Contact terminal, inspection jig, and inspection device

Abstract

The contact terminal of the present invention includes a cylindrical body extending along an axial direction parallel to the central axis of the contact terminal, and a conductive rod-shaped conductor. The conductor has a protruding portion protruding from the cylindrical body toward one side in the axial direction, and an insertion portion disposed more internally than the outer circumference of the cylindrical body. The cylindrical body has: an end-side notch provided on the circumferential surface of the one axial end of the cylindrical body along the axial direction; and a first circumferential notch connected to the other axial side of the end-side notch and provided circumferentially away from the circumferential first end of the end-side notch. The insertion portion has a first inclined portion and a first wall surface portion disposed on the one axial side of the first inclined portion. The first inclined portion has an inclined surface that moves away from the central axis as it faces one side in the axial direction when viewed in a direction perpendicular to the axial direction. The first wall surface portion can contact the cylindrical body.

Description

Technical Field

[0001] The present invention relates to a contact terminal for inspecting an object to be inspected. Background Art

[0002] Currently, contact terminals that come into contact with an object to be inspected are known. An example of such a contact terminal is disclosed in Patent Document 1.

[0003] The contact terminal of the above-mentioned Patent Document 1 includes a cylindrical body, a first central conductor, and a second central conductor. The cylindrical body is formed in a cylindrical shape from a conductive raw material. A first spring portion and a second spring portion that expand and contract in the axial direction of the cylindrical body are formed in the cylindrical body. A connecting portion that connects the first spring portion and the second spring portion is provided at the axial center portion of the cylindrical body.

[0004] The first central conductor and the second central conductor are formed in a rod shape from a conductive raw material. A first bulging portion is provided at the front end of the first central conductor. In a state where the first central conductor is fixed to one end portion of the cylindrical body, the first bulging portion is disposed within the connecting portion. A second bulging portion is provided at the front end of the second central conductor. In a state where the second central conductor is fixed to the other end portion of the cylindrical body, the second bulging portion is disposed within the connecting portion.

[0005] If a substrate is mounted on a support member that supports the contact terminal having the above structure, one end portion of the first central conductor is pressed against the electrode of the substrate by the acting force of the first spring portion and the second spring portion, so that one end portion of the first central conductor remains in a conductive contact state with the electrode.

[0006] When inspecting an object to be inspected using the contact terminal, the other end portion of the second central conductor is pressed against the point to be inspected of the object to be inspected by the acting force of the first spring portion and the second spring portion, so that the other end portion of the second central conductor remains in a conductive contact state with the point to be inspected.

[0007] Thereby, by the contact between the object to be inspected and the other end portion of the second central conductor, the contact between the second bulging portion and the connecting portion, the contact between the connecting portion and the first bulging portion, and the contact between one end portion of the first central conductor and the electrode, contact points are respectively formed to form a current path.

[0008] Prior Art Documents

[0009] Patent Documents

[0010] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2019-15542 Summary of the Invention

[0011] Problems to be Solved by the Invention

[0012] However, in the contact terminal of the above-mentioned Patent Document 1, there is room for improvement in the fixing method of the first center conductor and the second center conductor to the cylindrical body.

[0013] In view of the above situation, an object of the present invention is to provide a contact terminal capable of suppressing the detachment of a conductor from a cylindrical body by easy assembly, and an inspection jig and an inspection device using the contact terminal.

[0014] Solution to the problem

[0015] An exemplary contact terminal of the present invention is configured to include: a cylindrical body extending along an axial direction parallel to the central axis of the contact terminal; and a rod-shaped conductor having conductivity, the conductor having a protruding portion protruding from the cylindrical body toward one side in the axial direction and an insertion portion disposed inside the outer periphery of the cylindrical body. The cylindrical body has: a first end-side cutout provided along the axial direction on the circumferential surface of the one axial end of the cylindrical body; and a first circumferential cutout connected to the other axial side of the first end-side cutout and provided circumferentially away from the circumferential first end of the first end-side cutout. The insertion portion has a first inclined portion and a first wall surface portion disposed on the one axial side of the first inclined portion. The first inclined portion has an inclined surface that is away from the central axis as it faces the one axial side when viewed in a direction perpendicular to the axial direction, and the first wall surface portion can contact the cylindrical body.

[0016] The effects of the invention are as follows.

[0017] According to the exemplary contact terminal of the present invention, an inspection jig, and an inspection device using the contact terminal, a structure for suppressing the detachment of a conductor from a cylindrical body can be achieved by easy assembly. Description of the drawings

[0018] Figure 1 It is a schematic diagram showing the overall structure of an inspection device according to an exemplary embodiment of the present invention.

[0019] Figure 2 It is a side view showing the contact terminal disassembled.

[0020] Figure 3 It is a top view showing the contact terminal disassembled.

[0021] Figure 4 It is a perspective view of the first conductor.

[0022] Figure 5A It is a side view of the contact terminal.

[0023] Figure 5B It only shows Figure 5ASide view of the first conductor and the second conductor in the

[0024] Figure 6 Top view of the contact terminal.

[0025] Figure 7 Diagram showing the state where the contact terminal is supported by the support member.

[0026] Figure 8 Brief side cross-sectional view of the contact terminal.

[0027] Figure 9 Is Figure 8 A - A cross-sectional view in

[0028] Figure 10 Enlarged view of the main part related to the snap structure.

[0029] Figure 11 Enlarged view of the main part related to the press - fitting structure of the comparative example.

[0030] Figure 12A Schematic diagram showing the first structural example of the first wall surface portion.

[0031] Figure 12B Schematic diagram showing the second structural example of the first wall surface portion.

[0032] Figure 12C Schematic diagram showing the third structural example of the first wall surface portion.

[0033] Figure 12D Is showing Figure 12A Schematic diagram of the modified example of the structure shown.

[0034] Figure 13 Enlarged view of the main part related to a modified example of the snap structure.

[0035] Figure 14 Diagram mainly showing the first conductor and the second conductor in the contact terminal of the first modified example.

[0036] Figure 15 Enlarged view of the main part showing the snap structure in the contact terminal of the first modified example.

[0037] Figure 16A Cross - sectional view in the axial direction showing the state where the arc portion contacts the inner circumferential surface of the cylindrical body during the assembly of the contact terminal of the first modified example.

[0038] Figure 16B Cross - sectional view in the axial direction showing the state where the arc portion is received in the circumferential notch of the cylindrical body during the assembly of the contact terminal of the first modified example.

[0039] Figure 17 It is an enlarged view of the main part of the snap structure in the contact terminal showing the second modification example.

[0040] Figure 18A It is a cross-sectional view taken along the axial direction showing the state where the arc portion contacts the inner peripheral surface of the cylindrical body during the assembly of the contact terminal of the second modification example.

[0041] Figure 18B It is a cross-sectional view taken along the axial direction showing the state where the arc portion is received in the circumferential notch of the cylindrical body during the assembly of the contact terminal of the second modification example.

[0042] Figure 19 It is a perspective view of the first conductor of the third modification example.

[0043] Figure 20 It is a brief side cross-sectional view of the contact terminal of the third modification example.

[0044] Figure 21 It is an enlarged view of the main part of the snap structure showing the third modification example.

[0045] Figure 22 It is an enlarged view of the main part of the snap structure showing the fourth modification example.

[0046] Figure 23 It is a view of the cylindrical body of the fourth modification example observed along the axial direction.

[0047] Figure 24 It is a view of a part of the contact terminal of the fourth modification example observed from one side in the direction perpendicular to the axis.

[0048] Figure 25 It is a view of a part of the contact terminal of the fourth modification example observed from the other side in the direction perpendicular to the axis.

[0049] Figure 26 It is an enlarged view of the main part of the snap structure showing the fifth modification example.

[0050] Figure 27 It is a cross-sectional view taken along the axial direction showing the state where the arc portion is received in the circumferential notch of the cylindrical body during the assembly of the contact terminal of the fifth modification example.

[0051] Figure 28 It is a cross-sectional view taken along the axial direction showing a modification example related to the contact of the first contact portion and the second contact portion. Detailed Description of the Invention

[0052] Hereinafter, exemplary embodiments of the present invention will be described with reference to the drawings. In addition, hereinafter, the center axis J of the contact terminal (refer to Figure 5A , Figure 6)The parallel direction is called the "axial direction". In the figure, one side of the axial direction is shown as X1, and the other side of the axial direction is shown as X2. Also, the direction around the central axis J is called the "circumferential direction".

[0053] <1. Overall structure of the inspection device>

[0054] Figure 1 It is a schematic diagram showing the overall structure of the inspection device according to an exemplary embodiment of the present invention. In addition, Figure 1 in it, the X1 side of one axial direction corresponds to the lower side, and the X2 side of the other axial direction corresponds to the upper side.

[0055] Figure 1 The inspection device 25 shown performs an electrical inspection of the inspection object 30. The inspection device 25 includes an inspection jig 10 and an inspection processing unit 15. The inspection jig 10 is configured as a so-called probe card, for example.

[0056] The inspection object 30 is, for example, a semiconductor wafer on which a plurality of circuits are formed on a semiconductor substrate such as silicon. The semiconductor wafer is singulated into semiconductor chips each having the above-mentioned circuits by dicing. In addition, the inspection object 30 can be set as, for example, a semiconductor chip, a CSP (Chip Size Package), or an electronic device such as a semiconductor element in addition to being set as a semiconductor wafer.

[0057] Also, the inspection object 30 can be a substrate. In this case, the inspection object 30 can be, for example, a printed wiring board, an epoxy glass board, a flexible board, a ceramic multi-layer wiring board, a package board for semiconductor packaging, an interposer board, a film carrier, etc., or an electrode plate for a display such as a liquid crystal display, an EL (Electro-Luminescence) display, a touch panel display, or an electrode plate for a touch panel.

[0058] Also, a product based on a packaging technology called EMIB (Embedded Multi-die Interconnect Bridge) can be used as the inspection object 30. In EMIB, a smaller silicon substrate called a silicon bridge is buried in a packaging resin substrate, and fine and high-density wirings are formed on the surface of the silicon bridge, so that adjacent silicon dies are mounted close to the packaging resin substrate.

[0059] As Figure 1 shown, the inspection jig 10 includes a probe 1, a pitch conversion unit 4, and a connection board 5. The probe 1 has contact terminals (probes) 2 and a support member 3.

[0060] The support member 3 supports a plurality of contact terminals 2 formed in a rod shape. That is, the inspection jig 10 includes a plurality of contact terminals 2 and a support member 3 that supports the plurality of contact terminals 2.

[0061] The pitch conversion unit 4 is disposed above the support member 3 and fixed to the support member 3. The contact terminal 2 has one end portion 2A on one axial side X1 and the other end portion 2B on the other axial side X2. The other end portion 2B is connected to each first electrode 41 provided at the lower end portion of the pitch conversion unit 4.

[0062] Each of the above-mentioned first electrodes 41 is electrically connected to each second electrode formed at the upper end portion of the pitch conversion unit 4 via a wiring portion (not shown) formed inside the pitch conversion unit 4. The pitch conversion unit 4 converts the first pitch between the contact terminals 2 into the second pitch between the second electrodes. The second pitch is longer than the first pitch.

[0063] The connection plate 5 is configured to be detachable from the pitch conversion unit 4. A plurality of electrodes (not shown) connected to the second electrodes are formed on the connection plate 5. Each of the electrodes of the connection plate 5 is electrically connected to the inspection processing unit 15, for example, by a cable or connection terminals (not shown).

[0064] The inspection processing unit 15 includes, for example, a power supply circuit, a voltmeter, an ammeter, and a microcomputer. The inspection processing unit 15 controls a drive mechanism (not shown) to move the inspection jig 10.

[0065] When the inspection object 30 is, for example, a semiconductor wafer, in the inspection object 30, a plurality of inspection points such as pads or bumps are formed according to each circuit corresponding to each semiconductor chip formed after dicing. The inspection processing unit 15 sets a part of the regions of the plurality of circuits formed in the inspection object 30 as an inspection region, and moves the inspection jig 10 to a position where the contact terminals 2 and the inspection points in the inspection region are opposed to each other in the vertical direction. At this time, the inspection jig 10 is in a state where one end portion 2A of the contact terminal 2 faces the inspection object 30 side.

[0066] Then, the inspection processing unit 15 moves the inspection jig 10 downward to bring the contact terminals 2 into contact with the inspection points in the inspection region. Thereby, each inspection point is electrically connected to the inspection processing unit 15.

[0067] In the above state, the inspection processing unit 15 supplies inspection current or voltage to the inspection points of the inspection object 30 via the respective contact terminals 2, and based on the voltage signal or current signal obtained from each contact terminal 2, performs inspections on the inspection object 30 such as open or short circuits of the circuit pattern. Alternatively, the inspection processing unit 15 can also measure the impedance of the inspection object 30 based on the voltage signal or current signal obtained from each contact terminal 2 by supplying alternating current or voltage to each inspection point.

[0068] That is, the inspection device 25 includes an inspection jig 10 and an inspection processing unit 15. The inspection processing unit 15 performs an inspection of the inspection object 30 based on an electrical signal obtained by bringing the contact terminal 2 into contact with an inspection point provided on the inspection object 30.

[0069] When the inspection within the inspection area of the inspection object 30 is completed, the inspection processing unit 15 moves the inspection jig 10 upward, moves the inspection jig 10 in parallel to a position corresponding to a new inspection area, and then moves the inspection jig 10 downward to bring the contact terminal 2 into contact with each inspection point in the new inspection area for inspection. In this way, the inspection of the entire inspection object 30 is performed by sequentially changing the inspection area while performing the inspection.

[0070] In addition, a structure may be formed in which the position of the inspection jig 10 is fixed and the inspection object 30 is moved relative to the inspection jig 10.

[0071] <2. Structure of the Contact Terminal>

[0072] Next, the structure of the contact terminal 2 will be described in more detail. Figure 2 It is a side view showing the contact terminal 2 disassembled into a cylindrical body 20, a first conductor 21, and a second conductor 22. Figure 3 It is a top view showing the contact terminal 2 disassembled into a cylindrical body 20, a first conductor 21, and a second conductor 22.

[0073] As Figure 2 、 Figure 3 shown, the contact terminal 2 includes a cylindrical body 20 extending along the axial direction of the contact terminal 2, a rod-shaped first conductor (plunger) 21 having conductivity, and a second conductor (plunger) 22. The first conductor 21 and the second conductor 22 are formed of a conductive material such as a nickel alloy, for example.

[0074] The cylindrical body 20 is formed in a cylindrical shape, and is formed of a nickel or nickel alloy tube having an outer diameter of about 25 to 300 μm and an inner diameter of about 10 to 250 μm, for example. And it is preferable to form a coating such as gold plating on the inner peripheral surface of the cylindrical body 20. In addition, the outer peripheral surface of the cylindrical body 20 may be insulated and coated as needed.

[0075] The cylindrical body 20 has a first main body portion 201 for fixing the first conductor 21 at the end portion 20A on one axial side. The cylindrical body 20 has a first spring portion 202 connected to the other axial side X2 of the first main body portion 201. The cylindrical body 20 has a second main body portion 203 for fixing the second conductor 22 at the end portion 20B on the other axial side. The cylindrical body 20 has a second spring portion 204 connected to the one axial side X1 of the second main body portion 203. Further, the cylindrical body 20 has a third main body portion 205 connecting the first spring portion 202 and the second spring portion 204.

[0076] The first spring portion 202 and the second spring portion 204 are formed as spiral bodies extending spirally along the circumferential surface of the cylindrical body 20. That is, the cylindrical body 20 has spring portions 202 and 204 configured to be spiral along the circumferential surface of the cylindrical body 20.

[0077] In order to manufacture such a cylindrical body having a spiral body, for example, after forming a gold plating layer on the outer periphery of a core material by plating, a nickel electroforming layer is formed on the outer periphery of the formed gold plating layer by electroforming. After forming a resist layer on the outer periphery of the nickel electroforming layer, a part of the resist layer is removed spirally by exposure using a laser. The resist layer is used as a masking material for etching, and the nickel electroforming layer at the portion where the resist layer has been removed spirally is removed. Then, after removing the resist layer, the gold plating layer at the portion where the nickel electroforming layer has been removed spirally is removed, and the core material is removed while maintaining the state where the gold plating layer remains on the inner periphery of the nickel electroforming layer, thereby forming the cylindrical body.

[0078] The first main body portion 201, the second main body portion 203, and the third main body portion 205 are formed as cylindrical shapes that are not configured to be spiral.

[0079] In addition, the shape of the cylindrical body 20 is not limited to a cylindrical shape, and for example, it may be formed as a cylindrical shape having a square ring shape such as a quadrilateral or a hexagon in a cross-sectional view along the axial direction.

[0080] As Figure 2 、 Figure 3 shown, the first conductor 21 has a first protrusion 211 and a first insertion portion 212. Here, Figure 4 a perspective view of the first conductor 21 is shown.

[0081] Figure 4 The first conductor 21 shown is formed by using the lamination in the direction perpendicular to the axial direction (axis perpendicular direction) as the lamination direction and by using MEMS technology. Figure 4 In , one side in the axis perpendicular direction is shown as Y1, and the other side is shown as Y2. Lithography is used in MEMS technology. By manufacturing the first conductor 21 using MEMS technology, effects such as cost reduction during mass production, complex shaping, and microfabrication shaping can be achieved.

[0082] The first protruding portion 211 has a rod-shaped main body portion 211A and a convex edge portion 211B connected to the other axial side X2 of the rod-shaped main body portion 211A. As will be described below, the front end portion 211A1 of the rod-shaped main body portion 211A disposed on the one axial side X1 contacts the inspection point of the inspection object 30. In addition, in the Figure 4 example, the front end portion 211A1 is planar, but is not limited thereto. For example, it may be conical, frustoconical, hemispherical, or the like.

[0083] The first insertion portion 212 has a buckle portion 212A at the one axial side end portion 2121 of the first insertion portion 212. The buckle portion 212A is formed along the outer periphery of the first insertion portion 212 and is connected to the other axial side X2 of the convex edge portion 211B. The buckle portion 212A is a portion for fixing the first insertion portion 212 to the first main body portion 201 of the cylindrical body 20. The details of this structure will be described below. By using MEMS technology, the buckle portion 212A can be easily formed.

[0084] In addition, the first insertion portion 212 has a first contact portion 212B at the other axial side end portion 2122 of the first insertion portion 212. The first contact portion 212B has a first plane 212B1 along the axial direction. The first contact portion 212B has a stacked structure with the directions Y1 and Y2 perpendicular to the axial direction as the stacking directions. Thus, by using MEMS technology, the first contact portion 212B can be manufactured with high precision.

[0085] Moreover, the first plane 212B1 is a plane perpendicular to the stacking direction. The first plane 212B1 can also be formed as a plane along the stacking direction, but if it is a plane perpendicular to the stacking direction, the first plane 212B1 can be formed with high precision.

[0086] When the first conductor 21 having such a structure is assembled to the cylindrical body 20, as shown by the dashed arrows in Figure 2 、 Figure 3 , if the first contact portion 212B is inserted into the first main body portion 201 of the cylindrical body 20 and the first conductor 21 is pressed into the cylindrical body 20, the first insertion portion 212 is fixed to the first main body portion 201 by the buckle portion 212A. In this state, the convex edge portion 211B abuts against the one axial side end face 20A1 of the cylindrical body 20. Therefore, the convex edge portion 211B and the rod-shaped main body portion 211A are arranged to be more on the one axial side X1 than the cylindrical body 20. That is, the first conductor 21 has a first protruding portion 211 that protrudes more toward the one axial side X1 than the cylindrical body 20.

[0087] Here, Figure 5A a side view of the contact terminal 2 is shown, Figure 6The top view showing the contact terminal 2 is shown. That is, Figure 5A and Figure 6 The state in which the first conductor 21 and the second conductor 22 are assembled to the cylindrical body 20 is shown. In addition, Figure 5B It is only shown as Figure 5A The side view of the first conductor 21 and the second conductor 22 in the state where the first conductor 21 and the second conductor 22 are assembled to the cylindrical body 20 as shown.

[0088] And, in order to be engaged with the buckle portion 212A, circumferential cuts 201B1 and 201B2 are provided in the first main body portion 201 (refer to Figure 3 ). The first insertion portion 212 is arranged more internally than the outer periphery 20C of the cylindrical body 20. The first insertion portion 212 is fixed to the axial one-side end portion 20A of the cylindrical body 20. The fixing of the first insertion portion 212 is performed by buckling. Therefore, the first conductor 21 has the first insertion portion 212 that is arranged more internally than the outer periphery 20C of the cylindrical body 20 and is fixed to the axial one-side end portion 20A of the cylindrical body 20. In addition, the structures of the circumferential cuts 201B1 and 201B2 will be described in detail below.

[0089] And, as Figure 2 , Figure 3 shown, the second conductor 22 has a second protrusion 221 and a second insertion portion 222.

[0090] Similar to the first conductor 21, the second conductor 22 also has the direction perpendicular to the axis as the stacking direction and is formed by stacking based on MEMS technology, and can enjoy the same effects as the first conductor 21.

[0091] As Figure 3 shown, the second protrusion 221 has a rod-shaped main body portion 221A and a convex edge portion 221B connected to the axial one-side X1 side of the rod-shaped main body portion 221A. The front end portion 221A1 disposed at the axial other-side end portion 2211 of the rod-shaped main body portion 221A contacts the first electrode 41 of the pitch conversion unit 4. In addition, in the example of Figure 3 , the front end portion 221A1 is planar, but it is not limited thereto. Similar to the front end portion 211A1.

[0092] The second insertion portion 222 has a buckle portion 222A at the axial other-side end portion 2221 of the second insertion portion 222. The buckle portion 222A is formed along the outer periphery of the second insertion portion 222 and is connected to the axial one-side X1 side of the convex edge portion 221B. The buckle portion 222A is a portion for fixing the second insertion portion 222 to the second main body portion 203 of the cylindrical body 20, and its structure is the same as that of the buckle portion 212A.

[0093] Further, the second insertion portion 222 has a second contact portion 222B at one axial end portion 2222 of the second insertion portion 222. The second contact portion 222B has a second plane 222B1 along the axial direction. The second contact portion 222B has a stacked structure with the direction perpendicular to the axial direction as the stacking direction. Thus, by using MEMS technology, the second contact portion 222B can be fabricated with high precision.

[0094] Moreover, the second plane 222B1 is a plane perpendicular to the stacking direction. Although the second plane 222B1 can also be formed as a plane along the stacking direction, when it is a plane perpendicular to the stacking direction, the second plane 222B1 can be formed with high precision.

[0095] When assembling the second conductor 22 with such a structure to the cylindrical body 20, as Figure 2 、 Figure 3 indicated by the dashed arrow, the second contact portion 222B is inserted into the second main body portion 203 of the cylindrical body 20. If the second conductor 22 is pressed into the cylindrical body 20, the second insertion portion 222 is fixed to the second main body portion 203 by the engaging portion 222A. In this state, the convex edge portion 221B abuts against the other axial end face 20B1 of the cylindrical body 20. Therefore, the convex edge portion 221B and the rod-shaped main body portion 221A are arranged to be closer to the other axial side X2 than the cylindrical body 20. That is, the second conductor 22 has a second protruding portion 221 that protrudes more toward the other axial side X2 than the cylindrical body 20.

[0096] Further, in order to engage with the engaging portion 222A, circumferential notches 203B1, 203B2 (refer to Figure 3 ) are provided in the second main body portion 203 in the same manner as the first main body portion 201. The second insertion portion 222 is arranged to be closer to the inside than the outer periphery 20C of the cylindrical body 20. The second insertion portion 222 is fixed to the other axial end portion 20B of the cylindrical body 20. The fixing of the second insertion portion 222 is performed by snap fitting. Therefore, the second conductor 22 has a second insertion portion 222 that is arranged to be closer to the inside than the outer periphery 20C of the cylindrical body 20 and is fixed to the other axial end portion 20B of the cylindrical body 20.

[0097] In addition, when viewed axially, the fixing portion by the engaging portion 212A and the fixing portion by the engaging portion 222A are arranged at angular positions separated by 180° around the central axis J.

[0098] In the state where the first conductor 21 and the second conductor 22 are assembled to the cylindrical body 20, as Figure 5BAs shown, the first plane 212B1 of the first contact portion 212B contacts the second plane 222B1 of the second contact portion 222B. That is, the first plane 212B1 and the second plane 222B1 contact in the natural state of the first spring portion 202 and the second spring portion 204. Thus, if the first spring portion 202 and the second spring portion 204 are axially compressed, the first plane 212B1 and the second plane 222B1 slide and contact each other. That is, when the first contact portion 212B and the second contact portion 222B move from the natural state of the spring portions 202, 204, the contact between the first plane 212B1 and the second plane 222B1 is maintained, so that the conduction state between the first conductor 21 and the second conductor 22 becomes stable.

[0099] Here, Figure 7 is a diagram showing the state where the contact terminal 2 is supported by the support member 3. As Figure 7 shown, the support member 3 has an upper support body 31, an intermediate support body 32, and a lower support body 33. The lower support body 33 has a support hole 33A which is a through hole penetrating in the axial direction. The cross-sectional area of the support hole 33A when observed in the axial direction is slightly larger than the cross-sectional area of the rod-shaped main body portion 211A when observed in the axial direction, and smaller than the cross-sectional area of the convex edge portion 211B when observed in the axial direction. Thus, the rod-shaped main body portion 211A can be inserted into the support hole 33A, and the convex edge portion 211B is used to prevent the contact terminal 2 from falling off.

[0100] The intermediate support body 32 is disposed above the lower support body 33 and has a support hole 32A which is a through hole coaxial with the support hole 33A. The cross-sectional area of the support hole 32A when observed in the axial direction is slightly larger than the outer shape cross-sectional area of the third main body portion 205 when observed in the axial direction. Thus, the third main body portion 205 can be inserted into the support hole 32A.

[0101] The upper support body 31 is disposed above the intermediate support body 32 and has a support hole 31A which is a through hole coaxial with the support hole 32A. The cross-sectional area of the support hole 31A when observed in the axial direction is slightly larger than the outer shape cross-sectional areas of the second main body portion 203 and the second protruding portion 221 when observed in the axial direction. Thus, the second main body portion 203 and the second protruding portion 221 can be inserted into the support hole 31A.

[0102] When the contact terminal 2 is supported by the support member 3, the rod-shaped main body portion 211A is inserted into the support hole 31A, the support hole 32A, and the support hole 33A in sequence from above. In addition, the support holes 31A, 32A have a cross-section that can allow the convex edge portion 211B to be inserted when observed in the axial direction.

[0103] In addition, the support member 3 can also be separately disassembled into an upper support body 31, an intermediate support body 32, and a lower support body 33. In this case, the rod-shaped main body portion 211A is inserted into the lower support body 33. Then, while inserting the third main body portion 205 into the intermediate support body 32, the intermediate support body 32 is fixed to the lower support body 33. Next, while inserting the second main body portion 203 and the second protruding portion 221 into the upper support body 31, the upper support body 31 is fixed to the intermediate support body 32.

[0104] In a state where the probe 1 is assembled using the contact terminal 2 and the support member 3, the rod-shaped main body portion 211A is inserted into the support hole 33A. The convex edge portion 211B abuts against the upper surface of the lower support body 33. The third main body portion 205 is inserted into the support hole 32A. The second main body portion 203 and the second protruding portion 221 are inserted into the support hole 31A. Thus, the contact terminal 2 is supported by the support member 3.

[0105] Then, while bringing the front end portion 221A1 of the second protruding portion 221 into contact with the first electrode 41 exposed on the lower surface of the pitch conversion unit 4, the upper surface of the upper support body 31 is pressed against the lower surface of the pitch conversion unit 4. Thus, the support member 3 is fixed to the pitch conversion unit 4. At this time, the first spring portion 202 and the second spring portion 204 are compressed in the axial direction, and the first plane 212B1 and the second plane 222B1 slide and contact each other. Thus, the front end portion 221A1 is pressed against the first electrode 41 by the elastic force of the spring portions 202 and 204, so that the front end portion 221A1 and the first electrode 41 maintain a stable conduction contact state.

[0106] In addition, when inspecting the inspection object 30, the front end portion 211A1 of the rod-shaped main body portion 211A is brought into contact with the inspection point 301 of the inspection object 30. At this time, a force is applied to the front end portion 211A1 toward the other side X2 in the axial direction, and the first spring portion 202 and the second spring portion 204 are compressed in the axial direction. Thus, the front end portion 211A1 is pressed against the inspection point 301 by the elastic force of the spring portions 202 and 204, so that the front end portion 211A1 and the inspection point 301 maintain a stable conduction contact state. At this time, the first plane 212B1 and the second plane 222B1 slide and contact each other.

[0107] When inspecting the inspection object 20, the first spring portion 202 and the second spring portion 204 are in a state of being compressed to the maximum extent. In this state, the end face 212B21 (refer to Figure 5B ) on the other side in the axial direction of the first contact portion 212B does not contact the second insertion portion 222, and the end face 222B21 (refer to Figure 5B ) on one side in the axial direction of the second contact portion 222B does not contact the first insertion portion 212.

[0108] In this way, the first plane 212B1 contacts the second plane 222B1. Here, Figure 8 is a simplified side cross-sectional view of the contact terminal 2. As Figure 8 shown, the first plane 212B1 contacts the second plane 222B1, thereby forming a sliding contact CP1. As Figure 8 indicated by the arrow in, the current path can be a path that flows through the first conductor 21 and the second conductor 22 via the sliding contact CP1 without passing through the cylindrical body 20. Therefore, the number of contacts can be reduced, and the contact resistance inside the contact terminal 2 can be lowered.

[0109] Figure 9 Shows Figure 8 the A-A cross-sectional view at the sliding contact CP1 in when viewed axially. As Figure 9 shown, when viewed axially, the cross-sections of both the first contact portion 212B and the second contact portion 222B are in a shape along a semi-circle. That is, in the surface where the first plane 212B1 contacts the second plane 222B1, the cross-section of the first contact portion 212B when viewed axially is substantially the same shape as the cross-section of the second contact portion 222B when viewed axially. Thereby, the contact area between the first plane 212B1 and the second plane 222B1 can be increased.

[0110] And, as Figure 9 shown, the first contact portion 212B and the second contact portion 222B have a laminated structure with the direction perpendicular to the axial direction as the lamination direction. Thereby, the contact between the contact portions 212B, 222B and the cylindrical body 20 is a point contact when viewed in axial cross-section, but in this embodiment, the current path does not pass through the contacts based on the above point contact.

[0111] <3. Snap Structure>

[0112] Next, the snap structure for fixing the first conductor 21 or the second conductor 22 to the cylindrical body 20 will be specifically described.

[0113] Figure 10It is an enlarged view of the main part related to the buckle structure for fixing the first conductor 21 to the cylindrical body 20. The first main body portion 201 of the cylindrical body 20 has a first end-side notch 201A, a first circumferential notch 201B1, and a second circumferential notch 201B2. The first end-side notch 201A is formed in a shape that cuts in from one axial end face 20A1 of the cylindrical body 20 toward the other axial side X2. The first circumferential notch 201B1 is connected to the other axial side X2 of the first end-side notch 201A and is formed in a shape that cuts in circumferentially away from the first end-side notch 201A from the first circumferential end 201A1 of the first end-side notch 201A. The second circumferential notch 201B2 is connected to the other axial side X2 of the first end-side notch 201A and is formed in a shape that cuts in circumferentially away from the first end-side notch 201A from the second circumferential end 201A2 of the first end-side notch 201A.

[0114] That is, the cylindrical body 20 has: a first end-side notch 201A provided axially on the circumferential surface of the one axial end 20A of the cylindrical body 20; and a first circumferential notch 201B1 connected to the other axial side X2 of the first end-side notch 201A and provided circumferentially away from the first end-side notch 201A from the first circumferential end 201A1 of the first end-side notch 201A.

[0115] As described above, the insertion portion 212 of the first conductor 21 has a buckle portion 212A. The buckle portion 212A has a first inclined portion 212A1, a first wall surface portion W1, a first end-side rib 212A2, and a first center-side rib 212A3. The first inclined portion 212A1 has an inclined surface T1A that moves away from the central axis J as it faces the one axial side X1 when viewed in a direction perpendicular to the axial direction.

[0116] The first wall surface portion W1 is disposed on the one axial side X1 of the first inclined portion 212A1. In a state where the first insertion portion 212 is inserted into the cylindrical body 20, at least a part of the first wall surface portion W1 is disposed within the first circumferential notch 201B1. At this time, either the first insertion portion 212 can be slightly moved axially so that the first wall surface portion W1 can contact the cylindrical body 20, or the first insertion portion 212 cannot be moved axially so that the first wall surface portion W1 always contacts the cylindrical body 20.

[0117] That is, the insertion portion 212 has a first inclined portion 212A1 and a first wall surface portion W1 disposed on the one axial side X1 of the first inclined portion 212A1. The first inclined portion 212A1 has an inclined surface T1A that moves away from the central axis J as it faces the one axial side X1 when viewed in a direction perpendicular to the axial direction. The first wall surface portion W1 can contact the cylindrical body 20.

[0118] Accordingly, when fixing the first conductor 21 to the cylindrical body 20, if the first inclined portion 212A1 is brought into contact with the end face 20A1 on one axial side of the cylindrical body 20 and the first conductor 21 is pressed into the cylindrical body 20, the first end-side cutout 201A expands due to elastic deformation. If the first conductor 21 is further pressed in, the shape of the first end-side cutout 201A is restored, and at least a part of the first wall surface portion W1 is located within the first circumferential cutout 201B1. At this time, the first wall surface portion W1 can come into contact with the cylindrical body 20. Therefore, a structure that suppresses the first conductor 21 from coming off the cylindrical body 20 can be achieved through easy assembly.

[0119] Here, Figure 11 is an enlarged view of the main part related to the press-fitting structure for fixing the first conductor 21X in the contact terminal of the comparative example to the cylindrical body 200X. As Figure 11 shown, in order to fix to the press-fitting portion 212X2 of the first conductor 21X, a cutout S having a shape cut from the end face 201X1 on one axial side toward the other axial side X2 is provided in the first main body portion 201X of the cylindrical body 200X.

[0120] Before fixing the first conductor 21X to the cylindrical body 200X, the outer diameter of the press-fitting portion 212X2 is larger than the inner diameter of the first main body portion 201X. Accordingly, if the rod-shaped main body portion 212X1 of the first conductor 21X is inserted into the cylindrical body 200X and the press-fitting portion 212X2 is pressed into the cylindrical body 200X, the cutout S expands, and the press-fitting portion 212X2 is press-fitted and fixed to the first main body portion 201X.

[0121] However, compared with such a fixing structure based on press-fitting, the snap-based fixing structure of the present embodiment can suppress the first conductor 21 from coming off the cylindrical body 20. And, compared with Figure 11 if it is the structure of the present embodiment Figure 10 it is not necessary to make the thickness of the first insertion portion 212 thicker in the middle of the axial direction. Accordingly, the diameter of the contact terminal 2 can be reduced, and the interval between the contact terminals 2 can be narrowed.

[0122] Here, as Figure 12A shown, when viewed in a direction perpendicular to the axial direction, the first wall surface portion W1 extends perpendicular to the axial direction. Accordingly, by bringing the first wall surface portion W1 into contact with the end portion 201B1T on one axial side of the first circumferential cutout 201B1, the detachment of the first conductor 21 can be suppressed.

[0123] In addition, the structure of the first wall surface portion W1 is not limited to the above structure. For example, it may be as Figure 12BAs shown, when viewed in a direction perpendicular to the axial direction, the first wall surface portion W1 is configured to approach the central axis J as it faces the X1 side in the axial direction. Thus, when the first insertion portion 212 is inserted into the cylindrical body 20, the first end-side cutout 201A gradually narrows after temporarily expanding. Therefore, by confirming the change in the first end-side cutout 201A, the operator can more reliably fix the first insertion portion 212 to the cylindrical body 20. Also, in a state where the first insertion portion 212 is fixed, the first conductor 21 can slightly move toward the X1 side in the axial direction. By confirming this movable state, the operator can confirm the fixation of the first insertion portion 212.

[0124] Also, it is also possible that, as Figure 12C shown, when viewed in a direction perpendicular to the axial direction, the first wall surface portion W1 is configured to move away from the central axis J as it faces the X1 side in the axial direction. Thereby, the detachment of the first conductor 21 can be further suppressed.

[0125] The straight wall surface portion W2 is connected to the X1 side in the axial direction of the first inclined portion 212A1 and extends linearly along the axial direction. Thereby, the first insertion portion 212 can be moved into the cylindrical body 20 in a state where the first end-side cutout 201A is uniformly expanded.

[0126] In addition, it is not necessary to provide the straight wall surface portion W2. That is, the first wall surface portion W1 may be connected to the first inclined portion 212A1. For example, Figure 12D shows a case where such a structure is applied to the structure shown in Figure 12A shown.

[0127] Also, the first end-side rib 212A2 is connected to the X1 side in the axial direction of the first wall surface portion W1. The convex edge portion 211B is connected to the X1 side in the axial direction of the first end-side rib 212A2. When the first conductor 21 is fixed to the cylindrical body 20, the first end-side rib 212A2 is housed in the first end-side cutout 201A. At this time, the end face 20A1 on the X1 side of the cylindrical body 20 and the convex edge portion 211B are opposed to each other in the axial direction.

[0128] That is, the protruding portion 211 has the convex edge portion 211B that is opposed to the end face 20A1 on the X1 side of the cylindrical body 20 in the axial direction. Thereby, the convex edge portion 211B abuts against the end face 20A1 on the X1 side of the cylindrical body 20, thereby restricting the insertion of the first conductor 21 in the axial direction.

[0129] The first end-side rib 212A2 is disposed between the circumferential end faces 201A3 of the first end-side cutout 201A in a state of being received in the first end-side cutout 201A. That is, the insertion portion 212 has the first end-side rib 212A2 disposed between the circumferential end faces 201A3 of the first end-side cutout 201A. Thereby, the rotational positioning of the first conductor 21 with respect to the cylindrical body 20 about the axial direction can be performed. In the present embodiment, the first plane 212B1 is brought into contact with the second plane 222B1. Therefore, in order to obtain a good contact state, a structure capable of performing the rotational positioning of the first conductor 21 is adopted.

[0130] Moreover, the first center-side rib 212A3 is connected to the other axial side X2 of the first inclined portion 212A1. That is, the insertion portion 212 has the first center-side rib 212A3 disposed on the other axial side X2 of the first inclined portion 212A1. The first center-side rib 212A3 has a guiding portion G1, and the guiding portion G1 has a width Wb. The width Wb is substantially the same as the width Wa between the circumferential end faces 201A3 of the first end-side cutout 201A.

[0131] Thereby, by moving the first end-side cutout 201A using the guiding portion G1 as a guide, the rotational position of the first end-side cutout 201A can be specified while bringing the first end-side cutout 201A into contact with the first inclined portion 212A1.

[0132] The first center-side rib 212A3 has a second inclined portion T2, which is connected to the other axial side X2 of the guiding portion G1 and has an inclined surface T2A that approaches the central axis J as it goes toward the other axial side X2 when viewed in a direction perpendicular to the axial direction. Thus, if the first end-side cutout 201A is brought into contact with the second inclined portion T2, the first end-side cutout 201A can move to the guiding portion G1 using the second inclined portion T2 as a guide.

[0133] Moreover, the first main body portion 201 has a first center-side cutout 201C, which is connected to the first circumferential cutout 201B1 and the second circumferential cutout 201B2 and is formed along the axial direction on the circumferential surface of the first main body portion 201. That is, the cylindrical body 20 has the first center-side cutout 201C provided along the axial direction on the circumferential surface of the cylindrical body 20. The first center-side rib 212A3 is disposed between the circumferential end faces 201C1 of the first center-side cutout 201C.

[0134] Thereby, the rotational positioning of the first conductor 21 with respect to the cylindrical body 20 about the axial direction can be performed. As described above, in order to obtain a good contact state between the first plane 212B1 and the second plane 222B1, it is effective to perform the rotational positioning of the first conductor 21.

[0135] In addition, the above-mentionedFigure 10 The buckle-based fixing structure shown is also applicable to the structure in which the second conductor 22 is fixed to the cylindrical body 20 by buckles. That is, the structure of the buckle portion 222A of the second conductor 22 corresponds to the structure of the buckle portion 212A, and the notch structure in the second main body portion 203 of the cylindrical body 20 corresponds to the structure of the first main body portion 201. In addition, either the buckle portion 212A or the buckle portion 222A may not be provided, and instead, a fixing structure based on press-fitting or the like may be provided.

[0136] That is, the cylindrical body 20 has a first end-side notch 201A provided on the circumferential surface of the axially one-side end portion 20A of the cylindrical body 20 along the axial direction, and a notch 203A provided on the circumferential surface of the axially other-side end portion 20B of the cylindrical body 20 along the axial direction (refer to Figure 3 ). The first insertion portion 212 has a first end-side rib 212A2 disposed between the circumferential end faces 201A3 of the first end-side notch 201A. The second insertion portion 222 has a second end-side rib 222A1 disposed between the circumferential end faces of the notch 203A (refer to Figure 3 ). Thus, the circumferential rotation of at least one of the first conductor 21 and the second conductor 22 is restricted, and rotational positioning of at least one of the first conductor 21 and the second conductor 22 in which the first plane 212B1 contacts the second plane 222B1 can be performed. That is, when manufacturing the contact terminal 2 by inserting at least one of the first conductor 21 and the second conductor 22 into the cylindrical body 20, since the rotation is restricted, it is easy to insert at least one of the first conductor 21 and the second conductor 22. That is, the assemblability can be improved and the resistance value of the current path can be reduced.

[0137] And, as Figure 5B shown, a first chamfered portion 212B22 or a first arc portion 212B22 that moves away from the second plane 222B1 as it moves from the contact position of the first plane 212B1 and the second plane 222B1 toward the axially other X2 side is provided at the axially other-side end portion 212B2 of the first contact portion 212B. A second chamfered portion 222B22 or a second arc portion 222B22 that moves away from the first plane 212B1 as it moves from the contact position of the first plane 212B1 and the second plane 222B1 toward the axially one X1 side is provided at the axially one-side end portion 222B2 of the second contact portion 222B.

[0138] Thus, when inserting at least one of the first conductor 21 and the second conductor 22 into the cylindrical body 20, the insertion can be performed smoothly.

[0139] Figure 13 is an enlarged view of the main part related to a modification example of the buckle structure for fixing the first conductor 21 to the cylindrical body 20.

[0140] InFigure 13 In the structure shown, different from the above-mentioned Figure 10 , the first circumferential cut 201B1 is provided circumferentially from the circumferential first end 201A1 of the first end-side cut 201A away from the first end-side cut 201A, and the second circumferential cut 201B2 is not provided. Correspondingly, when viewed in a direction perpendicular to the axial direction, the first inclined portion 212A1 and the first wall surface portion W1 are formed only on one side with respect to the central axis J. According to such a structure, the first wall surface portion W1 can also come into contact with the cylindrical body 20, thereby suppressing the first conductor 21 from falling off the cylindrical body 20.

[0141] However, as Figure 10 shown, if the cylindrical body 20 has a structure in which the second circumferential cut 201B2 is provided circumferentially from the circumferential second end 201A2 of the first end-side cut 201A away from the first end-side cut 201A, the detachment of the first conductor 21 can be further suppressed.

[0142] <4. Modified Example>

[0143] Next, the contact terminal of the first modified example will be described. Figure 14 is a diagram mainly showing the contact structure between the first conductor 21V1 and the second conductor 22V1 in the contact terminal of the first modified example. Figure 14 is a diagram of the spring portion of the cylindrical body (not shown) in a natural state.

[0144] In Figure 14 , one side in the direction perpendicular to the axis is shown as Y1, and the other side is shown as the Y2 side. That is, Figure 14 in, the front side of the paper surface is one side Y1 in the direction perpendicular to the axis, and the back side of the paper surface is the other side Y2 in the direction perpendicular to the axis.

[0145] The first conductor 21V1 and the second conductor 22V1 are formed by laminating in the direction perpendicular to the axis using MEMS technology. The first insertion portion 212 of the first conductor 21V1 has a first contact portion 212B. The first contact portion 212B has a first plane 212B1 formed in the direction perpendicular to the axis. The second insertion portion 222 of the second conductor 22V1 has a second contact portion 222B. The second contact portion 222B has a second plane 222B1 formed in the direction perpendicular to the axis. That is, the first plane 212B1 and the second plane 222B1 are planes along the lamination direction. The first plane 212B1 contacts the second plane 222B1.

[0146] And, as Figure 14 shown, the first insertion portion 212 of the first conductor 21V1 has a buckle portion 212A. Here, the detailed structure of the buckle portion 212A will be described.

[0147] As Figure 15As shown, the buckle portion 212A has a stacked structure with the axis vertical direction as the stacking direction. If one side Y1 in the axis vertical direction is set as the first layer, the top rib 212A4 is provided in the first layer. The top rib 212A4 has a front end portion 212A41 whose width narrows as it faces the other side X2 in the axial direction.

[0148] The buckle portion 212A has a first inclined portion 212A1 in the second and third layers, and the first inclined portion 212A1 has an inclined surface T1A. The buckle portion 212A has an arc portion R1 connected to the inclined surface T1A on the side X1 in the axial direction in the second and third layers.

[0149] Moreover, when observing in a direction perpendicular to the axial direction, the buckle portion 212A has a first wall surface portion W1 extending perpendicularly to the axial direction on the side X1 in the axial direction in the second and third layers. In addition, the first wall surface portion W1 is not limited to this, and it can also be the above-mentioned Figure 12B or Figure 12C shown structure.

[0150] When fixing the first conductor 21V1 to the cylindrical body 20, the front end portion 212A41 is inserted into the first end side notch 201A. Then, if the first conductor 21V1 is pressed into the other side X2 in the axial direction, the first end side notch 201A gradually expands through the contact between the first inclined portion 212A1 and the inner peripheral surface 2011 of the first main body portion 201, and the first end side notch 201A expands to the maximum extent through the contact between the arc portion R1 and the inner peripheral surface 2011.

[0151] Figure 16A is a cross-sectional view in the axial direction observation of the state where the arc portion R1 contacts the inner peripheral surface 2011 and the first end side notch 201A expands. When observing from a direction perpendicular to the axial direction, the width between the arc portions R1 on both sides across the central axis J becomes the maximum width Wmax in the axial direction of the first insertion portion 212. That is, Figure 16A shows the cross-section of the first insertion portion 212 at the axial position where the width of the first insertion portion 212 becomes the maximum.

[0152] If the first wall surface portion W1 is located on the other side X2 in the axial direction more than the first end side notch 201A by further pressing the first conductor 21V1 into the other side X2 in the axial direction, the first end side notch 201A returns to its original shape. At this time, at least a part of the first wall surface portion W1 is disposed within the first circumferential notch 201B1, and the first wall surface portion W1 can contact the cylindrical body 20.

[0153] Figure 16B is a cross-sectional view in the axial direction observation of the state where at least a part of the first wall surface portion W1 is disposed within the first circumferential notch 201B1. Figure 16BShows the cross-section at the same axial position as that of the first insertion portion 212 Figure 16A As shown, the first end-side cutout 201A returns to its original shape, whereby the cross-section of the first insertion portion 212 has a portion Ov1 (shaded portion) overlapping with the first main body portion 201. Figure 16B That is, when viewed axially, the cross-section of the first insertion portion 212 at the axial position where the width of the first insertion portion 212 becomes maximum has a portion Ov1 overlapping with the cylindrical body 20. Thereby, it is possible to prevent the first insertion portion 212 from coming off the cylindrical body 20.

[0154] In addition, in a state where at least a part of the first wall surface portion W1 is disposed within the first circumferential cutout 201B1, the top rib 212A4 is disposed between the circumferential end surfaces 201A3 of the first end-side cutout 201A and between the circumferential end surfaces 201C1 of the first center-side cutout 201C. Thereby, rotation of the first conductor 21V1 with respect to the cylindrical body 20 is restricted.

[0155] FIG. is a view mainly showing the first conductor 21V2 and the cylindrical body 20V2 in the contact terminal of the second modification. As

[0156] Figure 17 shown, the first main body portion 201 of the cylindrical body 20V2 in the second modification has only the first circumferential cutout 201B1 as the circumferential cutout. Correspondingly, when viewed from a direction perpendicular to the axial direction, the latching portion 212A in the first conductor 21V2 has only the first inclined portion 212A1, the arc portion R1, and the first wall surface portion W1 on one side with respect to the central axis J. Figure 17 When fixing the first conductor 21V2 of such a second modification to the cylindrical body 20V2, the front end portion 212A41 of the top rib 212A4 is inserted into the first end-side cutout 201A, and the first conductor 21V2 is pressed axially toward the other side X2. Then, by the contact between the arc portion R1 and the inner circumferential surface 2011 of the first main body portion 201, the first end-side cutout 201A expands.

[0157] FIG. shows the cross-section in the axial direction when viewed axially in this state. Figure 18A Shows the cross-section in the axial direction when viewed axially in this state. Figure 18A And the following Figure 18B is a view corresponding to the above Figure 16A And Figure 16B corresponding diagram.

[0158] Then, if the first conductor 21V2 is further pressed axially toward the other side X2, the first end-side cutout 201A returns to its original shape. Figure 18B FIG. shows the cross-section in the axial direction when viewed axially in this state. As Figure 18BAs shown, when viewed axially, the cross-section of the first insertion portion 212 at the axial position where the width of the first insertion portion 212 becomes maximum has a portion Ov2 (shaded portion) overlapping with the cylindrical body 20V2. Thereby, detachment of the first insertion portion 212 from the cylindrical body 20V2 can be suppressed.

[0159] Next, a third modified example will be described. Figure 19 FIG. is a perspective view of the first conductor 210 of the third modified example. The first conductor 210 has a first protruding portion 2101 and a first insertion portion 2102. The first protruding portion 210 has a rod-shaped main body portion 2101A and a convex edge portion 2101B. The first insertion portion 2102 has a buckle portion 2102A connected to the convex edge portion 2101B on the axial one side X1.

[0160] Figure 20 FIG. is a schematic side cross-sectional view of the contact terminal 2V3 of the third modified example. The contact terminal 2V3 has a cylindrical body 200, a first conductor 210 (refer to Figure 19 ), and a second conductor 220. The cylindrical body 200 has a first main body portion 2001, a first spring portion 2002, a second main body portion 2003, a second spring portion 2004, and a third main body portion 2005.

[0161] As Figure 20 shown, when the first conductor 210 is assembled to the cylindrical body 200, the first insertion portion 2102 is inserted into the cylindrical body 200, and the buckle portion 2102A is fixed to the first main body portion 2001. Thereby, the first protruding portion 210 protrudes more toward the axial one side X1 than the cylindrical body 200, and the front end portion 2102B provided on the axial other side X2 of the first insertion portion 2102 is located inside the third main body portion 2005.

[0162] On the other hand, the second conductor 220 has a second protruding portion 2201 and a second insertion portion 2202. The second insertion portion 2202 has a buckle portion 2202A. The second insertion portion 2202 is inserted into the cylindrical body 200, and the buckle portion 2202A is fixed to the second main body portion 2003. Thereby, the second protruding portion 2201 protrudes more toward the axial other side X2 than the cylindrical body 200. The front end portion 2202B provided on the axial one side X1 of the second insertion portion 2202 is located inside the third main body portion 2005.

[0163] As Figure 20 shown, in such a contact terminal 2V3, a sliding contact point CP11 formed by the contact between the front end portion 2102B and the third main body portion 2005, and a sliding contact point CP12 formed by the contact between the front end portion 2202B and the third main body portion 2005 are formed. Thereby, as Figure 20As shown by the arrow, the current path becomes a path that flows through the first conductor 210, the cylindrical body 200, and the second conductor 220 via the sliding contacts CP11 and CP12.

[0164] Figure 21 It is an enlarged view of the main part showing the snap-based fixing structure of the contact terminal 2V3.

[0165] As Figure 21 shown, the first main body portion 2001 of the cylindrical body 200 has an end-side slit 2001A, a circumferential slit 2001B, and a center-side slit 2001C. The structures of these slits are the same as the structures of the slits formed in the first main body portion 201 described above.

[0166] The snap portion 2102A has a first inclined portion 2102A1, a first wall surface portion W1, an end-side rib 2102A2, and a center-side rib 2102A3. The structure of the snap portion 2102A is the same as the structure of the snap portion 212A described above.

[0167] Thus, the ribs 2102A2 and 2102A3 are disposed between the circumferential end faces 2001A1 and 2001C1 of the slits 2001A and 2001C, so that the rotation of the first conductor 210 relative to the cylindrical body 200 is restricted. In the contact terminal 2V3 having such a structure, as Figure 20 shown, the current path is formed via the sliding contacts CP11 and CP12, rather than forming the sliding contact CP1 formed by the contact of planes with each other as Figure 8 shown, so that the first conductor 210 can also rotate.

[0168] However, according to the design of the winding direction and the number of turns of the first spring portion 2002 and the second spring portion 2004, when the spring portion is compressed during the inspection of the object to be inspected, the rotation of the first conductor 210 relative to the cylindrical body 200 is restricted, and thus the first conductor 210 can be rotated together with the cylindrical body 200. That is, it can meet the specification of actively rotating the first conductor 210 relative to the object to be inspected.

[0169] Moreover, the structure of the slit provided in the second main body portion 2003 of the cylindrical body 200 and the structure of the snap portion 2202A provided in the second insertion portion 2202 of the second conductor 220 can also adopt the same structure as Figure 21 described above. Therefore, the rotation of the second conductor 220 relative to the cylindrical body 200 is restricted.

[0170] Next, a fourth modification example will be described. The contact terminal of the fourth modification example is a modification of the above-described first modification example and has the Figure 22 shown snap structure.

[0171] As Figure 22As shown, in the fourth modification, the first main body 201 is different from the first modification ( Figure 15 ) also has a second end side cutout 201D. The second end side cutout 201D is formed in a shape that cuts in from the end face 20A1 on one axial side of the cylindrical body 20 toward the other axial side X2. That is, the cylindrical body 20 has a second end side cutout 201D provided axially on the peripheral surface of the end face 20A on one axial side of the cylindrical body 20. In addition, the second end side cutout 201D is formed in Figure 22 There is one, but multiple can be set.

[0172] Therefore, the axial end 20A on one side of the cylindrical body 20 is divided into a plurality of parts by the first end side cutout 201A and the second end side cutout 201D. Thus, when the first conductor 21V1 is fixed to the cylindrical body 20, it is easy to press in when the inclined surface T1A is brought into contact with the cylindrical body 20 and the first conductor 21V1 is pressed in to expand the axial end 20A on one side.

[0173] Here, Figure 23 The X1 side of the axial direction is shown. Figure 22 The state of the cylindrical body 20 shown. Figure 23 As shown, the second end side cutout 201D is arranged at an opposing position PT offset 180° from the circumferential center position 201AC of the first end side cutout 201A about the central axis J. Thus, when the first conductor 21V1 is pressed in to expand the cylindrical body 20, the cylindrical body 20 can be easily expanded evenly in both directions perpendicular to the axial direction.

[0174] and, Figure 23 In the embodiment, the opposing position PT is the circumferential center position 201DC of the second end side cutout 201D. Thus, the cylindrical body 20 can be expanded more evenly to both sides in the direction perpendicular to the axial direction. In addition, the opposing position PT is not limited to the circumferential center position 201DC as long as it is located between the circumferential ends of the second end side cutout 201D. Figure 23 structure.

[0175] As mentioned above, in Figure 22 In the structure shown in the figure, if the first conductor 21V1 is pressed into the cylindrical body 20 and at least a portion of the first wall surface W1 is arranged in the first circumferential cutout 201B1, Figure 24 Status shown. Figure 24 The state observed from the Y1 side in the vertical direction of the axis is shown. Figure 24 In the state, the top rib 212A4 extends from the axial one side X1 of the first end side cutout 201A to the axial other side X2 of the first center side cutout 201C. Figure 24 The state of the first variant ( Figure 15 ) also becomes the same state.

[0176] And, Figure 25 shows a state as viewed from the other side Y2 in the direction perpendicular to the axis. As Figure 24 shown, the first conductor 21V1 has an outermost layer portion 212C disposed on the outermost side on the other side Y2 in the direction perpendicular to the axis in the stacking direction. The outermost layer portion 212C is disposed more internally than the inner circumference of the cylindrical body 20. Figure 25 Here, as

[0177] shown, the axial position of the axially other end portion 201DT of the second end portion side cutout 201D coincides with the axial position of the axially other end portion 201AT of the first end portion side cutout 201A. That is, the axial lengths of the first end portion side cutout 201A and the second end portion side cutout 201D are the same. Figure 24 and Figure 25 shown, the axial position of the axially other end portion 201DT of the second end portion side cutout 201D coincides with the axial position of the axially other end portion 201AT of the first end portion side cutout 201A. That is, the axial lengths of the first end portion side cutout 201A and the second end portion side cutout 201D are the same.

[0178] That is, the second end portion side cutout 201D is located on the axially one side X1 side closer than the axially other end portion 201B1T ( Figure 22 , Figure 24 ) of the first circumferential cutout 201B1. Thus, when the first conductor 21V1 is inserted into the cylindrical body 20, even if the first conductor 21V1 is moved to the axially other side X2 side while making the inclined surface T1A contact with the axially other end portion 201B1T, the portion of the cylindrical body 20 forming the central side cutout 201C is difficult to expand, thereby being able to suppress the excessive insertion of the first conductor 21V1.

[0179] And, in the first insertion portion 212, the axial length of the insertion portion inserted into the first end portion side cutout 201A during assembly is longer than the axial length of the second end portion side cutout 201D. Therefore, when an operator attempts to insert the above insertion portion into the second end portion side cutout 201D, the insertion portion is not completely inserted into the second end portion side cutout 201D. Therefore, the operator can recognize that the first conductor 21V1 is inserted into the cylindrical body 20 in the wrong direction.

[0180] And, by adjusting the axial length of the second end portion side cutout 201D during design, the press-fitting force of the first conductor 21V1 can be adjusted. More specifically, the longer the axial length of the second end portion side cutout 201D is set, the easier it is to press-fit the first conductor 21V1 into the cylindrical body 20, and the shorter the axial length of the second end portion side cutout 201D is set, the more difficult it is to press-fit the first conductor 21V1 into the cylindrical body 20. In addition, the axial length of the second end portion side cutout 201D can also be set to be relatively long, whereby a part of the second end portion side cutout 201D is located on the axially other side X2 side closer than the axially other end portion 201B1T of the first circumferential cutout 201B1.

[0181] Next, a fifth modification will be described. The fifth modification is a modification of the above-described fourth modification. Figure 26 The snap structure showing the fifth modification is shown.

[0182] As Figure 26 shown, in the fifth modification, compared with the structure of the fourth modification ( Figure 22 ), the cylindrical body 20 further has a third circumferential cut 201E1 and a fourth circumferential cut 201E2. The third circumferential cut 201E1 is connected to the other axial side X2 of the second end side cut 201D, and is formed in a shape that cuts in the circumferential direction away from the circumferential first end 201D1 of the second end side cut 201D. The fourth circumferential cut 201E2 is connected to the other axial side X2 of the second end side cut 201D, and is formed in a shape that cuts in the circumferential direction away from the circumferential second end 201D2 of the second end side cut 201D.

[0183] That is, the cylindrical body 20 has a third circumferential cut 201E1, which is connected to the other axial side X2 of the second end side cut 201D, and is provided in the circumferential direction away from the circumferential first end 201D1 of the second end side cut 201D.

[0184] Moreover, as Figure 26 shown, in addition to the snap portion 212A, the first insertion portion 212 of the first conductor 21V1 also has a snap portion 212D. Here, the snap portion 212D will be described in detail.

[0185] As Figure 26 shown, the snap portion 212D has a stacked structure with the axis perpendicular direction as the stacking direction. If the other side Y2 in the axis perpendicular direction is set as the first layer, the top rib 212D2 is provided in the first layer. In addition, Figure 26 the top rib 212D2 is not shown in Figure 27 but is shown in the following

[0186] The snap portion 212D has a third inclined portion 212D1 in the second and third layers, and the third inclined portion 212D1 has an inclined surface T1B. The snap portion 212D has an arc portion R11 connected to the inclined surface T1B on the one axial side X1 in the second and third layers.

[0187] Moreover, when viewed from the direction perpendicular to the axis, the snap portion 212D has a second wall surface portion W11 extending perpendicular to the axis on the one axial side X1 in the second and third layers. In addition, the second wall surface portion W11 is not limited thereto, and may also be the structure shown in the above Figure 12B or Figure 12C shown.

[0188] That is, the first insertion portion 212 has a third inclined portion 212D1 and a second wall surface portion W11 disposed on the X1 side in the axial direction of the third inclined portion 212D1. The third inclined portion 212D1 has an inclined surface T1B that moves away from the central axis J as it faces the X1 side in the axial direction when viewed in a direction perpendicular to the axial direction.

[0189] When fixing the first conductor 21V1 to the cylindrical body 20, the top rib 212D2 is inserted into the second end side notch 201D. Then, when the first conductor 21V1 is pressed into the X2 side in the axial direction, the second end side notch 201D gradually expands due to the contact between the third inclined portion 212D1 and the inner peripheral surface 2011 of the first main body portion 201, and the second end side notch 201D expands to the maximum extent due to the contact between the arc portion R11 and the inner peripheral surface 2011.

[0190] If the first conductor 21V1 is further pressed into the X2 side in the axial direction and the second wall surface portion W11 is located on the X2 side in the axial direction further than the second end side notch 201D, the second end side notch 201D returns to its original shape. At this time, at least a part of the second wall surface portion W11 is disposed within the third circumferential notch 201E1, and the second wall surface portion W11 can contact the cylindrical body 20. That is, the second wall surface portion W11 can contact the third circumferential notch 201E1.

[0191] Figure 27 It is a cross-sectional view in the axial direction of the state in which at least a part of the second wall surface portion W11 is disposed within the third circumferential notch 201E1. As Figure 27 shown, the second end side notch 201D returns to its original shape, whereby the cross-section of the first insertion portion 212 has a portion Ov11 (shaded portion) overlapping with the first main body portion 201.

[0192] That is, in the axial direction view, the cross-section of the first insertion portion 212 at the axial position where the width of the first insertion portion 212 becomes the maximum has a portion Ov11 overlapping with the cylindrical body 20. Thereby, the detachment of the first insertion portion 212 from the cylindrical body 20 can be suppressed.

[0193] Thus, according to the fifth modification example, compared with the fourth modification example, the detachment of the first conductor 21V1 from the cylindrical body 20 can be further suppressed.

[0194] <6. Modification Examples Related to the Contact Structure of the Contact Portion>

[0195] Moreover, the positions of the notches 201A, 201B1, 201B2, and 201C on the X1 side in the axial direction of the cylindrical body 20 may be set to positions deviated from the positions that are 180° separated from the respective notches on the X2 side in the axial direction of the cylindrical body 20 around the central axis J. Figure 28An example of this situation is shown. Figure 28 It is a cross-sectional view when observed axially of the portion where the first contact portion 212B contacts the second contact portion 222B. In addition, Figure 28 The third end-side cutout 203A at the other axial end 20B of the cylindrical body 20 corresponding to the first end-side cutout 201A is shown.

[0196] As Figure 28 shown, by setting the fixing portion where the first conductor 21 is fixed to the cylindrical body 20 using a snap to a position deviated from the fixing portion where the second conductor 22 is fixed to the cylindrical body 20 using a snap by 180° around the central axis J, the first plane 212B1 is disposed obliquely with respect to the second plane 222B1 when observed axially. Thus, by actively contacting the first plane 212B1 with the second plane 222B1, poor contact between the first plane 212B1 and the second plane 222B1 can be suppressed. And a gap for sliding can be provided between the first plane 212B1 and the second plane 222B1.

[0197] <7. Other Structures>

[0198] As described above, the embodiments of the present invention have been described, but within the scope of the gist of the present invention, the embodiments can be variously modified.

[0199] For example, as a method for manufacturing a conductor provided with a contact portion having a plane, it is not limited to MEMS technology. For example, it may also be a method combining turning-based cutting and milling-based cutting.

[0200] Industrial Applicability

[0201] The present invention can be used for electrical inspection of various inspection objects.

[0202] Description of Reference Numerals

[0203] 1 - Probe, 2, 2V3 - Contact terminals, 20, 20V2, 200 - Cylindrical bodies, 201, 2001 - First main body parts, 201A - First end side cutout, 201B1 - First circumferential cutout, 201B2 - Second circumferential cutout, 201C - First center side cutout, 201D - Second end side cutout, 201E1 - Third circumferential cutout, 201E2 - Fourth circumferential cutout, 202, 2002 - First spring parts, 203, 2003 - Second main body parts, 203A - Cutout, 203B1, 203B2 - Circumferential cutouts, 204, 2004 - Second spring parts, 205, 2005 - Third main body parts, 21, 21V1, 21V2, 210 - First conductors, 211, 2101 - First protrusions, 211A, 2101A - Rod-shaped main body parts, 211B, 2101B - Flange parts, 212, 2102 - First insertion parts, 212A - Latching parts, 212A1 - First inclined part, 212A2 - First end side rib, 212A3 - First center side rib, 212A4 - Top rib, 212B - First contact part, 212B1 - First plane, 212C - Outermost layer part, 212D - Latching parts, 212D1 - Third inclined part, 212D2 - Top rib, 2102A - Latching parts, 22, 220 - Second conductors, 221, 2201 - Second protrusions, 221A - Rod-shaped main body part, 221B - Flange part, 222, 2202 - Second insertion parts, 222A - Latching parts, 222A1 - Second end side rib, 222B - Second contact part, 222B1 - Second plane, 2202A - Latching parts, 3 - Support member, 31 - Upper support body, 31A - Support hole, 32 - Intermediate support body, 32A - Support hole, 33 - Lower support body, 33A - Support hole, 4 - Spacing conversion unit, 41 - First electrode, 5 - Connection plate, 10 - Inspection jig, 15 - Inspection processing unit, 25 - Inspection device, 30 - Inspection object, 301 - Inspection point, T2 - Second inclined part, W1 - First wall surface part, W2 - Straight wall surface part, W11 - Second wall surface part, R1, R11 - Arc parts, G1 - Guide part, S - Cutout, J - Central axis, CP1, CP11, CP12 - Sliding contacts.

Claims

1. A contact terminal, characterized in that, Comprising: A cylindrical body extending along an axial direction parallel to the central axis of the contact terminal; and A rod-shaped conductor having electrical conductivity, The conductor has a protruding portion protruding from the cylindrical body toward one side in the axial direction and an insertion portion disposed inside the outer periphery of the cylindrical body, The cylindrical body has: A first end-side cut formed along the axial direction on the circumferential surface of the one end of the cylindrical body in the axial direction; and A first circumferential cut connected to the other side in the axial direction of the first end-side cut and provided along the circumferential direction away from the circumferential first end of the first end-side cut, The insertion portion has a first inclined portion and a first wall surface portion disposed on the one side in the axial direction of the first inclined portion, The first inclined portion has an inclined surface that moves away from the central axis as it faces one side in the axial direction when viewed in a direction perpendicular to the axial direction, The first wall surface portion can be in contact with the first circumferential cut.

2. The contact terminal according to claim 1, wherein When viewed in the axial direction, the cross section of the insertion portion at the axial position where the width of the insertion portion becomes maximum has a portion overlapping with the cylindrical body.

3. The contact terminal according to claim 1, wherein When viewed in a direction perpendicular to the axial direction, the first wall surface portion extends perpendicular to the axial direction.

4. The contact terminal according to claim 1, wherein When viewed in a direction perpendicular to the axial direction, the first wall surface portion approaches the central axis as it faces one side in the axial direction.

5. The contact terminal according to claim 1, wherein When viewed in a direction perpendicular to the axial direction, the first wall surface portion moves away from the central axis as it faces one side in the axial direction.

6. The contact terminal according to claim 1, wherein The protruding portion has a convex edge portion that is axially opposed to the one end face of the cylindrical body in the axial direction.

7. The contact terminal according to claim 1, wherein The insertion portion has an end-side rib disposed between the circumferential end faces of the first end-side cut.

8. The contact terminal according to claim 1, wherein The insertion portion has a center-side rib disposed on the other side in the axial direction of the first inclined portion, The center-side rib has a guiding portion having the same width as the width between the circumferential end faces of the first end-side cut.

9. The contact terminal according to claim 8, wherein The center-side rib has a second inclined portion connected to the other side in the axial direction of the guiding portion and having an inclined surface that approaches the central axis as it faces the other side in the axial direction when viewed in a direction perpendicular to the axial direction.

10. The contact terminal according to claim 8, wherein The cylindrical body has a center-side cut formed along the axial direction on the circumferential surface of the cylindrical body, The center-side rib is disposed between the circumferential end faces of the center-side cut.

11. The contact terminal according to claim 1, wherein The above-mentioned cylindrical body has a second circumferential incision, which is arranged circumferentially away from the circumferential second end of the above-mentioned first end-side incision along the circumferential direction.

12. The contact terminal according to claim 1, wherein: The above-mentioned cylindrical body has a second end-side incision provided on the circumferential surface of one end of the above-mentioned cylindrical body in the above-mentioned axial direction along the above-mentioned axial direction.

13. The contact terminal according to claim 12, wherein: The above-mentioned second end-side incision is arranged at an opposing position deviated by 180° around the above-mentioned central axis from the circumferential central position of the above-mentioned first end-side incision.

14. The contact terminal according to claim 13, wherein: The above-mentioned opposing position is the circumferential central position of the above-mentioned second end-side incision.

15. The contact terminal according to claim 12, wherein: The above-mentioned second end-side incision is located closer to the above-mentioned axial one side than the other axial end of the above-mentioned first circumferential incision.

16. The contact terminal according to claim 12, wherein: The above-mentioned cylindrical body has a third circumferential incision, which is connected to the other axial end of the above-mentioned second end-side incision and is arranged circumferentially away from the circumferential first end of the above-mentioned second end-side incision. The above-mentioned insertion portion has a third inclined portion and a second wall surface portion disposed on the above-mentioned axial one side of the above-mentioned third inclined portion. The above-mentioned third inclined portion has an inclined surface that moves away from the above-mentioned central axis as it faces the above-mentioned axial one side when observed in a direction perpendicular to the above-mentioned axial direction. The above-mentioned second wall surface portion can contact the above-mentioned third circumferential incision.

17. An inspection fixture, characterized in that, Comprising: A plurality of contact terminals according to any one of claims 1 to 16; and A support member for supporting the plurality of contact terminals.

18. An inspection device, characterized in that, Comprising: The inspection jig according to claim 17; and An inspection processing unit that inspects the above-mentioned inspection object based on an electrical signal obtained by bringing the above-mentioned contact terminal into contact with an inspection point provided on the inspection object.

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