Mask assembly, mask, and method for manufacturing display panel

Abstract

Disclosed are a mask assembly, a mask, and a method for manufacturing a display panel. The mask assembly includes: a mask frame, a plurality of unit openings defined by the mask frame; and a plurality of unit masks, each disposed to correspond to the unit openings. Each of the unit masks includes: a mask body substantially parallel to a plane defined by a first direction and a second direction intersecting the first direction, wherein a plurality of holes are defined by the mask body; a coupling portion disposed along an edge of the mask body; and a stretching portion extending from the coupling portion and disposed to be separated from the mask body. The stretching portion includes: a first stretching portion spaced apart from each other in the first direction and disposed at opposite sides of the mask body; and a second stretching portion spaced apart from each other in the second direction and disposed at opposite sides of the mask body.

Description

[0001] This application claims priority to and all benefits of Korean Patent Application No. 10-2020-0083478, filed on Jul. 7, 2020, which is hereby incorporated by reference herein in its entirety. Technical Field

[0002] The present invention relates to a mask assembly, a mask manufactured using the mask assembly, and a method for manufacturing a display panel using the mask. More particularly, the present invention relates to a mask with improved process yield and reliability, a mask assembly for manufacturing the mask, and a method for manufacturing a display panel using the mask. Background Art

[0003] A display panel typically includes a plurality of pixels. Each pixel may include a driving element such as a transistor and a display element such as an organic light-emitting diode. The display element may be formed by stacking electrodes and a light-emitting pattern on a substrate.

[0004] The light-emitting pattern can be patterned using a mask having holes defined therethrough, so that the light-emitting pattern is formed in a predetermined area exposed by the holes. The light-emitting pattern can have a shape determined by the shape of the holes. In recent years, technologies for manufacturing equipment and methods for large-area masks have been developed to increase the production yield of display panels including light-emitting patterns. Summary of the Invention

[0005] A mask assembly with improved reliability and quality is disclosed for manufacturing a large-area mask for a large display panel.

[0006] A mask manufactured using a mask assembly is disclosed.

[0007] A method of manufacturing a display panel using a mask is disclosed.

[0008] An embodiment of the invention provides a mask assembly, comprising: a mask frame defining a plurality of unit openings; and a plurality of unit masks disposed to correspond to the plurality of unit openings, respectively. In such an embodiment, each of the plurality of unit masks comprises: a mask body substantially parallel to a plane defined by a first direction and a second direction intersecting the first direction, wherein a plurality of holes are defined by the mask body; a coupling portion disposed along an edge of the mask body; and a stretching portion extending from the coupling portion and disposed to be spaced apart from the mask body. In such an embodiment, the stretching portion comprises: a first stretching portion spaced apart from each other in the first direction and disposed on opposite sides of the mask body; and a second stretching portion spaced apart from each other in the second direction and disposed on opposite sides of the mask body.

[0009] In an embodiment, the first stretching portion may include a first side stretching portion and a second side stretching portion disposed at opposite sides of the mask body facing each other in the first direction, and the second stretching portion may include a third side stretching portion and a fourth side stretching portion disposed at opposite sides of the mask body facing each other in the second direction.

[0010] In an embodiment, the stretching portion may include: a plurality of protruding portions protruding in a direction away from the mask main body; and a concave portion defined between the plurality of protruding portions and concave toward the mask main body.

[0011] In an embodiment, each of the plurality of unit masks may include a recessed portion defined between the first and second stretching portions and recessed toward the mask main body.

[0012] In an embodiment, each of the plurality of unit masks may include a rounded portion connecting the first tension portion to the second tension portion.

[0013] In an embodiment, the plurality of unit openings of the mask frame may include: a first unit opening; and a second unit opening having a size different from that of the first unit opening when viewed in a plane.

[0014] In an embodiment, the plurality of unit masks may include a first unit mask having a region corresponding to the first unit opening in a plane; and a second unit mask having a region corresponding to the second unit opening in a plane.

[0015] In an embodiment, at least a portion of the coupling portion may have a thickness smaller than a thickness of the mask main body and a thickness of the tensile portion.

[0016] In an embodiment, the bonding portion may include a plurality of half-etched patterns having a thickness smaller than that of the mask main body and that of the tensile portion.

[0017] In an embodiment, each of the plurality of unit masks may include: a plurality of unit regions each having a plurality of holes defined therethrough; and an extension region defined between the plurality of unit regions.

[0018] In an embodiment, the mask frame may include bonding areas defined along edges of the plurality of cell openings.

[0019] In an embodiment, the plurality of unit openings may be arranged to be spaced apart from each other in at least one direction selected from the first direction and the second direction.

[0020] In an embodiment, the mask frame may include a support region defined between the plurality of unit openings.

[0021] An embodiment of the invention provides a mask comprising: a mask frame defining a plurality of unit openings; and a plurality of individual masks coupled to the mask frame so as to correspond to the plurality of unit openings, respectively. In such an embodiment, each of the plurality of individual masks comprises: a mask body comprising a first side and a second side facing each other in a first direction and extending in a second direction intersecting the first direction, and a third side and a fourth side facing each other in a second direction and extending in the first direction, wherein a plurality of holes are defined by the mask body; and a coupling portion defined along an edge of the mask body. In such an embodiment, the mask body of each of the plurality of individual masks receives a first tension in the first direction and a second tension in the second direction.

[0022] In an embodiment, the bonding portion may include: a first bonding portion, disposed adjacent to the first side; a second bonding portion, disposed adjacent to the second side; a third bonding portion, disposed adjacent to the third side; and a fourth bonding portion, disposed adjacent to the fourth side, and each of the first bonding portion, the second bonding portion, the third bonding portion and the fourth bonding portion may be bonded to the mask frame.

[0023] In an embodiment, each of the first bonding portion, the second bonding portion, the third bonding portion, and the fourth bonding portion may include a metal oxide.

[0024] An embodiment of the invention provides a method for manufacturing a display panel, the method comprising the following steps: preparing a target substrate; forming a mask having a plurality of holes defined therethrough so as to place the mask under the target substrate; forming a plurality of patterns corresponding to the plurality of holes; and removing the mask. In such an embodiment, the step of forming the mask comprises: preparing a mask frame having a plurality of unit openings defined therethrough; and combining unit masks so as to correspond to the plurality of unit openings, respectively. In such an embodiment, each of the unit masks comprises: a mask body substantially parallel to a plane defined by a first direction and a second direction intersecting the first direction, wherein the plurality of holes are defined by the mask body; a combining portion disposed along an edge of the mask body; and a stretching portion extending from the combining portion and disposed to be spaced apart from the mask body. In such an embodiment, the stretching portion comprises: first stretching portions spaced apart from each other in the first direction and disposed on opposite sides of the mask body; and second stretching portions spaced apart from each other in the second direction and disposed on opposite sides of the mask body.

[0025] In an embodiment, coupling the unit masks may include: providing unit masks respectively corresponding to the plurality of unit openings; irradiating a laser beam to a coupling portion of each of the unit masks to couple the mask frame to the unit masks; and removing the tension portion.

[0026] In an embodiment, the step of combining the unit masks may further include stretching the unit masks to correspond to the plurality of unit openings before disposing the unit masks.

[0027] In an embodiment, the mask frame may include a bonding region defined along an edge of each of the plurality of unit openings, and the laser beam may be irradiated between the bonding portion and the bonding region in bonding of the mask frame and the unit mask.

[0028] In an embodiment, the plurality of unit openings may include: a first unit opening; and a second unit opening having a size different from that of the first unit opening in a plane, and the unit mask may include: a first unit mask combined to correspond to the first unit opening; and a second unit mask combined to correspond to the second unit opening.

[0029] In an embodiment, the pattern may be a luminescent pattern including a luminescent material.

[0030] According to the embodiment, since the unit mask is stretched in two directions while manufacturing a large-area mask using the unit mask, the degradation of the reliability and quality of the mask caused by the shrinkage of the unit mask can be effectively prevented. Therefore, a large display panel with improved display quality can be manufactured using the mask assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The above and other features disclosed will become readily apparent by reference to the following detailed description when considered in conjunction with the accompanying drawings, in which:

[0032] Figure 1 and Figure 2 is a perspective view illustrating a mask manufactured by a mask assembly according to a disclosed embodiment;

[0033] Figure 3 is a perspective view illustrating a mask assembly according to a disclosed embodiment;

[0034] Figure 4 is a plan view showing a cell mask according to an exemplary embodiment of the disclosure;

[0035] Figure 5 is a cross-sectional view showing a portion of a cell mask according to a disclosed embodiment;

[0036] Figures 6 to 9 are plan views showing various embodiments of a cell mask;

[0037] Figure 10 is a perspective view illustrating a mask assembly according to an alternative embodiment of the disclosure;

[0038] Figure 11Ais a plan view showing a process of a method of manufacturing a mask according to a disclosed embodiment;

[0039] Figures 11B to 11D are cross-sectional views illustrating some processes of a method for manufacturing a mask according to a disclosed embodiment;

[0040] Figure 12 is a cross-sectional view illustrating a deposition apparatus according to a disclosed embodiment;

[0041] 13A to 13C is a perspective view illustrating a method of manufacturing a display panel according to a disclosed embodiment; and

[0042] Figure 14 is a cross-sectional view illustrating a display panel according to a disclosed embodiment. DETAILED DESCRIPTION

[0043] Hereinafter, the invention will now be described more fully with reference to the accompanying drawings, in which various embodiments are shown. However, the invention can be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

[0044] Throughout the disclosure, it will be understood that when an element or layer is referred to as being “on,” “connected to,” or “coupled to” another element or layer, it can be directly on, directly connected to, or directly coupled to the other element or layer, or intervening elements or layers may be present.

[0045] Like reference numerals refer to like elements throughout. In the accompanying drawings, the thickness, proportions, and sizes of components are exaggerated for the purpose of effectively describing the technical content. As used herein, the term "and / or" includes any and all combinations of one or more of the relevant listed items.

[0046] It will be understood that although the terms first, second, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. Therefore, the first element discussed below may be named the second element without departing from the disclosed teachings.

[0047] The terms used herein are only used to describe the purpose of specific embodiments and are not intended to limit. As used herein, unless the context clearly indicates otherwise, "one", "one (kind / person)", "the (described)" and "at least one (kind / person)" do not represent the limitation of quantity and are intended to include both the singular and the plural. For example, unless the context clearly indicates otherwise, "element" has the same meaning as "at least one (kind / person) element". "At least one (kind / person)" is not interpreted as limiting "one" or "one (kind / person)". "Or" means "and / or". As used herein, the term "and / or" includes any combination and all combinations of one or more of the relevant listed items. It will also be understood that when the terms "comprise", "comprising" and / or variations thereof are used in this specification, the description indicates the presence of stated features, regions, wholes, steps, operations, elements, components and / or their groups, but does not exclude the presence or addition of one or more other features, regions, wholes, steps, operations, elements, components and / or their groups.

[0048] For ease of description, spatially relative terms such as “under,” “beneath,” “lower,” “over,” “upper,” etc. may be used herein to describe the relationship of one element or feature to another (other) elements or features as shown in the drawings.

[0049] As used herein, "about" or "approximately" is inclusive of the stated value and means within an acceptable range of deviation from the particular value as determined by one of ordinary skill in the art, taking into account the measurements in question and errors associated with the measurement of the particular quantity (i.e., limitations of the measurement system). For example, "about" can mean within one or more standard deviations, or within ±30%, ±20%, ±10%, or ±5% of the stated value.

[0050] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present disclosure belongs. It will also be understood that terms (such as those defined in common dictionaries) should be interpreted as having a meaning consistent with their meaning in the context of the relevant art and the present disclosure, and will not be interpreted in an idealized or overly formal sense unless expressly defined as such herein.

[0051] Embodiments are described herein with reference to cross-sectional illustrations which are schematic diagrams of idealized embodiments. As such, variations in the shapes of the illustrations due to, for example, manufacturing techniques and / or tolerances are to be expected. Therefore, the embodiments described herein should not be construed as limited to the specific shapes of the regions as shown herein, but rather are to include deviations in shape due to, for example, manufacturing. For example, a region shown or described as flat may typically have rough and / or nonlinear features. Additionally, sharp angles shown may be rounded. Therefore, the regions shown in the drawings are schematic in nature, and the shapes of the regions are not intended to illustrate the precise shapes of the regions, nor are they intended to limit the scope of the claims.

[0052] Hereinafter, embodiments of a mask and a mask assembly will be described in detail with reference to the accompanying drawings.

[0053] Figure 1 and Figure 2 1 is a perspective view showing a mask MK manufactured by a mask assembly according to an embodiment of the disclosure. For ease of illustration and description, Figure 2 One unit mask CMK-a is shown separated from the mask frame MF.

[0054] Reference Figure 1 and Figure 2 The embodiment of the mask MK can be used in a manufacturing process of a display device. In such an embodiment, the mask MK can be used in a process of depositing a light-emitting pattern of a light-emitting element on a deposition substrate of a display device.

[0055] The mask MK may have a rectangular parallelepiped shape. In one embodiment, for example, the mask MK may include two long sides extending in a first direction DR1 and two short sides extending in a second direction DR2. The second direction DR2 indicates a direction crossing the first direction DR1.

[0056] The mask MK may be a plate having a thin thickness in the third direction DR3. The third direction DR3 may indicate a direction substantially perpendicular to a plane defined by the first direction DR1 and the second direction DR2. Hereinafter, in the disclosure, the expression "when viewed in a plane" may refer to a state viewed in the third direction DR3.

[0057] The mask MK may include a mask frame MF and a plurality of individual masks CMK-a. The mask frame MF and the individual masks CMK-a may include a metal material such as stainless steel ("SUS"), Invar, nickel (Ni), or cobalt (Co). In one embodiment, for example, the mask frame MF and the individual masks CMK-a may include Invar. However, the materials used for the mask frame MF and the individual masks CMK-a are not limited thereto or thereby. In an optional embodiment, for example, the mask frame MF and the individual masks CMK-a may include a polyimide-based material to reduce the weight of the components.

[0058] The mask frame MF may have a quadrilateral shape defined by long sides extending in the first direction DR1 and short sides extending in the second direction DR2. A plurality of cell openings COP may be defined by the mask frame MF. The cell openings COP may be arranged in at least one of the first direction DR1 and the second direction DR2. The cell openings COP may be arranged in a matrix along the first direction DR1 and the second direction DR2.

[0059] When viewed in a plane, each of the cell openings COP may have a quadrilateral shape. In one embodiment, for example, each cell opening COP may be defined by two long sides and two short sides, the two long sides being spaced apart from each other in a first direction DR1 and extending in a second direction DR2, and the two short sides being spaced apart from each other in the second direction DR2 and extending in the first direction DR1. The cell opening COP may be defined by the mask frame MF in a third direction DR3.

[0060] Figure 1 and Figure 2 An embodiment in which fifteen unit openings COP are defined in the mask frame MF is shown, however, this is merely exemplary. Alternatively, the number of unit openings COP may be more or less than fifteen. In such an embodiment, the shape of each unit opening COP may be modified differently to correspond to the shape of the single mask CMK-a described below.

[0061] Support area SP (refer to Figure 3 ) may be disposed between the unit openings COP defined by the mask frame MF. The mask MK may have an integral plate shape defined by the single masks CMK-a respectively disposed in the unit openings COP and a support region SP disposed between and connecting the unit openings COP.

[0062] When viewed in a plane, the unit masks CMK-a may respectively overlap the cell openings COP. When viewed in a plane, each of the unit masks CMK-a may have a quadrilateral shape.

[0063] Each of the individual masks CMK-a may include a mask body MP and a bonding portion BP'. In an embodiment, a plurality of holes H are defined by the mask body MP. The holes H may be defined by the individual mask CMK-a in a third direction DR3. The bonding portion BP' may extend from the mask body MP in a first direction DR1 and a second direction DR2. When viewed in a planar direction, the bonding portion BP' may have a quadrilateral annular shape and may be disposed along an edge of the mask body MP. The bonding portion BP' may include a first bonding portion BP1', a second bonding portion BP2', a third bonding portion BP3', and a fourth bonding portion BP4'.

[0064] The individual masks CMK-a may be disposed on the mask frame MF. In an embodiment, each of the individual masks CMK-a may be disposed in a corresponding unit opening COP among the unit openings COP. In such an embodiment, the nth individual mask CMK-a may be disposed in the nth unit opening COP.

[0065] When viewed in a planar manner, the mask body MP of the unit mask CMK-a may have the same size as the unit opening COP. The bonding portion BP' of the unit mask CMK-a may be disposed on the edge portion LP of the mask frame MF. The edge portion LP may correspond to a portion of the mask frame MF surrounding each of the unit openings COP. The edge portion LP may have a quadrilateral annular shape in a planar manner.

[0066] The single mask CMK-a can be fixed to the mask frame MF. In an embodiment, the bonding portion BP' of the single mask CMK-a can be fixed to the corresponding edge portion LP. In an embodiment, for example, a welding process can be performed between the first portion P1, the second portion P2, the third portion P3, and the fourth portion P4 of the edge portion LP and the portion of the bonding portion BP' corresponding to the first portion P1, the second portion P2, the third portion P3, and the fourth portion P4. In an embodiment, the edge portion LP can be a portion that is bonded to the corresponding bonding portion BP' through a welding process. In such an embodiment, a bonding pattern for bonding the bonding portion BP' to the mask frame MF can be formed on the bonding portion BP'. A bonding pattern for bonding the first bonding portion BP1', the second bonding portion BP2', the third bonding portion BP3', and the fourth bonding portion BP4' to the mask frame MF can be formed on each of the first bonding portion BP1', the second bonding portion BP2', the third bonding portion BP3', and the fourth bonding portion BP4'. The coupling pattern may have a quadrilateral annular shape extending in a solid line along the edge of the mask body MP of the single-piece mask CMK-a. Alternatively, a plurality of coupling patterns may be provided in each of the first coupling portion BP1', the second coupling portion BP2', the third coupling portion BP3', and the fourth coupling portion BP4', and the coupling patterns may be spaced apart at regular intervals to have a quadrilateral annular shape extending in a dotted line along the edge of the mask body MP. The coupling between the mask frame MF and the single-piece mask CMK-a will be described in detail later.

[0067] Figure 3 is a perspective view illustrating a mask assembly MKA according to a disclosed embodiment. Figure 4 is a plan view illustrating a cell mask CMK according to a disclosed embodiment. Figure 5 is a cross-sectional view illustrating a portion of a cell mask CMK according to a disclosed embodiment. Figure 5 Shown along Figure 4 The cross section is taken along the line II' shown in FIG.

[0068] Reference Figures 1 to 3 , an embodiment of the mask assembly MKA may include a mask frame MF and a plurality of unit masks CMK disposed in a plurality of unit openings COP defined by the mask frame MF. For ease of illustration and description, Figure 3 One unit mask CMK corresponding to one unit opening COP among the unit openings COP defined by the mask frame MF is shown, but is not limited thereto. Alternatively, the mask assembly MKA may include a plurality of unit masks CMK each corresponding to one unit opening COP among the unit openings COP defined by the mask frame MF. Figure 1In the embodiment of the mask MK shown in , the single mask CMK-a may be formed by respectively bonding the cell masks CMK to the corresponding cell openings COP and removing a portion of the cell masks CMK, which will be described in more detail later.

[0069] Reference Figure 3 and Figure 4 , each of the unit masks CMK included in the mask assembly MKA may include a mask body MP, a bonding portion BP, and tensile portions TTP1 and TTP2.

[0070] The mask body MP may have a plate shape substantially parallel to a plane defined by the first and second directions DR1 and DR2. The mask body MP may have a rectangular shape substantially parallel to the plane defined by the first and second directions DR1 and DR2. The mask body MP may include two long sides and two short sides, the two long sides being spaced apart from each other in the first direction DR1 and extending in the second direction DR2, and the two short sides being spaced apart from each other in the second direction DR2 and extending in the first direction DR1. The mask body MP may include a first side MP-s1 and a second side MP-s2 being spaced apart from each other in the first direction DR1 and extending in the second direction DR2, and a third side MP-s3 and a fourth side MP-s4 being spaced apart from each other in the second direction DR2 and extending in the first direction DR1. The mask body MP may have a shape corresponding to the shape of one of the cell openings COP defined by the mask frame MF. The mask body MP may be provided with an aperture H defined therethrough. The hole H may be defined in the third direction DR3 by the cell mask CMK.

[0071] The bonding portion BP may be provided to surround the edge of the mask body MP. The bonding portion BP may have a quadrilateral ring shape extending in the first direction DR1 and the second direction DR2. The bonding portion BP may have a shape corresponding to the edge portion LP defined in the mask frame MF. In an embodiment, as Figure 4 As shown in , the bonding part BP may include a first bonding part BP1 arranged adjacent to the first side MP-s1, a second bonding part BP2 arranged adjacent to the second side MP-s2, a third bonding part BP3 arranged adjacent to the third side MP-s3, and a fourth bonding part BP4 arranged adjacent to the fourth side MP-s4.

[0072] The stretching portions TTP1 and TTP2 may extend from the bonding portion BP and may be spaced apart from the mask body MP with the bonding portion BP interposed between the stretching portions TTP1 and TTP2 and the mask body MP. The stretching portions TTP1 and TTP2 may include four stretching portions corresponding to the four sides of the rectangular mask body MP. The stretching portions TTP1 and TTP2 may include a first stretching portion TTP1 and a second stretching portion TTP2. The first stretching portion TTP1 is positioned to correspond to the long sides of the mask body MP that are spaced apart from each other in the first direction DR1 and extend in the second direction DR2. The second stretching portion TTP2 is positioned to correspond to the short sides of the mask body MP that are spaced apart from each other in the second direction DR2 and extend in the first direction DR1. The first stretching portion TTP1 may include a first side stretching portion TP1 and a second side stretching portion TP2 positioned to correspond to the long sides of the mask body MP that face each other in the first direction DR1. The second stretching portion TTP2 may include a third side stretching portion TP3 and a fourth side stretching portion TP4 positioned to correspond to the short sides of the mask body MP that face each other in the second direction DR2. The first to fourth side stretch portions TP1 , TP2 , TP3 , and TP4 may be disposed to correspond to four sides of the mask main body MP, respectively, and may extend in a direction away from the mask main body MP.

[0073] Reference Figure 4 and Figure 5 At least a portion of the bonding portion BP of the unit mask CMK may have a thickness different from that of the mask main body MP and the tensile portions TTP1 and TTP2. In an embodiment, the mask main body MP and the tensile portions TTP1 and TTP2 may have a first thickness d1, and the second bonding portion BP2 may have a second thickness d2 that is smaller than the first thickness d1. Figure 5Only the second thickness d2 of the second bonding portion BP2 is shown in cross-section; the first bonding portion BP1, the third bonding portion BP3, and the fourth bonding portion BP4 may have the same thickness as the second bonding portion BP2 in cross-section. Here, the expression "substantially the same thickness" not only refers to the case where the thicknesses of the components are the same, but also refers to the case where the thicknesses of the components are the same within a range that includes differences that may occur due to manufacturing errors despite the same design. Hereinafter, the thickness of the bonding portion BP will be referred to as the second thickness d2. The first thickness d1 of the mask body MP may be equal to or greater than approximately 1 micron and equal to or less than approximately 100 microns. The second thickness d2 of the bonding portion BP may correspond to approximately 40% or greater and approximately 60% or less of the first thickness d1. According to embodiments, at least a portion of the bonding portion BP may have a thickness reduced by approximately half through a half-etching process. According to embodiments, when the mask body MP is etched to form the hole H, at least a portion of the bonding portion BP may be half-etched. According to an embodiment, bonding portion BP may be completely etched to allow the entire portion of bonding portion BP to have a thickness equal to or greater than approximately 40% and equal to or less than approximately 60% of the first thickness d1 of mask body MP. In an alternative embodiment, a plurality of half-etched patterns may be defined on bonding portion BP to be spaced apart from one another, each of the half-etched patterns having a thickness equal to or greater than approximately 40% and equal to or less than approximately 60% of the first thickness d1 of mask body MP. In such an embodiment, since the thickness of bonding portion BP is smaller than the thickness of mask body MP and the thickness of tensile portions TTP1 and TTP2, the process cost and time required for bonding unit mask CMK and removing tensile portions TTP1 and TTP2 can be reduced.

[0074] An embodiment of a mask assembly includes unit masks corresponding to the unit openings, respectively, and each of the unit masks includes stretching portions arranged to correspond to the four sides of the mask body, respectively. If a large-area mask is manufactured using a mask assembly including unit masks provided with stretching portions provided only on two sides thereof, shrinkage occurs on the other sides where the stretching portions are not provided, resulting in deterioration in the reliability and quality of the mask. According to an embodiment of the invention, the mask assembly may include unit masks, and a large-area mask for use in manufacturing large display panels may be manufactured. In such an embodiment, since the stretching portions are provided to correspond to the four sides of the mask body of the unit masks, shrinkage of the four sides of the mask body may be effectively prevented during the process of stretching the unit masks. Therefore, deterioration in the reliability and quality of the mask may be effectively prevented, and therefore, a large display panel with improved display quality may be manufactured.

[0075] Figures 6 to 91 is a plan view showing various embodiments of unit masks CMK-1, CMK-2, CMK-3 and CMK-4. In such embodiments, the unit masks CMK-1, CMK-2, CMK-3 and CMK-4 are selected from Figures 6 to 9 At least one of the mask body MP, the bonding part BP, and the stretching parts TTP1 and TTP2 of each of the unit masks CMK-1, CMK-2, CMK-3, and CMK-4 shown in FIG has the same Figure 4 The shape of the unit mask CMK shown in FIG is different from the shape of the unit mask CMK shown in FIG. Figures 6 to 9 In the Figures 1 to 5 , and therefore, any repeated detailed description of the same elements will be omitted.

[0076] Reference Figure 6 , an embodiment of the unit mask CMK-1 may include protrusions and recesses defined in each of the stretching portions TP1', TP2', TP3', and TP4' respectively provided on the four sides of the mask body MP. In such an embodiment, the first side stretching portion TP1' may include protrusions PP1-1, PP1-2, and PP1-3 that protrude away from the mask body MP, and recesses CP1-1 and CP1-2 defined between the protrusions PP1-1, PP1-2, and PP1-3 and recessed toward the mask body MP. The second side stretching portion TP2' may include protrusions PP2-1, PP2-2, and PP2-3 that protrude away from the mask body MP, and recesses CP2-1 and CP2-2 defined between the protrusions PP2-1, PP2-2, and PP2-3 and recessed toward the mask body MP. The third side stretching portion TP3' may include protrusions PP3-1 and PP3-2 that protrude away from the mask body MP, and a recessed portion CP3-1 defined between the protrusions PP3-1 and PP3-2 and recessed toward the mask body MP. The fourth side stretching portion TP4' may include protrusions PP4-1 and PP4-2 that protrude away from the mask body MP, and a recessed portion CP4-1 defined between the protrusions PP4-1 and PP4-2 and recessed toward the mask body MP. The protrusions provided on the stretching portions TP1', TP2', TP3', and TP4', respectively, may correspond to portions held (or gripped) by a jig included in the mask manufacturing equipment during the process of stretching the unit mask CMK-1. In such an embodiment, a jig included in the mask manufacturing apparatus may hold (or grip) protrusions respectively provided on the stretching parts TP1', TP2', TP3', and TP4', and then the unit mask CMK-1 may be stretched in the process of stretching the unit mask CMK-1. Figure 6In the embodiment shown in , each of the first side stretching portion TP1' and the second side stretching portion TP2' may include three protrusions and two recesses, and each of the third side stretching portion TP3' and the fourth side stretching portion TP4' may include two protrusions and one recess. However, the disclosure is not limited thereto or thereby, and the number of protrusions and the number of recesses may be modified differently depending on the area of ​​the mask main body MP in a plane and the number of clamps. In the embodiment shown in FIG. Figure 6 In the embodiment shown in , the concave portion has a semicircular shape, and the convex portion has a shape corresponding to the concave portion, however, the convex portion and the concave portion may have various shapes without particular limitation.

[0077] Reference Figure 7 , an optional embodiment of the unit mask CMK-2 may include recessed portions GP1, GP2, GP3 and GP4 defined between the first stretching portion TTP1 and the second stretching portion TTP2. The recessed portions GP1, GP2, GP3 and GP4 may be defined between the first stretching portion TTP1 and the second stretching portion TTP2, and may have a shape that is recessed to the mask body MP. The recessed portions GP1, GP2, GP3 and GP4 may include a first recessed portion GP1 defined between the first side stretching portion TP1 and the third side stretching portion TP3, a second recessed portion GP2 defined between the second side stretching portion TP2 and the third side stretching portion TP3, a third recessed portion GP3 defined between the first side stretching portion TP1 and the fourth side stretching portion TP4, and a fourth recessed portion GP4 defined between the second side stretching portion TP2 and the fourth side stretching portion TP4. In an embodiment, at least one of the first to fourth recessed portions GP1 to GP4 may be omitted. In Figure 7 In the embodiment of the present invention, each of the recessed portions GP1, GP2, GP3, and GP4 has a circular shape, but is not limited thereto or thereby. Each of the recessed portions GP1, GP2, GP3, and GP4 may have various shapes.

[0078] Reference Figure 8Another optional embodiment of the unit mask CMK-3 may include rounded corners RP1, RP2, RP3, and RP4 defined at the corners where the first tensile portion TTP1 and the second tensile portion TTP2 intersect. Due to the rounded corners RP1, RP2, RP3, and RP4, the corners where the first tensile portion TTP1 and the second tensile portion TTP2 intersect may be rounded, and the rounded corners RP1, RP2, RP3, and RP4 may connect the first tensile portion TTP1 to the second tensile portion TTP2. The rounded corners RP1, RP2, RP3, and RP4 may include a first rounded corner RP1 connecting the first side tensile portion TP1 and the third side tensile portion TP3, a second rounded corner RP2 connecting the second side tensile portion TP2 and the third side tensile portion TP3, a third rounded corner RP3 connecting the first side tensile portion TP1 and the fourth side tensile portion TP4, and a fourth rounded corner RP4 connecting the second side tensile portion TP2 and the fourth side tensile portion TP4.

[0079] In an embodiment, Figure 7 and Figure 8 As shown in , the unit mask CMK-2 or CMK-3 may include recessed portions GP1, GP2, GP3, and GP4 or rounded corner portions RP1, RP2, RP3, and RP4 defined between the first and second tensile portions TTP1 and TTP2. In such an embodiment, the unit masks CMK-2 and CMK-3 can be prevented from being damaged during the process of stretching the unit masks CMK-2 and CMK-3 by stretching the four sides thereof in a direction away from the mask body MP by reducing stress at a portion where stress is concentrated due to stretching between the first and second tensile portions TTP1 and TTP2.

[0080] Reference Figure 9 Another optional embodiment of the mask body MP of the unit mask CMK-4 may include a plurality of unit areas CA and extension areas ENP defined between the unit areas CA. A plurality of holes H may be defined by the mask body MP along the third direction DR3 in each of the unit areas CA. The extension areas ENP defined between the unit areas CA may be areas through which no holes H are defined. The unit areas CA may be defined as light emitting pattern layers EPP (refer to FIG. 1 ) of a display panel manufactured using the mask. Figure 13A ) corresponds. The extension region ENP may surround each of the unit regions CA. In such an embodiment, Figure 9As shown in FIG, the mask body MP of the unit mask CMK-4 may include four unit regions (such as a first unit region CA1, a second unit region CA2, a third unit region CA3, and a fourth unit region CA4 defined therein and arranged in the first direction DR1 and the second direction DR2). However, the number and shape of the unit regions CA included in the unit mask CMK-4 may be variously modified according to the patterned shape of the light emitting pattern layer EPP of the display panel to be manufactured.

[0081] Figure 10 is a perspective view illustrating a mask assembly according to an alternative embodiment of the disclosure. Figure 10 The mask assembly shown in FIG includes a unit opening and a unit mask corresponding to the unit opening, wherein the unit opening and the unit mask have Figure 3 The cell openings of the mask assembly MKA shown in FIG. 1 and the cell mask have different shapes. Figure 10 In the Figure 3 , and thus any repeated detailed description of the same elements will be omitted.

[0082] Reference Figure 10 , embodiments of the mask frame MF may include unit openings having different sizes in a plane. The mask frame MF may include a first unit opening COP1 and a second unit opening COP2 having a size different from that of the first unit opening COP1. Depending on the embodiment, the second unit opening COP2 may have a size smaller than that of the first unit opening COP1 in a plane. In such embodiments in which the first unit opening COP1 and the second unit opening COP2 have different sizes and different shapes, the edge portions LP surrounding the first unit opening COP1 and the second unit opening COP2, respectively, may have different sizes and different shapes.

[0083] Since the mask frame MF includes the first unit opening COP1 and the second unit opening COP2, the mask assembly may include a first unit mask CMK1 corresponding to the first unit opening COP1 and a second unit mask CMK2 corresponding to the second unit opening COP2. Figure 10 A first unit mask CMK1 corresponding to the first unit opening COP1 among the first unit openings COP1 defined by the mask frame MF and a second unit mask CMK2 corresponding to the second unit opening COP2 among the second unit openings COP2 defined by the mask frame MF are shown, however, the mask assembly may include a plurality of first unit masks CMK1 corresponding to the first unit openings COP1 defined by the mask frame MF and a plurality of second unit masks CMK2 corresponding to the second unit openings COP2 defined by the mask frame MF.

[0084] The first unit mask CMK1 may include a first mask body MP1 corresponding to the shape of the first unit opening COP1, a first unit bonding part BP-1 corresponding to the shape of the edge portion of the first unit opening COP1, and a plurality of stretching parts TP1-1, TP2-1, TP3-1, and TP4-1 respectively arranged to correspond to the four sides of the first mask body MP1, wherein the plurality of first holes H1 are defined by the first mask body MP1. The second unit mask CMK2 may include a second mask body MP2 corresponding to the shape of the second unit opening COP2, a second unit bonding part BP-2 corresponding to the shape of the edge portion of the second unit opening COP2, and a plurality of stretching parts TP1-2, TP2-2, TP3-2, and TP4-2 respectively arranged to correspond to the four sides of the second mask body MP2, wherein the plurality of second holes H2 are defined by the second mask body MP2.

[0085] An embodiment of a mask assembly may include a mask frame, the mask frame including a first unit opening and a second unit opening having different sizes from each other in a plane, and a first unit mask and a second unit mask corresponding to the first unit opening and the second unit opening, respectively. In such an embodiment, in a process of stretching the unit masks using a stretching portion arranged to correspond to the four sides of the mask body of each of the unit masks, respectively, the mask assembly can effectively prevent the four sides of the mask body from shrinking. In such an embodiment, the mask assembly includes the first unit mask and the second unit mask corresponding to the unit openings having different sizes in a plane, respectively, and therefore, display panels having unit sizes different from each other can be manufactured by using a single mask assembly. Therefore, the chamfer rate of the manufacturing process of the display panel performed using an embodiment of the mask assembly can be increased, and thus the manufacturing cost of the display panel can be reduced.

[0086] 11A to 11D is a view illustrating a method of manufacturing the mask MK according to the disclosed embodiment. Figure 11A 1 and 2 are plan views illustrating the processes of a method of manufacturing the mask MK according to the disclosed embodiment. Figures 11B to 11D 1 and 2 are cross-sectional views illustrating some processes of a method of manufacturing the mask MK according to the disclosed embodiment. Figure 12 is a cross-sectional view illustrating a deposition device DPD according to a disclosed embodiment. 13A to 13C are perspective views illustrating some processes of a method of manufacturing a display panel according to a disclosed embodiment.

[0087] In the following, reference will be made to 11A to 11D 、 Figure 12 as well as 13A to 13C An embodiment of a method for manufacturing a display panel is described. 11A to 11D 、 Figure 12as well as 13A to 13C In the Figures 1 to 10 , and therefore, any repeated detailed description of the same elements will be omitted.

[0088] An embodiment of a method of manufacturing a display panel includes the steps of: preparing a target substrate; forming a mask having a plurality of holes defined therethrough under the target substrate; forming a plurality of patterns corresponding to the holes; and removing the mask.

[0089] 11A to 11D The process of forming a mask using a mask assembly before placing a plurality of masks under a target substrate in an embodiment of a method for manufacturing a display panel is sequentially shown. In such an embodiment, the mask can be formed by combining a mask frame MF with a unit mask CMK included in the mask assembly MKA.

[0090] Reference Figure 3 、 Figure 11A and Figure 11B In the process of forming the mask, each of the unit masks CMK is stretched before the unit masks CMK are placed on the mask frame MF. The stretching portions TTP1 and TTP2 of the unit masks CMK can be held (or gripped) by a clamp included in the stretching device and pulled in a direction away from the mask body MP, thereby stretching the unit masks CMK. In such an embodiment, the unit masks CMK receive a first tension TS1 in a direction (i.e., a first direction DR1) along which the first side MP-s1 and the second side MP-s2 of the mask body MP face each other, and receive a second tension TS2 in a direction (i.e., a second direction DR2) along which the third side MP-s3 and the fourth side MP-s4 of the mask body MP face each other. The unit masks CMK can be stretched by the stretching process so that the mask body MP and the bonding portion BP of each of the unit masks CMK correspond to the unit opening COP and the edge portion LP, respectively. Each of the unit masks CMK can be stretched in four directions by the stretching portions TTP1 and TTP2 provided on the four sides of the mask body MP. Therefore, each of the unit masks CMK can be stretched to correspond to the shape of each of the unit openings COP without causing contraction of the four sides. In such an embodiment, when each of the unit masks CMK receives the first tension TS1 and the second tension TS2 through the four sides, the unit masks CMK are bonded to the mask frame MF through a bonding process to form a single mask CMK-a (refer to FIG. Figure 1 ), the mask main body MP may receive a first tension TS1 in a first direction DR1 and a direction opposite to the first direction DR1, and may receive a second tension TS2 in a second direction DR2 and a direction opposite to the second direction DR2.

[0091] Reference Figure 3 、 Figure 11C and Figure 11D , the stretched unit mask CMK is arranged or placed on the corresponding unit opening COP or arranged or placed to overlap the corresponding unit opening COP, and then, the bonding parts BP1 and BP2 can be bonded to the edge part LP of the mask frame MF by a process of irradiating the laser beam LZ. For convenience of explanation, Figure 11C Only the first bonding part BP1 and the second bonding part BP2 are shown; however, the third bonding part BP3 and the fourth bonding part BP4 can be bonded to the edge portion LP of the mask frame MF by irradiating a laser beam LZ. The laser irradiation unit LI can irradiate the laser beam LZ along an imaginary laser processing line defined between the bonding parts BP1 and BP2 and the edge portion LP to bond the mask frame MF to the unit mask CMK. By irradiating the laser beam LZ onto a portion of at least one of the bonding parts BP1 and BP2 and the edge portion LP, the portion of at least one of the bonding parts BP1 and BP2 and the edge portion LP can be melted, so that the bonding parts BP1 and BP2 and the edge portion LP can be bonded to each other. Although not shown in the drawings, the tensile parts TTP1 and TTP2 included in the unit mask CMK can be processed to have an upwardly curved shape during the process of stretching the unit mask CMK. Therefore, the tensile parts TTP1 and TTP2 can avoid interfering with the adjacent unit mask CMK during the bonding process.

[0092] After each of the unit masks CMK is bonded to the mask frame MF on the corresponding unit opening COP, the stretching portions TTP1 and TTP2 included in the unit mask CMK may be removed. In an embodiment, the stretching portions TTP1 and TTP2 may be removed in a process of irradiating a laser beam LZ for a bonding process. Alternatively, after the mask frame MF is bonded to the unit mask CMK by a process of irradiating a laser beam LZ, the stretching portions TTP1 and TTP2 may be removed by a process of irradiating a separate additional laser beam. The unit mask CMK from which the stretching portions TTP1 and TTP2 are removed may be referred to as a single mask CMK-a (refer to Figure 1 ).

[0093] During the process of removing the tensile portions TTP1 and TTP2 by the process of irradiating the laser beam LZ, portions of the bonding portions BP1 and BP2 may be removed. After removing the portions of the bonding portions BP1 and BP2 and the tensile portions TTP1 and TTP2, the remaining portions of the bonding portions BP1 and BP2 coupled to the mask frame MF by the process of irradiating the laser beam LZ may define bonding portions BP1′ and BP2′ of the monomer mask CMK-a.

[0094] The bonding portions BP1′ and BP2′ of the unit mask CMK-a may include a metal oxide obtained by oxidizing the metal included in the bonding portions BP1 and BP2 of the unit mask CMK during the irradiation process of the laser beam LZ. In an embodiment, after the irradiation process of the laser beam LZ, the bonding portions BP1 and BP2 of the unit mask CMK may include Invar, and the bonding portions BP1′ and BP2′ of the unit mask CMK-a may include an oxide of Invar.

[0095] Reference Figure 12 , an embodiment of the deposition apparatus DPD may include a chamber CHB, a deposition source S, a stage STG, a moving plate PP, and a mask MK.

[0096] The chamber CHB may provide a closed space. A deposition source S, a stage STG, a movable plate PP, and a mask MK may be disposed in the chamber CHB. The chamber CHB may include a door GT. The chamber CHB may be opened and closed via the door GT. A target substrate SUB may be loaded into or unloaded from the chamber CHB via the door GT, which is defined by the chamber CHB.

[0097] In an embodiment, the deposition source S may include a deposition material. In such an embodiment, the deposition material is a material capable of sublimation or evaporation, and may include at least one selected from an inorganic material, a metal material, and an organic material. Hereinafter, for ease of description, the deposition source S including an organic material will be described for use in manufacturing an organic light emitting device OLED (refer to FIG. Figure 14 ) embodiment.

[0098] The stage STG may be disposed above the deposition source S. The mask MK may be disposed on the stage STG. The mask MK may be disposed after being manufactured by the above-described mask manufacturing process. The mask MK may face the deposition source S. The stage STG may be disposed to overlap with the mask frame MF of the mask MK and may support the mask MK. The stage STG may not overlap with the cell opening COP of the mask frame MF. That is, the stage STG may be disposed outside a path through which the deposition material is supplied from the deposition source S to the target substrate SUB.

[0099] The target substrate SUB may be disposed on the mask MK. A deposition material may be deposited on the target substrate SUB through the holes H defined by each of the individual masks CMK-a to form a plurality of patterns on the target substrate SUB. In such an embodiment, the pattern formed by the deposition material may be a luminous pattern.

[0100] The moving plate PP may align the target substrate SUB on the mask MK. The moving plate PP may move up and down or left and right. The moving plate PP may include a member for moving the target substrate SUB and a member for holding (or gripping) the target substrate SUB.

[0101] Reference Figure 1 、 Figure 12 and Figure 13A In such an embodiment, the mask MK can be removed after the deposition material is deposited on the target substrate SUB by the deposition device DPD. The initial substrate DP-1 from which the mask MK is removed can be the target substrate SUB on which the light-emitting pattern layer EPP is formed. The light-emitting pattern layers EPP can be formed to correspond to the individual masks CMK-a of the mask MK, respectively. Each of the light-emitting pattern layers EPP can include a plurality of light-emitting patterns (not shown).

[0102] Reference Figure 13A and Figure 13B The initial substrate DP-1 from which the mask MK is removed is cut along a cutting line CTL defined in the initial substrate DP-1 from which the mask MK is removed, and the initial substrate DP-1 is divided into a plurality of panels DP-P. Each of the panels DP-P can form a display panel DP.

[0103] According to the disclosed embodiment, a display panel DP can be formed by patterning a target substrate SUB. In such an embodiment, since the mask MK used to manufacture the display panel DP is manufactured using a mask assembly MKA including unit masks CMK each stretched in four directions, it is possible to perform a process for manufacturing a large-area mask MK to be used to form multiple display panels DP. Therefore, the process time can be shortened and the process cost can be reduced. However, according to an alternative embodiment, a single display panel DP can be formed from the target substrate SUB according to the size of the display panel DP.

[0104] Reference Figure 13C An embodiment of the display panel DP may include an active area AA. The active area AA may include a plurality of pixels. The active area AA may correspond to a region in which the emission pattern layer EPP is disposed, and the emission patterns EP may correspond to the pixels, respectively. Each of the emission patterns EP may be formed to correspond to a hole H defined by a single mask CMK-a included in the mask MK.

[0105] Figure 14 is a cross-sectional view illustrating a display panel DP according to a disclosed embodiment. Figure 14 Shown along Figure 13C 1 is a cross-section taken along line II-II' to illustrate a portion of the display panel DP.

[0106] Reference Figure 14 , an embodiment of the display panel DP may be, but is not limited to, a light-emitting display panel. Figure 14 A cross section of a pixel having two transistors T1 and T2 and an organic light emitting device OLED in the pixel is shown.

[0107] In an embodiment, Figure 14 As shown in the figure, the display panel DP may include a base layer BL, a circuit element layer ML disposed on the base layer BL, a display element layer EL disposed on the circuit element layer ML, and an insulating layer TFE (hereinafter referred to as "upper insulating layer") disposed on the display element layer EL.

[0108] The base layer BL may include a synthetic resin layer. The base layer BL may be formed by forming a synthetic resin layer on a support substrate for manufacturing the display panel DP, forming a conductive layer and an insulating layer on the synthetic resin layer, and removing the support substrate.

[0109] The circuit element layer ML may include an insulating layer and circuit elements. The circuit elements may include signal lines and pixel driving circuits. The circuit element layer ML may be formed by processes for forming insulating layers, semiconductor layers, and conductive layers (such as coating processes and deposition processes) and patterning the insulating layers, semiconductor layers, and conductive layers (such as photolithography processes).

[0110] In an embodiment, the circuit element layer ML may include a buffer layer BFL, a barrier layer BRL, and a first insulating layer 10, a second insulating layer 20, a third insulating layer 30, a fourth insulating layer 40, a fifth insulating layer 50, a sixth insulating layer 60, and a seventh insulating layer 70. The buffer layer BFL, the barrier layer BRL, and the first insulating layer 10, the second insulating layer 20, the third insulating layer 30, the fourth insulating layer 40, the fifth insulating layer 50, the sixth insulating layer 60, and the seventh insulating layer 70 may include an inorganic layer or an organic layer. In an embodiment, the buffer layer BFL and the barrier layer BRL may include an inorganic layer. In an embodiment, at least one selected from the fifth insulating layer 50 to the seventh insulating layer 70 may include an organic layer.

[0111] Figure 14 The arrangement relationship of the first active electrode A1, the second active electrode A2, the first gate G1, the second gate G2, the first source S1, the second source S2, the first drain D1 and the second drain D2 forming the first transistor T1 and the second transistor T2 is shown. In an embodiment, the first active electrode A1 and the second active electrode A2 may include materials different from each other. The first active electrode A1 may include a polysilicon semiconductor, and the second active electrode A2 may include a metal oxide semiconductor. The first source S1 and the first drain D1 may have a doping concentration greater than that of the first active electrode A1, and may be used as electrodes. The second source S2 and the second drain D2 may be obtained by reducing a metal oxide semiconductor, and may be used as electrodes. In an embodiment, as Figure 14 As shown in , the upper electrode UE may be disposed on the second insulating layer 20 , so that a capacitor may be defined by the upper electrode UE and the first gate G1 .

[0112] According to an alternative embodiment disclosed herein, the first active electrode A1 and the second active electrode A2 may include the same semiconductor material. In such an embodiment, the stacking structure of the circuit element layer ML may be further simplified.

[0113] In an embodiment, the display element layer EL may include a pixel defining layer (PDL) and an organic light-emitting device (OLED). The organic light-emitting device (OLED) may be an organic light-emitting diode (OLED) or a quantum dot light-emitting diode (QD). The anode AE ​​may be disposed on the seventh insulating layer 70. At least a portion of the anode AE ​​may be exposed through a pixel opening (PDL-OP) of the pixel defining layer (PDL). The light-emitting region (PXA) may be defined by the pixel opening (PDL-OP) of the pixel defining layer (PDL). The non-light-emitting region (NPXA) may surround the light-emitting region (PXA).

[0114] The hole control layer HCL and the electron control layer ECL may be disposed together in the light-emitting area PXA and the non-light-emitting area NPXA. The light-emitting layer EML may include a light-emitting material and may be disposed in a pattern shape corresponding to the pixel opening PDL-OP. The light-emitting layer EML may be deposited by a method different from the method used to form the hole control layer HCL and the electron control layer ECL. The hole control layer HCL and the electron control layer ECL may be formed together in the pixel using an open mask. The light-emitting layer EML may be formed in a pattern shape corresponding to the pixel opening PDL-OP using the above-described mask embodiment, but is not limited thereto or thereby. In an embodiment, the hole control layer HCL and the electron control layer ECL may also be formed in the same pattern shape as the light-emitting layer EML using a mask to correspond to the pixel opening PDL-OP.

[0115] The cathode CE may be disposed on the electron control layer ECL. An upper insulating layer TFE may be disposed on the cathode CE. The upper insulating layer TFE may be a thin film encapsulation layer to encapsulate the display element layer EL. The upper insulating layer TFE may include multiple thin films. The thin films may include inorganic layers and organic layers. The upper insulating layer TFE may include an insulating layer for encapsulating the display element layer EL and multiple insulating layers for improving luminous efficiency.

[0116] The invention should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art.

[0117] While the invention has been particularly shown and described with reference to embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit or scope of the invention as defined by the claims.

Claims

1. A mask assembly, comprising: a mask frame, wherein a plurality of unit openings are defined by the mask frame; as well as A plurality of unit masks are arranged to correspond to the plurality of unit openings respectively, wherein each of the plurality of unit masks comprises: a mask body parallel to a plane defined by a first direction and a second direction intersecting the first direction, wherein a plurality of holes are defined by the mask body; a coupling portion disposed along an edge of the mask body, wherein at least a portion of the coupling portion has a thickness smaller than that of the mask body; and a stretching portion extending from the coupling portion and disposed to be separated from the mask body, The stretching portion includes: first stretching portions spaced apart from each other in the first direction and disposed at opposite sides of the mask body; and second stretching portions spaced apart from each other in the second direction and disposed at the other opposite sides of the mask body.

2. The mask assembly according to claim 1, wherein The first stretching portion includes a first side stretching portion and a second side stretching portion provided at the opposite sides of the mask main body facing each other in the first direction, and The second stretching portion includes a third side stretching portion and a fourth side stretching portion provided at the other opposite sides of the mask main body facing each other in the second direction.

3. The mask assembly according to claim 1, wherein The stretching portion includes: a plurality of protrusions protruding in a direction away from the mask body; and A concave portion is defined between the plurality of convex portions and is concave toward the mask body.

4. The mask assembly according to claim 1, wherein The thickness of the at least a portion of the bonding portion is smaller than the thickness of the stretching portion.

5. The mask assembly according to claim 1, wherein Each of the plurality of unit masks comprises: a plurality of unit regions, wherein the plurality of holes are defined by each of the plurality of unit regions; and An extension region is defined between the plurality of unit regions. The mask assembly according to claim 1 , wherein: The mask frame includes bonding areas defined along edges of the plurality of unit openings.

7. A mask, comprising: a mask frame, wherein a plurality of unit openings are defined by the mask frame; as well as a plurality of single masks coupled to the mask frame to correspond to the plurality of unit openings, respectively; wherein each of the plurality of single masks comprises: a mask body comprising a first side and a second side facing each other in a first direction and extending in a second direction intersecting the first direction, and a third side and a fourth side facing each other in the second direction and extending in the first direction, wherein a plurality of holes are defined by the mask body; and a joining portion defined along an edge of the mask body, wherein at least a portion of the joining portion has a thickness smaller than a thickness of the mask body, wherein the mask body of each of the plurality of single masks receives a first tension in the first direction and a second tension in the second direction.

8. The mask according to claim 7, wherein The combining portion includes: a first combining portion disposed adjacent to the first side; a second combining portion disposed adjacent to the second side; a third combining portion disposed adjacent to the third side; and a fourth combining portion disposed adjacent to the fourth side. Each of the first coupling portion, the second coupling portion, the third coupling portion, and the fourth coupling portion is coupled to the mask frame, and Each of the first bonding portion, the second bonding portion, the third bonding portion, and the fourth bonding portion includes a metal oxide.

9. A method for manufacturing a display panel, the method comprising the following steps: Prepare target substrate; forming a mask having a plurality of apertures defined therethrough to position the mask under the target substrate; forming a plurality of patterns corresponding to the plurality of holes; as well as removing the mask, The step of forming the mask includes: preparing a mask frame through which a plurality of unit openings are defined; and combining unit masks to correspond to the plurality of unit openings, respectively. wherein each of the unit masks comprises: a mask body parallel to a plane defined by a first direction and a second direction intersecting the first direction, wherein the plurality of holes are defined by the mask body; a coupling portion disposed along an edge of the mask body, wherein at least a portion of the coupling portion has a thickness smaller than that of the mask body; and a stretching portion extending from the coupling portion and disposed to be separated from the mask body, The stretching portion includes: first stretching portions spaced apart from each other in the first direction and disposed at opposite sides of the mask body; and second stretching portions spaced apart from each other in the second direction and disposed at the other opposite sides of the mask body.

10. The method according to claim 9, wherein: The step of combining the unit masks comprises: disposing the unit masks corresponding to the plurality of unit openings respectively; irradiating a laser beam to the coupling portion of each of the unit masks to couple the mask frame to the unit masks; and removing the stretching portion, and The step of combining the unit masks further includes stretching the unit masks to correspond to the plurality of unit openings before setting the unit masks.

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