Processing system

Abstract

The processing system comprises: a supporting device that supports an object; a processing device that supplies powder to the object to perform additional processing on the object; a power source that generates power; a power transmission component that transmits the power to at least one of the supporting device and the processing device; a partition component that is arranged between at least a portion of the processing device and the power source and has a through hole for the power transmission component to pass through; and a sealing component that seals between the power transmission component and the partition component.

Description

Technical Field

[0001] The present invention relates to the technical field of machining systems that perform machining operations, for example. Background Art

[0002] Patent Document 1 describes a processing system that melts a powdered material using an energy beam and then performs a processing operation to form a molded object by solidifying the molten material. In such a processing system, ensuring the safety of the processing system is a technical issue.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: U.S. Patent Application Publication No. 2017 / 014909 Summary of the invention

[0006] According to the first method, a processing system is provided, which comprises: a supporting device that supports an object; a processing device that supplies powder to the object to perform additional processing on the object; a power source that generates power; a power transmission component that transmits the power to at least one of the supporting device and the processing device; a partition component that is arranged between at least a portion of the processing device and the power source and has a through hole for the power transmission component to pass through; and a sealing component that seals between the power transmission component and the partition component.

[0007] The effects and other advantages of the present invention will become apparent from the embodiments described below. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 It is a cross-sectional view showing the structure of the processing system according to the first embodiment.

[0009] Figure 2 It is a system configuration diagram showing the system configuration of the processing system according to the first embodiment.

[0010] Figure 3 It is a perspective view showing the structure of the first stage device in which a part of the partition member is omitted.

[0011] Figure 4 This is a perspective view showing the structure of the first stage device without omitting a part of the partition member.

[0012] Figure 5 It is a perspective view showing the structure of the second stage device in which a part of the partition member is omitted.

[0013] Figure 6It is a perspective view showing the structure of the second stage device without omitting a part of the partition member.

[0014] Figure 7 It is a perspective view showing the structure of the third stage device in which a part of the partition member is omitted.

[0015] Figure 8 It is a perspective view showing the structure of the third stage device in which a part of the partition member is not omitted.

[0016] Fig. 9 It is a perspective view showing the structure of the fourth stage device in which a part of the partition member is omitted.

[0017] Fig.10 It is a perspective view showing the structure of the fourth stage device without omitting a part of the partition member.

[0018] Fig.11 (a) to Fig.11 (e) are cross-sectional views showing the state when a certain area on the work is irradiated with light and a modeling material is supplied.

[0019] Fig.12 (a) to Fig.12 (c) are cross-sectional views showing the process of forming a three-dimensional structure.

[0020] Fig.13 It is a cross-sectional view showing the structure of the processing system according to the second embodiment.

[0021] Fig.14 It is a cross-sectional view showing the structure of a power source included in the machining system according to the second embodiment.

[0022] Fig.15 It is a cross-sectional view showing the structure of the processing system according to the third embodiment.

[0023] Fig.16 It is a system configuration diagram showing the system configuration of the processing system according to the third embodiment.

[0024] Fig.17 It is a cross-sectional view showing the structure of the processing system according to the fourth embodiment. DETAILED DESCRIPTION

[0025] Hereinafter, an embodiment of a processing system will be described with reference to the accompanying drawings. Hereinafter, an embodiment of the processing system will be described using a processing system SYS that performs additional processing on a workpiece W as an example of an object. In particular, hereafter, an embodiment of the processing system will be described using a processing system SYS that performs additional processing based on a laser deposition welding method (LMD: Laser Metal Deposition). The additional processing based on the laser deposition welding method is an additional processing in which a molding material M supplied to the workpiece W is melted by using processing light EL, thereby forming a three-dimensional structure ST that is integrated with the workpiece W or can be separated from the workpiece W. It should be noted that the laser deposition welding method (LMD) may also be referred to as direct metal deposition, direct energy deposition, laser cladding, laser engineering net forming, direct light synthesis, laser synthesis, forming deposition machinery, wire laser deposition, gas passing through a wire, laser powder erosion, laser metal forming, selective laser powder melting, laser direct casting, laser powder deposition, laser additional machinery, and laser rapid prototyping.

[0026] In addition, in the following description, the positional relationship of various structural elements constituting the processing system SYS is described using an XYZ vertical coordinate system defined by mutually perpendicular X-axis, Y-axis and Z-axis. In addition, in the following description, for the convenience of description, the X-axis direction and the Y-axis direction are respectively horizontal directions (i.e., prescribed directions in the horizontal plane), and the Z-axis direction is the vertical direction (i.e., the direction perpendicular to the horizontal plane, substantially the up and down direction). In addition, the rotation directions (in other words, the tilting directions) around the X-axis, Y-axis and Z-axis are respectively referred to as the θX direction, the θY direction and the θZ direction. Here, the Z-axis direction may also be set as the gravity direction. In addition, the XY plane may also be set as the horizontal direction.

[0027] (1) Processing System SYS of First Embodiment

[0028] First, a machining system SYS according to a first embodiment (hereinafter, the machining system SYS according to the first embodiment will be referred to as a “machining system SYS1 ”) will be described.

[0029] (1-1) Structure of Machining System SYS1 According to First Embodiment

[0030] First, refer to Figure 1 and Figure 2 The configuration of the processing system SYS1 according to the first embodiment will be described. Figure 1 It is a cross-sectional view showing an example of the structure of the processing system SYS1 according to the first embodiment. Figure 2 1 is a system configuration diagram showing an example of a system configuration of a processing system SYS1 according to the first embodiment.

[0031] The processing system SYS1 can form a three-dimensional structure ST (i.e., a three-dimensional object having a size in any direction of the three-dimensional direction, a three-dimensional object). The processing system SYS1 can form a three-dimensional structure ST on a workpiece W that is the basis for forming the three-dimensional structure ST. The workpiece W can also be referred to as a substrate or a base. The processing system SYS1 can form a three-dimensional structure ST by performing additional processing on the workpiece W. In the case where the workpiece W is a workbench 31 described later, the processing system SYS1 can form a three-dimensional structure ST on the workbench 31. In the case where the workpiece W is an existing structure held by the workbench 31 (or supported or placed by the workbench 31), the processing system SYS1 can form a three-dimensional structure ST on the existing structure. In this case, the processing system SYS1 can also form a three-dimensional structure ST integrated with the existing structure. The action of forming a three-dimensional structure ST integrated with the existing structure can be regarded as equivalent to the action of adding a new structure to the existing structure. In addition, the existing structure may also be, for example, a product to be repaired having a defective portion. The processing system SYS1 may also form a three-dimensional structure on the repaired product in a manner that fills the defective portion of the repaired product. Alternatively, the processing system SYS1 may form a three-dimensional structure ST that can be separated from an existing structure. Figure 1 The example in which the workpiece W is a conventional structure held by the table 31 is shown. In addition, the example in which the workpiece W is a conventional structure held by the table 31 is also used for the following description.

[0032] As described above, the processing system SYS1 can form a three-dimensional structure ST by laser cladding. That is, the processing system SYS1 can also be said to be a 3D printer that uses the stacking modeling technology to form an object. In addition, the stacking modeling technology is also called rapid prototyping, rapid manufacturing, or additive manufacturing.

[0033] In order to form a 3D structure ST, Figure 1 and Figure 2 As shown, the processing system SYS1 includes a material supply device 1, a processing device 2, a table device 3, a light source 4, a gas supply device 5, a housing 6, and a control device 7. At least a portion of each of the processing device 2 and the table device 3 is accommodated in a chamber space 63IN inside the housing 6.

[0034] The material supply device 1 supplies the modeling material M to the processing device 2. The material supply device 1 supplies a desired amount of modeling material M corresponding to the required amount per unit time so as to supply the modeling material M required by the processing device 2 to form the three-dimensional structure ST.

[0035] The modeling material M is a material that can be melted by irradiation with processing light EL of a predetermined intensity or above. As such a modeling material M, for example, at least one of a metal material and a resin material can be used. However, as the modeling material M, other materials different from the metal material and the resin material can also be used. The modeling material M is a powdery material. That is, the modeling material M is a powder. In addition to the powdery material, the powder can also include a granular material. The modeling material M can also include, for example, a powder with a particle size in the range of 90 microns ± 40 microns. The average particle size of the powder constituting the modeling material M can be, for example, 75 microns, or other sizes. However, the modeling material M may not be a powder, and for example, a linear modeling material or a gaseous modeling material can also be used. In addition, the processing system SYS1 can also process the modeling material M using an energy beam such as a charged particle beam to form a modeling object.

[0036] The processing device 2 uses the modeling material M supplied from the material supply device 1 to form a three-dimensional structure ST. In order to form the three-dimensional structure ST using the modeling material M, the processing device 2 has a processing head 21. The processing head 21 has an irradiation optical system 211 and a material nozzle (i.e., a supply system for supplying the modeling material M) 212. The processing head 21 is accommodated in the chamber space 63IN. However, at least a part of the processing head 21 may also be arranged in a space outside the housing 6, i.e., an external space 64OUT. In addition, the external space 64OUT may also be a space that an operator of the processing system SYS1 can enter.

[0037] The irradiation optical system 211 is an optical system (for example, a focusing optical system) for emitting the processing light EL from the emission section 213. Specifically, the irradiation optical system 211 is optically connected to the light source 4 that emits the processing light EL via an optical transmission component (not shown) such as an optical fiber or a light guide. The irradiation optical system 211 emits the processing light EL transmitted from the light source 4 via the optical transmission component. The irradiation optical system 211 emits the processing light EL in such a manner that the processing light EL advances in the chamber space 63IN. The irradiation optical system 211 irradiates the processing light EL from the irradiation optical system 211 downward (i.e., -Z side). A workbench 31 is arranged below the irradiation optical system 211. When the workpiece W is supported (or mounted) on the workbench 31, the irradiation optical system 211 irradiates the processing light EL toward the workpiece W. Specifically, the irradiation optical system 211 can irradiate the processing light EL to the irradiation area EA set on the workpiece W as an area to be irradiated with the processing light EL (typically, to be focused). Furthermore, the state of the irradiation optical system 211 can be switched between a state in which the processing light EL is irradiated to the irradiation area EA and a state in which the processing light EL is not irradiated to the irradiation area EA under the control of the control device 7. In addition, the direction of the processing light EL emitted from the irradiation optical system 211 is not limited to being directly downward (i.e., consistent with the -Z axis direction), and for example, it may be a direction inclined at a predetermined angle relative to the Z axis.

[0038] The material nozzle 212 has a supply outlet 214 for supplying the modeling material M. The material nozzle 212 supplies the modeling material M from the supply outlet 214 (for example, by spraying, ejecting or blowing). The material nozzle 212 is physically connected to the material supply device 1, which is a supply source of the modeling material M, via a tube not shown in the figure. The material nozzle 212 supplies the modeling material M supplied from the material supply device 1 via the tube. The material nozzle 212 may also pressure-feed the modeling material M supplied from the material supply device 1 via the tube. That is, the modeling material M from the material supply device 1 may be mixed with a conveying gas (for example, an inert gas such as nitrogen or argon) and pressure-feeded to the material nozzle 212 via the tube. In this case, as the conveying gas, for example, a purge gas supplied from the gas supply device 5 may be used. In addition, in Figure 1 , the material nozzle 212 is depicted as a tube, but the shape of the material nozzle 212 is not limited to this shape. The material nozzle 212 supplies the modeling material M to the chamber space 63IN. The material nozzle 212 supplies the modeling material M from the material nozzle 212 toward the bottom (i.e., the -Z side). A workbench 31 is arranged below the material nozzle 212. When the workbench 31 is loaded with a workpiece W, the material nozzle 212 supplies the modeling material M toward the workpiece W. In addition, the traveling direction of the modeling material M supplied from the material nozzle 212 is a direction inclined at a predetermined angle (an acute angle as an example) relative to the Z-axis direction, but it may also be the -Z side (i.e., directly below).

[0039] In the first embodiment, the material nozzle 212 is aligned with respect to the irradiation optical system 211 so as to supply the modeling material M toward the irradiation area EA irradiated with the processing light EL by the irradiation optical system 211. That is, the material nozzle 212 and the irradiation optical system 211 are aligned so that the supply area MA set on the workpiece W as the area where the material nozzle 212 supplies the modeling material M coincides with (or at least partially overlaps with) the irradiation area EA. Alternatively, the material nozzle 212 may be aligned so as to supply the modeling material M to the molten pool MP formed by the processing light EL emitted from the irradiation optical system 211.

[0040] The workbench device 3 has a workbench 31. The workbench 31 is accommodated in the chamber space 63IN. The workbench 31 can support the workpiece W. In addition, the state of "the workbench 31 supports the workpiece W" mentioned here may also refer to a state in which the workpiece W is directly or indirectly supported by the workbench 31. The workbench 31 may also be able to hold the workpiece W. That is, the workbench 31 may also support the workpiece W by holding the workpiece W. Alternatively, the workbench 31 may not be able to hold the workpiece W. In this case, the workpiece W may also be placed on the workbench 31. That is, the workbench 31 may also support the workpiece W placed on the workbench 31. At this time, the workpiece W may also be placed on the workbench 31 by a clamping press. Therefore, the state of "the workbench 31 supports the workpiece W" in this embodiment may also include a state in which the workbench 31 holds the workpiece W and a state in which the workpiece W is placed on the workbench 31. The workbench 31 may also be referred to as a supporting device for supporting the workpiece W, a loading device for loading the workpiece W, or a holding device for holding the workpiece W. Since the workbench 31 is accommodated in the chamber space 63IN, the workpiece W supported by the workbench 31 is also accommodated in the chamber space 63IN. Moreover, the workbench 31 can release the workpiece W while holding the workpiece W. The above-mentioned irradiation optical system 211 irradiates the processing light beam PL at least part of the period during which the workbench 31 supports the workpiece W. Moreover, the above-mentioned material nozzle 212 supplies the modeling material M at least part of the period during which the workbench 31 supports the workpiece W. In addition, a part of the modeling material M supplied by the material nozzle 212 may be scattered or spilled from the surface of the workpiece W to the outside of the workpiece W (for example, to the surroundings of the workbench 31). Therefore, the processing system SYSa may also have a recovery device around the workbench 31 for recovering the scattered or spilled modeling material M. In addition, in order to hold the workpiece W, the workbench 31 may also have a mechanical chuck, a vacuum adsorption chuck, etc.

[0041] The table device 3 further includes a power source 32 and a power transmission member 33. The power source 32 and the power transmission member 33 constitute a table driving system for moving the table 31 in the chamber space 63IN.

[0042] The power source 32 is a device (i.e., a power generating device) that generates power for moving the workbench 31. Specifically, the power source 32 generates electric power. That is, the power source 32 generates power using an electric current supplied from a power source not shown in the figure. In other words, the power source 32 generates power by converting an electric current supplied from a power source not shown in the figure into power. Power is generated electrically. As an example of the power source 32, an actuator such as an electric motor can be cited. In this case, the power source 32 includes a portion that can become an ignition source (hereinafter, in order to simplify the description, the portion that can become an ignition source will be referred to as an "ignition source"). As an example of an ignition source, a conductive portion (e.g., a coil) to which current is supplied can be cited. This is because an electric spark is generated in the conductive portion and / or heat is generated in the conductive portion by supplying the conductive portion to the coil.

[0043] The power transmission component 33 is a device that transmits the power generated by the power source 32 to the workbench 31. As a result, the workbench 31 moves by the power transmitted from the power source 32 via the power transmission component 33. In the first embodiment, in particular, the power transmission component 33 transmits the power generated by the power source 32 to the workbench 31 non-electrically. For example, the power transmission component 33 may also mechanically transmit the power generated by the power source 32 to the workbench 31. For example, the power transmission component 33 may also transmit the power generated by the power source 32 to the workbench 31 by mechanically connecting the power source 32 and the workbench 31. In this case, the power transmission component 33 is different from the power source 32 and does not have an ignition source. In order to mechanically transmit power, the power transmission component 33 may also have a component that can mechanically transmit power. As an example of a component capable of mechanically transmitting power, there can be cited a screw (for example, at least one of a trapezoidal screw, a ball screw, a sliding screw, and a triangular screw), a gear (for example, at least one of a spur gear, an internal gear combined with an external gear, a worm wheel combined with a worm, a bevel gear, a rack and pinion, a threaded gear, and a helical gear), a belt (for example, a flat belt, a round belt, a toothed belt), a pulley, a wire rope, a chain, a shaft, and at least one of a pulley. The power transmission component 33 uses at least one of these components to form a power transmission path extending from the power source 32 to the workbench 31. Specifically, the power transmission component 33 itself becomes the power transmission path, so the power transmission component 33 extends from the power source 32 to the workbench 31.

[0044] also, Figure 1 The processing system SYS1 has multiple (in Figure 1 Although the example shown is an example of two power sources 32, the processing system SYS1 may also have a single power source 32. Figure 1 The processing system SYS1 has multiple (in Figure 1Although the illustrated example shows two power transmission components 33 , the machining system SYS1 may include a single power transmission component 33 .

[0045] When the workbench 31 moves, the relative position between the workbench 31 and the processing device 2 (particularly the processing head 21) changes. Therefore, the workbench drive system composed of the power source 32 and the power transmission component 33 can function as a device for changing the relative position between the workbench 31 and the processing device 2 (particularly the processing head 21).

[0046] The worktable driving system can also move the worktable 31 along at least one of the X-axis, the Y-axis, and the Z-axis. When the worktable 31 moves along at least one of the X-axis, the Y-axis, and the Z-axis, the relative position of the worktable 31 and the processing device 2 (particularly the processing head 21) changes. Therefore, the worktable driving system composed of the power source 32 and the power transmission component 33 can function as a device for changing the relative position of the worktable 31 and the processing device 2 (particularly the processing head 21). In addition, when the worktable 31 moves along at least one of the X-axis and the Y-axis, the irradiation area EA and the supply area MA move along at least one of the X-axis and the Y-axis on the workpiece W, respectively.

[0047] In addition to at least one of the X-axis, the Y-axis, and the Z-axis, the worktable drive system can also move the worktable 31 along at least one rotational direction among the θX direction, the θY direction, and the θZ direction. In other words, the worktable drive system can also rotate the worktable 31 around at least one axis among the X-axis, the Y-axis, and the Z-axis. The worktable drive system can also change the posture of the worktable 31 around at least one axis among the X-axis, the Y-axis, and the Z-axis. When the worktable 31 moves along at least one rotational direction among the θX direction, the θY direction, and the θZ direction, the relative posture of the worktable 31 and the processing device 2 (especially the processing head 21) changes. Therefore, the worktable drive system composed of the power source 32 and the power transmission component 33 can function as a device for changing the relative posture of the worktable 31 and the processing device 2 (especially the processing head 21).

[0048] The light source 4 emits, for example, at least one of infrared light and ultraviolet light as the processing light EL. However, as the processing light EL, light of other wavelengths, for example, light of a wavelength in the visible region, may also be used. The processing light EL is a laser. In this case, the light source 4 may also include a laser light source such as a semiconductor laser. As an example of a laser light source, at least one of a laser diode (LD: Laser Diode), a fiber laser, a CO2 laser, a YAG laser, and an excimer laser may be cited. However, the processing light EL may not be a laser, and the light source 4 may also include any light source (for example, at least one of an LED (Light Emitting Diode: light emitting diode) and a discharge lamp).

[0049] The gas supply device 5 is a supply source of a purge gas for purging the chamber space 631IN. The purge gas is a gas that does not contain oxygen (or even if it contains oxygen, it only contains a very small amount of oxygen). The purge gas contains an inert gas. As an example of an inert gas, nitrogen or argon can be cited. The gas supply device 5 supplies the purge gas to the chamber space 63IN. As a result, the chamber space 63IN becomes a space purged by the purge gas. It should be noted that the gas supply device 5 can also be a gas cylinder storing an inert gas such as nitrogen and argon. When the inert gas is nitrogen, the gas supply device 5 can also be a nitrogen generator that generates nitrogen using the atmosphere as a raw material.

[0050] The gas supply device 5 may also supply the purge gas to the chamber space 63IN in such a manner that the oxygen concentration in the chamber space 63IN becomes less than a predetermined concentration. The predetermined concentration may be a fixed value (or a variable value) set for the processing system SYS1. In this case, the predetermined concentration may also be set to an oxygen concentration that can prevent an explosion (typically a dust explosion) caused by contact between the molding material M in the chamber space 63IN and the ignition source possessed by the power source 32. For example, the predetermined concentration may also be set to 0.5%.

[0051] The gas supply device 5 may supply the purge gas to the chamber space 63IN in such a manner that the oxygen concentration in the chamber space 63IN is lower than the oxygen concentration in the external space 64OUT. That is, the gas supply device 5 may supply the purge gas to the chamber space 63IN in such a manner that the oxygen concentration in the external space 64OUT is higher than the oxygen concentration in the chamber space 63IN.

[0052] The gas supply device 5 may supply the purge gas to the chamber space 63IN in such a manner that the pressure in the chamber space 63IN is higher than the pressure in the space outside the chamber space 63IN (for example, the external space 64OUT). That is, the gas supply device 5 may supply the purge gas to the chamber space 63IN in such a manner that the pressure in the space outside the chamber space 63IN (for example, the external space 64OUT) is lower than the pressure in the chamber space 63IN.

[0053] The housing 6 is a storage device that stores at least a portion of each of the processing device 2 and the workbench device 3 in the chamber space 63IN which is the internal space of the housing 6. The housing 6 includes a partition member 61 that defines the chamber space 63IN. The partition member 61 is a member that separates (i.e. isolates) the chamber space 63IN from the external space 64OUT of the housing 6. The partition member 61 may also be referred to as a partition member. The partition member 61 is a member disposed between the chamber space 63IN and the external space 64OUT. The partition member 61 faces the chamber space 63IN across its inner wall 61IS and faces the external space 64OUT across its outer wall 61OS. In this case, the space surrounded by the partition member 61 (more specifically, the space surrounded by the inner wall 61IS of the partition member 61) becomes the chamber space 63IN. In addition, a door that can be opened and closed may also be provided on the partition member 61. The door may be opened when the workpiece W is supported on the work table 31 and when the workpiece W and / or the molded object is removed from the work table 31 , and may be closed during molding.

[0054] The power source 32 is arranged in the external space 64OUT. That is, the power source 32 is not arranged in the chamber space 63IN. The power source 32 is isolated from the chamber space 63IN by the partition member 61. The power source 32 is arranged at a position isolated from the chamber space 63IN by the partition member 61. In this case, the partition member 61 becomes a member that isolates the power source 32 from the chamber space 63IN by surrounding the chamber space 63IN.

[0055] When the power source 32 is arranged in the external space 64OUT, the ignition source possessed by the power source 32 (for example, the above-mentioned conductive portion) is also arranged in the external space 64OUT. That is, the ignition source possessed by the power source 32 is not arranged in the chamber space 63IN. The ignition source possessed by the power source 32 is isolated from the chamber space 63IN by the partition component 61. The ignition source possessed by the power source 32 is arranged at a position isolated from the chamber space 63IN by the partition component 61. In this case, the partition component 61 can function as a component that isolates the ignition source possessed by the power source 32 from the chamber space 63IN by surrounding the chamber space 63IN (that is, isolates the chamber space 63IN from the ignition source possessed by the power source 32). In addition, the partition component 61 prevents the molding material M supplied to the chamber space 63IN from leaking into the external space 64OUT by surrounding the chamber space 63IN.

[0056] As a result, the modeling material M (particularly the modeling material M in the form of powder or granular material) supplied to the chamber space 63IN is prevented from contacting the ignition source of the power source 32 disposed in the external space 64OUT. In addition, "the contact of the modeling material M with the ignition source" includes not only "the contact of the modeling material M with the ignition source itself" but also "the contact of the modeling material M with the electric spark generated in the ignition source". Therefore, the explosion (typically a dust explosion) caused by the contact of the modeling material M in the chamber space 63IN with the ignition source of the power source 32 can be prevented.

[0057] In this case, the housing 6 may also have an explosion-proof structure capable of preventing explosion caused by contact between the molding material M in the chamber space 63IN and the ignition source of the power source 32. For example, the housing 6 may also have an intrinsically safe explosion-proof structure capable of preventing explosion of the molding material M caused by sparks or high-temperature parts generated by the ignition source of the power source 32. For example, the housing 6 may also have an increased safety explosion-proof structure that increases the safety of the structure in a manner that does not generate sparks or high-temperature parts in the chamber space 63IN where sparks or high-temperature parts should not be generated.

[0058] However, the power generated by the power source 32 in the external space 64OUT needs to be transmitted to the workbench 31 arranged in the chamber space 63IN. Therefore, the power transmission component 33 transmits the power generated by the power source 32 in the external space 64OUT to the workbench 31 arranged in the chamber space 63IN. That is, the power transmission component 33 transmits power from the external space 64OUT to the chamber space 63IN. In this case, at least a part of the power transmission component 33 is arranged in the chamber space 63IN. Even if at least a part of the power transmission component 33 is arranged in the chamber space 63IN, as described above, since the power transmission component 33 does not have an ignition source, an explosion in the chamber space 63IN can be prevented.

[0059] In order to transmit power from the external space 64OUT to the chamber space 63IN, an opening 65 is formed in the partition member 61. The opening 65 is a through hole that penetrates the partition member 61 from the external space 64OUT toward the chamber space 63IN. A part of the power transmission member 33 is arranged in the opening 65. That is, the power transmission member 33 extends from the external space 64OUT to the chamber space 63IN through the opening 65. As a result, the power transmission member 33 can transmit power from the external space 64OUT to the chamber space 63IN through the opening 65. That is, the power generated by the power source 32 in the external space 64OUT is transmitted to the workbench 31 arranged in the chamber space 63IN through the opening 65.

[0060] When an opening 65 is formed in the partition member 61, the chamber space 63IN and the external space 64OUT are connected via the opening 65. Therefore, when there is a gap (especially a relatively large gap) between the wall surface of the partition member 61 that defines the opening 65 and the power transmission member 33 arranged at the opening 65, the modeling material M in the chamber space 63IN and the ignition source of the power source 32 may come into contact via the opening 65. Therefore, the opening 65 may also be sealed by a sealing member 66. The sealing member 66 is a member that seals between the wall surface of the partition member 61 that defines the opening 65 and the power transmission member 33 arranged at the opening 65. Specifically, the sealing member 66 is a member for filling the gap between the wall surface of the partition member 61 that defines the opening 65 and the power transmission member 33 arranged at the opening 65. It should be noted that the "filling of the gap between the wall surface of the partition component 61 and the power transmission component 33" mentioned here may refer to completely eliminating the gap between the wall surface of the partition component 61 and the power transmission component 33 (i.e., blocking), or may refer to reducing the gap between the wall surface of the partition component 61 and the power transmission component 33 to a degree that can seal the chamber space 63IN. That is, the sealing component 66 can function as a component that seals the chamber space 63IN (i.e., maintains the airtightness of the chamber space 63IN). More specifically, the sealing component 66 seals the chamber space 63IN together with the partition component 61 and the power transmission component 33. In addition, as an example of the sealing component 66, at least one of a rubber seal, an oil seal, and a labyrinth seal can be listed.

[0061] When the opening 65 is sealed by the sealing member 66, the modeling material M in the chamber space 63IN is prevented from contacting the ignition source of the power source 32 through the opening 65. That is, the sealing member 66 can function as a member for preventing the modeling material M in the chamber space 63IN from contacting the ignition source of the power source 32 through the opening 65. Specifically, for example, the sealing member 66 can function together with the partition member 61 and the power transmission member 33 as a member for preventing the electric spark generated by the power source 32 in the external space 64OUT from entering the chamber space 63IN to which the modeling material M is supplied through the opening 65. For example, the sealing member 66 can function together with the partition member 61 and the power transmission member 33 as a member for preventing the modeling material M supplied to the chamber space 63IN from entering the external space 64OUT in which the power source 32 including the ignition source is arranged through the opening 65.

[0062] The control device 7 controls the operation of the machining system SYS1. The control device 7 may include, for example, a CPU (Central Processing Unit) (or a GPU (Graphics Processing Unit) in addition to or instead of the CPU) and a memory. The control device 7 functions as a device that controls the operation of the machining system SYS1 by executing a computer program by the CPU. The computer program is a computer program for causing the control device 7 (for example, the CPU) to perform (i.e., execute) the operation to be performed by the control device 7, which will be described later. That is, the computer program is a computer program for causing the control device 7 to perform the function of causing the machining system SYS1 to perform the operation to be described later. The computer program executed by the CPU may be recorded in a memory (i.e., a recording medium) possessed by the control device 7, or in any storage medium (for example, a hard disk, a semiconductor memory) that is built into the control device 7 or can be externally mounted on the control device 7. Alternatively, the CPU may download the computer program to be executed from a device external to the control device 7 via a network interface.

[0063] For example, the control device 7 may also control the emission mode of the processing light EL of the irradiation optical system 211. The emission mode may also include, for example, at least one of the intensity of the processing light EL and the emission timing of the processing light EL. In the case where the processing light EL is a pulse light, the emission mode may also include, for example, the ratio of the length of the emission time of the pulse light to the emission period of the pulse light (the so-called duty cycle). In addition, the emission mode may also include, for example, the length of the emission time of the pulse light itself and the emission period itself. In addition, the control device 7 may also control the movement mode of the workbench 31 based on the power source 32. The movement mode may also include, for example, at least one of the movement amount, the movement speed, the movement direction and the movement timing. Furthermore, the control device 7 may also control the supply mode of the molding material M based on the material supply device 1. The supply mode of the molding material M based on the material nozzle 212 is mainly determined by the supply mode of the molding material M based on the material supply device 1. Therefore, controlling the supply mode of the molding material M based on the material supply device 1 can be regarded as equivalent to controlling the supply mode of the molding material M based on the material nozzle 212. The supply method may include, for example, at least one of the supply amount (particularly, the supply amount per unit time) and the supply timing.

[0064] The control device 7 may not be arranged inside the processing system SYS1, for example, it may be arranged outside the processing system SYS1 as a server or the like. In this case, the control device 7 and the processing system SYS1 may be connected via a wired or wireless network (or a data bus and / or a communication line). As a wired network, for example, a network using a serial bus interface represented by at least one of IEEE1394, RS-232x, RS-422, RS-423, RS-485 and USB may be applied. As a wired network, a network using a parallel bus interface may also be applied. As a wired network, a network using an interface based on Ethernet (registered trademark) represented by at least one of 10BASE-T, 100BASE-TX and 1000BASE-T may also be applied. As a wireless network, a network using radio waves may also be applied. As an example of a network using radio waves, a network conforming to IEEE802.1x (for example, at least one of wireless LAN and Bluetooth (registered trademark)) is cited. As a wireless network, a network using infrared rays may also be used. As a wireless network, a network using optical communication may also be used. In this case, the control device 7 and the processing system SYS1 may also be configured to be able to send and receive various information via a network. In addition, the control device 7 may also be able to send information such as instructions and control parameters to the processing system SYS1 via the network. The processing system SYS1 may also have a receiving device that receives information such as instructions and control parameters from the control device 7 via the above-mentioned network.

[0065] In addition, a part of the control device 7 may be provided inside the processing system SYS1, and another part may be provided outside the processing system SYS1.

[0066] In addition, as a recording medium for recording a computer program executed by the CPU, at least one of CD-ROM, CD-R, CD-RW, floppy disk, MO, DVD-ROM, DVD-RAM, DVD-R, DVD+R, DVD-RW, DVD+RW and Blu-ray (registered trademark) and other optical disks, magnetic media such as magnetic tapes, optical magnets, semiconductor memories such as USB memories, and other arbitrary media capable of storing programs may be used. The recording medium may also include a device capable of recording a computer program (for example, a general-purpose device or a dedicated device installed in a state capable of executing a computer program in at least one of software and firmware). Furthermore, each process and function included in the computer program may be realized by a logic processing block realized in the control device 7 (i.e., a computer) by executing the computer program, or by hardware such as a predetermined gate array (FPGA, ASIC) possessed by the control device 7, or may be realized in the form of a mixture of a logic processing block and a partial hardware module that realizes a part of the elements of the hardware.

[0067] (1-2) Specific Example of the Workbench Device 3

[0068] Next, a specific example of a workbench device 3 in which a power source 32 is arranged in the external space 64OUT is described. In the first embodiment, the processing system SYS1 can use at least one of the first workbench device 3a, the second workbench device 3b, the third workbench device 3c and the fourth workbench device 3d as the workbench device 3. Therefore, the following describes the structures of the first workbench device 3a to the fourth workbench device 3d in turn. In addition, the first workbench device 3a to the fourth workbench device 3d described below are just examples. That is, the processing system SYS1 may also include a workbench device 3 having a structure different from that of the first workbench device 3a to the fourth workbench device 3d.

[0069] (1-2-1) Structure of the First Workbench Device 3a

[0070] First, refer to Figure 3 and Figure 4 The structure of the first stage device 3a will be described. Figure 3 It is a perspective view showing the structure of the first stage device 3a in which a part of the partition member 61a is omitted from the illustration. Figure 4 It is a perspective view showing the structure of the first stage device 3a in which a part of the partition member 61b is not omitted.

[0071] like Figure 3 as well as Figure 4As shown, the first workbench device 3a has a workbench 31a as an example of a workbench 31. The first workbench device 3a also has three motors 32a (specifically, motor 32a#1, motor 32a#2, and motor 32a#3) as examples of power sources 32. The first workbench device 3a also has three power transmission components 33a (specifically, power transmission component 33a#1, power transmission component 33a#2, and power transmission component 33a#3) as examples of power transmission components 33. The power transmission components 33a#1 to 33a#3 transmit the power generated by the motors 32a#1 to 32a#3 to the workbench 31a.

[0072] The power transmission component 33a#1 has a ball screw (or a sliding screw, the same below) 330a#1 and a connecting component 333a#1. The ball screw 330a#1 has a shaft component 331a#1 and a nut 332a#1. The power transmission component 33a#2 has a ball screw 330a#2 and a connecting component 333a#2. The ball screw 330a#2 has a shaft component 331a#2 and a nut 332a#2. The power transmission component 33#3 has a ball screw 330a#2 and a connecting component 333a#3. The ball screw 330a#3 has a shaft component 331a#3 and a nut 332a#3.

[0073] The shaft components 331a#1 to 331a#3 are respectively threaded shafts with thread teeth formed on the side. The shaft components 331a#1 to 331a#3 are respectively configured in a manner extending along the Z-axis direction. The shaft components 331a#1 to 331a#3 are respectively connected to the rotating shafts of the motors 32a#1 to 32a#3. The shaft components 331a#1 to 331a#3 are respectively rotated around the Z-axis by the motors 32a#1 to 32a#3. As a result, the nuts 332a#1 to 332a#3 respectively embedded in the shaft components 331a#1 to 331a#3 move along the Z-axis direction. Therefore, the shaft components 331a#1 to 331a#3 transmit the power generated by the motors 32a#1 to 32a#3 respectively along the Z-axis direction. The shaft members 331a#1 to 331a#3 are respectively arranged at the vertices of the region of the shape of a triangle (typically an equilateral triangle) or in the vicinity of the vertices along the XY plane. Therefore, the motors 32a#1 to 32a#3 are also arranged at the vertices of the region of the shape of a triangle (typically an equilateral triangle) or in the vicinity of the vertices along the XY plane.

[0074] One end of the connecting parts 333a#1 to 333a#3 is connected to the nuts 332a#1 to 332a#3. The other end of each of the connecting parts 333a#1 to 333a#3 is connected to the workbench 31a. In cooperation with the movement of the nuts 332a#1 to 332a#3 in the Z-axis direction, one end of the connecting parts 333a#1 to 333a#3 also moves along the Z-axis direction. As a result, the other ends of the connecting parts 333a#1 to 333a#3 move along at least one of the X-axis, the Y-axis and the Z-axis in cooperation with the movement of one end of the connecting parts 333a#1 to 333a#3. As a result, the workbench 31a moves along at least one of the X-axis, the Y-axis, the Z-axis, the θX direction, the θY direction and the θZ direction. The processing system SYS1 including such power transmission parts 33a#1 to 33a#3 is called a so-called triangle 3D printer.

[0075] When the processing system SYS1 includes the first workbench device 3a, the processing system SYS1 includes a housing 6a corresponding to the first workbench device 3a as the housing 6. Specifically, the housing 6a has a top surface component 611a, a bottom component 612a, a support component 613a#1, a support component 613a#2, a support component 613a#3, a side wall component 614a#1, a side wall component 614a#2, and a side wall component 614a#3, which respectively constitute a part of the partition component 61. The top surface component 611a is a component that defines the boundary of the upper side (i.e., +Z side) of the chamber space 63IN. The top surface component 611a is, for example, a plate-shaped component along the XY plane. The bottom component 612a is a component that defines the boundary of the lower side (i.e., -Z side) of the chamber space 63IN. The bottom component 612a is arranged below the top surface component 611a. The bottom component 612a is, for example, a plate-shaped component along the XY plane. The support members 613a#1 to 613a#3 are columnar members extending from the bottom member 612a toward the top member 611a. That is, the support members 613a#1 to 613a#3 are columnar members extending along the Z-axis direction. The side wall members 614a#1 to 614a#3 are members defining the lateral boundaries of the chamber space 63IN. The side wall members 614a#1 to 614a#3 are plate-like members extending along the Z-axis. The side wall member 614a#1 is configured to block the opening between the top member 611a, the bottom member 612a, the support member 613a#1, and the support member 613#2. However, in Figure 363A, 63B, 64B, 65C, 66C, 67C, 68C, 69C, 70C, 71C, 72C, 73C, 74C, 76C, 77C, 78C, 79C, 80C, 81C, 82C, 83C, 84C, 78C, 79C, 81C, 66C, 78C, 79C, 81C, 71C, 72C, 73C, 76C, 78C, 79C, 81C, 78C, 79C, 81C, 73C, 74C, 76 ... In addition, in order to maintain the airtightness of the chamber space 63IN (as a result, to prevent the sparks from the motor 32a from invading the chamber space 63IN), the gaps between the top surface part 611a, the bottom part 612a, the support part 613a#1, the support part 613a#2, the support part 613a#3, the side wall part 614a#1, the side wall part 614a#2, and the side wall part 614a#3 can also be sealed by a sealing part.

[0076] The power transmission components 33a#1 to 33a#3 are arranged in the chamber space 63IN. On the other hand, the motors 32a#1 to 32a#3 are arranged in the external space 64OUT. However, the shaft components 331a#1 to 331a#3 extend from the chamber space 63IN toward the rotation axes of the motors 32a#1 to 32a#3 via the openings 65a#1 to 65a#3 formed in the top surface component 611a, respectively. The openings 65a#1 to 65a#3 are through holes extending in the Z-axis direction in a manner that penetrates the top surface component 611a in the Z-axis direction (that is, penetrates the top surface component 611a in a direction intersecting with the surface of the plate-shaped top surface component 611a). Therefore, a portion of each of the shaft components 331a#1 to 331a is arranged in the external space 64OUT. However, when the rotation shafts of the motors 32a#1 to 32a#3 extend from the external space 64OUT to the chamber space 63IN via the openings 65a#1 to 65a#3, the shaft members 331a#1 to 331a may not be arranged in the external space 64OUT.

[0077] The top surface member 611a has a triangular shape (typically an equilateral triangle) in the plane along the XY plane. In addition, the bottom member 612a, which is opposite to the top surface member 611a along the Z-axis direction, also has a triangular shape (typically an equilateral triangle) in the plane along the XY plane. Motors 32a#1 to 32a#3 are respectively arranged at the three vertices of the triangle of the top surface member 611a or in the vicinity of the three vertices. Openings 65a#1 to 65a#3 as an example of the opening 65 are respectively formed at the three vertices of the triangle of the top surface member 611a or in the vicinity of the three vertices. The openings 65a#1 to 65a#3 are respectively sealed by sealing members 66a#1 to 66a#3 as an example of the sealing member 66. Here, even if the shaft members 331a#1 to 331a#3 of the power transmission members 33a#1 to 33a#3 rotate, the intervals between the shaft members 331a#1 to 331a#3 and the openings 65a#1 to 65a#3 do not change, so it is difficult for the sealing members 66a#1 to 66a#3 to be incompletely sealed. In addition, the top surface member 611a may have a shape other than a triangle. For example, it may have a rectangular, polygonal, or circular shape. In this case, the shape of the chamber space 63IN may also be a quadrangular prism, a multi-prism, or a cylinder.

[0078] (1-2-2) Structure of the Second Workbench Device 3b

[0079] Next, refer to Figure 5 and Figure 6 The structure of the second stage device 3b will be described. Figure 5 It is a perspective view showing the structure of the second stage device 3b in which a part of the partition member 61b is omitted from the illustration. Figure 6 It is a perspective view showing the structure of the second stage device 3b in which a part of the partition member 61b is not omitted. It should be noted that the same components as those of the first stage device 3a are denoted by the same reference numerals and detailed description thereof is omitted.

[0080] like Figure 5 as well as Figure 6 As shown, the second workbench device 3b has a workbench 31b as an example of the workbench 31. The second workbench device 3b has three motors 32a (specifically, motors 32a#1 to 32a#3) similarly to the first workbench device 3a. The second workbench device 3b also has three power transmission components 33b (specifically, power transmission component 33b#1, power transmission component 33b#2, and power transmission component 33b#3) as examples of the power transmission components 33. The power transmission components 33b#1 to 33b#3 transmit the power generated by the motors 32a#1 to 32a#3 to the workbench 31b, respectively.

[0081] The power transmission component 33b#1 has a transmission shaft 331b#1, a bevel gear mechanism 332b#1, a transmission shaft 333b#1, and an arm mechanism 334b#1. The power transmission component 33b#2 has a transmission shaft 331b#2, a bevel gear mechanism 332b#2, a transmission shaft 333b#2, and an arm mechanism 334b#2. The power transmission component 33b#3 has a transmission shaft 331b#3, a bevel gear mechanism 332b#3, a transmission shaft 333b#3, and an arm mechanism 334b#3. In addition, the transmission shaft can also be called a shaft component.

[0082] The transmission shafts 331b#1 to 331b#3 are respectively arranged in a manner extending along the Z-axis direction. The transmission shafts 331b#1 to 331b#3 are respectively connected to the rotation axes of the motors 32a#1 to 32a#3. The transmission shafts 331b#1 to 331b#3 are respectively rotated around the Z-axis by the motors 32a#1 to 32a#3. Therefore, the transmission shafts 331b#1 to 331b#3 transmit power along the Z-axis direction. The transmission shafts 331b#1 to 331b#3 are respectively arranged at the vertices of the areas in the shape of a triangle (typically an equilateral triangle) in the plane along the XY plane or near the vertices.

[0083] The rotation of the transmission shafts 331b#1 to 331b#3 around the Z axis is transmitted to the transmission shafts 333b#1 to 333b#3 through the bevel gear mechanisms 332b#2 to 332b#3, respectively. As a result, the transmission shafts 333b#1 to 333b#3 rotate around the axis intersecting the Z axis, respectively. Therefore, the transmission shafts 333b#1 to 333b#3 transmit power along the direction intersecting the Z axis direction, respectively. The rotation of the transmission shafts 333b#1 to 333b#3 is transmitted to the arm mechanisms 334b#1 to 334b#3, respectively. Specifically, the arm mechanism 334b#1 has a base component 3341b#1, a joint component 3342b#1, a connecting rod component 3343b#1, a joint component 3344b#1, and a connecting rod component 3345b#1. The base component 3341b is fixed to the bottom component 612a. The base component 3341b#1 and the connecting rod component 3343b#1 are connected through the joint component 3342b#1. The transmission shaft 333b#1 is connected to the joint component 3342b#1. Therefore, the rotation of the transmission shaft 333b#1 is transmitted to the joint component 3342b#1. Here, the indirect component 3342b is fixed to the connecting rod component 3343b. Therefore, the connecting rod component 3343b#1 moves with the rotation of the transmission shaft 333b#1. The connecting rod component 3343b#1 is connected to the connecting rod component 3345b#1 via the joint component 3344b#1. Therefore, the connecting rod component 3345b#1 moves with the movement of the connecting rod component 3343b#1. Moreover, the connecting rod component 3345b#1 is connected to the workbench 31b. As a result, the workbench 31b moves with the movement of the connecting rod component 3345b#1. Although not described in detail for simplicity of description, arm mechanisms 334b#2 and 334b#3 also have the same structure as arm mechanism 334b#1. Therefore, the worktable 31b moves along at least one of the X-axis, Y-axis, Z-axis, θX direction, θY direction, and θZ direction in coordination with the operation of arm mechanisms 334b#1 to 334b#3.

[0084] When the processing system SYS1 includes the second workbench device 3b, the processing system SYS1 includes a housing 6b corresponding to the second workbench device 3b as the housing 6. In addition, the housing 6b may be the same as the above-mentioned housing 6a, so its detailed description is omitted. However, when the processing system SYS1 has the second workbench device 3b, the transmission shafts 331b#1 to 331b#3 extend from the chamber space 63IN toward the rotation axis of the motor 32a#1 to 32a#3 through the openings 65a#1 to 65a#3, respectively, instead of the shaft members 331a#1 to 331a#3.

[0085] (1-2-3) Structure of the third workbench device 3c

[0086] Next, refer to Figure 7 and Figure 8The structure of the third stage device 3c will be described. Figure 7 It is a perspective view showing the structure of the third stage device 3c in which a part of the partition member 61c is omitted. Figure 8 It is a perspective view showing the structure of the third stage device 3c without omitting a part of the partition member 61c.

[0087] like Figure 7 as well as Figure 8 As shown, the third workbench device 3c has a workbench 31c as an example of the workbench 31. The third workbench device 3c also has two motors 32c (specifically, motor 32c#1 and motor 32c#2) as examples of the power source 32. The third workbench device 3c also has two power transmission components 33c (specifically, power transmission component 33c#1 and power transmission component 33c#2) as examples of the power transmission component 33. The power transmission components 33c#1 to 33c#2 transmit the power generated by the motors 32c#1 to 32c#2 to the workbench 31c, respectively. The third workbench device 3c also has a movable base 333c and a movable base 334c.

[0088] The power transmission component 33c#1 includes a belt 3311c#1, a belt 3312c#1, a transmission pulley 3321c#1, a curved pulley 3322c#1, a curved pulley 3323c#1, a curved pulley 3324c#1, and a curved pulley 3325c#1. The power transmission component 33c#2 includes a belt 3311c#2, a belt 3312c#2, a transmission pulley 3321c#2, a curved pulley 3322c#2, a curved pulley 3323c#2, a curved pulley 3324c#2, and a curved pulley 3325c#2.

[0089] Belt 3311c#1 connects the rotating shaft of motor 32c#1 and the rotating shaft of transmission pulley 3321c#1. Figure 7 as well as Figure 8In the example shown, the rotating shaft of the motor 32c#1 and the rotating shaft of the transmission pulley 3321c#1 are parallel to the Z axis, respectively, and the belt 3311c#1 extends along the X axis direction and connects the rotating shaft of the motor 32c#1 and the rotating shaft of the transmission pulley 3321c#1 along the X axis direction. Therefore, the belt 3311c#1 moves along the X axis direction as the rotating shaft of the motor 32c#1 rotates. As a result, as the belt 3311c#1 moves, the transmission pulley 3321c#1 rotates around the Z axis. The rotation of the transmission pulley 3321c#1 is transmitted to the belt 3312c#1. One end of the belt 3312c#1 is connected to the end of the -Y side of the workbench 31c. The other end of the belt 3312c#1 is connected to the end of the +Y side of the workbench 31c. The belt 3312c#1 extends from the end of the -Y side of the workbench 31c to the end of the +Y side of the workbench 31c via the curved pulley 3322c#1, the transmission pulley 3321c#1, the curved pulley 3323c#1, the curved pulley 3324c#1, and the curved pulley 3325c#1 in sequence. In this case, the belt 3312c#1 extends along at least one of a plurality of directions on the XY plane (for example, at least one of the X-axis direction and the Y-axis direction).

[0090] Belt 3311c#2 connects the rotating shaft of motor 32c#2 and the rotating shaft of transmission pulley 3321c#2. Figure 7 as well as Figure 8 In the example shown, the rotation axis of the motor 32c#2 and the rotation axis of the transmission pulley 3321c#2 are parallel to the Z axis, respectively, and the belt 3311c#2 extends along the X axis direction and connects the rotation axis of the motor 32c#2 and the rotation axis of the transmission pulley 3321c#2 along the X axis direction. Therefore, the belt 3311c#2 moves along the X axis direction as the rotation axis of the motor 32c#2 rotates. As a result, as the belt 3311c#2 moves, the transmission pulley 3321c#2 rotates around the Z axis. The rotation of the transmission pulley 3321c#2 is transmitted to the belt 3312c#2. One end of the belt 3312c#2 is connected to the end of the -Y side of the workbench 31c. The other end of the belt 3312c#2 is connected to the end of the +Y side of the workbench 31c. The belt 3312c#2 extends from the end of the +Y side of the workbench 31c to the end of the -Y side of the workbench 31c via the curved pulley 3322c#2, the transmission pulley 3321c#2, the curved pulley 3323c#2, the curved pulley 3324c#2, and the curved pulley 3325c#2 in sequence. In this case, the belt 3312c#2 extends along at least one of a plurality of directions on the XY plane (for example, at least one of the X-axis direction and the Y-axis direction).

[0091] The movable base 333c is provided with bending pulleys 3322c#1 and 3325c#2. The movable base 333c can move along the XY plane (for example, along at least one of the X-axis direction and the Y-axis direction) by the force applied from the belt 3312c#1 to the bending pulley 3322c#1 and / or the force applied from the belt 3312c#2 to the bending pulley 3325c#2.

[0092] The movable base 334c is provided with bending pulleys 3325c#1 and 3322c#2. The movable base 334c can move along the XY plane (for example, along at least one of the X-axis direction and the Y-axis direction) by the force applied from the belt 3312c#1 to the bending pulley 3325c#1 and / or the force applied from the belt 3312c#2 to the bending pulley 3322c#2.

[0093] In such a table device 3c, the moving direction of the table 31c is determined by the rotation directions of the rotation shafts of the motors 32c#1 and 32c#2.

[0094] Specifically, when the rotation axes of the motors 32c#1 and 32c#2 rotate clockwise around the Z axis, the power transmission component 33c#1 transmits the power generated by the motor 32c#1 to the workbench 31c as a force that acts to move the workbench 31c toward the -Y side, and the power transmission component 33c#2 transmits the power generated by the motor 32c#2 to the workbench 31c as a force that acts to move the workbench 31c toward the -Y side. As a result, the workbench 31c moves toward the -Y side.

[0095] When the rotation axes of the motors 32c#1 and 32c#2 rotate counterclockwise around the Z axis, the power transmission component 33c#1 transmits the power generated by the motor 32c#1 to the workbench 31c as a force that acts to move the workbench 31c toward the +Y side, and the power transmission component 33c#2 transmits the power generated by the motor 32c#2 to the workbench 31c as a force that acts to move the workbench 31c toward the +Y side. As a result, the workbench 31c moves toward the +Y side.

[0096] When the rotation axis of motor 32c#1 rotates clockwise around the Z axis, and the rotation axis of motor 32c#2 rotates counterclockwise around the Z axis, power transmission component 33c#1 transmits the power generated by motor 32c#1 to workbench 31c as a force that acts to move workbench 31c toward the -Y side, and power transmission component 33c#2 transmits the power generated by motor 32c#2 to workbench 31c as a force that acts to move workbench 31c toward the +Y side. Therefore, the force transmitted to workbench 31c via power transmission component 33c#1 and the force transmitted to workbench 31c via power transmission component 33c#2 cancel each other out. As a result, workbench 31c does not move along the Y axis direction. On the other hand, since the workbench 31c does not move due to the force transmitted to the workbench 31c via the power transmission component 33c#1, the force acts on the curved pulleys 3322c#1 and 3325c#1 as a force that acts to move the curved pulleys 3322c#1 and 3325c#1 toward the +X side. Similarly, since the workbench 31c does not move due to the force transmitted to the workbench 31c via the power transmission component 33c#2, the force acts on the curved pulleys 3322c#2 and 3325c#2 as a force that acts to move the curved pulleys 3322c#2 and 3325c#2 toward the +X side. As a result, the movable base 333c equipped with the curved pulleys 3322c#1 and 3325c#2 and the movable base 334c equipped with the curved pulleys 3325c#1 and 3322c#2 move toward the +X side. As a result, the table 31 c moves toward the +X side in accordance with the movement of the movable bases 333 c and 334 c.

[0097] When the rotation axis of motor 32c#1 rotates counterclockwise around the Z axis, and the rotation axis of motor 32c#2 rotates clockwise around the Z axis, power transmission component 33c#1 transmits the power generated by motor 32c#1 to workbench 31c as a force that acts to move workbench 31c toward the +Y side, and power transmission component 33c#2 transmits the power generated by motor 32c#2 to workbench 31c as a force that acts to move workbench 31c toward the -Y side. Therefore, the force transmitted to workbench 31c via power transmission component 33c#1 and the force transmitted to workbench 31c via power transmission component 33c#2 cancel each other out. As a result, workbench 31c does not move along the Y axis direction. On the other hand, since the workbench 31c does not move due to the force transmitted to the workbench 31c via the power transmission component 33c#1, the force acts on the bending pulleys 3322c#1 and 3325c#1 as a force that moves the bending pulleys 3322c#1 and 3325c#1 toward the -X side. Similarly, since the workbench 31c does not move due to the force transmitted to the workbench 31c via the power transmission component 33c#2, the force acts on the bending pulleys 3322c#2 and 3325c#2 as a force that moves the bending pulleys 3322c#2 and 3325c#2 toward the -X side. As a result, the movable base 333c equipped with the bending pulleys 3322c#1 and 3325c#2 and the movable base 334c equipped with the bending pulleys 3325c#1 and 3322c#2 move toward the -X side. As a result, the table 31c moves toward the -X side in accordance with the movement of the movable bases 333c and 334c.

[0098] When the processing system SYS1 includes the third workbench device 3c, the processing system SYS1 includes a housing 6c corresponding to the third workbench device 3c as the housing 6. Specifically, the housing 6c has a top surface member 611c, a bottom member 612c, and a side wall member 613c, each of which constitutes a part of the partition member 61. The top surface member 611c is a member that defines the boundary of the upper side (i.e., the +Z side) of the chamber space 63IN. The top surface member 611c is, for example, a plate-shaped member along the XY plane. However, in Figure 7, the description of the top surface component 611c is omitted. The bottom component 612c is a component that defines the boundary of the bottom (i.e., -Z side) of the chamber space 63IN. The bottom component 612c is arranged below the top surface component 611c. The bottom component 612c is, for example, a plate-shaped component along the XY plane. The side wall component 613c is a component that defines the boundary of the side of the chamber space 63IN. The side wall component 613c is arranged in a manner to surround the space between the top surface component 611c and the bottom component 612c. The side wall component 613c is a cylindrical (e.g., square cylindrical) component extending along the Z axis. As a result, the space surrounded by the top surface component 611c, the bottom component 612c, and the side wall component 613c is defined as the chamber space 63IN. Furthermore, in order to maintain the airtightness of the chamber space 63IN (and thereby prevent the spark from the motor 32c from entering the chamber space 63IN), the gaps between the top surface member 611c, the bottom member 612c, and the side wall member 613c may be sealed by a sealing member.

[0099] The chamber space 63IN is provided with power transmission components 33c#1 to 33c#2. On the other hand, the motors 32c#1 to 32c#2 are provided in the external space 64OUT. However, the belts 3311c#1 and 3311c#2 extend from the chamber space 63IN toward the rotation axes of the motors 32c#1 and 32c#2 via the openings 65c#1 and 65c#2 formed in the side wall component 613c, respectively. The openings 65c#1 and 65c#2 are through holes extending in the X-axis direction in such a manner as to penetrate the side wall component 613c in the X-axis direction (i.e., penetrate the side wall component 613c in a direction intersecting with the surface of the side wall component 613c (i.e., the side surface of the housing 6c)). Therefore, a portion of each of the belts 3311c#1 and 3311c#2 is provided in the external space 64OUT. In addition, the openings 65c#1 to 65c#2 are sealed by sealing members 66c#1 to 66c#2, which are examples of the sealing member 66. Here, even if the belts 3311c#1 and 3311c#2 of the power transmission members 33c#1 to 33c#2 are driven, the intervals between the belts 3311c#1 and 3311c#2 and the openings 65a#1 and 65a#2 do not change, so it is difficult for the sealing members 66a#1 and 66a#2 to be incompletely sealed.

[0100] (1-2-4) Structure of the fourth workbench device 3d

[0101] Next, refer to Fig. 9 and Fig.10 The structure of the fourth stage device 3d will be described. Fig. 9 It is a perspective view showing the structure of the fourth stage device 3d in which a part of the partition member 61d is omitted. Fig.10It is a perspective view showing the structure of the fourth stage device 3d in which a part of the partition member 61d is not omitted.

[0102] like Fig. 9 as well as Fig.10 As shown, the fourth workbench device 3d has a workbench 31d as an example of the workbench 31. The fourth workbench device 3d also has two motors 32d (specifically, motor 32d#1 and motor 32d#2) each as an example of the power source 32. The fourth workbench device 3d also has two power transmission components 33d (specifically, power transmission component 33d#1 and power transmission component 33d#2) each as an example of the power transmission component 33. The power transmission components 33d#1 to 33d#2 transmit the power generated by the motors 32d#1 to 32d#2 to the workbench 31d.

[0103] The power transmission component 33d#1 includes a belt 3311d#1, a belt 3312d#1, a belt 3313d#1, a pulley 3321d#1, a pulley 3322d#1, a pulley 3323d#1, a pulley 3324d#1, a pulley 3325d#1, a transmission shaft 3331d#1, a transmission shaft 3332d#1, a movable component 3341d#1, a movable component 3342d#1, a connecting component 3351d#1, and a connecting component 332d#1. The power transmission component 33d#2 includes a belt 3311d#2, a belt 3312d#2, a belt 3313d#2, a pulley 3321d#2, a pulley 3322d#2, a pulley 3323d#2, a pulley 3324d#2, a pulley 3325d#2, a transmission shaft 3331d#2, a transmission shaft 3332d#2, a movable component 3341d#2, a movable component 3342d#2, a connecting component 3351d#2, and a connecting component 332d#2.

[0104] Belt 3311d#1 connects the rotating shaft of motor 32d#1 and pulley 3321d#1. Fig. 9 and Fig.10In the example shown, the rotation axis of the motor 32d#1 and the rotation axis of the pulley 3321d#1 are respectively parallel to the X-axis, and the belt 3311d#1 extends along the Y-axis direction, and connects the rotation axis of the motor 32d#1 and the rotation axis of the pulley 3321d#1 along the Y-axis direction. Therefore, the belt 3311d#1 moves along the Y-axis direction as the rotation axis of the motor 32d#1 rotates. As a result, as the belt 3311#1 moves, the pulley 3321d#1 rotates around the X-axis (or around an axis intersecting the Z-axis). The pulley 3321d#1 is connected to a transmission shaft 3331d#1 extending along the X-axis direction. Therefore, corresponding to the rotation of the pulley 3321d#1, the transmission shaft 3331d#1 also rotates around the X-axis (or around an axis intersecting the Z-axis). Pulleys 3322d#1 and 3323d#1 are connected to both ends of transmission shaft 3331d#1, respectively. Therefore, in accordance with the rotation of transmission shaft 3331d#1, pulleys 3322d#1 and 3323d#1 also rotate around the X-axis (or around an axis intersecting the Z-axis).

[0105] Belt 3312d#1 extends in the Y-axis direction. Belt 3312d#1 connects pulley 3322d#1 and pulley 3324d#1 in the Y-axis direction. Belt 3313d#1 extends in the Y-axis direction. Belt 3313d#1 connects pulley 3323d#1 and pulley 3325d#1 in the Y-axis direction. Pulleys 3324d#1 and 3325d#1 are connected to both ends of a transmission shaft 3332d#1 extending in the X-axis direction. Therefore, corresponding to the rotation of pulleys 3322d#1 and 3323d#1, pulleys 3324d#1 and 3325#1 and transmission shaft 3332d#1 also rotate around the X-axis (or around an axis intersecting the Z-axis). As a result, the rotation of pulley 3322d#1 is converted into the movement of belt 3312d#1 connecting pulley 3322d#1 and pulley 3324d#1 in the Y-axis direction. Similarly, the rotation of pulley 3323d#1 is converted into the movement of belt 3313d#1 connecting pulley 3323d#1 and pulley 3325d#1 in the Y-axis direction.

[0106] A movable part 3341d#1 is fixed to the belt 3312d#1. Therefore, the movable part 3341d#1 moves along the Y-axis direction in accordance with the movement of the belt 3312d#1 in the Y-axis direction. A movable part 3342d#1 is fixed to the belt 3313d#1. Therefore, the movable part 3342d#1 moves along the Y-axis direction in accordance with the movement of the belt 3313d#1 in the Y-axis direction. The connecting part 3351d#1 connects the movable part 3341d#1 to the workbench 31d. The connecting part 3352d#1 connects the movable part 3342d#1 to the workbench 31d. Specifically, the belts 3312d#1 and 3313d#1 and the movable parts 3341d#1 and 3342d#1 are configured so that the belts 3312d#1 and 3313d#1 clamp the workbench 31d along the X-axis direction and the movable parts 3341d#1 and 3342d#1 clamp the workbench 31d along the X-axis direction. Therefore, the connecting parts 3351d#1 and 332d#1 are connected to the workbench 31d in a manner of supporting the workbench 31d along the X-axis direction. In this case, the workbench 31d moves along the Y-axis direction in accordance with the movement of the movable parts 3341d#1 and 3342d#1 in the Y-axis direction. Therefore, the motor 32d#1 and the power transmission part 33d#1 mainly function as a drive system for moving the workbench 31d along the Y-axis direction.

[0107] Belt 3311d#2 connects the rotating shaft of motor 32d#2 and pulley 3321d#2. Fig. 9 and Fig.10 In the example shown, the rotation axis of the motor 32d#2 and the rotation axis of the pulley 3321d#2 are respectively parallel to the Y axis, and the belt 3311d#2 extends along the X axis direction, and connects the rotation axis of the motor 32d#2 and the rotation axis of the pulley 3321d#2 along the X axis direction. Therefore, the belt 3311d#2 moves along the X axis direction as the rotation axis of the motor 32d#2 rotates. As a result, as the belt 3311#2 moves, the pulley 3321d#2 rotates around the Y axis (or around an axis intersecting the Z axis). The pulley 3321d#2 is connected to a transmission shaft 3331d#2 extending along the Y axis direction. Therefore, corresponding to the rotation of the pulley 3321d#2, the transmission shaft 3331d#2 also rotates around the Y axis (or around an axis intersecting the Z axis). Pulleys 3322d#2 and 3323d#2 are connected to both ends of transmission shaft 3331d#2, respectively. Therefore, in response to the rotation of transmission shaft 3331d#2, pulleys 3322d#2 and 3323d#2 also rotate around the Y axis (or around an axis intersecting the Z axis).

[0108] Belt 3312d#2 extends in the X-axis direction. Belt 3312d#2 connects pulley 3322d#2 and pulley 3324d#2 in the X-axis direction. Belt 3313d#2 extends in the X-axis direction. Belt 3313d#2 connects pulley 3323d#2 and pulley 3325d#2 in the X-axis direction. Pulleys 3324d#2 and 3325d#2 are connected to both ends of a transmission shaft 3332d#2 extending in the Y-axis direction. Therefore, corresponding to the rotation of pulleys 3322d#2 and 3323d#2, pulleys 3324d#2 and 3325#2 and transmission shaft 3332d#2 also rotate around the Y-axis (or around an axis intersecting the Z-axis). As a result, the rotation of pulley 3322d#2 is converted into the movement of belt 3312d#2 connecting pulley 3322d#2 and pulley 3324d#2 in the X-axis direction. Similarly, the rotation of pulley 3323d#2 is converted into the movement of belt 3313d#2 connecting pulley 3323d#2 and pulley 3325d#2 in the X-axis direction.

[0109] A movable part 3341d#2 is fixed to the belt 3312d#2. Therefore, the movable part 3341d#2 moves along the X-axis direction in accordance with the movement of the belt 3312d#2 in the X-axis direction. A movable part 3342d#2 is fixed to the belt 3313d#2. Therefore, the movable part 3342d#2 moves along the X-axis direction in accordance with the movement of the belt 3313d#2 in the X-axis direction. The connecting part 3351d#2 connects the movable part 3341d#2 to the workbench 31d. The connecting part 3352d#2 connects the movable part 3342d#2 to the workbench 31d. Specifically, the belts 3312d#2 and 3313d#2 and the movable parts 3341d#2 and 3342d#2 are configured so that the belts 3312d#2 and 3313d#2 clamp the workbench 31d along the X-axis direction and the movable parts 3341d#2 and 3342d#2 clamp the workbench 31d along the Y-axis direction. Therefore, the connecting parts 3351d#2 and 332d#2 are connected to the workbench 31d in a manner of supporting the workbench 31d along the Y-axis direction. In this case, the workbench 31d moves along the X-axis direction in accordance with the movement of the movable parts 3341d#2 and 3342d#2 in the X-axis direction. Therefore, the motor 32d#2 and the power transmission part 33d#2 mainly function as a drive system for moving the workbench 31d along the X-axis direction.

[0110] In addition, the connecting parts 3351d#1 and 332d#1 that connect the workbench 31d and the movable parts 3341d#1 and 3342d#1, respectively, along the X-axis direction can be extended and retracted along the X-axis direction. As a result, the movement of the workbench 31d in the X-axis direction corresponding to the movement of the movable parts 3341d#2 and 3342d#2 will not be hindered by the connecting parts 3351d#1 and 332d#1. Similarly, the connecting parts 3351d#2 and 3352d#2 that connect the workbench 31d and the movable parts 3341d#2 and 3342d#2, respectively, along the Y-axis direction can be extended and retracted along the Y-axis direction. As a result, the movement of the workbench 31d in the Y-axis direction corresponding to the movement of the movable parts 3341d#1 and 3342d#1 will not be hindered by the connecting parts 3351d#2 and 332d#2.

[0111] When the processing system SYS1 includes the fourth workbench device 3d, the processing system SYS1 includes a housing 6d corresponding to the fourth workbench device 3d as the housing 6. Specifically, the housing 6d has a top surface member 611d, a bottom member 612d, and a side wall member 613d, each of which constitutes a part of the partition member 61. The top surface member 611d is a member that defines the boundary of the upper side (i.e., the +Z side) of the chamber space 63IN. The top surface member 611d is, for example, a plate-shaped member along the XY plane. However, in Fig. 9 , the description of the top surface component 611d is omitted. The bottom component 612d is a component that defines the boundary of the bottom (i.e., -Z side) of the chamber space 63IN. The bottom component 612d is arranged below the top surface component 611d. The bottom component 612d is, for example, a plate-shaped component along the XY plane. The side wall component 613d is a component that defines the boundary of the side of the chamber space 63IN. The side wall component 613d is arranged in a manner to surround the space between the top surface component 611d and the bottom component 612d. The side wall component 613d is a cylindrical (e.g., square cylindrical) component extending along the Z axis. As a result, the space surrounded by the top surface component 611d, the bottom component 612d, and the side wall component 613d is defined as the chamber space 63IN. Furthermore, in order to maintain the airtightness of the chamber space 63IN (and thereby prevent the spark from the motor 32d from entering the chamber space 63IN), the gaps between the top surface member 611d, the bottom member 612d, and the side wall member 613d may be sealed by a sealing member.

[0112] The chamber space 63IN is provided with power transmission components 33d#2 to 33d#2. On the other hand, the external space 64OUT is provided with motors 32d#1 to 32d#2. However, the belts 3311d#1 and 3311d#2 extend from the chamber space 63IN toward the rotation axes of the motors 32d#1 and 32d#2 via the openings 65d#1 and 65d#2 formed in the side wall component 613d, respectively. The opening 65d#1 is a through hole extending in the Y-axis direction in such a manner as to penetrate the side wall component 613d in the Y-axis direction (i.e., penetrate the side wall component 613d in a direction intersecting with the surface of the side wall component 613d (i.e., the side surface of the housing 6d)). The opening 65d#2 is a through hole extending in the X-axis direction in a manner that penetrates the side wall member 613d in the X-axis direction (i.e., penetrates the side wall member 613d in a direction intersecting the surface of the side wall member 613d (i.e., the side surface of the housing 6d)). Therefore, a portion of each of the belts 3311d#1 and 3311d#2 is arranged in the external space 64OUT. In addition, the openings 65d#1 to 65d#2 are sealed by sealing members 66#1 to 66d#2, which are examples of the sealing member 66.

[0113] (1-3) Processing actions of processing system SYS1

[0114] Next, the processing action of the processing system SYS1 (i.e., the action for forming the three-dimensional structure ST) is described. As described above, the processing system SYS1 forms the three-dimensional structure ST by the laser build-up welding method. Therefore, the processing system SYS1 can form the three-dimensional structure ST by performing the existing processing operation (in this case, the shaping operation) based on the laser build-up welding method. Hereinafter, an example of the processing action for forming the three-dimensional structure ST using the laser build-up welding method is briefly described.

[0115] The processing system SYS1 forms a 3D structure ST on the workpiece W based on 3D model data (e.g., CAD (Computer Aided Design) data) of the 3D structure ST to be formed. As the 3D model data, at least one of the measurement data of a solid object measured by a measuring device (not shown) provided in the processing system SYS1 and the measurement data of a 3D shape measuring instrument provided separately from the processing system SYS1 can be used. As an example of a 3D shape measuring instrument, a contact type 3D coordinate measuring instrument having a probe that can move relative to the workpiece W and can contact the workpiece W can be cited. As an example of a 3D shape measuring instrument, a non-contact type 3D measuring instrument can be cited. As an example of a non-contact type 3D measuring instrument, at least one of a pattern projection type 3D measuring instrument, a light section type 3D measuring instrument, a time-of-flight type 3D measuring instrument, a moire image inspection type 3D measuring instrument, a holographic interferometry type 3D measuring instrument, a CT (Computed Tomography) type 3D measuring instrument, and an MRI (Magnetic Resonance Imaging) type 3D measuring instrument can be cited. In addition, as 3D model data, for example, STL (Stereo Lithography) format, VRML (Virtual Reality Modeling Language) format, AMF (Additive Manufacturing File Format), IGES (Initial Graphics Exchange Specification) format, VDA-FS (Association of German Automotive Manufactures-Surfaces Interface) format, HP / GL (Hewlett-Packard Graphics Language) format, bitmap format, etc. can be used.

[0116] The processing system SYS1 forms, for example, a plurality of layered partial structures (hereinafter referred to as "structural layers") SL arranged in the Z-axis direction in order to form a three-dimensional structure ST. For example, the processing system SYS1 forms a plurality of structural layers SL obtained by cutting the three-dimensional structure ST into wafers in the Z-axis direction one layer at a time. As a result, a stacked structure having a plurality of structural layers SL stacked thereon, namely, a three-dimensional structure ST is formed. The following is a description of the flow of the operation of forming a three-dimensional structure ST by sequentially forming a plurality of structural layers SL one layer at a time.

[0117] First, refer to Fig.11 (a) to Fig.11 (e) The action of forming each structural layer SL is described. Under the control of the control device 7, the processing system SYS1 sets an irradiation area EA on the surface of the workpiece W or a desired area on the modeling surface MS corresponding to the surface of the formed structural layer SL, and irradiates the irradiation area EA with processing light EL from the irradiation optical system 211. In addition, the area occupied by the processing light EL irradiated from the irradiation optical system 211 on the modeling surface MS can also be called the irradiation area EA. In the first embodiment, the focusing position (i.e., the focusing position) of the processing light EL is consistent with the modeling surface MS. As a result, Fig.11 As shown in (a), a molten pool (i.e., a pool of metal melted by the processing light EL) MP is formed in a desired area on the modeling surface MS by the processing light EL emitted from the irradiation optical system 211. Furthermore, under the control of the control device 7, the processing system SYS1 sets a supply area MA in a desired area on the modeling surface MS, and supplies the modeling material M to the supply area MA from the material nozzle 212. Here, as described above, since the irradiation area EA coincides with the supply area MA, the supply area MA is set as the area where the molten pool MP is formed. Therefore, as shown in FIG. Fig.11 As shown in (b), the processing system SYS1 supplies the molding material M to the molten pool MP from the material nozzle 212. As a result, the molding material M supplied to the molten pool MP melts. When the molten pool MP is not irradiated with the processing light EL as the worktable 31 moves, the molding material M melted in the molten pool MP is cooled and solidified (i.e., solidified). As a result, Fig.11 As shown in (c) of FIG. 1 , the solidified modeling material M is deposited on the modeling surface MS. That is, the deposited material of the solidified modeling material M forms a modeled object.

[0118] like Fig.11As shown in (d), while the table 31 is relatively moved along the XY plane relative to the processing head 21, a series of molding processes including the formation of the molten pool MP based on the irradiation of the processing light EL, the supply of the molding material M to the molten pool MP, the melting of the supplied molding material M, and the solidification of the molten molding material M are repeatedly performed. That is, when the table 31 is relatively moved relative to the processing head 21, the irradiation area EA is also relatively moved relative to the molding surface MS. Therefore, while the irradiation area EA is relatively moved relative to the molding surface MS along the XY plane (that is, in the two-dimensional plane), a series of molding processes are repeatedly performed. At this time, the processing light EL selectively irradiates the irradiation area EA set on the molding surface MS in the area where the molding object is to be formed, and on the other hand, the processing light EL is not selectively irradiated on the irradiation area EA set on the molding surface MS in the area where the molding object is not to be formed (it can also be said that the irradiation area EA is not set in the area where the molding object is not to be formed). That is, the processing system SYS1 irradiates the molding surface MS with the processing light EL at a timing corresponding to the distribution of the area where the molding object is to be formed while moving the irradiation area EA along a predetermined movement trajectory on the molding surface MS. It should be noted that the distribution form of the area where the object is to be formed can also be referred to as a distribution pattern and a pattern of the structural layer SL. As a result, the molten pool MP also moves on the molding surface MS along a moving trajectory corresponding to the moving trajectory of the irradiation area EA. Specifically, the molten pool MP is sequentially formed on the molding surface MS in the portion irradiated with the processing light EL in the area along the moving trajectory of the irradiation area EA. And, as described above, since the irradiation area EA coincides with the supply area MA, the supply area MA also moves on the molding surface MS along a moving trajectory corresponding to the moving trajectory of the irradiation area EA. As a result, as Fig.11 As shown in (e), a structural layer SL corresponding to the aggregate of the modeling object formed by the solidified modeling material M is formed on the modeling surface MS. That is, a structural layer SL corresponding to the aggregate of the modeling object formed on the modeling surface MS is formed in a pattern corresponding to the moving trajectory of the molten pool MP (that is, a structural layer SL having a shape corresponding to the moving trajectory of the molten pool MP when viewed from above). In addition, in a case where the irradiation area EA is set in a region where it is not desired to form a modeling object, the processing light EL may be irradiated to the irradiation area EA, and the supply of the modeling material M may be stopped. In addition, in a case where the irradiation area EA is set in a region where it is not desired to form a modeling object, the modeling material M may be supplied to the irradiation area EL, and the processing light EL of an intensity that cannot form the molten pool MP may be irradiated to the irradiation area EL. In addition, in the above description, the irradiation area EA is moved relative to the modeling surface MS, but the modeling surface MS may also be moved relative to the irradiation area EA.

[0119] Under the control of the control device 7, the processing system SYS1 repeatedly performs actions for forming such a structural layer SL based on the 3D model data. Specifically, first, the 3D model data is sliced ​​at a stacking pitch to produce slice data. In addition, data in which a portion of the slice data has been corrected according to the characteristics of the processing system SYS1 can also be used. The processing system SYS1 performs actions for forming the first structural layer SL#1 on the modeling surface MS corresponding to the surface of the workpiece W based on the 3D model data corresponding to the structural layer SL#1 (i.e., the slice data corresponding to the structural layer SL#1). For example, the processing system SYS1 can operate using information related to a tool path, which is a trajectory of the irradiation area EA (supply area MA) through the area where the structural layer SL#1 exists in the slice data corresponding to the structural layer SL#1. As a result, as Fig.12 As shown in (a), a structural layer SL#1 is formed on the modeling surface MS. Then, the processing system SYS1 sets the surface (i.e., the upper surface) of the structural layer SL#1 as a new modeling surface MS, and then forms a second structural layer SL#2 on the new modeling surface MS. In order to form the structural layer SL#2, the control device 7 first controls the workbench drive system (especially the power source 32) so that the workbench 31 moves along the Z axis. Specifically, the control device 7 controls the workbench drive system to move the workbench 31 toward the -Z side in such a manner that the irradiation area EA and the supply area MA are set on the surface of the structural layer SL#1 (i.e., the new modeling surface MS). As a result, the focusing position of the processing light EL is consistent with the new modeling surface MS. Then, under the control of the control device 7, the processing system SYS1 forms the structural layer SL#2 on the structural layer SL#1 based on the slicing data corresponding to the structural layer SL#2 through the same action as the action of forming the structural layer SL#1. As a result, as shown in FIG. Fig.12 As shown in (b), a structural layer SL#2 is formed. Thereafter, the same operation is repeated until all structural layers SL constituting the three-dimensional structure ST to be formed on the workpiece W are formed. As a result, Fig.12 As shown in (c), a stacked structure formed by stacking a plurality of structural layers SL forms a three-dimensional structure ST.

[0120] (1-4) Effect of Technology of Processing System SYS1

[0121] As described above, according to the processing system SYS1 of the first embodiment, it is possible to appropriately perform additional processing on the workpiece W. In addition, in the processing system SYS1, the power source 32 having an ignition source is arranged in the external space 64OUT isolated from the chamber space 63IN by the partition member 61. Therefore, it is possible to prevent the explosion caused by the contact between the modeling material M in the chamber space 63IN and the ignition source of the power source 32.

[0122] In addition, during the period when the molding material M is supplied to the chamber space 63IN, the chamber space 63IN is a space purged by the purge gas. Therefore, even if the power source 32 is arranged in the chamber space 63IN, an explosion caused by the contact between the molding material M in the chamber space 63IN and the ignition source of the power source 32 will not occur. However, if the power source 32 is arranged in a position isolated from the chamber space 63IN, even if the chamber space 63IN is not purged by the purge gas, an explosion caused by the contact between the molding material M in the chamber space 63IN and the ignition source of the power source 32 will not occur. Therefore, even if the chamber space 63IN is not purged by the purge gas, the processing system SYS1 can enjoy the effect of being able to use the power generated by the power source 32 to move the workbench 31.

[0123] (2) Processing System SYS of Second Embodiment

[0124] Next, refer to Fig.13 A machining system SYS according to a second embodiment (hereinafter, the machining system SYS according to the second embodiment will be referred to as a “machining system SYS2 ”) will be described. Fig.13 2 is a cross-sectional view showing an example of the configuration of the machining system SYS2 according to the second embodiment. Components identical to those of the machining system SYS1 according to the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

[0125] like Fig.13 As shown, the processing system SYS2 is different from the processing system SYS1 in that the processing system SYS2 has a table device 3e instead of the table device 3. In addition, the processing system SYS2 is different from the processing system SYS1 in which the opening 65 is formed in the housing 6 in that the opening 65 may not be formed in the housing 6. Other features of the processing system SYS2 may also be the same as those of the processing system SYS1.

[0126] The workbench device 3e is different from the workbench device 3 in that it has a power source 34e instead of the power source 32. Furthermore, the workbench device 3e is different from the workbench device 3 in which the power source 32 is arranged in the external space 64OUT (that is, not arranged in the chamber space 63IN) in that the power source 34e can also be arranged in the chamber space 63IN. The other features of the workbench device 3e can also be the same as those of the workbench device 3.

[0127] The power source 34e is different from the power source 32 which may or may not have an explosion-proof structure in that it has an explosion-proof structure. Specifically, the power source 34e has an explosion-proof structure that can prevent an explosion caused by contact between the molding material M in the chamber space 63IN and the ignition source possessed by the power source 34e. For example, the power source 34e may also have an intrinsically safe explosion-proof structure that can prevent an explosion of the molding material M in the chamber space 63IN caused by the ignition source possessed by the power source 34e. Or, for example, the power source 34e may also have an increased safety explosion-proof structure that increases the structural safety in a manner that does not generate sparks or high-temperature portions in the chamber space 63IN where sparks or high-temperature portions should not be generated. Other features of the power source 34e may also be the same as those of the power source 32. hereinafter, refer to Fig.14 The structure of the power source 34e having an explosion-proof structure will be described. Fig.14 It is a cross-sectional view showing the structure of a power source 34e included in the machining system SYS2 according to the second embodiment.

[0128] like Fig.14 As shown, the power source 34e has a housing 341e, a power source 342e and a power transmission component 343e.

[0129] The housing 341e is a storage device that stores at least the power generation source 342 in the storage space 344e, which is the internal space of the housing 341e. The housing 341e includes a partition member 3411e that defines the storage space 344e. The partition member 3411e is a member that separates (i.e. isolates) the storage space 344e from the space outside the housing 341e. In the second embodiment, since the power source 34e is arranged in the chamber space 63IN, the space outside the housing 341e includes at least a part of the chamber space 63IN. The partition member 3411e faces the storage space 344e across its inner wall and faces the space outside the housing 341e (i.e., the chamber space 63IN) across its outer wall. In this case, the space surrounded by the partition member 3411e (more specifically, the space surrounded by the inner wall of the partition member 3411e) becomes the storage space 344e.

[0130] The power source 342e is a device that generates power for moving the workbench 31. Specifically, the power source 342e generates electric power. That is, the power source 342e generates power using an electric current supplied from a power source not shown in the figure. In other words, the power source 342e generates power by converting the electric current supplied from a power source not shown in the figure into power. As an example of the power source 342e, an electric motor can be cited. In this case, the power source 342e includes an ignition source. As an example of an ignition source, as described above, a conductive part (such as a coil) supplied with electric current can be cited. In addition, the above-mentioned power source 32 can also be used as the power source 342e. In this case, it can be said that the power source 34e is equivalent to a device of the power source 32 having a housing 341e and an internal space 344e housed in the housing 341e.

[0131] When the power source 342e is arranged in the internal space 344e, the ignition source possessed by the power source 342e is also arranged in the internal space 344e. That is, the ignition source possessed by the power source 342e is not arranged in the chamber space 63IN. The ignition source possessed by the power source 342e is isolated from the chamber space 63IN by the partition component 3411e. The ignition source possessed by the power source 342e is arranged at a position isolated from the chamber space 63IN by the partition component 3411e. In this case, the partition component 3411e can function as a component that isolates the ignition source possessed by the power source 342e from the chamber space 63IN (that is, isolates the chamber space 63IN from the ignition source possessed by the power source 342e) by surrounding the internal space 344e.

[0132] As a result, the modeling material M (particularly the modeling material M in the form of powder or granular material) supplied to the chamber space 63IN is prevented from contacting the ignition source of the power source 342e disposed in the internal space 344e. Therefore, it is possible to prevent an explosion (typically a dust explosion) caused by contact between the modeling material M in the chamber space 63IN and the ignition source of the power source 342e.

[0133] In this case, the housing 341e may also have an explosion-proof structure capable of preventing explosion caused by contact between the molding material M in the chamber space 63IN and the ignition source of the driving force generating source 342e. For example, the housing 341e may also have an intrinsically safe explosion-proof structure capable of preventing explosion of the molding material M caused by sparks or high-temperature parts generated by the ignition source of the driving force generating source 342e. Alternatively, for example, the housing 341e may also have an increased safety explosion-proof structure capable of increasing the safety of the structure by preventing sparks or high-temperature parts from being generated in the chamber space 63IN where sparks or high-temperature parts should not be generated.

[0134] The power transmission component 343e is a component that transmits the power generated by the power source 342e to the outside of the power source 34e (particularly the power transmission component 33). Since the power source 342e is arranged in the internal space 344e of the housing 341e, the power transmission component 343e is a component that transmits the power generated by the power source 342e in the internal space 344e from the internal space 344e to the outside of the power source 34e. The power transmission component 343e transmits the power generated by the power source 342e non-electrically. For example, the power transmission component 343e can also mechanically transmit the power generated by the power source 342e. For example, the power transmission component 343e can also transmit the power generated by the power source 342e to the outside of the power source 34e by mechanically connecting the power source 342e and the power transmission component 33. An example of a component that can mechanically transmit power is as described above. In addition, at least a part of the above-mentioned power transmission component 33 can also be used as the power transmission component 343e.

[0135] In order to transmit power from the internal space 344e to the chamber space 63IN, an opening 3412e is formed in the partition member 3411e. The opening 3412e is a through hole that penetrates the partition member 3411e from the internal space 344e toward the chamber space 63IN. A part of the power transmission member 343e is arranged in the opening 3412e. That is, the power transmission member 343e extends from the internal space 344e to the chamber space 63IN via the opening 3412e. As a result, the power transmission member 343e can transmit power from the internal space 344e to the chamber space 63IN via the opening 3412e. That is, the power generated by the power source 342e in the internal space 344e is transmitted to the workbench 31 arranged in the chamber space 63IN via the opening 3412e.

[0136] When the opening 3412e is formed in the partition member 3411e, the internal space 644e is connected to the chamber space 63IN via the opening 3412e. Therefore, when there is a gap (especially a relatively large gap) between the wall surface of the partition member 3411e that specifies the opening 3412e and the power transmission member 343e arranged at the opening 3412e, the modeling material M in the chamber space 63IN and the ignition source of the power source 342e may contact through the opening 3412e. Therefore, the opening 3412e can also be sealed by the sealing member 345e. The sealing member 345e is a member that seals between the wall surface of the partition member 3411e that specifies the opening 3412e and the power transmission member 343e arranged at the opening 3412e. Specifically, the sealing member 345e is a member used to fill the gap between the wall surface of the partition member 3411e that specifies the opening 3412e and the power transmission member 343e arranged at the opening 3412e. It should be noted that the "filling the gap between the wall surface of the partition component 3411e and the power transmission component 343e" mentioned here may mean "completely eliminating (i.e. blocking) the gap between the wall surface of the partition component 3411e and the power transmission component 343e", or may mean reducing the gap between the wall surface of the partition component 3411e and the power transmission component 343e to a degree that can seal the internal space 344e. That is, the sealing component 345e can function as a component that seals the internal space 344e (i.e., maintains the airtightness of the internal space 344e). More specifically, the sealing component 345e, the partition component 3411e and the power transmission component 343e together seal the internal space 344e. In addition, as an example of the sealing component 345e, at least one of a rubber seal, an oil seal and a labyrinth seal can be listed.

[0137] When the opening 3412e is sealed by the sealing member 345e, the modeling material M in the chamber space 63IN is prevented from contacting the ignition source of the power source 342e through the opening 3412e. That is, the sealing member 345e can function as a member for preventing the modeling material M in the chamber space 63IN from contacting the ignition source of the power source 342e through the opening 3412e. Specifically, for example, the sealing member 345e can function together with the partition member 3411e and the power transmission member 343e as a member for preventing the electric spark generated by the power source 342e in the internal space 344e from entering the chamber space 63IN to which the modeling material M is supplied through the opening 3412e. For example, the sealing member 345e can function together with the partition member 3411e and the power transmission member 343e as a member for preventing the molding material M supplied to the chamber space 63IN from entering the internal space 344e where the power source 342e including the ignition source is arranged through the opening 3412e.

[0138] According to the processing system SYS2 of the second embodiment described above, similarly to the processing system SYS1 of the first embodiment, it is possible to appropriately perform additional processing on the workpiece W. In addition, in the processing system SYS2, the ignition source of the power source 34e (for example, the ignition source of the power source 342e) is arranged in the internal space 344e isolated from the chamber space 63IN by the partition member 3411e. Therefore, it is possible to prevent the explosion caused by the contact between the molding material M in the chamber space 63IN and the ignition source of the power source 34e. That is, the processing system SYS2 of the second embodiment can obtain the same effect as that obtained by the processing system SYS1 of the first embodiment. In addition, in the processing system SYS2, the power source 34e can be accommodated in the chamber space 63IN, so the degree of freedom of configuration of the power source 34e is increased.

[0139] In addition, the power source 34e may be arranged at a position different from the chamber space 63IN. For example, the power source 34e may be arranged in the external space 64OUT similarly to the power source 32 of the first embodiment. Alternatively, the processing system SYS2 may include a power source 32 arranged in the external space 64OUT in addition to the power source 34e arranged in the chamber space 63IN.

[0140] (3) Processing System SYS of the Third Embodiment

[0141] Next, refer to Fig.15 and Fig.16 A processing system SYS according to a fifth embodiment (hereinafter, the processing system SYS according to the third embodiment will be referred to as a “processing system SYS3 ”) will be described. Fig.15 It is a cross-sectional view showing an example of the structure of the processing system SYS3 according to the third embodiment. Fig.16 1 is a system configuration diagram showing an example of a system configuration of a machining system SYS3 according to the third embodiment. Note that the same components as those of the machining system SYS1 according to the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

[0142] like Fig.15 and Fig.16 As shown, the processing system SYS3 is different from at least one of the processing systems SYS1 and SYS2 in that it includes a processing device 2f instead of the processing device 2. In addition, the processing system SYS2 is different from the processing system SYS1 in that it includes a workbench device 3f instead of the workbench device 3. Other features of the processing system SYS3 may be the same as at least one of the processing systems SYS1 and SYS2.

[0143] The processing device 2f is different from the processing device 2 in that it also has a power source 22f and a power transmission mechanism 23f. The power source 22f and the power transmission mechanism 23f constitute a head drive system for moving the processing head 21 in the chamber space 63IN. Other features of the processing device 2f may also be the same as those of the processing device 2.

[0144] The power source 22f is a device that generates power for moving the machining head 21, and is different from the power source 32 that generates power for moving the table 31. The other features of the power source 22f may be the same as those of the power source 32.

[0145] The power transmission mechanism 23f is a device that transmits the power generated by the power source 22f to the processing head 21, which is different from the power transmission component 33 that is a device that transmits the power generated by the power source 32 to the workbench 31. Therefore, the power transmission mechanism 23f forms a power transmission path extending from the power source 22f to the processing head 21. Specifically, since the power transmission mechanism 23f itself becomes the power transmission path, the power transmission mechanism 23f extends from the power source 22f to the processing head 21. As a result, the processing head 21 moves by the power transmitted from the power source 22f via the power transmission mechanism 23f. Other features of the power transmission mechanism 23f may also be the same as those of the power transmission component 33.

[0146] in addition, Fig.15 The processing system SYS3 is shown to have multiple (in Fig.15 The example shown is an example of two) power sources 22f, but the processing system SYS3 can also have a single power source 22f. Fig.15 The processing system SYS3 is shown to have multiple (in Fig.15 Although the example shown is an example of two power transmission mechanisms 23f, the processing system SYS3 may also have a single power transmission mechanism 23f.

[0147] The power source 22f is arranged in the external space 64OUT in the same manner as the power source 32. That is, the power source 22f is not arranged in the chamber space 63IN in the same manner as the power source 32. Therefore, the ignition source possessed by the power source 22f is also not arranged in the chamber space 63IN. As a result, the modeling material M (particularly the modeling material M as a powder or granular body) supplied to the chamber space 63IN is prevented from contacting the ignition source possessed by the power source 22f arranged in the external space 64OUT. Therefore, it is possible to prevent an explosion (typically a dust explosion) caused by the contact between the modeling material M in the chamber space 63IN and the ignition source possessed by the power source 22f.

[0148] However, the power generated by the power source 22f in the external space 64OUT needs to be transmitted to the processing head 21 arranged in the chamber space 63IN. Therefore, the power transmission mechanism 23f extends from the external space 64OUT to the chamber space 63IN via the opening 65, similarly to the power transmission component 33. As a result, the power transmission mechanism 23f can transmit power from the external space 64OUT to the chamber space 63IN via the opening 65. That is, the power generated by the power source 22f in the external space 64OUT is transmitted to the processing head 21 arranged in the chamber space 63IN via the opening 65. In addition, in the third embodiment, the opening 65 can also be sealed by the sealing component 66, similarly to the first embodiment.

[0149] The workbench device 3f is different from the workbench device 3 in that it may not have the power source 32 and the power transmission mechanism 33. The workbench device 3f is different from the workbench device 3e in that it may not have the power source 34e and the power transmission mechanism 33. However, the workbench device 3 may also have at least one of the power sources 32 and 34e and the power transmission component 33. Other features of the workbench device 3f may also be the same as those of the workbench device 3 or 3e.

[0150] As described above, according to the processing system SYS3 of the third embodiment, additional processing can be appropriately performed on the workpiece W. In addition, in the processing system SYS3, the power source 22f having an ignition source is arranged in the external space 64OUT isolated from the chamber space 63IN by the partition member 61. Therefore, it is possible to prevent the explosion caused by the contact between the molding material M in the chamber space 63IN and the ignition source possessed by the power source 22f. In addition, even when the chamber space 63IN is not purged with the purge gas, the processing system SYS3 can enjoy the effect of being able to move the processing head 21 using the power generated by the power source 22f.

[0151] (4) Processing System SYS of Fourth Embodiment

[0152] Next, refer to Fig.17 A processing system SYS according to a fourth embodiment (hereinafter, the processing system SYS according to the fourth embodiment will be referred to as a “processing system SYS4 ”) will be described. Fig.17 1 is a cross-sectional view showing an example of the configuration of the machining system SYS4 according to the fourth embodiment. The same components as those included in the machining system SYS3 according to the third embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

[0153] like Fig.17As shown, the processing system SYS4 is different from the processing system SYS3 in that the processing device 2f is replaced by the processing device 2g. In addition, the processing system SYS4 is different from the processing system SYS3 in which the opening 65 is formed in the housing 6 in that the opening 65 may not be formed in the housing 6. Other features of the processing system SYS4 may also be the same as those of the processing system SYS3.

[0154] The processing device 2g is different from the processing device 2f in that the power source 22f is replaced with the power source 24g. In addition, the processing device 2g is different from the processing device 2f in that the power source 22f is arranged in the external space 64OUT (that is, not arranged in the chamber space 63IN) in that the power source 24g can also be arranged in the chamber space 63IN. The other features of the processing device 2g can also be the same as those of the processing device 2f.

[0155] The power source 24g is different from the power source 22f which may not have an explosion-proof structure in that it has an explosion-proof structure. Specifically, the power source 24g has an explosion-proof structure that can prevent the explosion caused by the contact between the molding material M in the chamber space 63IN and the ignition source possessed by the power source 24g. For example, the power source 24g may also have an intrinsically safe explosion-proof structure that can prevent the explosion of the molding material M in the chamber space 63IN caused by the ignition source possessed by the power source 24g. Or, for example, the power source 24g may also have a safety-increased explosion-proof structure that increases the structural safety in a manner that does not generate sparks or high-temperature parts in the chamber space 63IN where sparks or high-temperature parts should not be generated. The power source 24g may also have the same structure as the power source 34e described in the second embodiment. Therefore, the detailed description of the power source 24g is omitted. Other features of the power source 24g may also be the same as those of the power source 22f.

[0156] According to the processing system SYS4 of the fourth embodiment described above, similarly to the processing system SYS3 of the third embodiment, it is possible to appropriately perform additional processing on the workpiece W. In addition, in the processing system SYS4, the ignition source of the power source 24g is arranged in a space isolated from the chamber space 63IN (for example, Fig.14 The inner space 344e isolated by the partition member 3411e shown in FIG. 64A ) can be formed by the molding material M in the chamber space 63IN and the ignition source of the power source 24g. Therefore, it is possible to prevent the explosion caused by the contact between the molding material M in the chamber space 63IN and the ignition source of the power source 24g. That is, the processing system SYS4 of the fourth embodiment can obtain the same effect as that obtained by the processing system SYS3 of the third embodiment. In addition, in the processing system SYS4, the power source 24g can be accommodated in the chamber space 63IN, so the degree of freedom of the configuration of the power source 24g is increased.

[0157] In addition, the power source 24g may be arranged at a position different from the chamber space 63IN. For example, the power source 24g may be arranged in the external space 64OUT similarly to the power source 24f of the third embodiment. Alternatively, the processing system SYS4 may include a power source 22f arranged in the external space 64OUT in addition to the power source 24g arranged in the chamber space 63IN.

[0158] (5) Modification

[0159] In the above description, the power transmission member 33 mechanically transmits the power generated by the power source 32 to the table 31. However, the power transmission member 33 may be a power transmission mechanism using fluid, such as a hydraulic power transmission device or a pneumatic power transmission device.

[0160] In the above description, the processing device 2 melts the modeling material M by irradiating the processing light EL to the modeling material M. However, the processing device 2 may also melt the modeling material M by irradiating an arbitrary energy beam to the modeling material M. In this case, the processing device 2 may also include a beam irradiation device capable of irradiating an arbitrary energy beam in addition to or instead of the irradiation optical system 211. The arbitrary energy beam is not limited and includes a charged particle beam such as an electron beam and an ion beam or an electromagnetic wave.

[0161] In the above description, the processing system SYS is capable of forming a three-dimensional structure ST by laser cladding. However, the processing system SYS may also form a three-dimensional structure ST from a molding material M by utilizing other methods capable of forming a three-dimensional structure ST by irradiating the molding material M with processing light EL (or any energy beam). Other methods include, for example, a powder bed fusion method (Powder Bed Fusion) such as a powder sintering stacking molding method (SLS: Selective Laser Sintering), a binder jetting method (Binder Jetting), or a laser metal fusion method (LMF: Laser Metal Fusion). Alternatively, the processing system SYS may also form a three-dimensional structure ST by utilizing any method for additional processing that is different from the method capable of forming a three-dimensional structure ST by irradiating the molding material M with processing light EL (or any energy beam).

[0162] In the above description, the processing system SYS forms a three-dimensional structure ST by supplying the modeling material M from the material nozzle 212 toward the irradiation area EA of the irradiation optical system 211 with the processing light EL. However, the processing system SYS may form a three-dimensional structure ST by supplying the modeling material M from the material nozzle 212 without irradiating the processing light EL from the irradiation optical system 211. For example, the processing system SYS may form a three-dimensional structure ST by blowing the modeling material M from the material nozzle 212 to the modeling surface MS, melting the modeling material M on the modeling surface MS, and solidifying the molten modeling material M. For example, the processing system SYS may form a three-dimensional structure ST by blowing a gas containing the modeling material M from the material nozzle 212 to the modeling surface MS at an ultra-high speed, melting the modeling material M on the modeling surface MS, and solidifying the molten modeling material M. For example, the processing system SYS may form a three-dimensional structure ST by blowing the heated modeling material M from the material nozzle 212 to the modeling surface MS, melting the modeling material M on the modeling surface MS, and solidifying the molten modeling material M. In the case where the three-dimensional structure ST is formed without irradiating the processing light EL from the irradiation optical system 211 , the processing system SYS (particularly, the processing head 21 ) does not need to include the irradiation optical system 211 .

[0163] Alternatively, the processing system SYS may perform removal processing that can remove at least a portion of an object by irradiating the processing light EL (or any energy beam) to the object such as the workpiece W, in addition to or in place of the additional processing. Alternatively, the processing system SYS may perform marking processing that can form a mark (for example, text, numbers, or graphics) on at least a portion of the object by irradiating the processing light EL (or any energy beam) to the object such as the workpiece W, in addition to or in place of at least one of the additional processing and the removal processing. Even in this case, the above-mentioned effect can be enjoyed.

[0164] (6) Notes

[0165] The following additional remarks are further disclosed with respect to the embodiment described above.

[0166] [Note 1]

[0167] A processing system comprising:

[0168] a processing device that performs additional processing in a processing space in which the object is accommodated; and

[0169] a power generating device that generates power for changing the relative position of the object and the processing device,

[0170] A portion of the power generation device that serves as an ignition source is disposed in a separation space that is separated from the processing space by a partition member.

[0171] [Note 2]

[0172] The processing system according to Supplement 1, wherein:

[0173] The partition wall member includes a first member that surrounds the processing space and isolates the processing space from the isolation space.

[0174] [Note 3]

[0175] The processing system according to Supplement 2, wherein:

[0176] The processing space is located inside the space surrounded by the first component.

[0177] The isolation space is located outside the space surrounded by the first member.

[0178] [Note 4]

[0179] A processing system according to Appendix 2 or 3, wherein:

[0180] The power generating device is arranged in the isolation space.

[0181] [Note 5]

[0182] A processing system according to any one of Supplementary Notes 1 to 4, wherein:

[0183] The partition wall member includes a second member that surrounds the isolation space and isolates the isolation space from the processing space.

[0184] [Note 6]

[0185] The processing system according to Supplement 5, wherein:

[0186] The power generation device has an explosion-proof structure in which explosion-proof measures are taken by the second member.

[0187] [Note 7]

[0188] The processing system according to Supplement 5 or 6, wherein:

[0189] The power generation device includes an explosion-proof electric motor.

[0190] [Note 8]

[0191] A processing system according to any one of Notes 5 to 7, wherein:

[0192] The second component includes a housing of the power generating device.

[0193] The isolation space includes the inner space of the housing.

[0194] [Note 9]

[0195] A processing system according to any one of Notes 5 to 8, wherein:

[0196] The power generation device is arranged in the processing space.

[0197] [Note 10]

[0198] A processing system according to any one of Notes 5 to 9, wherein:

[0199] The second member is arranged in the processing space.

[0200] [Note 11]

[0201] A processing system according to any one of Supplementary Notes 1 to 10, wherein:

[0202] The partition wall member has an explosion-proof structure.

[0203] [Note 12]

[0204] A processing system according to any one of Supplements 1 to 11, wherein:

[0205] The relative position is changed by moving at least one of the object and the processing device within the processing space using the power.

[0206] [Note 13]

[0207] A processing system according to any one of Supplementary Notes 1 to 12, wherein:

[0208] The processing system further includes a power transmission mechanism for transmitting the power to at least one of the object and the processing device.

[0209] [Note 14]

[0210] A processing system according to Supplement 13, wherein:

[0211] At least a portion of the power transmission mechanism is disposed in the processing space.

[0212] [Note 15]

[0213] A processing system according to Supplement 13 or 14, wherein:

[0214] At least a portion of the power transmission mechanism is disposed in the isolation space.

[0215] [Note 16]

[0216] A processing system according to any one of Supplementary Notes 13 to 15, wherein:

[0217] The power transmission mechanism does not include an ignition source.

[0218] [Note 17]

[0219] A processing system according to any one of Supplementary Notes 13 to 16, wherein:

[0220] The power transmission mechanism transmits the power in a non-electrical manner.

[0221] [Note 18]

[0222] A processing system according to any one of Supplementary Notes 13 to 17, wherein:

[0223] The partition member has an opening sealed by a sealing member.

[0224] The power transmission mechanism transmits the power to at least one of the object and the processing device via the opening.

[0225] [Note 19]

[0226] A processing system according to Supplement 18, wherein:

[0227] The power transmission mechanism extends from the isolation space to the processing space via the opening.

[0228] [Note 20]

[0229] A processing system according to any one of Supplementary Notes 1 to 19, wherein:

[0230] The portion serving as an ignition source in the power generation device includes a portion to which electric current is supplied in order to generate the power.

[0231] [Note 21]

[0232] A processing system according to any one of Notes 1 to 20, wherein:

[0233] The portion that becomes an ignition source in the power generation device includes a portion that generates heat when the power is generated.

[0234] [Note 22]

[0235] A processing system according to any one of Supplementary Notes 1 to 21, wherein:

[0236] The processing device performs additional processing on the processing object.

[0237] The object includes the processing target object.

[0238] [Note 23]

[0239] A processing system according to any one of Notes 1 to 22, wherein:

[0240] The processing device performs additional processing on the processing object.

[0241] The processing system also includes a loading device for loading the processing object.

[0242] The object includes the mounting device.

[0243] [Note 24]

[0244] A processing system according to any one of Notes 1 to 23, wherein:

[0245] The processing device comprises:

[0246] an irradiation device for irradiating an energy beam into the processing space; and

[0247] A supply device supplies material to the irradiation position of the energy beam.

[0248] [Note 25]

[0249] A processing system according to Supplement 24, wherein:

[0250] The material comprises powder or granules.

[0251] [Note 26]

[0252] A processing system comprising:

[0253] a loading device for loading an object;

[0254] a processing device that supplies powder to the object and performs additional processing on the object;

[0255] a power source, which generates power;

[0256] an isolation member disposed between the power source and at least a portion of the processing device;

[0257] a power transmission member that transmits the power to at least one of the mounting device and the processing device via a through hole formed in the isolation member; and

[0258] A sealing member prevents sparks from entering the space where the mounting device is located from the space where the power source is located.

[0259] [Note 27]

[0260] A processing system comprising:

[0261] a loading device for loading an object;

[0262] a processing device that supplies powder to the object and performs additional processing on the object;

[0263] a power source, which generates power;

[0264] an isolation member disposed between the power source and at least a portion of the processing device;

[0265] a power transmission member that transmits the power to at least one of the mounting device and the processing device via a through hole formed in the isolation member; and

[0266] A sealing member prevents the powder from entering the space where the power source is located from the space where the placing device is located.

[0267] [Note 28]

[0268] A processing system comprising:

[0269] a loading device for loading the object in the first space;

[0270] a processing device that supplies powder to the object and performs additional processing on the object in the first space;

[0271] A power source is disposed in the second space and generates power;

[0272] an isolation component disposed between the first space and the second space;

[0273] a power transmission member that transmits the power to at least one of the mounting device and the processing device via a through hole formed in the isolation member; and

[0274] A sealing member seals between the power transmission member and the isolation member.

[0275] [Note 29]

[0276] A processing system comprising:

[0277] a loading device for loading the object in the first space;

[0278] a processing device that supplies powder to the object and performs additional processing on the object in the first space;

[0279] A power source is disposed in the second space and generates power;

[0280] an isolation component disposed between the first space and the second space;

[0281] a power transmission member that transmits the power to at least one of the mounting device and the processing device via a through hole formed in the isolation member; and

[0282] A sealing member prevents sparks from being transferred from the second space to the first space.

[0283] [Note 30]

[0284] A processing system comprising:

[0285] a loading device for loading the object in the first space;

[0286] a processing device that supplies powder to the object and performs additional processing on the object in the first space;

[0287] A power source is disposed in the second space and generates power;

[0288] an isolation member that isolates the first space from the second space;

[0289] a power transmission member that transmits the power to at least one of the mounting device and the processing device via a through hole formed in the isolation member; and

[0290] A sealing member prevents sparks from being transferred from the second space to the first space.

[0291] [Note 31]

[0292] A processing system comprising:

[0293] a loading device for loading the object in the first space;

[0294] a processing device that supplies powder to the object and performs additional processing on the object in the first space;

[0295] A power source is disposed in the second space and generates power;

[0296] an isolation component disposed between the first space and the second space;

[0297] a power transmission member that transmits the power to at least one of the mounting device and the processing device via a through hole formed in the isolation member; and

[0298] A sealing member prevents powder from being transferred from the first space to the second space.

[0299] [Note 32]

[0300] A processing method, which uses the processing system described in any one of Notes 1 to 31 to perform additional processing.

[0301] [Note 33]

[0302] A processing method, the processing method comprising the following steps:

[0303] placing an object on a loading device;

[0304] supplying powder to the object and performing additional processing on the object;

[0305] Using a power source to generate power;

[0306] providing an isolation member between the power source and the space where the additional processing is performed;

[0307] transmitting the power to at least one of the mounting device and the processing device using a power transmission member that passes through a through hole formed in the isolation member; and

[0308] The power transmission component and the isolation component are sealed.

[0309] [Note 34]

[0310] A processing method, the processing method comprising the following steps:

[0311] placing an object on a loading device;

[0312] supplying powder to the object and performing additional processing on the object;

[0313] Using a power source to generate power;

[0314] providing an isolation member between the power source and the space where the additional processing is performed;

[0315] transmitting the power to at least one of the mounting device and the processing device using a power transmission member that passes through a through hole formed in the isolation member; and

[0316] Sparks are prevented from being transferred from the space where the power source is located to the space where the mounting device is located.

[0317] [Note 35]

[0318] A processing method, the processing method comprising the following steps:

[0319] placing an object on a loading device;

[0320] supplying powder to the object and performing additional processing on the object;

[0321] Using a power source to generate power;

[0322] providing an isolation member between the power source and the space where the additional processing is performed;

[0323] transmitting the power to at least one of the mounting device and the processing device using a power transmission member that passes through a through hole formed in the isolation member; and

[0324] The powder is prevented from being transferred from the space where the placing device is located to the space where the power source is located.

[0325] [Note 36]

[0326] A processing method, the processing method comprising the following steps:

[0327] placing an object on the placing device in the first space;

[0328] supplying powder to the object and performing additional processing on the object in the first space;

[0329] The power is generated by a power source arranged in the second space;

[0330] Disposing an isolation component between the first space and the second space;

[0331] transmitting the power to at least one of the mounting device and the processing device using a power transmission member that passes through a through hole formed in the isolation member; and

[0332] The power transmission component and the isolation component are sealed.

[0333] [Note 37]

[0334] A processing method, the processing method comprising the following steps:

[0335] placing an object on the placing device in the first space;

[0336] supplying powder to the object and performing additional processing on the object in the first space;

[0337] The power is generated by a power source arranged in the second space;

[0338] Disposing an isolation component between the first space and the second space;

[0339] transmitting the power to at least one of the mounting device and the processing device using a power transmission member that passes through a through hole formed in the isolation member; and

[0340] Sparks are prevented from being transferred from the second space to the first space.

[0341] [Note 38]

[0342] A processing method, the processing method comprising the following steps:

[0343] placing an object on the placing device in the first space;

[0344] supplying powder to the object and performing additional processing on the object in the first space;

[0345] The power is generated by a power source arranged in the second space;

[0346] Separating the first space from the second space by an isolation component;

[0347] transmitting the power to at least one of the mounting device and the processing device using a power transmission member that passes through a through hole formed in the isolation member; and

[0348] Sparks are prevented from being transferred from the second space to the first space.

[0349] [Note 39]

[0350] A processing method, the processing method comprising the following steps:

[0351] placing an object on the placing device in the first space;

[0352] supplying powder to the object and performing additional processing on the object in the first space;

[0353] The power is generated by a power source arranged in the second space;

[0354] Disposing an isolation component between the first space and the second space;

[0355] transmitting the power to at least one of the mounting device and the processing device using a power transmission member that passes through a through hole formed in the isolation member; and

[0356] The powder is prevented from being transferred from the first space to the second space.

[0357] At least a portion of the structural elements of each of the above-mentioned embodiments can be appropriately combined with at least another portion of the structural elements of each of the above-mentioned embodiments. It is also possible not to use a portion of the structural elements of each of the above-mentioned embodiments. In addition, within the scope permitted by law, all public gazettes and U.S. patents cited in the above-mentioned embodiments are cited as part of the description of this article.

[0358] The present invention is not limited to the above-described embodiments, and can be appropriately modified within the scope not departing from the gist or concept of the invention as read from the claims and the entire specification, and a processing system and a processing method accompanying such modifications are also included in the technical scope of the present invention.

[0359] Description of symbols

[0360] SYS: processing system; 1: material supply device; 2: processing device; 22f, 24g: power source; 23f: power transmission component; 3: workbench device; 31: workbench; 32, 34e: power transmission component; 33: power transmission mechanism; 6: housing; 61: partition component; 63IN: chamber space; 64OUT: external space; 65: opening; 66: sealing component; W: workpiece; M: molding material; SL: structural layer; MS: molding surface; EA: irradiation area; MA: supply area; MP: molten pool; EL: processing light.

Claims

1. A processing system comprising: A support device that supports an object using a support surface; A processing device is provided to be separated from the support surface along the first direction, and supplies powder to the object to perform additional processing on the object in an LMD (Laser Metal Deposition) manner, i.e., a laser cladding method; a power source, which generates power; a power transmission member for transmitting the power to at least one of the support device and the processing device in order to change the positional relationship between the support surface and the processing device in a direction intersecting the first direction; a partition member provided between at least a portion of at least one of the support device and the processing device and the power source and having a through hole through which the power transmission member passes; and a sealing member for sealing between the power transmission member and the partition member, The power transmission member includes a shaft member connected to the power source. The power transmission member transmits the power so that the support surface is inclined relative to the processing device and the support device moves in a direction intersecting the direction in which the shaft member extends.

2. The processing system according to claim 1, wherein: The partition member and the sealing member prevent sparks from entering the space where the power source is located from the space where the support device is located.

3. The processing system according to claim 1 or 2, wherein: The partition member and the sealing member prevent the powder from entering the space where the power source is located from the space where the support device is located.

4. The processing system according to claim 1 or 2, wherein: The partition member and the sealing member prevent the powder from entering the space where the power source is located from the space where the powder is supplied.

5. The processing system according to claim 1 or 2, wherein: The partition member, the power transmission member, and the sealing member seal a space around the object.

6. The processing system according to claim 1 or 2, wherein: The partition member, the power transmission member, and the sealing member seal the space where the support device is located.

7. The processing system according to claim 1 or 2, wherein: The power transmission member transmits the power to the processing device in order to move the processing device.

8. The processing system according to claim 1 or 2, wherein: The power transmission member transmits the power in a direction intersecting a surface in which the through hole is formed.

9. The processing system according to claim 1 or 2, wherein: The power transmission member includes a shaft member extending in a direction intersecting a surface in which the through hole is formed.

10. The processing system according to claim 9, wherein: The shaft member is rotatable about the intersecting direction.

11. The processing system according to claim 9, wherein: The shaft member is movable along the intersecting direction.

12. The processing system according to claim 1 or 2, wherein: The power transmission member transmits the power along the direction in which the through hole extends.

13. The processing system according to claim 1 or 2, wherein: The power transmission member includes a shaft member extending in a direction in which the through hole extends.

14. The processing system according to claim 7, wherein: The sealing member seals between the power transmission member that transmits the power to the processing device and the partition member in which a through hole is formed through which the power transmission member passes.

15. The processing system according to claim 1 or 2, wherein: The through hole is provided in at least a portion of the partition member at a position separated from the support device in the first direction.

16. The processing system according to claim 1 or 2, wherein: At least one of a relative position and a relative posture between the object and the processing device is changed by the power transmitted to at least one of the support device and the processing device.

17. The processing system according to claim 1 or 2, wherein: The power source generates the power electrically.

18. The processing system according to claim 17, wherein: The partition member separates a conducting portion of the power source from a space where the additional processing of the object is performed.

19. The processing system according to claim 1 or 2, wherein: The space where the additional processing of the object is performed is filled with an inert gas.

20. The processing system according to claim 1 or 2, wherein: The oxygen concentration in the space where the additional processing is performed on the object is 0.5% or less.

21. The processing system according to claim 1 or 2, wherein: The oxygen concentration in the space where the power source is located is higher than the oxygen concentration in the space where the additional processing of the object is performed.

22. The processing system according to claim 1 or 2, wherein: The pressure of the space in which the additional processing is performed on the object is higher than the pressure of a space different from the space.

23. The processing system according to claim 1 or 2, wherein: The processing device and the supporting device are arranged in a first space partitioned by the partition member. The power source is disposed in a second space partitioned by the partition member and different from the first space.

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