Substrate processing apparatus and conveyance schedule creation method

Abstract

The present disclosure relates to a substrate processing apparatus and a conveyance schedule creation method. The substrate processing apparatus includes a plurality of processing sections and a conveyance mechanism, a plurality of conveyance objects are conveyed into the substrate processing apparatus in a predetermined conveyance order, and the substrate processing apparatus further includes a control section that acquires a process task for conveying a conveyance object to at least one of the processing sections by the conveyance mechanism and processing the conveyance object. In a case where one conveyance object and a previously conveyed conveyance object, which is previously conveyed into the substrate processing apparatus before the one conveyance object, have different process tasks and the process tasks of the one conveyance object and the previously conveyed conveyance object include the same kind of processing, the control section determines whether or not the one conveyance object can be subjected to the same kind of processing in advance before the same kind of processing for the previously conveyed conveyance object is completed.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to a substrate processing apparatus and a conveyance schedule making method. BACKGROUND

[0002] In the patent document 1, in a case where the calculated minimum waiting cycle is less than a standard waiting cycle corresponding to the number of times of the cycle conveyance required for performing the prescribed processing process on the first-put-in substrate, the initial cycle conveyance of the convey robot on the after-put-in substrate is delayed after the cycle conveyance of the first-put-in substrate in a range of the minimum waiting cycle or more and less than the standard waiting cycle.

[0003] PRIOR ART DOCUMENTS

[0004] PATENT DOCUMENT

[0005] Patent document 1: Japanese Patent Application Publication No. H8-153765 SUMMARY

[0006] PROBLEMS TO BE SOLVED BY THE INVENTION

[0007] The technology related to the present disclosure further improves the throughput in a substrate processing apparatus that processes substrates.

[0008] SOLUTION TO PROBLEM

[0009] One embodiment of the present disclosure is a substrate processing apparatus that processes substrates, including: a plurality of processing sections each performing a prescribed processing; and a conveyance mechanism that conveys conveyance objects, the plurality of conveyance objects being carried into the substrate processing apparatus in a predetermined carry-in order, the substrate processing apparatus further including a control section that acquires a process task for carrying a conveyance object by the conveyance mechanism to at least one of the processing sections and processing the conveyance object, wherein, in a case where one conveyance object is different from a process task of a first-carry-in conveyance object that is first carried into the substrate processing apparatus before the one conveyance object and the process tasks of the one conveyance object and the first-carry-in conveyance object include the same processing, the control section determines whether or not the one conveyance object can be processed by the same processing in advance before the same processing on the first-carry-in conveyance object is completed.

[0010] EFFECT OF THE INVENTION

[0011] According to the present disclosure, the throughput in a substrate processing apparatus that processes substrates can be further improved. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1is a diagram showing an outline of an internal structure of a substrate processing apparatus according to the present embodiment.

[0013] Figure 2 is a front view showing an outline of an internal structure of a substrate processing apparatus according to the present embodiment.

[0014] Figure 3 is a rear view showing an outline of an internal structure of a substrate processing apparatus according to the present embodiment.

[0015] Figure 4 is a flowchart showing a flow of one example of a production process of a conveyance schedule.

[0016] Figure 5 is a diagram showing one example of a conveyance schedule.

[0017] Figure 6 is a flowchart showing a flow of another example of a production process of a conveyance schedule.

[0018] Figure 7 is a diagram showing another example of a conveyance schedule.

[0019] Figure 8 is a flowchart showing a flow of another example of a production process of a conveyance schedule.

[0020] Figure 9 is a diagram showing another example of a conveyance schedule.

[0021] BRIEF DESCRIPTION OF DRAWINGS

[0022] 1: substrate processing apparatus; 4b: acquisition section; 4c: production section; 21: substrate conveyance unit; 30: liquid processing unit; 31: liquid processing unit; 40: heat processing unit; 41: heat processing unit; 42: heat processing unit; 43: heat processing unit; 44: heat processing unit; 60: substrate conveyance unit; G: substrate; Gl: first block; Gl: block; PJl: process task; PJ2: process task; PJ3: process task; PJ4: process task; SBU: buffer unit. DETAILED DESCRIPTION

[0023] For example, in a manufacturing process of a semiconductor device, a photolithography process is performed on a semiconductor wafer (hereinafter referred to as "wafer") to form a prescribed resist pattern on the wafer. In the photolithography process, an exposure process of the wafer is performed using a mask on which a prescribed pattern is formed.

[0024] Photolithography is also performed when forming a predetermined pattern on the substrate used as a mask. Specifically, first, a resist coating process is performed sequentially, involving coating a resist solution onto the substrate to form a resist film; an exposure process is performed, exposing the resist film to the predetermined pattern; a heat treatment is performed, heating the exposed resist film; and a development process is performed, developing the exposed and heated resist film, to form the predetermined resist pattern on the substrate. Then, the resist pattern is used as a mask to etch the substrate, and the resist film is removed, to form the predetermined pattern on the substrate.

[0025] The photolithography process described above includes various processes performed in different processing units, for example, multiple processing units are mounted on a substrate processing apparatus. The substrate transport schedule within the substrate processing apparatus is determined, for example, according to the order in which the substrates are transported into the substrate processing apparatus.

[0026] Furthermore, depending on the method for determining the transport schedule, sometimes the processing units are not used for extended periods, resulting in low throughput. For example, when the processing required for substrates is different between substrates that are continuously transported into a substrate processing apparatus, the method for determining the transport schedule sometimes results in the processing units not being used for extended periods, thus preventing high throughput. Therefore, various methods for determining the transport schedule have been proposed in the past.

[0027] The technology disclosed herein further improves the throughput of substrate processing apparatus for processing substrates.

[0028] The substrate processing apparatus and transport schedule determination method according to this embodiment will now be described with reference to the accompanying drawings. Furthermore, in this specification, elements having substantially the same functional structure are labeled with the same reference numerals, thereby omitting repeated descriptions.

[0029] <Substrate Processing Apparatus>

[0030] Figure 1 This is an explanatory diagram showing a general outline of the internal structure of the substrate processing apparatus 1 according to this embodiment. Figure 2 and Figure 3 These are a front view and a rear view, respectively, showing an outline of the internal structure of the substrate processing apparatus 1. The following describes the processing of the substrate G, which serves as a mask for the substrate. The substrate G is, for example, made of glass.

[0031] like Figure 1As shown, the substrate processing apparatus 1 includes, for example, a cartridge station 2 for transferring cartridges C to and from the outside, and a processing station 3 equipped with multiple processing units for performing specified processes such as developing and PEB (Post Exposure Bake) processing. Furthermore, the substrate processing apparatus 1 has a structure that connects the cartridge station 2 and the processing station 3 into one unit. Additionally, the substrate processing apparatus 1 includes a control unit 4 for controlling the substrate processing apparatus 1.

[0032] Box station 2 is, for example, divided into a box loading / unloading section 10 and a substrate transport section 11. For example, the box loading / unloading section 10 is provided in the negative X direction of the substrate processing apparatus 1. Figure 1 The end on the left side.

[0033] A box loading platform 12 is provided in the box loading and unloading section 10. The positive Y direction of the box loading platform 12 ( Figure 1 The upper side is configured to accommodate multiple, for example, two boxes C. It can be positioned along the Y-direction (horizontal direction). Figure 1 The boxes C are arranged in a row (vertical direction). Box C is a transportable container capable of holding substrate G and configured to be transported by a box transport device (not shown) such as an OHT (Overhead Hoist Transfer) located outside the substrate processing apparatus 1. In this embodiment, only one substrate G is held in each box C. Furthermore, in this embodiment, the box C, empty after substrate G has been removed from the box stage 12 by the aforementioned box transport device (described later by the substrate transport unit 21), is removed from the box stage 12, and other boxes C containing substrate G are placed on the box stage 12 by the aforementioned box transport device. The aforementioned box transport device returns the empty box C to the box stage 12 at a predetermined time, and the substrate G, after being removed from the box C and processed by the substrate processing apparatus 1, is stored in the empty box C by the substrate transport unit 21. Furthermore, the box C containing the substrate G before it is processed by the substrate processing apparatus 1 is sometimes referred to as box C-IN, and the box C containing the substrate G after it is processed by the substrate processing apparatus is referred to as box C-OUT.

[0034] Additionally, in the negative Y direction of the cartridge stage 12 ( Figure 1A buffer unit SBU, serving as a waiting section, is provided inside the substrate G on the lower side. The buffer unit SBU is used to temporarily house the substrate G. This buffer unit SBU is a part that allows the substrate G to wait at any time during the period from the start of transport to the end of transport. Specifically, the buffer unit SBU is a part that allows the substrate G to wait at any time during the period from being moved into the cassette C-IN to being moved out into the cassette C-OUT. Furthermore, below, the buffer unit SBU that serves as the loading-side waiting section for the substrate G before it is processed by the substrate processing apparatus 1 is sometimes referred to as buffer unit SBU-IN, and the buffer unit SBU that serves as the unloading-side waiting section for the substrate G after it is processed by the substrate processing apparatus 1 is sometimes referred to as buffer section SBU-OUT.

[0035] like Figure 1 As shown, a substrate transport unit 21, which is movable along a transport path 20 extending in the Y direction, is provided in the substrate transport section 11. The substrate transport unit 21 is also movable in the vertical direction and about the vertical axis (θ direction). The substrate transport unit 21 can transport the substrate G between the cassette C on the cassette stage 12 and the transfer unit TRS of the third G3 (described later in the processing station 3), between the cassette C on the cassette stage 12 and the buffer unit SBU on the cassette stage 12, and between the buffer unit SBU on the cassette stage 12 and the transfer unit TRS of the third G3.

[0036] Processing station 3 has multiple blocks with various units, such as blocks G1, G2, and G3 (the first to third blocks). For example, on the front side of processing station 3 ( Figure 1 The first G1 is installed on the negative Y-direction side. Additionally, on the side of processing station 3 opposite to that of box station 2 (… Figure 1 A second G2 is installed on the positive X-direction side of processing station 3, on the box station 2 side ( Figure 2 A third G3 is set on the negative X-direction side.

[0037] In the first G1, for example Figure 3 As shown, two liquid treatment units 30 and 31 are arranged in a stacked manner to perform spin coating on a substrate G. Liquid treatment unit 30 is a liquid treatment unit for development, and liquid treatment unit 31 is a liquid treatment unit for rinsing. Rinsing is a process of cleaning the surface of the substrate G using the treatment solution used in the development process. Alternatively, liquid treatment units 30 and 31 can be used for both development and rinsing. For example, two liquid treatment units 30 can be arranged in a vertical direction. Furthermore, the number and arrangement of liquid treatment units can be arbitrarily selected.

[0038] In the liquid processing unit 30, for example, the substrate G is subjected to a spin coating process using a prescribed processing liquid. In the spin coating process, for example, the processing liquid is sprayed from a spray nozzle (not shown) toward the substrate G, and the substrate G is rotated to spread the processing liquid over the surface of the substrate G.

[0039] In the second block G2, for example Figure 1 As shown, five heat processing units 40 to 44 that perform heat processing such as heating and cooling of the substrate G are provided. The number and arrangement of the heat processing units can also be arbitrarily selected.

[0040] The heat processing units 40 to 44 have, for example, a cooling plate 45 and a heating plate 46. When the substrate G is subjected to heat processing by the heat processing units 40 to 44, for example, the substrate G is first placed on the cooling plate 45, and then placed on the heating plate 46. The transfer of the substrate G between the cooling plate 45 and the heating plate 46 can be performed by a transfer mechanism (not shown) built into the heat processing units 40 to 44, or by the substrate transfer unit 60 described below. In the following, the transfer of the substrate G between the cooling plate 45 and the heating plate 46 is assumed to be performed by the transfer mechanism (not shown) in the heat processing units 40 to 44, and the time required for the transfer by the transfer mechanism is assumed to be included in the heat processing time of the heat processing units 40.

[0041] In the third block G3, a plurality of, for example, two transfer units TRS are provided. In the following, the transfer unit TRS for housing the substrate G before processing by the substrate processing apparatus 1 is sometimes referred to as the transfer unit TRS-IN, and the transfer unit TRS for housing the substrate G after processing by the substrate processing apparatus 1 is sometimes referred to as the transfer unit TRS-OUT.

[0042] In addition, in the third block G3, a jig storage unit 50 for storing a jig for cleaning is provided.

[0043] As shown in FIG. 1, a substrate transfer unit 60 as a transfer mechanism is arranged in the center of the processing station 3. Figure 4

[0044] The substrate transfer unit 60 has, for example, a transfer arm 61 that is movable in the X direction, the Y direction, the θ direction, and the vertical direction. The substrate transfer unit 60 is movable within the processing station 3, and can transfer the substrate G to prescribed units within the first block G1, the second block G2, and the third block G3 around the processing station 3. The number of the substrate transfer units 60 arranged in the processing station 3 can be one or a plurality.

[0045] ​The control section 4 described above is, for example, a computer provided with a CPU, a memory, and the like, and has a program storage section (not shown). In the program storage section, a program for controlling the operation of a drive system that controls the various processing units, the conveyance units, and the like described above to control the processing of the substrate G by the substrate processing apparatus 1 is stored. In addition, in the program storage section, a program for the conveyance schedule creation processing described later is also stored. Furthermore, the program described above can be recorded in a storage medium that can be read by a computer, and the program can be installed in the control section 4 from the storage medium. Part or all of the program can also be implemented by a dedicated hardware (circuit board).

[0046] The control section 4 has a storage section 4a, an acquisition section 4b, and a creation section 4c.

[0047] The storage section 4a is used to store various information, such as data for creating a conveyance schedule of the substrate G, and the like. Furthermore, the conveyance schedule contains information of the conveyance destinations of each substrate G and information of the conveyance order of each substrate G, that is, information of the conveyance path of each substrate G, and also contains information of the timing of conveyance to each conveyance destination, that is, information of the conveyance time. In addition, the data for creating the conveyance schedule described above is, for example, a conveyance process and a processing process.

[0048] In the conveyance process, information for setting a conveyance path until the substrate G that has been carried out from the cassette C-IN is carried into the cassette C-OUT after being processed in the substrate processing apparatus 1 is set. Each conveyance process includes one or a plurality of conveyance steps (stages) that are executed sequentially, and one or a plurality of conveyance destination candidates are set for each conveyance step.

[0049] In the processing process, information related to the contents of the processing by each processing unit is set. For example, in the case of the liquid processing unit 30, information related to the rotation speed of the substrate G, the supply time of the processing liquid, and the like is set in the processing process, and in the case of the heat processing unit 40, information related to the temperature set value, the temperature adjustment time, and the like is set in the processing process. The processing process can be selected from a plurality of processing processes in accordance with the process task described later that is set for the substrate G.

[0050] The acquisition section 4b acquires a process task. The process task is used to convey the substrate G to at least one processing unit by the substrate conveyance units 21 and 60 and to process the substrate G. Specifically, the process task is used to decide the processing of the substrate G using the processing units for each substrate group. In the present embodiment, the process task is set in advance for each cassette C, that is, for each substrate G1 (since, as described above, one substrate G is housed in each cassette C in the present embodiment). In addition, the process task contains identification information of the process task, identification information of the substrate G for which each process task is set, and information that determines the processing process that is implemented for each substrate G.

[0051] The process task is stored in, for example, a host computer (not shown) that manages devices in a factory in which the substrate processing apparatus 1 is installed, and the acquisition unit 4b acquires the process task from the host computer via a communication unit (not shown).

[0052] In the present embodiment, the order in which the substrates G are carried into the substrate processing apparatus 1 from the cassettes C-IN that are the start positions of the carrying of the substrates G is determined in advance. The production unit 4c determines the carrying schedule of the substrates G in the above order for each substrate G. Further, the order in which the substrates G are carried into the substrate processing apparatus 1 from the cassettes C-IN is the order in which the cassettes C-IN that house the substrates G are placed on the cassette placement table 12.

[0053] Specifically, the production unit 4c selects a processing procedure to be performed for the substrate G that is the object of schedule production (hereinafter sometimes omitted as "substrate G that is the object of production") based on information set in the process task, and selects a processing unit that can perform processing set in the processing procedure. The production unit 4c selects a carrying procedure that includes the selected processing unit and includes the transfer units TRS, the buffer units SBU, and the like through which the substrate G passes before being carried into each processing unit, and determines the carrying path of the substrate G that is the object of schedule production based on the carrying procedure 72. Then, the production unit 4c produces the carrying schedule of the substrate G that is the object of schedule production based on the determined carrying path.

[0054] The carrying schedule produced by the production unit 4c is stored in the storage unit 4a.

[0055] A more specific method of schedule production performed by the production unit 4c will be described later.

[0056] Next, an example of the operation of the substrate processing apparatus 1 configured as described above will be described.

[0057] When the cassette C-IN is carried into the cassette placement table 12 by a cassette carrying device (not shown), the acquisition unit 4b acquires the process task for one substrate G housed in the cassette C-IN from the host computer (not shown). Then, the production unit 4c produces the carrying schedule for one substrate G housed in the cassette based on the process task acquired by the acquisition unit 4b.

[0058] Then, based on the produced carrying schedule, the control unit 4 controls the substrate carrying units 21, 60, and the like to carry the substrate G while performing processing based on the process task for the substrate G. For example, first, the substrate carrying unit 21 carries the substrate G into the substrate processing apparatus 1 from the cassette C-IN. Further, when the substrate G is removed from the cassette C-IN, the cassette C-IN is removed from the cassette placement table 12 by a cassette carrying device (not shown).

[0059] Next, the substrate conveyance unit 21 conveys the substrate G to the transfer unit TRS-IN directly or via the buffer unit SBU-IN. Next, the substrate conveyance unit 60 conveys the substrate G to the processing unit selected based on the process task in accordance with the conveyance schedule. When the processing units selected based on the process task have all completed processing, the substrate conveyance unit 60 conveys the substrate G from the processing unit that performed the last processing to the transfer unit TRS-OUT. Then, the substrate conveyance unit 21 conveys the substrate G from the transfer unit TRS-OUT to the cassette C-OUT that is the conveyance end position directly or via the buffer unit SBU-OUT. Further, the cassette C-OUT is to be placed on the cassette placement table 12 when the corresponding substrate G is conveyed to the transfer unit TRS-OUT or the buffer unit SBU-OUT.

[0060] Example 1 of conveyance schedule creation processing

[0061] Next, an example of the conveyance schedule creation processing will be described.

[0062] In the present embodiment, as described above, the process task is set in advance for each substrate G1. Therefore, the substrate G that is the schedule creation target of the creation unit 4c differs from the process task (the identification information thereof) of the substrate G that was conveyed in first (hereinafter, sometimes referred to as "incomplete substrate G") that has not completed processing based on the process task at the point in time when the substrate G that is the schedule creation target is conveyed in. Further, the point in time when the substrate G that is the schedule creation target is conveyed in is specifically, for example, the point in time when the cassette C that houses the substrate G that is the schedule creation target is conveyed into the substrate processing apparatus 1.

[0063] In addition, there is a case where the process task of the substrate G that is the schedule creation target differs from the process task of the incomplete substrate G, but the latter process task includes processing of the same kind as the processing performed by the processing unit included in the former process task.

[0064] In the case where, as described above, the process tasks differ from each other but both include processing of the same kind, the creation unit 4c makes the following determination when creating the conveyance schedule of the substrate G that is the schedule creation target. That is, the creation unit 4c determines whether or not the processing of the same kind can be performed in advance on the substrate G that is the schedule creation target before the above-described processing of the same kind on the incomplete substrate G is completed (hereinafter, sometimes referred to as "the processing of the same kind in advance"). At this time, the conveyance schedule of the incomplete substrate G that was created first is not changed. Then, the creation unit 4c creates the conveyance schedule of the substrate G that is the schedule creation target based on the determination result of whether or not the processing of the same kind in advance can be performed. When creating this, the time to wait at the buffer unit SBU-IN and the like included in the conveyance schedule is set based on the determination result.

[0065] The production section 4c determines whether or not the same processing can be performed in advance, for example, based on whether or not the processing units that perform the processing based on the process tasks between the unfinished substrate G and the substrate G that is the object of the schedule production repeat. Also, in the case where the processing units do not repeat, the production section 4c determines that the same processing can be performed in advance.

[0066] Figure 5 is a flowchart showing an example of the flow of the production processing of the conveyance schedule by the production section 4c. Figure 5 is a diagram showing an example of the conveyance schedule produced by the production processing of this example. Also, in the following, it is assumed that the same processing is included in the process tasks of the substrate G that is the object of the schedule production and the process tasks of the unfinished substrate G.

[0067] The production section 4c, when producing the conveyance schedule of the substrate G that is the object of the schedule production, first determines whether or not the basic conditions are satisfied (step S1). Specifically, based on the information of the process tasks acquired by the acquisition section 4b, the conveyance path of the substrate G that is the object of the schedule production including the processing units used for the processing with respect to the substrate G that is the object of the schedule production is decided. Also, the production section 4c acquires the conveyance schedule of the unfinished substrate G. Then, the production section 4c determines whether or not all of the following basic conditions (A1) to (A4), for example, are satisfied based on the conveyance path of the substrate G that is the object of the schedule production and the process tasks, the conveyance schedule of the unfinished substrate G, and the like.

[0068] (A1) There is no substrate G in the processing station 3 that exceeds the remaining number of storage of the buffer unit SBU.

[0069] (A2) The process tasks of the substrate G that is the object of the schedule production and the unfinished substrate G are different.

[0070] (A3) The conveyance process in which only one conveyance destination candidate is set for each of the conveyance processes (steps) in the conveyance path decided for the substrate G that is the object of the schedule production is used.

[0071] (A4) The buffer unit SBU-IN and the buffer unit SBU-OUT are included in the conveyance path decided for the substrate G that is the object of the schedule production.

[0072] The above (A1) is a condition for preventing the substrate G from being left in the processing station 3 when the same processing is performed in advance.

[0073] The above (A3) is a condition for limiting the opportunity of the determination of whether or not the same processing can be performed in advance.

[0074] The condition in the above (A4) relating to the buffer unit SBU-IN is a condition for a substrate G for which conveyance to the processing station 3 needs to be reserved until processing for a previously-processed substrate G ends. Also, the condition for the buffer unit SBU-OUT is a condition for a substrate G for which conveyance to the cassette C-OUT needs to be reserved until the corresponding cassette C-OUT is placed on the cassette placement table 12.

[0075] Further, instead of the condition of the above (A3), the following conveyance process can be used as a condition for the above conveyance path. That is, a conveyance process in which, in a case where only conveyance processes relating to the same kind of processing that is included in the process tasks of both the substrate G that is the object of production and the unfinished substrate G are extracted, conveyance processes for which only one conveyance-destination candidate is set are used for the extracted conveyance processes, respectively, is used.

[0076] In a case where the above basic condition is satisfied (a case where "Yes" in step S1), the production section 4c determines whether or not the same kind of processing can be performed in advance based on whether or not the processing units that perform processing based on the process tasks between the substrate G that is the object of production and the unfinished substrate G overlap (step S2). This determination is performed based on the conveyance path of the substrate G that is the object of production decided by the production section 4c and the conveyance schedule of the unfinished substrate G acquired by the production section 4c, and the like.

[0077] In a case where the processing units do not overlap and it is determined that the same kind of processing can be performed in advance for the substrate G that is the object of production (a case where "No" in step S2), the production section 4c produces a conveyance schedule for the substrate G that is the object of production in a manner in which the same kind of processing is performed in advance (step S3). For example, the production section 4c produces a conveyance schedule for the substrate G that is the object of production in a manner in which the substrate G is conveyed along the decided conveyance path to the processing units that perform processing based on the process tasks in the shortest time, by setting the time for which the substrate G waits at the buffer unit SBU-IN, and the like.

[0078] On the other hand, in the case where the processing unit repeats and it is determined that the same processing cannot be performed for the substrate G as the object of schedule creation in step S2 ("Yes"), the creation unit 4c determines the conveyance schedule for the substrate G as the object of schedule creation in the same manner as in the past (step S4). For example, the creation unit 4c creates the conveyance schedule by setting the time for waiting in the buffer unit SBU-IN and the like for the substrate G as the object of schedule creation as follows. That is, the creation unit 4c sets the time for waiting in the buffer unit SBU-IN in such a manner that the substrate G as the object of schedule creation is not conveyed to the processing unit that repeats between the substrate G as the object of schedule creation and the unfinished substrate G until the processing of the unfinished substrate G by the processing unit is completed and the unfinished substrate G is carried out from the processing unit.

[0079] In addition, in the case where the above basic condition is not satisfied ("No") in step S1, the creation unit 4c creates the conveyance schedule for the substrate G as the object of schedule creation in the same manner as in the past (step S4) as in step S2.

[0080] Here, as shown in FIG. 6, it is assumed that the substrate G of the process job PJ1, the substrate G of the process job PJ2, and the substrate G of the process job PJ3 are sequentially carried in from the cassette C-IN to the substrate processing apparatus 1. In addition, it is assumed that the conveyance schedule has been created for the substrate G of the process job PJ1. Figure 6

[0081] The conveyance route of the substrate G of the process job PJ1 is the cassette C-IN → the buffer unit SBU-IN → the transfer unit TRS-IN → the liquid processing unit 31 for the rinsing process → the heat treatment unit 40 → the liquid processing unit 30 for the development process → the transfer unit TRS-OUT → the buffer unit SBU-OUT → the cassette C-OUT.

[0082] The conveyance route of the substrate G of the process job PJ2 is the cassette C-IN → the buffer unit SBU-IN → the transfer unit TRS-IN → the liquid processing unit 30 for the development process → the transfer unit TRS-OUT → the buffer unit SBU-OUT → the cassette C-OUT.

[0083] The conveyance route of the substrate G of the process job PJ3 is the cassette C-IN → the buffer unit SBU-IN → the transfer unit TRS-IN → the heat treatment unit 41 → the transfer unit TRS-OUT → the buffer unit SBU-OUT → the cassette C-OUT.

[0084] ​The liquid processing unit 30 for development processing is repeated between the substrate G of the process task PJ2 and the unfinished substrate G of the process task PJl, so the case where "Yes" in Step S2 is satisfied. Thus, the production section 4c produces the conveyance schedule of the substrate G of the process task PJ2 as with the past. Therefore, in the conveyance schedule of the substrate G of the process task PJ2, the waiting time in the buffer unit SBU-IN is set longer so that the development processing by the liquid processing unit 30 in the process task PJ2 is started after the development processing by the liquid processing unit 30 in the process task PJl is finished.

[0085] On the other hand, the process task PJ3 has no repeated processing unit between the substrate G and the unfinished substrate G of the process task PJl and the unfinished substrate G of the process task PJ2, so the case where "No" in Step S2 is satisfied. Thus, the production section 4c produces the conveyance schedule of the substrate G of the process task PJ3 in such a manner that the same processing (in this case, heat treatment) is performed in advance, specifically, the conveyance schedule is produced so that the waiting time in the buffer unit SBU-IN is the shortest.

[0086] As described above, in the present embodiment, in the case where the process task of the substrate G as the schedule production target is different from the unfinished substrate G and the process tasks of the substrates include the same processing, the production section 4c determines whether the same processing can be performed in advance when producing the conveyance schedule. Thus, in the substrate processing apparatus 1, the conveyance schedule is produced based on whether the same processing can be performed in advance, so the time from when each substrate G is carried into the substrate processing apparatus 1 to when each substrate G is carried out of the substrate processing apparatus 1 (including the processing time of each processing unit) can be shortened. In other words, the conveyance schedule can be produced so that the time from when the substrate G as the schedule production target is carried into the substrate processing apparatus 1 to when the substrate G as the schedule production target is carried out of the substrate processing apparatus 1 is short, with respect to the substrate G as the schedule production target whose process task is different from the unfinished substrate G. As a result, the throughput can be further improved.

[0087] <Example 2 of the production processing of the conveyance schedule>

[0088] In the present example, with respect to the substrate G as the production target, in the case where the processing unit in which processing is performed is single and repeated with the processing unit of the unfinished substrate G, the production section 4c determines whether the predetermined time until the substrate G as the schedule production target is carried out of the repeated processing unit is shorter than the predetermined time until the unfinished substrate G reaches the processing unit. Also, in the case where the predetermined time until the carrying out is short, the production section 4c determines that the same processing can be performed in advance, and produces the conveyance schedule of the substrate G as the schedule production target based on the determination result.

[0089] Figure 7 is a flowchart showing the flow of the production process of the conveyance schedule of this example. Figure 7 is a view showing an example of the conveyance schedule produced by the production process of this example. Further, the following assumes that the process tasks of the substrate G as the schedule production target and the process tasks of the unfinished substrate G include the same kind of process.

[0090] In the case where the aforementioned basic conditions are satisfied (the case where "Yes" in step S1), the production section 4c determines whether the process units that perform the process on the substrate G as the schedule production target are single and repeated with the process units of the unfinished substrate G (step S11). This determination is made on the basis of the conveyance path of the substrate G as the schedule production target decided by the production section 4c and the conveyance schedule of the unfinished substrate G acquired by the production section 4c, and the like.

[0091] In the case where at least either one of the condition of being single and the condition of being repeated is not satisfied, and thus it is determined that the same kind of process cannot be performed in advance on the substrate G as the schedule production target (the case where "No" in step S11), the production section 4c decides the conveyance schedule for the substrate G as the schedule production target in the same manner as in the past.

[0092] On the other hand, in the case where both the condition of being single and the condition of being repeated are satisfied (the case where "Yes" in step S11), the production section 4c determines whether the predetermined time T2 until the substrate G as the schedule production target is conveyed out of the repeated process unit is shorter than the predetermined time Tl until the unfinished substrate G reaches the process unit (step S12). The production section 4c calculates the aforementioned predetermined time Tl until the reaching on the basis of the conveyance schedule of the unfinished substrate G. In addition, the production section 4c calculates the aforementioned predetermined time T2 until the conveying out on the basis of the shortest time T21 required for the substrate G to reach the process unit from the cassette C-IN and the process time T22 of the process unit, for example, according to the following equation.

[0093] T2 = T21 + T22

[0094] In the information of the aforementioned shortest time T21 required for the calculation of the aforementioned predetermined time T2 until the conveying out and the information of the process time T22 of the process unit, the former information is stored in the storage section 4a, for example, in advance, and the latter information is expressed as a process recipe determined by the process task.

[0095] Further, the production section 4c can calculate the predetermined time T2 with consideration of a margin T23 for the aforementioned predetermined time T2 until the conveying out according to the following equation.

[0096] T2 = T21 + T22 + T23

[0097] For example, a margin T23 is set to account for delays caused by transporting other substrates G.

[0098] In the case where the predetermined time T2 until the board is moved out is longer than the predetermined time T1 until the board arrives, and thus it is determined that the same treatment cannot be performed on the substrate G which is the target of the timetable production (the case where "No" is set in step S12), the manufacturing unit 4c determines the transport timetable for the substrate G which is the target of the timetable production in the same way as before.

[0099] On the other hand, if the predetermined time T2 until the time of delivery is shorter than the predetermined time T1 until the time of arrival, and it is determined that the same processing can be performed on the substrate G which is the target of the timetable production (the case is "yes" in step S12), the production unit 4c produces a delivery timetable for the substrate G which is the target of the timetable production in a manner that performs the same processing in advance.

[0100] Here, as Figure 8 As shown, substrate G of process task PJ1 and substrate G of process task PJ2 are sequentially moved from box C-IN into substrate processing apparatus 1. Furthermore, it is assumed that a transport schedule has been created for substrate G of process task PJ1.

[0101] Regarding the substrate G of process task PJ2, the only processing unit for processing substrate G is the liquid treatment unit 30 for developing the substrate; that is, there is only one processing unit for processing substrate G. Furthermore, the processing unit for processing substrate G is the same as the processing unit for the unfinished substrate G of process task PJ1, thus meeting the "Yes" condition in step S11. Additionally, the predetermined time T2 until the substrate G of process task PJ2 is removed from the liquid treatment unit 30 for developing the substrate is shorter than the predetermined time T1 until the unfinished substrate G of process task PJ1 arrives at the liquid treatment unit 30 for developing the substrate. Therefore, the substrate G of process task PJ2 meets the "Yes" condition in step S12.

[0102] Therefore, the manufacturing department 4c creates a transport schedule in a way that allows for the same processing of the substrate G for process task PJ2 (preliminary implementation of development processing), specifically, it creates a transport schedule with the shortest waiting time in the buffer unit SBU-IN.

[0103] As described above, the condition for determining whether or not the preceding execution of the same kind of processing is possible includes the condition that the processing units that perform the processing of the substrate G as the schedule creation target are single, and thus has the following effects. That is, in the case where the determination of the preceding execution of the same kind of processing is possible is made, the influence on the process of performing other processing does not need to be calculated, and thus has the effect that the transport schedule can be easily created.

[0104] Example 3 of the creation processing of the transport schedule

[0105] In the present example, in the case where a plurality of processing units that perform the processing based on the process task are repeated between the substrate G as the schedule creation target and the unfinished substrate G, the creation section 4c makes the following determination. That is, the creation section 4c determines, for each of the repeated processing units, whether or not the scheduled time until the substrate G as the schedule creation target is carried out from the processing unit is shorter than the scheduled time until the unfinished substrate G reaches the processing unit. Further, in the case where the scheduled time until the carrying out is shorter in each of the repeated processing units, the creation section 4c determines that the preceding execution of the same kind of processing is possible, and creates the transport schedule based on the determination result with respect to the substrate G as the schedule creation target.

[0106] Figure 9 is a flowchart showing the flow of the creation processing of the transport schedule of the present example. Figure 9 is a diagram showing an example of the transport schedule created by the creation processing of the present example. Further, it is assumed below that the process tasks of the substrate G as the schedule creation target and the process tasks of the unfinished substrate G include the same kind of processing.

[0107] In the case where the aforementioned basic condition is satisfied in step Sl (the case where "Yes" in step Sl), the creation section 4c determines whether or not a plurality of processing units that perform the processing based on the process task are repeated between the substrate G as the schedule creation target and the unfinished substrate G (step S21). This determination is made based on the transport path of the substrate G as the schedule creation target decided by the creation section 4c and the transport schedule of the unfinished substrate G acquired by the creation section 4c, and the like.

[0108] In the case where no processing units are repeated, and thus it is determined that the preceding execution of the same kind of processing is not possible with respect to the substrate G as the schedule creation target (the case where "No" in step S21), the creation section 4c determines the transport schedule with respect to the substrate G as the schedule creation target in the same manner as before.

[0109] On the other hand, in the case where there are multiple repeated processing units (the case where "Yes" in step S21), the production section 4c determines whether the predetermined time T2 until the substrate G that is the object of production of the schedule is carried out from the processing unit is shorter than the predetermined time Tl until the unfinished substrate G reaches the processing unit (step S22) among the multiple repeated processing units.

[0110] In the case where the above-described predetermined time T2 until the carrying out is longer than the above-described predetermined time Tl until the reaching only in one of the repeated processing units, and thus it is determined that the same processing cannot be performed in advance for the substrate G that is the object of production of the schedule (the case where "No" in step S12), the production section 4c determines the carrying schedule for the substrate G that is the object of production of the schedule in the same manner as in the past.

[0111] On the other hand, in the case where the above-described predetermined time T2 until the carrying out is shorter than the above-described predetermined time Tl until the reaching in all of the repeated processing units, and thus it is determined that the same processing can be performed in advance for the substrate G that is the object of production of the schedule (the case where "Yes" in step S12), the production section 4c produces the carrying schedule for the substrate G that is the object of production of the schedule in such a manner that the same processing is performed in advance.

[0112] Here, as shown in FIG. 6, it is assumed that the substrate G of the process job PJl and the substrate G of the process job PJ4 are sequentially carried into the substrate processing apparatus 1 from the cassette C-IN. In addition, it is assumed that the carrying schedule has been produced for the substrate G of the process job PJl. ​

[0113] The carrying path of the substrate G of the process job PJ4 is the cassette C-IN → the buffer unit SBU-IN → the transfer unit TRS-IN → the heat treatment unit 40 → the liquid processing unit 30 for development processing → the transfer unit TRS-OUT → the buffer unit SBU-OUT → the cassette C-OUT.

[0114] The repeated processing units between the substrate G of the process job PJ4 and the unfinished substrate G of the process job PJl are the heat treatment unit 40 and the liquid processing unit 30 for development processing, that is, there are multiple repeated processing units, and thus the case where "Yes" in step S21 is satisfied. In addition, the predetermined time T2 until the substrate G of the process job PJ4 is carried out from the processing unit is shorter than the predetermined time Tl until the unfinished substrate G of the process job PJl reaches the processing unit in each of the processing units of the heat treatment unit 40 and the liquid processing unit 30 for development processing. Thus, the substrate G of the process job PJ4 satisfies the case where "Yes" in step S22.

[0115] ​Thus, the production unit 4c produces a conveyance schedule for the substrate G of the process task PJ2 in a manner that the same process is performed in advance, specifically, produces a conveyance schedule that makes the waiting time at the buffer unit SBU-IN the shortest.

[0116] Further, the operation of the production unit 4c in the production processes of Examples 2 and 3 of the conveyance schedule can be summarized and described as follows.

[0117] In Examples 2 and 3 described above, in a case where the processing units that perform the process based on the process task are repeated between the substrate G that is the object of the schedule production and the unfinished substrate G, the production unit 4c determines whether the predetermined time until the substrate G that is the object of the schedule production is carried out from each of the repeated processing units is shorter than the predetermined time until the unfinished substrate G reaches each of the processing units. Further, in Examples 2 and 3 described above, in a case where the predetermined time until the carrying out is shorter in each of the repeated processing units, the production unit 4c determines that the same process can be performed in advance, and produces a conveyance schedule based on the determination result for the substrate G that is the object of the schedule production.

[0118] Further, all of Examples 1 to 3 of the production process of the conveyance schedule can be combined, or a combination of any of Examples 1 to 3 described above can be combined.

[0119] When the conveyance schedule is decided, as in Examples 1 to 3 of the production process of the conveyance schedule, basically, the conveyance of the substrate G to the buffer unit SBU-IN and the buffer unit SBU-OUT is specified in the conveyance schedule. It can be configured that, although it is specified like this, the substrate carrying unit 21 performs the conveyance of the substrate G without passing through the buffer unit SBU-IN and the buffer unit SBU-OUT based on whether a predetermined condition is satisfied. The predetermined condition for the buffer unit SBU-IN is, for example, a determination that the same process can be performed in advance for the carried substrate G. The predetermined condition for the buffer unit SBU-OUT is, for example, that the cassette C-OUT corresponding to the carried substrate G is placed on the cassette placement table 12.

[0120] By performing the conveyance of the substrate G without passing through the buffer unit SBU like this, it is possible to omit the conveyance of the substrate G from the buffer unit SBU and the conveyance of the substrate to the buffer unit SBU, and thus the burden on the substrate carrying unit 21 is reduced. It is possible to use the substrate carrying unit 21 for the conveyance of the substrate that contributes to the high throughput in accordance with the amount of the burden reduction like this. Thus, by performing the conveyance of the substrate G without passing through the buffer unit SBU, it is possible to further improve the throughput of the substrate processing apparatus 1.

[0121] The above conveyance schedule creation process can also be applied to the creation of a conveyance schedule for a conveyance target other than a substrate, which is conveyed within the substrate processing apparatus 1 in the same manner as a substrate. The conveyance target other than a substrate is, for example, a cleaning jig that is conveyed to the liquid processing units 30, 31 to be used for cleaning of the liquid processing units. Further, the jig storage unit 50 corresponds to a conveyance start position and a waiting section for the cleaning jig.

[0122] In addition, there are cases where a plurality of substrates G in a state capable of being conveyed by the substrate conveyance unit 60 are present within the substrate processing apparatus 1 at the same time. In this case, the substrate conveyance unit 60 can be configured to preferentially convey a substrate that has not yet been processed by a processing unit. Further, the substrate conveyance unit 60 can be configured to most preferentially convey a substrate G housed in the transfer section TRS-IN. Thereby, the number of substrates G within the processing station 3 can be increased. The same can also be applied to the substrate conveyance unit 21, which can be configured to preferentially convey a substrate that has not yet been processed by a processing unit. Further, the substrate conveyance unit 21 can be configured to, for example, most preferentially convey a substrate G to the transfer section TRS-IN. Thereby, the time during which a processing unit is not used can be shortened.

[0123] Further, the conveyance schedule of a substrate G can be created in such a manner that the substrate G waits at the buffer unit SBU-IN during the period until the temperature of the hot plate 46 is set, in the case where the substrate G for which temperature change of the hot plate 46 is required is a schedule creation target during the heat treatment by the heat treatment units 40 to 44. Thereby, compared to the case where the substrate G waits in the cassette C during the period until the temperature of the hot plate 46 is set, the non-use time of the processing units within the substrate processing apparatus 1 can be shortened, and thus the throughput can be further improved.

[0124] In the above example, the determination of the possibility of the prior implementation of the same processing is performed on the substrate G that is a schedule creation target at the time of creation of the conveyance schedule. The determination of the possibility of the prior implementation of the same processing can also be performed between a later-conveyed substrate G and an earlier-conveyed substrate G after the conveyance schedule is created and before the later-conveyed substrate G is conveyed to a processing unit in accordance with the conveyance schedule. Further, the conveyance schedule of the later-conveyed substrate G can be corrected based on the result of the determination.

[0125] Further, in the case where the same processing unit is used between the later-conveyed substrate G and the earlier-conveyed substrate G, it is preferable to perform processing on the later-conveyed substrate G using the same processing unit immediately after the processing on the earlier-conveyed substrate G using the same processing unit is completed, without providing an extra period, in order to improve the throughput. In order to enable the above situation, the time during which the later-conveyed substrate G waits at the buffer unit SBU-IN is determined or corrected in the conveyance schedule of the later-conveyed substrate G.

[0126] In a case where the conveyance schedule of the post-conveyed substrate G is corrected based on the result of the determination of the possibility of the prior implementation of the same processing, the processing units can be repeated on the schedule between the post-conveyed substrate G and the pre-conveyed substrate G in processing other than the above-mentioned same processing. Thus, in a case where the conveyance schedule of the post-conveyed substrate G is corrected based on the result of the determination of the possibility of the prior implementation of the same processing, it can be configured to determine whether or not the correction of the waiting time or the like is further required, or it can be configured to set an appropriate waiting time.

[0127] The waiting time of the buffer unit SBU-IN is determined or corrected, for example, as follows.

[0128] First, the processing unit having the longest time from the timing of the conveyance of the post-conveyed substrate G to the timing of the conveyance of the immediately preceding pre-conveyed substrate G is determined on the assumption that no waiting time is set. Then, the above-mentioned waiting time is determined or corrected in a manner that the post-conveyed substrate G is conveyed to the processing unit immediately after the conveyance of the pre-conveyed substrate G from the determined processing unit.

[0129] In this example, the time of the post-conveyed substrate G waiting in the buffer unit SBU-IN is measured with reference to the timing of the conveyance of the post-conveyed substrate G to the buffer unit SBU-IN.

[0130] The time of the post-conveyed substrate G waiting in the buffer unit SBU-IN can also be measured with reference to the following timing. For example, for the processing unit between which the time can be repeated and in which the post-conveyed substrate G is initially conveyed, the time can be measured with reference to the timing of the conveyance of the immediately preceding pre-conveyed substrate to the processing unit. In this case, the time of the post-conveyed substrate G waiting in the buffer unit SBU-IN is determined or corrected in a manner that the post-conveyed substrate G is conveyed to the processing unit immediately after the conveyance of the above-mentioned immediately preceding pre-conveyed substrate from the processing unit in which the time can be repeated and in which the post-conveyed substrate G is initially conveyed. In addition, as another method, the operation state (not illustrated, the operation state of the device or the substrate within the unit, or the like) of the processing unit at the middle of the processing of the pre-conveyed substrate in the processing unit can be used as the above-mentioned reference.

[0131] It should be understood that all matters disclosed herein are intended to be illustrative and not restrictive. The above-described embodiments can be omitted, replaced, or changed in various ways without departing from the scope of the appended claims and their spirit.

Claims

1. A substrate processing apparatus that processes a substrate, comprising: a plurality of processing sections each of which performs a predetermined process; and a conveyance mechanism that conveys a conveyance object, a plurality of the conveyance objects being conveyed into the substrate processing apparatus in a predetermined conveyance order, the substrate processing apparatus further comprising a control section that acquires a process task for conveying a conveyance object by the conveyance mechanism to at least one of the processing sections and performing a process on the conveyance object, in a case where a conveyance object and a previously conveyed conveyance object that is previously conveyed into the substrate processing apparatus differ in the process task and the process tasks of the conveyance objects include a same process, the control section determines whether to perform the same process on the conveyance object in advance before the same process on the previously conveyed conveyance object is completed, before starting to convey the conveyance object to the processing section, in a case where the processing section that performs a process based on the process task is unique for the conveyance object and is repeated for the previously conveyed conveyance object, the control section determines whether to perform the same process in advance based on whether a predetermined time until the conveyance object is conveyed out of the processing section that is repeated is shorter than a predetermined time until the previously conveyed conveyance object reaches the processing section, in a case where the predetermined time until the conveyance object is conveyed out is shorter, the control section determines to perform the same process in advance.

2. The substrate processing apparatus according to claim 1, wherein the control section determines whether to perform the same process in advance based on whether the processing section that performs a process based on the process task is repeated between the conveyance object and the previously conveyed conveyance object, in a case where it is not repeated, the control section determines to perform the same process in advance.

3. The substrate processing apparatus according to claim 1, wherein in a case where a plurality of the processing sections that perform a process based on the process task are repeated between the conveyance object and the previously conveyed conveyance object, the control section determines whether to perform the same process in advance based on whether a predetermined time until the conveyance object is conveyed out of each of the processing sections that are repeated is shorter than a predetermined time until the previously conveyed conveyance object reaches the processing section, in a case where the predetermined time until the conveyance object is conveyed out is shorter in each of the processing sections that are repeated, the control section determines to perform the same process in advance.

4. The substrate processing apparatus according to any one of claims 1 to 3, further comprising: a waiting section in which a conveyance object waits, in a case where a conveyance object that is designated to be conveyed to the waiting section in a conveyance schedule satisfies a predetermined condition, the conveyance mechanism conveys the conveyance object without passing through the waiting section.

5. The substrate processing apparatus according to any one of claims 1 to 3, wherein wherein ​ ​ ​ ​ ​ ​ ​ ​ ​ 4. The substrate processing apparatus according to any one of claims 1 to 3, characterized by, ​ ​ ​ ​ In a case where a plurality of conveyance targets in a state capable of being conveyed by the conveyance mechanism are present in the substrate processing apparatus, the conveyance mechanism preferentially conveys a conveyance target that has not been processed by the processing section.

6. The substrate processing apparatus according to any one of claims 1 to 3, characterized in that The conveyance target is a mask substrate on which a prescribed pattern is formed and which is used for manufacturing of a mask.

7. A conveyance schedule creation method of creating a conveyance schedule of a conveyance target in a substrate processing apparatus that processes a substrate, The substrate processing apparatus includes: a plurality of processing sections each of which performs a prescribed processing; and a conveyance mechanism that conveys a conveyance target, a plurality of conveyance targets are conveyed into the substrate processing apparatus in a predetermined conveyance order, The conveyance schedule creation method includes the following steps: acquiring a process task for conveying a conveyance target to at least one of the processing sections by the conveyance mechanism and processing the conveyance target; and in a case where a conveyance target and a previously conveyed conveyance target that was previously conveyed into the substrate processing apparatus differ in the process task and the process tasks of the conveyance targets include the same processing, before starting to convey the conveyance target to the processing section, determining whether or not to perform the same processing for the conveyance target in advance of the same processing for the previously conveyed conveyance target being completed, in the step of the determination, for the conveyance target, in a case where the processing section that performs the processing based on the process task is single and is repeated with the processing section of the previously conveyed conveyance target, based on whether or not a predetermined time until the conveyance target is conveyed out from the repeated processing section is shorter than a predetermined time until the previously conveyed conveyance target reaches the processing section, determining whether or not to perform the advance processing, in a case where the predetermined time until the conveyance target is conveyed out is shorter, determining to perform the advance processing.

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