processing device

Abstract

The present invention provides a processing apparatus capable of accurately monitoring the status within the processing apparatus. The processing apparatus (1) includes at least: a holding table (10) for holding a workpiece (100); a processing unit (40) for processing the workpiece (100) held by the holding table (10); transfer arms (51, 52, 53) for transferring the workpiece (100); and a display (61) having a display function for displaying the status of the processing apparatus (1). The display (61) displays a configuration diagram in three dimensions as if viewing the processing apparatus (1) from an oblique angle. The configuration diagram shows illustrations of the structural units of the processing apparatus (1) and illustrations of the workpiece (100) being processed by the processing apparatus (1) according to the actual configuration within the processing apparatus (1).

Description

Technical Field

[0001] This invention relates to a processing apparatus. Background Technology

[0002] For example, a processing apparatus for processing a workpiece, such as a cutting device or a grinding device, includes: a box-holding stage for holding a box in the form of a shelf for storing the workpiece; a temporary placement stage for temporarily placing the workpiece taken out of the box; a holding stage for holding the workpiece; a transfer unit for transferring the workpiece from the temporary placement stage to the holding stage; a processing unit equipped with a processing tool for processing the workpiece held on the holding stage; a cleaning unit for cleaning the processed workpiece; a transfer unit for transferring the workpiece from the holding stage to the cleaning stage; a conveying unit for taking the workpiece out of the box or storing the workpiece in the box; and an input component and a display (e.g., a touch panel) for inputting and displaying various processing information (e.g., see Patent Document 1).

[0003] The touch panel has an input function for setting processing conditions and a display function for showing the operating status of the processing device. The display function of the touch panel is to display a configuration diagram showing the arrangement of each unit, such as the box-mounted stage, temporary worktable, holding worktable, loading unit, processing unit, cleaning worktable, unloading unit, and conveying unit, when viewed from above. Furthermore, when the processing device is operating fully automatically, the workpieces moving within the processing device are also displayed on the configuration diagram (for example, see Patent Document 2).

[0004] Patent Document 1: Japanese Patent Application Publication No. 2014-161948

[0005] Patent Document 2: Japanese Patent Application Publication No. 2019-198940

[0006] In recent years, with the increasing demand for high-quality components, the number of components (units) housed in processing apparatuses has been continuously increasing. Therefore, processing apparatuses that save space by arranging multiple components (units) at intervals in the vertical direction are needed. Furthermore, typical processing apparatuses have two arms: a conveyor arm that transports clean workpieces that have been cleaned before or after processing, and a transfer arm that transports the processed workpieces from a holding table to a cleaning table. However, to save space, the movement path of the transfer arm is often divided into two segments in the vertical direction. Moreover, when viewed from above, the positions of the transfer arm and the holding table, or the transfer arm and the cleaning table, or the positions of each unit and the transfer arm, sometimes overlap. In such cases, it becomes difficult to accurately grasp the internal structure of the processing apparatus in a top view (viewed from above) like in Patent Document 2. Summary of the Invention

[0007] The present invention was made in view of the above-mentioned problems, and its object is to provide a processing apparatus that can accurately grasp the condition inside the processing apparatus.

[0008] To solve the above-mentioned problems and achieve the objectives, the processing apparatus of the present invention includes at least: a holding table for holding a workpiece; a processing unit for processing the workpiece held by the holding table; a conveying arm for conveying the workpiece; and a display, characterized in that the display shows a configuration diagram in three dimensions as if viewed from an oblique angle, the configuration diagram showing illustrations of each structural unit of the processing apparatus and illustrations of the workpiece being processed by the processing apparatus according to the actual configuration within the processing apparatus.

[0009] Alternatively, at least two structural units of the processing device may be arranged at intervals along the vertical direction, and in a position of overlapping when viewed from the upper surface of the processing device, whether the structural units are in motion or in a fixed position.

[0010] This invention can accurately monitor the conditions inside the processing device. Attached Figure Description

[0011] Figure 1 This is a perspective view showing an example of the structure of the processing apparatus according to the embodiment.

[0012] Figure 2 It is shown schematically. Figure 1 A diagram illustrating an example of the functional structure of a processing device.

[0013] Figure 3 It is shown Figure 2 An example of an image stored in the image data storage unit.

[0014] Figure 4 It is shown Figure 2 An example of three-dimensional data stored in a three-dimensional data storage unit.

[0015] Figure 5 It is shown Figure 2 A diagram showing an example of the layout coordinate data stored in the layout setting storage unit.

[0016] Figure 6 It is shown Figure 2 This is a diagram illustrating an example of the layout stacking order data stored in the layout setting storage unit.

[0017] Figure 7 It is shown Figure 2 A diagram illustrating an example of mobile history data stored in the mobile history storage unit.

[0018] Figure 8 It is shown Figure 2 The diagram shows an example of the processing of the display processing unit.

[0019] Figure 9 It is shown Figure 2 The diagram shows an example of the processing by the display processing unit.

[0020] Figure 10 It is shown Figure 2 The diagram shows an example of the processing of the display processing unit.

[0021] Figure 11 It is shown Figure 2 The diagram shows an example of the processing of the display processing unit.

[0022] Figure 12 It is shown Figure 1 This is an example of a configuration diagram displayed on the monitor of a processing device.

[0023] Figure 13 It is shown Figure 2 The diagram shows an example of the processing of the display processing unit.

[0024] Figure 14 It is shown Figure 2 The diagram shows an example of the processing of the display processing unit.

[0025] Label Explanation

[0026] 1: Processing device; 10: Holding table; 40: Processing unit; 51: (1st) conveyor arm; 52: (2nd) conveyor arm; 53: (3rd) conveyor arm; 61: Display; 100: Workpiece; 200: Configuration diagram. Detailed Implementation

[0027] The embodiments for carrying out the present invention will be described in detail with reference to the accompanying drawings. The present invention is not limited to the embodiments described below. Furthermore, the structural elements described below include substantially the same structural elements that are readily conceived by those skilled in the art. Moreover, the structures described below can be appropriately combined. Additionally, various omissions, substitutions, or modifications to the structure can be made without departing from the spirit of the present invention.

[0028] [Implementation Method]

[0029] The processing apparatus 1 according to an embodiment of the present invention will be described with reference to the accompanying drawings. Figure 1 This is a perspective view showing an example of the structure of the processing apparatus 1 according to the embodiment. Figure 2 It is shown schematically. Figure 1 A diagram illustrating an example of the functional structure of processing device 1. (See diagram for example.) Figure 1As shown, the processing apparatus 1 of this embodiment includes a holding worktable 10, a rotating worktable 20, a temporary worktable 30, a processing unit 40, conveying arms 51, 52, and 53, a touch panel 60, a cleaning unit 70, a box-mounted platform 80, boxes 81 and 82, and a control unit 90. In this embodiment, the processing apparatus 1 has a device base 2 and a device cover 3. The structural elements of the processing apparatus 1 described above are located on the device base 2, and the device cover 3 covers all structural elements except the touch panel 60. The structural units of the present invention are all the units in the structural elements of the processing apparatus 1 that hold the workpiece 100 described later. In this embodiment, specifically, it refers to the holding worktable 10, the temporary worktable 30, the conveying arms 51, 52, and 53, the cleaning unit 70, the cleaning worktable 71, and the boxes 81 and 82.

[0030] In this embodiment, such as Figure 1 As shown, the workpiece 100 processed by the processing apparatus 1 is, for example, a disc-shaped semiconductor wafer or optical device wafer made of silicon, sapphire, silicon carbide (SiC), gallium arsenide, or similar materials. Chip-sized devices are formed in areas defined by multiple predetermined dividing lines arranged in a grid pattern on the flat front surface of the workpiece 100. In this invention, the workpiece 100 may also have an adhesive tape attached to the back side of the front surface, with a ring-shaped frame mounted on the outer edge of the adhesive tape. Alternatively, in this invention, the workpiece 100 may be a rectangular packaging substrate, ceramic plate, or glass plate having multiple devices sealed in resin.

[0031] In this embodiment, the processing device 1 automatically performs fully automatic processing, for example, by having each structural unit of the processing device 1 perform a series of actions to repeatedly transport and process the workpiece 100, sequentially processing the workpieces 100 stored in boxes 81 and 82. Furthermore, in this invention, the processing device 1 is not limited to performing fully automatic processing; it can also be a manual machine that performs each process sequentially according to the operator's instructions without fully automatic processing.

[0032] The holding table 10 holds the workpiece 100 using a holding surface 11. The holding table 10 is disc-shaped and includes: a disc-shaped adsorption section composed of porous ceramic or the like, having a flat holding surface 11 on its upper surface for holding the workpiece 100 and having multiple pores; and a frame that embeds and fixes the adsorption section to a recess in the center of the upper surface. The holding surface 11 is formed to be approximately parallel to the XY plane, which is a horizontal plane. The holding table 10 is rotatably mounted about an axis parallel to the Z-axis direction perpendicular to the horizontal plane via a rotation drive source (not shown). The adsorption section of the holding table 10 is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown), and the workpiece 100 is held by the entire holding surface 11. The holding table 10 is equipped with a sensor (not shown). The sensor on the holding table 10 detects the workpiece 100 held by the holding surface 11 and sends the detection result to the control unit 90.

[0033] like Figure 1 As shown, two holding tables 10 are provided on the rotary table 20. These two holding tables 10 are arranged on the rotary table 20 in a manner independent of the rotary table 20 and capable of rotating approximately in a horizontal plane. Figure 1 As shown, the rotary table 20 is a disc-shaped worktable, configured to rotate in a horizontal plane. It is an example of a transport member that moves the holding table 10 by rotating it at predetermined times to transport the workpiece 100 on the holding table 10. Two holding tables 10 are arranged on the rotary table 20 at equal intervals, for example, with a phase angle of 180°. These two holding tables 10 move sequentially to the loading / unloading position and the processing position by rotating the rotary table 20. The rotary table 20 is equipped with a sensor (not shown). The sensor on the rotary table 20 detects the rotation angle of the rotary table 20 and sends the detection result to the control unit 90.

[0034] The temporary worktable 30 is a worktable that temporarily places the workpiece 100, which is to be processed but removed from the boxes 81 and 82 placed on the box placement table 80, onto the holding worktable 10 before centering it. The temporary worktable 30 is equipped with a sensor (not shown). The sensor on the temporary worktable 30 detects the workpiece 100 held on the temporary worktable 30 and sends the detection result to the control unit 90.

[0035] The processing unit 40 processes the workpiece 100 held by the holding table 10. In this embodiment, the processing unit 40 is a grinding unit and has a grinding wheel 41. The grinding wheel 41 has a grinding tool arranged in a ring. While applying a rotational motion about an axis parallel to the Z-axis, the grinding wheel 41 is pressed along the Z-axis onto the workpiece 100 held by the holding table 10, which is positioned in the processing position, thereby performing grinding processing on the workpiece 100.

[0036] like Figure 1 As shown, the processing apparatus 1 also includes a grinding amount detection unit 45. The grinding amount detection unit 45 is disposed near the outer periphery of the holding surface 11 of the holding table 10, which is positioned at the processing position. In this embodiment, the grinding amount detection unit 45 is a contact-type height detection device, having two contact probes that detect the height of the contact position. One probe of the grinding amount detection unit 45 detects the height of the holding surface 11 of the holding table 10, and the other probe detects the height of the upper surface of the region slightly inside the outer edge of the workpiece 100 held by the holding surface 11 of the holding table 10. Based on the difference between the heights detected by one probe and the heights detected by the other probe, the thickness of the region slightly inside the outer edge of the workpiece 100 is detected, and the thickness detection result is sent to the control unit 90. In addition, in this invention, the grinding amount detection unit 45 is not limited to this, and can also be implemented in the following manner: based on the reception of the interference wave of the laser reflected by the holding surface 11 and the workpiece 100, the thickness of the region slightly inside the outer edge of the workpiece 100 is detected.

[0037] The first conveying arm 51 has an adsorption pad and is an example of an infeed unit that adsorbs and holds the workpiece 100 before processing after it has been aligned on the temporary worktable 30 and moves it into the holding worktable 10 located at the infeed / outfeed position. The second conveying arm 52 has an adsorption pad and is an example of an outfeed unit that adsorbs and holds the processed workpiece 100 held on the holding worktable 10 located at the infeed / outfeed position and moves it out onto the cleaning worktable 71 of the cleaning unit 70. The third conveying arm 53 is, for example, a robotic picker with a U-shaped hand that adsorbs and holds the workpiece 100 and moves it. The third conveying arm 53 is an example of a conveying unit that moves the workpiece 100 before processing from the boxes 81 and 82 to the temporary worktable 30 and moves the processed workpiece 100 after processing from the cleaning unit 70 into the boxes 81 and 82. The third conveying arm 53 moves the processed and cleaned workpiece 100, which was previously stored in box 81, into box 81, and moves the processed and cleaned workpiece 100, which was previously stored in box 82, into box 82. Conveying arms 51, 52, and 53 are each equipped with sensors (not shown). The sensors on the conveying arms 51, 52, and 53 detect information related to the drive of the conveying arms 51, 52, and 53, such as the rotation angle and position of each arm, as well as the workpiece 100 held and held by the conveying arms 51, 52, and 53, and send these detection results to the control unit 90.

[0038] like Figure 1 As shown, the touch panel 60 is disposed on the device cover 3 with its display surface facing outwards. The touch panel 60 includes: a display 61 that displays various information related to the processing apparatus 1; and an input unit 62 that receives various operation inputs related to the processing apparatus 1 from the operator, such as setting processing conditions. In this embodiment, the display 61 displays the configuration diagram 200 (see reference 1) in a three-dimensional manner, as if viewing the processing apparatus 1 from an oblique angle. Figure 12 The configuration diagram 200 shows the legends of each structural unit of the processing device 1 and the workpiece 100 being processed by the processing device 1, based on the actual configuration within the processing device 1.

[0039] Here, the illustrations of each structural unit of the processing apparatus 1 are two-dimensional stereoscopic images displayed in a three-dimensional manner, showing at least a portion of the shape of each structural element of the processing apparatus 1 as viewed from an obliquely upward view. In this embodiment, specifically, they are the stereoscopic images 202 of the apparatus base, 210 of the holding table, 220 of the rotating table, 230 of the temporary table, 240 of the processing unit, 251, 252, and 253 of the conveying arms, 270 of the cleaning unit, 280 of the box-mounted platform, and 281 and 282 of the boxes (see reference). Figure 3 , Figure 8 as well as Figure 9 ).

[0040] Furthermore, the illustration of the workpiece 100 being processed by the processing apparatus 1 is a two-dimensional stereoscopic image displayed in a three-dimensional manner, showing the shape of the workpiece 100 being processed by the processing apparatus 1 from an obliquely upward view. In this embodiment, specifically, it is the stereoscopic image 400 of the workpiece described later (see reference). Figure 10 In addition, in this embodiment, the workpiece 100 processed by the processing device 1 includes, for example, the workpiece 100 stored in boxes 81 and 82, the workpiece 100 adsorbed, held and transported by the third conveying arm 53, the workpiece 100 held and centered by the temporary worktable 30, the workpiece 100 adsorbed, held and transported by the first conveying arm 51, the workpiece 100 attracted and held by the holding worktable 10, the workpiece 100 processed by the processing unit 40, the workpiece 100 adsorbed, held and transported by the second conveying arm 52, and the workpiece 100 held and cleaned by the cleaning worktable 71.

[0041] Furthermore, the stereoscopic (three-dimensional) display on the display 61 means that the configuration diagram 200 obtained from viewing the processing device 1 from an obliquely upward position is displayed on the display 61, or at least means that two-dimensional image data obtained from viewing the configuration diagram 200 of the processing device 1 from an obliquely upward position is displayed.

[0042] The cleaning unit 70 includes a cleaning table 71 for holding the ground workpiece 100. The cleaning unit 70 cleans the ground workpiece 100 on the cleaning table 71, removing grinding chips and other contaminants adhering to the ground surface. The cleaning table 71 is equipped with a sensor (not shown). The sensor on the cleaning table 71 detects the workpiece 100 held on the cleaning table 71 and sends the detection result to the control unit 90.

[0043] The box-mounted platform 80 is a platform for holding boxes 81 and 82, which serve as containers for holding multiple processed items 100. In this embodiment, the processing apparatus 1 has two box-mounted platforms 80, with boxes 81 placed on one platform and boxes 82 placed on the other. However, this is not a limitation in the present invention, as long as there is at least one box-mounted platform 80.

[0044] Boxes 81 and 82 can be used to take out and place workpieces 100 through openings, and have multiple slots that hold workpieces 100 spaced apart along the Z-axis. In the processing apparatus 1, the workpieces 100 stored in boxes 81 and 82 are managed and processed one by one according to the number of slots they are placed in. In this embodiment, boxes 81 and 82 each have 13 layers of slots to process 13 workpieces 100 separately, but this is not a limitation in the present invention, and the number of slots may be several. Boxes 81 and 82 are placed on the box placement stage 80 with their openings facing the third conveying arm 53.

[0045] The control unit 90 controls each structural element of the processing apparatus 1, causing the processing apparatus 1 to perform various actions related to the processing of the workpiece 100. The control unit 90 receives detection results from sensors installed in each structural unit, etc. Furthermore, the control unit 90 processes information related to the state of the processing apparatus 1 based on these sensor detection results and displays it on the display 61. Figure 2 As shown, the control unit 90 has a storage unit 91 and a processing unit 92.

[0046] The storage unit 91 stores programs that implement various processing functions of the processing apparatus 1 executed by the processing unit 92, as well as data (processing conditions) used for program processing. The storage unit 91 includes storage devices such as RAM (Random Access Memory), ROM (Read Only Memory), flash memory, EPROM (Erasable Programmable Read Only Memory), and EEPROM (Electrically Erasable Programmable Read Only Memory), which are non-volatile or volatile semiconductor memories. The program stored in the storage unit 91 can also be described as a program product containing multiple commands for data processing that can be executed by the processor of the processing unit 92, and is a non-transitory recording medium that can be read by the processor. The storage unit 91 can also be used as a temporary working area when the processor of the processing unit 92 executes the commands described in the program.

[0047] like Figure 2 As shown, the storage unit 91 in this embodiment includes an image data storage unit 94, a three-dimensional data storage unit 95, a layout setting storage unit 96, and a motion history storage unit 97. The functions of the storage unit 91, the image data storage unit 94, the three-dimensional data storage unit 95, the layout setting storage unit 96, and the motion history storage unit 97 are implemented by the storage device included in the storage unit 91.

[0048] Figure 3 It is shown Figure 2 An example of an image stored in the image data storage unit 94. The image data storage unit 94 stores a two-dimensional stereoscopic image that is displayed three-dimensionally, showing at least a portion of the structural elements of the processing device 1, excluding the individual structural units, as viewed from an obliquely upward position. Specifically, as... Figure 3 As shown, the image data storage unit 94 stores stereoscopic images of the base station 202, the rotating worktable 220, the temporary worktable 230, the processing unit 240, the cleaning unit 270, the cassette stage 280, and cassette images 281 and 282. These stereoscopic images stored in the image data storage unit 94 are pre-stored in the image data storage unit 94 by the operator or manager of the processing device 1.

[0049] The device base perspective image 202 is a two-dimensional perspective image of the device base 2 viewed from an obliquely upward direction (the same direction as in configuration diagram 200). The rotating worktable perspective image 220 is a two-dimensional perspective image of the rotating worktable 20 viewed from an obliquely upward direction (the same direction as in configuration diagram 200). The temporary worktable perspective image 230 is a two-dimensional perspective image of the temporary worktable 30 viewed from an obliquely upward direction (the same direction as in configuration diagram 200). The processing unit perspective image 240 is a two-dimensional perspective image of the processing unit 40 viewed from an obliquely upward direction (the same direction as in configuration diagram 200). The cleaning unit perspective image 270 is a two-dimensional perspective image of a portion of the cleaning unit 70 viewed from an obliquely upward direction (the same direction as in configuration diagram 200). The stereoscopic image 270 of the cleaning unit includes the stereoscopic image 271 of the cleaning workbench (reference). Figure 12 The three-dimensional image 271 of the cleaning workbench is a two-dimensional three-dimensional image of the cleaning workbench 71, displayed in a three-dimensional manner as if viewed from an obliquely upward direction (the same direction as in configuration diagram 200). The three-dimensional image 280 of the box-mounted platform is a two-dimensional three-dimensional image of the box-mounted platform 80, displayed in a three-dimensional manner as if viewed from an obliquely upward direction (the same direction as in configuration diagram 200). The three-dimensional images 281 and 282 are two-dimensional three-dimensional images of a portion of the outer shape of boxes 81 and 82, respectively, as if viewed from an obliquely upward direction (the same direction as in configuration diagram 200). All of these three-dimensional images stored in the image data storage unit 94 are two-dimensional three-dimensional images obtained by viewing the outer shape of each structural element of the processing apparatus 1 from the same direction as in configuration diagram 200. In this embodiment, the three-dimensional images stored in the image data storage unit 94 are images obtained by the operator viewing the structural elements of the processing apparatus 1 at an oblique angle from approximately the position where the touch panel 60 is located. Furthermore, in this embodiment, the stereoscopic image 270 of the cleaning unit and the stereoscopic images 281 and 282 of the boxes are stereoscopic images that omit the portion covering the top of the cleaning unit 70 and the boxes 81 and 82. Therefore, the stereoscopic image 400 of the workpiece (see reference) can be easily visually confirmed in the configuration diagram 200. Figure 10 The three-dimensional image 400 of the workpiece shows the workpiece 100 stored on the cleaning workbench 71 or in boxes 81, 82.

[0050] The stereoscopic images stored in the image data storage unit 94 can also move or rotate in the configuration diagram 200 without accompanying the movement of the workpiece 100. For example, although the rotary table 20 is driven to rotate, the shape and position of the rotary table stereoscopic image 220 do not change in the configuration diagram 200. Similarly, although the grinding wheel 41 of the processing unit 40 rotates, the shape and position of the processing unit stereoscopic image 240 do not change in the configuration diagram 200. Furthermore, although the cleaning table 71 of the cleaning unit 70 rotates, the shape and position of the cleaning unit stereoscopic image 270 do not change in the configuration diagram 200.

[0051] Figure 4 It is shown Figure 2 This is an example of the three-dimensional data stored in the three-dimensional data storage unit 95. The three-dimensional data storage unit 95 stores the three-dimensional data of each structural unit and workpiece 100 in the processing apparatus 1 that are not stored as stereoscopic images in the image data storage unit 94. The structural units and workpieces 100 stored as three-dimensional data are selected from those that undergo movement and rotation during a series of processing operations on the workpiece 100, thus changing their position and shape as shown in the configuration diagram 200. Specifically, such as... Figure 4 As shown, the three-dimensional data storage unit 95 stores three-dimensional data 310 of the holding table, three-dimensional data 351, 352, and 353 of the conveying arms, and three-dimensional data 300 of the workpiece. The three-dimensional data 310 of the holding table is data showing the three-dimensional shape of the holding table 10. The three-dimensional data 351, 352, and 353 of the conveying arms are data showing the three-dimensional shapes of the conveying arms 51, 52, and 53, respectively. The three-dimensional data 300 of the workpiece is data showing the three-dimensional shape of the workpiece 100. The three-dimensional data stored in the three-dimensional data storage unit 95 represents each structural element, for example, using three-dimensional CAD (Computer-Aided Design). The stereoscopic image generated based on the three-dimensional data stored in the three-dimensional data storage unit 95 can move or rotate in the configuration diagram 200 in sync with the movements of each structural unit and the workpiece 100. In this embodiment, the three-dimensional data 351, 352, and 353 of the conveying arms can undergo shape changes due to the rotational movement of each arm constituting the conveying arms 51, 52, and 53. This three-dimensional data stored in the three-dimensional data storage unit 95 is pre-stored in the three-dimensional data storage unit 95 by an operator or manager of the processing apparatus 1.

[0052] Figure 5 It is shown Figure 2This is an example diagram of the layout coordinate data 501 stored in the layout setting storage unit 96. The layout setting storage unit 96 stores information about the positions of each three-dimensional image of the structural elements of the machining apparatus 1 displayed in the configuration diagram 200, determined by the arrangement of each structural element when viewed from an obliquely upward perspective (the same direction as configuration diagram 200). Specifically, as... Figure 5 As shown, the layout setting storage unit 96 stores layout coordinate data 501 by associating one-to-one with the coordinates in the arrangement drawing of each three-dimensional image 202, 210, 220, 230, 240, 251, 252, 253, 270, 280, 281, 282 representing each structural element of the processing device 1 with the coordinates in the arrangement drawing of each three-dimensional image 202, 210, 220, 230, 240, 251, 252, 253, 270, 280, 281, 282. Here, the coordinates within the configuration diagram of each stereoscopic image 202, 210, 220, 230, 240, 251, 252, 253, 270, 280, 281, 282 are coordinates in the configuration diagram 200 that represent the positions of each stereoscopic image 202, 210, 220, 230, 240, 251, 252, 253, 270, 280, 281, 282 configured in the configuration diagram 200 using a coordinate system set within the configuration diagram 200. For example, in a coordinate system that takes any position among the center or four corners of the configuration diagram 200 as the origin, any position among the center or four corners of each stereoscopic image 202, 210, 220, 230, 240, 251, 252, 253, 270, 280, 281, 282 configured in the configuration diagram 200 is represented using the X and Y coordinates defined by the pixel unit. The X-coordinate of the layout diagram represents the position of the layout diagram 200 in the left-right direction, and the Y-coordinate of the layout diagram represents the position of the layout diagram 200 in the up-down direction. The layout coordinate data 501 is stored in advance in the layout setting storage unit 96 by the operator or manager of the processing device 1.

[0053] In this embodiment, the movement of the holding table 10 and the conveying arms 51, 52, and 53, driven by the rotation of the rotating table 20, results in each structural unit and the workpiece 100 being in an overlapping positional relationship when viewed from the upper surface of the processing device 1. Therefore, the layout coordinate data 501 sets and corrects the coordinates in the arrangement drawing of the three-dimensional image of each structural unit and the workpiece 100 in an overlapping positional relationship, and this correction separates the Y-coordinates representing the vertical direction.

[0054] In this embodiment, the layout coordinate data 501 is corrected as follows: a predetermined value is added to the Y-coordinate of the configuration view of the transport arm stereoscopic image 251; a predetermined value is added to the Y-coordinate of the configuration view of the second transport arm stereoscopic image 252; a predetermined value is added to the Y-coordinate of the configuration view of the third transport arm stereoscopic image 253 and the processing unit stereoscopic image 240; and a predetermined value is subtracted from the Y-coordinate of the configuration view of the holding table stereoscopic image 210, the rotating table stereoscopic image 220, the temporary table stereoscopic image 230, and the cleaning unit stereoscopic image 270. Thus, in the configuration view 200, the layout coordinate data 501 is corrected by increasing the interval along the vertical direction at the positions of the transport arm stereoscopic images 251, 252, and 253. Furthermore, as a result, in the configuration diagram 200, the layout coordinate data 501 sets a correction to extend the passage area of ​​the workpiece three-dimensional image 400 between the transport arm three-dimensional images 251, 252, 253 and the processing unit three-dimensional image 240 and the holding table three-dimensional image 210, the temporary table three-dimensional image 230 and the cleaning unit three-dimensional image 270 along the vertical direction of the coordinates in the configuration diagram.

[0055] Figure 6 It is shown Figure 2 This is an example of layout stacking order data 502 stored in the layout setting storage unit 96. The layout setting storage unit 96 stores an image stacking order, which is the stacking order of the three-dimensional images 210, 220, 240, and 400 of the various structural elements 10, 20, and 40 of the processing device 1 and the workpiece 100 when arranged in the configuration diagram 200. Specifically, as shown in the diagram... Figure 6 As shown, the layout setting storage unit 96 stores layout stacking order data 502, which associates the processing unit stereoscopic image 240, the workpiece stereoscopic image 400, the holding table stereoscopic image 210, the rotating table stereoscopic image 220 stacked near the position of the configuration processing unit stereoscopic image 240 with the image stacking order of their respective stereoscopic images 240, 400, 210, 220.

[0056] In addition, regarding the layout stacking order data 502 of the layout setting storage unit 96, although not shown, the stacking order of the transport arm stereoscopic images 251, 252, 253, the workpiece stereoscopic image 400, the holding table stereoscopic image 210, the rotating table stereoscopic image 220, the temporary table stereoscopic image 230, the cleaning unit stereoscopic image 270 and their respective stereoscopic images 251, 252, 253, 400, 210, 220, 230, 270 are associated one-to-one with their respective stereoscopic images 251, 252, 253, 400, 210, 220, 230, 270.

[0057] In addition, Figure 6 In the example shown, the layout stacking order data 502 is set such that a stereoscopic image with a smaller image stacking order number is stacked on top of a stereoscopic image with a larger image stacking order number, positioned near the front in the configuration diagram 200. The layout stacking order data 502 is stored in advance in the layout setting storage unit 96 by the operator or manager of the processing device 1.

[0058] The stacking order data is set according to the appearance of the processing device 1 when viewed at an angle: the first transport arm stereoscopic image 251 is stacked at a position closer to the front than the second transport arm stereoscopic image 252, and the second transport arm stereoscopic image 252 is stacked at a position closer to the front than the third transport arm stereoscopic image 253. Furthermore, in this embodiment, the third transport arm stereoscopic image 253 and the first transport arm stereoscopic image 251 are stacked in configuration diagram 200 only when the third transport arm 53 extends toward the temporary worktable 30, and the third transport arm stereoscopic image 253 and the second transport arm stereoscopic image 252 are stacked in configuration diagram 200 only when the third transport arm 53 extends toward the cleaning unit 70.

[0059] Figure 7 It is shown Figure 2 A diagram illustrating an example of the mobile history data 600 stored in the mobile history storage unit 97. (See diagram for example.) Figure 7 As shown, the movement history storage unit 97 associates the level number of the slots where each workpiece 100 is stored before processing and the movement history (movement completion status) of each workpiece 100 with each workpiece 100 and records it as movement history data 600. The movement history storage unit 97 records movement history data 600 for each box 81, 82. In addition, in Figure 7 In the example shown, the movement history data 600 records whether each movement process of the workpiece 100 in the processing device 1 is completed during fully automatic processing for each workpiece 100. However, this invention is not limited to this. In the case of a manual processing device 1, the items and order of the movement history of each workpiece 100 may also be different for each workpiece 100.

[0060] exist Figure 7In the example shown, the movement history data 600 indicates the following: Regarding the workpiece 100 previously stored in slot number "1" at level "1" before processing, it has completed its movement along all workpiece 100 movement paths and has been returned to the same slot; regarding the workpiece 100 previously stored in slot number "2" at level "2" before processing, it has roughly completed its movement along the workpiece 100 movement path and is about to be returned to the same slot via the third conveyor arm 53; regarding the workpiece 100 previously stored in slot number "3" at level "3" before processing... The workpiece 100 is being processed. The holding table 10, which holds the workpiece 100, is positioned in the processing position and is being processed. The workpiece 100, which was stored in slot number "4" before processing, is positioned in the transfer position by the holding table 10 and is waiting for processing. The workpiece 100, which was stored in slot number "5" before processing, has been transferred to the temporary worktable 30. The workpieces 100 stored in slots numbered "6" and above have not been moved out.

[0061] The movement history storage unit 97 records and updates the movement history data 600 in real time based on the detection results of sensors installed in each structural unit. Whenever the actual position and movement of each workpiece 100 are detected, the movement history storage unit 97 records and updates the movement history data 600. When the detection signal of the workpiece 100 from the sensor of the structural unit before the workpiece 100's movement disappears and a detection signal of the workpiece 100 from the sensor of the structural unit at the workpiece's destination is detected, the movement history storage unit 97 recognizes that the workpiece 100 has been moved from the structural unit before the movement to the structural unit at the destination, and records and updates this information in the movement history data 600. Furthermore, the movement history storage unit 97 recognizes that the workpiece 100 has been moved (transported) based on the detection signals of the workpiece 100 from the sensors of the conveying arms 51, 52, and 53, and records and updates this information in the movement history data 600.

[0062] In addition to the above, the storage unit 91 stores information such as processing conditions required for the processing unit 40 to process the workpiece 100. This information, such as processing conditions, is stored in the storage unit 91 in advance by the operator or manager of the processing device 1.

[0063] The processing unit 92 includes arithmetic processing devices such as a CPU (Central Processing Unit), microprocessor, microcomputer, DSP (Digital Signal Processor), and system LSI (Large Scale Integration). The processor in the processing unit 92 executes programs loaded into the RAM of the storage unit 91. This enables various processing functions performed by the processing apparatus 1. Among the programs loaded into the RAM of the storage unit 91 and executed by the processor in the processing unit 92 are programs for layering and displaying stereoscopic images, programs for generating or displaying stereoscopic images by rotating three-dimensional data, and programs for displaying three-dimensional data at a fixed, predetermined angle and moving the display horizontally. Examples of the various processing functions performed by the processing apparatus 1 include the processing function of the processing unit 40 on the workpiece 100, and the functions of generating and changing the configuration diagram 200 for implementing the display function of the display 61.

[0064] The processing unit 92 operates according to the program stored in the storage unit 91, performing various processes of the processing apparatus 1 as described below (processing, and generation and modification processes of the configuration diagram 200, etc.). Figure 2 As shown, the processing unit 92 in this embodiment includes a processing unit 98 and a display processing unit 99. The functions of the processing unit 92, as well as the processing unit 98 and the display processing unit 99, are implemented by an arithmetic processing device executing a program stored in a storage device in the storage unit 91. The processing unit 98 controls each structural element of the processing apparatus 1 based on information such as processing conditions stored in the storage unit 91, and executes the processing unit 40 on the workpiece 100.

[0065] Next, an example of the operation of the processing apparatus 1 according to the embodiments will be described in this specification with reference to the accompanying drawings. For example, when the input unit 62 receives an input from the operator indicating that the workpiece 100 stored in the boxes 81 and 82 should be processed automatically, the processing apparatus 1 automatically performs a series of processing operations as described below via the processing unit 98. First, the processing apparatus 1 takes out one workpiece 100 stored in the boxes 81 and 82 before processing via the third transfer arm 53 and transfers it to the temporary worktable 30. The workpiece 100 transferred by the third transfer arm 53 is centered on the temporary worktable 30. The workpiece 100 on the temporary worktable 30 after center alignment is transferred by the first transfer arm 51 onto the holding worktable 10 located at the transfer-in / transfer-out position. Next, the machining apparatus 1, through the rotation drive of the rotating worktable 20, moves the holding worktable 10, which holds the workpiece 100 before processing, from the loading / unloading position to the processing position. The machining unit 40 then performs grinding on the workpiece 100 on the holding worktable 10 at the processing position. During or after grinding based on the machining unit 40, the machining apparatus 1 detects the amount of grinding on the workpiece 100 through the grinding amount detection unit 45. When the grinding of the workpiece 100 is completed, the processing device 1, through the rotation drive of the rotating worktable 20, moves the holding worktable 10 holding the ground workpiece 100 from the processing position to the loading / unloading position. The second conveying arm 52 moves the ground workpiece 100 from the holding worktable 10 in the loading / unloading position to the cleaning worktable 71 of the cleaning unit 70. The cleaning unit 70 cleans the ground workpiece 100 on the cleaning worktable 71, and the third conveying arm 53 collects the cleaned workpiece 100 on the cleaning worktable 71 into the boxes 81 and 82. In this way, the processing device 1 automatically completes the following series of processing steps for a workpiece 100: the processing starts from the unprocessed workpiece 100 being removed from the boxes 81 and 82, through the processing of the workpiece 100, and ends with the processed workpiece 100 being loaded into the boxes 81 and 82. Then, the processing device 1 automatically performs a series of processing steps on each of the workpieces 100 stored in boxes 81 and 82, according to the order of the slots containing the workpieces 100, thereby completing the fully automatic processing of all the workpieces 100 stored in boxes 81 and 82. Furthermore, the processing device 1 is not limited to performing fully automatic processing; it can also perform each processing step on each workpiece 100 according to input from the operator via the input unit 62.

[0066] Next, in this specification, the process before the display processing unit 99 in the processing apparatus 1 of the embodiment displays the configuration diagram 200 and the storage state diagram 201 on the display 61 will be described with reference to the accompanying drawings. Figure 8 , Figure 9 , Figure 10 as well as Figure 11 It is shown Figure 2 The diagram shows an example of the processing of the display processing unit 99. Figure 12 It is shown Figure 1 This is an example of a configuration diagram 200 displayed on the display 61 of the processing apparatus 1. When the input unit 62 of the processing apparatus 1 receives an input from the operator indicating the intention to perform fully automatic processing of the workpiece 100 or to perform various processes, the display processing unit 99 begins to generate... Figure 12 The configuration shown in Figure 200.

[0067] like Figure 8 As shown, the display processing unit 99 generates a three-dimensional image 210 of the holding worktable based on the three-dimensional data 310 of the holding worktable. Furthermore, the three-dimensional image 210 of the holding worktable is a two-dimensional three-dimensional image of the holding worktable 10, displayed in a three-dimensional manner according to the shape of the holding worktable 10 viewed from an obliquely upward direction (the same direction as in the configuration diagram 200). It is a three-dimensional two-dimensional image obtained from the same direction as the three-dimensional images displaying each structural element. In this embodiment, the display processing unit 99 generates three-dimensional images 210 of the holding worktable for each of the two holding worktables 10. Additionally, the display processing unit 99 calculates the position within the processing apparatus 1 of each holding worktable 10 at the start of generating the configuration diagram 200 based on information about the rotation angle of the rotating table 20 when generating the configuration diagram 200. The display processing unit 99 calculates the configuration map coordinates 510, which correspond to the positions of each holding worktable 10 within the processing device 1 when the configuration map 200 is first generated, the configuration map coordinates of the holding worktable stereoscopic image 210 containing the loading / unloading position and processing position included in the layout coordinate data 501, and the configuration map coordinates of the rotating worktable stereoscopic image 220.

[0068] In addition, such as Figure 9As shown, the display processing unit 99 generates stereoscopic images 251, 252, and 253 of the conveyor arms based on the three-dimensional data 351, 352, and 353 of the conveyor arms and the drive information of the conveyor arms 51, 52, and 53 at the start of generating the configuration diagram 200. The display processing unit 99 deforms the three-dimensional data 351, 352, and 353 of the conveyor arms according to the drive information of the conveyor arms 51, 52, and 53, generating stereoscopic images 251, 252, and 253 of the conveyor arms. For example, when the conveyor arms 51, 52, and 53 are reversed, reversed stereoscopic images 251, 252, and 253 of the conveyor arms are generated. In addition, the three-dimensional images 251, 252, and 253 of the conveying arms are two-dimensional three-dimensional images of the conveying arms 51, 52, and 53, which are viewed from an obliquely upward direction (the same direction as in the configuration diagram 200). They are three-dimensional two-dimensional images obtained from the same direction as the three-dimensional images showing each structural element.

[0069] Furthermore, when the display processing unit 99 generates a configuration map 200 based on an input from the input unit 62 of the processing device 1 indicating the operator's intention to perform fully automatic processing of the workpieces 100, it obtains position information of each workpiece 100 indicating that all workpieces 100 are stored in boxes 81 and 82 when the configuration map 200 is generated. The display processing unit 99 obtains the posture information of each workpiece 100 when stored in boxes 81 and 82. Here, in this embodiment, the posture information of the workpiece 100 is, for example, information about the tilt angle of the workpiece 100 relative to the horizontal direction. Then, the display processing unit 99 generates a three-dimensional image 400 of each workpiece 100 based on the workpiece three-dimensional data 300 and the posture information of each workpiece 100. Furthermore, the workpiece stereoscopic image 400 is a two-dimensional stereoscopic image of the workpiece 100 displayed in a three-dimensional manner, showing the shape of the workpiece 100 from an obliquely upward perspective (the same direction as in the configuration diagram 200). It is a three-dimensional two-dimensional stereoscopic image obtained from the same direction as the stereoscopic images displaying each structural element. In this embodiment, the display processing unit 99 generates the workpiece stereoscopic image 400 by adding the display of the number of the slot level associated with each workpiece 100, so that it can be identified by the number of the slot level in which each workpiece 100 is stored before processing.

[0070] Furthermore, when the display processing unit 99 generates the configuration diagram 200 based on the input from the input unit 62 of the processing device 1, indicating the operator's intention to perform fully automatic processing of the workpiece 100, as shown below... Figure 10As shown, based on the information of the in-matrix coordinates of the box stereoscopic images 281 and 282 included in the layout coordinate data 501, the position on the configuration map 200 corresponding to the position of the workpiece 100 when stored in the boxes 81 and 82 is calculated. This calculated position on the configuration map 200 is used as the configuration position (in-matrix coordinate 530) of each workpiece stereoscopic image 400 on the configuration map 200 when the configuration map 200 is first generated. The display processing unit 99 calculates, for example, the position on the configuration map 200 of each workpiece stereoscopic image 400 that is sequentially superimposed on the bottom plate portion of the box stereoscopic images 281 and 282 from the side with the larger slot level to the side with the smaller slot level using the Y coordinate of the configuration map of the bottom plate portion of the box stereoscopic images 281 and 282. The calculated value is used as the in-matrix coordinate 530 of each configuration map.

[0071] Furthermore, when the display processing unit 99 generates a configuration map 200 based on the input indicating the intention to perform each process, it determines the structural unit that actually holds the workpiece 100 at the start of configuration map 200 generation, based on the detection results of sensors installed in each structural unit at the start of configuration map 200 generation or the movement history data 600 at the start of configuration map 200 generation, and obtains the posture information of the workpiece 100 held by that structural unit. If the structural unit holding the workpiece 100 is a conveyor arm 51, 52, or 53, the display processing unit 99 further obtains the posture information of the workpiece 100 held by the conveyor arms 51, 52, or 53 based on the drive information of the conveyor arms 51, 52, or 53. Then, the display processing unit 99 generates a workpiece stereoscopic image 400 for each workpiece 100 based on the workpiece 3D data 300 and the posture information of each workpiece 100. When the conveyor arms 51, 52, and 53 reverse and the workpieces 100 also reverse, the display processing unit 99 rotates the workpiece 3D data 300 according to the posture information to generate a workpiece 3D image 400.

[0072] Furthermore, when the display processing unit 99 generates the configuration diagram 200 based on the input indicating the intention to perform each process, such as Figure 10As shown, based on the information of the coordinates within the configuration diagram of each structural unit contained in the layout coordinate data 501, the position on the configuration diagram 200 corresponding to the position of the workpiece 100 when held by the structural unit is calculated, and the calculated position on the configuration diagram 200 is used as the coordinates within the configuration diagram 530 when the configuration diagram 200 is started to be generated. Specifically, when the structural unit that actually holds the workpiece 100 is any one of the structural units that holds the workpiece 100 above, such as the holding worktable 10, the temporary worktable 30, and the cleaning worktable 71, the display processing unit 99 calculates the position on the arrangement map 200 above any of the images in the holding area of ​​the three-dimensional image 210 of the holding worktable, the three-dimensional image 230 of the temporary worktable, and the three-dimensional image 271 of the cleaning worktable using a predetermined value. The calculated value is then used as the coordinate 530 in each arrangement map. Furthermore, when the structural unit that actually holds the workpiece 100 is the conveying arms 51, 52, and 53 that hold the workpiece 100 below, the display processing unit 99 calculates the position on the arrangement map 200 below the holding area portion of the three-dimensional images 251, 252, and 253 of the conveying arms by subtracting a predetermined value from the Y-coordinate of the arrangement map of the holding area portion of the three-dimensional images 251, 252, and 253 of the conveying arms, and uses the calculated value as the coordinate 530 in each arrangement map for calculation.

[0073] In this embodiment, the display processing unit 99 calculates the coordinates 530 of the workpiece stereoscopic image 400 in the configuration map based on the corrected layout coordinate data 501 set in the configuration map 200 to expand the passage area of ​​the workpiece stereoscopic image 400 in the vertical direction. Therefore, in the configuration map 200, the display processing unit 99 can arrange and display stereoscopic images of each structural element that is in a position overlapping with the workpiece 100 when viewed from the upper surface of the processing device 1, at intervals in the vertical direction, for displaying the workpiece stereoscopic image 400 of the workpiece 100.

[0074] Display processing unit 99 is executing... Figures 8 to 10 After the generation and processing of the 3D images shown, and the calculation and processing of the coordinates within the configuration map, as follows: Figure 11As shown, based on the stereoscopic images, layout coordinate data 501, layout stacking order data 502, holding table stereoscopic image 210, the in-plane coordinates 510 of the holding table stereoscopic image 210, the transport arm stereoscopic images 251, 252, and 253, the workpiece stereoscopic images 400 of all workpieces 100, and the in-plane coordinates 530 of each workpiece stereoscopic image 400 stored in the image data storage unit 94, a process is generated. Figure 12 The configuration diagram 200 and the storage state diagram 201 shown are displayed on the monitor 61.

[0075] Specifically, firstly, the display processing unit 99 configures each stereoscopic image stored in the image data storage unit 94 according to the layout coordinate data 501 and the layout stacking order data 502, thereby generating the base portion of the configuration drawing 200. Then, the display processing unit 99 configures the holding table stereoscopic image 210 in the base portion of the configuration drawing according to the configuration drawing coordinate 510 and the layout stacking order data 502, configures the transfer arm stereoscopic images 251, 252, and 253 in the base portion of the configuration drawing according to the layout coordinate data 501 and the layout stacking order data 502, and configures each workpiece stereoscopic image 400 in the base portion of the configuration drawing according to the configuration drawing coordinate 530 and the layout stacking order data 502, thereby generating the configuration drawing 200. By generating the configuration diagram 200 in this way, the configuration diagram 200 becomes a diagram of the entire processing device 1 with each structural unit arranged as viewed from an obliquely upward position, and also a diagram showing the workpiece 100 viewed from an obliquely upward position at the same position as the actual position on the configuration diagram 200. Furthermore, the display processing unit 99 can also execute... Figures 8 to 10 The base portion of the configuration map 200 is generated before or simultaneously with the generation of the various stereo images shown and the calculation of coordinates within the configuration map.

[0076] Next, the display processing unit 99 extracts the workpiece stereoscopic images 400 stacked on the box stereoscopic images 281 and 282, i.e., the workpiece stereoscopic images 400 of the workpiece 100 stored in the boxes 81 and 82, according to the coordinates 530 in each configuration diagram of each workpiece stereoscopic image 400, and generates a storage state diagram 201 that is different from the configuration diagram 200, in which the extracted workpiece stereoscopic images 400 are arranged at intervals in the vertical direction according to the order of the slots of the boxes 81 and 82.

[0077] like Figure 12 As shown, the display processing unit 99 causes the display 61 to display a screen showing the generated configuration diagram 200 and storage status diagram 201 arranged together.

[0078] Next, in this specification, the processing of the display processing unit 99 in the processing apparatus 1 of the embodiment after displaying the configuration diagram 200 and the storage state diagram 201 on the display 61 will be described with reference to the accompanying drawings. Figure 13 and Figure 14 It is shown Figure 2 The diagram shows an example of the processing of the display processing unit 99.

[0079] like Figure 8 As shown, the display processing unit 99 detects the rotation angle of the rotating table 20 each time, corresponding to the actual movement of the holding table 10. Based on the detected rotation angle of the rotating table 20, it re-acquires the actual position of each holding table 10 within the processing device 1. Based on the re-acquired actual position of each holding table 10 within the processing device 1, it recalculates the coordinates 510 of the holding table stereoscopic image 210 in the configuration drawing. The movement process of moving the holding table stereoscopic image 210 from the previously displayed position to the recalculated coordinates 510 in the configuration drawing is repeatedly executed in the configuration drawing 200. In this movement process, the display processing unit 99 moves the holding table stereoscopic image 210 at a predetermined speed along the movement trajectory of the holding table stereoscopic image 210 in the configuration drawing 200, calculated based on the previously known movement trajectory of the actual holding table 10.

[0080] In addition, such as Figure 13 As shown, the display processing unit 99 detects the driving information of the actual conveying arms 51, 52, and 53 each time, corresponding to the rotational movement of each arm constituting the actual conveying arms 51, 52, and 53. Based on the detected driving information of the actual conveying arms 51, 52, and 53, it changes the shape of the three-dimensional data 351, 352, and 353 of the conveying arms to generate three-dimensional images 251, 252, and 253 of the conveying arms. By changing the already displayed three-dimensional images 251, 252, and 253 of the conveying arms in the configuration diagram 200 to the regenerated three-dimensional images 251, 252, and 253 of the conveying arms, and reflecting the regenerated three-dimensional images 251, 252, and 253 of the conveying arms on the configuration diagram 200, the change processing of changing the three-dimensional images 251, 252, and 253 of the conveying arms is repeatedly executed. In this change processing, the display processing unit 99 causes the three-dimensional images 251, 252, and 253 of the conveying arms to change at a predetermined speed according to the shape change of the three-dimensional images 251, 252, and 253 of the conveying arms in the configuration diagram 200, which is calculated based on the driving mode of each arm of the actual conveying arms 51, 52, and 53 known in advance.

[0081] In addition, such as Figure 14As shown, the display processing unit 99, in accordance with the tilt and reversal of the actual workpiece 100, determines the actual structural unit holding the workpiece 100 each time based on the detection results of the sensors installed in each structural unit or the updated movement history data 600, obtains the posture information of the workpiece 100 held by the structural unit, rotates the workpiece 3D data 300 according to the obtained posture information of the workpiece 100 to generate a workpiece stereoscopic image 400, and repeatedly performs the change processing of changing the workpiece stereoscopic image 400 by changing the already displayed workpiece stereoscopic image 400 in the configuration diagram 200 to the regenerated workpiece stereoscopic image 400 and reflecting the regenerated workpiece stereoscopic image 400 on the configuration diagram 200.

[0082] In addition, such as Figure 14 As shown, for each workpiece 100, the display processing unit 99, corresponding to the actual movement of the workpiece 100, determines the actual structural unit holding the workpiece 100 each time based on the detection results of sensors installed in each structural unit or the updated movement history data 600. Based on the information of the re-determined actual structural unit holding the workpiece 100, it recalculates the coordinates 530 of the workpiece stereoscopic image 400 in the configuration map. The movement process of moving the workpiece stereoscopic image 400 from its previously displayed position to the recalculated coordinates 530 in the configuration map is repeatedly executed in the configuration map 200 and the storage state map 201. In this movement process, the display processing unit 99 moves each workpiece stereoscopic image 400 at a predetermined speed along the movement trajectory of the workpiece stereoscopic image 400 in the configuration map 200 calculated based on the previously known movement trajectory of the actual workpiece 100. Alternatively, when the movement trajectory of the workpiece 100 in the arrangement diagram 200 becomes complex due to the complexity of the actual workpiece 100's movement trajectory, the display processing unit 99 may approximate the movement trajectory of the workpiece 100 as a straight line, causing the workpiece 100 to move in a straight line from its previously displayed position to the recalculated coordinates 530 in the arrangement diagram at a predetermined speed. Alternatively, when the actual workpiece 100 moves without tilting or reversing, the display processing unit 99 may display the workpiece 3D data 300 as the workpiece 100 in the arrangement diagram 200 at a fixed angle, and perform movement processing by moving the workpiece 100.

[0083] Display processing unit 99 executes the above according to... Figure 8 , Figure 13 as well as Figure 14The described change processing and movement processing can reflect and display the actual driving and movement of the holding table 10, conveying arms 51, 52, 53 and workpiece 100 in real time in the configuration diagram 200 and storage state diagram 201 with fewer processing steps.

[0084] In this way, the display 61, through the image data storage unit 94, the three-dimensional data storage unit 95, the layout setting storage unit 96, the movement history storage unit 97, and the display processing unit 99, displays a stereoscopic image 400 of the workpiece 100 at the same position on the arrangement diagram 200, which is an image of the processing device 1 as a whole, at the same position on the actual processing device 1. As the workpiece 100 moves, the position of the stereoscopic image 400 of the workpiece 100 on the arrangement diagram 200, which is an image of the processing device 1 as a whole, is changed to the same position as the actual workpiece 100 on the processing device 1. In addition, the display 61, through the image data storage unit 94, the three-dimensional data storage unit 95, the layout setting storage unit 96, the movement history storage unit 97, and the display processing unit 99, also displays the position on the arrangement diagram 200 of the stereoscopic image at intervals in the vertical direction compared to the actual position. This stereoscopic image shows at least two structural units that are in an overlapping positional relationship when viewed from the upper surface (above) of the processing device 1.

[0085] In the processing apparatus 1 of embodiment 1 having the structure described above, the display 61 displays a configuration diagram 200 in three dimensions as viewed from an oblique angle. This configuration diagram 200 displays illustrations of each structural unit of the processing apparatus 1 and illustrations of the workpiece 100 being processed by the processing apparatus 1 according to the actual configuration within the processing apparatus 1. Therefore, even if the structural elements of the processing apparatus 1 or the workpiece 100 actually overlap in the vertical direction, since the three-dimensional images of each structural element and the workpiece 100 displayed on the display 61 are staggered in the vertical direction, it also has the effect of allowing accurate understanding of the situation within the processing apparatus 1 through the display on the display 61.

[0086] Furthermore, in the processing apparatus 1 of Embodiment 1, at least two structural elements of the processing apparatus 1 that are in an overlapping position when viewed from the upper surface of the processing apparatus 1 during movement or in a fixed position are arranged at intervals along the vertical direction in the configuration diagram 200 and displayed on the display 61. Therefore, even if the structural elements of the processing apparatus 1 or the workpiece 100 actually overlap in the vertical direction, it can still achieve the effect of accurately grasping the situation inside the processing apparatus 1 through the display on the display 61.

[0087] Furthermore, the present invention is not limited to the embodiments described above. That is, various modifications can be made without departing from the spirit of the present invention. In the above embodiments, the processing apparatus 1, which is equipped with a display 61 having a display function for displaying the state of the processing apparatus 1, is a grinding apparatus for grinding the workpiece 100. However, the present invention is not limited to a grinding apparatus; it may also be a cutting apparatus for cutting the workpiece 100, a grinding apparatus for polishing the workpiece 100, a laser processing apparatus for laser processing the workpiece 100, or a belt extension apparatus for extending a belt attached to the workpiece 100. In addition, when the display 61 is provided with a belt extension apparatus, the holding table for holding the workpiece 100 and the belt extension unit overlap in the vertical direction and move up and down relative to each other. Therefore, similar to the above embodiments, the display 61 displays a three-dimensional image of the holding table and a three-dimensional image of the belt extension unit at intervals in the vertical direction. In addition, these processing devices may also have an ultraviolet irradiation unit, in which case the ultraviolet irradiation unit is arranged below the box and overlaps with the box, and is set up to be moved freely up and down together with the box via a box lifter.

Claims

1. A processing apparatus, comprising at least: The worktable is used to hold the workpiece in place. A processing unit that processes the workpiece held by the holding table; A conveyor arm for conveying workpieces; and monitor, Its features are, The processing device sequentially transports and processes multiple workpieces. The display shows a three-dimensional configuration diagram of the processing device and the workpieces from an oblique perspective. This configuration diagram shows illustrations of each structural unit of the processing device and illustrations of the multiple workpieces being processed, based on the actual internal configuration of the processing device. The processing apparatus also includes a box-holding platform for holding boxes, which have multiple slots for storing one workpiece or multiple workpieces. The display shows the level number of the slot associated with each of the multiple workpieces, according to each of their respective illustrations.

2. The processing apparatus according to claim 1, characterized in that, At least two structural units of the processing apparatus are arranged at intervals along the vertical direction, and are in an overlapping position when viewed from the upper surface of the processing apparatus, whether in a moving or fixed position. The display shows the positions of structural units and workpieces that are in an overlapping position when viewed from the upper surface of the processing device, spaced apart from the actual position in the vertical direction.

Images