Electrostatic chuck

By setting electrode areas of different widths in the electrostatic chuck and independently controlling the voltage, the problem of insufficient process reliability of the electrostatic chuck when fixing the substrate is solved, and the protection of the electrodes and the stable operation of the process are achieved.

CN113690170BActive Publication Date: 2026-02-06SAMSUNG DISPLAY CO LTD
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Patent Information

Application Number
CN202110494926.0
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Priority Date
2020-05-18
Filing Date
2021-05-07
Publication Date
2026-02-06
Estimated Expiration
2041-05-07

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Abstract

An electrostatic chuck is provided that secures a substrate and includes a first region and a second region adjacent to the first region. The electrostatic chuck includes a first electrode portion disposed in the first region and a second electrode portion disposed in the second region. The first electrode portion has a first width and the second electrode portion has a second width that is less than the first width.
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Citation Information

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