A radio frequency electrode feeding device

Abstract

The present invention relates to a radio frequency electrode feeding device, which includes: a support component having a heat dissipation gap; a plurality of placement components arranged on the support component along a first direction; each placement component includes a first placement piece and a second placement piece arranged on the support component, the first placement piece and the second placement piece are respectively located on both sides of the heat dissipation gap in the first direction; and a plurality of electrode components, the electrode components correspond to the placement components one by one, each electrode component includes a first electrode unit and a second electrode unit, and the first electrode unit and the second electrode unit of each electrode component are respectively connected to the first placement piece and the second placement piece of the corresponding placement component. The radio frequency electrode feeding device of the present invention can accommodate multiple graphite boats on the support component, and realize radio frequency electrode feeding of multiple graphite boats by cooperating with multiple electrode components and multiple placement components, so that the cavity of a coating device can accommodate multiple graphite boats, improve production capacity, and reduce the cost of single-chip battery cells.

Description

Technical Field

[0001] The invention relates to the technical field of photovoltaic equipment, and in particular to a radio frequency electrode feeding device. Background Art

[0002] With the popularization of solar power generation, the demand for related photovoltaic products is increasing, so the production capacity requirements for photovoltaic equipment are also increasing. Under this background, companies are in urgent need of increasing production capacity. However, the traditional RF electrode feeding device uses the method of feeding RF electrodes to graphite boats one by one, which has low production efficiency and can no longer meet the production capacity requirements. Summary of the invention

[0003] Based on this, it is necessary to provide a radio frequency electrode feeding device that improves the above defects, in order to solve the problem that the prior art needs to feed radio frequency electrodes to the graphite boats one by one, the production efficiency is low, and it can no longer meet the production capacity requirements.

[0004] A radio frequency electrode feeding device, comprising:

[0005] A support assembly having a heat dissipation gap;

[0006] A plurality of placement components are arranged on the support component along the first direction; each of the placement components comprises a first placement piece and a second placement piece provided on the support component, the first placement piece and the second placement piece are respectively located on two sides of the heat dissipation gap in the first direction; and

[0007] A plurality of electrode assemblies correspond one-to-one to the placement assemblies, each of the electrode assemblies comprises a first electrode unit and a second electrode unit, and the first electrode unit and the second electrode unit of each electrode assembly are respectively connected to the first placement piece and the second placement piece of the corresponding placement assembly.

[0008] In one embodiment, the support assembly includes a first support rod and a second support rod arranged relatively to each other in the first direction, the heat dissipation gap is formed between the first support rod and the second support rod, and both of the first support rod and the second support rod extend longitudinally along a second direction perpendicular to the first direction;

[0009] The first placement pieces of the plurality of placement components are arranged on the first support rod at intervals along the second direction; and the second placement pieces of the plurality of placement components are arranged on the second support rod at intervals along the second direction.

[0010] In one embodiment, the first support rod and the second support rod are ceramic rods.

[0011] In one embodiment, the first placement member includes a first placement block and a second placement block, and the first placement block and the second placement block are arranged on the first support rod at intervals along the first direction;

[0012] The second placement member includes a third placement block and a fourth placement block, and the third placement block and the fourth placement block are sleeved on the second support at intervals along the first direction;

[0013] Each of the first electrode units is connected to the corresponding first placement block and / or the third placement block, and each of the second electrode units is connected to the corresponding second placement block and / or the fourth placement block.

[0014] In one embodiment, each of the first electrode units includes a first electrode rod and a first electrode connecting rod connected thereto, and each of the first electrode connecting rods connects the first placement block and the third placement block of the corresponding placement assembly.

[0015] In one embodiment, each of the second electrode units includes a second electrode rod and a second electrode connecting rod connected thereto, and each of the second electrode connecting rods connects the second placement block and the fourth placement block of the corresponding placement assembly.

[0016] In one embodiment, each of the first electrode rods and each of the second electrode rods are led out to the same end of the first support rod and the second support rod in the second direction.

[0017] In one embodiment, the first electrode rod and the second electrode rod are both sleeved with an insulating tube.

[0018] In one embodiment, fixing seats are installed at both ends of the first support rod and the second support rod along the first direction.

[0019] In one embodiment, the electrode assembly further includes a connecting sheet, and the electrode assembly further includes a plurality of connecting sheets respectively disposed on the first placement member and the second placement member, each of the first electrode units is connected to the corresponding first placement member through the connecting sheet, and each of the second electrode units is connected to the corresponding second placement member through the connecting sheet.

[0020] In this way, the RF electrode feeding device of the present invention can accommodate multiple graphite boats on the supporting assembly, and realize RF electrode feeding of multiple graphite boats through multiple electrode assemblies cooperating with multiple placement assemblies, so that the cavity of a coating equipment can accommodate multiple graphite boats, thereby improving production capacity and reducing the cost of single-cell battery cells. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1It is a structural schematic diagram of a radio frequency electrode feeding device in an embodiment of the present invention;

[0022] Figure 2 for Figure 1 A top view of the RF electrode feedthrough shown in FIG.

[0023] Support assembly 10; heat dissipation gap 11; first support rod 12, second support rod 13; fixing seat 14; connecting piece 15;

[0024] First placement piece 21; first placement block 211; second placement block 212; second placement piece 22; third placement block 221; fourth placement block 222;

[0025] The electrode assembly 30 includes a first electrode unit 31 , a first electrode rod 311 , a first electrode connecting rod 312 , a second electrode unit 32 , a second electrode rod 321 , a second electrode connecting rod 322 , an extension section 33 , a curved section 34 , and an insulating tube 35 . DETAILED DESCRIPTION

[0026] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0027] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0028] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0029] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0031] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation method.

[0032] See also Figure 1 and Figure 2 , Figure 1 FIG. 4 shows a schematic structural diagram of a radio frequency electrode feeding device in an embodiment of the present invention. Figure 2 for Figure 1 A top view of the RF electrode feedthrough shown in FIG.

[0033] A radio frequency electrode feeding device provided in an embodiment of the present invention includes a supporting component 10 , a placement component and an electrode component 30 .

[0034] The support assembly 10 is used to carry the graphite boat. The support assembly 10 has a heat dissipation gap 11. A plurality of graphite boats supported by the support assembly 10 can be arranged at intervals along a first direction and correspond to the heat dissipation gap 11 to ensure the heat dissipation efficiency of each graphite boat.

[0035] There are multiple placement assemblies, which are arranged on the support assembly 10 along the first direction. Each placement assembly is used to place a graphite boat, so that each graphite boat is supported on the support assembly 10 through the corresponding placement assembly.

[0036] There are multiple electrode assemblies 30, and the multiple electrode assemblies 30 correspond to the multiple placement assemblies one by one, and each electrode assembly 30 is used to connect to the graphite boat on the corresponding placement assembly to apply voltage to each graphite boat. Each electrode assembly 30 includes a first electrode unit 31 and a second electrode unit 32, and the first electrode unit 31 and the second electrode unit 32 of each electrode assembly 30 are respectively connected to the first placement piece 21 and the second placement piece 22 of the corresponding placement assembly. It can be understood that one end of each first electrode unit 31 is connected to an external RF power supply, and the other end is connected to the first placement piece 21 at the bottom of the corresponding graphite boat, and the RF power supply voltage is conducted to the graphite boat through the first placement piece 21, forming the positive or negative electrode of the graphite boat. One end of each second electrode unit 32 is connected to an external RF power supply, and the other end is connected to the second placement piece 22 at the bottom of the corresponding graphite boat, and the RF power supply voltage is conducted to the graphite boat through the second placement piece 22, forming the negative or positive electrode of the graphite boat, so as to discharge the graphite boat through the RF power supply voltage received on both sides of the graphite boat. Furthermore, a plurality of electrode assemblies 30 cooperate with a plurality of placement assemblies to achieve simultaneous discharge of a plurality of graphite boats placed on each placement assembly.

[0037] In actual operation of the above-mentioned RF electrode feeding device, a graphite boat is placed on each placement component, and each graphite boat is electrically connected to the first electrode unit 31 and the second electrode unit 32 through the corresponding first placement piece 21 and the second placement piece 22, thereby achieving electrical conduction with the positive and negative electrodes of the external RF power supply, and then using the external RF power supply to complete the discharge of each graphite boat.

[0038] In this way, the RF electrode feeding device of the present invention can accommodate multiple graphite boats on the support assembly 10, and realize RF electrode feeding of each graphite boat through multiple electrode assemblies 30 in conjunction with multiple placement assemblies, which effectively improves production efficiency, is conducive to increasing production capacity, and reduces the cost of single-cell battery cells.

[0039] Specific to Figure 2 In the illustrated embodiment, the first direction is the left-right direction, and the second direction described below is the up-down direction.

[0040] In an embodiment of the present invention, the support assembly 10 includes a first support rod 12 and a second support rod 13 arranged relatively in a first direction, the heat dissipation gap 11 is formed between the first support rod 12 and the second support rod 13, and the first support rod 12 and the second support rod 13 both extend longitudinally along the second direction. A plurality of first placement members 21 of the placement assembly are arranged on the first support rod 12 at intervals along the second direction; a plurality of second placement members 22 of the placement assembly are arranged on the second support rod 13 at intervals along the second direction, and the two support rods (i.e., the first support rod 12 and the second support rod 13) play a fixed supporting role for the entire RF electrode feeding device and a plurality of graphite boats. Preferably, the first support rod 12 and the second support rod 13 are ceramic rods, which can play an insulating role.

[0041] Specifically, a fixing seat 14 is provided at both ends of the first support rod 12 and the second support rod 13. The fixing seat 14 is sleeved on the first support rod 12 and the second support rod 13, and a connection hole for connection and fixing is provided on the fixing seat 14. Preferably, the fixing seat 14 is fixed to a connecting piece of an external device, so as to play a role of fixing and supporting the first support rod 12 and the second support rod 13.

[0042] In the embodiment of the present invention, the first placement member 21 includes a first placement block 211 and a second placement block 212, and the first placement block 211 and the second placement block 212 are both spaced and sleeved on the first support rod 12 in a hugging manner. The second placement member 22 includes a third placement block 221 and a fourth placement block 222, and the third placement block 221 and the fourth placement block 222 are also spaced and sleeved on the first support rod 12 in a hugging manner. One end of the first electrode unit 31 is connected to one or both of the first placement block 211 and the third placement block 221, and the radio frequency voltage is introduced into the first placement block 211 or the third placement block 221, and one end of the second electrode unit 32 is connected to one or both of the second placement block 212 and the fourth placement block 222, and the radio frequency voltage is introduced into the second placement block 212 or the fourth placement block 222. Preferably, one end of the first electrode unit 31 is connected to the first placement block 211, and one end of the second electrode unit 32 is connected to the fourth placement block 222. The first placement block 211 and the fourth placement block 222 are respectively located at the diagonals of the corresponding graphite boat, one in front and one behind, so that the discharge effect of the graphite boat can be better.

[0043] It should be noted that the first placement block 211, the second placement block 212, the third placement block 221 and the fourth placement block 222 are not limited to being fixedly installed with the first support rod 12 and the second support rod 13 by a hugging method. In other embodiments, other fastening methods may also be used, such as screw fastening, snap-on fastening, etc., which are not limited here. Further, the first electrode unit 31 can arbitrarily select its connection method with the first placement block 211 and the third placement block 221, and the second electrode unit 32 can also arbitrarily select its connection method with the second placement block 212 and the fourth placement block 222, which are not limited here.

[0044] Furthermore, the first electrode unit 31 includes a first electrode rod 311 and a first electrode connecting rod 312 connected to the first electrode rod 311, one end of the first electrode rod 311 is connected to an external RF power source, and the other end is connected to the middle of the first electrode connecting rod 312. The two ends of the first electrode connecting rod 312 are respectively connected to the first placement block 211 and the third placement block 221, and the first placement block 211 and the third placement block 221 are connected through the first electrode connecting rod 312, so that one electrode is in contact with the graphite boat through the first placement block 211 and the third placement block 221 for electrical conduction, thereby increasing the conductive area of ​​the front end of the graphite boat, and greatly improving the conductive performance of the front end of the graphite boat. At the same time, the middle electrode connecting rod can connect the two first placement blocks 211 and the third placement block 221 into one body. When the fastening screws on the first placement block 211 and the third placement block 221 expand due to the heat generated by the discharge of the graphite boat, the single placement block and the fastening bolts are easily deformed, so that the fit between the placement block and the first support rod 12 is loosened and rotated, resulting in unstable contact between the front end of the graphite boat and the placement block. In addition, the two placement blocks connected as one body (i.e., the first placement block 211 and the third placement block 221) can interfere with each other, making the conductive performance of the front end of the graphite boat more excellent and reliable.

[0045] Among them, the second electrode unit 32 includes a second electrode rod 321 and a second electrode connecting rod 322 connected to the second electrode rod 321, two ends of the second electrode rod 321 are connected to an external RF power supply, and the other end is connected to the middle of the second electrode connecting rod 322. The two ends of the second electrode connecting rod 322 are respectively connected to the second placement block 212 and the fourth placement block 222, and the second placement block 212 and the fourth placement block 222 are connected through the second electrode connecting rod 322, so that one electrode is simultaneously in contact with the graphite boat through the second placement block 212 and the fourth placement block 222 for electrical conduction, increasing the conductive area of ​​the rear end of the graphite boat, so that the conductive performance of the rear end of the graphite boat is greatly improved. At the same time, the middle electrode connecting rod can connect the second placement block 212 and the fourth placement block 222 as a whole. When the placement block and the fastening screws on the placement block are subjected to the heat generated by the discharge of the graphite boat and expand at high temperature, the single placement block and the fastening bolt are easily deformed, so that the cooperation between the placement block and the second support rod 13 is loosened and rotated, resulting in unstable contact between the rear end of the graphite boat and the placement block. Furthermore, the two integrally connected placement blocks (ie, the second placement block 212 and the fourth placement block 222 ) can interfere with each other, so that the conductive performance of the rear end of the graphite boat is more excellent and reliable.

[0046] More specifically, each first electrode rod 311 and each second electrode rod 321 are led out to the same end of the first support rod 12 and the second support rod 13 in the second direction. Preferably, the first electrode rod 311 and the second electrode rod 321 both include an extension section 33 and a bending section 34, and the extension section 33 of the first electrode rod 311 and the second electrode rod 321 is parallel to the second direction, that is, extends along the extension direction of the first support rod 12 or the second support rod 13. The bending section 34 can be bent in any direction. Preferably, the first electrode rod 311 and the second electrode rod 321 are provided with a bending section 34 at one end close to the external RF power supply, and the first electrode rod 311 and the second electrode rod 321 can design the bending direction of the bending section 34 according to the position of the external RF power supply to avoid other components, so that the extension section 33 can fit the first support rod 12 or the second support rod 13 as much as possible and extend to the end of the first support rod 12 and the second support rod 13 in the second direction, and the overall arrangement of the first electrode rod 311 and the second electrode rod 321 is also more compact, safe and reliable.

[0047] It should be noted that the first electrode rod 311 and the second electrode rod 321 are not limited to being led out to the same end of the first support rod 12 and the second support rod 13 in the second direction by means of the bending section 34. In other embodiments, the composition of the first electrode rod 311 or the second electrode rod 321 can be selected according to actual conditions. For example, the first electrode rod 311 or the second electrode rod 321 can also have only the extension section 33, and other components can be avoided by changing the overall position of the first electrode rod 311 or the second electrode rod 321. This is not limited here.

[0048] Furthermore, the first electrode rod 311 and the second electrode rod 321 are both sleeved with an insulating tube 35 , and the insulating tube 35 can be used to protect and insulate the first electrode rod 311 and the second electrode rod 321 , respectively.

[0049] In the embodiment of the present invention, the electrode assembly 30 further includes a connecting sheet 15, through which the first electrode unit 31 is connected to the first placement piece 21, and the second electrode unit 32 is connected to the second placement piece 22. Preferably, the connecting sheet 15 is disposed on the first placement piece 21 and the second placement piece 22, and the first electrode unit 31 and the second electrode unit 32 pass through the connecting sheet 15. The connecting sheet 15 is used to connect the placement piece with the electrode unit. When the number of graphite boats is large, the arrangement of the electrode unit is also more complicated, and the connecting sheet 15 can make the connection between the placement piece and the electrode unit more flexible.

[0050] In the embodiment of the present invention, the support assembly 10 is composed of a first support rod 12 and a second support rod 13, and a heat dissipation gap 11 is formed between the first support rod 12 and the second support rod 13. A plurality of first placement members 21 are sleeved on the first support rod 12, and each first placement member 21 includes a first placement block 211 and a second placement block 212. A plurality of second placement members 22 are sleeved on the second support rod 13, and each second placement member 22 includes a third placement block 221 and a fourth placement block 222.

[0051] In this way, a plurality of graphite boats are placed one by one between each first support rod 12 and the second support rod 13, and each graphite boat is connected to the external RF power supply through the electrode assembly 30. Each electrode assembly 30 includes a first electrode unit 31 and a second electrode unit 32, the first electrode unit 31 includes a first electrode rod 311 and a first electrode connecting rod 312, and the second electrode unit 32 includes a second electrode rod 321 and a second electrode connecting rod 322. The first placement block 211 and the third placement block 221 are connected through the first electrode connecting rod 312, and then the positive electrode of the external RF power supply is conducted to the first placement block 211 and the third placement block 221 through the first electrode rod 311 connected to the first electrode connecting rod 312, so as to form a discharge to the positive electrode at the front end of the graphite boat. The second placement block 212 and the fourth placement block 222 are connected by the second electrode connecting rod 322, and then the negative electrode of the external RF power supply is conducted to the second placement block 212 and the fourth placement block 222 through the second electrode connecting rod 321 connected to the second electrode connecting rod 322, so as to form a discharge to the negative electrode of the rear end of the graphite, and cooperate with the first electrode unit 31 to complete the discharge of the entire graphite. Multiple electrode units cooperate with multiple placement components to form a discharge for multiple graphite boats placed on the support component 10.

[0052] The above-mentioned radio frequency electrode feeding device has the following advantages:

[0053] The RF electrode feeding device of the present invention can accommodate multiple graphite boats on the support component 10, and realize RF electrode feeding of multiple graphite boats through multiple electrode components 30 in conjunction with multiple placement components, so that the cavity of a coating equipment can accommodate multiple graphite boats, thereby improving production capacity and reducing the cost of single-cell battery cells.

[0054] The middle electrode connecting rod can connect the two placement blocks into one. When the placement blocks and the fastening screws on the placement blocks expand due to the heat generated by the discharge of the graphite boat, the single placement blocks and fastening bolts are easily deformed, causing the fit between the placement blocks and the support rod to loosen and rotate, resulting in unstable contact between the graphite boat and the placement blocks. The two placement blocks connected as one can interfere with each other, making the conductivity of the graphite boat more excellent and reliable.

[0055] The electrode rod can be designed with a bending direction of the bending section 34 according to the position of the external RF power supply to avoid other components, so that the extension section 33 can fit the first support rod 12 or the second support rod 13 as closely as possible and extend to the ends of the first support rod 12 and the second support rod 13 in the second direction, and the overall arrangement of the first electrode rod 311 and the second electrode rod 321 is also more compact, safe and reliable.

[0056] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0057] The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A radio frequency electrode feeding device, characterized in that: The radio frequency electrode feeding device comprises: A support assembly (10) having a heat dissipation gap (11); A plurality of placement components are arranged on the support component (10) along a first direction; each of the placement components comprises a first placement piece (21) and a second placement piece (22) arranged on the support component (10), the first placement piece (21) and the second placement piece (22) being respectively located on two sides of the heat dissipation gap (11) in the first direction; and A plurality of electrode assemblies (30) corresponding one to the placement assemblies, each of the electrode assemblies (30) comprising a first electrode unit (31) and a second electrode unit (32), the first electrode unit (31) and the second electrode unit (32) of each electrode assembly (30) being respectively connected to the first placement piece (21) and the second placement piece (22) of the corresponding placement assembly; The support assembly (10) comprises a first support rod (12) and a second support rod (13) arranged relatively to each other in the first direction, the heat dissipation gap (11) being formed between the first support rod (12) and the second support rod (13), and both extending longitudinally along a second direction perpendicular to the first direction; The first placement members (21) of the plurality of placement assemblies are arranged on the first support rod (12) at intervals along the second direction; the second placement members (22) of the plurality of placement assemblies are arranged on the second support rod (13) at intervals along the second direction; Each of the first placement members (21) comprises a first placement block (211) and a second placement block (212), wherein the first placement block (211) and the second placement block (212) are arranged on the first support rod (12) at intervals along the first direction; Each of the second placement members (22) comprises a third placement block (221) and a fourth placement block (222), and the third placement block (221) and the fourth placement block (222) are sleeved on the second support rod (13) at intervals along the first direction; Each of the first electrode units (31) is connected to the corresponding first placement block (211) and / or the third placement block (221), and each of the second electrode units (32) is connected to the corresponding second placement block (212) and / or the fourth placement block (222); The first support rod (12) and the second support rod (13) are ceramic rods.

2. The radio frequency electrode feedthrough device according to claim 1, characterized in that: Each of the first electrode units (31) comprises a first electrode rod (311) and a first electrode connecting rod (312) connected thereto, and each of the first electrode connecting rods (312) connects the first placement block (211) and the third placement block (221) of the corresponding placement assembly.

3. The radio frequency electrode feedthrough device according to claim 2, characterized in that: Each of the second electrode units (32) comprises a second electrode rod (321) and a second electrode connecting rod (322) connected thereto, and each of the second electrode connecting rods (322) connects the second placement block (212) and the fourth placement block (222) of the corresponding placement assembly.

4. The radio frequency electrode feedthrough device according to claim 3, characterized in that: Each of the first electrode rods (311) and each of the second electrode rods (321) are led out to the same end of the first support rod (12) and the second support rod (13) in the second direction.

5. The radio frequency electrode feedthrough device according to claim 3, characterized in that: The first electrode rod (311) and the second electrode rod (321) are both sleeved with an insulating tube (35).

6. The radio frequency electrode feedthrough device according to claim 1, characterized in that: Fixed seats (14) are installed at both ends of the first support rod (12) and the second support rod (13) along the first direction.

7. The radio frequency electrode feedthrough device according to any one of claims 1 to 6, characterized in that: The electrode assembly (30) further comprises a plurality of connecting sheets (15) respectively arranged on the first placement piece (21) and the second placement piece (22); each of the first electrode units (31) is connected to the corresponding first placement piece (21) via the connecting sheet (15); and each of the second electrode units (32) is connected to the corresponding second placement piece (22) via the connecting sheet (15).

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