Process Flow Management Method and Equipment

Abstract

An embodiment of the present application provides a process flow management method and device. The method includes: providing a main process for a workpiece to be processed, where the main process includes a plurality of main process steps arranged in a preset order, and operation nodes located before and after each main process step and between adjacent main process steps; receiving a process item change request for the workpiece, where the process item change request includes a request for changing the operation time control interval; where the operation time control interval starts from a first operation node and ends at a second operation node, and at least one main process step is included between the first operation node and the second operation node; in response to the process item change request, outputting a first reminder message for reminding a user to set a safe operation time for the process item change request, so as to prevent the operation duration of the process flow from getting out of control, which can not only avoid wasting production resources but also ensure production efficiency.

Description

Technical Field

[0001] Embodiments of the present application relate to the field of semiconductor technology, and in particular, to a process flow management method and device. Background Art

[0002] Semiconductor production and processing processes involve multiple chemical reactions. Among them, the operation duration is an important factor affecting the process effect and overall processing efficiency. Therefore, in some production stages, it is necessary to control the operation duration to improve resource utilization and production efficiency.

[0003] Currently, when users change some production parameters, it may affect the originally set operation duration control function, resulting in the loss of control of the operation duration during the processing, which not only affects the quality, yield, and reliability of the products, but also wastes production resources and reduces production efficiency. Summary of the Invention

[0004] Embodiments of the present application provide a process flow management method and device, which can solve the technical problem that the operation duration control function of the process flow may fail when some production parameters are changed in the prior art.

[0005] In some embodiments, a process flow management method is provided, including:

[0006] Providing a main process for a workpiece to be processed, the main process including a plurality of main process steps set in a preset order, and operation nodes before and after each of the main process steps and between adjacent main process steps;

[0007] Receiving a process item change request for the workpiece, the process item change request including a request for changing the operation time control interval; wherein, the operation time control interval starts from a first operation node and ends at a second operation node, the first operation node and the second operation node are taken from the operation nodes on the main process, and at least one of the main process steps is included between the first operation node and the second operation node;

[0008] Responding to the process item change request, and outputting a first reminder message, the first reminder message being used to remind the user to set a safe operation time for the process item change request.

[0009] In a feasible implementation manner, the request for changing the operation time control interval includes:

[0010] Add or modify the test process to replace the subprocess in the main process, where both the test process and the subprocess start from the third operation node and end at the fourth operation node, the third operation node and the fourth operation node are taken from the operation nodes on the main process, and the test process or the subprocess has an intersection with the operation time control interval.

[0011] In a feasible implementation manner, the outputting of the first reminder message in response to the process item change request includes:

[0012] In response to the process item change request, determine the newly added or modified first test process;

[0013] When the start operation node and the end operation node of the first test process are not within the same operation time control interval, determine whether the first test process has set a safe operation time;

[0014] If the first test process has not set a safe operation time, output the first reminder message, which is used to remind the user to set a safe operation time for the first test process.

[0015] In a feasible implementation manner, the change operation time control interval request further includes:

[0016] Delete the test process;

[0017] The method further includes:

[0018] After deleting the test process, determine whether the deleted test process has set a safe operation time;

[0019] If the deleted test process has set a safe operation time, output a third reminder message, which is used to remind the user to delete the safe operation time corresponding to the deleted test process.

[0020] In a feasible implementation manner, the change operation time control interval request includes:

[0021] Add or modify the operation time control interval.

[0022] In a feasible implementation manner, the outputting of the first reminder message in response to the process item change request includes:

[0023] In response to the process item change request, determine the newly added or modified first operation time control interval;

[0024] Determine whether there is a first test process to replace the first sub-process in the main process, where both the first test process and the first sub-process start from the third operation node and end at the fourth operation node, the third operation node and the fourth operation node are taken from the operation nodes on the main process, and there is an intersection between the test process or the sub-process and the first operation time control interval;

[0025] If there is the first test process, output the first reminder message, which is used to remind the user to set a safe operation time for the first test process.

[0026] In a feasible implementation manner, the change operation time control interval request includes:

[0027] Delete the operation time control interval;

[0028] The method further includes:

[0029] After deleting the operation time control interval, determine whether there is a target sub-process whose start operation node and end operation node are the same as those of the deleted operation time control interval;

[0030] If there is the target sub-process, output a second reminder message, which is used to remind the user to delete the target sub-process.

[0031] In some embodiments, the present application provides a process flow management device, including:

[0032] A storage module, configured to provide a main process for a workpiece to be processed, the main process includes a plurality of main process steps arranged in a preset order, and operation nodes before, after and between each of the main process steps;

[0033] A receiving module, configured to receive a process item change request for the workpiece, the process item change request includes a change operation time control interval request; wherein, the operation time control interval starts from a first operation node and ends at a second operation node, the first operation node and the second operation node are taken from the operation nodes on the main process, and there is at least one main process step between the first operation node and the second operation node;

[0034] A response module, configured to respond to the process item change request and output a first reminder message, which is used to remind the user to set a safe operation time for the process item change request.

[0035] In a feasible implementation manner, the change operation time control interval request includes:

[0036] Add or modify the test process to replace the subprocess in the main process, where both the test process and the subprocess start from the third operation node and end at the fourth operation node, the third operation node and the fourth operation node are taken from the operation nodes on the main process, and the test process or the subprocess has an intersection with the operation time control interval.

[0037] In a feasible implementation, the response module is used to:

[0038] Respond to the process item change request and determine the first test process after addition or modification;

[0039] When the start operation node and the end operation node of the first test process are not within the same operation time control interval, determine whether the first test process has set a safe operation time;

[0040] If the first test process has not set a safe operation time, output the first reminder message, which is used to remind the user to set a safe operation time for the first test process.

[0041] In a feasible implementation, the change operation time control interval request further includes:

[0042] Delete the test process;

[0043] The response module is further used to:

[0044] After deleting the test process, determine whether the deleted test process has set a safe operation time;

[0045] If the deleted test process has set a safe operation time, output the third reminder message, which is used to remind the user to delete the safe operation time corresponding to the deleted test process.

[0046] In a feasible implementation, the change operation time control interval request includes:

[0047] Add or modify the operation time control interval.

[0048] In a feasible implementation, the response module is specifically used to:

[0049] Respond to the process item change request and determine the first operation time control interval after addition or modification;

[0050] Determine whether there is a first test process to replace the first sub - process in the main process, where both the first test process and the first sub - process start from the third operation node and end at the fourth operation node, the third operation node and the fourth operation node are taken from the operation nodes on the main process, and there is an intersection between the test process or the sub - process and the first operation time control interval;

[0051] If there is the first test process, output the first reminder message, which is used to remind the user to set a safe operation time for the first test process.

[0052] In a feasible implementation manner, the change operation time control interval request includes:

[0053] Delete the operation time control interval;

[0054] The response module is further configured to:

[0055] After deleting the operation time control interval, determine whether there is a target sub - process whose start operation node and end operation node are the same as those of the deleted operation time control interval;

[0056] If there is the target sub - process, output a second reminder message, which is used to remind the user to delete the target sub - process.

[0057] In some embodiments, the present application provides an electronic device, including: at least one processor and a memory;

[0058] The memory stores computer - executable instructions;

[0059] The at least one processor executes the computer - executable instructions stored in the memory, so that the at least one processor executes the process flow management method provided in the above - mentioned embodiments.

[0060] In some embodiments, the present application provides a computer - readable storage medium, in which computer - executable instructions are stored. When a processor executes the computer - executable instructions, the process flow management method provided in the above - mentioned embodiments can be implemented.

[0061] In some embodiments, the present application provides a computer program product, including a computer program, which when executed by a processor, can implement the process flow management method provided in the above - mentioned embodiments.

[0062] The process flow management method and device provided by the embodiments of the present application, after changing the operation time control interval, remind the user to set a new safe operation time by outputting a reminder message, so as to prevent the operation duration of the process flow from getting out of control, which can not only avoid affecting the quality, yield and reliability of the product, but also avoid wasting production resources and ensure production efficiency. Description of the Drawings

[0063] Figure 1 It is a schematic flowchart of a process flow management method provided by an embodiment of the present application;

[0064] Figure 2 It is a schematic diagram of a main process provided by an embodiment of the present application;

[0065] Figure 3 It is a schematic diagram of another main process provided by an embodiment of the present application;

[0066] Figure 4 It is a schematic diagram of a process item change provided by an embodiment of the present application;

[0067] Figure 5 It is a schematic diagram of another process item change provided by an embodiment of the present application;

[0068] Figure 6 It is a simplified schematic diagram of the main process after change provided by an embodiment of the present application;

[0069] Figure 7 It is a simplified schematic diagram of another main process after change provided by an embodiment of the present application;

[0070] Figure 8 It is a schematic diagram of program modules of a process flow management device provided in an embodiment of the present application;

[0071] Figure 9 It is a schematic diagram of the hardware structure of an electronic device provided by an embodiment of the present application. Detailed Embodiments

[0072] To make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Apparently, the described embodiments are some but not all of the embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts shall fall within the scope of protection of the present application. In addition, although the disclosed content in the present application is introduced according to exemplary one or several examples, it should be understood that each aspect of these disclosed contents can also be independently constituted as a complete implementation manner.

[0073] It should be noted that the brief description of the terms in this application is only for the convenience of understanding the following described embodiments, rather than intending to limit the embodiments of this application. Unless otherwise specified, these terms should be understood in their ordinary and common meanings.

[0074] In this application, terms such as "first", "second", etc. in the specification, claims and the above-mentioned drawings are used to distinguish similar or like objects or entities, and do not necessarily mean to limit a specific order or sequence, unless otherwise noted. It should be understood that such terms can be interchanged under appropriate circumstances, for example, it is possible to implement according to an order other than those given in the illustration or description of the embodiments of this application.

[0075] In addition, the terms "comprising" and "having" and any variations thereof are intended to cover but not exclude inclusion. For example, a product or device comprising a series of components does not necessarily have to be limited to those components clearly listed, but may include other components not clearly listed or inherent to these products or devices.

[0076] The term "module" used in this application refers to any known or later-developed hardware, software, firmware, artificial intelligence, fuzzy logic, or a combination of hardware and / or software code that can perform functions related to that element.

[0077] In the field of integrated circuits or semiconductors, some production process paragraphs require strict control of the operation time. In addition to setting the operation time on a single process, it may also be necessary to set the operation time at the nodes across processes (between the main process, the experimental process, and the rework process) to complete the function of controlling the operation time at the cross-process nodes, preventing users from missing the setting of the operation time control interval when changing the conventional production materials, resulting in out-of-control operation duration, and the products need to be reworked or even scrapped, which not only reduces the resource utilization rate and production efficiency, but also affects the product quality, yield, and reliability.

[0078] Among them, the semiconductor production and processing technology involves a variety of chemical reactions, and the operation and waiting duration are important factors affecting the process effect, product quality, and overall processing efficiency. Therefore, it is necessary to control the operation duration in some production stages to improve the product quality, yield, and reliability, improve the resource utilization rate and production efficiency, and reduce the impact of environmental pollution.

[0079] The current process flow control system only supports setting the start node of time control in the same process and cannot directly set the operation time control interval across processes. In addition, the time control between the main process and the experimental process can only be achieved by replacing the original node of the main process with the node of the experimental process on the basis of the time control set in the main process.

[0080] Since the responsible personnel for each production process are different, it is difficult for the same responsible person to accurately understand the time control settings of other processes. When the responsible person changes some production parameters, it may also affect the originally set operation duration control function, resulting in the loss of control of the operation duration of the process flow, wasting production resources, reducing production efficiency, and even affecting the quality, yield, and reliability of the product.

[0081] In view of the above technical problems, in the embodiments of the present application, a process flow management method is provided. After the user changes the operation time control interval, a reminder message can be output to remind the user to set a new safe operation time, thereby preventing the loss of control of the operation duration of the process flow, avoiding waste of production resources, and ensuring production efficiency. The following will be described in detail with specific embodiments.

[0082] Refer to Figure 1 , Figure 1 which is a schematic flow chart of a process flow management method provided by an embodiment of the present application. In a feasible implementation manner, the above process flow management method includes:

[0083] S101. Provide the main process of the workpiece to be processed.

[0084] In the embodiments of the present application, the above main process includes a plurality of main process steps set in a preset order, and operation nodes before and after each main process step and between adjacent main process steps.

[0085] For a better understanding of the embodiments of the present application, refer to Figure 2 , Figure 2 which is a schematic diagram of a main process provided by an embodiment of the present application.

[0086] In some embodiments, the above main process includes a plurality of main process steps set in a preset order, such as including step a, step b, step c,..., step f, step g,...

[0087] Among them, the nodes before and after each main process step and between two adjacent main process steps are operation nodes.

[0088] In some embodiments, the user can store the main process of the workpiece to be processed in the management device in advance.

[0089] S102. Receive a process item change request for the workpiece, where the process item change request includes a request to change the operation time control interval.

[0090] Among them, the above operation time control interval starts from the first operation node and ends at the second operation node. The first operation node and the second operation node are taken from the operation nodes on the above main process, and at least one main process step is included between the first operation node and the second operation node.

[0091] In some embodiments, some operation time control intervals are set in the above-mentioned main process. Each operation time control interval includes at least one process step. During the processing, the total processing duration of each process step within each operation time control interval needs to be controlled within the preset operation duration of each operation time control interval.

[0092] In some embodiments, some test processes are set in the above-mentioned main process for replacing the sub-process in the main process.

[0093] For better understanding of the embodiments of the present application, refer to Figure 3 , Figure 3 which is a schematic diagram of another main process provided for the embodiments of the present application.

[0094] As Figure 3 shown, the above-mentioned main process has a plurality of main process steps set in a preset order, including step a, step b, step c, ……, step i, step j, ……

[0095] Among them, an "operation time control interval h - j" is set in the above-mentioned main process to control the total operation duration of steps h, i, and j within 30 minutes.

[0096] In addition, an experimental process S2 is also set in the above-mentioned main process. The experimental process S2 includes step f1 and step g1 and is used to replace steps f and g in the main process.

[0097] Among them, steps f to g in the main process are a sub-process in the main process.

[0098] In a feasible implementation manner, when the user needs to change the process items of the above-mentioned workpiece, a process item change request can be submitted to the management device.

[0099] Exemplarily, the above-mentioned process item change request may include adding an operation time control interval in the main process, deleting an operation time control interval in the main process, modifying the start operation node and / or end operation node of the existing operation time control interval in the main process, and adding a test process in the main process, deleting a test process in the main process, modifying the start operation node and / or end operation node of the existing test process in the main process, etc., which are not limited in the embodiments of the present application.

[0100] S103. Respond to the process item change request and output a first reminder message, which is used to remind the user to set a safe operation time for the process item change request.

[0101] In some embodiments, after receiving a process item change request, the management device outputs a first reminder message according to the change content corresponding to the process item change request, for reminding the user to set a safe operation time for the process item change request.

[0102] In a feasible implementation manner, after receiving a process item change request, the management device may, according to a preset rule, determine whether the process item change request will affect the operation time control function set in the main process. If so, it outputs a first reminder message to remind the user to set a safe operation time for the process item change request.

[0103] In some embodiments, after the user submits a process item change request, on the one hand, the management device reads the start operation node of the set operation time control interval, the experiment process ID, the start and end operation nodes of the experiment process, and the information that the experiment process replaces the sub-process in the main process in the production system database. On the other hand, the management device reads the start and end operation nodes of the operation time control interval newly added / modified / deleted in the process item change request.

[0104] The management device summarizes the read data and, according to a preset rule, determines whether there is a situation where the start and end operation nodes of the experiment process in the above process item change request are within the operation time control interval. If so, it continues to determine whether there is information in the above production system database or the above process item change request that the corresponding experiment process replaces the sub-process in the original main process. If so, it continues with the submission action, otherwise it outputs a reminder message or an error message to remind the user to set a safe operation time for the process item change request.

[0105] In a feasible implementation manner, if it is determined that both the start and end operation nodes of the experiment process are within a certain time control interval of the main process (i.e., it may affect the control function), a reminder message can be output in the form of a pop-up window to remind the user to confirm whether they need to use the experiment process to replace the sub-process in the main process.

[0106] If it is determined that only one of the start and end operation nodes of the experiment process is within a certain time control interval of the main process (i.e., it will definitely affect the control function), it is determined whether the user has set a safe operation time for the above process item change request. If not, a reminder message is output to remind the user to set a safe operation time for the process item change request.

[0107] In some embodiments, the above reminder message or error message may include an error message link. The user can click on this link to download an information file, and through this information file, the location information where the safe operation time needs to be set in the main process can be determined.

[0108] In the embodiment of the present application, the process flow management method provided can, when a user submits an application for changing the operation time control interval, remind the user to set a new safe operation time by outputting a reminder message, thereby preventing the operation duration of the process flow from getting out of control, avoiding waste of production resources, and ensuring production efficiency, product quality, yield, and reliability.

[0109] Based on the content described in the above embodiments, in some embodiments, when the above request for changing the operation time control interval is to add or modify a sub-process in the main process by replacing it with a test process, the first test process after the addition or modification can be determined first; if the start operation node and the end operation node of the first test process are not within the same operation time control interval, it is determined whether the first test process has set a safe operation time; if not, a first reminder message is output to remind the user to set a safe operation time for the first test process.

[0110] It can be understood that if the start operation node and the end operation node of the first test process are not within the same operation time control interval, it means that the first test process crosses the start node of the operation time control interval. In this case, the timing function cannot be triggered at the start operation node of the first test process, resulting in the inability to control the operation duration of the first test process.

[0111] For a better understanding of the embodiments of the present application, refer to Figure 4 , Figure 4 which is a schematic diagram of a process project change provided for the embodiment of the present application.

[0112] As Figure 4 shown, the above main process has a plurality of main process steps set in a preset order, including step a, step b, step c,..., step i, step j,...; there are "operation time control interval a - c" and "operation time control interval h - j" set in the main process. "Operation time control interval a - c" is used to control the total operation duration of steps a, b, and c within 60 minutes; "operation time control interval h - j" is used to control the total operation duration of steps h, i, and j within 30 minutes.

[0113] Suppose the above request for changing the operation time control interval is to add an experimental process S1. Among them, the experimental process S1 includes step c1 and step d1. The experimental process S1 can be used to replace the sub-process composed of steps c and d in the main process.

[0114] As Figure 4 shown, the added experimental process S1 crosses the "operation time control interval a - c", which will cause the start node of the experimental process S1 to be unable to trigger the timing function, and further result in the inability to control the operation duration of the experimental process S1.

[0115] In some embodiments, when it is determined that the experimental process S1 crosses the "operation time control interval a - c", it is determined whether a safety operation time has been set for the experimental process S1; if no safety operation time has been set, a reminder message is output to remind the user to set a safety operation time for the experimental process S1 to control the operation duration of the experimental process S1.

[0116] In some embodiments, assume that the above-mentioned request for changing the operation time control interval is to modify the operation node where the experimental process S2 returns to the main process. Specifically, the operation node where the experimental process S2 returns to the main process is modified from the operation node between step g and step h to the operation node between step h and step i.

[0117] As Figure 4 shown, it can be seen that the modified experimental process S2 crosses the operation time control interval h - j. At this time, if it is necessary to control the operation duration of the modified experimental process S2, the user needs to be reminded to set a safety operation time for the modified experimental process S2.

[0118] In some embodiments, if the above-mentioned request for changing the operation time control interval is to delete the test process in the main process, after deleting the test process, it can be determined whether a safety operation time has been set for the deleted test process; if so, a reminder message is output to remind the user to delete the safety operation time corresponding to the deleted test process.

[0119] For the process flow management method provided by the embodiments of the present application, after adding or modifying a test process to replace a sub-process in the main process, if the start operation node and the end operation node of the added or modified test process are not within the same operation time control interval, it is determined whether a safety operation time has been set for the test process; if not, the user is reminded to set a safety operation time for the test process, thereby preventing the operation duration of the process flow from getting out of control.

[0120] Based on the content described in the above embodiments, in some embodiments, the above-mentioned request for changing the operation time control interval may also be to add or modify the operation time control interval in the main process.

[0121] In some embodiments, when the above-mentioned request for changing the operation time control interval is to add or modify the operation time control interval in the main process, the newly added or modified first operation time control interval is determined; at the same time, it is determined whether there is a first test process replacing the first sub-process in the main process. If there is a first test process, a reminder message is output to remind the user to set a safety operation time for the first test process.

[0122] For a better understanding of the embodiments of the present application, refer to Figure 5 , Figure 5Another schematic diagram of process item change provided by the embodiments of this application.

[0123] As Figure 5 shown, the above main process has a plurality of main process steps set in a preset order, including step a, step b, step c, ……, step i, step j, ……; there are "operation time control intervals a - c" and "operation time control intervals h - j" set in the main process. "Operation time control intervals a - c" is used to control the total operation duration of steps a, b, and c within 60 minutes; "operation time control intervals h - j" is used to control the total operation duration of steps h, i, and j within 30 minutes.

[0124] In addition, the above main process also includes an experimental process S1 and an experimental process S2.

[0125] Assume that the above request for changing the operation time control interval is to add "operation time control intervals d - f" in the main process, which is used to control the total operation duration of steps d, e, and f within 90 minutes. It can be seen from Figure 5 that both the experimental process S1 and the experimental process S2 have intersections with "operation time control intervals d - f". In order to control the operation duration of the experimental process S1 and the experimental process S2, it is necessary to remind the user to set the safe operation time for the experimental process S1 and the experimental process S2.

[0126] In some embodiments, when the above request for changing the operation time control interval is to delete the operation time control interval in the main process, after deleting the corresponding operation time control interval, it is possible to determine whether there is a target sub - process whose start operation node and end operation node are the same as the deleted operation time control interval; if there is such a target sub - process, an alert message is output to remind the user to delete the target sub - process.

[0127] The process flow management method provided by the embodiments of this application, after changing the operation time control interval in the main process, if there is an experimental process in the main process that has an intersection with the changed operation time control interval, it is determined whether the safe operation time has been set for the experimental process; if not, the user is reminded to set the safe operation time for the experimental process, so as to prevent the operation duration of the process flow from getting out of control.

[0128] Based on the content described in the above embodiments, in some embodiments, assume that the start operation node of the experimental process is called the cut - out operation node, and the end operation node of the experimental process is called the cut - in operation node. In addition, the start operation node of the operation time control interval in the main process is called the start trigger time node, and the end operation node of the operation time control interval is called the end trigger time node.

[0129] In a feasible implementation, a test process can be added to the main process by specifying a cut-out operation node and a cut-in operation node on the main process; the existing test process on the main process can be modified by replacing the specified cut-out operation node and / or cut-in operation node on the main process; and the existing test process on the main process can be deleted by deleting the specified cut-out operation node and cut-in operation node on the main process.

[0130] Similarly, an operation time control interval can be added to the main process by specifying a start trigger time node and an end trigger time node on the main process; the existing operation time control interval on the main process can be modified by replacing the specified start trigger time node and end trigger time node on the main process; and the existing operation time control interval on the main process can be deleted by deleting the specified start trigger time node and end trigger time node on the main process.

[0131] For a better understanding of the embodiments of the present application, refer to Figure 6 , Figure 6 which is a simplified schematic diagram of the main process after change provided by the embodiments of the present application.

[0132] In some embodiments, it is assumed that in the changed main process, the cut-in operation node 1 is between the start trigger time node and the end trigger time node, and the cut-out operation node 1 is not between the start trigger time node and the end trigger time node; and, the cut-in operation node 2 is not between the start trigger time node and the end trigger time node, and the cut-out operation node 2 is between the start trigger time node and the end trigger time node.

[0133] In a feasible implementation, if the start trigger time node and the end trigger time node are the originally specified nodes in the main process, then when the cut-out operation node 1, the cut-in operation node 1, the cut-out operation node 2, and the cut-in operation node 2 are newly added or modified operation nodes, it is necessary to determine whether a safe operation time has been set for the test process between the cut-out operation node 1 and the cut-in operation node 1, and the test process between the cut-out operation node 2 and the cut-in operation node 2. If not, a reminder message is output to remind the user to set the safe operation time.

[0134] When the cut-out operation node 1, the cut-in operation node 1, the cut-out operation node 2, and the cut-in operation node 2 are operation nodes to be deleted, it can be determined whether the user has an operation to delete the start trigger time node and the end trigger time node. If not, a reminder message is output to remind the user to delete the corresponding safe operation time, for example, to remind the user to delete the start trigger time node and the end trigger time node.

[0135] In another feasible implementation, if the cut-out operation node 1, cut-in operation node 1, cut-out operation node 2, and cut-in operation node 2 are the operation nodes originally set in the main process, when the start trigger time node and the end trigger time node are newly added or modified operation nodes, it is necessary to determine whether the safety operation time has been set for the test process between the cut-out operation node 1 and the cut-in operation node 1, and between the cut-out operation node 2 and the cut-in operation node 2. If not, a reminder message is output to remind the user to set the safety operation time. At this time, the user can add the safety operation time by adding new start trigger time nodes and end trigger time nodes to the main process.

[0136] When the start trigger time node and the end trigger time node are operation nodes to be deleted, it can be determined whether the user has an operation to delete the cut-in operation node and the cut-out operation node. If not, a reminder message is output to remind the user to delete the corresponding test process, such as reminding the user to delete the cut-out operation node 1, cut-in operation node 1, cut-out operation node 2, and cut-in operation node 2.

[0137] For a better understanding of the embodiments of the present application, in some other embodiments, refer to Figure 7 , Figure 7 which is a simplified schematic diagram of another main process change provided by the embodiments of the present application.

[0138] In some embodiments, it is assumed that in the changed main process, the cut-out operation node is between the start trigger time node 1 and the end trigger time node 1, and the cut-in operation node is between the start trigger time node 2 and the end trigger time node 2.

[0139] In a feasible implementation, if the start trigger time node 1 and the end trigger time node 1, the start trigger time node 2 and the end trigger time node 2 are the nodes originally set in the main process, when the cut-out operation node and the cut-in operation node are newly added or modified operation nodes, it is necessary to determine whether the safety operation time has been set for the test process between the cut-out operation node and the cut-in operation node. If not, a reminder message is output to remind the user to set the safety operation time.

[0140] When the cut-out operation node and the cut-in operation node are operation nodes to be deleted, it can be determined whether the user has an operation to delete the trigger time node. If not, a reminder message is output to remind the user to delete the corresponding safety operation time, such as reminding the user to delete the start trigger time node 1, the end trigger time node 1, the start trigger time node 2, and the end trigger time node 2.

[0141] In another feasible implementation, if the cut-out operation node and the cut-in operation node are the operation nodes originally set in the main process, when the start trigger time node 1, the end trigger time node 1, the start trigger time node 2, and the end trigger time node 2 are newly added or modified operation nodes, it is necessary to determine whether a safety operation time has been set for the test process between the cut-out operation node and the cut-in operation node. If not, a reminder message is output to remind the user to set the safety operation time. At this time, the user can add the safety operation time by adding new start trigger time nodes and end trigger time nodes to the main process.

[0142] When the start trigger time node 1, the end trigger time node 1, the start trigger time node 2, and the end trigger time node 2 are operation nodes to be deleted, it can be determined whether the user has an operation to delete the cut-in operation node and the cut-out operation node. If not, a reminder message is output to remind the user to delete the corresponding test process, for example, to remind the user to delete the cut-out operation node and the cut-in operation node.

[0143] In the process flow management method provided by the embodiments of the present application, when the cut-out operation node and the cut-in operation node in the main process are split / skipped by two relevant trigger time nodes, or two relevant trigger time nodes are split / skipped by the cut-out operation node and the cut-in operation node, a reminder message is output to remind the user to set a new safety operation time, so as to prevent the operation duration of the process flow from getting out of control, which can not only avoid wasting production resources, but also ensure production efficiency, product quality, yield, and reliability.

[0144] Based on the content described in the above embodiments, a process flow management device is also provided in the embodiments of the present application. Refer to Figure 8 , Figure 8 is a schematic diagram of the program module of a process flow management device provided in the embodiments of the present application. The process flow management device includes:

[0145] A storage module 801, configured to provide a main process for a workpiece to be processed, where the main process includes a plurality of main process steps set in a preset order, and operation nodes located before and after each main process step and between adjacent main process steps.

[0146] A receiving module 802, configured to receive a process item change request for the workpiece, where the process item change request includes a request for changing the operation time control interval; wherein, the operation time control interval starts from a first operation node and ends at a second operation node, the first operation node and the second operation node are selected from the operation nodes on the main process, and at least one main process step is included between the first operation node and the second operation node.

[0147] A response module 803, configured to respond to a process item change request and output a first reminder message for reminding a user to set a safe operation time for the process item change request.

[0148] After changing the operation time control interval, the process flow management device provided by the embodiment of the present application reminds the user to set a new safe operation time by outputting a reminder message, so as to prevent the operation duration of the process flow from getting out of control, which can not only avoid wasting production resources but also ensure production efficiency.

[0149] In a feasible implementation manner, the above-mentioned operation time control interval change request includes:

[0150] Adding or modifying a test process to replace a sub-process in the main process, where both the test process and the sub-process start from a third operation node and end at a fourth operation node, and the third operation node and the fourth operation node are selected from the operation nodes on the main process, and there is an intersection between the above-mentioned test process or sub-process and the above-mentioned operation time control interval.

[0151] In a feasible implementation manner, the response module 803 is configured to:

[0152] Respond to a process item change request, determine a first test process after addition or modification; when the start operation node and the end operation node of the first test process are not within the same operation time control interval, determine whether the first test process has set a safe operation time; if the first test process has not set a safe operation time, output a first reminder message for reminding the user to set a safe operation time for the first test process.

[0153] In a feasible implementation manner, the above-mentioned operation time control interval change request further includes: deleting a test process.

[0154] The response module 803 is further configured to:

[0155] After deleting the test process, determine whether the deleted test process has set a safe operation time; if the deleted test process has set a safe operation time, output a third reminder message for reminding the user to delete the safe operation time corresponding to the deleted test process.

[0156] In a feasible implementation manner, the above-mentioned operation time control interval change request includes:

[0157] Adding or modifying the above-mentioned operation time control interval.

[0158] In a feasible implementation manner, the response module 803 is specifically configured to:

[0159] In response to a project change request for the process, determine the newly added or modified first operation time control interval; determine whether there is a first test process to replace the first sub-process in the main process, where both the first test process and the first sub-process start from the third operation node and end at the fourth operation node, the third operation node and the fourth operation node are taken from the operation nodes on the main process, and the test process or sub-process has an intersection with the first operation time control interval; if there is a first test process, output a first reminder message to remind the user to set a safe operation time for the first test process.

[0160] In a feasible implementation manner, the change request for the operation time control interval includes: deleting the operation time control interval;

[0161] The response module 803 is further configured to:

[0162] After deleting the operation time control interval, determine whether there is a target sub-process whose start operation node and end operation node are the same as those of the deleted operation time control interval; if there is a target sub-process, output a second reminder message, and the second reminder message is used to remind the user to delete the target sub-process.

[0163] It should be noted that the specific content executed by the storage module 801, the receiving module 802, and the response module 803 in the embodiments of the present application is the same as the content executed by each step in the process flow management method described in the above embodiments. Specifically, reference can be made to each step in the process flow management method described in the above embodiments, and details will not be repeated in the embodiments of the present application.

[0164] Furthermore, based on the content described in the above embodiments, an electronic device is further provided in the embodiments of the present application. The electronic device includes at least one processor and a memory; wherein, the memory stores computer-executable instructions; the at least one processor executes the computer-executable instructions stored in the memory to implement each step in the process flow management method described in the above embodiments.

[0165] For a better understanding of the embodiments of the present application, refer to Figure 9 , Figure 9 which is a schematic hardware structure diagram of an electronic device provided for the embodiments of the present application.

[0166] As Figure 9 shown, the electronic device 90 in this embodiment includes: a processor 901 and a memory 902; wherein:

[0167] The memory 902 is used to store computer-executable instructions;

[0168] A processor 901, configured to execute computer-executable instructions stored in a memory to implement each step in the process flow management method described in the above embodiments. For details, reference may be made to the content described in the above embodiments, which will not be elaborated in the embodiments of the present application.

[0169] Optionally, the memory 902 may be either independent or integrated with the processor 901.

[0170] When the memory 902 is independently provided, the device further includes a bus 903 for connecting the memory 902 and the processor 901.

[0171] Furthermore, based on the content described in the above embodiments, an embodiment of the present application further provides a computer-readable storage medium storing computer-executable instructions. When the processor executes the computer-executable instructions, each step in the process flow management method described in the above embodiments can be implemented. For details, reference may be made to the content described in the above embodiments, which will not be elaborated in the embodiments of the present application.

[0172] Furthermore, based on the content described in the above embodiments, an embodiment of the present application further provides a computer program product including a computer program. When the computer program is executed by the processor, each step in the process flow management method described in the above embodiments can be implemented. For details, reference may be made to the content described in the above embodiments, which will not be elaborated in the embodiments of the present application.

[0173] In several embodiments provided in the present application, it should be understood that the disclosed device and method can be implemented in other ways. For example, the device embodiments described above are merely illustrative. For example, the division of the modules is only a logical function division, and there may be other division methods in actual implementation. For example, multiple modules can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the displayed or discussed coupling or direct coupling or communication connection between each other can be through some interfaces, and the indirect coupling or communication connection of the device or module can be in an electrical, mechanical or other form.

[0174] The modules described as separate components may or may not be physically separated, and the components displayed as modules may or may not be physical units, that is, they may be located in one place or distributed to multiple network units. Some or all of the modules can be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0175] In addition, in each embodiment of the present application, each functional module can be integrated in a processing unit, or each module can exist physically alone, or two or more modules can be integrated in a unit. The above-mentioned unit integrated with modules can be implemented in the form of hardware, or in the form of a combination of hardware and software functional units.

[0176] The above-mentioned integrated module implemented in the form of a software functional module can be stored in a computer-readable storage medium. The above-mentioned software functional module stored in a storage medium includes several instructions for causing a computer device (which can be a personal computer, a server, or a network device, etc.) or a processor (English: processor) to execute some steps of the methods described in each embodiment of the present application.

[0177] It should be understood that the above-mentioned processor can be a central processing unit (English: Central Processing Unit, abbreviated as: CPU), and can also be other general-purpose processors, digital signal processors (English: Digital Signal Processor, abbreviated as: DSP), application specific integrated circuits (English: Application Specific Integrated Circuit, abbreviated as: ASIC), etc. The general-purpose processor can be a microprocessor or the processor can also be any conventional processor, etc. The steps of the method disclosed in combination with the application can be directly embodied as being executed and completed by a hardware processor, or executed and completed by a combination of hardware and software modules in the processor.

[0178] The memory may include high-speed RAM memory, and may also include non-volatile storage NVM, such as at least one disk memory, and can also be a USB flash drive, a mobile hard disk, a read-only memory, a magnetic disk or an optical disc, etc.

[0179] The bus can be an Industry Standard Architecture (ISA) bus, a Peripheral Component Interconnect (PCI) bus, or an Extended Industry Standard Architecture (EISA) bus, etc. The bus can be divided into an address bus, a data bus, a control bus, etc. For the convenience of representation, the buses in the drawings of the present application are not limited to only one bus or one type of bus.

[0180] The above storage medium can be implemented by any type of volatile or non-volatile storage device or a combination thereof, such as static random access memory (SRAM), electrically erasable programmable read-only memory (EEPROM), erasable programmable read-only memory (EPROM), programmable read-only memory (PROM), read-only memory (ROM), magnetic memory, flash memory, a magnetic disk, or an optical disk. The storage medium can be any available medium accessible by a general-purpose or special-purpose computer.

[0181] An exemplary storage medium is coupled to the processor so that the processor can read information from the storage medium and write information to the storage medium. Of course, the storage medium can also be a component of the processor. The processor and the storage medium can be located in an application specific integrated circuit (ASIC). Of course, the processor and the storage medium can also exist as discrete components in an electronic device or a main control device.

[0182] Those of ordinary skill in the art can understand that all or part of the steps of implementing the above method embodiments can be completed by hardware related to program instructions. The foregoing program can be stored in a computer-readable storage medium. When the program is executed, it performs the steps including the above method embodiments; and the foregoing storage medium includes various media that can store program codes, such as ROM, RAM, magnetic disks, or optical disks.

[0183] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A process flow management method, characterized in that, Including: Providing a main process for a workpiece to be processed, the main process including a plurality of main process steps set in a preset order, and operation nodes before, after, and between each adjacent pair of the plurality of main process steps; Receiving a process item change request for the workpiece, the process item change request including a request for changing an operation time control interval; wherein, the operation time control interval starts from a first operation node and ends at a second operation node, the first operation node and the second operation node are taken from the operation nodes on the main process, and at least one of the main process steps is included between the first operation node and the second operation node; The request for changing the operation time control interval includes adding or modifying a test process to obtain a first test process, and using the first test process to replace a sub-process in the main process, or deleting a test process, wherein both the test process and the sub-process start from a third operation node and end at a fourth operation node, the third operation node and the fourth operation node are taken from the operation nodes on the main process, and the test process or the sub-process has an intersection with the operation time control interval; or, the request for changing the operation time control interval includes adding, modifying, or deleting an operation time control interval; Responding to the process item change request and outputting a first reminder message, the first reminder message being used to remind a user to set a safe operation time for the process item change request, and the responding to the process item change request and outputting the first reminder message includes: Responding to the process item change request and determining the newly added or modified first test process; When the start operation node and the end operation node of the first test process are not within the same operation time control interval, determining whether the first test process has a safe operation time set; If the first test process does not have a safe operation time set, then outputting the first reminder message, the first reminder message being used to remind the user to set a safe operation time for the first test process; The method further includes: After deleting the test process, determining whether the deleted test process has a safe operation time set; If the deleted test process has a safe operation time set, then outputting a third reminder message, the third reminder message being used to remind the user to delete the safe operation time corresponding to the deleted test process.

2. The method according to claim 1, characterized in that, The responding to the process item change request and outputting the first reminder message includes: Responding to the process item change request and determining the newly added or modified first operation time control interval; Determining whether there is a first test process replacing a first sub-process in the main process; If there is the first test process, then outputting the first reminder message, the first reminder message being used to remind the user to set a safe operation time for the first test process.

3. The method according to claim 2, wherein The method further includes: After deleting the operation time control interval, determining whether there is a target sub-process whose start operation node and end operation node are the same as those of the deleted operation time control interval; If the target sub - process exists, output a second reminder message for reminding the user to delete the target sub - process.

4. A process flow management device, characterized in that, Including: A storage module for providing a main process for a workpiece to be processed. The main process includes a plurality of main process steps set in a preset order, and operation nodes before and after the plurality of main process steps and between adjacent main process steps; A receiving module for receiving a process item change request for the workpiece. The process item change request includes a request for changing the operation time control interval, and the request for changing the operation time control interval includes adding or modifying a test process to obtain a first test process and using the first test process to replace a sub - process in the main process, or deleting a test process. Wherein both the test process and the sub - process start from a third operation node and end at a fourth operation node, and the third operation node and the fourth operation node are taken from the operation nodes on the main process, and the test process or the sub - process has an intersection with the operation time control interval; or, The request for changing the operation time control interval includes adding, modifying or deleting an operation time control interval; wherein the operation time control interval starts from a first operation node and ends at a second operation node, and the first operation node and the second operation node are taken from the operation nodes on the main process, and there is at least one main process step between the first operation node and the second operation node; A response module for responding to the process item change request and outputting a first reminder message for reminding the user to set a safe operation time for the process item change request. The response module is used for: Responding to the process item change request to determine the newly added or modified first test process; When the start operation node and the end operation node of the first test process are not within the same operation time control interval, determining whether the first test process has a safe operation time set; If the first test process does not have a safe operation time set, output the first reminder message for reminding the user to set a safe operation time for the first test process; The response module is further used for: After deleting the test process, determining whether the deleted test process has a safe operation time set; If the deleted test process has a safe operation time set, output a third reminder message for reminding the user to delete the safe operation time corresponding to the deleted test process.

5. The device according to claim 4, wherein The response module is specifically used for: Responding to the process item change request to determine the newly added or modified first operation time control interval; Determining whether there is a first test process replacing the first sub - process in the main process; If the first test process exists, output the first reminder message for reminding the user to set a safe operation time for the first test process.

6. The device according to claim 5, wherein The response module is further used for: After deleting the job time control interval, determine whether there is a target sub-process whose start job node and end job node are the same as the deleted job time control interval; If there is the target sub-process, output a second reminder message for reminding the user to delete the target sub-process.

7. An electronic device, characterized in that, comprising: at least one processor and a memory; the memory stores computer-executable instructions; the at least one processor executes the computer-executable instructions stored in the memory, so that the at least one processor executes the process flow management method according to any one of claims 1 to 3.

8. A computer-readable storage medium, characterized in that, computer-executable instructions are stored in the computer-readable storage medium, and when the processor executes the computer-executable instructions, the process flow management method according to any one of claims 1 to 3 is implemented.

9. A computer program product, comprising a computer program, characterized in that, when the computer program is executed by a processor, the process flow management method according to any one of claims 1 to 3 is implemented.

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