A structure for reducing cooling loss in ultra-low temperature vacuum freezing chamber

Abstract

A structure for reducing cooling loss in an ultra-low-temperature vacuum freezing chamber comprises an ultra-low-temperature vacuum freezing chamber and a bottom plate. The bottom plate is disposed at the lower open portion of the chamber and is provided with two through holes. An annular groove is provided on the upper side of the bottom plate corresponding to each through hole. Alternating first annular grooves are provided at the bottom of the annular groove and on the lower side of the bottom plate. A mounting flange is provided on the lower side of the bottom plate corresponding to the through hole. The upper and lower sides of the mounting flange are provided with a plurality of alternating second annular grooves. A mixed refrigerant pipe is provided at the center of the mounting flange. The upper end of the mixed refrigerant pipe passes through the through hole and enters the ultra-low-temperature vacuum freezing chamber. The lower end of the mixed refrigerant pipe extends beyond the mounting flange. The mixed refrigerant pipe is in a non-contact state with the ultra-low-temperature vacuum freezing chamber housing and the bottom plate. This avoids direct contact between the mixed refrigerant pipe and the outer wall of the ultra-low-temperature vacuum freezing chamber, prevents frost on the outer wall of the ultra-low-temperature vacuum freezing chamber, and reduces cooling loss.

Description

Technical Field

[0001] The invention relates to a structure for reducing the cooling loss of an ultra-low temperature vacuum freezing chamber. Background Art

[0002] The ion implantation process in integrated circuit chip manufacturing sometimes needs to be performed at ultra-low temperatures, necessitating the ion implanter be equipped with an ultra-low temperature vacuum freezer chamber to achieve this. The ultra-low temperature vacuum freezer chamber consists of a housing and a horizontally arranged bottom plate. Two mixed refrigerant pipes, one for inlet and one for outlet, are installed within the chamber. The chamber must be evacuated during use. Because the temperature difference between the mixed refrigerant pipes and the outer wall of the chamber is 150°C, connecting them directly to the outer wall of the chamber results in significant cooling loss and frost on the chamber wall. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to provide a structure for reducing the cooling loss of an ultra-low temperature vacuum freezing chamber, which avoids direct contact between the mixed refrigerant pipeline and the outer wall of the ultra-low temperature vacuum freezing chamber, prevents frost on the outer wall of the ultra-low temperature vacuum freezing chamber, and also reduces cooling loss.

[0004] In order to solve the above technical problems, the present invention provides a structure for reducing the cooling capacity loss of an ultra-low temperature vacuum freezing chamber, comprising an ultra-low temperature vacuum freezing chamber and a horizontally arranged bottom plate, the bottom plate being arranged at the open lower side of the ultra-low temperature vacuum freezing chamber and cooperating therewith, two through holes for installing mixed refrigerant pipelines are provided on the bottom plate, an annular groove arranged circumferentially around the through hole is provided at the upper position of the bottom plate corresponding to each through hole, a plurality of coaxially arranged first annular grooves are provided at the bottom of the annular groove and the lower side of the bottom plate, the bottom of the annular groove and the first annular groove on the lower side of the bottom plate are alternately arranged along the radial direction of the through hole, and a horizontally arranged installation method is provided at the corresponding through hole on the lower side of the bottom plate. The flange is coaxially arranged with the through hole, and the upper and lower sides of the mounting flange are provided with a plurality of second annular grooves coaxially arranged with the mounting flange. The second annular grooves located on the upper and lower sides of the mounting flange are alternately arranged along the radial direction of the mounting flange, and the first annular groove located on the lower side of the base plate and the second annular groove located on the upper side of the flange are also alternately arranged along the radial direction of the mounting flange. A coaxially arranged and vertically oriented mixed refrigerant pipeline is provided at the center of the mounting flange. The upper end of the mixed refrigerant pipeline passes through the through hole into the ultra-low temperature vacuum freezing chamber, and the lower end of the mixed refrigerant pipeline exceeds the mounting flange. The mixed refrigerant pipeline is in a non-contact state with the ultra-low temperature vacuum freezing chamber cover and the base plate.

[0005] For the purpose of simplifying the description, the structure for reducing the cooling loss of an ultra-low temperature vacuum freezing chamber described in the present invention is referred to as the present structure for short.

[0006] Advantages of this structure: This structure prevents direct contact between the mixed refrigerant pipe and the outer wall of the ultra-low temperature vacuum freezing chamber. Furthermore, since the ultra-low temperature vacuum freezing chamber is evacuated during use, there is no air between the base plate and the mixed refrigerant pipe as a heat transfer medium, resulting in improved insulation, preventing frost on the outer wall of the ultra-low temperature vacuum freezing chamber and reducing cooling loss. Furthermore, the annular groove on the base plate, the first annular groove, and the second annular groove on the mounting flange all reduce the cross-sectional area of the heat-conducting material and the heat transfer effect, thereby further reducing cooling loss.

[0007] In order to achieve better use effect of this structure, the preferred solution is as follows:

[0008] Preferably, the mounting flange and the base plate are fastened together by bolts.

[0009] Bolt connection makes it easy to disassemble, repair and replace wearing parts.

[0010] Preferably, a circumferentially arranged sealing ring is embedded on the upper side of the mounting flange near the circumferential edge.

[0011] The sealing ring can prevent external air from entering the ultra-low temperature vacuum freezing chamber from the gap between the mounting flange and the bottom plate, thereby ensuring the vacuum degree in the ultra-low temperature vacuum freezing chamber, making the structure have a better heat insulation effect, and further reducing the cooling loss. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a structural diagram of this structure. DETAILED DESCRIPTION

[0013] See also Figure 1 ( Figure 1 Only one through hole and its corresponding bellows and mixed refrigerant pipe are shown.)

[0014] A structure for reducing the cooling loss of an ultra-low temperature vacuum freezing chamber, comprising an ultra-low temperature vacuum freezing chamber 1 and a horizontally arranged bottom plate 2, the bottom plate 2 being arranged at the lower open portion of the ultra-low temperature vacuum freezing chamber 1 and cooperating therewith, the bottom plate 2 being provided with two through holes 21 for installing a mixed refrigerant pipe 4, an annular groove 22 circumferentially arranged around the through hole 21 is provided at the upper side of the bottom plate 2 corresponding to each through hole 21, the bottom of the annular groove 22 is provided with two coaxially arranged first annular grooves 23, a first annular groove 23 is provided on the lower side of the bottom plate 2, the bottom of the annular groove 22 and the first annular groove 23 on the lower side of the bottom plate 2 are alternately arranged radially along the through hole 21, a horizontally arranged mounting flange 3 is provided at the lower side of the bottom plate 2 corresponding to the through hole 21, the mounting flange 3 is coaxially arranged with the through hole 21 The upper side of the mounting flange 3 is provided with two second annular grooves 31 coaxially arranged with the mounting flange 3, and the lower side of the mounting flange 3 is provided with a second annular groove 31 coaxially arranged with the mounting flange 3. The second annular grooves 31 located on the upper and lower sides of the mounting flange 3 are alternately arranged along the radial direction of the mounting flange 3, and the first annular groove 23 located on the lower side of the base plate 2 and the second annular groove 31 located on the upper side of the flange 3 are also alternately arranged along the radial direction of the mounting flange 3. A coaxially arranged and vertically oriented mixed refrigerant pipeline 4 is provided at the center of the mounting flange 3. The upper end of the mixed refrigerant pipeline 4 passes through the through hole 21 and enters the ultra-low temperature vacuum freezing chamber. The lower end of the mixed refrigerant pipeline 4 exceeds the mounting flange 3, and the mixed refrigerant pipeline 4 is in a non-contact state with the ultra-low temperature vacuum freezing chamber cover 1 and the base plate 2.

[0015] The mounting flange 3 and the base plate 2 are fastened together by bolts 32 .

[0016] A circumferentially arranged sealing ring 33 is embedded on the upper side of the mounting flange 3 near the circumferential edge.

[0017] Advantages of this structure: Adopting this structure prevents direct contact between the mixed refrigerant pipe 4 and the outer wall of the ultra-low temperature vacuum freezing chamber. Furthermore, since the ultra-low temperature vacuum freezing chamber is evacuated during use, there is no air between the base plate 2 and the mixed refrigerant pipe 4 as a heat transfer medium, resulting in better insulation, preventing frost on the outer wall of the ultra-low temperature vacuum freezing chamber and reducing cooling loss. Furthermore, the annular groove 22, the first annular groove 23 on the base plate 2, and the second annular groove 31 on the mounting flange 3 all serve to reduce the cross-sectional area of the heat-conducting material and the heat transfer effect, thereby further reducing cooling loss.

[0018] The connection via bolts 32 facilitates disassembly, maintenance and replacement of wearing parts.

[0019] The sealing ring 33 can prevent external air from entering the ultra-low temperature vacuum freezing chamber from the gap between the mounting flange 3 and the bottom plate 2, thereby ensuring the vacuum degree in the ultra-low temperature vacuum freezing chamber, making the structure have a better heat insulation effect, and further reducing the cooling loss.

Claims

1. A structure for reducing cooling loss in an ultra-low temperature vacuum freezing chamber, characterized in that: The utility model comprises an ultra-low temperature vacuum freezing chamber and a horizontally arranged bottom plate, the bottom plate is arranged at the open part of the lower side of the ultra-low temperature vacuum freezing chamber and cooperates with it, the bottom plate is provided with two through holes for installing mixed refrigerant pipelines, an annular groove arranged circumferentially around the through hole is provided at the upper position of the bottom plate corresponding to each through hole, the bottom of the annular groove and the lower side of the bottom plate are provided with a plurality of coaxially arranged first annular grooves, the bottom of the annular groove and the first annular groove on the lower side of the bottom plate are alternately arranged along the radial direction of the through hole, a horizontally arranged mounting flange is provided at the corresponding through hole on the lower side of the bottom plate, the mounting flange is coaxially arranged with the through hole, and the mounting flange The upper and lower sides of the are provided with several second annular grooves coaxially arranged with the mounting flange, the second annular grooves located on the upper and lower sides of the mounting flange are alternately arranged along the radial direction of the mounting flange, the first annular groove located on the lower side of the base plate and the second annular groove located on the upper side of the flange are also alternately arranged along the radial direction of the mounting flange, and a coaxially arranged and vertically oriented mixed refrigerant pipeline is provided at the center of the mounting flange, the upper end of the mixed refrigerant pipeline passes through the through hole into the ultra-low temperature vacuum freezing chamber, the lower end of the mixed refrigerant pipeline exceeds the mounting flange, and the mixed refrigerant pipeline is in a non-contact state with the ultra-low temperature vacuum freezing chamber and the base plate.

2. The structure for reducing cooling loss in an ultra-low temperature vacuum freezing chamber according to claim 1, characterized in that: The mounting flange and the base plate are fastened together by bolts.

3. The structure for reducing cooling loss in an ultra-low temperature vacuum freezing chamber according to claim 1, characterized in that: A circumferentially arranged sealing ring is embedded on the upper side of the mounting flange near the circumferential edge.

Images