An in-situ flash evaporation film forming device for perovskite solar cells

Abstract

The present invention discloses an in-situ flash evaporation film-forming device for a perovskite solar cell, comprising: a platform; a substrate, the substrate is arranged on the platform and is used to form a film layer; a cavity cover, the cavity cover is movably arranged on the platform, the cavity cover can buckle the substrate in a closed cavity surrounded by the cavity cover and the platform, and a vacuum pipe is arranged on the cavity cover, and the vacuum pipe can connect the closed cavity with a vacuum pump. After the film layer is formed, the formed film layer can be flash evaporated in situ by directly lowering the cavity cover, which saves the turnover time of the film layer from the film forming equipment to the flash evaporation equipment, thereby avoiding the volatilization of the solvent in the natural state, and thus ensuring the quality of the finished product. In order to avoid the time taken by starting the vacuum pump, and further avoid the volatilization of the solvent in the film layer in the natural state, the present invention arranges an electromagnetic valve on the vacuum tube, and makes the vacuum pump normally open. Once the film layer on the substrate is formed, the closed cavity can be immediately evacuated after the electromagnetic valve is opened.

Description

Technical Field

[0001] The present invention relates to the technical field of film forming of perovskite solar cells, and more specifically to an in-situ flash evaporation film forming device for perovskite solar cells. Background Art

[0002] Perovskite solar cells are gaining more and more attention due to their high conversion efficiency, low cost, and environmental friendliness. Moreover, the photoelectric conversion efficiency of perovskite solar energy has increased several times in just a few years, showing very excellent photoelectric performance. The preparation method of the film layer of the perovskite solar cell is as follows: a transparent conductive film is prepared on the substrate as the electrode layer on the light-receiving side, and then a carrier transport layer is prepared on the transparent conductive film, and a perovskite layer is prepared on the carrier transport layer as a light absorption layer, and then a carrier transport layer on the other side is prepared on the light absorption layer, and finally a metal layer is prepared as the transparent conductive film on the other side.

[0003] In the prior art, a film layer is usually prepared by a scraping process. After the scraping is completed, the formed film layer needs to be transferred to a vacuum chamber to remove the solvent, which is a flash evaporation process. In the prior art, the equipment used for scraping the film layer and the equipment used for flash evaporation are two independent sets of equipment. After the film layer is scraped and formed in the scraping equipment, the formed film layer needs to be transferred to the flash evaporation equipment for flash evaporation. However, in the process of transferring the film layer from the scraping equipment to the flash evaporation equipment, part of the solvent in the film layer will evaporate, and the volatilization of the solvent in the natural state will affect the quality of the finished product.

[0004] Therefore, how to shorten the turnover time of the film layer, thereby avoiding the volatilization of the solvent in the natural state and ensuring the quality of the finished product is a key issue that technical personnel in this field need to solve urgently. Summary of the invention

[0005] The purpose of the present invention is to shorten the turnover time of the film layer, thereby preventing the solvent from volatilizing in the natural state, and thus ensuring the quality of the finished product. To achieve the above purpose, the present invention provides the following technical solutions:

[0006] A perovskite solar cell in-situ flash evaporation film forming device, comprising:

[0007] platform;

[0008] A substrate, the substrate is arranged on the platform and is used for forming a film layer;

[0009] A cavity cover is movably arranged on the platform, and the cavity cover can buckle the substrate in a closed cavity surrounded by the cavity cover and the platform. A vacuum pipe is arranged on the cavity cover, and the vacuum pipe can connect the closed cavity with a vacuum pump.

[0010] Preferably, a solenoid valve is provided on the vacuum tube, and the solenoid valve is used to open or close the vacuum tube, and the vacuum pump is in a normally open state.

[0011] Preferably, there are a plurality of vacuum tubes, and the plurality of vacuum tubes are evenly arranged relative to the substrate.

[0012] Preferably, there are multiple vacuum tubes, and two or more of the vacuum tubes are connected to the vacuum pump via a connecting tube. A solenoid valve is provided on the connecting tube, and the vacuum pump is in a normally open state.

[0013] Preferably, a sealing ring is provided on the platform, the sealing ring is arranged around the substrate, and a sealing ring groove capable of cooperating with the sealing ring is provided on the cavity cover.

[0014] Preferably, an adsorption hole is provided on the platform, the adsorption hole is connected to a negative pressure pump, and the adsorption hole is used to adsorb the substrate.

[0015] Preferably, it also includes a coating head, wherein a driving rod is connected to each of the two sides of the coating head, a slider is connected to the driving rod, the slider is fitted in a slide rail, the slide rail extends along the scraping direction of the coating head, and the driving rod is driven by a linear drive device.

[0016] Preferably, the linear drive device is a linear motor, and each of the drive rods is driven by one of the linear motors.

[0017] Preferably, the cavity cover is driven by a cylinder.

[0018] Preferably, a fixing plate is arranged above the cavity cover, a guide hole is arranged on the fixing plate, and a guide column is arranged on the upper surface of the cavity cover, and the guide column is fitted in the guide hole.

[0019] It can be seen from the above technical solution that in the initial state, the cavity cover is located above the platform, and the substrate is exposed to the outside, so the film layer can be scraped on the substrate. After the scraping is completed, the cavity cover moves down, the substrate is buckled in the closed cavity, and the vacuum pump and vacuum tube are turned on to evacuate the closed cavity and flash evaporate to remove the solvent. After the film layer is formed, the cavity cover can be directly lowered to flash evaporate the formed film layer in situ, which saves the turnover time of the film layer from the film forming equipment to the flash evaporation equipment, thereby avoiding the volatilization of the solvent in a natural state, and thus ensuring the quality of the finished product. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the scheme in the embodiment of the present invention, the following is a brief introduction to the drawings required for describing the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 A state diagram of a perovskite solar cell in-situ flash evaporation film-forming device provided by a specific embodiment of the present invention at a certain moment during a flash evaporation operation;

[0022] Figure 2 A state diagram of a perovskite solar cell in-situ flash evaporation film-forming device provided by a specific embodiment of the present invention at a certain moment during a scraping operation;

[0023] Figure 3 A top view of a driving rod and a slide rail provided in a specific embodiment of the present invention;

[0024] Figure 4 A front view of a cavity cover, a fixing plate and a guide post provided in a specific embodiment of the present invention.

[0025] Among them, 1 is a platform, 2 is a substrate, 3 is a cavity cover, 4 is a vacuum tube, 5 is a solenoid valve, 6 is a coating head, 7 is a cylinder, 8 is a sealing ring, 9 is a slide rail, 10 is a driving rod, 11 is a fixing plate, and 12 is a guide column. DETAILED DESCRIPTION

[0026] The invention discloses an in-situ flash evaporation film-forming device for a perovskite solar cell, which can immediately flash evaporate a film layer without changing the position of the film layer, thereby avoiding the volatilization of the solvent in a natural state and further ensuring the quality of the finished product.

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] In the description of the present invention, the orientation or position relationship indicated by the terms "upper" and "lower" etc. is based on the orientation or position relationship shown in the drawings and is only for the convenience of describing the present invention rather than requiring the present invention to be constructed and operated in a specific orientation. Therefore, it should not be understood as a limitation on the present invention.

[0029] The present invention discloses an in-situ flash evaporation film forming device for a perovskite solar cell, which comprises a platform 1, a substrate 2 and a cavity cover 3. The substrate 2 is arranged on the platform 1 for forming a film layer. The cavity cover 3 is arranged on the platform 1 so as to be movable up and down. After the cavity cover 3 is buckled on the platform 1, it forms a closed cavity with the platform 1, and the substrate 2 is located in the closed cavity. That is, the cavity cover 3 can buckle the substrate 2 in the closed cavity surrounded by the cavity cover 3 and the platform 1, as shown in the attached figure. Figure 1 A vacuum tube 4 is provided on the chamber cover 3, and the vacuum tube 4 can connect the closed chamber and the vacuum pump.

[0030] Please refer to the attached Figure 2 In the initial state, the chamber cover 3 is located above the platform 1, and the substrate 2 is exposed to the outside, so that the film layer can be scraped on the substrate 2. After the scraping is completed, the chamber cover 3 moves down, the substrate 2 is buckled in the closed chamber, and the vacuum pump and the vacuum tube 4 are turned on to evacuate the closed chamber and perform flash evaporation to remove the solvent. After the film layer is formed, the chamber cover 3 can be directly lowered to perform in-situ flash evaporation on the formed film layer, which saves the turnover time of the film layer from the film forming equipment to the flash evaporation equipment, thereby avoiding the volatilization of the solvent in the natural state, thereby ensuring the quality of the finished product.

[0031] After the film layer is formed on the substrate 2, in order to avoid the time taken by starting the vacuum pump, and further to prevent the film layer from volatilizing the solvent in a natural state, the present invention makes the following design: a solenoid valve 5 is arranged on the vacuum tube 4, and the solenoid valve 5 is used to conduct or close the vacuum tube 4. The vacuum pump is in a normally open state. Once the film layer on the substrate 2 is formed, the chamber cover 3 is immediately lowered, and then the solenoid valve 5 is opened. Since the vacuum pump is in a normally open state, the closed chamber can be evacuated immediately after the solenoid valve 5 is opened.

[0032] In order to ensure uniform pumping speed on the surface of the substrate 2 , the present invention provides a plurality of vacuum tubes 4 , and the plurality of vacuum tubes 4 are evenly distributed relative to the substrate 2 .

[0033] The vacuum tube 4 and the vacuum pump can also be connected in the following manner: two or more vacuum tubes 4 are connected to the vacuum pump through a connecting tube, or all vacuum tubes 4 are connected to the vacuum pump through a connecting tube. An electromagnetic valve 5 is arranged on the connecting tube, and the vacuum pump is in a normally open state. If vacuuming is required, the closed chamber can be immediately vacuumed by opening the electromagnetic valve 5. The connection method in this embodiment can reduce the amount of electromagnetic valve 5 used.

[0034] In order to ensure the sealing of the closed cavity surrounded by the cavity cover 3 and the platform 1, the present invention further makes the following design: a sealing ring 8 is arranged around the substrate 2 on the platform 1, and a sealing groove that can cooperate with the sealing ring 8 is arranged on the cavity cover 3. After the cavity cover 3 falls onto the platform 1, the sealing ring 8 on the platform 1 is pressed into the sealing groove.

[0035] In order to ensure the stability and accuracy of the upward and downward movement of the cavity cover 3, the present invention further provides a guide column 12 and a fixing plate 11. Figure 4 As shown. The fixing plate 11 is arranged above the cavity cover 3. Specifically, the fixing plate 11 can be fixed on the surrounding frames. In addition, the fixing plate 11 can also be fixed on a support frame, and the support frame is arranged on the ground. A guide hole is arranged on the fixing plate 11. The guide column 12 is arranged on the upper surface of the cavity cover 3, and the guide column 12 is fixedly connected to the cavity cover 3. The guide column 12 is passed through the guide hole. During the movement of the cavity cover 3, the cavity cover 3 can move up and down stably and can be accurately buckled on the platform 1 due to the cooperation of the guide column 12 and the guide hole. The sealing ring 8 can accurately enter the sealing ring groove. The enclosed closed cavity is also a preset closed cavity, which can accurately buckle the substrate 2 inside.

[0036] Based on the consideration of uniform guiding, the present invention provides two guide posts 12 , and the two guide posts 12 are distributed at both ends of the cavity cover 3 .

[0037] It should be noted that a coating head 6 for scraping a film layer is disposed below the cavity cover 3 , and therefore, arranging the guide column 12 and the fixing plate 11 above the cavity cover 3 can avoid interference with the coating head 6 .

[0038] It should also be noted that the up and down movement of the chamber cover 3 can be driven by the cylinder 7. The cylinder 7 is easy to control and has high operating accuracy.

[0039] From the above description, it can be known that the substrate 2 is arranged on the platform 1, and it is necessary to ensure that the substrate 2 is fixed during the process of scraping the film layer. To this end, the present invention provides adsorption holes on the platform 1. There are multiple adsorption holes, and the multiple adsorption holes are evenly distributed relative to the substrate 2. All the adsorption holes are connected to the negative pressure pump. During the process of scraping the film layer, the negative pressure pump is started to generate negative pressure in the adsorption holes, so that the substrate 2 is firmly adsorbed.

[0040] In the art, a coating head 6 is usually used to scrape a film layer on the substrate 2. The coating head 6 needs to be moved from one side of the substrate 2 to the other side. Figure 3 , the driving method of the coating head 6 is as follows: a driving rod 10 is connected to each side of the coating head 6. A slider is connected to the driving rod 10, and the slider is fitted in the slide rail 9. Since there are two driving rods 10, there are two sliders and two slide rails 9 accordingly. The slide rail 9 extends along the moving direction of the coating head 6. The driving rod 10 is arranged in a direction perpendicular to the slide rail 9. The driving rod 10 is driven by a linear driving device. The linear driving device is used to output a straight line, thereby driving the driving rod 10 to move along the slide rail 9. The present invention preferably uses a linear motor as the linear driving device. In addition, there are two linear motors, each of which drives a driving rod 10.

[0041] From the above description, it can be seen that before the scraping, the coating head 6 is located on one side of the platform 1, and as the scraping progresses, the coating head 6 moves to the other side of the platform 1. During the movement of the coating head 6, the cavity cover 3 is located above the substrate 2, and the driving rod 10 and the coating head 6 just pass through the gap between the cavity cover 3 and the substrate 2. After the scraping is completed, the coating head 6 stops outside the projection range of the cavity cover 3, so that the cavity cover 3 will not interfere with the coating head 6 or the driving rod 10 during the landing process.

[0042] The arrangement of the driving rod 10 of the present invention not only enables the coating head 6 to achieve a straight-line scraping motion, but also ensures that the driving rod 10 does not interfere with the chamber cover 3. In this way, it is ensured that the scraping operation and the vacuuming operation do not interfere with each other, and the scraping operation and the vacuuming operation are completed in sequence without changing the position of the substrate 2.

[0043] Finally, it should be noted that the terms "comprises", "includes" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device that includes a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of more restrictions, an element defined by the phrase "comprises a ..." does not exclude the presence of other identical elements in the process, method, article or device that includes the element.

[0044] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0045] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An in-situ flash evaporation film forming device for a perovskite solar cell, characterized in that: include: platform; A substrate, the substrate is arranged on the platform and is used for forming a film layer; A chamber cover, the chamber cover is movably disposed on the platform, the chamber cover can buckle the substrate in a closed chamber surrounded by the chamber cover and the platform, and a vacuum pipe is disposed on the chamber cover, the vacuum pipe can connect the closed chamber with a vacuum pump; A coating head, wherein a driving rod is connected to each of the two sides of the coating head, a slider is connected to the driving rod, the slider is matched in a slide rail, the slide rail extends along the coating direction of the coating head, and the driving rod is driven by a linear drive device. Before scraping, the coating head is located at one side of the platform. As the scraping progresses, the coating head moves to the other side of the platform. During the movement of the coating head, the cavity cover is located above the substrate, and the driving rod and the coating head pass through the gap between the cavity cover and the substrate. After the scraping is completed, the cavity cover moves down to buckle the substrate into the closed cavity, and the coating head stops outside the projection range of the cavity cover. The platform is provided with an adsorption hole, the adsorption hole is connected to a negative pressure pump, and the adsorption hole is used for adsorbing the substrate.

2. The in-situ flash evaporation film forming device for perovskite solar cells according to claim 1, characterized in that: The vacuum tube is provided with an electromagnetic valve, which is used to open or close the vacuum tube, and the vacuum pump is in a normally open state.

3. The in-situ flash evaporation film forming device for perovskite solar cells according to claim 1, characterized in that: There are a plurality of vacuum tubes, and the plurality of vacuum tubes are evenly arranged relative to the substrate.

4. The perovskite solar cell in-situ flash evaporation film forming device according to claim 1, characterized in that: There are multiple vacuum tubes, and two or more of the vacuum tubes are connected to the vacuum pump via connecting tubes. A solenoid valve is provided on the connecting tube, and the vacuum pump is in a normally open state.

5. The in-situ flash evaporation film forming device for perovskite solar cells according to claim 1, characterized in that: A sealing ring is arranged on the platform and is arranged around the substrate. A sealing ring groove capable of cooperating with the sealing ring is arranged on the cavity cover.

6. The in-situ flash evaporation film forming device for perovskite solar cells according to claim 1, characterized in that: The linear drive device is a linear motor, and each of the drive rods is driven by one of the linear motors.

7. The in-situ flash evaporation film forming device for perovskite solar cells according to claim 1, characterized in that: The cavity cover is driven by a cylinder.

8. The perovskite solar cell in-situ flash evaporation film forming device according to claim 1, characterized in that: A fixing plate is arranged above the cavity cover, a guide hole is arranged on the fixing plate, a guide column is arranged on the upper surface of the cavity cover, and the guide column is matched in the guide hole.

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