A dual-axis MEMS gyroscope component and its calibration and compensation method

Abstract

The present invention discloses a biaxial MEMS gyro assembly and its calibration and compensation method. The assembly includes: a base, an installation cavity is provided in the base, and a first installation boss and a second installation boss are provided in the installation cavity; an MEMS gyro control circuit board, which is located in the installation cavity and is arranged on the first installation boss; a cover plate, which is located at the top of the installation cavity and is arranged on the second installation boss. Through reasonable hardware design, software calibration, compensation and optimized design of the structural layout, the measurement accuracy and environmental adaptability of the product are improved, and the volume is reduced and the weight is lightened, etc.

Description

Technical Field

[0001] The present invention relates to the application technology of MEMS gyro components and other fields, and particularly to a biaxial MEMS gyro component and its calibration compensation method. Background Art

[0002] In recent years, with the development of miniaturization of weapon equipment, higher requirements have been put forward for angular rate sensors in many fields, which need to have characteristics such as high measurement accuracy, strong environmental adaptability, small size, and light weight. At present, MEMS gyroscopes are in a stage of rapid development, and the application technology of MEMS gyroscopes is becoming increasingly mature. The market prospect of developing micro-miniature biaxial MEMS gyro components is broad, but there is still a lack of mature technical solutions. Summary of the Invention

[0003] In order to solve the above problems, the present invention provides a biaxial MEMS gyro component and its calibration compensation method. By reasonable hardware design, software calibration, compensation, and optimized design of the structural layout, the measurement accuracy and environmental adaptability of the product are improved, and the volume is reduced and the weight is lightened, etc.

[0004] The technical solution adopted by the present invention is as follows: A biaxial MEMS gyro component, comprising:

[0005] A base, an installation cavity is provided in the base, and a first installation boss and a second installation boss are provided in the installation cavity;

[0006] An MEMS gyro control circuit board, which is located in the installation cavity and is arranged on the first installation boss;

[0007] A cover plate, which is located at the top of the installation cavity and is arranged on the second installation boss.

[0008] As an optional technical solution, a signal processor, a power supply circuit, a gyro circuit, a gyro signal output circuit, and an acceleration signal circuit are provided on the MEMS gyro control circuit board. Among them, the signal output end of the gyro circuit is connected to the signal input end of the gyro signal output circuit, the signal output end of the gyro signal output circuit is connected to the signal processor, the signal output end of the acceleration signal circuit is connected to the signal input end of the signal processor, and the power supply circuit is connected to the signal processor.

[0009] As an optional technical solution, the chip model of the signal processor is STM32F103VBT6.

[0010] As an optional technical solution, a wiring terminal connected to the signal processor is further provided on the MEMS gyro control circuit board.

[0011] As an alternative technical solution, the signal processor embeds a gyro calibration program, and the gyro calibration program includes a receiving module, a zero position compensation module, a temperature acquisition module, a temperature compensation module, an installation error compensation processing module, and a self-check module.

[0012] The present invention also discloses a calibration compensation method based on the above-mentioned biaxial MEMS gyro component, including the following steps:

[0013] System initialization;

[0014] Check whether the time flag bit is set. If not, re-initialize. If so, proceed to the next step;

[0015] Receive gyro rate data and clear the time flag bit;

[0016] Perform zero position compensation through the zero position compensation module;

[0017] Obtain temperature data through the temperature acquisition module and perform temperature compensation through the temperature compensation module;

[0018] Perform installation error compensation processing;

[0019] Check whether the self-check flag is set. If not, re-check whether the time flag bit is set and repeat the above steps. If so, proceed to the next step;

[0020] Clear the self-check flag bit through the self-check module, then re-check whether the time flag bit is set and repeat the above steps.

[0021] The beneficial effects of the present invention are as follows: The biaxial MEMS gyro component provided in this application has the advantages of simple structure, easy processing, and convenient assembly; through calibration compensation, the measurement accuracy of the MEMS gyro can be improved, and through reasonable structure design, the anti-vibration performance and anti-shock performance of the whole product can be improved. The product has the characteristics of convenient maintenance, excellent heat dissipation performance, and can reduce the volume of the MEMS gyro component. Description of the Drawings

[0022] Figure 1 is a schematic structural diagram of the biaxial MEMS gyro component.

[0023] Figure 2 is Figure 1 a schematic diagram after removing the lower cover plate in.

[0024] Figure 3 is Figure 2 a schematic diagram after removing the MEMS gyro control circuit board in.

[0025] Figure 4 is the specific circuit structure diagram of the signal processor.

[0026] Figure 5 It is the specific circuit structure diagram of the power supply circuit.

[0027] Figure 6 It is the specific circuit structure diagram of the gyro circuit.

[0028] Figure 7 It is the specific circuit structure diagram of the gyro signal output circuit.

[0029] Figure 8 It is the specific circuit structure diagram of the acceleration signal circuit.

[0030] Figure 9 It is the specific circuit structure diagram of the wiring terminal.

[0031] Figure 10 It is the calibration compensation data processing process.

[0032] Figure 11 It is the flowchart of the calibration compensation method.

[0033] Figure 12 It is the interruption process diagram. Specific implementation mode

[0034] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. Usually, the components of the embodiments of the present invention described and illustrated herein can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed present invention, but merely represents selected embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts fall within the scope of protection of the present invention.

[0035] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Embodiment

[0036] As Figure 1 , Figure 2 and Figure 3 shown, a biaxial MEMS gyro component includes:

[0037] A base 1, an installation cavity is provided in the base 1, and a first installation boss 2 and a second installation boss 3 are provided in the installation cavity;

[0038] An MEMS gyro control circuit board 4, which is located in the installation cavity and is arranged on the first installation boss 2;

[0039] The cover plate 5 is located at the top of the shown installation cavity and is provided on the second mounting boss 3. Among them, the MEMS gyro control circuit board 4 is mounted on the first mounting boss 2 by screws 6. The first mounting boss 2 not only provides support for the MEMS gyro control circuit board 4 but also limits the position of the MEMS gyro control circuit board 4; the second mounting boss 2 not only provides support for the cover plate 5 but also limits the position of the cover plate 5. In this embodiment, through a reasonable structural design, the anti-vibration performance and anti-impact performance of the entire product are improved. The product has the characteristics of convenient maintenance and excellent heat dissipation performance, and can reduce the volume of the MEMS gyro assembly.

[0040] As an alternative embodiment, the MEMS gyro control circuit board is provided with a signal processor, a power supply circuit, a gyro circuit, a gyro signal output circuit, and an acceleration signal circuit. Among them, the signal output end of the gyro circuit is connected to the signal input end of the gyro signal output circuit, the signal output end of the gyro signal output circuit is connected to the signal processor, the signal output end of the acceleration signal circuit is connected to the signal input end of the signal processing, and the power supply circuit is connected to the signal processor. The chip model of the signal processor is STM32F103VBT6. The MEMS gyro control circuit board is also provided with a terminal block connected to the signal processor.

[0041] Among them, the specific circuit structure of the signal processor is as Figure 4 shown, the specific circuit structure of the power supply circuit is as Figure 5 shown, the specific circuit structure of the gyro circuit is as Figure 6 shown, the specific circuit structure of the gyro signal output circuit is as Figure 7 shown, the specific circuit structure of the acceleration signal circuit is as Figure 8 shown, and the specific circuit structure of the terminal block is as Figure 9 shown. In this embodiment, with the ARM chip STM32F103VBT6 as the core control chip, the output signal of the MEMS gyro is processed subsequently to achieve the form of external digital output, and the selectivity of the product output format is realized.

[0042] As an alternative embodiment, the signal processor embeds a gyro calibration program, and the gyro calibration program includes a receiving module, a zero position compensation module, a temperature acquisition module, a temperature compensation module, an installation error compensation processing module, and a self-check module. Through the above modules for calibration and compensation, the specific data processing process is as Figure 10 shown. The data obtained by multiplying the gyro raw data g by the accelerometer data f and the linear acceleration correction matrix H is processed, then temperature offset and constant offset are performed, then scale factor processing is carried out, and finally multiplied by the installation error correction matrix to obtain the final gyro output rate data r.

[0043] As Figure 11 shown, the present invention also discloses a calibration and compensation method for a biaxial MEMS gyroscope assembly based on the above, including the following steps:

[0044] System initialization;

[0045] Check whether the time flag bit is set. If not, re-initialize. If so, proceed to the next step;

[0046] Receive the gyro rate data and clear the time flag bit;

[0047] Perform zero-offset compensation through the zero-offset compensation module;

[0048] Obtain the temperature data through the temperature acquisition module and perform temperature compensation through the temperature compensation module;

[0049] Perform installation error compensation processing;

[0050] Check whether the self-test flag is set. If not, re-check whether the time flag bit is set and repeat the above steps. If so, proceed to the next step;

[0051] Clear the self-test flag bit through the self-test module, then re-check whether the time flag bit is set and repeat the above steps. Among them, the above method also involves an interrupt process, specifically as Figure 12 shown. After the system time is updated and the watchdog is kicked, the angular rate data is output and the interrupt ends. In this embodiment, through this method, zero-offset compensation, temperature compensation, scale factor compensation, and correction of installation errors can be performed on the MEMS gyroscope, improving the measurement accuracy of the MEMS gyroscope.

[0052] The above is only the specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present application can easily think of changes or substitutions, which should all be covered by the protection scope of the present application. All technical solutions falling within the scope defined by the claims of the present invention fall within the protection scope of the present invention.

Claims

1. A biaxial MEMS gyroscope assembly, characterized in that, it includes: a base, an installation cavity is provided in the base, and a first installation boss and a second installation boss are provided in the installation cavity; a MEMS gyro control circuit board, which is located in the installation cavity and is arranged on the first installation boss; a cover plate, which is located at the top of the installation cavity and is arranged on the second installation boss; the MEMS gyro control circuit board is provided with a signal processor, a power supply circuit, a gyro circuit, a gyro signal output circuit and an acceleration signal circuit. Among them, the signal output end of the gyro circuit is connected to the signal input end of the gyro signal output circuit, the signal output end of the gyro signal output circuit is connected to the signal processor, the signal output end of the acceleration signal circuit is connected to the signal input end of the signal processing, and the power supply circuit is connected to the signal processor; the signal processor is embedded with a gyro calibration program, and the gyro calibration program includes a receiving module, a zero position compensation module, a temperature acquisition module, a temperature compensation module, an installation error compensation processing module and a self-check module; the calibration compensation method of the biaxial MEMS gyroscope assembly includes the following steps: system initialization; check whether the time flag bit is set. If not, re-initialize. If so, go to the next step; receive gyro rate data and clear the time flag bit; perform zero position compensation through the zero position compensation module; acquire temperature data through the temperature acquisition module and perform temperature compensation through the temperature compensation module; perform installation error compensation processing; check whether the self-check flag is set. If not, re-check whether the time flag bit is set and repeat the above steps. If so, go to the next step; clear the self-check flag bit through the self-check module, then re-check whether the time flag bit is set and repeat the above steps.

2. The biaxial MEMS gyroscope assembly according to claim 1, characterized in that: the MEMS gyro control circuit board is also provided with a wiring terminal connected to the signal processor.

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