adjacent to the clean water storage tank 54 in the waste liquid treatment device 22. Except for their installation position, the guide rails 70 are fixed to the frame 34 in the same manner as the guide rails 40. A rectangular receiving tray 72 is mounted on the pair of guide rails 70 in a sliding manner. This allows the receiving tray 72 to be pulled out of the frame 34 and stored in the frame 34.

[0054] like Figure 3 As shown, the clean water storage tank 54 may also be equipped with a drainage mechanism 58 having an on / off valve. The drainage mechanism 58 has the function of discharging and discarding the processing water (clean water) stored in the clean water storage tank 54 to the outside of the processing waste liquid treatment device 22. This processing water is filtered by the first filter unit 44. Therefore, as long as the waste conditions in a device chip manufacturing plant or the like, where the processing device 2 is installed, are met, this processing water can be directly discarded.

[0055] For example, during the circulation of water between the wastewater treatment device 22 and the processing device 2, water may sometimes be lost by splashing out of the processing device 2. Therefore, fresh pure water can also be supplied to the wastewater treatment device 22 and the processing device 2 from the outside. On the other hand, if there is an excess of water stored in the wastewater treatment device 22, a drainage mechanism 58 can be used to discharge the wastewater to the outside.

[0056] The clean water storage tank 54 has an outlet at the bottom (not shown). A clean water supply pump 60 is connected to the downstream side of the clean water storage tank 54 via a water passage 80 (see reference). Figure 3 A UV irradiation unit 62 is connected downstream of the clean water supply pump 60 via a water passage 80. This UV irradiation unit 62 includes a UV light source such as a UV lamp and irradiates the processing water (clean water) supplied from the clean water storage tank 54 with UV light. The UV irradiation unit 62 is mounted on the receiving plate 72.

[0057] In the processed water used in processing unit 2, microorganisms, such as those suspended in the atmosphere, may be introduced as impurities. Therefore, in order to perform sterilization treatment in the ultraviolet irradiation unit 62, ultraviolet light with a wavelength of 254 nm is irradiated onto the water. When ultraviolet light is irradiated onto the water containing microorganisms using the ultraviolet irradiation unit 62, the microorganisms die, and their remains are produced in the water. Therefore, ultraviolet light with a wavelength of 185 nm can also be irradiated onto the water in the ultraviolet irradiation unit 62. Ultraviolet light with a wavelength of 185 nm activates the ozone contained in the water, thereby promoting the decomposition of organic matter by ozone.

[0058] An ion exchange resin section 64 is connected downstream of the ultraviolet irradiation section 62 in the water channel 80. This is schematically shown in... Figure 2 and Figure 3 In the case shown, the receiving tray 72 is provided with two ion exchange resin sections 64 in a detachable manner, but the number of ion exchange resin sections 64 is not limited to this. The ion exchange resin section 64 contains ion exchange resin and exchanges ions contained in water that has been irradiated with ultraviolet light by the ultraviolet irradiation section 62.

[0059] The inlet / outlet portion 66 at the upper end of the ion exchange resin section 64 is connected to the ultraviolet irradiation section 62 via a water passage 80 equipped with a switching valve 76b. The ion exchange resin section 64, for example, has a cylindrical container and ion exchange resin filled in the container. A flow path for water to travel between the ion exchange resins is formed inside the container, and water entering the ion exchange resin section 64 reaches the inlet / outlet portion 66 by passing between the ion exchange resins in the container.

[0060] For example, in this container, ion exchange resins for exchanging cations (cation exchange resin) and ion exchange resins for exchanging anions (anion exchange resin) are contained in a mixed state. Furthermore, ions other than hydrogen ions and hydroxide ions in the processed water (purified water) supplied to the ion exchange resin section 64 are exchanged for hydrogen ions or hydroxide ions. That is, pure water is purified by the ion exchange resin section 64.

[0061] The inlet and outlet 66 of the ion exchange resin section 64 are connected to the water passage 80. The processed water that has exchanged ions through the ion exchange resin is sent to the second filter section 68 via the water passage 80. The second filter section 68 is detachably mounted on the receiving tray 72 and has the function of performing final filtration on the processed water that has exchanged ions through the ion exchange resin section 64.

[0062] Similar to the first filter section 44, the second filter section 68 may have a second filter (not shown) formed of activated carbon, zeolite, cloth, resin fiber, glass fiber, metal mesh, reverse osmosis membrane (RO membrane), etc.

[0063] The used processing water discharged as wastewater from processing unit 2 is purified as it travels through the water path 80 of processing wastewater treatment unit 22, reaching its final stage of purification at the second filtration section 68. Since the impurities contained in this processing water are extremely small and present in minute quantities, the second filter is required to be capable of removing such impurities. For example, the second filter of the second filtration section 68 can use a membrane with a mesh finer than that of the first filter of the first filtration section 44, a type known as a precision filter.

[0064] Furthermore, the second filtration unit 68 uses the second filter to adsorb or filter the trace amounts of impurities contained in the incoming processing water, thereby purifying the processing water. The processing water (pure water) filtered by the second filtration unit 68 travels downstream in the water path 80 and reaches the pure water supply unit 74 fixed to the upper part of the frame 34.

[0065] During the filtration of used processing water, impurities captured by the second filter continuously accumulate in it. Furthermore, when the amount of impurities accumulated in the second filter exceeds its capacity limit, the processing water cannot be properly filtered, and the insufficiently filtered processing water is discharged from the second filtration section 68. Alternatively, the mesh of the second filter may become clogged, reducing the processing water handling capacity of the second filtration section 68.

[0066] Therefore, the second filter unit 68 must be replaced periodically for the period during which the specified performance can be maintained. The second filter unit 68 may be, for example, a box-type unit that can be replaced as a whole, or a unit that can restore its function by replacing only the filter.

[0067] The pure water supply unit 74 has the function of supplying the processing water (pure water) generated by the second filter unit 68 to the processing apparatus 2 via the water supply passage 28. The pure water supply unit 74 has a temperature regulation mechanism (not shown), such as a heat source like a heating wire or a cooling source like a Peltier element, and has the function of adjusting the temperature of the processing water supplied to the processing apparatus 2. That is, the pure water supply unit 74 functions as a temperature regulation unit.

[0068] The processing water supplied to the processing apparatus 2 from the pure water supply unit 74 has had processing debris and impurity ions removed, and is used as pure water in the processing apparatus 2. Thus, the waste liquid discharged from the processing apparatus 2 is purified by the processing waste liquid treatment device 22 and returned to the processing apparatus 2 as pure water. The water path 80 is the flow path for water that is sent from the processing apparatus 2, passes through the waste liquid storage tank 36, the first filter unit 44, the clean water storage tank 54, the ultraviolet irradiation unit 62, the ion exchange resin unit 64, the second filter unit 68, and the pure water supply unit 74, and then returns to the processing apparatus 2.

[0069] A pressure gauge 78a is provided between the wastewater supply pump 38 and the first filter unit 44 in the water path 80, which serves as the supply path for supplying used processed water to the filter of the first filter unit 44. The pressure gauge 78a is capable of measuring the pressure of the water flowing in the water path 80. When the pressure gauge 78a is used, for example, the pressure of the water delivered to the first filter unit 44 by the wastewater supply pump 38 can be monitored.

[0070] When the processing water is continuously filtered using the first filter section 44, processing debris and the like continuously accumulate in the first filter. Furthermore, when the amount of processing debris and the like accumulates in the first filter beyond the permissible limit, the performance of the first filter deteriorates, and it becomes unable to adequately remove the processing debris and the like contained in the processing water. Therefore, a pressure gauge 78a has conventionally been used to monitor the status of the first filter. For example, the indication value of the pressure gauge 78a is displayed on the display unit 30a, and the user of the processing device 2 replaces the first filter when the indication value exceeds the permissible value.

[0071] However, the reading of pressure gauge 78a sometimes rises sharply when approaching the permissible value. That is, the user of the processing unit 2 cannot anticipate that the reading of pressure gauge 78a will reach the permissible value before it does. Furthermore, when the reading reaches the permissible value, a warning must be received, and a new first filter must be hastily prepared for replacement. Therefore, the replacement of the first filter is not always performed at an effective time, and sometimes this reduces the processing efficiency of the processing unit 2.

[0072] Alternatively, a pressure gauge 78b can be installed between the ion exchange resin section 64 and the second filter section 68 in the water circuit 80. However, the same problem arises when the replacement period of the second filter in the second filter section 68 is determined based on the reading of the pressure gauge 78b.

[0073] Therefore, in one aspect of the display system of the present invention, the filter replacement period is managed based on the amount of processing performed on the workpiece. Specifically, the display unit 30a displays an information display screen containing information related to a reference for the filter replacement period. This information display screen displayed by the display unit 30a includes, for example, a display of the total processing amount calculated based on the processing history previously performed in the processing apparatus 2 and a display of the standard total processing amount as a reference for the filter replacement period.

[0074] Here, the standard total processing capacity refers to the value corresponding to the amount of processing water consumed that can be filtered by the filter. That is, when the processing unit 2 repeatedly processes the workpiece while consuming processing water, the filter's filtration capacity is limited when the total processing capacity reaches the standard total processing capacity, marking the filter's replacement period. Therefore, the standard total processing capacity serves as information as a reference for the filter's replacement period.

[0075] When an information display screen showing both the total processing quantity and the standard total processing quantity is displayed on the display unit 30a, the user of the processing device 2 can observe the display on the display unit 30a to predict the filter replacement time. Therefore, the user can prepare new filters in advance and perform filter replacement at a convenient time. Next, examples of the structural elements constituting the display system and the information display screen displayed on the display unit 30a will be described.

[0076] The display system in this embodiment is implemented through a control unit of the processing apparatus 2 that controls each structural element, or a control unit of the processing waste liquid treatment device 22 that controls each structural element. Alternatively, the two control units can function as a single unit to achieve the function of the display system. Furthermore, the display system can also be implemented using hardware external to the processing apparatus 2 and the processing waste liquid treatment device 22. Figure 1 The structural elements of the control unit 32 that implements the display system are schematically shown.

[0077] For example, the control unit 32 may be composed of a computer having a processing device such as a CPU (Central Processing Unit), a main storage device such as DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as flash memory. The function of the control unit 32 is achieved by causing the processing device to operate according to software stored in the auxiliary storage device. The control unit 32 controls the operation of each structural element belonging to the processing device 2 or the processing waste liquid treatment device 22.

[0078] like Figure 1 As shown, the control unit 32 includes a processing history recording unit 32a and a total processing quantity calculation unit 32b. The processing history recording unit 32a records the processing history performed by the processing unit 16 in the processing apparatus 2. The total processing quantity calculation unit 32b calculates the total processing quantity performed by the processing apparatus 2 based on the processing history recorded in the processing history recording unit 32a.

[0079] Here, the processing history refers to information related to the processing performed on the workpiece using the processing unit 2. When the workpiece is processed using the processing unit 16, a portion of the workpiece is removed, and the cutting tools and other processing equipment in the processing unit 16 are consumed, generating processing chips. When processing is performed while providing pure water to the workpiece as processing water, the generated processing chips are taken into the processing water and removed.

[0080] The used processing water, containing machining debris, is transported to the processing wastewater treatment device 22. Then, in the first filtration section 44, the machining debris is removed from the used processing water (wastewater) by a first filter. Additionally, in the second filtration section 68, impurities are removed from the processing water by a second filter. Although machining debris continuously accumulates in each filter, the amount of machining debris depends on the processing performed by the processing device 2. Therefore, when estimating the amount of machining debris accumulated in each filter, the processing performed by the processing device 2 can be referenced.

[0081] More specifically, the amount of machining chips generated can be referenced to the volume of the portion removed from the workpiece through machining and the volume consumed by the machining tool. Therefore, for example, if the machining device 2 is a cutting device, the machining history recorded in the machining history record unit 32a can include information such as the depth, width, and length of the cutting groove formed on the workpiece. Alternatively, the depth of cut of the cutting tool into the workpiece, the cutting edge thickness of the cutting tool, and the position and number of predetermined machining lines on the front surface of the workpiece can be recorded as machining history in the machining history record unit 32a instead of this information.

[0082] Furthermore, for example, if the processing device 2 is a grinding device, the processing history recorded in the processing history record unit 32a may include information such as the diameter of the workpiece and the thickness removed by grinding. Alternatively, the area of ​​the surface being processed on the workpiece and the grinding feed rate of the grinding unit may be recorded in the processing history record unit 32a instead of this information.

[0083] One of the most important pieces of information in the processing history recorded in the processing history record unit 32a is the amount of relative processing feed between the holding unit 14 and the processing unit 16 during the processing of the workpiece by the processing unit 16. When the workpiece is processed repeatedly under constant processing conditions, it can be said that the amount of processing performed by the processing device 2 is proportional to the amount of processing feed. Therefore, the processing history recorded in the processing history record unit 32a can include the relative amount of processing feed.

[0084] When referring to the processing history recorded in the processing history record unit 32a, the total processing volume that can be used to predict the filter replacement period can be calculated. The total processing volume calculation unit 32b has the function of calculating the total processing volume based on the processing history recorded in the processing history record unit 32a. Moreover, during the processing of the workpiece by the processing device 2, the total processing volume calculated by the total processing volume calculation unit 32b gradually increases.

[0085] The control unit 32 also has a standard total processing capacity storage unit 32c that stores the aforementioned standard total processing capacity of the filter. This standard total processing capacity is consistent with the total processing capacity of the processing unit 16 on the workpiece when the pressure gauges 78a and 78b reach the pressure value indicating that the filter is in its replacement period, while the used processing water is being filtered using the filter.

[0086] Here, the readings of pressure gauges 78a and 78b increase slowly before the filter's replacement period, and then increase sharply when the replacement period arrives. Therefore, it is not easy to predict the replacement period based on the readings of pressure gauges 78a and 78b before it arrives. On the other hand, if the processing conditions are constant, the total processing volume calculated by the total processing volume calculation unit 32b increases proportionally to the number of processed items, making it easier to predict the filter's replacement period in advance.

[0087] Therefore, in the display system of this embodiment, information related to the reference for the replacement period is created based on the total processing quantity calculated according to the processing history recorded by the processing history recording unit 32a and the standard total processing quantity stored in the standard total processing quantity storage unit 32c. Then, the display unit 30a displays an information display screen containing the information related to the reference for the replacement period.

[0088] The control unit 32 also includes a display unit control unit 32d that controls the display of the display unit 30a. The display unit control unit 32d causes the display unit 30a to display an information display screen that provides operators with information related to the replacement schedule of the filter.

[0089] Figure 4 The diagram schematically illustrates an example of a display unit 30a that displays this information. Figure 4 The diagram schematically illustrates an example where the machining device 2 is a cutting device and the machining length (m) of the workpiece has been machined is used as an indicator of the machining amount. In this example, when the workpiece is repeatedly cut under certain machining conditions, the filter is considered to be replaced when the total machining length (total machining amount) is 600m. That is, in this example, the standard total machining amount, which serves as the basis for the filter replacement period, can be said to be 600m.

[0090] Furthermore, the total processing volume of this standard can be derived through prior testing. For example, if it is predetermined that multiple workpieces of the same type will be processed repeatedly under the same processing conditions, the processing history is accumulated in the processing history record unit 32a, and the workpieces are processed sequentially while monitoring the readings of the pressure gauges 78a and 78b.

[0091] Furthermore, when the indicated values ​​of pressure gauges 78a and 78b become values ​​indicating that it is time to replace the filter, the total processing volume calculation unit 32b calculates the total processing volume. This calculated total processing volume is then recorded as a standard total processing volume in the standard total processing volume storage unit 32c.

[0092] exist Figure 4 The screen shown displays a value of 600m as the standard total machining quantity (82). Additionally, the screen displays a value of 450m as the total machining quantity calculated based on the machining history performed on the workpiece (84). In this case, it can be understood that the filter replacement period is reached when the machining length for cutting the workpiece using machining unit 16 is further increased by 150m.

[0093] Additionally, this information display screen can also show the filter utilization rate as the ratio obtained by dividing the total processing volume to date by the standard total processing volume. Figure 4 The information display screen shown includes a display of the filter's usage rate 86. Since it's possible to anticipate when the usage rate reaches 100%, replacement can be planned accordingly.

[0094] In addition, such as Figure 4 As shown, the quantity of remaining workpieces that can be processed by the processing device 2 before the filter replacement period can also be displayed on the display unit 30a. Figure 4 The screen shown includes a display of the expected number of sheets that can be processed (88).

[0095] In this case, for example, the unit processing quantity when processing a workpiece is calculated in advance. Then, the value obtained by dividing the difference between the standard total processing quantity and the total processing quantity performed so far by that unit processing quantity is displayed. When the number of remaining workpieces that can be processed is displayed on the display unit 30a, the operator can more intuitively grasp the filter replacement period, thereby being able to prepare replacement parts more systematically.

[0096] In addition, such as Figure 4 As shown, the information display screen may also include a display of the expected processing time (90) and an expected replacement period (92). The expected processing time refers to the predicted time until the filter becomes a replacement period when the processing device 2 continues to process the workpiece. This expected processing time is calculated by dividing the value obtained by subtracting the total processing quantity from the standard total processing quantity by the processing quantity per unit time, which is calculated based on the processing history recorded by the processing history record unit 32a.

[0097] Furthermore, the anticipated replacement period refers to the time when the filter replacement operation should be carried out, and it is calculated by adding the current time to the anticipated processing time. Users of processing unit 2 can determine their processing schedule by planning to replace the filter at this anticipated replacement period. Additionally, they can determine their own schedule.

[0098] Therefore, the information display screen displayed on the display unit 30a includes one or more of the following groups: a display of total processing quantity 84, a display of standard total processing quantity 82, a display of estimated processing time 90, and a display of estimated replacement period 92. The information display screen may also include a display of filter usage rate 86 and a display of estimated number of sheets to be processed 88.

[0099] Thus, when confirmed Figure 4 When the information is displayed, the expected filter replacement period can be easily understood. However, in the display system of this embodiment, the total processing volume and standard total processing volume displayed by the display unit 30a are only references. For example, when the total processing volume reaches the standard total processing volume, the indicated values ​​of the pressure gauges 78a and 78b are not necessarily the indicated values ​​representing the filter replacement period.

[0100] Depending on the state of the processing unit 2 and the workpiece, processing may sometimes proceed slightly differently than intended, resulting in a deviation from the intended amount of processing debris and other contaminants removed by being immersed in the processing water. For example, there may be cases where the total processing volume reaches the standard total processing volume and a filter can still be used subsequently, or where the amount of processing debris and other contaminants accumulating in the filter exceeds the allowable amount before the total processing volume reaches the standard total processing volume.

[0101] In this case, it is also possible to pay attention to the indicated values ​​of pressure gauges 78a and 78b when the total processing volume is close to the standard total processing volume, and to determine whether to replace the filter based on the indicated values ​​of pressure gauges 78a and 78b.

[0102] In this case, the user of the processing device 2 can also detect the approaching filter replacement period based on the total processing volume before the changes in the indicated values ​​of pressure gauges 78a and 78b become drastic. Therefore, according to the display system of this embodiment, the burden on the user can be reduced by shortening the time when the indicated values ​​of pressure gauges 78a and 78b should be checked.

[0103] As explained above, the display unit according to this embodiment can manage the filter replacement period based on the processing volume of the workpiece. Since an information display screen serving as a reference for the filter replacement period is displayed on the display unit 30a, the user of the processing apparatus 2 can observe the display on the display unit 30a to predict the filter replacement period. Therefore, the user can prepare new filters in advance and perform filter replacement operations at a convenient time.

[0104] Furthermore, in the above embodiments, the processing of the same type of workpiece was mainly described using the processing apparatus 2 to repeatedly process the same type of workpiece under constant processing conditions. However, the display system of one embodiment of the present invention is not limited to this. That is, the processing conditions and the type of workpiece processed by the processing apparatus 2 may not be constant. For example, the processing conditions performed in the processing apparatus 2 may be changed during the use of the filter, and the type of workpiece processed may also be changed.

[0105] Furthermore, in the above embodiment, the example described mainly uses the processing feed rate of the processing feed unit as the value of the total processing amount used in the prediction of the filter replacement period, but the display system of one aspect of the present invention is not limited to this. That is, other values ​​can be used for the total processing amount. For example, the volume of the portion removed from the workpiece by processing can also be used as the value of the total processing amount.

[0106] For example, when machining a workpiece using a cutting tool, the volume of the portion removed from the workpiece can be calculated based on the product of the cross-sectional area of ​​the cutting groove formed on the workpiece and the machining length. Similarly, when grinding a workpiece using a grinding wheel, the volume of the portion removed from the workpiece can be calculated based on the product of the height of the workpiece removed due to thinning and the area of ​​the ground surface of the workpiece.

[0107] In this case, even if the processing conditions change during the use of the filter, it is possible to calculate the total processing volume and determine the filter replacement period based on the calculated total processing volume. For example, when cutting a workpiece, even if the processing conditions change in a way that alters the cutting tool's cutting edge thickness and the workpiece's thickness, the volume of the portion removed from the workpiece can be calculated. Furthermore, since the total volume of the portion removed before and after the change in processing conditions can be summed, the filter replacement period can be determined based on the total processing volume represented by this volume.

[0108] For example, when grinding a workpiece, even if the type of workpiece being ground is changed during the use of a filter, resulting in grinding of workpieces with different diameters, the volume of the portion removed from the workpiece can be calculated. Furthermore, since the total volume of the portion removed before and after changing the diameter of the workpiece can be summed, the filter replacement period can be determined based on the total amount of work processed, expressed by this volume.

[0109] Furthermore, depending on the processing conditions of the workpiece, there may be situations where a higher proportion of large processing chips are generated, or a higher proportion of small processing chips are generated. In these cases, the filter lifespan varies.

[0110] For example, smaller processing chips can sometimes get embedded in the filter mesh, easily causing clogging. Sometimes, the filter needs to be replaced before it can take in the amount of processing chips expected based on performance. On the other hand, when larger processing chips are generated, even if they accumulate on the filter, the path of the processing water is less likely to become clogged because larger gaps are formed between the chips. In this case, the filter can take in more processing chips than expected based on performance.

[0111] Therefore, it is sometimes impossible to determine the filter replacement period uniformly based on the volume of machining chips taken into the filter. In such cases, for example, the filter replacement period can be determined by correcting the standard total machining volume using a correction factor that depends on the machining conditions.

[0112] For example, in processing apparatus 2, the workpiece is processed under specific processing conditions, and the indication values ​​of pressure gauges 78a and 78b installed in water passage 80 are monitored. When the indication value becomes a value indicating the replacement period of the filter, processing is stopped and the filter is removed from filter sections 44 and 68. Furthermore, if the weight of the filter before and after use is measured, the weight of processing debris and the like taken into the filter can be calculated. Thus, the total weight of processing debris that can be removed by the filter under the processing conditions can be derived, and the total volume of processing debris corresponding to that total weight can be calculated.

[0113] Furthermore, for example, by comparing the standard total processing volume of a filter under standard processing conditions, the extent to which the total processing volume increases or decreases during the filter replacement period under specific processing conditions can be evaluated, thereby enabling the calculation of a correction factor for that specific processing condition. Based on this, by multiplying the standard total processing volume stored in the standard total processing volume storage unit 32c by the correction factor, the total processing volume for the filter replacement period under that specific processing condition can be derived.

[0114] When the workpiece is processed under conditions that produce relatively small amounts of machining chips, the correction factor is less than 1. In this case, the filter can be replaced with a total machining volume less than the standard total machining volume of the filter. On the other hand, when the workpiece is processed under conditions that produce relatively large amounts of machining chips, the correction factor is greater than 1. In this case, the workpiece can be processed with a total machining volume greater than the standard total machining volume of the filter.

[0115] The information display screen shown on the display unit 30a by means of a display system according to one aspect of the present invention may include information on the standard total processing quantity based on a filter that has been corrected by a correction coefficient related to the processing conditions of the workpiece implemented by the processing device 2.

[0116] In addition, the structure and method of the above embodiments can be implemented by appropriate modifications without departing from the purpose of the present invention.

Claims

1. A display system that displays a reference for filter replacement time in a processing wastewater treatment device connected to a processing apparatus, wherein the filter is used to regenerate used processing water discharged from the processing apparatus, and the regenerated processing water is supplied to the processing apparatus. The processing apparatus includes: A holding unit that holds the workpiece. The processing unit processes the workpiece while supplying the processing water to the workpiece held in the holding unit; and The machining feed unit feeds the holding unit relative to the machining unit. Its features are, This display system has: The processing history recording unit records information related to the processing performed on the workpiece by the processing unit in the processing apparatus as a processing history; and The display unit is capable of displaying an information screen containing information related to the reference during the replacement period. The information display screen includes one or more of the following groups: a display of total processing volume and standard total processing volume, a display of estimated processing time, and a display of estimated replacement period. The total processing capacity is calculated based on the processing history recorded by the processing history record department. The standard total processing capacity is the processing capacity corresponding to the amount of processing water consumed by the processing unit while processing, which is the amount of processing water that the filter can filter. The anticipated processing time is calculated by dividing the value obtained by subtracting the total processing quantity from the standard processing quantity by the processing quantity per unit time, which is calculated based on the processing history recorded by the processing history record department. The anticipated replacement period is calculated by adding the current moment to the anticipated processable time.

2. The display system according to claim 1, characterized in that, In this processing wastewater treatment device, a pressure gauge is installed on the supply path that provides the used processing water to the filter. The standard total processing capacity is consistent with the total processing capacity of the processing unit for the workpiece when the pressure gauge reading reaches the pressure value indicating that the filter is in the replacement period, while the used processing water is being filtered using the filter.

3. The display system according to claim 1, characterized in that, The processing history recorded in the processing history record unit includes the amount of relative processing feed between the holding unit and the processing unit implemented by the processing feed unit during the processing of the workpiece by the processing unit.

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