A boat rod mechanism

Abstract

The present invention discloses a boat rod mechanism, comprising a boat rod, a sealing seat, a rotating component for driving the boat rod to rotate, and a lifting component for driving the boat rod to lift and lower, wherein one end of the boat rod is inserted into the sealing seat and a first sealing member is arranged between the two, and an air outlet joint is arranged on the sealing seat, and a pressure detection component is connected to the air outlet joint. The present invention has the advantages of being able to realize the linear motion and rotational motion of the boat rod, and detecting whether leakage occurs in real time.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a boat-rod mechanism. Background Art

[0002] With the rapid development of the semiconductor industry and the strict technological blockade imposed by foreign countries, the country's development of semiconductor equipment technology has become more urgent. Most of the core process of semiconductor equipment requires a reliable vacuum or pressure environment, and needs to meet the dynamic process of multi-dimensional movement of the substrate. In existing semiconductor equipment, the process of the substrate mostly requires simple linear motion or directly fixed into the process chamber for processing, and the sealing mechanism required by the equipment is relatively simple. The production of high-quality and special semiconductor materials often requires a multi-dimensional dynamic process in a high vacuum and high pressure process environment, which cannot be met by the boat rod mechanism of existing equipment. Summary of the invention

[0003] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide a boat rod mechanism that can realize linear motion and rotational motion of the boat rod and detect in real time whether leakage occurs.

[0004] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0005] A boat rod mechanism comprises a boat rod, a sealing seat, a rotating component for driving the boat rod to rotate, and a lifting component for driving the boat rod to rise and fall, one end of the boat rod is inserted into the sealing seat and a first sealing member is provided between the two, an air outlet joint is provided on the sealing seat, and the air outlet joint is connected to a pressure detection member.

[0006] As a further improvement of the above technical solution: the air outlet connector is also connected to an air pump.

[0007] As a further improvement of the above technical solution: an air inlet connector is also provided on the sealing seat.

[0008] As a further improvement of the above technical solution: the first seal is provided in plurality and is arranged at intervals along the axial direction of the boat rod, the first seal is equipped with a first compression sleeve, the sealing seat is provided with a compression nut for compressing the first compression sleeve, and the boat rod is inserted into the compression nut.

[0009] As a further improvement of the above technical solution: a groove is provided on the outer wall of the first compression sleeve and corresponds to the air outlet connector or the air inlet connector.

[0010] As a further improvement of the above technical solution: the other end of the boat rod is inserted into a mounting seat, and a first rolling bearing is provided between the mounting seat and the boat rod.

[0011] As a further improvement of the above technical solution: it also includes a connecting sleeve, which is fixed to the boat rod through a first fastener, the first rolling bearing is arranged between the connecting sleeve and the mounting seat, and the rotating component is sleeved on the boat rod and fixedly connected to the connecting sleeve through a second fastener.

[0012] As a further improvement of the above technical solution: a second seal is provided between the first fastener and the connecting sleeve, a third seal is provided between the connecting sleeve and the boat rod, a fourth seal is provided between the rotating component and the boat rod, and the third seal and the fourth seal are equipped with a second compression sleeve.

[0013] As a further improvement of the above technical solution: the rotating component is a synchronous pulley.

[0014] As a further improvement of the above technical solution: the lifting component is sleeved on the boat rod and a second rolling bearing is provided between the two, thrust bearings are provided on both sides of the second rolling bearing, and a fixing ring for fixing the thrust bearing is provided on the boat rod.

[0015] Compared with the prior art, the advantages of the present invention are: the boat rod mechanism disclosed in the present invention utilizes a rotating component to drive the boat rod to rotate, and utilizes a lifting component to drive the boat rod to lift and lower, so that the boat rod can drive the substrate in the graphite boat or graphite boat frame to realize a multi-dimensional dynamic process, one end of the boat rod is inserted into the sealing seat and a first sealing member is provided between the two, and the dynamic sealing of the boat rod is realized by the first sealing member, and an air outlet joint is provided on the sealing seat and is connected to a pressure detection member. When a leakage occurs, the pressure detected by the pressure detection member will change, thereby giving a prompt in time. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of the boat rod mechanism of the present invention.

[0017] Figure 2 yes Figure 1 Enlarged view of point A in the middle.

[0018] Figure 3 yes Figure 1 Enlarged view of point B in the middle.

[0019] The numbers in the figure represent: 1. boat rod; 11. connecting sleeve; 12. first fastener; 13. second seal; 14. third seal; 15. fourth seal; 16. second compression sleeve; 17. fixing ring; 2. sealing seat; 21. first seal; 22. air outlet joint; 23. air inlet joint; 24. first compression sleeve; 25. compression nut; 3. rotating component; 31. second fastener; 4. lifting component; 41. second rolling bearing; 42. thrust bearing; 5. mounting seat; 51. first rolling bearing; 6. process chamber. DETAILED DESCRIPTION

[0020] The present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0021] Figures 1 to 3 An embodiment of the boat-rod mechanism of the present invention is shown. The boat-rod mechanism of this embodiment includes a boat rod 1, a sealing seat 2, a rotating component 3 for driving the boat rod 1 to rotate, and a lifting component 4 for driving the boat rod 1 to rise and fall. One end of the boat rod 1 is inserted into the sealing seat 2 and a first sealing member 21 is provided between the two (in this embodiment, the process chamber 6 is located below the sealing seat 2, and the corresponding lower end of the boat rod 1 enters the process chamber 6 after passing through the sealing seat 2). The sealing seat 2 is provided with an air outlet joint 22, and the air outlet joint 22 is connected to a pressure detection component (not shown in the figure). Among them, the pressure detection component can be, for example, a pressure gauge, a pressure sensor, etc.; the first sealing member 21 can be a sealing ring or a sealing strip, etc.

[0022] The boat rod mechanism utilizes a rotating component 3 to drive the boat rod 1 to rotate, and utilizes a lifting component 4 to drive the boat rod 1 to lift and lower, so that the boat rod 1 can drive the substrate in the graphite boat or graphite boat frame to realize a multi-dimensional dynamic process. The lower end of the boat rod 1 is penetrated into the sealing seat 2 and a first sealing member 21 is provided between the two. The first sealing member 21 is utilized to realize dynamic sealing of the boat rod 1. An air outlet joint 22 is provided on the sealing seat 2 and is connected to a pressure detection component. When a leakage occurs, the pressure detected by the pressure detection component will change, thereby giving a prompt in time to remind the operator to handle it in time.

[0023] Furthermore, in this embodiment, the gas outlet connector 22 is also connected to a vacuum pump (not shown in the figure). When leakage occurs, the vacuum pump can timely extract and collect the gas leaked from the process chamber 6 to prevent it from flowing into the external environment.

[0024] Furthermore, in this embodiment, an air inlet connector 23 is also provided on the sealing seat 2. During the process, the air inlet connector 23 always maintains the input of low-pressure inert gas. Once a leak occurs, the inert gas replaces the air and enters the process chamber 6 (most of the gases in the process chamber 6 are dangerous gases. If air enters the process chamber 6 after a leak, there is a risk of explosion), thereby ensuring the safety of the entire boat-rod mechanism and the semiconductor equipment.

[0025] Furthermore, in this embodiment, three first seals 21 are provided and arranged at intervals along the axial direction of the boat rod 1. The first seals 21 are equipped with first compression sleeves 24, so that three-level sealing can be formed to improve the sealing reliability between the boat rod 1 and the sealing seat 2. The sealing seat 2 is provided with a compression nut 25 for compressing the first compression sleeves 24, and the boat rod 1 is inserted into the compression nut 25. Tightening the compression nut 25 can compress each first compression sleeve 24 step by step, and the first seal 21 corresponding to the first compression sleeve 24 is squeezed and deformed, thereby providing reliable sealing. During use, the tightening degree of the compression nut 25 can be gradually adjusted to eliminate the gap formed by the first seal 21 due to wear, ensuring that the sealing structure is effective for a long time and easy to install and maintain.

[0026] As a preferred embodiment, the air outlet connector 22 is located between the middle and lower first sealing members 21, and the air inlet connector 23 is located between the middle and upper first sealing members 21. A groove is provided on the outer wall of the first compression sleeve 24 and corresponds to the air outlet connector 22 or the air inlet connector 23, so that the gas leaked in the process chamber 6 can enter the air outlet connector 22 through the groove and be extracted and collected, or the gas flowing out of the air inlet connector 23 can enter the process chamber 6 through the groove. The structure is simple and reliable.

[0027] Furthermore, in this embodiment, the upper end of the boat rod 1 is inserted into a mounting seat 5, and a first rolling bearing 51 is provided between the mounting seat 5 and the boat rod 1. The driving components of the rotating component 3 can be fixed on the mounting seat 5, and the first rolling bearing 51 is provided to prevent the mounting seat 5 from interfering with the rotational movement of the boat rod 1.

[0028] Furthermore, in this embodiment, the boat rod mechanism further includes a connecting sleeve 11, which is fixed to the boat rod 1 through a first fastener 12, a first rolling bearing 51 is provided between the connecting sleeve 11 and the mounting seat 5, and the rotating component 3 is sleeved on the boat rod 1 and fixedly connected to the connecting sleeve 11 through a second fastener 31. The first fastener 12 and the second fastener 31 may be, for example, screws, bolts, etc. When rotational motion is required, the rotating component 3 drives the connecting sleeve 11 to rotate through the second fastener 31, and the connecting sleeve 11 drives the boat rod 1 to rotate through the first fastener 12, and the mounting seat 5 and the rotation driving component fixed thereon remain stationary.

[0029] As a preferred embodiment, a second seal 13 is provided between the first fastener 12 and the connecting sleeve 11, a third seal 14 is provided between the connecting sleeve 11 and the boat pole 1, a fourth seal 15 is provided between the rotating component 3 and the boat pole 1, and the third seal 14 and the fourth seal 15 are provided with a second compression sleeve 16. As mentioned above, the second seal 13 and the fourth seal 15 can be, for example, a sealing ring or a sealing strip. The second seal 13 is deformed by the extrusion of the first fastener 12, which can ensure the sealing between the first fastener 12 and the connecting sleeve 11. Under the action of the second fastener 31, the second compression sleeve 16 squeezes the third seal 14 and the fourth seal 15 to deform them. The third seal 14 can ensure the sealing between the connecting sleeve 11 and the boat pole 1, and the fourth seal 15 can ensure the sealing between the rotating component 3 and the boat pole 1. The structure is simple and reliable, and it is easy to disassemble and maintain.

[0030] As a preferred embodiment, the rotating component 3 is a synchronous pulley. Of course, in other embodiments, the rotating component 3 can also be a sprocket, a gear, etc., which can drive the boat rod 1 to rotate.

[0031] Furthermore, in this embodiment, the lifting component 4 is sleeved on the boat pole 1 and a second rolling bearing 41 is provided between the two, thrust bearings 42 are provided on both sides of the second rolling bearing 41, and a fixing ring 17 for fixing the thrust bearing 42 is provided on the boat pole 1. By providing the second rolling bearing 41, the lifting component 4 is prevented from interfering with the rotational movement of the boat pole 1, and thrust bearings 42 are provided on both sides of the second rolling bearing 41, so as to ensure that the lifting and rotating movement of the boat pole 1 is smoother and more reliable. Among them, the fixing ring 17 is preferably matched with the boat pole 1 through a thread, which is reliable and easy to install and maintain.

[0032] The working principle of the boat rod mechanism of the present invention is as follows: when rotational motion is required, the rotating component 3 drives the connecting sleeve 11 to rotate through the second fastener 31, and the connecting sleeve 11 drives the boat rod 1 to rotate through the first fastener 12, the mounting seat 5 and the rotating driving component fixed thereon remain stationary, and the lifting component 4 below also remains stationary. When lifting motion is required, the rotating component 3 drives the boat rod 1, the connecting sleeve 11, etc. to rise and fall as a whole through the second rolling bearing 41 and the thrust bearings 42 on both sides and the fixing ring 17.

[0033] Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Any technician familiar with the art can make many possible changes and modifications to the technical solution of the present invention by using the technical content disclosed above without departing from the scope of the technical solution of the present invention, or modify it into an equivalent embodiment of equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solution of the present invention should fall within the scope of protection of the technical solution of the present invention.

Claims

1. A boat-bar mechanism, characterized in that: The invention comprises a boat rod (1), a sealing seat (2), a rotating component (3) for driving the boat rod (1) to rotate, and a lifting component (4) for driving the boat rod (1) to lift and lower. One end of the boat rod (1) is inserted into the sealing seat (2), and a first sealing member (21) is provided between the two. The sealing seat (2) is provided with an air outlet joint (22), and the air outlet joint (22) is connected to a pressure detection component. The sealing seat (2) is provided with an air inlet joint (23). During the process, the air inlet joint (23) maintains an inert gas supply. In case of leakage, the inert gas enters the process chamber (6); the first sealing member (21) is provided with a plurality of members and is arranged at intervals along the axial direction of the boat rod (1); the first sealing member (21) is provided with a first compression sleeve (24); the sealing seat (2) is provided with a compression nut (25) for compressing the first compression sleeve (24); the boat rod (1) is inserted into the compression nut (25); the outer wall of the first compression sleeve (24) is provided with a groove corresponding to the air outlet joint (22) or the air inlet joint (23).

2. The boat-rod mechanism according to claim 1, characterized in that: The air outlet connector (22) is also connected to an air pump.

3. The boat-rod mechanism according to any one of claims 1 or 2, characterized in that: The other end of the boat rod (1) is inserted into a mounting seat (5), and a first rolling bearing (51) is provided between the mounting seat (5) and the boat rod (1).

4. The boat-rod mechanism according to claim 3, characterized in that: It also comprises a connecting sleeve (11), the connecting sleeve (11) being fixed to the boat pole (1) via a first fastener (12), the first rolling bearing (51) being arranged between the connecting sleeve (11) and the mounting seat (5), and the rotating component (3) being sleeved on the boat pole (1) and fixedly connected to the connecting sleeve (11) via a second fastener (31).

5. The boat-rod mechanism according to claim 4, characterized in that: A second seal (13) is provided between the first fastener (12) and the connecting sleeve (11), a third seal (14) is provided between the connecting sleeve (11) and the boat rod (1), a fourth seal (15) is provided between the rotating component (3) and the boat rod (1), and the third seal (14) and the fourth seal (15) are provided with a second compression sleeve (16).

6. The boat-rod mechanism according to claim 4, characterized in that: The rotating component (3) is a synchronous pulley.

7. The boat-rod mechanism according to any one of claims 1 or 2, characterized in that: The lifting component (4) is sleeved on the boat rod (1) with a second rolling bearing (41) provided therebetween, thrust bearings (42) are provided on both sides of the second rolling bearing (41), and a fixing ring (17) for fixing the thrust bearing (42) is provided on the boat rod (1).

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