An anti-electric shock flexible heater for exhaust ducts of semiconductor equipment

Abstract

The present invention belongs to the technical field of flexible heating equipment, and specifically discloses an anti-electric shock flexible heater for the exhaust duct of semiconductor equipment, comprising a shell, wherein the top and bottom of the shell are respectively provided with a positive electrode and a negative electrode, the top of the shell is provided with a card block, the bottom of the shell is provided with a card slot, the side of the shell is provided with a sliding slot, the sliding slot is provided with a moving block, and the shell is provided with a plurality of isolation blocks, the top of the isolation block is symmetrically provided with two reinforcing ribs, the isolation block and the bottom of the negative electrode are provided with a mounting block, the bottom of the isolation block is provided with a fixing hole, the isolation block and the bottom of the positive electrode are provided with a mounting hole, a heating wire is provided inside the isolation block, and an installation channel is provided in the middle of the shell. The provided combined structure can be used after combining multiple sections of devices as required, and the provided reinforcing ribs can effectively connect and combine the two sections of the devices to each other, and the devices at both ends are deformed when they are bent to adapt to the use of the pipeline.

Description

Technical Field

[0001] The invention relates to an anti-electric shock flexible heater used for an exhaust pipe of a semiconductor device, belonging to the technical field of flexible heating equipment. Background Art

[0002] Traditional heaters are heating wires that are coiled and fixed on an insulator. This type of heater is a flat heater that can only heat flat objects. Other heaters have heating wires embedded in a sleeve filled with heat transfer materials. Since the sleeve is made of conventional metal materials, it does not have the ability to bend. Therefore, the above-mentioned heater forms are subject to certain limitations in application, especially for curved pipes. These heaters cannot be used. Summary of the invention

[0003] The object of the present invention is to provide an anti-electric shock flexible heater for an exhaust duct of a semiconductor device, so as to solve the problems raised in the above-mentioned background technology.

[0004] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a flexible heater for preventing electric shock for exhaust ducts of semiconductor equipment, comprising a shell, a positive electrode and a negative electrode are respectively provided at the top and bottom of the shell, a clamping block is provided at the top of the shell, a clamping groove is provided at the bottom of the shell, a sliding groove is provided on the side of the shell, a moving block is provided in the sliding groove, a plurality of isolation blocks are provided in the shell, two reinforcing ribs are symmetrically provided on the top of the isolation block, mounting blocks are provided at the top of the isolation block and the top of the negative electrode, a fixing hole is provided at the bottom of the isolation block, a mounting hole is provided at the bottom of the isolation block and the bottom of the positive electrode, a heating wire is provided inside the isolation block, and a mounting channel is provided in the middle of the shell.

[0005] Preferably, the card block and the card slot are of the same size and correspond in position to each other, the card block and the card slot are interlocked with each other, and the shells are connected to each other via the card block and the card slot.

[0006] Preferably, the reinforcing rib is made of metal, the outer layer of the reinforcing rib is covered with soft insulating material, and a limit block is provided on one side of the top end of the reinforcing rib.

[0007] Preferably, the fixing holes are symmetrically arranged on both sides of the bottom end of the isolation block, the fixing holes correspond to the diameter and position of the reinforcing ribs, and the ends of the fixing holes are provided with limiting grooves that match the limiting blocks.

[0008] Preferably, a spring block is provided at one end of the limiting groove, the spring block is an annular structure, the spring block is arranged inside the isolation block, and the spring block is slidably connected to the isolation block.

[0009] Preferably, an extrusion block is provided at one end of the elastic block, and the extrusion block passes through the side wall of the isolation block and is fixed on the elastic block, and an extrusion hole having the same size as the extrusion block is provided at the bottom end of the sliding groove.

[0010] Preferably, the moving block is an annular structure, an extrusion plate is fixedly provided on the inner side of the moving block, the extrusion plate is an arc-shaped structure, and the moving block is fixedly connected to the outer shell.

[0011] Preferably, the moving block is an annular structure, an extrusion plate is fixedly provided on the inner side of the moving block, the extrusion plate is an arc-shaped structure, and the moving block is fixedly connected to the outer shell.

[0012] Compared with the prior art, the present invention has the following beneficial effects:

[0013] The present invention belongs to the technical field of flexible heating equipment, and specifically discloses an anti-electric shock flexible heater for exhaust ducts of semiconductor equipment. The present invention can use multiple sections of devices combined as needed through the set combined structure, and is suitable for heating ducts of various lengths. The set reinforcing ribs can not only effectively connect and combine the two sections of the device, but also have a certain ductility, and deform when the devices at both ends are bent to adapt to the use of the duct. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 The structure of the present invention is schematically shown Figure 1 ;

[0015] Figure 2 The structure of the present invention is schematically shown Figure 2 ;

[0016] Figure 3 The structure of the present invention is schematically shown Figure 3 ;

[0017] Figure 4 A top view of the present invention;

[0018] Figure 5 It is a schematic diagram of the isolation block structure of the present invention;

[0019] Figure 6 It is a schematic diagram of the explosion of the isolation block of the present invention;

[0020] Figure 7 is a cross-sectional view of an isolation block of the present invention;

[0021] Figure 8 A top view of the moving block of the present invention;

[0022] In the figure: 1. shell; 2. positive electrode; 3. negative electrode; 4. card block; 5. card slot; 6. sliding slot; 7. moving block; 8. isolation block; 9. reinforcing rib; 10. mounting block; 11. fixing hole; 12. mounting hole; 13. heating wire; 14. mounting channel; 15. limit block; 16. limit slot; 17. spring block; 18. extrusion block; 19. extrusion hole; 20. extrusion plate. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] In the description of the present invention, it should be noted that the terms "vertical", "up", "down", "horizontal", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0025] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] See also Figure 1-8 The present invention provides a technical solution: an anti-electric shock flexible heater for an exhaust duct of a semiconductor device, comprising a shell 1, wherein a positive electrode 2 and a negative electrode 3 are respectively arranged at the top and bottom of the shell 1, a clamping block 4 is arranged at the top of the shell 1, a clamping groove 5 is arranged at the bottom of the shell 1, a sliding groove 6 is arranged on the side of the shell 1, a moving block 7 is arranged in the sliding groove 6, a plurality of isolation blocks 8 are arranged in the shell 1, two reinforcing ribs 9 are symmetrically arranged at the top of the isolation block 8, a mounting block 10 is arranged at the bottom of the isolation block and the negative electrode 3, a fixing hole 11 is arranged at the bottom of the isolation block 8, a mounting hole 12 is arranged at the bottom of the isolation block 8 and the positive electrode 2, a heating wire 13 is arranged inside the isolation block 8, and a mounting channel 14 is arranged in the middle of the shell 1.

[0027] Furthermore, the block 4 and the slot 5 are of the same size and correspond in position to each other, the block 4 and the slot 5 are fitted into each other, and the housings 1 are connected to each other via the block 4 and the slot 5 .

[0028] Furthermore, the reinforcing rib 9 is made of metal, the outer layer of the reinforcing rib 9 is covered with soft insulating material, and a limiting block 15 is provided on one side of the top end of the reinforcing rib 9 .

[0029] Furthermore, the fixing holes 11 are symmetrically arranged on both sides of the bottom end of the isolation block 8 , the diameters and positions of the fixing holes 11 and the reinforcing ribs 9 correspond to each other, and the ends of the fixing holes 11 are provided with limiting grooves 16 that match the limiting blocks 15 .

[0030] Furthermore, a spring block 17 is provided at one end of the limiting groove 16 . The spring block 17 is an annular structure. The spring block 17 is arranged inside the isolation block 8 . The spring block 17 is slidably connected to the isolation block 8 .

[0031] Furthermore, an extrusion block 18 is provided at one end of the elastic block 17 , and the extrusion block 18 passes through the side wall of the isolation block 8 and is fixed on the elastic block 17 . An extrusion hole 19 having the same size as the extrusion block 18 is provided at the bottom end of the sliding groove 6 .

[0032] Furthermore, the moving block 7 is an annular structure, a pressing plate 20 is fixedly provided inside the moving block 7 , the pressing plate 20 is an arc-shaped structure, and the moving block 7 is fixedly connected to the housing 1 .

[0033] Furthermore, the isolation blocks 8 are symmetrically distributed on both sides of the housing 1 , the isolation blocks 8 are fixedly connected to the housing 1 , and the mounting blocks 10 and the inner sides of the mounting holes 12 are both made of metal.

[0034] Working principle: The present invention relates to an anti-electric shock flexible heater for exhaust ducts of semiconductor equipment. When in use, several devices are combined with each other as required. After the positive and negative electrodes are removed, the top of the shell 1 is matched with the bottom of the other shell 1. After the reinforcing ribs 9 and the mounting blocks 10 at the top are respectively matched with the fixing holes 11 and the mounting holes 12 at the bottom, the two shells 1 are brought close to each other and installed as a whole. After the reinforcing ribs 9 enter the fixing holes 11, the limiting blocks 15 located on the side of the reinforcing ribs 9 enter the limiting grooves 16, and the reinforcing ribs 9 are fixed. The mounting block 10 is fixed, and the mounting block 10 enters the mounting hole 12 at the same time, and the heating wires 13 of the two shells 1 are connected in series. After the assembly is completed, the positive and negative electrodes are respectively connected to the top and bottom of the assembly. When disassembly is required, only the moving block 7 is rotated, and the extrusion plate 20 is rotated to one side of the extrusion block 18. The extrusion rod squeezes the extrusion block 18 inwardly, and the spring block 17 pushes the limit block 15 out of the limit groove 16 under the action of external force, so that the reinforcing rib 9 can be taken out from the fixing hole 11, and then the two shells 1 are separated. The present invention has a simple structure and is easy to operate, and is suitable for popularization and use.

[0035] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A flexible heater for preventing electric shock used in exhaust ducts of semiconductor equipment, characterized in that: The invention comprises a shell (1), wherein the top and bottom of the shell (1) are respectively provided with a positive electrode (2) and a negative electrode (3), the top of the shell (1) is provided with a card block (4), the bottom of the shell (1) is provided with a card slot (5), the side of the shell (1) is provided with a sliding slot (6), a moving block (7) is provided in the sliding slot (6), a plurality of isolation blocks (8) are provided in the shell (1), two reinforcing ribs (9) are symmetrically provided at the top of the isolation block (8), a mounting block (10) is provided at the top of the isolation block (8) and the negative electrode (3), a fixing hole (11) is provided at the bottom of the isolation block (8), a mounting hole (12) is provided at the bottom of the isolation block (8) and the positive electrode (2), a heating wire (13) is provided inside the isolation block (8), and a mounting channel (14) is provided in the middle of the shell (1); The fixing holes (11) are symmetrically arranged on both sides of the bottom end of the isolation block (8); the diameter and position of the fixing holes (11) and the reinforcing ribs (9) correspond to each other; and a limiting groove (16) matching the limiting block (15) is provided at the end of the fixing hole (11); A spring block (17) is provided at one end of the limiting groove (16); the spring block (17) is an annular structure; the spring block (17) is arranged inside the isolation block (8); and the spring block (17) is slidably connected to the isolation block (8); An extrusion block (18) is provided at one end of the elastic block (17). The extrusion block (18) passes through the side wall of the isolation block (8) and is fixedly arranged on the elastic block (17). An extrusion hole (19) having the same size as the extrusion block (18) is provided at the bottom end of the sliding groove (6).

2. The anti-electric shock flexible heater for exhaust duct of semiconductor equipment according to claim 1, characterized in that: The card block (4) and the card slot (5) are of the same size and correspond in position to each other; the card block (4) and the card slot (5) are interlocked with each other; and the housings (1) are connected to each other via the card block (4) and the card slot (5).

3. The anti-electric shock flexible heater for exhaust duct of semiconductor equipment according to claim 1, characterized in that: The reinforcing rib (9) is made of metal, the outer layer of the reinforcing rib (9) is covered with soft insulating material, and a limit block (15) is provided on one side of the top end of the reinforcing rib (9).

4. The anti-electric shock flexible heater for exhaust duct of semiconductor equipment according to claim 1, characterized in that: The moving block (7) is an annular structure, a pressing plate (20) is fixedly provided on the inner side of the moving block (7), the pressing plate (20) is an arc-shaped structure, and the moving block (7) is fixedly connected to the outer shell (1).

5. The anti-electric shock flexible heater for exhaust duct of semiconductor equipment according to claim 1, characterized in that: The isolation blocks (8) are symmetrically distributed on both sides of the housing (1); the isolation blocks (8) are fixedly connected to the housing (1); and the inner sides of the mounting blocks (10) and the mounting holes (12) are both made of metal.

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