A multi-chamber TFT optoelectronic stability test device

Abstract

The present invention discloses a TFT testing device, in particular a multi-chamber TFT optoelectronic stability testing device, comprising: a chamber testing main body, the chamber testing main body includes a box body, a support plate is arranged at the bottom of the box body, a temperature-changing table is arranged on the support plate, a long strip-shaped through hole is opened on the side surface of the box body, and a manipulator is arranged to slide relatively in the through hole. This device can complete the electrical performance testing of TFT wafers in a complete high and low temperature environment, and this device can manually adjust the front, back, left and right positions of the test sample, which is convenient to use; the microscope of this device is equipped with a 100mm pneumatic lift, and the sample can be observed and monitored during the testing process, and the use effect is good.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor testing equipment, and particularly relates to a multi-chamber TFT optoelectronic stability testing equipment. Background Art

[0002] TFT (Thin Film Transistor) is the abbreviation of thin film transistor. The TFT display screen is the mainstream display device on various notebook computers and desktop computers. Each liquid crystal pixel point on this type of display screen is driven by a thin film transistor integrated behind the pixel point. Therefore, the TFT display screen is also a type of active matrix liquid crystal display device. It is one of the best LCD color displays. The TFT display has the advantages of high responsiveness, high brightness, high contrast, etc., and its display effect is close to that of the CRT display. At the same time, the TFT screen is also widely used in mid- to high-end color screen mobile phones, which are divided into three types: 65,536 colors, 160,000 colors, and 16 million colors, and its display effect is very excellent. The existing TFT test fixtures are inconvenient to operate and difficult to adapt to TFT tests of different specifications. Summary of the Invention

[0003] In order to solve the problems existing in the above-mentioned prior art, the present invention provides a multi-chamber TFT optoelectronic stability testing equipment to solve the current technical problems.

[0004] The technical solution adopted by the present invention to solve its technical problems is as follows:

[0005] The present invention provides a multi-chamber TFT optoelectronic stability testing equipment, including: a chamber test main body, the chamber test main body includes a box body, a support plate is arranged at the bottom of the box body, a temperature-changing table is arranged on the support plate, a long strip-shaped through hole is opened on the side surface of the box body, and a manipulator is slidably arranged in the through hole.

[0006] Preferably, an observation window is arranged on the upper wall of the box body, and a light-shielding sealing cover is arranged on the observation window.

[0007] Preferably, a microscopic observation system is further arranged above the box body. The microscopic observation system includes: a track, a slider is arranged on the track, a microscope is arranged on the slider, a microscopic observation window is arranged directly below the microscope, and the microscopic observation window is located directly above the temperature-changing table.

[0008] Preferably, the track is arranged on a bracket, a display is further connected to the bracket through a connecting rod, the microscope and the display are electrically connected, and a manual adjustment device is arranged on the microscope.

[0009] Preferably, there are several chamber test main bodies, and several chamber test main bodies are all arranged on the desktop, and a bracket is further arranged on the desktop.

[0010] Preferably, a heating control module is provided under the desktop, and the heating control module is connected to the chamber test body.

[0011] Preferably, the chamber test body is further connected to a low-temperature control cabinet.

[0012] Preferably, the chamber test body is further connected to a test instrument.

[0013] The beneficial effects of the present invention are as follows: This device can complete the electrical performance test of TFT wafers in a complete high and low temperature environment, and is convenient to use; this device can manually adjust the front, back, left, and right positions of the test sample, and the probe manually aligns with the PAD position under the microscope observation. The probe quickly contacts / separates, and a light-shielding sealing cover is added to prevent interference from external light during the test; the microscope of this device is equipped with a 100mm pneumatic lift, which can observe and monitor the sample during the test, and has a good use effect. Description of the Drawings

[0014] The above aspects and advantages of the present invention will become obvious and easy to understand from the description of the embodiments in conjunction with the following drawings, where:

[0015] Figure 1 is a schematic structural diagram of a multi-chamber TFT optoelectronic stability test device according to an embodiment of the present invention;

[0016] Figure 2 is a top view structural diagram of a multi-chamber TFT optoelectronic stability test device according to an embodiment of the present invention;

[0017] Figure 3 is a front view structural diagram of a multi-chamber TFT optoelectronic stability test device according to an embodiment of the present invention;

[0018] Figure 4 is a schematic structural diagram of a partial position of a multi-chamber TFT optoelectronic stability test device according to an embodiment of the present invention;

[0019] Figure 5 is a schematic structural diagram of the inside of the box body of a multi-chamber TFT optoelectronic stability test device according to an embodiment of the present invention;

[0020] Figure 6 is another schematic structural diagram of the inside of the box body of a multi-chamber TFT optoelectronic stability test device according to an embodiment of the present invention.

[0021] Description of the Reference Numerals:

[0022] In Figures 1 - 6 : box body 1; heating control module 2; manipulator 3; light-shielding sealing cover 4; microscopic observation window 5; microscope 6; slider 7; track 8; bracket 9; test sample 10; temperature-changing table 11; tray 12. Detailed implementation mode

[0023] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0024] The present invention provides a multi-chamber TFT optoelectronic stability test device, including: a chamber test main body, the chamber test main body includes a box body 1, a support plate 12 is arranged at the bottom of the box body 1, a temperature-changing table 11 is arranged on the support plate 12, a long strip-shaped through hole is opened on the side surface of the box body 1, and a manipulator 3 is slidably arranged in the through hole relatively.

[0025] The box body 1 is a plastic box body or a metal box body, the support plate 12 is a plastic plate, a temperature-changing table 11 is in the middle position of the support plate 12, the temperature-changing table 11 is electrically connected to the heating control module 2 and the low-temperature control cabinet, and the temperature-changing table 11, the heating control module 2 and the low-temperature control cabinet are the same as those used in the existing TFT optoelectronic stability test device. This application does not innovate on them, and the connection relationship and control relationship also adopt the methods used in the existing TFT optoelectronic stability test device. This application does not innovate on the connection relationship and control relationship either. The size of the temperature-changing table 11 can be selected as 6*6 cm. A second slider is arranged in the long strip-shaped through hole, and a manipulator 3 passes through the second slider. The manipulator 3 is a conduit, one end is outside the box body 1 and can be connected to an air pipe, and the other end is inside the box body 1 and is connected to a bottomless cuboid box. When the air pipe is connected to a vacuum pump, the bottomless cuboid box can suck the TFT test sample for moving the sample back and forth, left and right.

[0026] An observation window is arranged on the upper wall of the box body 1. The observation window is a through hole, and a light-shielding sealing cover 4 is arranged on the observation window. The light-shielding sealing cover 4 is a metal or plastic cover. When loading and unloading, the vacuum adsorption method of the manipulator 3 is adopted, and the sample is sucked and the sample is moved back and forth, left and right in four directions through the manipulator 3, and the area to be tested on the sample is moved to the test positions such as the temperature-changing table 11.

[0027] Above the box body 1, a microscopic observation system is also provided. The microscopic observation system includes: a rail 8, on which a slider 7 is arranged, on which a microscope 6 is arranged. Right below the microscope 6, a microscopic observation window 5 is arranged, and the microscopic observation window 5 is located directly above the temperature-changing stage 11. The rail 8 is a metal rail 8, on which a metal slider 7 is arranged. The metal slider 7 can be driven by a pneumatic lifting device to move about 100 mm, and the pneumatic lifting device adopts the existing technology. The microscope 6 is an existing microscope 6 on the market. When purchasing, select a model of microscope 6 that can be connected to a display for display. In the simplest case, the microscopic observation window 5 can use a piece of plexiglass.

[0028] The rail 8 is arranged on a bracket 9. The bracket 9 is a metal bracket. A display is also connected to the bracket 9 through a connecting rod. The microscope 6 and the display are electrically connected. The microscope 6 is equipped with a coarse focusing screw and a fine focusing screw for manual adjustment.

[0029] There are several chamber test bodies, and all of the several chamber test bodies are arranged on the desktop. A bracket 9 is also arranged on the desktop. Below the desktop, a heating control module 2 is arranged, and the heating control module 2 is connected to the chamber test body. The chamber test body is also connected to a low-temperature control cabinet.

[0030] The chamber test body is also connected to a test instrument. The test instrument selects a Keithley 2636B type test instrument. The specific connection relationship and usage method refer to the instrument instruction manual.

[0031] This device can complete the electrical performance test of the TFT sheet in a complete high and low temperature environment, and is convenient to use; this device can manually adjust the front, back, left and right positions of the test sample 10. The probe manually aligns the PAD position under the observation of the microscope 6. The probe quickly contacts / separates, and a sealing cover is added to prevent interference from external light during the test; the microscope 6 of this device is equipped with a 100 mm pneumatic lift, and the sample can be observed and monitored during the test, and the use effect is good.

[0032] Finally, it should be noted that: the above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A multi-chamber TFT optoelectronic stability test device, comprising: Chamber test body, characterized in that: the chamber test body includes a box body, a support plate is arranged at the bottom of the box body, a temperature-changing table is arranged on the support plate, a long strip-shaped through hole is opened on the side surface of the box body, and a manipulator is arranged to slide relatively in the through hole; an observation window is arranged on the upper wall of the box body, and a light-shielding sealing cover is arranged on the observation window; a microscopic observation system is further arranged above the box body, and the microscopic observation system includes: a track, a slider is arranged on the track, a microscope is arranged on the slider, a microscopic observation window is arranged directly below the microscope, and the microscopic observation window is located directly above the temperature-changing table; the slider can be driven by a pneumatic lifting device to move about 100 mm.

2. The multi-chamber TFT optoelectronic stability testing device according to claim 1, wherein: The track is arranged on a bracket, a display is further connected to the bracket through a connecting rod, the microscope and the display are electrically connected, and a manual adjustment device is arranged on the microscope.

3. The multi-chamber TFT optoelectronic stability testing device according to claim 1, characterized in that: There are several chamber test bodies, and several chamber test bodies are all arranged on a table, and a bracket is further arranged on the table.

4. The multi-chamber TFT optoelectronic stability testing device according to claim 3, wherein: A heating control module is arranged below the table, and the heating control module is connected to the chamber test body.

5. The multi-chamber TFT optoelectronic stability testing device according to claim 1, characterized in that: The chamber test body is further connected to a low-temperature control cabinet.

6. The multi-chamber TFT optoelectronic stability testing device according to claim 1, wherein: The chamber test body is further connected to a test instrument.

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