Inkjet printing device

Abstract

An inkjet printing apparatus (100) includes a worktable, an inkjet head that moves relative to the worktable, a compartment (20) that covers the worktable and the inkjet head, and a gas environment control device that controls the gas environment of an area (21, 22) covered by the compartment (20). Thus, an inkjet printing apparatus (100) that can suppress deterioration of a material without making the entire inkjet printing apparatus (100) a nitrogen gas environment or a CDA gas environment can be provided.

Description

TECHNICAL FIELD

[0001] The present application relates to an inkjet printing apparatus. The present application particularly relates to an inkjet printing apparatus for applying ink to a large object. BACKGROUND

[0002] In the past, as a method of forming a light emitting material of an organic EL display, an evaporation method has been used. The evaporation method is performed by heating a material using a mask provided with an opening portion corresponding to a pixel region in which the light emitting material is to be formed. In the evaporation method, the material adheres to the entire mask and the entire evaporation chamber, and thus the utilization efficiency of the material is extremely low. In addition, the evaporation method requires replacement of the mask and the like, because the mask is used. Therefore, the running cost of the mask becomes high.

[0003] Therefore, in recent years, replacement from the evaporation method to an inkjet method is progressing. The inkjet method applies ink only to a desired portion. Therefore, the utilization efficiency of the material is extremely improved. Also, the mask used in the conventional evaporation method is not needed.

[0004] In addition, the inkjet method can form an arbitrary pattern. Therefore, it is also possible to easily cope with switching of the model of the organic EL display. In addition, unlike the evaporation method, the inkjet method does not require use of a chamber. Therefore, it is possible to suppress the investment cost of the evaporation method.

[0005] Generally, a pixel portion of an organic EL display is constituted by an anode, a hole transport layer, a hole injection layer, a light emitting layer, an electron transport layer, an electron injection layer, a cathode, and a sealing material layer. Therefore, in recent years, measures to form any layer in the pixel portion of the above-described organic EL display using the inkjet method are actively being taken.

[0006] In addition, not only the material constituting the organic EL, but also as a material constituting a self-light emitting element using a quantum dot, formation using the inkjet method is being actively studied as a next-generation device. As the self-light emitting element using the quantum dot, for example, there are an EL-QD (Electro luminescence Quantum dot), a PL-QD (Photo luminescence Quantum dot) used as a wavelength conversion material, and the like.

[0007] The material constituting the organic EL or the quantum dot has a characteristic that the material is easily deteriorated due to any one of oxygen, ozone, and water, or a combination thereof.

[0008] Therefore, for example, International Publication No. 2017 / 047391 (hereinafter, referred to as "Patent Document 1") discloses an inkjet printing device capable of preventing deterioration of the material and printing them. The inkjet printing device of Patent Document 1 has a structure in which the inkjet printing device is surrounded by a nitrogen gas environment or a clean dry air (CDA) environment.

[0009] That is, the inkjet printing device is surrounded by a nitrogen gas environment or a CDA gas environment, thereby suppressing deterioration of the applied material. Therefore, in the inkjet printing device, the cost price of their initial investment becomes high, and the operating cost of nitrogen or CDA also becomes high. SUMMARY

[0010] The present application provides an inkjet printing device capable of suppressing deterioration of the material without making the entire device a desired nitrogen gas environment or CDA gas environment.

[0011] The inkjet printing device of the present application has a worktable, an inkjet head that relatively moves with respect to the worktable, a compartment that covers the worktable and the inkjet head, and a gas environment control device that controls the gas environment of the area covered by the compartment.

[0012] According to the present application, it is possible to provide an inkjet printing device capable of suppressing deterioration of the material without making the entire device a desired nitrogen gas environment or CDA gas environment. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 is a view showing the structure of the inkjet printing device of Embodiment 1.

[0014] Figure 2 is a view showing a state in which the compartment is detached from the inkjet printing device of Embodiment 1.

[0015] Figure 3 is a view showing the AA cross section of Figure 1

[0016] Figure 4 is a view showing the BB cross section of Figure 1

[0017] Figure 5 is a view showing the structure of the inkjet printing device of Embodiment 2.

[0018] Figure 6 is a view showing the CC cross section of Figure 5 ​​

[0019] Figure 7 is a view showing a DD cross section of Figure 5 .

[0020] Figure 8 is a view showing a structure of the inkjet printing apparatus of Embodiment 3.

[0021] Figure 9 is a view showing an EE cross section of Figure 8 .

[0022] Figure 10 is a view showing an FF cross section of Figure 8 .

[0023] Figure 11 is a view showing a structure of the inkjet printing apparatus of Embodiment 4.

[0024] Figure 12 is a view showing a GG cross section of Figure 11 .

[0025] Figure 13 is a view showing an HH cross section of Figure 11 .

[0026] Figure 14 is a view showing a structure of the inkjet printing apparatus of Embodiment 5.

[0027] Figure 15 is a view showing a structure of the inkjet printing apparatus of Embodiment 5.

[0028] Figure 16 is a view showing a structure of the inkjet printing apparatus of Embodiment 6.

[0029] Figure 17 is a view showing a state in which the compartment is detached from the inkjet printing apparatus of Embodiment 6.

[0030] Figure 18 is a cross-sectional view showing the inkjet printing apparatus of the modification example.

[0031] Figure 19 is a cross-sectional view showing the inkjet printing apparatus of the modification example. DETAILED DESCRIPTION

[0032] Hereinafter, an embodiment of the present application will be described with reference to the drawings.

[0033] (Embodiment 1)

[0034] Hereinafter, the inkjet printing apparatus 100 of Embodiment 1 will be described using Figures 1 to 4 .

[0035] Figure 1is a diagram showing the structure of the inkjet printing apparatus 100 of Embodiment 1. Figure 2 is a diagram showing a state in which the compartment 20 is detached from the inkjet printing apparatus 100 of Embodiment 1. Figure 3 is a diagram showing Figure 1 is a diagram showing the AA cross section of Figure 4 is a diagram showing the BB cross section of Figure 1 It should be noted that, in Figure 1 and Figure 2 , the compartment 20 is depicted with a broken line in order to easily observe each device arranged inside the compartment 20.

[0036] As shown in Figure 1 , the inkjet printing apparatus 100 of Embodiment 1 is covered with the compartment 20 as a whole. That is, the compartment 20 is configured to cover the region of the inkjet printing apparatus 100.

[0037] The compartment 20 of Embodiment 1 divides the region into a plurality of (for example, two) sub-regions. Specifically, the sub-regions are a first compartment region 21 (an example of a printing-side compartment region), and a second compartment region 22 (an example of a maintenance-side compartment region).

[0038] Figure 1 The inkjet printing apparatus 100 is shown to perform coating of RGB using, for example, an organic EL material, a quantum dot ink, a perovskite ink, or the like.

[0039] The inkjet printing apparatus 100 is a system that performs inkjet printing of RGB in one go. That is, the inkjet printing apparatus 100 is a system that can coat RGB materials at the same time.

[0040] As shown in Figure 2 , the inkjet printing apparatus 100 is provided with a plurality of inkjet heads 1. A part of the plurality of inkjet heads 1 constitutes a head group 11 that coats R ink in one go, another part constitutes a head group 12 that coats G ink in one go, and still another part constitutes a head group 13 that coats B ink in one go.

[0041] In addition, the inkjet printing apparatus 100 is provided with a first driving section and a second driving section described later. The first driving section is an inkjet head driving section that is not shown. The head group 11, the head group 12, and the head group 13 are mounted on a frame 41 and are configured to be movable in the direction of an arrow 5 shown in Figure 1 and Figure 2 by the inkjet head driving section. The inkjet head driving section moves the head group 11, the head group 12, and the head group 13 in the direction of the arrow 5 when maintenance is performed or when ink coating is performed. It should be noted that the inkjet head driving section is configured by, for example, a ball screw, a linear guide, a linear motor, a linear guide, or a hydrostatic bearing.

[0042] Additionally, the inkjet head 1 includes ink supply units 6, 7, and 8 disposed beside the inkjet head 1 (e.g., at the end in the movement direction) for supplying ink to the inkjet head 1. Ink supply unit 6 supplies ink to the head assembly 11 of R ink. Ink supply unit 7 supplies ink to the head assembly 12 of G ink. Ink supply unit 8 supplies ink to the head assembly 13 of B ink. In Embodiment 1, each ink supply unit 6, 7, and 8 is configured to move together with the inkjet head 1. It should be noted that electricity can fix the ink supply units 6, 7, and 8 into a non-moving structure. This suppresses temperature changes in the ink supply units 6, 7, and 8 and the inkjet head 1, as well as particle generation, thereby improving landing accuracy.

[0043] Furthermore, an unillustrated wiping area (cleaning area) for the inkjet head 1 is provided within the area where the inkjet head 1 can move.

[0044] It should be noted that, in order to change the wettability of the surface of the object to be printed, the inkjet head 1 may also be equipped with a plasma unit (not shown). This plasma unit can change the wettability of the object to be printed and level the ink ejected from the inkjet head 1. Additionally, to prevent static electricity, a soft X-ray electrostatic removal unit (not shown) may also be provided. This can suppress the adsorption of charged particles in the air.

[0045] Furthermore, the second drive unit of the inkjet printing apparatus 100 described above is a table drive unit (not shown). The table drive unit moves the table 2 and the object to be printed together... Figure 2 Move in the direction of arrow 3 shown. Here, the direction of arrow 3 is opposite to... Figure 2 Arrow 5 indicates the direction of movement realized by the inkjet head drive unit, which serves as the first drive unit, and is orthogonal to the direction of movement.

[0046] The worktable 2 is supported by the frame 32 via the worktable drive unit. The object to be printed is placed on the worktable 2. The worktable 2... Figure 2 The table moves reciprocally in the direction indicated by arrow 3. The table drive unit is, for example, composed of a ball screw or a linear guide. In this case, it is desirable to use a linear motor or hydrostatic bearing for the table drive unit. This allows for high-precision positioning of the table 2.

[0047] In addition, the inkjet printing apparatus 100 also includes an alignment section (not shown) for aligning with the object to be printed, and an inspection unit 4 for observing droplets on the object to be printed.

[0048] According to the inkjet printing apparatus 100 of Embodiment 1, inkjet application of three colors of ink of RGB can be performed in a prescribed area. However, instead of the three colors of ink, a material formed of any one of an anode, a hole transport layer, a hole injection layer, a light emitting layer, an electron transport layer, an electron injection layer, a cathode, and a sealing material layer, or a combination thereof can be applied as the ejected ink.

[0049] In addition, the inkjet head 1 of the inkjet printing apparatus 100 of Embodiment 1 applies ink to a prescribed printing range of a printing target object at one time. However, in a case where the printing range exceeds the limited printing width of the inkjet head, ink can be applied to the printing target object multiple times while moving the inkjet head 1. In addition, in a case where the resolution of the inkjet head is low, ink can be applied to the printing target object multiple times while staggering the inkjet head, so that a part of the printing range overlaps each other.

[0050] Furthermore, the area of the inkjet head 1 and the work table 2 and the like that constitute the inkjet printing apparatus 100 of Embodiment 1 is covered by the booth 20 as described above. The booth 20 is constituted of, for example, a stainless member, a sheet iron member, a glass member, a relatively hard plate member made of resin, or a relatively soft sheet member, and the like. The booth 20 cuts off the ventilation between the inside and the outside of the booth 20.

[0051] The area covered by the booth 20 is divided into a plurality of sub-areas. In Embodiment 1, the area is divided into the first booth area 21 and the second booth area 22 as described above. The first booth area is an area in which the inkjet head 1 is present when applying ink to a printing target object, that is, an area in which printing is performed by the inkjet head 1. The second booth area is an area in which the inkjet head 1 is present when maintaining the inkjet head 1.

[0052] The area covered by the booth 20, that is, the first booth area 21 and the second booth area 22 is set to a nitrogen gas environment or a CDA gas environment by a gas environment control device not shown. At this time, the gas environment control device is configured to be able to individually control the gas environment in the first booth area 21 and the second booth area 22.

[0053] Note that the first compartment region 21 can also have a gas environment detection sensor disposed inside. The gas environment detection sensor includes, for example, at least one of an oxygen concentration sensor, a nitrogen concentration sensor, an ozone concentration sensor, a moisture concentration sensor, and a temperature sensor.

[0054] The gas environment control device is constituted by a cleaner or the like that draws gas from the region covered by the compartment 20 and returns the gas to the region covered by the compartment 20 after performing a purification process. Specifically, the gas environment control device includes at least one of a nitrogen gas supply device and a clean dry air supply device. The gas environment control device individually adjusts at least one of the nitrogen flow rate, the nitrogen concentration, the clean dry air flow rate, and the clean dry air purity supplied to the region covered by the compartment 20.

[0055] Note that the gas environment control device can also control the gas environment of the first compartment region 21 based on the detection results of the above-described gas environment detection sensor. In addition, the gas environment control device can also control the gas environment of the second compartment region 22 based on the detection results of the gas environment detection sensor.

[0056] At this time, it is desirable for the oxygen concentration of the region covered by the compartment 20 to be 10 ppm or less, the moisture concentration to be 10 ppm or less, and the temperature to be in the range of 23 ± 1°C. Also, it is desirable for the ozone concentration to be in the range of 10 ppb or less. Thus, degradation of the characteristics of the organic EL material, the QD material, and the like caused by ozone can be more reliably avoided.

[0057] Here, in a case where the first compartment region 21 and the second compartment region 22 are controlled in terms of the gas environment by one gas environment control device based on the detection results of the gas environment detection sensor disposed in the first compartment region 21, the first compartment region 21 is controlled based on information of the first compartment region 21. In this case, if the temperature of the first compartment region 21 is controlled, for example, to be in the range of 23 ± 0.5°C, the temperature deviation of the second compartment region 22 can be larger than the temperature deviation of the first compartment region 21. However, the second compartment region 22 is a region used when the inkjet head 1 is maintained. Therefore, even if the temperature deviation of the second compartment region 22 becomes large, the influence on the characteristics of the ink and the like at the time of printing is small.

[0058] On the other hand, in the first compartment region 21, in particular, the gas environment of the region in which the inkjet head 1 is disposed has the largest influence on the quality of the printed object. Therefore, it is desirable to strictly manage the oxygen concentration, the moisture concentration, the ozone concentration, and the air conditioning temperature of the periphery of the inkjet head 1. Therefore, it is more preferable to dispose the above-described gas environment detection sensor in the inkjet head 1 or the structure of the periphery of the inkjet head 1.

[0059] In addition, in a case where the surface of the print target is modified using the above-described plasma unit, ozone can be generated. Therefore, in a case where the plasma unit is provided, it is preferable to provide an ozone concentration sensor and a structure that easily discharges gas around the plasma unit. As such a structure, for example, a structure in which a vent is provided at a portion of the compartment 20 that is close to the plasma unit is exemplified. Thereby, it is possible to easily suck gas from around the plasma unit or supply nitrogen or CDA to around the plasma unit via the vent.

[0060] Note that, in Embodiment 1, a structure in which a wall or the like partition is not provided at the boundary between the first compartment region 21 and the second compartment region 22 is exemplified, but is not limited thereto. The partition can be provided at the boundary between the first compartment region 21 and the second compartment region 22. That is, the compartment 20 can be partitioned into the first compartment region 21 and the second compartment region 22 by the partition. At this time, as a member of the partition, a door or a curtain that can be opened and closed, or the like can be used. By providing the partition, it is possible to manage the gas environment of the first compartment region 21 in which printing is performed or the gas environment of the second compartment region 22 in which maintenance is performed with a minimum necessary energy using the gas environment control device.

[0061] In addition, the supply of nitrogen or CDA to the first compartment region 21 or the second compartment region 22 controlled by the gas environment control device is performed from either one or both of the upper surface and the side surface of the compartment 20 through the filter.

[0062] On the other hand, the recovery of gas from the first compartment region 21 or the second compartment region 22 controlled by the gas environment control device is performed from either one or both of the lower surface and the side surface of the compartment 20.

[0063] Further, a part of the nitrogen or CDA recovered from the inside of the compartment 20 through the solvent return bend is supplied again to each region of the compartment 20 after the purity is adjusted. At this time, a part of the recovered nitrogen or CDA can also be discharged through the solvent return bend.

[0064] In addition, the gas environment control device can supply only newly generated nitrogen or CDA to each region covered by the compartment 20. Further, a gas in which newly generated nitrogen or CDA is mixed with gas recovered from the compartment 20 can be supplied to each region covered by the compartment 20. Since moisture can be removed using CDA (Clean Dry air), it is possible to suppress the deterioration of the organic EL material and the QD material. In addition, since moisture and oxygen can be removed using nitrogen, it is possible to suppress the deterioration of the organic EL material and the QD material.

[0065] In addition, an opening portion (not shown) for taking out the substrate as the print target can be provided at a portion of the first compartment region 21 of the compartment 20. Furthermore, an opening portion (not shown) for taking out the inkjet head 1 and an opening portion (not shown) for taking out the ink supply units 6, 7, 8 can be provided at a portion of the second compartment region 22 of the compartment 20. In addition, a glove can be provided at a portion of the second compartment region 22 of the compartment 20. Thus, the user can easily maintain the surface of the inkjet head 1 and the like by hand via the glove.

[0066] As described above, according to the structure of the compartment 20 of the inkjet printing apparatus 100, the gas environments of the first compartment region 21 and the second compartment region 22 can be controlled with a minimum amount of energy.

[0067] (Embodiment 2)

[0068] Hereinafter, the inkjet printing apparatus 100 of Embodiment 2 will be described using Figures 5 to 7 The inkjet printing apparatus 100 of Embodiment 2 will be described.

[0069] Figure 5 is a view showing the structure of the inkjet printing apparatus 100 of Embodiment 2. Figure 6 is a view showing the CC cross section of Figure 5 Figure 7 is a view showing the DD cross section of Figure 5 It should be noted that matters not described in Embodiment 2 are the same as in Embodiment 1.

[0070] As shown in Figure 5 , the shape of the compartment 20 of the inkjet printing apparatus 100 of Embodiment 2 is different from that of the inkjet printing apparatus 100 shown in Figure 2

[0071] Specifically, the compartment 20 is provided with a third compartment region 23 as an example of a maintenance-side compartment region instead of the second compartment region 22 of Embodiment 1. The volume of the third compartment region 23 is smaller than that of the second compartment region 22 of Embodiment 1.

[0072] The third compartment region 23 is a region in which the inkjet head 1 is moved to a region for performing maintenance of the inkjet head 1. The third compartment region 23 is a region whose lower surface is demarcated by a surface that does not interfere with the inkjet head 1 and a moving member that moves together with the inkjet head 1.

[0073] ​​Note that the surface that does not interfere with the above-described moving member can be exemplified by a surface that is in contact with the moving member on the lower side of the moving member or a surface that is located on the lower side by a length that is larger than the locus traced by the lower end of the moving member by a margin (for example, 0.5 mm or more). In addition, the surface that does not interfere with the above-described moving member can be exemplified by a surface that is located between the lower end of the inkjet head 1 and the upper surface of the table 2 in the vertical direction.

[0074] That is, in Embodiment 2, the third compartment region 23 having a smaller volume than the second compartment region 22 of Embodiment 1 is provided, thereby reducing the volume of the region covered by the compartment 20. Thereby, the required amount of nitrogen or CDA to be supplied into the compartment 20 can be further reduced.

[0075] In addition, the inkjet printing apparatus 100 of Embodiment 2 is provided with the wiping unit 9 that is provided to a portion of the position of the lower surface of the third compartment region 23 of the compartment 20. In detail, the wiping unit 9 is disposed at a position that becomes directly below the inkjet head 1 when the inkjet head 1 moves to the position of the third compartment region 23. The wiping unit 9 attracts the inkjet head 1 from below when the inkjet head 1 is maintained.

[0076] Note that the wiping unit 9 can also be configured to be openable and closable for the purpose of maintaining the inkjet head 1.

[0077] (Embodiment 3)

[0078] Hereinafter, the inkjet printing apparatus 100 of Embodiment 3 will be described using Figures 8 to 10 The inkjet printing apparatus 100 of Embodiment 3 will be described.

[0079] Figure 8 is a view that shows the structure of the inkjet printing apparatus 100 of Embodiment 3. Figure 9 is a view that shows the EE cross section of Figure 8 . Figure 10 is a view that shows the FF cross section of Figure 8 . Note that matters not described in Embodiment 3 are the same as those described in Embodiment 1 and Embodiment 2.

[0080] As shown in Figure 8 , the shape of the compartment 20 of the inkjet printing apparatus 100 of Embodiment 3 is different from, for example, the inkjet printing apparatus 100 shown in Figure 5 .

[0081] In detail, the compartment 20 is provided with a fourth compartment region 24 as an example of a printing-side compartment region instead of the first compartment region 21 of Embodiment 2. The volume of the fourth compartment region 24 is smaller than the volume of the first compartment region 21.

[0082] The fourth compartment region 24 is a region of the lower surface delimited by a face that does not interfere with the table 2 and the moving member that moves together with the table 2 at the time of printing execution.

[0083] Note that the face that does not interfere with the moving member described above can be exemplified by a face that is in contact with the moving member on the lower side of the moving member or a face that is located on the lower side by a length that is larger than the locus traced by the lower end of the moving member by a margin (for example, 0.5 mm or more). In addition, the face that does not interfere with the moving member can be exemplified by a face that is located between the lower end of the table 2 and the upper end of the frame 32 in the vertical direction.

[0084] That is, in Embodiment 3, the fourth compartment region 24 having a smaller volume than the first compartment region 21 of Embodiment 2 is provided, and thus the volume of the region covered by the compartment 20 is reduced. Thereby, the required amount of nitrogen or CDA to be supplied into the compartment 20 can be further reduced.

[0085] (Embodiment 4)

[0086] Hereinafter, the inkjet printing apparatus 100 of Embodiment 4 will be described using Figures 11 to 13 The inkjet printing apparatus 100 of Embodiment 4 will be described.

[0087] Figure 11 is a view showing the structure of the inkjet printing apparatus 100 of Embodiment 4. Figure 12 is a view showing the GG cross section of Figure 11 . Note that Figure 13 is a view showing the HH cross section of Figure 11 . Note that Figure 11 the region shown by the broken line in represents the range of the third compartment region 23, the fifth compartment region 25, the sixth compartment region 26, and the seventh compartment region 27. In addition, matters not described in Embodiment 4 are the same as those described in Embodiment 3.

[0088] Figure 11 As shown in Figure 8 , the shape of the compartment 20 of the inkjet printing apparatus 100 of Embodiment 4 is different from that of the inkjet printing apparatus 100 shown in

[0089] Specifically, the compartment 20 is provided with the fifth compartment region 25, the sixth compartment region 26, and the seventh compartment region 27 as examples of the printing-side compartment region in place of the fourth compartment region 24 of Embodiment 3. The total volume of the third compartment region 23, the fifth compartment region 25, the sixth compartment region 26, and the seventh compartment region 27 is smaller than the volume of the fourth compartment region 24 of Embodiment 3.

[0090] In detail, the fifth compartment region 25 encloses the rack 41, and the inkjet head 1 and the inspection unit part 4 arranged on the rack 41. That is, the fifth compartment region 25 is a region that encloses members that are not moved by the table driving part at the time of printing execution. Note that the lower surface of the fifth compartment region 25 can be set to the same surface as the lower surface of the fourth compartment region of Embodiment 3.

[0091] In addition, the sixth compartment region 26 is a region whose upper and lower surfaces are demarcated by surfaces that do not interfere with the table 2 and the moving members that move together with the table 2 at the time of printing execution. Note that the surfaces that do not interfere with the moving members can be, for example, surfaces that are in contact with the moving members on the upper side or the lower side of the moving members, or surfaces that are located on the upper side or the lower side at a position that is a length of a surplus amount (for example, 0.5 mm or more) from the trajectory traced by the upper end or the lower end of the moving members. In addition, the lower surface of the sixth compartment region 26 can be set to the same surface as the lower surface of the fourth compartment region of Embodiment 3.

[0092] In addition, the seventh compartment region 27 is a region whose upper and lower surfaces are demarcated by surfaces that do not interfere with the table 2 and the moving members (including the alignment part of the substrate that is not shown) that move together with the table 2 at the time of printing execution. Note that the surfaces that do not interfere with the moving members can be, for example, surfaces that are in contact with the moving members on the upper side or the lower side of the moving members, or surfaces that are located on the upper side or the lower side at a position that is a length of a surplus amount (for example, 0.5 mm or more) from the trajectory traced by the upper end or the lower end of the moving members. In addition, the lower surface of the seventh compartment region 27 can be set to the same surface as the lower surface of the fourth compartment region of Embodiment 3.

[0093] That is, in Embodiment 4, the fifth compartment region 25, the sixth compartment region 26, and the seventh compartment region 27, which have a total volume smaller than the fourth compartment region 24 of Embodiment 3, are provided, and thus the volume of the region covered by the compartment 20 is reduced. Thus, the required amount of nitrogen or CDA supplied into the compartment 20 can be further reduced.

[0094] Note that, in Embodiment 4, the volume of the area surrounded by the moving table 2 is reduced. Therefore, when the table 2 moves, the possibility that mist generated by ink ejected from the inkjet head 1 collides with the inner surface of the compartment 20, particularly the inner surface of the sixth compartment region 26 and the seventh compartment region 27, is increased. As a result, the collided mist can adhere to the print target. Therefore, it is also possible to provide a structure in which suction mechanisms that suck gas in the area covered by the compartment 20 are provided at both ends or either end of the sixth compartment region 26 and the seventh compartment region 27. In addition, it is also possible to provide a structure in which the end of the sixth compartment region 26 and the end of the seventh compartment region 27 are connected by a duct device that allows air to pass. In this structure, as the table 2 moves, the gas in the sixth compartment region 26 moves to the seventh compartment region 27 via the duct device, and thus it is possible to prevent the adhesion of mist to the print target. By using the countermeasures of the above structure, it is possible to prevent the stagnation of gas with a high mist concentration in the compartment 20. As a result, it is possible to more reliably prevent the adhesion of mist to the print target.

[0095] In addition, in Embodiment 4, it is also possible to provide a structure further provided with a laser interferometer. The laser interferometer measures the position of the table 2. Furthermore, the table driving section is controlled on the basis of the measurement result of the laser interferometer. Thus, it is possible to achieve high-precision position control of the table 2. However, if the concentration of mist in the compartment 20 becomes high as described above, it can be impossible to accurately perform position measurement of the table 2 using the laser interferometer. In addition, if the gas in the compartment 20 fluctuates, it can be impossible to accurately measure the position of the table 2. In this case, in order to prevent the above situation, it is preferable to provide a structure in which a gas supply mechanism that supplies gas such as nitrogen or CDA to the passage toward the laser interferometer from the outside of the compartment 20 is provided. Thus, it is possible to generate uniform flow of gas and stably ensure the measurement accuracy of the laser interferometer. At this time, it is preferable to supply nitrogen or CDA to the passage toward the laser interferometer from above or from the side. In addition, it is preferable to provide a structure in which nitrogen or CDA is supplied from a plurality of places at regular intervals.

[0096] (Embodiment 5)

[0097] Hereinafter, the inkjet printing apparatus 100 of Embodiment 5 will be described using Figure 14 and Figure 15 .

[0098] Figure 14 and Figure 15 are diagrams that show the structure of the inkjet printing apparatus 100 of Embodiment 5. Note that, Figure 14 is a diagram corresponding to Figure 12 of Embodiment 4. In addition, matters not described in Embodiment 5 are the same as those of the previously described Embodiment 4.

[0099] As Figure 14 shown, the inkjet printing apparatus 100 of Embodiment 5 differs from the inkjet printing apparatus 100 of Embodiment 4 shown in Figures 11 to 13 in that it is provided with the volume variable unit 31.

[0100] The volume variable unit 31 is, for example, disposed in the third compartment region 23. The volume variable unit 31 is exemplified by a member having a corrugated structure or the like, for example, and is capable of changing its volume by expansion or contraction.

[0101] Specifically, as Figure 14 shown, if the volume of the volume variable unit 31 is increased, the volume of the third compartment region 23 is correspondingly decreased. That is, by disposing the volume variable unit 31 in the region covered by the compartment 20, it is possible to reduce the required amount of nitrogen or CDA to be supplied into the compartment 20.

[0102] On the other hand, as Figure 15 shown, if the volume of the volume variable unit 31 is decreased, it is possible to prevent interference of the above-mentioned moving member with the volume variable unit 31 at the time of movement of the inkjet head 1 or the like.

[0103] Note that the setting position of the volume variable unit 31 can be, for example, a position at which one end thereof is in contact with the moving ink supply unit 6, or a position at which it is separated by a prescribed interval from the ink supply unit 6.

[0104] That is, the inkjet printing apparatus 100 of Embodiment 5 operates in such a manner that the volume of the volume variable unit 31 is increased at the time of movement of the inkjet head 1 to the table 2. Figure 15 At this time, the volume variable unit 31 can be stopped at a position separated by a prescribed interval even if it is in contact with the ink supply unit 6 disposed beside the inkjet head 1.

[0105] In addition, by the volume variable unit 31 of the third compartment region 23, it is possible to reduce the volume in the compartment 20. Thereby, it is possible to minimize the usage amount of nitrogen or CDA to be supplied into the compartment 20. As a result, it is possible to reduce the running cost of the supplied nitrogen or CDA.

[0106] Note that the volume variable unit 31 is not limited to disposition to the third compartment region 23, but can be disposed in the sixth compartment region 26 or the seventh compartment region 27 or the like, a sub-region of the table 2. In addition, the volume variable unit 31 can be constituted by a moving member, for example, which moves in such a manner that it is extended or contracted, that is, its volume is increased or decreased, together with the movement of the inkjet head 1 or the table 2. Thereby, it is possible to reduce the amount of CDA or nitrogen, and it is possible to reduce the running cost of CDA or nitrogen.

[0107] In addition, a small hole can be provided in a part of the volume variable unit 31. With the provision of this hole, when the volume of the volume variable unit 31 is reduced, the gas present in the volume variable unit 31 can be ejected to the inside of the area covered by the booth 20 from the outside of the volume variable unit 31. At this time, by the ejected gas, a down flow state can be achieved in the area covered by the booth 20. As a result, circulation of the gas in the booth 20 and stagnation of particles (from the above-described mist or from other dust, etc.) can be prevented.

[0108] Note that, in Embodiment 5, the description is made based on Embodiment 4 and using the volume variable unit 31 as an example, but is not limited thereto. For example, the volume variable unit 31 can be applied to Embodiments 1 to 3 other than Embodiment 4, of course. Thereby, the same effects as described above can be obtained.

[0109] (Embodiment 6)

[0110] Hereinafter, the inkjet printing apparatus 100 of Embodiment 6 will be described using Figure 16 and Figure 17

[0111] Figure 16 is a view showing the structure of the inkjet printing apparatus 100 of Embodiment 6. In addition, in Embodiment 6, the same matters as those described in the above-described embodiments are not described. Figure 17 is a view showing a state in which the booth 20 is detached from the inkjet printing apparatus 100. Note that, in Embodiment 6, matters not described are the same as those described in the above-described embodiments.

[0112] As shown in Figure 16 , the inkjet printing apparatus 100 of Embodiment 6 is different from the above-described embodiments in that the booth 20 is covered by the eighth booth area as a single area.

[0113] In detail, the inkjet printing apparatus 100 of Embodiment 6 is provided with a drive gantry 42. The drive gantry 42 mounts the inkjet head 1 and the ink supply unit 6. Also, when ink is inkjet-applied, the worktable 2 is not moved, but the drive gantry 42 is moved in the direction of the arrow 3 shown in the drawing. At this time, the position control of the drive gantry 42 is performed based on position information obtained by an encoder or a laser interferometer mounted to the drive gantry 42.

[0114] That is, according to Embodiment 6, the drive gantry 42 is configured to be moved. Thereby, the floor area (occupied area) of the inkjet printing apparatus 100 can be reduced.

[0115] ​In addition, the eighth compartment region 28 is a region whose upper surface and lower surface are demarcated by a surface that does not interfere with the driving frame 42 and the moving member that moves together with the driving frame 42 at the time of printing. Note that the surface that does not interfere with the moving member can be, for example, a surface that is in contact with the moving member on the upper side or lower side of the moving member, or a surface that is located on the upper side or lower side by a length that is larger than the trajectory traced by the upper end or lower end of the moving member (for example, 0.5 mm or more). Also, an example of the lower surface of the eighth compartment region 28 is a surface that is located between the lower end of the driving frame 42 and the upper end of the frame 32 in the vertical direction.

[0116] That is, the inkjet printing apparatus 100 of Embodiment 6 is able to reduce the space covered by the compartment 20. Thereby, it is possible to suppress the initial investment cost of the compartment region that constitutes the compartment 20, and it is possible to reduce the running cost of the nitrogen or CDA supplied into the compartment 20.

[0117] Note that, as with the structure explained in Embodiment 4, in Embodiment 6, it is also possible to provide a suction mechanism that suctions the gas in the region covered by the compartment 20 at both ends of the direction in which the driving frame 42 moves. In addition, it is also possible to provide a structure in which both ends of the eighth compartment region 28 are connected by a piping device. In the case of this structure, the gas on the one end side in the eighth compartment region 28 moves to the other end side of the eighth compartment region 28 via the piping device in conjunction with the movement of the table 2, and thus it is possible to prevent the attachment of mist to the print target. By using the countermeasure of the above structure, it is possible to prevent the stagnation of the gas with a high concentration of mist in the compartment 20. As a result, it is possible to more reliably prevent the attachment of mist to the print target.

[0118] Note that, in each of the embodiments explained above, the compartment 20 can be integrally constituted with a member other than the compartment 20 that constitutes the inkjet printing apparatus 100, such as the frame 32. According to this structure, it is possible to suppress the initial cost at the time of constructing the inkjet printing apparatus 100.

[0119] On the other hand, it is also possible to separately constitute the compartment 20 from a member other than the compartment 20 that constitutes the inkjet printing apparatus 100. Thereby, it is possible to reduce the assembly man-hours.

[0120] Hereinafter, the inkjet printing apparatus 100 of Embodiment 2 will be described with reference to the drawings. Figure 18 Figure 19 A modification example of the inkjet printing apparatus 100 of Embodiment 2 will be described.

[0121] Figure 18 Figure 19 is a cross-sectional view of the inkjet printing apparatus of the modification example of Embodiment 2.

[0122] ​​That is, in the inkjet printing apparatus of the modification, the partition 20 is supported by the fan support 52 together with the fan 51. On the other hand, the partition 20 is provided separately from the frame 32 or the like. Note that, Figure 18 and Figure 19 the inkjet printing apparatus of Embodiment 2 are Figure 6 and Figure 7 corresponding.

[0123] According to the above structure, when a vibration source such as the fan 51 or the suction device with a HEPA filter is installed in the partition 20, it is possible to more reliably prevent the transmission of vibration to the inkjet head 1 or the worktable 2. As a result, it is possible to reliably perform higher-precision printing.

[0124] Note that, in each of the embodiments and the modifications, the matters specifically described are independent of the order of the description, and of course can be appropriately applied to other embodiments.

Claims

1. An inkjet printing apparatus, wherein the inkjet printing apparatus comprises: a table; an inkjet head that moves relatively to the table; a booth that covers the table and the inkjet head and is divided into a plurality of sub-areas by an openable and closable partition; and a gas environment control device that individually controls gas environments of the plurality of sub-areas, the plurality of sub-areas include a printing-side booth area in which the inkjet head is present when ink is applied to a printing target, and a maintenance-side booth area in which the inkjet head is present when the inkjet head is maintained, the gas environment control device controls the gas environment of other sub-areas based on a sensor provided in one sub-area.

2. An inkjet printing apparatus, wherein the inkjet printing apparatus comprises: a table; an inkjet head that moves relatively to the table; a booth that covers the table and the inkjet head and is divided into a plurality of sub-areas by an openable and closable partition; a gas environment control device that individually controls gas environments of the plurality of sub-areas; and a suction mechanism that suctions gas in the sub-areas, the plurality of sub-areas include a printing-side booth area in which the inkjet head is present when ink is applied to a printing target, and a maintenance-side booth area in which the inkjet head is present when the inkjet head is maintained, the suction mechanism suctions gas in a sub-area in which the table moves when the table moves.

3. An inkjet printing apparatus, wherein the inkjet printing apparatus comprises: a table; an inkjet head that moves relatively to the table; a booth that covers the table and the inkjet head and is divided into a plurality of sub-areas by an openable and closable partition; and a gas environment control device that individually controls gas environments of the plurality of sub-areas, the plurality of sub-areas include a printing-side booth area in which the inkjet head is present when ink is applied to a printing target, and a maintenance-side booth area in which the inkjet head is present when the inkjet head is maintained, an end portion of one sub-area and an end portion of another sub-area are connected by a duct device.

4. An inkjet printing apparatus, wherein the inkjet printing apparatus comprises: a table; an inkjet head that moves relatively to the table; a booth that covers the table and the inkjet head and is divided into a plurality of sub-areas by an openable and closable partition; and a gas environment control device that individually controls gas environments of the plurality of sub-areas, the plurality of sub-areas include a printing-side booth area in which the inkjet head is present when ink is applied to a printing target, and a maintenance-side booth area in which the inkjet head is present when the inkjet head is maintained, end portions of two sub-areas in which the table moves are connected by a duct device.

5. An inkjet printing apparatus, wherein the inkjet printing apparatus comprises: a table; an inkjet head that moves relatively to the table; a booth covering the table and the inkjet head; and a gas environment control device that controls a gas environment of an area covered by the booth, the booth divides the area into a plurality of sub-areas by a partition that is openable and closable, the plurality of sub-areas include a printing-side booth area in which the inkjet head is present when applying ink to a print target, and a maintenance-side booth area in which the inkjet head is present when being maintained, the inkjet printing device further includes a laser interferometer that detects a position of the table, and a gas supply mechanism that supplies gas to a passage toward the laser interferometer.

6. The inkjet printing device according to claim 5, wherein the gas environment control device controls a gas environment of each of the plurality of sub-areas.

7. The inkjet printing device according to claim 5, wherein the inkjet printing device further includes a gas environment detection sensor disposed in the printing-side booth area, the gas environment control device controls a gas environment of at least one of the plurality of sub-areas based on a detection result of the gas environment detection sensor.

8. The inkjet printing device according to claim 7, wherein the gas environment detection sensor includes at least one of an oxygen concentration sensor, a nitrogen concentration sensor, an ozone concentration sensor, a moisture concentration sensor, and a temperature sensor, the gas environment control device individually adjusts at least one of a nitrogen flow rate, a nitrogen concentration, a clean dry air flow rate, and a clean dry air purity supplied to the plurality of sub-areas.

9. The inkjet printing device according to claim 7 or 8, wherein the gas environment control device controls a gas environment of the printing-side booth area.

10. The inkjet printing device according to any one of claims 5, 7, and 8, wherein the inkjet printing device further includes a suction mechanism that suctions gas in the printing-side booth area, the table is configured to be movable in a prescribed direction in the printing-side booth area, the suction mechanism is disposed at an end portion of the printing-side booth area in the prescribed direction.

11. The inkjet printing device according to any one of claims 5, 7, and 8, wherein the inkjet printing device further includes a duct device that connects both end portions of the printing-side booth area to be airtight.

12. The inkjet printing device according to any one of claims 5, 7, and 8, wherein the inkjet printing device further includes a table drive unit that moves the table.

13. The inkjet printing device according to claim 12, wherein the printing-side booth area is defined by a lower surface of a face that does not interfere with the table and a moving member that moves together with the table at the time of printing execution.

14. The inkjet printing device according to any one of claims 5, 7, and 8, wherein the maintenance-side booth area is defined by a lower surface of a face that does not interfere with the inkjet head and a moving member that moves together with the inkjet head at the time of moving the inkjet head to the maintenance-side booth area.

15. The inkjet printing apparatus according to any one of claims 5, 7, and 8, wherein a partition is provided between the printing-side compartment region and the maintenance-side compartment region.

16. The inkjet printing apparatus according to any one of claims 5, 7, and 8, wherein a wiping unit is disposed below the maintenance-side compartment region.

17. The inkjet printing apparatus according to any one of claims 1 to 5, wherein the inkjet printing apparatus further includes a drive frame that supports the inkjet head.

18. The inkjet printing apparatus according to any one of claims 1 to 5, wherein the compartment is formed with at least one of an opening portion for taking out and in the inkjet head when the inkjet head is replaced and an opening portion for taking out and in a print target.

19. The inkjet printing apparatus according to any one of claims 1 to 5, wherein the inkjet printing apparatus further includes a frame that supports the worktable, the compartment is integrally formed with the frame.

20. The inkjet printing apparatus according to claim 5, wherein the inkjet printing apparatus further includes a frame that supports the worktable, the compartment is provided with a fan that supplies gas to the plurality of sub-regions, the compartment is formed separately from the frame.

21. An inkjet printing apparatus, wherein the inkjet printing apparatus includes: a worktable; an inkjet head that relatively moves with respect to the worktable; a compartment that covers the worktable and the inkjet head; a gas environment control device that controls a gas environment of a region covered by the compartment; and a volume variable unit that is disposed in the region.

22. The inkjet printing apparatus according to claim 21, wherein the volume variable unit has a hole that ejects gas present inside the volume variable unit when a volume of the volume variable unit is decreased.

23. The inkjet printing apparatus according to claim 21 or 22, wherein the compartment is formed with at least one of an opening portion for taking out and in the inkjet head when the inkjet head is replaced and an opening portion for taking out and in a print target.

24. The inkjet printing apparatus according to claim 21 or 22, wherein the inkjet printing apparatus further includes a frame that supports the worktable, the compartment is integrally formed with the frame.

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