X-ray inspection equipment

Abstract

An X-ray inspection device that inspects an inspection object by photographing it using X-rays, the X-ray inspection device being characterized in that it comprises: an X-ray generator that generates X-rays to be irradiated toward the inspection object; an X-ray detector that detects the X-rays that have passed through the inspection object; a setting acceptance unit that accepts settings of conditions related to the photographing, i.e., photographing conditions; a required time estimation unit that estimates the required time for the set photographing conditions required for a prescribed process including photographing the inspection object using X-rays; and a required time display unit that displays the required time.

Description

Technical Field

[0001] The present invention relates to an X-ray inspection apparatus using X-ray transmission or CT (Computer Tomography). Background Art

[0002] Conventionally, in an X-ray inspection apparatus using X-ray CT (hereinafter referred to as an "X-ray CT apparatus"), a CT image is acquired by performing reconstruction processing using a plurality of (e.g., about 15 to 500) projection data (see Patent Document 1). When CT imaging is performed by an X-ray CT apparatus, if the imaging time of 15 images and 500 images is simply calculated, the difference is more than 30 times.

[0003] In particular, in an inspection device, the imaging time is related to the takt time (the time from the inspection object being carried into the inspection device to the time it is carried out from the inspection device). This takt time is an important factor in an inspection device. For example, in a production line configured to ship products after an inspection process using an X-ray inspection device, the number of shipments per day is limited according to the number of products that can be inspected per day using the X-ray inspection device.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent No. 6519663 Summary of the invention

[0007] Problems to be solved by the invention

[0008] However, conventionally, when determining imaging conditions using X-rays, it has not been possible to determine appropriate imaging conditions while taking takt time into consideration.

[0009] The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide an X-ray inspection apparatus that can determine appropriate imaging conditions in consideration of the time required for processing by displaying the time required for a predetermined process including imaging.

[0010] Means for solving problems

[0011] The present invention for solving the above-mentioned problems is an X-ray inspection device, which inspects an inspection object by photographing it using X-rays, and the X-ray inspection device is characterized in that it comprises: an X-ray generator, which generates X-rays to irradiate the inspection object; an X-ray detector, which detects the X-rays that have passed through the inspection object; a setting acceptance unit, which accepts the setting of conditions related to the photographing, i.e., photographing conditions; a required time estimation unit, which estimates the required time for the set photographing conditions required for a prescribed processing including photographing the inspection object using X-rays; and a required time display unit, which displays the required time.

[0012] According to the present invention, when using a setting acceptance unit to set shooting conditions when shooting an inspection object using X-rays, a required time estimation unit estimates the time required for a prescribed process including shooting of the inspection object using X-rays for the set shooting conditions, and the required time display unit displays the time, thereby enabling appropriate shooting conditions to be determined in consideration of the time required for the process.

[0013] In addition, in the present invention, it may be that the X-ray inspection device includes a unit shooting area setting unit for setting a unit shooting area, the unit shooting area is an area of ​​the inspection object corresponding to the field of view of the X-ray detector, the setting acceptance unit accepts the setting of the shooting conditions for the inspection object included in the inspection object, the unit shooting area setting unit sets the unit shooting area according to the shooting conditions set for the inspection object, the shooting conditions include exposure time and number of shots, the exposure time is the time for the X-rays generated in the X-ray generator to irradiate the unit shooting area, the number of shots is the number of times the unit shooting area is shot, and the required time includes the time for shooting the unit shooting area obtained by multiplying the exposure time by the number of shots.

[0014] In this way, the unit imaging region, which is the region of the inspection object corresponding to the field of view of the X-ray detector, is set according to the imaging conditions set corresponding to the inspection object included in the inspection object. Then, the required time including the time for imaging the unit imaging region obtained by multiplying the exposure time by the number of imaging is estimated and displayed. That is, the required time including the time required for multiple imaging of the unit imaging region from different angles, which is the main processing in the inspection using X-ray CT, is estimated and displayed, so that the time required for the processing can be considered more accurately and the appropriate imaging conditions can be determined.

[0015] In addition, in the present invention, the required time may include the sum of the time for shooting the unit shooting area obtained by multiplying the exposure time by the number of shots for all the unit shooting areas, and the unit shooting area setting unit sets the unit shooting area in a manner such that the number of unit shooting areas is small according to the inspected object.

[0016] Thus, even when a plurality of unit imaging regions are set for the inspection object, the required time for all the unit imaging regions, including the time required for a plurality of imaging of the unit imaging regions from different angles, which is a main process in the inspection using X-ray CT, is estimated and displayed. Furthermore, since the unit imaging regions are set in such a way that the number of unit imaging regions is small according to the inspection object, it is possible to more accurately consider the required time and determine appropriate imaging conditions without prolonging the time required for the processing.

[0017] Furthermore, in the present invention, the required time may include time for positioning the inspection object at a predetermined position for inspection.

[0018] This makes it possible to determine appropriate imaging conditions while also taking into account the time required for positioning the inspection object at a predetermined position for inspection.

[0019] Furthermore, in the present invention, the required time may include the time required to carry the inspection object into the X-ray inspection apparatus and the time required to carry the inspection object out of the X-ray inspection apparatus.

[0020] This makes it possible to determine appropriate imaging conditions while taking into consideration the time required for the process of carrying the inspection object into the X-ray inspection apparatus and the process of carrying it out from the X-ray inspection apparatus.

[0021] Effects of the Invention

[0022] According to the present invention, it is possible to provide an X-ray inspection apparatus that can determine appropriate imaging conditions in consideration of the time required for the processing by displaying the time required for a predetermined processing including imaging. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a functional block diagram of the X-ray inspection apparatus according to the first embodiment of the present invention.

[0024] Figure 2 This is a flowchart illustrating the procedure of inspection time display processing of the X-ray inspection apparatus according to the first embodiment of the present invention.

[0025] Figure 3This is a diagram illustrating a shooting condition setting UI (user interface) according to the first embodiment of the present invention.

[0026] Figure 4 It is a diagram showing the transition of the shooting condition setting UI according to the first embodiment of the present invention.

[0027] Figure 5 It is a diagram showing another transition of the shooting condition setting UI according to the first embodiment of the present invention.

[0028] Description of symbols

[0029] 1: X-ray inspection apparatus; 111: X-ray generator; 112: X-ray detector; 123: inspection time estimation unit; 131: imaging condition setting UI; 132: inspection time display UI. DETAILED DESCRIPTION

[0030] [Application Examples]

[0031] Hereinafter, application examples of the present invention will be described with reference to the drawings.

[0032] Figure 1 is a functional block diagram of an X-ray inspection device 1 to which the present invention is applied, Figure 2 1 is a flowchart illustrating the procedure of the inspection time display process in the X-ray inspection apparatus 1 .

[0033] In the X-ray inspection apparatus 1, first, the user selects an inspection object for which the imaging conditions are to be set (changed) through the imaging condition setting UI 131 (step S1). Here, the inspection object refers to a component or region included in an inspection target such as a substrate.

[0034] Next, the user sets or changes the imaging conditions for the selected inspection object through the imaging condition setting UI 131 (step S2).

[0035] When the imaging condition is set (changed) in this way, the angle of view allocating unit 122 allocates the angle of view corresponding to the selected inspection object (step S3). The angle of view is the field of view when the X-ray detector 112 captures the inspection object through which the X-rays emitted from the X-ray generator 111 pass. The angle of view allocating unit 122 allocates the angle of view in a manner that the number of allocated angles is smaller, preferably the smallest, according to the selected inspection object. For example, in Figure 4 In the shooting condition setting UI 131 shown in FIG. 1 , in the inspection object display area 1311, a B component 1311b and an E component 1311e are displayed as selected inspection objects in a rectangular thick-line frame. Figure 5As shown in the component list display unit 1314, by changing the resolution in the shooting conditions from 30 to 25 and the number of projections from 64 to 256 for both the B component and the E component, the viewing angle 13113 is allocated to the B component 1311b and the viewing angle 13111 is allocated to the E component.

[0036] Next, the inspection time estimation unit 123 estimates the inspection time, that is, calculates the estimated inspection time (step S4). The inspection time is the time required for a predetermined process including at least photographing the inspection object using X-rays, and various calculation methods can be used. Here, the inspection time estimation unit 123 calculates the estimated inspection time as 69.4 seconds.

[0037] The estimated examination time calculated in step S4 is sent to the examination time display UI 132 and displayed (step S5), and the examination time display process ends. Figure 5 In the imaging condition setting UI 131 shown, the estimated examination time display section 133 e of the detailed information display section 1313 displays 69.4 seconds.

[0038] As described above, according to the present invention, by estimating the examination time corresponding to the imaging condition and displaying it in real time, the user can determine the appropriate imaging condition while taking the examination time into consideration.

[0039] (Example 1)

[0040] Hereinafter, an X-ray inspection apparatus 1 according to Example 1 of the present invention will be described in more detail with reference to the drawings. However, the configuration of the apparatus described in this embodiment may be appropriately changed according to various conditions. That is, the scope of the present invention is not limited to the following embodiment.

[0041] <Device Structure>

[0042] Figure 1 1 is a functional block diagram showing a schematic configuration of the X-ray inspection apparatus 1. Here, an X-ray inspection apparatus using an X-ray CT image will be described.

[0043] The X-ray inspection device 1 is a device that obtains three-dimensional data by photographing an inspection object from multiple photographing positions, and is mainly composed of an imaging unit 11, a computing unit 12, a UI unit 13, an inspection object conveying unit 14, and a bus 15. The bus 15 is a transmission path that connects the various parts and sends and receives data. As an inspection object, a substrate can be listed, for example, but it is not limited to this.

[0044] The imaging unit 11 includes an X-ray generator 111 , an X-ray detector 112 , a stage 113 , a positioning unit 114 , and an imaging condition storage unit 115 .

[0045] The X-ray generator 111 is a device that irradiates an inspection object with X-rays.

[0046] The X-ray detector 112 is a two-dimensional X-ray detector that detects X-rays output from the X-ray generator 111 and transmitted through the inspection object and forms an image, and can use, for example, an II (Image Intensifier) ​​tube or an FPD (Flat Panel Detector).

[0047] The worktable 113 is a mechanism for changing the relative positions of the X-ray generator 111, the X-ray detector 112, and all or part of the inspection object in the X, Y, and Z directions in order to image the inspection object from a plurality of imaging positions.

[0048] The positioning unit 114 is a unit for positioning the inspection object at a specified position for inspection, and includes: a CCD camera, which is used to detect the position of the inspection object in the XY plane; a displacement sensor, which detects the position in the Z direction orthogonal to the XY plane; and a mechanism for processing these detection results to position the inspection object at a specified position.

[0049] The imaging condition storage unit 115 is a predetermined area of ​​a memory (for example, composed of an auxiliary storage unit described later), and stores imaging conditions in association with the inspection time when the inspection is performed under the imaging conditions.

[0050] The operation unit 12 includes an inspection object information storage unit 121, a viewing angle allocation unit 122, and an inspection time estimation unit 123. The operation unit 12 is a device that performs various operations such as calculation and inspection processing of X-ray CT, and can also be composed of a logic circuit such as an ASIC (Application Specific Integrated Circuit) or an FPGA (Field Programmable Gate Array). In addition, a general general-purpose operation device called a CPU (central processing unit), a main storage unit, and an auxiliary storage unit can be used. As the main storage unit, a memory such as RAM can be used. The auxiliary storage unit can use ROM, HDD, SSD, etc.

[0051] The inspection object information storage unit 121 is a specified area of ​​a memory (for example, composed of an auxiliary storage unit), which uses the CAD data of the inspection object and the sample of the inspection object to store information related to the inspection object, the inspected objects (components, areas) contained in the inspection object, and their shapes and configurations (positional relationships).

[0052] The angle of view allocating unit 122 is a functional unit that allocates an area corresponding to the field of view when the inspection object is photographed by the X-ray detector 112, according to the photographing conditions that can be set for each inspection object. When the inspection object is allocated multiple angles of view according to the photographing conditions set for the inspection object, the angle of view allocating unit 122 allocates the angles in a manner that the number of angles is smaller, preferably the smallest. Here, the angle of view corresponds to the unit photographing area of ​​the present invention, and the angle of view allocating unit corresponds to the unit photographing area setting unit of the present invention.

[0053] The inspection time estimation unit 123 is a functional unit that estimates the inspection time of the inspection object based on the set shooting conditions and the correspondingly allocated viewing angles. Here, the inspection time is an example of the required time required for a prescribed process including the shooting of the inspection object using X-rays, and corresponds to the required time of the present invention. The inspection time can be set to the time for inspecting the object to be inspected by obtaining an inspection image of a desired position (area) based on the three-dimensional data reconstructed based on the image obtained by shooting the inspection object positioned at a prescribed position of the X-ray inspection device 1 by the X-ray detector 112. The inspection time may also include the time required to position the inspection object moved into the X-ray inspection device 1 by the positioning unit 114 mentioned above. In addition, the inspection time may also include the time required to move the inspection object into the X-ray inspection device 1 and move the inspection object after the inspection is completed out of the X-ray inspection device 1. In this case, the inspection time estimation unit 123 corresponds to the required time estimation unit of the present invention.

[0054] The UI unit 13 includes an imaging condition setting UI 131 and an inspection time display UI 132. The UI unit 13 is an interface for transmitting and receiving various information between the user and the X-ray inspection apparatus 1, and can be displayed on a touch panel display that also serves as an input / output unit, or on an output unit such as an independently constructed display, and receive inputs from input units such as a mouse and a keyboard.

[0055] The imaging condition setting UI 131 is a user interface for accepting input of imaging conditions for each object to be inspected included in the inspection target, and is configured by, for example, Figure 3 The user interface composition shown.

[0056] The examination time display UI 132 is a user interface for displaying the examination time estimated by the examination time estimation unit 123. The examination time display UI 132 corresponds to a required time display unit of the present invention.

[0057] Inspection object conveying unit 14 is a mechanism for conveying the inspection object into X-ray inspection apparatus 1 and conveying the inspection object after inspection out of X-ray inspection apparatus 1, and is constituted by, for example, a conveyor or the like.

[0058] <Inspection time display processing>

[0059] Next, the procedure of the inspection time display processing will be described.

[0060] Figure 3 to Figure 5 FIG. 1 shows an example of an imaging condition setting UI 131 displayed on the display of the X-ray inspection apparatus 1. Figure 3 to Figure 5 This is also an example of checking the time display UI 132.

[0061] In the description refer to Figure 2 Before checking the process of the time display processing shown in the flowchart, refer to Figure 3 , the structure of the shooting condition setting UI 131 is described.

[0062] A quadrilateral inspection object display area 1311 is arranged in the upper left part of the screen. An image representing a predetermined area of ​​the inspection object is displayed in the inspection object display area 1311. The predetermined area displayed in the inspection object display area 1311 may be the entire inspection object or a part thereof. Here, the state of the predetermined area of ​​the substrate as the inspection object observed from the height direction (Z direction) is shown. What is displayed in the inspection object display area 1311 may be the CAD data of the inspection object or an image generated based on the CAD data, or an image of a sample of the inspection object.

[0063] In addition, the inspection object display area 1311 also displays the inspection object such as the electronic component mounted on the substrate as the inspection object, the reference mark formed on the substrate, etc. In the description of the shooting condition setting UI 131, the inspection object and the reference mark are collectively referred to as a component. Here, the inspection object display area 1311 displays the A component 1311a, the B component 1311b, the C component 1311c, the D component 1311d, the E component 1311e, the F component 1311f, the G component 1311g, and the H component 1311h. Here, the A component 1311a, the B component 1311b, the E component 1311e, the F component 1311f, the G component 1311g, and the H component 1311h are the inspection objects such as the electronic component, and the C component 1311c and the D component 1311d are the reference marks photographed by the CCD camera of the positioning unit 114.

[0064] In addition, the fields of view of the X-ray detector 112 when imaging the substrate to be inspected by X-rays, that is, angles of view 13111 and 13112 are displayed as quadrilateral frames. The angle of view 13111 includes an A component 1311a, a B component 1311b, and an E component 1311e, and the angle of view 13112 includes an F component 1311f, a G component 1311g, and an H component 1311h.

[0065] An imaging condition setting unit 1312 is arranged at the upper right portion of the screen of the imaging condition setting UI 131. The imaging condition setting unit 1312 includes a pull-down menu 1312a for setting the number of shots, a pull-down menu 1312b for setting the resolution (μm), a pull-down menu 1312c for setting the irradiation angle (°), a pull-down menu 1312d for setting the tube voltage (kV), a pull-down menu 1312e for setting the tube current (μA), and a pull-down menu 1312f for setting the exposure time (msec). Here, as default values, 64 shots, 30 μm resolution, 45° irradiation angle, 100 kV tube voltage, 295 μA tube current, and 85 msec exposure time are selected.

[0066] A detailed information display unit 1313 is arranged in the middle right part of the screen of the imaging condition setting UI 131. The detailed information display unit 1313 includes a total number of parts display unit 1313a, a total number of screens display unit 1313b, a CCD screen number display unit 1313c, an X-ray screen number display unit 1313d, and an estimated inspection time display unit 1313e. The total number of parts display unit 1313a displays the number of parts included in the inspection object displayed in the inspection object display area 1311. Here, as described above, the inspection object includes eight parts, namely, the A part 1311a to the H part 1311h, and therefore 8 is displayed as the total number of parts. The total number of screens indicates the sum of the number of angles of view of the X-ray detector 112, namely, the number of X-ray screens, and the number of angles of view of the CCD camera included in the positioning unit 114, namely, the number of CCD screens. As shown in the inspection object display area 1311, the number of X-ray screens is two, namely, the viewing angle 13111 and the viewing angle 13112, and the number of CCD screens is two, namely, the viewing angles for the C component 1311c and the D component 1311d, so that the total number of screens is displayed as 4. The X-ray screen number display unit 1313d displays the above-mentioned number of X-ray screens, and the CCD screen number display unit 133c displays the above-mentioned number of CCD screens.

[0067] The estimated inspection time display section 133e is Figure 1 The examination time display UI 132 in the display unit 132 displays the examination time estimated by the examination time estimation unit 123. Here, 31.2 seconds is displayed as the examination time estimated based on the above-mentioned imaging conditions, the number of X-ray screens, and the number of CCD screens.

[0068] A component list display section 1314 is arranged at the bottom of the screen of the imaging condition setting UI 131. Here, for each of the A to H components displayed in the inspection object display area 1311, the surface where the component is located, the irradiation angle, resolution, number of projections, tube voltage, tube current, and exposure time as imaging conditions are displayed. For the C and D components as reference marks, since the only imaging condition that can be set is the resolution, no values ​​are displayed for other imaging conditions such as the irradiation angle.

[0069] A confirmation button 1315 and a cancel button 1316 are arranged at the upper right corner of the screen of the imaging condition setting UI 131. When the user who has confirmed the display of the estimated inspection time determines that the inspection time is appropriate, the user can confirm the set or changed imaging condition by placing the cursor on the confirmation button 1315 and clicking the mouse left, etc. When the user determines that the inspection time is not appropriate, the user can change the imaging condition by selecting the cancel button 1316. At this time, the user can also start again from the selection of the inspection object.

[0070] A substrate front surface display 1317 and a substrate back surface display 1318 are arranged at the upper center of the screen of the imaging condition setting UI 131. When the front surface of the substrate to be inspected is displayed in the inspection target display area 1311, the substrate front surface display 1317 is effectively displayed, and when the back surface of the substrate is displayed, the substrate back surface display 1318 is effectively displayed. Here, the front surface of the substrate is displayed in the inspection target display area 1311, and the substrate front surface display 1317 is effectively displayed.

[0071] Below, return Figure 2 The flowchart of the inspection time display processing is described below.

[0072] When the inspection time display process starts, the user selects an object to be inspected (step S1). Figure 3 In the shooting condition setting UI 131 shown in FIG. 1 , the user moves the cursor displayed on the screen to the position of the B component 1311b in the inspection object display area 1311 and performs an operation such as left-clicking the mouse to select the B component 1311b. Then, the user selects the E component 1311e in the same manner. In this way, when the B component 1311b and the E component 1311e are selected, as shown in FIG. Figure 4 As shown in FIG. 1 , the selected component is displayed in bold. The display method of the selected component is not limited to this, and a method such as changing the display color can be appropriately adopted. In addition, when a component is selected, as shown in FIG. Figure 4As shown, the display color of the row of the selected component is changed in the component list display section 1314. Here, the row of the B component 1311b and the E component 1311e is displayed in gray. The change in the display mode of the selected component is not limited to this, and a method such as inverting the display can be appropriately adopted.

[0073] Next, the user sets or changes the X-ray imaging conditions (step S2). Figure 4 In the imaging condition setting UI 131 in the state shown, the user changes the X-ray imaging condition. The changed imaging condition is stored in the imaging condition storage unit 115 in association with the inspection object selected in step S1. The X-ray imaging condition is changed by selecting a drop-down menu for setting the imaging condition to be changed from the drop-down menus 1312a to 1312f configured in the imaging condition setting unit 1312, and changing the numerical value. Here, in the state where the B component 1311b of the inspection object display area 1311 is selected, the number of projections of the imaging condition setting unit 1312 is changed from 64 to 256, and the resolution is changed from 30 to 25. For the E component 1311e of the inspection object display area 1311, the number of projections is also changed from 64 to 256, and the resolution is changed from 30 to 25. Figure 5 This shows that the number of projections and the resolution have been changed by the imaging condition setting unit 1312. In response to the change in the imaging conditions, the resolution is changed to 25 and the number of projections is changed to 256 in the rows of the B component and the E component in the component list display unit 1314.

[0074] As described above, when the shooting conditions are set or changed, the angle of view is allocated by the angle of view allocation unit 122 in response thereto (step S3). Figure 5 As shown, in accordance with the change in the imaging condition, in the inspection object display area 1311, in addition to the angle of view 13111 including the E component 1311e, the angle of view 13112 including the F component 1311f, the G component 1311g, and the H component 1311h, a new angle of view 13113 including the B component 1311b and the A component 1311a is allocated. In addition, 3 is displayed in the X-ray screen display part 1313d of the detailed information display part 1313. At this time, when the inspection object is allocated a plurality of angles of view, the angle of view allocation part 122 allocates the angles of view in a manner that the number of angles is smaller, preferably the smallest. In this way, the number of angles of view captured during the inspection is reduced, so that the imaging time and the inspection time can be shortened.

[0075] Next, the examination time estimation unit 123 estimates the examination time, that is, calculates the estimated examination time, based on the imaging conditions set or changed in step S2 and the angle of view allocated in step S3 (step S4).

[0076] The inspection time estimated in the inspection time estimation unit 123 is the time required for a prescribed process including at least photographing the inspection object using X-rays, and various calculation methods can be used. For example, the inspection time includes the photographing time of the viewing angle obtained by multiplying the exposure time by the number of photographing times. In addition, the inspection time may also include the sum of the photographing time of the viewing angle obtained by multiplying the exposure time by the number of photographing times for all photographed viewing angles. The inspection time may include the time obtained by adding the time for the photographing unit 11 to move from one viewing angle to the next viewing angle to the time calculated in this way. In addition, the inspection time may also include the time required for positioning the inspection object by the positioning unit 114, such as the photographing time of the CCD camera and the detection time of the displacement sensor. In addition, it may also include the time required for carrying the inspection object into the X-ray inspection device 1 by the inspection object conveying unit 14 and the time required for carrying it out of the X-ray inspection device 1.

[0077] The above-described movement between viewing angles, positioning by the positioning unit 114, and carrying in and carrying out of the inspection object by the inspection object transport unit 14 are examples of the predetermined processing of the present invention.

[0078] exist Figure 5 In the example shown, in the imaging conditions for the B component 1311b and the E component 1311e, the resolution is changed from 30 to 25, and the number of projections is changed from 64 to 256. With respect to the imaging conditions after such a change, the inspection time estimation unit 123 calculates the estimated inspection time as 69.4 seconds.

[0079] In detail, Figure 5 In the example shown, for component B 1311b, the number of projections is 256, so 256 shots are taken from different angles for the viewing angle represented by viewing angle 13113. Since the exposure time of the X-rays at each shot is 85 msec, the shooting time of component B is obtained by multiplying the exposure time by the number of shots, which is 85 (msec) × 256 / 1000 = 21.8 seconds. Similarly, for component E 1311e, the number of projections is 256, so 256 shots are taken from different angles for the viewing angle represented by viewing angle 13111. Since the exposure time of the X-rays at each shot is 85 msec, the shooting time of component E 1311e is obtained by multiplying the exposure time by the number of shots, which is 85 (msec) × 256 / 1000 = 21.8 seconds. Figure 4 In the example shown, for the view angle 13111 including the B component 1311b and the E component 1311e, 64 shots are taken from different angles with an X-ray exposure time of 85 msec, so the shooting time is 85 (msec) × 64 / 1000 = 5.4 seconds. Figure 4 The example shown is changed to Figure 5 The example shown causes an increase in the shooting time of 21.8-5.4=16.4 seconds. If the newly allocated viewing angle 13113 is added with the above-mentioned shooting time of 21.8 seconds, then due to the change in shooting conditions Figure 4 The example shown is changed to Figure 5 The increase in imaging time due to the example shown is 38.2 seconds. Therefore, the estimated inspection time after the imaging condition change is 69.4 seconds, which is an increase of 38.2 seconds from the estimated inspection time of 31.2 seconds before the imaging condition change.

[0080] The estimated examination time calculated as described above is sent to the examination time display UI 132 and displayed on the estimated examination time display part 1313e (step S5), and the examination time display process ends.

[0081] In this way, by estimating the examination time corresponding to the imaging condition and displaying it in real time, the user can decide on the appropriate imaging condition while taking the examination time into consideration.

[0082] In addition, in order to be able to compare the structural elements of the present invention with the structures of the embodiments, the structural elements of the present invention are described with reference numerals.

[0083] <Invention 1>

[0084] An X-ray inspection device (1) for inspecting an inspection object by imaging using X-rays, the X-ray inspection device (1) comprising:

[0085] An X-ray generator (111) generates X-rays to be irradiated toward the inspection object;

[0086] An X-ray detector (112) for detecting X-rays that have passed through the inspection object;

[0087] a setting accepting unit (131) for accepting setting of conditions related to the shooting, i.e., shooting conditions;

[0088] a required time estimating unit (123) for estimating the required time required for the set imaging conditions and required for a predetermined process including imaging of the inspection object using X-rays; and

[0089] A required time display unit (132) is provided for displaying the required time.

Claims

1. An X-ray inspection device for inspecting an inspection object by imaging using X-rays, the X-ray inspection device comprising: An X-ray generator generates X-rays to be irradiated toward the inspection object; An X-ray detector for detecting X-rays that have passed through the inspection object; a setting accepting unit that accepts setting of conditions related to the photographing, i.e., photographing conditions; a unit imaging region setting unit for setting a unit imaging region, the unit imaging region being a region of the inspection object corresponding to the field of view of the X-ray detector; a required time estimating unit that estimates a required time for the set imaging condition, which is required for a predetermined process including imaging of the inspection object using X-rays; and a required time display unit, which displays the required time, The setting accepting unit accepts the setting of the imaging condition for the inspection object included in the inspection target, The unit imaging region setting unit sets the unit imaging region according to the imaging condition set for the inspection object. The shooting conditions include exposure time and shooting number, wherein the exposure time is the time for the X-rays generated in the X-ray generator to irradiate the unit shooting area, and the shooting number is the number of times the unit shooting area is shot. The required time includes the time for photographing the unit photographing area obtained by multiplying the exposure time by the number of photographing times.

2. The X-ray inspection device according to claim 1, characterized in that: The required time includes the sum of the time for photographing the unit photographing area obtained by multiplying the exposure time by the number of photographing times for all the unit photographing areas. The unit imaging region setting unit sets the unit imaging regions in accordance with the inspection object so that the number of the unit imaging regions is small.

3. The X-ray inspection device according to claim 1 or 2, characterized in that: The required time includes time for positioning the inspection object at a predetermined position for inspection.

4. The X-ray inspection device according to claim 1 or 2, characterized in that: The required time includes the time for carrying the inspection object into the X-ray inspection apparatus and the time for carrying the inspection object out of the X-ray inspection apparatus.

Images